Air flotation transportation device for substrates
By employing an air-float transport method that alternates between positive and negative pressure seams in the substrate transport device, combined with an air duct and air pump system, the problems of complex structure and high cost of existing devices are solved, achieving low-cost micron-level substrate suspension transport and avoiding substrate damage.
Patent Information
- Application Number
- CN202423225709.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-12-26
AI Technical Summary
Existing substrate transport devices are complex in structure and expensive, making it difficult to achieve the micron-level substrate suspension height requirement. This results in substrates being prone to scratches, deformation, and localized stress concentration during transport.
An air flotation transport device that uses alternating positive and negative pressure seams, combined with positive and negative pressure air distribution channels, provides positive and negative airflow through an air pump, forming a simple air flotation transport structure and reducing costs.
This technology enables simple and low-cost air-float transport of substrates, ensuring the stability of the substrates at micron-level suspension heights, avoiding damage such as scratches and deformation, and improving the reliability of transport.
Smart Images
Figure CN223560746U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of substrate transportation of display panels, in particular to a substrate air floating transportation device. BACKGROUND
[0002] At present, in the transportation process of substrate (including glass substrate, flexible substrate, etc.) production and manufacturing, the traditional contact type (such as roller drive) transportation mode is prone to damage such as scratches, deformation and local stress concentration. Therefore, the current non-contact air floating transportation mode is adopted. Air floating transportation is the transportation of substrate in a suspended state by air outlet of air outlet hole.
[0003] However, the requirement of substrate suspension height is in microns, and the gas stability of air floating device is required to be high. In order to meet the requirement of substrate transportation in microns, the structure of existing air floating device is complex, which also leads to high manufacturing cost of existing air floating device.
[0004] Therefore, a substrate air floating transportation device is needed to solve the above problems. SUMMARY
[0005] The present application provides a substrate air floating transportation device, which is simple in structure and low in cost.
[0006] The first aspect of the present application discloses a substrate air floating transportation device, which comprises a positive pressure seam, a negative pressure seam, a positive pressure air distribution channel, a negative pressure air distribution channel, a positive pressure air inlet and a negative pressure air outlet; wherein the positive pressure seam and the negative pressure seam are alternately arranged on the air floating transportation platform; the positive pressure air distribution channel is connected with the positive pressure seam, and the positive pressure airflow enters the positive pressure seam after passing through the positive pressure air distribution channel; the negative pressure air distribution channel is connected with the negative pressure seam, and the negative pressure airflow enters the negative pressure air distribution channel after passing through the negative pressure seam; the positive pressure air inlet is arranged on the positive pressure air distribution channel, and the positive pressure gas of the air pump enters the positive pressure air distribution channel through the positive pressure air inlet; the negative pressure air outlet is arranged on the negative pressure air distribution channel, and the negative pressure gas flows into the air pump from the negative pressure air outlet after passing through the negative pressure air distribution channel.
[0007] In the above scheme, the positive pressure seam, the positive pressure air distribution channel and the positive pressure air inlet form a positive pressure air path, and the negative pressure seam, the negative pressure air distribution channel and the negative pressure air outlet form a negative pressure air path; the length of the positive pressure seam and the negative pressure seam is not limited. The structure is simple, and the cost of the air floating transportation device is low.
[0008] The air inlet or air outlet in the specification generally adopts a circular hole structure, and the circular hole structure is also used as an example in the drawings; but it is not limited to this, and other shapes can also be used.
[0009] In a possible implementation, the air floating transportation device comprises an upper layer plate, and the positive pressure joint and the negative pressure joint are arranged in the upper layer plate.
[0010] In the above scheme, it is intended to illustrate that the positive pressure joint and the negative pressure joint can be arranged in the upper layer plate.
[0011] In a possible implementation, the upper layer plate comprises a plurality of upper layer sub-plates, and any two adjacent upper layer sub-plates are configured as the positive pressure joint or the negative pressure joint.
[0012] In the above scheme, it is intended to illustrate a setting mode of the positive pressure joint and the negative pressure joint, that is, a joint formed by splicing two adjacent upper layer sub-plates; at this time, the length of the joint (the positive pressure joint and the negative pressure joint) can be equal to the length of the air floating transportation platform.
[0013] In a possible implementation, the positive pressure air distribution channel and the negative pressure air distribution channel are both groove type structures.
[0014] In the above scheme, an implementation structure of the positive pressure air distribution channel and the negative pressure air distribution channel is disclosed.
[0015] In a possible implementation, the air floating transportation device further comprises a lower layer plate, and the positive pressure air distribution channel and the negative pressure air distribution channel are arranged in the upper layer plate or the lower layer plate.
[0016] In the above scheme, it is intended to illustrate that the positive pressure air distribution channel and the negative pressure air distribution channel can be arranged in the upper layer plate or the lower layer plate. When arranged in the upper layer plate, the positive pressure air distribution channel and the negative pressure air distribution channel can be arranged at the bottom end of the upper layer plate (the surface far from the air floating transportation platform); when arranged in the lower layer plate, the positive pressure air distribution channel and the negative pressure air distribution channel can be arranged on the upper surface of the lower layer plate (the surface in contact with the upper layer plate).
[0017] In a possible implementation, one positive pressure joint corresponds to one positive pressure air distribution channel, and one negative pressure joint corresponds to one negative pressure air distribution channel.
[0018] In the above scheme, it is intended to illustrate the quantity relationship between the positive pressure joint and the positive pressure air distribution channel, and the quantity relationship between the negative pressure joint and the negative pressure air distribution channel. Of course, one positive pressure joint can also correspond to a plurality of positive pressure air distribution channels, and one negative pressure joint can also correspond to a plurality of negative pressure air distribution channels; however, compared with the above "one-to-one" scheme, the "one-to-one" scheme can have a simpler structure and can further reduce the cost.
[0019] In a possible implementation, one or more positive pressure air inlets are arranged on one positive pressure air distribution channel, and one or more negative pressure air outlets are arranged on one negative pressure air distribution channel.
[0020] In the above scheme, in order to make the air flow of the positive pressure air distribution channel and the negative pressure air distribution channel more uniform.
[0021] In a possible implementation, the positive pressure slit or the negative pressure slit has a slit width of 5 μm-50 μm.
[0022] In the above scheme, it is intended to illustrate that the slit width of the positive pressure slit and the negative pressure slit is in microns; far less than the width of the positive pressure air distribution channel and the negative pressure air distribution channel. In addition to being a through hole, the positive pressure slit and the negative pressure slit also play a throttling role, that is, they can control the speed and flow of the airflow.
[0023] In a possible implementation, the air floating transportation device further comprises a leveling structure, the leveling structure comprises a first mounting seat, a first adjusting rod, a locking nut, a second adjusting rod and a second mounting seat; wherein the first mounting seat is threadedly installed with the first adjusting rod, the first adjusting rod extending above the first mounting seat is threadedly installed with the locking nut, the second adjusting rod is threadedly installed in the top port of the first adjusting rod, the second mounting seat is sleeved on the second adjusting rod, and the second mounting seat is connected with the first adjusting rod through a spring.
[0024] In the above scheme, the leveling structure has two ways of coarse leveling and fine leveling, the coarse leveling is used for leveling the transportation platform when the air floating transportation device is installed through the first adjusting rod; the fine leveling can achieve micron-level leveling, and the second adjusting rod can be used for further adjusting the fine transportation platform.
[0025] In a possible implementation, the second adjusting rod is a columnar body, the two ends of the second adjusting rod are respectively provided with threads, and the port of the second adjusting rod is provided with an operation hole.
[0026] In the above scheme, the operation hole is arranged on the second adjusting rod, and a leveling operation hole is arranged on the plane of the transportation platform for cooperation, so that the user can conveniently fine-tune the flatness of the transportation platform in the vertical direction. However, the number of leveling structures is not limited, and the higher the leveling accuracy requirement is, the more the number of leveling structures is.
[0027] The air floating transportation device in the present application has simple structure and low cost. BRIEF DESCRIPTION OF DRAWINGS
[0028] Figure 1 FIG. 1 is a structural schematic diagram of an air floating transportation device for a substrate disclosed in the present application;
[0029] Figure 2 FIG. 3 is another structural schematic diagram of an air floating transportation device for a substrate disclosed in the present application;
[0030] Figure 3 FIG. 4 is still another structural schematic diagram of an air floating transportation device for a substrate disclosed in the present application;
[0031] Figure 4A schematic diagram of a lower plate structure of a substrate air floating transportation device disclosed in the specification of the present application;
[0032] Figure 5 A schematic diagram of a three-dimensional structure of a substrate air floating transportation device disclosed in the specification of the present application;
[0033] Figure 6 A schematic diagram of a leveling structure of a substrate air floating transportation device disclosed in the specification of the present application;
[0034] Figure 7 A schematic diagram of a cross section of a leveling structure of a substrate air floating transportation device disclosed in the specification of the present application;
[0035] Figure 8 A schematic diagram of a part of a leveling structure of a substrate air floating transportation device disclosed in the specification of the present application.
[0036] Figures 1-8 Center: leveling structure 2, positive pressure gap 3, negative pressure gap 4, upper layer sub-plate 101a, upper layer sub-plate 101b, upper layer sub-plate 101c, lower layer plate 102, leveling operation hole 103, positive pressure connector 104, negative pressure connector 105, positive pressure gas distribution channel 106, negative pressure gas distribution channel 107, positive pressure air inlet 108, negative pressure air outlet 109, plate mounting hole 110, leveling structure mounting hole 111a and 111b; first mounting seat 201, first adjusting rod 202, locking nut 203, second adjusting rod 204, second mounting seat 205, spring 206, working outer edge 207, operation hole 208. DETAILED DESCRIPTION
[0037] In order for those skilled in the art to better understand the technical solutions in the specification, the technical solutions in the embodiments of the specification will be clearly and completely described below in combination with the drawings in the embodiments of the specification. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments.
[0038] In the description of the embodiments of the present application, the words such as "for example" or "for instance" are used to represent an example, illustration or description. Any embodiment or design scheme described as "for example" or "for instance" in the embodiments of the present application should not be interpreted as more preferred or more advantageous than other embodiments or design schemes. Rather, the words such as "for example" or "for instance" are intended to present the relevant concept in a specific manner.
[0039] The specification of the present application discloses a substrate air floating transportation device, which transports a substrate. The substrate in the specification can be a substrate in an OLED panel, in which case the flying height requirement for the substrate is generally 150 μm ± 30 μm.
[0040] The air flotation transport device includes a positive pressure slit, a negative pressure slit, a positive pressure air distribution channel, a negative pressure air distribution channel, a positive pressure air inlet, and a negative pressure air outlet. The positive pressure slit and negative pressure slit are alternately arranged on the air flotation transport platform. The positive pressure air distribution channel is connected to the positive pressure slit, allowing positive pressure airflow to enter the positive pressure slit after passing through the positive pressure air distribution channel. The negative pressure air distribution channel is connected to the negative pressure slit, allowing negative pressure airflow to enter the negative pressure air distribution channel after passing through the negative pressure slit. A positive pressure air inlet is provided on the positive pressure air distribution channel, through which positive pressure gas from the air pump enters the positive pressure air distribution channel. A negative pressure air outlet is provided on the negative pressure air distribution channel, allowing negative pressure gas to flow into the air pump from the negative pressure air outlet after passing through the negative pressure air distribution channel.
[0041] At this point, the air flotation transport device can be manufactured using either a single-layer plate or a double-layer plate. Single-layer plates can be produced using methods such as 3D printing, while double-layer plates are relatively cheaper. Double-layer plates can also be manufactured using simple machining methods. This manual will use a double-layer plate as an example, but it is not a limitation.
[0042] Furthermore, positive and negative pressure seams are one implementation method described in this specification; the seam structure in this specification can also consist entirely of positive pressure seams without negative pressure seams, which can also meet the requirements of the substrate transport section. This specification will still describe the implementation method using positive and negative pressure seams, but it is not limiting in this regard.
[0043] like Figure 1 The air flotation transport device shown has upper sub-plates 101a and 101b joined together to form a positive pressure joint 3; and upper sub-plates 101b and 101c joined together to form a negative pressure joint 4. There is also one other positive pressure joint and one sub-plate not marked in the figure. The entire air flotation transport device is supported and leveled by the leveling structure 2. The figure only shows an example with two positive pressure joints and one negative pressure joint, with the negative pressure joint located between the two positive pressure joints; however, it can also have three positive pressure joints and two negative pressure joints, or four positive pressure joints and three negative pressure joints, with the negative pressure joint located between the two positive pressure joints and the positive and negative pressure joints alternating. This specification does not limit the number of positive and negative pressure joints.
[0044] The above example discloses a positive pressure air path formed by a positive pressure seam, a positive pressure air distribution channel, and a positive pressure air inlet, and a negative pressure air path formed by a negative pressure seam, a negative pressure air distribution channel, and a negative pressure air outlet; and discloses the lengths of the positive and negative pressure seams. The structure is simple, and the cost of the air flotation transport device is low.
[0045] In one example, the air flotation transport device includes an upper plate, a positive pressure seam, and a negative pressure seam disposed in the upper plate.
[0046] At this point, the lengths of the positive and negative pressure seams can be set to be the same or different; this can be set according to the substrate transportation requirements of the air flotation transport platform.
[0047] Furthermore, the lengths of the positive and negative pressure seams may or may not be equal to the length of the air-floating transport platform. Regardless of whether the lengths of the positive and negative pressure seams are equal to the length of the transport platform, the air-floating transport platform described in this specification enables the substrate to be transported smoothly. Compared to an air-floating platform with openings in the transport platform, the seam structure described in this specification enables the substrate to be transported more smoothly.
[0048] In one example, the upper panel includes multiple upper sub-panels, and any two adjacent upper sub-panels are configured with either a positive pressure joint or a negative pressure joint.
[0049] At this point, a seam is formed between any two adjacent upper sub-boards, and this seam can be installed; the lengths of both the positive and negative pressure seams are equal to the length of the air flotation transport platform.
[0050] like Figure 1 As shown, upper sub-slabs 101a, 101b, and 101c are all upper sub-slabs, forming positive pressure joint 3 and negative pressure joint 4. This is one way to set positive and negative pressure joints on the upper sub-slabs; other methods can also be used, and there are no restrictions on this. Figure 5 As shown, positive pressure joint 3 is a joint formed by two upper sub-boards, and negative pressure joint 4 is also a joint formed by two upper sub-boards.
[0051] In one example, both the positive pressure air distribution channel and the negative pressure air distribution channel are groove-shaped structures.
[0052] At this point, the grooved structure is easy to manufacture, which can further reduce the cost of the air flotation transport device. For example... Figure 3 As shown, both the positive pressure air distribution channel 106 and the negative pressure air distribution channel 107 are located on the lower plate 102.
[0053] In one example, the air flotation transport device further includes a lower plate, and the positive pressure air distribution channel and the negative pressure air distribution channel are disposed on the upper plate or the lower plate.
[0054] This illustrates that both positive and negative pressure air distribution channels can be located on the upper shelf or both on the lower shelf. When located on the upper shelf, they can be positioned at the bottom (the side furthest from the air flotation transport platform), with only ventilation openings (inlets and outlets) on the lower shelf connecting to the air sources (positive and negative). When located on the lower shelf, both positive and negative pressure air distribution channels can be located on the upper surface (the side in contact with the upper shelf). Furthermore, the positive and negative pressure air distribution channels can be located on different shelves, i.e., the positive pressure channel on the upper shelf and the negative pressure channel on the lower shelf; or the positive pressure channel on the lower shelf and the negative pressure channel on the upper shelf.
[0055] In addition, the present specification describes the positive pressure air distribution channel and the negative pressure air distribution channel as being located on the lower layer plate. Figure 3 As shown in the figure, the positive pressure air distribution channel 106 and the negative pressure air distribution channel 107 are both located on the lower layer plate 102. A plurality of positive pressure air inlets 108 are arranged on one positive pressure air distribution channel 106, and a plurality of negative pressure air outlets 109 are arranged on one negative pressure air distribution channel 107. One positive pressure air inlet corresponds to one positive pressure connector, and one negative pressure air outlet corresponds to one negative pressure connector. As shown in the figure, Figure 2 the positive pressure connector 104 is tightly connected with the positive pressure air inlet, and the negative pressure connector 105 is tightly connected with the negative pressure air outlet; the positive pressure connector 104 is connected with the positive pressure air source through a pipeline, and the negative pressure connector 105 is connected with the negative pressure air source through a pipeline, and there are other electronic circuits in between, which are not shown in the figure and will not be further described in the present specification. As shown in the figure, Figure 5 a plurality of positive pressure air inlets 108 are arranged on one positive pressure air distribution channel 106 (one is shown in the figure), and a plurality of negative pressure air outlets 109 are arranged on one negative pressure air distribution channel 107 (one is shown in the figure). As shown in the figure, Figure 5 a plurality of positive pressure air inlets 108 are arranged on one positive pressure air distribution channel 106 (one is shown in the figure), and a plurality of negative pressure air outlets 109 are arranged on one negative pressure air distribution channel 107 (one is shown in the figure). As shown in the figure, Figure 5 a plurality of positive pressure air inlets 108 are arranged on one positive pressure air distribution channel 106 (one is shown in the figure), and a plurality of negative pressure air outlets 109 are arranged on one negative pressure air distribution channel 107 (one is shown in the figure). As shown in the figure, Figure 4 a plurality of positive pressure air inlets 108 are arranged on one positive pressure air distribution channel 106 (one is shown in the figure), and a plurality of negative pressure air outlets 109 are arranged on one negative pressure air distribution channel 107 (one is shown in the figure). As shown in the figure,
[0056] In one example, one positive pressure slit corresponds to one positive pressure air distribution channel, and one negative pressure slit corresponds to one negative pressure air distribution channel.
[0057] In this example, the number relationship between the positive pressure slit and the positive pressure air distribution channel, and the number relationship between the negative pressure slit and the negative pressure air distribution channel are described. Of course, one positive pressure slit can also correspond to a plurality of positive pressure air distribution channels, and one negative pressure slit can also correspond to a plurality of negative pressure air distribution channels; however, compared with the above-mentioned "one-to-one" scheme, the "one-to-one" scheme can have a simpler structure and can further reduce costs. As shown in the figure, Figure 5 the positive pressure slit 3 and the positive pressure air distribution channel are in a "one-to-one" relationship, and the negative pressure slit 4 and the negative pressure air distribution channel 106 are in a "one-to-one" relationship.
[0058] In one example, a plurality of positive pressure air inlets are arranged on one positive pressure air distribution channel, and a plurality of negative pressure air outlets are arranged on one negative pressure air distribution channel.
[0059] At this time, in order to make the air flow of the positive pressure air distribution channel and the negative pressure air distribution channel more uniform. As shown in the figure, Figure 3 which has been described above and will not be described again here. Also as shown in the figure, Figure 4As shown, one or more positive pressure air inlet ports 108 are arranged on the positive pressure air distribution channel 106, and one or more negative pressure air outlet ports 109 are arranged on the negative pressure air distribution channel 107. When the length of the positive pressure slit and the negative pressure slit is relatively short, one positive pressure air inlet port 108 or one negative pressure air outlet port 109 can meet the demand; when the length of the positive pressure slit and the negative pressure slit is relatively long, multiple positive pressure air inlet ports 108 and multiple negative pressure air outlet ports 109 are needed; the actual situation can be selected according to the actual situation.
[0060] In one example, the slit width of the positive pressure slit or the negative pressure slit is 5 μm-50 μm.
[0061] At this time, it is intended to illustrate that the slit width of the positive pressure slit and the negative pressure slit is micron level; it is far smaller than the width of the positive pressure air distribution channel and the negative pressure air distribution channel. In addition to being a through hole, the positive pressure slit and the negative pressure slit also play a throttling role, that is, they can control the speed and flow of the airflow. The slit width here is only a preferred example, but it is not limited thereto, and can be adjusted according to the working conditions.
[0062] In one example, the air floating transportation device further comprises a leveling structure 2. As shown in Figures 6-8 The leveling structure 2 comprises a first mounting seat 201, a first adjusting rod 202, a locking nut 203, a second adjusting rod 204, and a second mounting seat 205; wherein the first adjusting rod 202 is threadedly mounted on the first mounting seat 201, the locking nut 203 is threadedly mounted on the first adjusting rod 202 extending above the first mounting seat 201, the second adjusting rod 204 is threadedly mounted in the top port of the first adjusting rod 202, the second mounting seat 205 is sleeved on the second adjusting rod 204, and the second mounting seat 205 is connected with the first adjusting rod 202 through a spring 206.
[0063] At this time, the leveling structure has two ways of coarse leveling and fine leveling, the coarse leveling is used for leveling the transportation platform when installing the air floating transportation device through the working outer edge 207 on the first adjusting rod; the fine leveling can achieve micron-level leveling, and the second adjusting rod can be used for further adjusting the fine transportation platform.
[0064] In one example, the second adjusting rod 204 is a cylindrical body, the two ends of the second adjusting rod 204 are respectively provided with threads, and the port of the second adjusting rod 204 is provided with an operation hole 208. As shown in Figure 1 The leveling operation hole 103 is reserved for the fine leveling stage of the leveling structure, and the user can directly adjust the flatness of the air floating transportation platform 1 in the vertical direction; as shown in Figure 8 The second mounting seat 205 is centrally provided with a through hole, forming a leveling structure as shown in Figure 7 The second mounting seat 205 can be threadedly fastened and connected with the lower layer plate 102.
[0065] At this time, the second adjusting rod is provided with an operation hole 208, and a leveling operation hole is arranged on the plane of the transportation platform for use in cooperation, so as to facilitate the user to fine-tune the flatness of the transportation platform in the vertical direction. However, the number of leveling structures is not limited, and generally speaking, the more the number of adjusting structures 2, the higher the precision of leveling.
[0066] In addition, in order to ensure the air tightness, the upper plate and the lower plate are provided with a plurality of plate mounting holes 110, which are used to fasten the upper plate and the lower plate. Figure 5 As shown in the figure, a plurality of plate mounting holes 110 are arranged on the upper plate and the lower plate, which are used to fasten the upper plate and the lower plate; the fastening connection between the upper plate and the lower plate is also conducive to keeping the width of the positive pressure gap and the negative pressure gap stable. And leveling structure mounting holes 111a and 111b are arranged, which are used in cooperation with the second mounting seat to fix the leveling structure at the bottom end of the lower plate.
[0067] The principle of the air floating transportation structure shown in the specification is that the airflow of the positive pressure air source enters the positive pressure air distribution channel through the positive pressure air inlet, and then flows out through the positive pressure gap connected with the positive pressure air distribution channel; the airflow of the negative pressure air source enters the negative pressure air distribution channel from the negative pressure gap, and then flows out through the negative pressure air outlet; the leveling structure can adjust the flatness of the air floating transportation device, and can fine-tune the flatness of the air floating transportation device in the vertical direction.
[0068] The air floating transportation device in the application has simple structure and low cost.
[0069] In the description of the application, it should be understood that the positive direction of "X" in the drawings represents the front, and correspondingly, the reverse direction of "X" represents the rear; the positive direction of "Y" represents the right, and correspondingly, the reverse direction of "Y" represents the left; the positive direction of "Z" represents the upper, and correspondingly, the reverse direction of "Z" represents the lower, and the directions or positional relationships indicated by the terms "X", "Y" and "Z" are based on the directions or positional relationships shown in the drawings, which are only for the convenience of describing the application and simplifying the description, and cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the application. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.
[0070] In the description of the present application, it should be noted that the terms "upper", "lower", and the like are used for indicating the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. Unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting" should be interpreted broadly, for example, can be fixed connection, can also be detachable connection, or integral connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.
[0071] It should be noted that in the present application, relational terms such as "first" and "second" and the like are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, so that a process, method, article or apparatus including a series of elements includes not only those elements, but also other elements not explicitly listed, or other elements inherent in such a process, method, article or apparatus. Without more limitations, the element defined by the statement "comprising a" does not exclude the presence of other identical elements in the process, method, article or apparatus including the element.
[0072] The above is only a specific embodiment of the present application, which enables those skilled in the art to understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features applied herein.
Claims
1. An air floatation transport device of a substrate, characterized by, The air floating transportation device comprises a positive pressure slit, a negative pressure slit, a positive pressure air distribution channel, a negative pressure air distribution channel, a positive pressure air inlet and a negative pressure air outlet. The positive pressure slit and the negative pressure slit are alternately arranged on the air floating transportation platform. The positive pressure air distribution channel is connected with the positive pressure slit, and the positive pressure air flow enters the positive pressure slit after passing through the positive pressure air distribution channel; the negative pressure air distribution channel is connected with the negative pressure slit, and the negative pressure air flow enters the negative pressure air distribution channel after passing through the negative pressure slit. The positive pressure air inlet is arranged on the positive pressure air distribution channel, and the positive pressure gas of the air pump enters the positive pressure air distribution channel through the positive pressure air inlet; the negative pressure air outlet is arranged on the negative pressure air distribution channel, and the negative pressure air flow enters the air pump from the negative pressure air outlet after passing through the negative pressure air distribution channel.
2. The air floatation transport device according to claim 1, wherein The air floating transportation device comprises an upper plate, and the positive pressure slit and the negative pressure slit are arranged in the upper plate.
3. The air floatation transport device of claim 2, wherein, The upper plate comprises a plurality of upper sub-plates, and any two adjacent upper sub-plates are configured as the positive pressure slit or the negative pressure slit.
4. The air floatation transport device of claim 2, wherein, The positive pressure air distribution channel and the negative pressure air distribution channel are both groove type structures.
5. The air floatation transport device of claim 4, wherein, The air floating transportation device further comprises a lower plate, and the positive pressure air distribution channel and the negative pressure air distribution channel are arranged in the upper plate or the lower plate.
6. The air floatation transport device according to any one of claims 1 to 5, characterized in that, One positive pressure slit corresponds to one positive pressure air distribution channel, and one negative pressure slit corresponds to one negative pressure air distribution channel.
7. The air floatation transport device according to any one of claims 1 to 5, characterized by One or more positive pressure air inlets are arranged on one positive pressure air distribution channel, and one or more negative pressure air outlets are arranged on one negative pressure air distribution channel.
8. The air floatation transport device of claim 1, wherein, The slit width of the positive pressure slit or the negative pressure slit is 5-50 microns.
9. The air floatation transport device of claim 1, wherein, The air floating transportation device further comprises a leveling structure, and the leveling structure comprises a first mounting seat, a first adjusting rod, a locking nut, a second adjusting rod and a second mounting seat. The first adjusting rod is threadedly mounted on the first mounting seat, the locking nut is threadedly mounted on the first adjusting rod extending above the first mounting seat, the second adjusting rod is threadedly mounted in the top port of the first adjusting rod, the second mounting seat is sleeved on the second adjusting rod, and the second mounting seat is connected with the first adjusting rod through a spring.
10. The air floatation transport device of claim 9, wherein, The second adjusting rod is a cylindrical body, threads are arranged at two ends of the second adjusting rod, and an operation hole is arranged at the port of the second adjusting rod.