Solid-state LED source bottle

Abstract

The utility model belongs to the technical field of LED chips, and discloses a solid-state LED source bottle which comprises a bottle body, a containing space used for containing a solid-state MO source is arranged in the bottle body, the upper end of the bottle body is connected with an air inlet connector and an air outlet connector, and an isolating layer is arranged on the inner wall of the bottle body. The isolation layer is arranged on the inner wall of the bottle body, so that a solid MO source can be effectively prevented from being bonded with the inner wall of the bottle body, the probability that the solid MO source is hardened to form a fixed channel is reduced, the source efficiency is improved, meanwhile, the stable source efficiency is ensured, and the influence on external crystal growth is reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to LED chip technical field, concretely relates to a solid state LED source bottle. BACKGROUND

[0002] MO source (Metalorganic Source) refers to the high purity metal organic compound (typical main material includes trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, trimethyl aluminum etc.) used as basic material in MOCVD epitaxy technology, is currently widely used in LED epitaxial wafer manufacturing industry. In the semiconductor manufacturing process, the accurate supply of MO source is very important. MO source needs to be stored in source bottle with high cleanliness and high encapsulation effect and inert gas protection. With the use cycle advancing, solid MO source (such as trimethyl indium, dimethyl magnesium) can be bonded with the inner wall of the source bottle of stainless steel material, increase the probability of solid MO source hardening, easily form fixed channel inside, then cannot guarantee the source amount and source efficiency carried by carrier gas are always consistent, influence epitaxial MQW / P layer doping and quality, thereby influence light efficiency. Therefore, the present urgent need provides a solid state LED source bottle to solve the problem of solid MO source bonding with the inner wall of the source bottle. SUMMARY

[0003] The utility model provides a solid state LED source bottle in view of the deficiency in the background art, adds a layer of isolation layer in the source bottle, reduces the probability of solid MO source hardening to form fixed channel, improves source efficiency and guarantees stable source efficiency, thereby reduces the influence on epitaxial growth.

[0004] To achieve the above object, the utility model technical solution is as follows:

[0005] A solid state LED source bottle, characterized by: including bottle body, the bottle body is internally provided with accommodating space for accommodating solid MO source, the upper end of bottle body is connected with gas inlet joint and gas outlet joint, the inner wall of bottle body is equipped with isolation layer.

[0006] Preferably, the isolation layer is a polytetrafluoroethylene coating or an Al2O3 ceramic layer or a SiN ceramic layer.

[0007] Preferably, the accommodating space includes an upper cavity and a lower cavity, the lower cavity is below the upper cavity, and a filter screen is arranged between the upper cavity and the lower cavity, the upper cavity is in communication with the gas inlet of the gas inlet joint, and an inner gas outlet pipe is in communication between the lower cavity and the gas outlet joint.

[0008] Preferably, the inner diameter of the lower cavity is smaller than the inner diameter of the upper cavity.

[0009] Preferably, a gas baffle is arranged at the top end of the inner wall of the bottle body below the gas inlet of the gas inlet joint, and the outer diameter of the gas baffle is greater than the hole diameter of the gas inlet.

[0010] Preferably, the vertical section of the air baffle is arc-shaped and is connected to the top end of the inner wall of the bottle body through a connecting rod.

[0011] Preferably, an air inlet pipe is connected to the outer end of the air inlet connector, and an outer air outlet pipe is connected to the outer end of the air outlet connector, and the air inlet pipe and the outer air outlet pipe are both provided with a control valve.

[0012] Preferably, the top end of the bottle body is further provided with a material filling port.

[0013] Compared with the prior art, the utility model has the beneficial effects as follows:

[0014] (1) The inner wall of the bottle body is provided with an isolation layer, which can effectively avoid the adhesion of the solid MO source to the inner wall of the bottle body, reduce the probability of the solid MO source being hardened to form a fixed channel, improve the source efficiency and ensure the stability of the source efficiency, thereby reducing the influence on the epitaxial wafer.

[0015] (2) The air baffle is arranged directly below the air inlet, which not only can avoid the formation of a groove by the airflow directly blowing the solid MO source, but also can ensure that the airflow is scattered and uniformly distributed in the upper cavity. BRIEF DESCRIPTION OF DRAWINGS

[0016] Other features, objects and advantages of the utility model will become more apparent through reading the following detailed description of the non-limiting embodiments with reference to the accompanying drawings.

[0017] Figure 1 is a structural schematic view of the utility model;

[0018] Figure 2 is a working state carrier gas flow direction schematic view of the utility model;

[0019] In the drawings: 1, bottle body, 2, air inlet connector, 201, air inlet, 3, air outlet connector, 4, isolation layer, 5, upper cavity, 6, lower cavity, 7, filter screen, 8, inner air outlet pipe, 9, air baffle, 10, connecting rod, 11, air inlet pipe, 12, outer air outlet pipe, 13, control valve, 14, material filling port. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be apparently and completely described below with reference to the accompanying drawings in the embodiments of the utility model. Obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments.

[0021] In the description of the utility model, need understanding is, the term "middle", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom" "internal", "external" and so on indicate the orientation or positional relationship is based on the orientation or positional relationship shown in the drawing, is only for the convenience of describing the utility model and simplifying the description, and is not indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0022] In the utility model, unless another explicit provision and limitation, the term "set", "installation", "connection", "connection", "fix" and so on term should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, can be mechanical connection, can be direct connection, also can be indirectly connected through the intermediate medium.

[0023] As Figure 1 And Figure 2As shown in the figure, a solid LED source bottle includes a bottle body 1, the bottle body is made of stainless steel, the bottle body has a containing space for containing a solid MO source inside, the upper end of the bottle body is connected with an air inlet joint 2 and an air outlet joint 3, an isolation layer 4 is arranged on the inner wall of the bottle body, the isolation layer is a polytetrafluoroethylene coating or an Al2O3 ceramic layer or a SiN ceramic layer, the polytetrafluoroethylene coating has a very low friction coefficient and can effectively prevent adhesion, the Al2O3 ceramic layer or the SiN ceramic layer has a smooth inner wall, high chemical stability and is not easy to form a fixed channel, and indium and the inner wall of the ceramic are also not easy to stick together, so that the same temperature, pressure and flow can be used to uniformly output the trimethyl indium, and clumping is not generated, at the same time, the maintenance of the machine can be reduced, the production cycle is prolonged, the concentration of the trimethyl indium required by the mass production process can be maintained during the mass production process, the light efficiency is low due to the high and low concentration, and the light efficiency of the product produced in the whole production cycle is improved. The lower part of the containing space is in a reverse conical shape, the containing space includes an upper cavity 5 and a lower cavity 6, the lower cavity is located below the upper cavity and is provided with a filter screen 7 between the upper cavity, the solid MO source is arranged above the filter screen and in the upper cavity, the filter screen can block the solid MO source, the upper cavity is in communication with the air inlet port 201 of the air inlet joint, the lower cavity is in communication with the air outlet joint, and an inner air outlet pipe 8 is arranged between the lower cavity and the air outlet joint, the inner diameter of the lower cavity is smaller than that of the upper cavity, the vertical section of the lower cavity is in a reverse conical shape, and the inner air outlet pipe is arranged at the middle position of the bottom of the lower cavity. The outer end of the air inlet joint is connected with an air inlet pipe 11, the outer end of the air outlet joint is connected with an outer air outlet pipe 12, control valves 13 are arranged on the air inlet pipe and the outer air outlet pipe, so that the air inlet amount and the air outlet amount can be controlled, and a material filling port 14 is further arranged at the top end of the bottle body and used for filling the solid MO source. When the carrier gas enters the bottle body through the air inlet port of the air inlet joint, the carrier gas contacts the MO source through the upper cavity, the carrier gas is dispersed and flows after passing through the filter screen, enters the lower cavity, and carries the solid MO source sublimation vapor into the MOCVD equipment through the inner air outlet pipe, the air outlet joint and the outer air outlet pipe.

[0024] As Figure 1 shown, a gas baffle 9 is arranged below the air inlet port of the air inlet joint at the top end of the inner wall of the bottle body, the outer diameter of the gas baffle is greater than the hole diameter of the air inlet port, the vertical section of the gas baffle is in an arc shape, the concave surface faces upwards and is connected with the top end of the inner wall of the bottle body through a connecting rod 10, the gas baffle can not only avoid the formation of a groove by the direct blowing of the gas flow to the solid MO source, but also can ensure that the gas flow is dispersed and uniformly distributed in the upper cavity.

[0025] The working principle of the utility model is as follows:

[0026] As Figure 1 and Figure 2As shown, in actual use, the solid MO source is filled through the material filling port 14, and carrier gas is introduced into the bottle 1 through the inlet pipe 11 and inlet connector 2. After being blocked by the baffle plate 9, the carrier gas diffuses evenly to its outer periphery and enters the upper cavity 5, where it contacts the MO source in the upper cavity. After passing through the filter screen 7, the carrier gas disperses and flows, making more thorough contact with the MO source, and enters the lower cavity. The sublimation vapor carrying the solid MO source is then introduced into the MOCVD equipment through the inner outlet pipe 8, outlet connector 3, and outer outlet pipe 12. Because the inner wall of the bottle 1 is equipped with an isolation layer 4, it can effectively prevent the solid MO source from sticking to the inner wall of the bottle, reduce the probability of the solid MO source forming a fixed channel, improve the source efficiency while ensuring the source efficiency is stable, and thus reduce the impact on the external elongation crystal.

[0027] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all changes falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model.

Claims

1. A solid-state LED source bottle, characterized in that: The device includes a bottle body, which has an internal space for accommodating a solid MO source. An air inlet connector and an air outlet connector are connected to the upper end of the bottle body, and an isolation layer is provided on the inner wall of the bottle body.

2. The solid-state LED source bottle as described in claim 1, characterized in that: The isolation layer is a polytetrafluoroethylene coating, an Al2O3 ceramic layer, or a SiN ceramic layer.

3. A solid-state LED source bottle as described in claim 1, characterized in that: The accommodating space includes an upper cavity and a lower cavity. The lower cavity is located below the upper cavity and is provided with a filter screen between them. The upper cavity is connected to the air inlet of the air inlet connector, and the lower cavity is connected to the air outlet connector via an internal air outlet pipe.

4. A solid-state LED source bottle as described in claim 3, characterized in that: The inner diameter of the lower cavity is smaller than the inner diameter of the upper cavity.

5. A solid-state LED source bottle as described in claim 3, characterized in that: An air baffle is provided at the top of the inner wall of the bottle, directly below the air inlet of the air inlet connector, and the outer diameter of the air baffle is larger than the diameter of the air inlet.

6. A solid-state LED source bottle as described in claim 5, characterized in that: The vertical cross-section of the baffle plate is arc-shaped and is connected to the top of the inner wall of the bottle via a connecting rod.

7. A solid-state LED source bottle as described in claim 3, characterized in that: The outer end of the air inlet connector is connected to an air inlet pipe, and the outer end of the air outlet connector is connected to an air outlet pipe. Both the air inlet pipe and the air outlet pipe are equipped with control valves.

8. A solid-state LED source bottle as described in claim 1, characterized in that: The top of the bottle is also provided with a material filling port.

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