Automatic oiling device

Abstract

The utility model discloses an automatic oil injection device, which is used for injecting lubricating oil to a CVD (chemical vapor deposition) heating plate lifting device and comprises an upper shell, a controller, a power component, an oil storage tank and an oil pipe, the oil storage tank is used for storing lubricating oil; one end of the oil pipe is communicated with the oil storage tank, and the other end is connected with the heating disc lifting device; the controller is electrically connected with the power assembly, part of the structure of the power assembly and the controller are arranged in the upper shell, and the other part of the structure of the power assembly extends out of the upper shell and extends into the oil storage tank. And the power is applied to the lubricating oil in the oil storage tank under the control of the controller, so that the lubricating oil is automatically injected into the heating disc lifting device through the oil pipe. According to the utility model, labor investment can be reduced, and maintenance efficiency is improved.

Description

Technical Field

[0001] This utility model relates to semiconductor process equipment, and more particularly to an automatic oil injection device. Background Technology

[0002] In CVD (Chemical Vapor Deposition) equipment, the lifting mechanism of the heating plate uses a sliding screw to move the heating plate up and down. This sliding screw slides continuously at high temperatures, which gradually wears down and affects its sliding performance. Therefore, it is necessary to periodically add lubricating oil to the sliding screw to maintain its sliding performance. However, existing lubrication devices require manual squeezing of the oil gun, and the operating space of the equipment is relatively small, making it inconvenient for operators and resulting in low work efficiency. Utility Model Content

[0003] The purpose of this invention is to overcome the above-mentioned technical deficiencies and provide an automatic oiling device to reduce manual labor and improve production efficiency.

[0004] The automatic oil injection device provided by this utility model is used to add lubricating oil to the heating plate lifting device of CVD. The automatic oil injection device includes: an upper shell, a controller, a power component, an oil tank, and an oil pipe; the oil tank is used to store lubricating oil; one end of the oil pipe is connected to the oil tank, and the other end is connected to the heating plate lifting device; the controller is electrically connected to the power component, part of the structure of the power component and the controller are disposed inside the upper shell, and another part of the structure of the power component extends out of the upper shell and into the oil tank, so that under the control of the controller, power is applied to the lubricating oil in the oil tank, so that the lubricating oil is automatically injected into the heating plate lifting device through the oil pipe.

[0005] Furthermore, the oil storage tank is located below the upper shell and is detachably and sealed to the upper shell.

[0006] Furthermore, the power assembly includes a gear motor, a piston pusher, a piston, and a screw; the piston is disposed in the oil storage tank and is slidably connected to the oil storage tank; the piston pusher is fixedly connected to the piston, and the piston pusher is sleeved on the screw and is threadedly connected to the screw; the screw is connected to the output shaft of the gear motor; when the gear motor rotates, it drives the screw to rotate, thereby moving the piston pusher, which in turn pushes the piston to force the oil in the oil storage tank into the oil pipe.

[0007] Furthermore, a rotation count monitoring module is provided between the controller and the gear motor. The rotation count monitoring module is used to obtain the rotation count of the gear motor and send the rotation count to the controller.

[0008] Furthermore, the automatic oiling device also includes a control button electrically connected to the controller, which is used by the user to input the oiling amount and oiling cycle for each cycle to the controller.

[0009] Furthermore, the automatic oiling device also includes a display screen for displaying working information.

[0010] Furthermore, the automatic oil filling device also includes a lithium battery, which is disposed inside the upper housing and electrically connected to the controller, power component, control button, and display screen. The lithium battery is used to power the controller, power component, control button, and display screen.

[0011] Furthermore, the lithium battery is detachably connected to the upper casing.

[0012] Furthermore, the automatic oiling device also includes an indicator light, a sound hole, and a buzzer, with the indicator light and sound hole located on the upper housing.

[0013] Furthermore, the oil pipe includes a pipe body, an adapter, and an oil injection head. The pipe body is connected to the oil storage tank via the adapter, and the oil injection head is connected to the screw oil injection hole of the heating plate lifting device.

[0014] The automatic oiling device provided by this utility model can reduce manual labor and improve production efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of the automatic oil injection device of this utility model. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0017] This application provides an automatic oiling device for adding lubricating oil to the heating plate lifting device of CVD, including an upper housing 30, a controller 50, a power component 70, an oil storage tank 20, and an oil pipe 40.

[0018] In this embodiment, the upper housing 30 can be made of a high-temperature resistant and waterproof material, such as polytetrafluoroethylene (PTFE) or polyphenylene sulfide (PPS).

[0019] In this embodiment, the oil storage tank 20 is used to store lubricating oil. One end of the oil pipe 40 is connected to the oil storage tank 20, and the other end is connected to the heating plate lifting device so that the lubricating oil can be transported from the oil storage tank 20 to the heating plate lifting device under the action of the power component 70.

[0020] In this embodiment, the controller 50 is electrically connected to the power component 70. Part of the structure of the power component 70 and the controller 50 are disposed inside the upper housing 30. Another part of the structure of the power component 70 extends out of the upper housing 30 and into the oil storage tank 20, so that under the control of the controller 50, power is applied to the lubricating oil in the oil storage tank 20 so that the lubricating oil is automatically injected into the heating plate lifting device through the oil pipe 40.

[0021] Specifically, the automatic oiling device can be suspended outside the CVD chamber, and the oil pipe 40 can be located at the bottom of the automatic oiling device, connecting to the screw oiling hole of the heating plate lifting device. This application achieves automatic lubrication through the power assembly 70, reducing manual labor and improving production efficiency.

[0022] In this embodiment, the oil storage tank 20 is located below the upper shell 30 and is detachably sealed to the upper shell 30.

[0023] In this embodiment, the power assembly 70 may include a geared motor 71, a piston pusher 72, a piston 73, and a screw 74.

[0024] The piston 73 is disposed in the oil storage tank 20 and is slidably connected to the oil storage tank 20. The piston pusher 72 is fixedly connected to the piston 73, and the piston pusher 72 is sleeved on the screw 74 and is threadedly connected to the screw 74. The screw 74 is connected to the output shaft of the gear motor 71.

[0025] In this embodiment, when the gear motor 71 rotates, it drives the screw 74 to rotate, thereby moving the piston pusher 72, which in turn pushes the piston 73 to force the lubricating oil in the oil reservoir 20 into the oil pipe 40.

[0026] In one specific embodiment, the initial position and total stroke of the screw 74 can be set, and the stroke already traveled can be obtained by reading the number of revolutions of the gear motor through the controller 50.

[0027] In this embodiment, a rotation count monitoring module is provided between the controller 50 and the gear motor 71. The rotation count monitoring module acquires the rotation count of the gear motor 71 and sends the rotation count to the controller 50. The controller 50 calculates the ratio of the screw 74's total stroke and the designed total stroke to provide real-time feedback on the current liquid level based on the total stroke and the already moved stroke of the screw 74.

[0028] Specifically, the oil storage tank 20 has a capacity of 200ml, and the gear motor 71 has a minimum of 1 rotation and a maximum of 100 rotations. One rotation of the gear motor 71 corresponds to a 1mm screw stroke, and the minimum settable single injection volume is 200ml / 100 rotations = 2ml / rotation. The screw 74 has a length of 100mm. When the oil storage tank is full, the initial position of the screw 74 is 0mm, and when the gear motor 71 is in its initial position, the display shows a liquid level of 100%. The controller 50 reads the current number of rotations of the gear motor 71 and divides it by the designed number of rotations to calculate the current liquid level. For example, if the total stroke of the gear motor 71 is 100 rotations, and the gear has rotated to its 50th rotation, the actual liquid level is: 1 - 50 / 100 = 50%.

[0029] In one embodiment, the automatic oiling device may further include a control button 66 electrically connected to the controller 50, the control button 66 being used by the user to input the amount of oil injected each time and the oiling cycle (frequency) to the controller 50.

[0030] In this embodiment, the controller 50 is electrically connected to the gear motor 71. It generates a control signal based on the oil injection amount and oil injection cycle (frequency) input by the user, and then sends the control signal to make the gear motor 71 control the screw 74 to drive the piston 73 to move downward, pushing the lubricating oil in the oil storage tank 20 to the oil injection head 43, thereby realizing the automatic timed and quantitative oil injection function.

[0031] In one embodiment, the automatic oiling device may further include a display screen 67, disposed on the upper housing 30, for displaying working information, such as observing the current oil level. The controller 50 displays the lubricating oil level on the display screen 67 by calculating the ratio of the screw's traveled stroke to the designed total stroke.

[0032] In one specific embodiment, the display screen 67 can display information including the current date, time, liquid level, battery level, refill cycle, single refill volume, and alarm liquid level. For example, the display screen may show the following information at a certain time: 2024 / 10 / 10, 10:10 pm; Liquid level: 80%; Battery level: 80%; Refill cycle: 10 days; Single refill volume: 5 ml; Alarm liquid level: <5%.

[0033] In one embodiment, the automatic oil filling device may also be provided with an indicator light 61, a sound hole 62 and a buzzer. The indicator light 61 and the sound hole 62 are provided on the upper housing 30. The indicator light 61 is installed on the upper housing 30, the sound hole 62 is opened on the upper housing 30, and the buzzer is installed below the sound hole. The indicator light 61 is preferably an LED light. When the oil level or power of the automatic oil filling device is insufficient, the indicator light 61 will flash and the sound hole 62 will emit a sound to remind the user.

[0034] Preferably, the indicator light 61 and the sound hole 62 can be located on one side of the display screen 67. When the liquid level is low, the user will be alerted by the color of the LED light on the display screen and the alarm sound. For example, a green indicator light indicates that the liquid level is normal; a red indicator light indicates that the liquid level is low and the oil tank needs to be replaced immediately. When the device indicates that the oil tank 20 has a low liquid level, the bottom of the oil tank 20 can be rotated to detach it from the upper housing 30, and then a new oil tank 20 can be installed.

[0035] In one embodiment, the automatic oil filling device may further include a replaceable lithium battery 80 disposed within the upper housing 30 and electrically connected to the controller 50, power assembly 70, control button 66, and display screen 67 to supply them with power.

[0036] In this embodiment, the lithium battery 80 is detachably connected to the automatic oil filling device.

[0037] In one embodiment, the oil pipe 40 may include a pipe body 41, an adapter 42, and an oil injection head 43. The pipe body 41 is connected to the oil storage tank 20 through the adapter 42, and the oil injection head 43 is connected to the screw oil injection hole of the heating plate lifting device.

[0038] In this embodiment, the oil pipe 40 is a flexible structure, and the pipe body 41, adapter 42, and oil injection head 43 are all detachably connected. The pipe body 41 can have various different shapes to adapt to different application scenarios.

[0039] This application achieves automatic lubrication of the CVD heating plate lifting device through an oil tank, oil pipes, and a power unit, eliminating the need for manual oil gun operation, reducing labor input, and improving maintenance efficiency. Furthermore, the upper housing is made of high-temperature resistant and waterproof materials, the lithium battery and oil tank are replaceable, and the pipes and adapters are customizable, enabling the automatic lubrication device to meet the lubrication needs of different scenarios. It also maintains stable operation in harsh environments and has a function to quickly restore the device's power.

[0040] The above description is merely a preferred embodiment of this utility model and is not intended to limit this utility model in any form or substance. It should be noted that those skilled in the art can make various improvements and additions without departing from the method of this utility model, and these improvements and additions should also be considered within the protection scope of this utility model. Any modifications, alterations, and equivalent changes made by those skilled in the art without departing from the spirit and scope of this utility model using the disclosed technical content are equivalent embodiments of this utility model. Furthermore, any modifications, alterations, and evolutions made to the above embodiments based on the essential technology of this utility model still fall within the scope of the technical solution of this utility model.

Claims

1. An automatic oiling device for adding lubricating oil to the heating plate lifting device of a CVD reactor, characterized in that, The automatic oil injection device includes: an upper housing, a controller, a power unit, an oil storage tank, and an oil pipe; The oil storage tank is used to store lubricating oil; One end of the oil pipe is connected to the oil storage tank, and the other end is connected to the heating plate lifting device; The controller is electrically connected to the power assembly. Part of the power assembly and the controller are housed inside the upper housing. Another part of the power assembly extends out of the upper housing and into the oil tank to apply power to the lubricating oil in the oil tank under the control of the controller, so that the lubricating oil is automatically injected into the heating plate lifting device through the oil pipe.

2. The automatic oiling device according to claim 1, characterized in that, The oil storage tank is located below the upper shell and is detachably and sealed to the upper shell.

3. The automatic oiling device according to claim 1, characterized in that, The power assembly includes: a geared motor, a piston pusher, a piston, and a screw; The piston is disposed in the oil storage tank and is slidably connected to the oil storage tank; The piston pusher is fixedly connected to the piston, and the piston pusher is sleeved outside the screw and is threadedly connected to the screw. The screw is connected to the output shaft of the gear motor. When the gear motor rotates, it drives the screw to rotate, thereby moving the piston pusher and pushing the piston to force the lubricating oil in the oil tank into the oil pipe.

4. The automatic oiling device according to claim 3, characterized in that, A rotation count monitoring module is provided between the controller and the gear motor. The rotation count monitoring module is used to obtain the rotation count of the gear motor and send the rotation count to the controller.

5. The automatic oiling device according to claim 1, characterized in that, The automatic oiling device further includes a control button electrically connected to the controller, the control button being used by the user to input the oiling amount and oiling cycle for each cycle to the controller.

6. The automatic oiling device according to claim 5, characterized in that, The automatic oiling device also includes a display screen, which is used to display working information.

7. The automatic oiling device according to claim 6, characterized in that, The automatic oil filling device further includes a lithium battery, which is disposed inside the upper housing and electrically connected to the controller, power component, control button, and display screen. The lithium battery is used to power the controller, power component, control button, and display screen.

8. The automatic oiling device according to claim 7, characterized in that, The lithium battery is detachably connected to the upper casing.

9. The automatic oiling device according to claim 1, characterized in that, The automatic oiling device further includes an indicator light, a sound hole, and a buzzer, wherein the indicator light and the sound hole are disposed on the upper housing.

10. The automatic oiling device according to claim 1, characterized in that, The oil pipe includes a pipe body, an adapter, and an oil injection head. The pipe body is connected to the oil storage tank via the adapter, and the oil injection head is connected to the screw oil injection hole of the heating plate lifting device.

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