Calibration device

Abstract

The utility model provides a calibration device, which is used for calibrating the position of a wafer placed on a heater, the heater is provided with a circular groove for bearing the wafer, the calibration device comprises a disc body and at least four groups of distance measuring assemblies, the disc body is used for being grabbed by a manipulator, and two groups of distance measuring assemblies are respectively arranged at two ends of the disc body in a first radial direction. The distance sensors are respectively used for detecting the distance between the outer edge of the disc body and the side wall of the circular groove in the first radial direction; the other two sets of distance measuring assemblies are arranged at the two ends of the disc body in the second radial direction correspondingly so as to be used for detecting the distance between the edge of the disc body and the side wall of the circular groove in the second radial direction correspondingly. The ranging assembly is in electric signal connection with the control system; wherein the manipulator has a first reference direction at the blanking position on the heater, and one of the first radial direction and the second radial direction coincides with the first reference direction. The technical problem that the calibration precision of the mechanical arm is low can be solved.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and specifically to a calibration device. Background Technology

[0002] In semiconductor automated equipment, robotic arms are typically used to transport wafers. The robotic arm transfers the wafer from the transport cavity to the process cavity, where a lifting device lowers the wafer onto a heater. After wafer placement, the coating process begins. After equipment assembly or during routine maintenance, the robotic arm and transport station need to be inspected and calibrated to ensure the wafer transported by the robotic arm is concentric with the heater in the process cavity. Significant misalignment between the wafer center and the heater center will affect the coating deviation at the wafer edges. Excessive deviation can lead to wafer rejection and reduced wafer yield.

[0003] Current robotic arm calibration typically employs a combination of robotic arm control handle operation and visual inspection to check if the robotic arm is in position. However, this calibration method is susceptible to human error, resulting in low calibration accuracy for the robotic arm. Consequently, the wafer's placement position on the heater becomes less precise, leading to a significant concentricity deviation between the wafer and the heater, which limits the improvement of wafer coating quality. Utility Model Content

[0004] In view of the problems existing in the prior art, the present invention provides a calibration device to improve the technical problem of low wafer dropping position accuracy on the heater caused by the low calibration accuracy of existing robotic arms.

[0005] To achieve the above and other related objectives, this utility model provides a calibration device used in conjunction with a robotic arm to calibrate the position of a wafer placed on a heater. The heater has a circular groove for supporting the wafer. The calibration device includes a disk and at least four sets of ranging components. The disk is used by the robotic arm to grasp and move the calibration device into the circular groove, and the axis of the disk within the circular groove coincides with the axis of the robotic arm's dropping motion on the heater. Two sets of ranging components are respectively disposed at both ends of a first radial direction of the disk to detect the distance between the outer edge of the disk and the sidewall of the circular groove in the first radial direction. The other two sets of ranging components are respectively disposed at both ends of a second radial direction of the disk to detect the distance between the edge of the disk and the sidewall of the circular groove in the second radial direction. The ranging components are electrically connected to the control system of the robotic arm. The robotic arm has a first reference direction at the dropping position on the heater, and one of the first radial direction and the second radial direction coincides with the first reference direction.

[0006] In one embodiment of this utility model, the first radial direction and the second radial direction are perpendicular to each other.

[0007] In one embodiment of the present invention, the robotic arm has a second reference direction at the material dropping position on the heater, and the other of the first radial direction and the second radial direction coincides with the second reference direction.

[0008] In one embodiment of this utility model, the diameter of the disk is equal to the diameter of the wafer.

[0009] In one embodiment of the present invention, the ranging component includes a push rod and a linear drive device. The linear drive device is connected to the disk body, and the drive end of the linear drive device is connected to the push rod to drive the push rod to move in the radial direction of the disk body. The sidewall of the circular groove stops the push rod in the direction of movement.

[0010] In one embodiment of this utility model, the calibration device further includes a power module, which includes a battery and a Bluetooth module. The battery is used to provide electrical energy to the linear drive device, and the battery and the linear drive device are electrically connected through the Bluetooth module.

[0011] In one embodiment of this utility model, a pressure sensor is provided at the end of the push rod, and the push rod abuts against the side wall of the circular groove through the pressure sensor. The pressure sensor is electrically connected to the linear drive device.

[0012] In one embodiment of the present invention, the ranging component further includes a spoke, a light source, and an optical sensor. The spoke is rotatably connected to the disk body and is drivenly connected to the push rod. The spoke includes multiple spokes arranged in an array, with a hollow area formed between adjacent spokes. The light source and the optical sensor are both fixedly connected to the disk body. The light emitted by the light source passes through any one of the hollow areas and is transmitted to the optical sensor.

[0013] In one embodiment of this utility model, the spoke and the push rod are connected by friction transmission.

[0014] In one embodiment of this utility model, the stroke detection device further includes a friction wheel, which is rotatably connected to the disc body. The spokes and the push rod are both connected to the friction wheel via friction transmission. The diameter of the friction wheel is larger than the diameter of the spokes. When the push rod moves, it drives the friction wheel to rotate, and the rotation of the friction wheel drives the spokes to rotate.

[0015] This calibration device uses a robotic arm to place a disk into a circular groove in a heater. Distance measuring components are positioned in two radial directions on the disk to detect the distance between the outer edge of the disk and the sidewall of the circular groove. This allows for a more direct understanding of the disk's eccentricity and position relative to the groove through the measurement data. Since the disk's axis within the groove coincides with the robotic arm's dropping axis on the heater, the eccentricity and position of the robotic arm's dropping axis relative to the groove's axis can also be determined. Because the first or second radial direction coincides with the first reference direction on the robotic arm, the control system can more effectively adjust the robotic arm's dropping position deviation on the heater based on the measurement data from the distance measuring components in each direction. Compared to visual inspection calibration, this device achieves higher calibration accuracy and efficiency, thereby improving the wafer dropping accuracy on the heater and consequently improving the wafer coating quality. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other embodiments can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the calibration device of this utility model in one embodiment with the push rod extended.

[0018] Figure 2 This is a schematic diagram of the structure in one example of the present invention, showing the calibration device placed on the heater;

[0019] Figure 3 This is a schematic diagram of the state when the robotic arm transports the calibration device in one example of this utility model;

[0020] Figure 4 This is a schematic diagram showing the position of the robotic arm transporting the calibration device to above the heater in one example of this utility model;

[0021] Figure 5 This is a schematic diagram of the structure of the disk body after removing the upper disk body in one example of this utility model;

[0022] Figure 6 This is a cross-sectional view of the structure in one example of the present invention, showing the calibration device located within a circular groove;

[0023] Figure 7 This is a partial installation diagram of the ranging component on one side inside the disk body in one example of the present invention;

[0024] Figure 8 This is a schematic diagram of the structure of the spoke disk in one example of this utility model;

[0025] Figure 9 This is a schematic diagram showing the distribution of pulse electrical signals generated by the optical sensor during the rotation of the disc, as illustrated in one example of this invention.

[0026] Component designation explanation:

[0027] 100. Calibration device; 110. Disc body; 111. First radial direction; 112. Second radial direction; 113. Upper disc body; 114. Lower disc body; 115. Receiving cavity; 120. Distance measuring component; 121. Push rod; 1211. Pressure sensor; 122. Linear drive device; 123. Stroke detection device; 1231. Spoke disc; 12311. Spoke; 12312. Hollowed-out area; 1232. Light source; 1233. Optical sensor; 1234. Friction wheel; 130. Power module; 131. Battery; 132. Bluetooth module; 200. Robotic arm; 210. First reference direction; 220. Second reference direction; 300. Heater; 310. Circular groove. Detailed Implementation

[0028] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. It should also be understood that the terminology used in the embodiments of this utility model is for describing specific implementation schemes and not for limiting the scope of protection of this utility model. Test methods in the following embodiments that do not specify specific conditions are generally performed under conventional conditions or according to the conditions recommended by the respective manufacturers.

[0029] When numerical ranges are given in the embodiments, it should be understood that, unless otherwise specified in this invention, both endpoints of each numerical range and any value between the two endpoints may be selected. Unless otherwise defined, all technical and scientific terms used in this invention, as well as the prior art known to those skilled in the art and the description of this invention, may be implemented using any prior art methods, equipment, and materials similar to or equivalent to those in the embodiments of this invention.

[0030] It should be noted that the terms such as "upper", "lower", "left", "right", "middle" and "one" used in this specification are only for clarity of description and are not intended to limit the scope of implementation of this utility model. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered as within the scope of implementation of this utility model.

[0031] Please see Figures 1 to 9 This utility model provides a calibration device 100. By setting a distance measuring component 120 in the radial direction of the disk 110, the calibration device 100 can detect the distance between the edge of the disk 113 and the edge of the heater 300 in multiple radial directions. This allows for a more intuitive understanding of the eccentricity and eccentric position of the disk 110 relative to the circular groove 310. Consequently, the material dropping position deviation of the robot 200 on the heater 300 can be adjusted more effectively, enabling the robot 200 to achieve higher calibration accuracy relative to the heater 300. This improves the material dropping accuracy of the wafer on the heater 300 and ensures the coating quality of the wafer.

[0032] Please see Figures 1 to 3 The calibration device 100 provided by this utility model is used in conjunction with the robot arm 200 to calibrate the position of the robot arm placing the wafer on the heater 300. This calibration device 100 is used in any situation where the wafer placement position of the robot arm 200 on the heater 300 may change, such as after the heater 300 in the reaction chamber is replaced or after the robot arm 200 is repaired. In other words, when such situations occur, the robot arm 200 needs to be calibrated on the heater 300 using the calibration device 100 before conveying the wafer. After calibration, the calibrated robot arm 200 conveys the wafer to the heater 300 to ensure the accuracy of the wafer placement position on the heater 300.

[0033] Please see Figures 2 to 4The heater 300 is provided with a circular groove 310 for supporting the wafer. The diameter of the circular groove 310 is slightly larger than the diameter of the wafer to ensure that the wafer can be placed in the circular groove 310 when a predetermined feeding deviation occurs. The calibration device 100 includes a disk 110 and four sets of ranging components 120. The diameter of the disk 110 is not larger than the diameter of the wafer. The disk 110 is used for the robot arm 200 to grasp and move the calibration device 100 into the circular groove 310. The axial position of the disk 110 in the circular groove 310 coincides with the feeding axis of the robot arm 200 on the heater 300. That is, the eccentricity of the disk 110 relative to the circular groove 310 is the feeding eccentricity of the robot arm 200 relative to the heater 300. It should be noted that, in order to further ensure the consistency between the accuracy of the robot arm 200 in conveying the calibration device 100 and the accuracy in conveying the wafer, in this embodiment, the initial placement position of the calibration device 100 is the placement position before the wafer is placed in the heater 300. That is, the robot arm 200 conveys the calibration device 100 according to the wafer conveying path. The specific structural form of the disk 110 is not limited; for example, the disk 110 can be a circular plate structure, or a circular cavity structure formed by the interlocking of upper and lower disks, etc. Preferably, in this embodiment, please refer to... Figure 6 and Figure 7 The disc body 110 includes an upper disc body 113 and a lower disc body 114, which are interlocked to form a receiving cavity 115.

[0034] Please see Figure 2 and Figure 5 All four sets of ranging components 120 are disposed within the receiving cavity 115. Two of the four sets of ranging components 120 are respectively disposed at both ends of the disk body 110 in the first radial direction 111, so as to detect the distance between the outer edge of the disk body 110 and the side wall of the circular groove 310 in the first radial direction 111, respectively. Figure 2 The distances A and B are shown. The other two sets of ranging components 120 of the four sets are respectively disposed at both ends of the second radial direction 112 of the disk body 110, to detect the distance between the edge of the disk body 113 and the sidewall of the circular groove 310 in the second radial direction 112, as shown. Figure 2The intermediate distances C and D are given. The specific orientations of the first radial direction 111 and the second radial direction 112 around the circumference of the disk 110 are not limited. It should be noted that the angle between the first radial direction 111 and the second radial direction 112 is a fixed value, and to facilitate gripping and positioning by the robot arm 200, it is usually calibrated on the disk 110. The ranging component 120 is electrically connected to the control system of the robot arm 200 to transmit the data measured by the ranging component 120 to the control system, allowing the control system to calibrate the material dropping accuracy of the robot arm 200 on the heater 300 based on this data. It should be noted that the receiving cavity 115 has openings around its perimeter for the ranging component 120 to measure the distance between the edge of the disk 110 and the sidewall of the circular groove 310.

[0035] The ranging component 120 can be selected from various options, including but not limited to any structure such as a distance sensor that can meet the accuracy requirements for distance measurement between the outer edge of the disk 110 and the sidewall of the circular groove 310. Please refer to [link / reference]. Figure 3 The robotic arm 200 has a first reference direction 210 at the material dropping position on the heater 300. The first reference direction 210 refers to the alignment direction of the robotic arm 200 when dropping material onto the heater 300. Specifically, the first reference direction 210 is any radial direction on the robotic arm 200 passing through the material dropping axis. This first reference direction 210 is calibrated on the robotic arm 200 to serve as a reference for calibrating the position of the robotic arm 200. Figure 1 As shown. In this embodiment, the first radial direction 111 of the disk body 110 coincides with the first reference direction 210, as shown. Figure 3 As shown. In other embodiments, the second radial direction 112 may coincide with the first reference direction 210.

[0036] The calibration device 100 of this invention places the disc 110 in the circular groove 310 of the heater 300 using a robot arm 200. Distance measuring components 120 are installed in two radial directions of the disc 110 to detect the distance between the outer edge of the disc 110 and the sidewall of the circular groove 310. The measurement data from the distance measuring components 120 provides a more intuitive understanding of the eccentricity and position of the disc 110 relative to the circular groove 310. Since the axial center of the disc 110 within the circular groove 310 coincides with the material dropping axis of the robot arm 200 on the heater 300, the eccentricity and position of the material dropping axis of the robot arm 200 on the heater 300 relative to the axis of the circular groove 310 can be determined. Since the first radial direction 111 or the second radial direction 112 coincides with the first reference direction 210, when the robot arm 200 needs to be calibrated based on the measurement data of the ranging component 120, the material dropping position deviation of the robot arm 200 can be adjusted along the first reference direction 210 based on the measurement distance between the two ends of the first reference direction 210. Then, based on the angle between the first radial dimension and the second radial dimension, the mapping direction of another radial dimension that does not coincide with the first reference direction 210 on the robot arm 200 is determined, and the material dropping position deviation of the robot arm 200 in that radial direction is adjusted based on the measurement distance between the two ends of that radial direction. This allows the control system to more specifically adjust the material dropping position deviation of the robot arm 200 on the heater 300 based on the measurement data of the ranging component 120 in each direction. Compared with the calibration method of visual observation, this calibration device 100 can achieve higher calibration accuracy and calibration efficiency, thereby improving the material dropping accuracy of the wafer on the heater 300, and thus correspondingly improving the wafer coating quality. It should be noted that the process of calibrating the movement of the robotic arm can refer to existing calibration methods, and will not be elaborated here.

[0037] In addition, since the measurement process of the ranging component 120 is automatically performed after the calibration device 100 is placed on the heater 300 in this embodiment, it does not require opening the process cavity for human observation. Therefore, it can be performed in the closed state of the process cavity, which can reduce the probability of foreign objects such as dust particles entering the process cavity during the calibration process, which is beneficial to ensuring the product yield of the wafer.

[0038] Although the setting angle between the first radial direction 111 and the second radial direction 112 is not limited, it is preferable to refer to [reference needed]. Figure 2In one embodiment of this utility model, the first radial direction 111 and the second radial direction 112 are perpendicular. This arrangement facilitates the setting of the first radial direction 111 and the second radial direction 112 on the disk body 110, thus facilitating the placement of the four ranging components 120 on the disk body 110. Furthermore, since one of the first radial direction 111 and the second radial direction 112 coincides with the first reference direction 210 of the robot arm 200, when the first radial direction 111 and the second radial direction 112 are set perpendicularly, the orientation mapping of the other radial direction that does not coincide with the first reference direction 210 on the robot arm 200 can be quickly determined. This improves the adjustment of the robot arm 200's offset in that radial direction, thereby further improving the calibration efficiency of the robot arm 200.

[0039] To further improve the calibration efficiency of the robotic arm 200, in another embodiment of this invention, based on the fact that one of the first radial direction 111 and the second radial direction 112 coincides with the first reference direction 210, please refer to [the relevant documentation]. Figure 3 The robotic arm 200 has a second reference direction 220 at the material dropping position on the heater 300, and the other of the first radial direction 111 and the second radial direction 112 coincides with the second reference direction 220. In one embodiment, the first radial direction 111 may coincide with the first reference direction 210, and the second radial direction 112 may coincide with the second reference direction 220, such as... Figure 3 As shown. In another embodiment, the second radial direction 112 may coincide with the first reference direction 210, and the first radial direction 111 may coincide with the second reference direction 220. With this configuration, the material dropping position deviation of the robot arm 200 relative to the heater 300 can be adjusted along both the first reference direction 210 and the second reference direction 220, thereby calibrating the material dropping position of the robot arm 200 relative to the heater 300. Therefore, the calibration efficiency of the robot arm 200 can be further improved.

[0040] In one embodiment of this invention, the diameter of the disk 110 is equal to the diameter of the wafer. As described above, the initial placement position of the calibration device 100 is the placement position before the wafer enters the heater 300. Therefore, setting the diameter of the disk 110 to be equal to the diameter of the wafer allows the calibration device 100 to better adapt to the wafer placement position, eliminating the need for additional placement positions. Furthermore, this setting also allows the calibration device 100 to better adapt to the robot arm 200, eliminating the need for additional modifications to the structure of the robot arm 200 and better ensuring that the path of the robot arm 200 transporting the calibration device 100 is consistent with the path of the robot arm transporting the wafer.

[0041] Please see Figure 2 and Figure 5 In one embodiment of this utility model, the ranging component 120 includes a push rod 121, a linear drive device 122, and a stroke detection device 123. The linear drive device 122 is connected to the lower plate 114, and the drive end of the linear drive device 122 is connected to the push rod 121 to drive the push rod 121 to move in the radial direction of the plate 110. The side wall of the circular groove 310 stops the push rod 121 in the direction of movement. The linear drive device 122 can be of various types. For example, the linear drive device 122 can be a cylinder, with the piston end of the cylinder connected to the push rod 121. The extension and retraction of the piston end drives the push rod 121 to move in the radial direction. The linear drive device 122 can also be a gear and rack structure, with the push rod 121 connected to the rack, and the gear rotatably connected to the plate 110. The rotation of the gear drives the push rod 121 on the rack to move in the radial direction of the plate 110, etc. Optionally, in this embodiment, the linear drive device 122 is a cylinder. The cylinder body is fixedly connected to the disc body 110, and the piston end of the cylinder is connected to the push rod 121. The extension and retraction direction of the piston end of the cylinder is consistent with the radial direction of the disc body 110. When the piston end of the cylinder moves, it drives the push rod 121 to move along the radial direction of the disc body 110. The stroke detection device 123 is connected to the disc body 110 and is used to detect the radial movement of the push rod 121. The stroke detection device 123 can be any ranging device that can detect the radial movement of the push rod 121, such as a Hall sensor or an optocoupler. This embodiment does not specifically limit this.

[0042] When the calibration device 100 is placed in the circular groove 310, the linear drive device 122 drives the push rod 121 to move radially along the disk 110 until the push rod 121 abuts against the side wall of the circular groove 310. The stroke detection device 123 detects the displacement of the push rod 121 in the radial direction. During the radial movement of the push rod 121, the disk 110 remains fixed within the circular groove 310. The displacement generated by the push rod 121 is the distance between the edge of the disk 110 and the side wall of the circular groove 310 in that direction. It should be noted that the initial position of the push rod 121 on the disk 110 is when the front end of the push rod 121 coincides with the edge of the disk 110. This setting improves the accuracy of the distance measurement between the edge of the disk 110 and the side wall of the circular groove 310, reduces measurement errors, and thus improves the calibration accuracy of the robot 200.

[0043] Please see Figure 5 and Figure 6In one embodiment of this utility model, the calibration device 100 further includes a power module 130, which includes a battery 131 and a Bluetooth module 132. The battery 131 provides power to the linear drive device 122, and the battery 131 and the linear drive device 122 are electrically connected via the Bluetooth module 132. Both the battery 131 and the Bluetooth module 132 are located within the receiving cavity 115 and are positioned in the central region of the lower plate 114, avoiding the moving direction of the push rod 121 and not protruding from the outer periphery of the plate 110. The battery 131 and the Bluetooth module 132 can be fixedly connected to the lower plate 114 by bolts or by adhesive bonding, etc. By providing the battery 131 on the plate 110, automatic power supply to the drive device can be achieved, eliminating the need for an external power source, reducing the number of connecting cables introduced on the plate 110, and further facilitating the miniaturization and refinement of the calibration device 100. Meanwhile, by setting up the Bluetooth module 132, the ranging component 120 can be wirelessly connected to the control system of the external robot arm 200, which makes the signal transmission between the calibration device 100 and the external control system more convenient.

[0044] Please see Figure 5 and Figure 6 In one embodiment of this utility model, a pressure sensor 1211 is provided at the end of the push rod 121. The push rod 121 abuts against the side wall of the circular groove 310 through the pressure sensor 1211, and the pressure sensor 1211 is electrically connected to the linear drive device 122. The pressure sensor 1211 can be embedded in the end of the push rod 121 or protrude from the end of the push rod 121, as long as it ensures that the pressure sensor 1211 is triggered by pressure when the push rod 121 abuts against the side wall of the circular groove 310. By providing the pressure sensor 1211, it is possible to detect whether the push rod 121 is in position against the side wall of the circular groove 310, so that the linear drive device 122 can be controlled to close in time after the push rod 121 is in position, reducing the probability of the disc 110 shifting within the circular groove 310 due to excessive abutment force during the radial movement of the push rod 121.

[0045] Please see Figures 5 to 7In one embodiment of this utility model, the ranging component 120 further includes a spoke 1231, a light source 1232, and an optical sensor 1233. The spoke 1231 is rotatably connected to the disk body 110, and can be rotatably connected to the lower disk body 114, the upper disk body 113, or both. Optionally, in this embodiment, the spoke 1231 is rotatably connected to the lower disk body 114. The rotation axis of the spoke 1231 is parallel to the rotation axis of the disk body 110. The spoke 1231 is drivenly connected to the push rod 121 so that when the push rod 121 moves along the radial direction of the disk body 110, it drives the spoke 1231 to rotate relative to the disk body 110. There are various ways to connect the spoke 1231 and the push rod 121. In this embodiment, the outer periphery of the spoke 1231 and the side wall of the push rod 121 are connected by frictional rotation. That is, when the push rod 121 moves along the radial direction of the disc body 110, friction is generated between the side wall of the push rod 121 and the outer periphery of the spoke 1231. Under the action of friction, the spoke 1231 rotates with the push rod 121. By using a frictional rotation connection, better synchronization performance can be achieved between the push rod 121 and the spoke 1231, reducing transmission errors between them. Furthermore, the transmission ratio design between them is more flexible, making it easier for the spoke 1231 to be matched with different rotation speeds.

[0046] In other embodiments, the outer periphery of the spoke 1231 may be provided with a plurality of first teeth arranged in a circumferential array, and the sidewall of the push rod 121 may be evenly distributed with a plurality of second teeth in a straight line. When the push rod 121 moves, the first rack and the second teeth mesh with each other to realize the rotation of the spoke 1231.

[0047] Please see Figures 6 to 8 The spoke disk 1231 includes multiple spokes 12311 arranged in an array. The number of spokes 12311 is unlimited, and hollow areas 12312 are formed between adjacent spokes 12311. Multiple spokes 12311 form multiple arrayed hollow areas 12312 along the circumferential direction of the entire spoke disk 1231. A light source 1232 and an optical sensor 1233 are both fixedly connected to the disk body 110. The light source 1232 and the optical sensor 1233 are respectively positioned above and below the disk body 110. When the spoke disk 1231 rotates, the spokes 12311 intermittently block the light beam emitted by the light source 1232. Upon receiving the intermittent light beam, the optical sensor 1233 on the other side converts it into corresponding pulse electrical signals. For example, when the number of spokes 12311 on the spoke disk 1231 is 100, the spoke disk 1231 will generate 100 pulse electrical signals per revolution. A schematic diagram of the generated pulse electrical signals is shown below. Figure 9As shown. Since the spokes 1231 and the push rod 121 are connected by friction transmission, the greater the distance the push rod 121 moves in the radial direction of the disc 110, the greater the rotation angle of the spokes 1231, the more open areas 12312 the light passes through, and consequently, the more pulse electrical signals generated by the optical sensor 1233. This results in a greater radial displacement of the push rod 121 in the corresponding direction, and a greater offset of the disc 110 in that direction. Given that the number of spokes 12311 of the spokes 1231 and the transmission ratio between the spokes 1231 and the push rod 121 are known, the radial movement distance of the push rod 121 at the corresponding position can be determined by calculating the pulse electrical signals generated during the rotation of each spoke 1231. Using this method to calculate the moving distance of push rod 121 is not only simple and reliable in structure, but also allows for adjustment of the calculation accuracy of the moving distance of push rod 121 by adjusting the number of spokes 1231 on the spoke disk 1231, thereby obtaining higher displacement calculation accuracy, which is beneficial to improving the calibration accuracy of robot 200.

[0048] Please see Figures 5 to 7 In one embodiment of this utility model, the ranging component 120 further includes a friction wheel 1234, which is rotatably connected to the disc body 110. Specifically, it may be rotatably connected to the upper disc body 113 and the lower disc body 114. Optionally, in this embodiment, the friction wheel 1234 is rotatably connected to the lower disc body 114. The spoke 1231 and the push rod 121 are both rotatably connected to the friction wheel 1234, and the rotation axis of the spoke 1231 and the rotation axis of the friction wheel 1234 are parallel. The spoke 1231 and the push rod 121 are located on both sides of the friction wheel 1234. When the push rod 121 moves in the radial direction of the disc body 110, the friction between the push rod 121 and the friction wheel 1234 drives the friction wheel 1234 to rotate. When the friction wheel 1234 rotates, the friction between the friction wheel 1234 and the spoke 1231 drives the spoke 1231 to rotate. The diameter of the friction wheel 1234 is larger than that of the spoke 1231. To ensure the friction performance of the friction wheel 1234, in this embodiment, the friction contact part between the friction wheel 1234 and the spoke 1231 is made of a material with a high coefficient of friction and high temperature resistance, such as asbestos, high-temperature resistant nylon, or ceramic. By setting the friction wheel 1234 and making its diameter larger than that of the spoke 1231, a larger transmission ratio can be obtained between the push rod 121 and the spoke 1231. When the push rod 121 moves the same radial displacement, the spoke 1231 end can generate a smaller rotation angle. The spoke 1231 can be equipped with a larger number of spokes 12311, which can generate a larger number of pulse electrical signals within a smaller rotation angle range. This can improve the displacement detection accuracy of the spoke 1231 on the push rod 121, and thus improve the calibration efficiency of the robot 200.

[0049] Using the calibration device 100 of this application, when it is necessary to calibrate the wafer placement position of the robot 200 on the heater 300, the calibration device 100 is first transported from the wafer placement station to the circular groove 310 of the heater 300 by the robot 200. During the transport process, the first reference direction 210 and the second reference direction 220 of the robot 200 are kept aligned with the first radial direction 111 and the second radial direction 112 of the disk 110, respectively. Then, the cylinders on the four push rods 121 are operated simultaneously, so that the piston end of the cylinder extends and drives the corresponding push rod 121 to move along the radial direction of the disk 110 towards the side wall of the circular groove 310. At the same time, the push rod 121 drives the friction wheel 1234 to rotate, and the friction wheel 1234 drives the spoke 1231 to rotate. When the spoke 1231 rotates, the spokes 12311 will intermittently block the light beam emitted by the light source 1232. After receiving the intermittent light beam, the optical sensor 1233 will convert it into a corresponding pulse electrical signal. When the pressure sensor 1211 on each push rod 121 abuts against the side wall of the circular groove 310, the corresponding push rod 121 stops moving. At this time, the control system of the robot arm 200 records the number of pulse electrical signals generated by the rotation of the spoke 1231 at the corresponding position of the push rod 121. This continues until all push rods 121 in all four directions have stopped moving. At this point, the control system of the robot arm 200 has completed recording the number of pulse electrical signals generated by the rotation of the spoke 1231 in all four directions. Then, based on the statistically recorded number of pulse electrical signals, the material dropping position of the robot arm 200 relative to the heater 300 is calibrated.

[0050] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A calibration device used in cooperation with a robot for calibrating the position of a wafer placed on a heater provided with a circular recess for carrying the wafer, characterized in that, The calibration device comprises: a disc body for being gripped by the robot to move the calibration device into the circular groove, and the axial position of the disc body in the circular groove coincides with the drop axial center of the robot on the heater; four groups of distance measuring components, two groups of the distance measuring components are arranged at two ends of a first radial direction of the disc body respectively to detect the distance between the outer edge of the disc body and the side wall of the circular groove in the first radial direction, and the other two groups of the distance measuring components are arranged at two ends of a second radial direction of the disc body respectively to detect the distance between the edge of the disc body and the side wall of the circular groove in the second radial direction, and the distance measuring components are electrically connected with the control system of the robot; wherein the robot has a first reference direction at the drop position on the heater, one of the first radial direction and the second radial direction coincides with the first reference direction.

2. The calibration device of claim 1, wherein, The first radial direction and the second radial direction are perpendicular to each other.

3. The calibration device of claim 2, wherein, The robot has a second reference direction at the drop position on the heater, the other of the first radial direction and the second radial direction coincides with the second reference direction.

4. The calibration device of claim 1, wherein, The diameter of the disc body is equal to the diameter of the wafer.

5. The calibration device of claim 1, wherein, The distance measuring component comprises a push rod, a linear driving device and a stroke detection device, the linear driving device and the stroke detection device are connected to the disc body, the driving end of the linear driving device is connected with the push rod to drive the push rod to move in the radial direction of the disc body, and the side wall of the circular groove is stopped in the moving direction of the push rod, and the stroke detection device is used to detect the moving distance of the push rod.

6. The calibration device of claim 5, wherein, The calibration device further comprises a power module, the power module comprises a battery and a Bluetooth module, the battery is used to provide electric energy for the linear driving device, and the battery and the linear driving device are electrically connected through the Bluetooth module.

7. The calibration device of claim 5, wherein, The end of the push rod is provided with a pressure sensor, the push rod abuts against the side wall of the circular groove through the pressure sensor, and the pressure sensor is electrically connected with the linear driving device.

8. The calibration device of claim 5, wherein, The stroke detection device further comprises a spider, a light source and an optical sensor, the spider is rotationally connected to the disc body and is in transmission connection with the push rod, the spider comprises a plurality of arrayed spokes, and a hollow area is formed between adjacent spokes, the light source and the optical sensor are fixedly connected to the disc body, and the light emitted by the light source is transmitted to the optical sensor through any one of the hollow areas.

9. The calibration device of claim 8, wherein, The spider is in friction transmission connection with the push rod.

10. The calibration device of claim 8, wherein, The stroke detection device further comprises a friction wheel, the friction wheel is rotationally connected to the disc body, the spider and the push rod are in friction transmission connection with the friction wheel, and the diameter of the friction wheel is greater than that of the spider; the push rod drives the friction wheel to rotate when moving, and the friction wheel drives the spider to rotate when rotating.

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