Polishing solution stirring and emulsifying device

Abstract

The utility model discloses a polishing solution stirring and emulsifying device, which relates to the technical field of emulsifying equipment and comprises a polishing solution stirring tank, a feed port is arranged at the upper end of the polishing solution stirring tank, a discharge port is arranged at the lower end of the polishing solution stirring tank, a stirring mechanism and a high-shear emulsifying machine are arranged at the upper end of the polishing solution stirring tank, and the high-shear emulsifying machine is arranged at the lower end of the polishing solution stirring tank. The stirring mechanism is located in the center of the polishing solution stirring tank, the high-shear emulsifying machine is fixedly connected to the upper end of the polishing solution stirring tank and located on one side of the stirring mechanism, and a cleaning part is arranged at the upper end of the stirring mechanism; the stirring mechanism and the high-shear emulsifying machine are matched to stir and emulsify the polishing solution, the scraping plate rotates along with the stirring mechanism to scrape off the residual polishing solution on the inner wall of the polishing solution stirring tank, the spiral scraping plate is more convenient for the polishing solution to move downwards, and the scraping plate is tightly attached to the inner wall of the polishing solution stirring tank through the spring. And the residual polishing liquid can be better scraped, and the situation of waste is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to emulsification equipment technical field, concretely is a kind of polishing liquid stirring emulsification device. BACKGROUND

[0002] Semiconductor material is mainly silicon material, and it is one of the most important basic functional materials in electronic information industry, and in the processing of semiconductor material, silicon material is often processed into silicon wafer, and polishing treatment is carried out on the silicon wafer to continue subsequent process, in order to ensure the polishing processing precision of silicon wafer, chemical mechanical polishing (CMP) is needed to be carried out on the silicon wafer, and the polishing quality of silicon wafer is greatly influenced by CMP polishing liquid in the polishing process.

[0003] In the production process of polishing liquid, stirring emulsification device needs to be used, and in the process of emulsification and dispersion, the flowability of the polishing liquid is poor, and stagnation is easily formed on the inner surface of the shell, so that the polishing liquid is left in the shell, and waste occurs, which is not conducive to the production of polishing liquid.

[0004] Therefore, the present application provides a kind of polishing liquid stirring emulsification device, can eliminate the drawbacks of existing device. TECHNICAL SOLUTION

[0005] The utility model discloses a kind of polishing liquid stirring emulsification device, to solve the problems in the background art.

[0006] To achieve the above object, the utility model provides the following technical scheme:

[0007] A kind of polishing liquid stirring emulsification device, including: polishing liquid stirring tank, the upper end of the polishing liquid stirring tank is equipped with feeding opening, the lower end of the polishing liquid stirring tank is equipped with discharge port, the upper end of the polishing liquid stirring tank is equipped with stirring mechanism and high shear emulsifier, the stirring mechanism is located at the center position of polishing liquid stirring tank, the high shear emulsifier is fixedly connected on the upper end of polishing liquid stirring tank, and is located at one side of stirring mechanism, the upper end of the stirring mechanism is equipped with the cleaning part that prevents wall-hanging.

[0008] On the basis of the above technical scheme, the utility model further provides the following optional technical scheme:

[0009] In an alternative, the stirring mechanism includes a stirring motor, the stirring motor is fixedly connected to the upper end of the polishing liquid stirring tank, the output shaft of the stirring motor is fixedly connected to the stirring shaft, the outer end of the stirring shaft is fixedly connected to three stirring blades, and the end of the stirring shaft away from the stirring motor is fixedly connected to a spiral stirring rod.

[0010] In an optional scheme, the cleaning component comprises a scraper, two ends of the scraper are fixedly connected with two sliding blocks, the two sliding blocks are slidingly connected in corresponding sliding grooves on the spiral stirring rod, a spring is arranged in the sliding groove, one end of the spring is fixedly connected with the inner wall of the sliding groove, and the other end of the spring is fixedly connected with the sliding block.

[0011] In an optional scheme, three stirring blades are uniformly distributed along the outer end of the stirring shaft.

[0012] In an optional scheme, the outer end of the scraper is in close contact with the inner wall of the polishing liquid stirring tank.

[0013] In an optional scheme, the outer end of the scraper is in close contact with the inner wall of the polishing liquid stirring tank.

[0014] In an optional scheme, the high-shear emulsifier comprises an emulsifying motor, the emulsifying motor is fixedly connected to the upper end of the polishing liquid stirring tank, the output shaft of the emulsifying motor is fixedly connected with a central shaft, four support shafts are arranged around the central shaft, one end of the support shaft is fixedly connected with the inner wall of the polishing liquid stirring tank, the other end of the support shaft is fixedly connected with an emulsifying head, the end, away from the emulsifying motor, of the central shaft is fixedly connected with the emulsifying head, and the outer end of the central shaft is fixedly connected with an impeller.

[0015] In an optional scheme, the lower end of the polishing liquid stirring tank is fixedly connected with four uniformly distributed supporting feet.

[0016] Compared with the prior art, the polishing liquid stirring tank has the advantages that:

[0017] The polishing liquid stirring tank has the advantages that: the polishing liquid is stirred and emulsified by the stirring mechanism and the high-shear emulsifier, the scraper rotates together with the stirring mechanism to scrape off the residual polishing liquid on the inner wall of the polishing liquid stirring tank, the spiral scraper facilitates the downward movement of the polishing liquid, the spring makes the scraper closely adhere to the inner wall of the polishing liquid stirring tank, the residual polishing liquid is better scraped off, and the waste is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 The structure of the polishing liquid stirring tank is shown in the structure schematic view.

[0019] Figure 2 The structure of the polishing liquid stirring tank is shown in the structure schematic view.

[0020] Figure 3 The structure of the polishing liquid stirring tank is shown in the structure schematic view.

[0021] Reference signs annotation: 100, polishing liquid stirring tank, 101, feeding port, 102, discharge port, 200, high shear emulsifier, 201, emulsifying motor, 202, center shaft, 203, support shaft, 204, emulsifying head, 205, impeller, 301, stirring motor, 302, stirring shaft, 303, stirring blade, 304, spiral stirring rod, 401, scraper, 402, sliding block, 403, sliding groove, 404, spring, 501, feeding rotary shaft, 502, spiral blade, 600, supporting leg. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the following will be further described in detail with the help of the drawings and examples.

[0023] In one embodiment, as shown in Figures 1-3 A polishing liquid stirring and emulsifying device, comprising: a polishing liquid stirring tank 100, a feeding port 101 is arranged at the upper end of the polishing liquid stirring tank 100, a discharge port 102 is arranged at the lower end of the polishing liquid stirring tank 100, a stirring mechanism and a high shear emulsifier 200 are arranged at the upper end of the polishing liquid stirring tank 100, the stirring mechanism is located at the center position of the polishing liquid stirring tank 100, the high shear emulsifier 200 is fixedly connected to the upper end of the polishing liquid stirring tank 100 and located at one side of the stirring mechanism, a cleaning component for preventing wall sticking is arranged at the upper end of the stirring mechanism, materials are added into the polishing liquid stirring tank 100 through the feeding port 101, the high shear emulsifier 200 and the stirring mechanism are started to stir and emulsify the polishing liquid, the cleaning component arranged on the stirring mechanism is used to scrape off the polishing liquid remaining on the polishing liquid stirring tank 100, which can well remove the polishing liquid adhering to the inner wall of the stirring cylinder and avoid waste.

[0024] In the embodiment, as shown in Figure 2 The stirring mechanism comprises a stirring motor 301, the stirring motor 301 is fixedly connected to the upper end of the polishing liquid stirring tank 100, the output shaft of the stirring motor 301 is fixedly connected to a stirring shaft 302, the outer end of the stirring shaft 302 is fixedly connected to three stirring blades 303, and the end of the stirring shaft 302 away from the stirring motor 301 is fixedly connected to a spiral stirring rod 304, the stirring motor 301 is started, the stirring motor 301 drives the stirring shaft 302 to rotate, the stirring shaft 302 drives the three stirring blades 303 and the spiral stirring rod 304 to rotate together, the polishing liquid is stirred, and the stirring rate is increased through cooperation of the two.

[0025] In one embodiment, as shown in Figure 2 and Figure 3As shown, the cleaning component includes a scraper 401, both ends of the scraper 401 are fixedly connected with two sliding blocks 402, the two sliding blocks 402 are slidingly connected in the corresponding sliding grooves 403 of the spiral stirring rod 304, the spring 404 is arranged in the sliding groove 403, one end of the spring 404 is fixedly connected with the inner wall of the sliding groove 403, the other end of the spring 404 is fixedly connected with the sliding block 402, the scraper 401 is connected with the spiral stirring rod 304 through the sliding block 402, under the action of the spring 404, the scraper 401 is tightly attached to the inner wall of the polishing liquid stirring tank, with the rotation of the stirring shaft 302, the spiral stirring rod 304 and the scraper 401 are driven to rotate, the residual polishing liquid is scraped off, and the waste is avoided.

[0026] In one embodiment, as shown in Figure 2 As shown, the three stirring blades 303 are uniformly distributed along the outer end of the stirring shaft 302, the efficiency of stirring is improved, the uniformity of mixing is increased, and the service life of the machine is prolonged.

[0027] In one embodiment, as shown in Figure 2 As shown, the feeding shaft 501 is fixedly connected with the end of the stirring shaft 302 away from the stirring motor 301, the outer end of the feeding shaft 501 is fixedly connected with the spiral blade 502, when discharging, the feeding shaft 501 rotates with the stirring shaft 302, the spiral blade 502 rotates, the discharging rate of the polishing liquid is accelerated, and the discharge port 102 is prevented from being blocked.

[0028] In one embodiment, as shown in Figure 2 As shown, the outer end of the scraper 401 is attached to the inner wall of the polishing liquid stirring tank 100, and the residual polishing liquid on the inner wall of the polishing liquid stirring tank is scraped off better.

[0029] In one embodiment, as shown in Figure 2 As shown, the high-shear emulsifier 200 includes an emulsifying motor 201, the emulsifying motor 201 is fixedly connected with the upper end of the polishing liquid stirring tank 100, the output shaft of the emulsifying motor 201 is fixedly connected with the central shaft 202, the central shaft 202 is surrounded by four support shafts 203, one end of the support shaft 203 is fixedly connected with the inner wall of the polishing liquid stirring tank 100, the other end of the support shaft 203 is fixedly connected with the emulsifying head 204, the end of the central shaft 202 away from the emulsifying motor 201 is fixedly connected with the emulsifying head 204, the outer end of the central shaft 202 is fixedly connected with the impeller 205, the emulsifying head 204 is fixedly connected with the inner wall of the polishing liquid stirring tank 100 through the four support shafts 203, the emulsifying motor 201 is started, the emulsifying motor 201 drives the central shaft 202 to rotate, the central shaft 202 drives the impeller 205 and the emulsifying head 204 to rotate, the polishing liquid is ground and stirred, and the polishing liquid is mixed and emulsified.

[0030] In one embodiment, as shown inFigure 1 As shown, the lower end of the polishing liquid stirring tank 100 is fixedly connected with four evenly distributed supporting feet 600, which increases the stability of the device, evenly distributes the weight of the device, and increases the durability of the device.

[0031] The above embodiment discloses a polishing liquid stirring and emulsifying device, wherein materials are added to the polishing liquid stirring tank 100 through the feeding port 101, the stirring motor 301 is started, the stirring motor 301 drives the stirring shaft 302 to rotate, the stirring shaft 302 drives the three stirring blades 303 and the spiral stirring rod 304 to rotate together, the polishing liquid is stirred, the two are matched, the stirring rate is increased, the emulsifying motor 201 is started, the emulsifying motor 201 drives the central shaft 202 to rotate, the central shaft 202 drives the impeller 205 and the emulsifying head 204 to rotate, the polishing liquid is ground and stirred, the polishing liquid is mixed and emulsified, when the polishing liquid needs to be discharged, the feeding shaft 501 rotates with the stirring shaft 302, the spiral blade 502 rotates, the polishing liquid discharge rate is accelerated, and the discharge port 102 is prevented from being blocked, under the action of the spring 404, the scraper 401 is tightly attached to the inner wall of the polishing liquid stirring tank, rotates with the stirring shaft 302, drives the spiral stirring rod 304 and the scraper 401 to rotate, scrapes the residual polishing liquid, and avoids waste.

[0032] The above is only a specific embodiment of the present application, but the protection scope of the present application is not limited thereto, any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A polishing slurry stirring and emulsifying device, comprising: A polishing slurry mixing tank (100) is provided with a feeding port (101) at the upper end and a discharge port (102) at the lower end. The polishing slurry mixing tank (100) is characterized in that a stirring mechanism and a high-shear emulsifier (200) are provided at the upper end of the polishing slurry mixing tank (100). The stirring mechanism is located at the center of the polishing slurry mixing tank (100). The high-shear emulsifier (200) is fixedly connected to the upper end of the polishing slurry mixing tank (100) and is located on one side of the stirring mechanism. The upper end of the stirring mechanism is provided with a cleaning component to prevent wall adhesion.

2. The polishing fluid stirring and emulsifying device according to claim 1, characterized in that, The stirring mechanism includes a stirring motor (301), which is fixedly connected to the upper end of the polishing liquid stirring tank (100). The output shaft of the stirring motor (301) is fixedly connected to a stirring shaft (302). Three stirring blades (303) are fixedly connected to the outer end of the stirring shaft (302). A spiral stirring rod (304) is fixedly connected to the end of the stirring shaft (302) away from the stirring motor (301).

3. The polishing slurry stirring and emulsifying device according to claim 1, characterized in that, The cleaning component includes a scraper (401), with two sliders (402) fixedly connected to both ends of the scraper (401). The two sliders (402) are slidably connected in corresponding grooves (403) on the spiral stirring rod (304). A spring (404) is provided in the groove (403). One end of the spring (404) is fixedly connected to the inner wall of the groove (403), and the other end of the spring (404) is fixedly connected to the slider (402).

4. The polishing slurry stirring and emulsifying device according to claim 2, characterized in that, The three stirring blades (303) are evenly distributed along the outer end of the stirring shaft (302).

5. The polishing slurry stirring and emulsifying device according to claim 2, characterized in that, The end of the stirring shaft (302) away from the stirring motor (301) is fixedly connected to the feeding shaft (501), and the outer end of the feeding shaft (501) is fixedly connected to the spiral blade (502).

6. The polishing slurry stirring and emulsifying device according to claim 3, characterized in that, The outer end of the scraper (401) is in contact with the inner wall of the polishing liquid mixing tank (100).

7. The polishing slurry stirring and emulsifying device according to claim 1, characterized in that, The high-shear emulsifier (200) includes an emulsifying motor (201), which is fixedly connected to the upper end of the polishing liquid mixing tank (100). The output shaft of the emulsifying motor (201) is fixedly connected to a central shaft (202). There are four support shafts (203) around the central shaft (202). One end of the support shaft (203) is fixedly connected to the inner wall of the polishing liquid mixing tank (100), and the other end of the support shaft (203) is fixedly connected to an emulsifying head (204). The end of the central shaft (202) away from the emulsifying motor (201) is fixedly connected to the emulsifying head (204), and the outer end of the central shaft (202) is fixedly connected to an impeller (205).

8. The polishing slurry stirring and emulsifying device according to claim 1, characterized in that, The lower end of the polishing fluid mixing tank (100) is fixedly connected to four evenly distributed support feet (600).

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