Rotary spraying equipment for chip

Abstract

The utility model discloses rotary spraying equipment for chips, which relates to the field of chip production and comprises guide rings, a spraying device is arranged among the guide rings and comprises three guide structures arranged at certain angles, each guide structure comprises a first limiting piece, and a second limiting piece is arranged on the first limiting piece. A guide groove matched with the first limiting piece is formed in the guide ring, and the first limiting piece is rotationally arranged in the guide groove. According to the rotary spraying equipment disclosed by the utility model, through innovative structural design and a precise control system, the planetary ring can be cleaned when rotating by synchronizing the rotation of the planetary ring, and when cleaning is needed, all substrates are taken down, and cleaning liquid is sprayed out through the water spraying ring, so that the cleaning efficiency is greatly improved. And deposited metal at the bottom of the planet carrier is cleaned in cooperation with an upper cleaning brush, meanwhile, the rotating planet carrier throws away cleaned sewage, and then the sewage is collected.

Description

TECHNICAL FIELD

[0001] The utility model relates to the chip production field, concretely is a kind of rotary spraying equipment for chip. BACKGROUND

[0002] Chip, also known as integrated circuit (IC), is the core component of modern electronic devices and computing systems. It is a miniature electronic circuit that integrates a large number of tiny electronic components (such as transistors, resistors, capacitors, etc.) on a single semiconductor substrate.

[0003] In the semiconductor manufacturing industry, the surface treatment of chips is crucial, and spraying technology is widely used for cleaning, coating protective layers, or other functional treatments on chip surfaces. Traditional spraying methods often have problems such as uneven spraying, low efficiency, and difficulty in accurately controlling spraying angle and range, which directly affect the quality and yield of chips. Therefore, it is particularly important to develop a device that can efficiently, uniformly, and accurately control the spraying process.

[0004] During the spraying process of the chip, the vaporized metal moves upward, and the laser instrument is used to plate the metal onto the chip, thereby coating the surface of the chip. However, in order to achieve an average coating thickness, traditional coating methods require one-by-one processing, which is inefficient. Therefore, a rotary spraying device has appeared on the market to simultaneously spray and coat several chips. The existing spraying equipment is mainly composed of several planet carriers, which are arranged in combination and rotated by the planet carriers. At this time, the planet carriers have grooves, and the grooves have substrates, and the substrates have chips at the bottom. The chips rotate synchronously at a uniform speed, allowing the vaporized metal to be uniformly sprayed on the chips.

[0005] However, the existing rotary spraying equipment also deposits metal coating on the bottom of the planet disc when spraying and coating the surface of the chip. Over time, the coating becomes thicker and dirtier, which may cause contamination during chip processing. INVENTION CONTENTS

[0006] Therefore, the utility model aims to provide a rotary spraying equipment for chip to solve the problem that the existing rotary spraying equipment also deposits metal coating on the bottom of the planet disc when spraying and coating the surface of the chip. Over time, the coating becomes thicker and dirtier, which may cause contamination during chip processing.

[0007] In order to achieve the above object, the utility model provides the following technical scheme: a kind of rotary spraying equipment for chip, guiding ring is provided with spraying device between the guiding ring, the spraying device includes three guiding structure arranged at a certain angle, the guiding structure includes first limit sheet, guiding groove is opened in cooperation with first limit sheet on guiding ring, first limit sheet is rotationally arranged in guiding groove, first limit sheet side is provided with first connecting rod, second limit sheet is provided with first limit sheet bottom in first connecting rod, by the cooperation of first limit sheet and second limit sheet with guiding groove, guiding structure is rotated along the inner wall of guiding ring, the end of first connecting rod away from first limit sheet is provided with planet disc, nine setting grooves are opened in planet disc, driving ring is provided above guiding ring, second connecting rod is provided with three guiding structure cooperation in driving ring bottom, second connecting rod is connected with first limit sheet, driving device is provided above driving ring.

[0008] By adopting the above technical scheme, by three planet discs, nine setting grooves on each planet disc are provided, up to twenty-seven spraying objects can be sprayed at one time, the efficiency of spraying is guaranteed, in actual use, driving device drives driving ring to rotate, and then drives second connecting rod to rotate, and simultaneously drives three guiding structures to rotate inside guiding ring, so that three planet carriers move synchronously, and the uniformity of spraying is guaranteed.

[0009] The utility model further provides that the driving device includes a transmission disc, a plurality of fixed rods are provided on the driving ring, a connecting hole is formed in the bottom of the transmission disc in cooperation with the fixed rods, a connecting shaft is provided on the transmission disc, the other end of the connecting shaft is connected to a motor, a sleeve ring is provided outside the connecting shaft at the bottom of the motor, the sleeve ring is rotationally arranged between the connecting shaft, and a plurality of first support rods are provided around the sleeve ring.

[0010] By adopting the above technical scheme, the connecting shaft is driven to rotate by the motor, and then the transmission disc is driven to rotate, and then the driving ring is rotated under the cooperation of the connecting hole and the fixed rod.

[0011] The utility model further provides that a plurality of second support rods are provided around the guiding ring, a water collecting groove is provided below the spraying device, and the water collecting groove is arranged in a ring shape in cooperation with the spraying device.

[0012] By adopting the above technical scheme, the liquid spun out by the planet ring is collected by the water collecting groove, and then the liquid is discharged to prevent pollution of the internal part of the coating machine.

[0013] The utility model further provides that the setting groove can accommodate a substrate, and a limiting structure is provided around the plurality of setting grooves on the top of the planet disc, the limiting structure includes a plurality of mounting blocks, and a limiting rod is rotationally arranged on the mounting block.

[0014] By adopting the technical scheme, after the substrate is installed into the installation groove, the limiting rod is rotated above the substrate to limit the substrate.

[0015] The utility model further sets up, transmission shaft extends to planetary disc bottom, the center position of planetary disc bottom outside transmission shaft is provided with water spraying ring, transmission shaft is provided with the brush of scraping one end in planetary disc bottom.

[0016] By adopting the technical scheme, the brush is rotated by the rotation of the transmission shaft, and the bottom of the planetary disc is cleaned by cooperating with the water spraying ring, so that the vaporized metal is prevented from depositing on the bottom surface of the planetary disc.

[0017] The utility model further sets up, transmission shaft is provided with infusion connecting port away from one end of planetary disc, transmission shaft is set into hollow structure with infusion connecting port, water spraying ring is connected with transmission shaft inside.

[0018] By adopting the technical scheme, the water source is connected through the set infusion connecting port, the cleaning liquid is delivered into the transmission shaft, and then sprayed out through the water spraying ring.

[0019] The utility model further sets up, transmission disc is provided with water storage tank above, connecting shaft is provided with water storage tank, water storage tank bottom is provided with water outlet with infusion connecting port, water storage tank rotates with transmission disc.

[0020] By adopting the technical scheme, the water tank is rotated by the transmission disc, the planetary disc is rotated synchronously, the bottom of the planetary disc is cleaned when the planetary disc rotates, and the bottom of the planetary disc is ensured to be deposited with vaporized metal.

[0021] In summary, the utility model mainly has the following beneficial effects:

[0022] The rotary spraying equipment of the utility model is innovatively designed and precisely controlled, rotates synchronously, ensures that the planetary ring can also be cleaned when rotating, removes all substrates when cleaning is needed, sprays cleaning liquid through the water spraying ring, cleans the deposited metal on the bottom of the planetary frame through the cleaning brush, and the cleaned sewage is thrown out by the rotating planetary frame, and then the sewage is collected. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is the whole structure schematic diagram of the utility model;

[0024] Figure 2 It is the spraying device structure schematic diagram of the utility model;

[0025] Figure 3The driving device structural schematic view of the utility model;

[0026] Figure 4 The planetary disc bottom structural schematic view of the utility model;

[0027] Figure 5 The planetary disc structural schematic view of the utility model;

[0028] Figure 6 The partial structural schematic view of the utility model

[0029] Figure 7 The utility model discloses Figure 6 Another perspective schematic view.

[0030] In the drawing: 1, guide ring;2, first support rod;3, water storage tank;4, motor;5, second support rod;6, planetary disc;7, water receiving groove;8, installation groove;9, limiting rod;10, fixed rod;11, transmission ring;12, guide groove;13, base sheet;14, mounting block;15, scraping brush;16, water spraying ring;17, transmission shaft;18, first limiting sheet;19, first connecting rod;20, second limiting sheet;21, connecting shaft;22, second connecting rod;23, transmission disc;24, infusion connecting port;25, connecting hole;26, sleeve ring. Specific implementation

[0031] The technical scheme in the embodiments of the utility model will be described clearly and completely in combination with the drawings in the embodiments of the utility model. The embodiments described below are exemplary and are used for explaining the utility model only, and cannot be understood as limiting the utility model.

[0032] The embodiments of the utility model will be described below according to the overall structure of the utility model.

[0033] A kind of rotating spray equipment for chip, as shown in the figure, including guide ring 1, which is provided with spray device between the guide ring 1, the spray device includes three guide structures arranged at an angle, the guide structure includes first limiting piece 18, the guide groove 12 is opened in the first limiting piece 18 matched on the guide ring 1, the first limiting piece 18 is rotationally arranged in guide groove 12, the first limiting piece 18 side is provided with first connecting rod 19, the second limiting piece 20 is provided with the first connecting rod 19 at the bottom of first limiting piece 18, by the cooperation of first limiting piece 18 and second limiting piece 20 on guide groove 12, guide structure is rotated along the inner wall of guide ring 1, the first connecting rod 19 is provided with planetary disc 6 at the end away from the first limiting piece 18, nine installation grooves 8 are opened in the planetary disc 6, drive ring 11 is provided above the guide ring 1, the second connecting rod 22 is provided with the second connecting rod 22 at the bottom matched with three guide structures, the second connecting rod 22 is connected with the first limiting piece 18, so that the second connecting rod 22 is moved by drive ring 11, in turn, the guide device at the other end of second connecting rod 22 is synchronously rotated, the first connecting rod 19 is synchronously rotated while the first limiting piece 18 is rotated, in turn, three planetary discs 6 are synchronously rotated, in turn, the installation groove 8 on the planetary disc 6 is synchronously rotated with the rotation of planetary disc 6;

[0034] With it, the installation groove 8 can be installed with substrate 13, and a plurality of installation grooves 8 around the top of planetary disc 6 are provided with limiting structure, the limiting structure includes a plurality of mounting blocks 14, the limiting rod 9 is rotationally arranged on the mounting block 14, the chip is installed to the bottom surface of planetary disc 6 by substrate 13, after the installation of substrate 13 is completed, the limiting rod 9 is rotated to the upper side of substrate 13, and the substrate 13 is limited, to ensure the stability of chip spraying.

[0035] The drive device is provided above the drive ring 11, and the drive device includes transmission disc 23, a plurality of fixed rods 10 are provided on the drive ring 11, the connecting hole 25 is opened in the bottom of transmission disc 23 matched with fixed rod 10, the connecting shaft 21 is provided on the transmission disc 23, the motor 4 is connected to the other end of the connecting shaft 21, the sleeve ring 26 is provided outside the connecting shaft 21 at the bottom of the motor 4, the sleeve ring 26 is rotationally arranged between the connecting shaft 21, a plurality of first supporting rods 2 are provided outside the sleeve ring 26.

[0036] The first connecting rod 19 is provided with a transmission shaft 17 at one end close to the planetary disc 6, the transmission shaft 17 is provided with a liquid delivery connecting port 24 at one end away from the planetary disc 6, the transmission shaft 17 is provided with a hollow structure matched with the liquid delivery connecting port 24, the water spraying ring 16 is connected inside the transmission shaft 17, the water storage tank 3 is arranged above the transmission disc 23, the connecting shaft 21 penetrates through the water storage tank 3, the water storage tank 3 is provided with a water outlet at the bottom matched with the liquid delivery connecting port 24, the water storage tank 3 rotates with the transmission disc 23, the transmission shaft 17 extends to the bottom of the planetary disc 6, the water spraying ring 16 is arranged outside the transmission shaft 17 at the center position of the bottom of the planetary disc 6, the transmission shaft 17 is provided with a scraper 15 at one end of the bottom of the planetary disc 6, the cleaning liquid is stored in the water storage tank 3, the cleaning liquid is output to the liquid delivery connecting port 24 through the water outlet, the cleaning liquid is sprayed from the water spraying ring 16 to the bottom surface of the planetary disc 6 matched with the hollow transmission shaft 17, and the scraper 15 rotates to clean the bottom of the planetary disc 6, so that the bottom of the planetary disc 6 is cleaned.

[0037] The guide ring 1 is provided with a plurality of second supporting rods 5 outside, the spraying device is provided below with a water collecting groove 7, the water collecting groove 7 is provided with a ring shape matched with the spraying device, after cleaning, the sewage is thrown into the water collecting groove 7 by the rotating planetary disc 6 to be collected, so that the sewage does not pollute the environment in the plating device.

[0038] The transmission shaft 17 in the above structure is driven by a separate motor.

[0039] Although the embodiments of the present application have been shown and described, the specific embodiments are merely illustrative of the present application, and are not intended to limit the present application, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner, and those skilled in the art can make modifications, replacements and variations of the embodiments without creative contribution after reading the specification, as long as the principles and purposes of the present application are not deviated, and the present application is protected by the patent law as long as it is within the scope of the claims.

Claims

1. A spin-coating apparatus for a wafer comprising a guide ring (1), characterized in that: The guide ring (1) is provided with a spraying device, the spraying device comprises three guide structures arranged at an angle, the guide structure comprises a first limiting sheet (18), a guide groove (12) is formed on the guide ring (1) matched with the first limiting sheet (18), the first limiting sheet (18) is rotatably arranged in the guide groove (12), a first connecting rod (19) is arranged on one side of the first limiting sheet (18), a second limiting sheet (20) is arranged on the bottom of the first connecting rod (19) matched with the first limiting sheet (18), the guide structure is rotated along the inner wall of the guide ring (1) through the cooperation of the first limiting sheet (18) and the second limiting sheet (20) matched with the guide groove (12), a planet disc (6) is arranged on the end of the first connecting rod (19) away from the first limiting sheet (18), a transmission shaft (17) is arranged on the end of the first connecting rod (19) close to the planet disc (6), nine installation grooves (8) are formed on the planet disc (6), a transmission ring (11) is arranged above the guide ring (1), a second connecting rod (22) is arranged on the bottom of the transmission ring (11) matched with the three guide structures, the second connecting rod (22) is connected with the first limiting sheet (18), a driving device is arranged above the transmission ring (11).

2. A spin spray apparatus for a chip as claimed in claim 1, wherein: The driving device comprises a transmission disc (23), a plurality of fixed rods (10) are arranged on the transmission ring (11), a connecting hole (25) is formed on the bottom of the transmission disc (23) matched with the fixed rod (10), a connecting shaft (21) is arranged on the transmission disc (23), the other end of the connecting shaft (21) is connected with a motor (4), a sleeve ring (26) is arranged on the outside of the connecting shaft (21) on the bottom of the motor (4), the sleeve ring (26) is rotatably arranged between the connecting shaft (21), a plurality of first supporting rods (2) are arranged on the outside of the sleeve ring (26).

3. A spin spray apparatus for a chip as defined in claim 1, wherein: A plurality of second supporting rods (5) are arranged on the outside of the guide ring (1), a water receiving groove (7) is arranged below the spraying device, the water receiving groove (7) is arranged in a ring shape matched with the spraying device.

4. A spin spray apparatus for a chip as defined in claim 1, wherein: A substrate (13) is arranged in the installation groove (8), a limiting structure is arranged around the plurality of installation grooves (8) on the top of the planet disc (6) matched with the substrate (13), the limiting structure comprises a plurality of mounting blocks (14), a limiting rod (9) is rotatably arranged on the mounting block (14).

5. A spin spray apparatus for a chip as defined in claim 1, wherein: The transmission shaft (17) extends to the bottom of the planet disc (6), a water spraying ring (16) is arranged on the outside of the transmission shaft (17) at the center position of the bottom of the planet disc (6), a scraper (15) is arranged on one end of the transmission shaft (17) at the bottom of the planet disc (6).

6. A spin spray apparatus for a chip as claimed in claim 5, wherein: A transfusion connecting port (24) is arranged on the end of the transmission shaft (17) away from the planet disc (6), the transmission shaft (17) is arranged in a hollow structure matched with the transfusion connecting port (24), the water spraying ring (16) is connected with the inside of the transmission shaft (17).

7. A spin spray apparatus for a chip as defined in claim 2, wherein: The transmission disc (23) is provided with a water storage tank (3) above, the connecting shaft (21) is provided through the water storage tank (3), the water storage tank (3) is provided with a water outlet at the bottom matched with the infusion connecting port (24), and the water storage tank (3) rotates with the transmission disc (23).

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