Position adjusting mechanism and laser processing equipment

Abstract

The utility model discloses a position adjusting mechanism and laser processing equipment. The position adjusting mechanism comprises a mounting frame, an adjusting piece and a driving mechanism, two limiting grooves are formed in the mounting frame and extend in the moving direction of the adjusting piece. The two adjusting pieces are movably arranged on the mounting frame, limiting blocks are arranged on the adjusting pieces, and the limiting blocks correspond to the limiting grooves in a one-to-one mode and are arranged in the limiting grooves in a sliding mode; the driving mechanism is arranged on the mounting frame, connected with the adjusting pieces and used for driving the two adjusting pieces to get close to each other or get away from each other. Movement limiting of the adjusting piece is achieved through abutting fit of the limiting groove and the limiting block, the weight of the installation frame can be reduced in the mode that the limiting groove is formed for limiting, meanwhile, due to the fact that the limiting block can be partially embedded into the limiting groove, occupied space is greatly saved, and the installation frame is convenient to use. And the portability and the compactness of the position adjusting mechanism are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing technical field more specifically, relate to a position adjusting mechanism and laser processing equipment. BACKGROUND

[0002] In the wafer processing, to ensure the accuracy of wafer position, usually utilizes position adjusting mechanism to carry out positioning adjustment to it before wafer enters next station, and then guarantees the precision of wafer processing. However, the position adjusting mechanism in the prior art has the defects of large volume, large space occupation and heavy quality. Therefore, how to improve the compactness and lightness of the position adjusting mechanism becomes a technical problem to be solved by the technical personnel in the field. TECHNICAL SOLUTION

[0003] Therefore, the utility model discloses the purpose in providing a kind of position adjusting mechanism to improve the compactness and lightness of position adjusting mechanism.

[0004] Another purpose of the utility model is to provide a kind of laser processing equipment comprising the above-mentioned position adjusting mechanism.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] A kind of position adjusting mechanism, including mounting frame, adjusting piece and drive mechanism;

[0007] The adjusting piece is two, and is movably arranged on the mounting frame;

[0008] Limiting slot is provided on the mounting frame, and the limiting slot is two, and extends along the moving direction of the adjusting piece;

[0009] Limiting block is provided on the adjusting piece, and the limiting block corresponds to the limiting slot one by one, and is slidably arranged in the limiting slot;

[0010] The drive mechanism is arranged on the mounting frame, and is connected with the adjusting piece, for driving two adjusting pieces to be close to each other or away from each other.

[0011] Optionally, in the above-mentioned position adjusting mechanism, along the extension direction of the limiting slot, both ends of the limiting block are provided with elastic buffer, and the elastic buffer is used to abut with the end wall of the limiting slot.

[0012] Optionally, in the above-mentioned position adjusting mechanism, first limit sensor and second limit sensor are provided on the mounting frame, the first limit sensor is used to detect whether the adjusting piece moves to initial position, and the second limit sensor is used to detect whether the adjusting piece moves to limit position;

[0013] When the adjusting member is in the initial position, the two adjusting members are spaced apart by a first distance, and when the adjusting member is in the defined position, the two adjusting members are spaced apart by a second distance, the first distance being greater than the second distance.

[0014] Optionally, in the position adjusting mechanism, two end faces of the limiting block are provided with fault alarm sensors along the extension direction of the limiting slot, or the end wall of the limiting slot is provided with a fault alarm sensor.

[0015] When the limiting block abuts against the end wall of the limiting slot, the fault alarm sensor alarms.

[0016] Optionally, in the position adjusting mechanism, a guide rail is arranged on the mounting frame, the guide rail extends along the moving direction of the adjusting member, and the adjusting member is slidably arranged on the guide rail.

[0017] Optionally, in the position adjusting mechanism, the guide rail is two and arranged on both sides of the limiting slot, and the two adjusting members are slidably connected with the two guide rails through the sliding blocks, and the extension direction of the adjusting member is perpendicular to the extension direction of the guide rail.

[0018] Optionally, in the position adjusting mechanism, the driving mechanism comprises:

[0019] a driving motor arranged on the mounting frame;

[0020] synchronous wheels arranged in two, one of the two synchronous wheels is rotatably arranged on the mounting frame, and the other is drivingly connected with the driving motor;

[0021] a synchronous belt drivingly connected between the two synchronous wheels, and the two adjusting members are respectively connected with the synchronous belt located on both sides of the two synchronous wheels.

[0022] A laser processing device comprising a stock bin assembly, a carrying mechanism and the above-mentioned position adjusting mechanism, the carrying mechanism is used for carrying a wafer from the stock bin assembly to the adjusting member of the position adjusting mechanism.

[0023] Optionally, in the laser processing device, a side of the mounting frame facing the stock bin assembly is provided with a stock bin sensor, the stock bin sensor is used for detecting whether the wafer loading position of the stock bin assembly is placed with a wafer; and / or,

[0024] a side of the mounting frame facing the stock bin assembly is provided with an adjusting sensor, the adjusting sensor is used for detecting whether each wafer stored in the stock bin of the stock bin assembly is protruded from the stock bin.

[0025] Optionally, in the above laser processing equipment, a code scanning component is arranged on the mounting frame, and the code scanning component is configured to scan the wafer carried by the carrying mechanism during movement of the carrying mechanism from the magazine assembly to the adjusting member; and / or,

[0026] A wafer sensor is arranged on the mounting frame, and the wafer sensor is configured to detect whether the wafer is carried by the carrying mechanism during movement of the carrying mechanism from the magazine assembly to the adjusting member.

[0027] The position adjusting mechanism provided by the utility model comprises a mounting frame, adjusting members and a driving mechanism; limit grooves are arranged on the mounting frame, the limit grooves are two in number and extend along the moving direction of the adjusting members; the adjusting members are two in number and are movably arranged on the mounting frame, limit blocks are arranged on the adjusting members, the limit blocks correspond to the limit grooves one by one and are slidably arranged in the limit grooves; the driving mechanism is arranged on the mounting frame and is connected with the adjusting members and is used for driving the two adjusting members to move close to each other or move away from each other. During movement of the driving mechanism to drive the two adjusting members to move close to each other or move away from each other, the two limit blocks slide in the limit grooves corresponding to the two limit blocks respectively, when the limit blocks slide to the end position of the two ends of the limit grooves and abut against the end walls of the limit grooves, the limit blocks cannot continue to slide, and the adjusting members stop moving, so that the limit of the limit position of the adjusting members is realized.

[0028] Compared with the prior art, the position adjusting mechanism provided by the utility model realizes the limit of the movement of the adjusting members through the abutment cooperation of the limit grooves and the limit blocks, the limit through the opening of the limit grooves can reduce the weight of the mounting frame, and since the limit blocks can be partially embedded in the limit grooves, the occupation of space is greatly saved, and the portability and compactness of the position adjusting mechanism are improved.

[0029] The laser processing equipment provided by the utility model comprises a magazine assembly, a carrying mechanism and the above position adjusting mechanism, the carrying mechanism is used for carrying the wafer from the magazine assembly to the adjusting member of the position adjusting mechanism, since the position adjusting mechanism is comprised, the above structure and beneficial effects are also possessed, other structures refer to the prior art, and detailed description is not given here. BRIEF DESCRIPTION OF DRAWINGS

[0030] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor on the premise of the drawings.

[0031] Figure 1The adjustment structure schematic diagram of the position adjusting mechanism for wafer is disclosed in the embodiment of the utility model

[0032] Figure 2 The structure schematic of the position adjusting mechanism is disclosed in the embodiment of the utility model Figure One ;

[0033] Figure 3 The structure schematic of the position adjusting mechanism is disclosed in the embodiment of the utility model Figure Two ;

[0034] Figure 4 The structure schematic of the position adjusting mechanism is disclosed in the embodiment of the utility model Figure Three ;

[0035] Figure 5 The structure schematic of the mounting frame is disclosed in the embodiment of the utility model Figure One ;

[0036] Figure 6 The structure schematic of the mounting frame is disclosed in the embodiment of the utility model Figure Two ;

[0037] Figure 7 The structure schematic of the material bin is disclosed in the embodiment of the utility model Figure One ;

[0038] Figure 8 The structure schematic of the material bin is disclosed in the embodiment of the utility model Figure Two ;

[0039] Figure 9 The relative position schematic of the position adjusting mechanism and the material bin is disclosed in the embodiment of the utility model Figure One ;

[0040] Figure 10 The relative position schematic of the position adjusting mechanism and the material bin is disclosed in the embodiment of the utility model Figure Two .

[0041] Among them, 100 is mounting frame, 101 is limit slot, 110 is guide rail, 111 is sliding block, 120 is baffle

[0042] 200 is adjusting piece, 201 is elastic buffer, 210 is limit block

[0043] 300 is driving motor, 310 is synchronous wheel, 320 is synchronous belt

[0044] 400 is code scanning component, 410 is first limit sensor, 411 is second limit sensor, 420 is material bin sensor, 430 is wafer sensor, 440 is adjusting sensor

[0045] 500 is a bunker, and 510 is a jacking mechanism.

[0046] 600 is a wafer. DETAILED DESCRIPTION

[0047] The core of the utility model lies in disclosing a position adjusting mechanism to improve compactness and portability of the position adjusting mechanism.

[0048] Another core of the utility model lies in disclosing a laser processing equipment comprising the position adjusting mechanism.

[0049] Hereinafter, the embodiments will be described with reference to the drawings. In addition, the embodiments shown below do not have any limiting effect on the utility model content recited in the claims. In addition, the entire content of the configuration represented in the following embodiments is not limited to what is necessary as a solution to the utility model recited in the claims. It should be noted that, for the convenience of description, only the parts related to the utility model are shown in the drawings. In the case of no conflict, the embodiments in the utility model and the features in the embodiments can be combined with each other.

[0050] In combination Figures 1-10 The position adjusting mechanism disclosed by the utility model comprises a mounting frame 100, adjusting pieces 200 and a driving mechanism. Limiting grooves 101 are arranged on the mounting frame 100, the limiting grooves 101 are two and extend along the moving direction of the adjusting pieces 200. The adjusting pieces 200 are two and movably arranged on the mounting frame 100, and limiting blocks 210 are arranged on the adjusting pieces 200, the limiting blocks 210 correspond to the limiting grooves 101 one by one and are slidably arranged in the limiting grooves 101. The driving mechanism is arranged on the mounting frame 100 and connected with the adjusting pieces 200, and is used for driving the two adjusting pieces 200 to approach each other or move away from each other.

[0051] In the initial state, the two adjusting pieces 200 are spaced apart by a first distance, and the wafer 600 can be placed on the bearing surface of the adjusting piece 200. In the adjustment process, in combination Figure 1 The two adjusting pieces 200 approach each other until the two sides of the wafer 600 are respectively attached to the adjusting surfaces on the two adjusting pieces 200, so as to realize the adjustment of the attitude of the wafer 600. The adjusted wafer 600 can be removed by the carrying mechanism, and the driving mechanism drives the two adjusting pieces 200 to reset. In the process that the driving mechanism drives the two adjusting pieces 200 to approach each other or move away from each other, the two limiting blocks 210 slide in the respective corresponding limiting grooves 101. When the limiting block 210 slides to the end position of the limiting groove 101 and abuts against the end wall of the limiting groove 101, the limiting block 210 cannot continue to slide, and the adjusting piece 200 stops moving, so as to realize the limiting of the moving limit position of the adjusting piece 200.

[0052] Compared with the prior art, the position adjusting mechanism disclosed by the utility model realizes the movement limiting of the adjusting piece 200 through the abutting cooperation of the limiting groove 101 and the limiting block 210, the weight of the mounting frame 100 can be reduced through the limiting mode of opening the limiting groove 101, and the space occupation can be greatly saved due to the fact that the limiting block 210 can be partially embedded in the limiting groove 101, and the portability and compactness of the position adjusting mechanism are improved.

[0053] In combination Figure 5 In a specific embodiment disclosed by the utility model, along the extension direction of the limiting groove 101, both ends of the limiting block 210 are provided with elastic buffers 201, and the elastic buffers 201 are used for abutting against the end walls of the limiting groove 101. The elastic buffers 201 specifically include but are not limited to elastic rubber pads, when the limiting block 210 slides to the both end positions of the limiting groove 101, the elastic buffers 201 are compressed between the limiting block 210 and the end walls of the limiting groove 101, so that the direct contact between the limiting block 210 and the limiting groove 101 can be avoided, and the collision between the limiting groove 101 and the limiting block 210 can be buffered.

[0054] Further optimization scheme, in combination Figure 5 The mounting frame 100 is provided with a first limiting sensor 410 and a second limiting sensor 411, the first limiting sensor 410 is used for detecting whether the adjusting piece 200 moves to the initial position, and the second limiting sensor 411 is used for detecting whether the adjusting piece 200 moves to the limited position; when the adjusting piece 200 is in the initial position, the two adjusting pieces 200 are spaced apart by a first distance, when the adjusting piece 200 is in the limited position, the two adjusting pieces 200 are spaced apart by a second distance, and the first distance is greater than the second distance. When the position adjusting mechanism is normally operated, the movement stroke of the adjusting piece 200 is limited through the setting of the first limiting sensor 410 and the second limiting sensor 411, when the first limiting sensor 410 and the second limiting sensor 411 fail, the movement stroke of the adjusting piece 200 is limited through the cooperation of the limiting groove 101 and the limiting block 210.

[0055] In order to facilitate timely reminding the operating personnel to overhaul when the position adjusting mechanism fails, the end walls at both ends of the limiting groove 101 or the two ends of the limiting block 210 along the movement direction of the adjusting piece 200 can be provided with a fault alarm sensor, the fault alarm sensor is triggered to alarm when the limiting block 210 contacts the end walls of the limiting groove 101, and the operating personnel can be reminded that the position adjusting mechanism fails and needs to be maintained.

[0056] Further, the two limiting grooves 101 can be arranged in parallel and staggered, so that the position arrangement of the two limiting grooves 101 does not affect each other, and then the length of the limiting groove 101 can be appropriately lengthened, and the weight of the position adjusting mechanism is further reduced.

[0057] In order to ensure reliable sliding of the adjusting member 200, a guide rail 110 is arranged on the mounting frame 100, the guide rail 110 extends along the moving direction of the adjusting member 200, and the adjusting member 200 is slidably arranged on the guide rail 110 through a sliding block 111, during the movement of the adjusting member 200 driven by the driving mechanism, the adjusting member 200 slides along the extension direction of the guide rail 110, and the guide rail 110 guides the sliding of the adjusting member 200. Figure 5 , the mounting frame 100 is provided with at least one guide rail 110, the guide rail 110 extends along the moving direction of the adjusting member 200, and the adjusting member 200 is slidably arranged on the guide rail 110 through a sliding block 111, during the movement of the adjusting member 200 driven by the driving mechanism, the adjusting member 200 slides along the extension direction of the guide rail 110, and the guide rail 110 guides the sliding of the adjusting member 200.

[0058] In an embodiment, in combination with Figure 3 , the guide rail 110 is two parallel arrangements, the two guide rails 110 are arranged on both sides of the limiting groove 101, and the two adjusting members 200 are slidably connected with the two guide rails 110 through the sliding blocks 111, the adjusting member 200 extends along the direction perpendicular to the guide rail 110, and the two guide rails 110 can effectively increase the fixed points of the adjusting member 200, thereby improving the carrying capacity of the adjusting member 200 arranged in a cantilever shape.

[0059] In combination with Figure 6 , the mounting frame 100 includes a mounting bottom plate, a fixed plate and a mounting side plate, the limiting groove 101 is arranged on the mounting bottom plate, the fixed plate is parallel to the mounting bottom plate and is used for being fixed with the ground or the base; the mounting side plate is connected between the mounting bottom plate and the fixed plate.

[0060] In an embodiment, in combination with Figure 6 , the driving mechanism includes a driving motor 300, two synchronous wheels 310 and a synchronous belt 320, the driving motor 300 is arranged on the mounting side plate, one of the two synchronous wheels 310 is drivingly connected with the driving motor 300, the other synchronous wheel 310 is rotatably arranged on the mounting bottom plate, the synchronous belt 320 is drivingly connected between the two synchronous wheels 310, the adjusting member 200 is connected with the synchronous belt 320, in combination with Figure 6 , the two adjusting members 200 are respectively connected on the opposite two parts of the synchronous belt 320, when the driving motor 300 drives the synchronous belt 320 to rotate, the two adjusting members 200 synchronously move with the movement of the synchronous belt 320 and approach or move away from each other.

[0061] The utility model discloses a laser processing equipment includes stock bin subassembly, handling mechanism and above -mentioned position adjusting mechanism, handling mechanism is used for carrying wafer 600 from stock bin subassembly to the adjusting member 200 of position adjusting mechanism, because including above -mentioned position adjusting mechanism, so also have above -mentioned structure and beneficial effect, other structure refers to prior art, here not to repeat.

[0062] Specifically, the laser processing equipment can be a laser table cutting machine.

[0063] In combination with Figure 7 andFigure 8 The magazine assembly comprises a magazine 500 and a jacking mechanism 510, the jacking mechanism 510 can lift the magazine 500 in the vertical direction, so that each wafer 600 arranged in the vertical direction in the magazine 500 can be lifted to the feeding position respectively, thereby facilitating the carrying mechanism to carry.

[0064] In an embodiment, in combination with Figure 9 and Figure 10 The arrow in the figure shows the carrying direction of the carrying mechanism for carrying the wafer 600 from the magazine 500 to the position adjusting mechanism. The side of the mounting frame 100 facing the magazine assembly is provided with a magazine sensor 420, which is used to detect whether the wafer 600 is placed in the feeding position of the magazine assembly, so as to avoid the invalid carrying of the carrying mechanism.

[0065] In combination with Figure 1 The side of the mounting frame 100 facing the magazine assembly is provided with an adjusting sensor 440, which is used to detect whether each wafer 600 stored in the magazine 500 of the magazine assembly is protruding from the magazine 500, thereby facilitating the carrying of the carrying mechanism.

[0066] In combination with Figure 1 The mounting frame 100 is provided with a code scanning component 400, which is used to scan the wafer 600 carried by the carrying mechanism during the movement of the carrying mechanism from the magazine assembly to the adjusting member 200.

[0067] In an embodiment, the mounting frame 100 is provided with a wafer sensor 430, which is used to detect whether the wafer 600 is carried by the carrying mechanism during the movement of the carrying mechanism from the magazine assembly to the adjusting member 200, so as to avoid the invalid carrying of the carrying mechanism.

[0068] The position of the adjusting member 200 for adjusting the wafer 600 is defined as an adjusting station, in combination with Figure 9 The carrying direction of the carrying mechanism is parallel to the extension direction of the adjusting member 200, and the above-mentioned code scanning component 400 and wafer sensor 430 are arranged between the magazine 500 and the adjusting station to detect before the wafer 600 is placed on the adjusting station by the carrying mechanism.

[0069] In combination with Figure 9 The mounting frame 100 is provided with a baffle 120, which protects each structure on the mounting frame 100, and an avoiding hole is formed on the mounting frame 100 to avoid affecting the detection of the magazine sensor 420 and the wafer sensor 430.

[0070] Those skilled in the art can understand that the types of the various sensors in the utility model are not limited to photoelectric sensors, travel sensors and the like, and only need to be able to realize the functions thereof.

[0071] The terms "first" and "second" and the like in the description and claims of the utility model are used to distinguish different objects, and are not used to describe a specific order, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more features.

[0072] The above description of the disclosed embodiments enables those skilled in the art to implement or use the utility model. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the utility model. The specific technical means in some embodiments can be partially or wholly combined into another embodiment on the premise that it is not explicitly excluded by another embodiment. Therefore, the utility model will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A position adjustment mechanism, characterized in that, Includes a mounting bracket (100), an adjustment component (200), and a drive mechanism; There are two adjustment members (200), which are movably mounted on the mounting bracket (100); The mounting bracket (100) is provided with two limiting grooves (101) that extend along the moving direction of the adjusting member (200). The adjusting member (200) is provided with a limiting block (210), the limiting block (210) corresponds one-to-one with the limiting groove (101), and is slidably disposed in the limiting groove (101); The drive mechanism is mounted on the mounting bracket (100) and connected to the adjustment member (200), and is used to drive the two adjustment members (200) to move closer to each other or further apart.

2. The position adjustment mechanism as described in claim 1, characterized in that, Along the extension direction of the limiting groove (101), elastic buffers (201) are provided on both end faces of the limiting block (210), and the elastic buffers (201) are used to abut against the end wall of the limiting groove (101).

3. The position adjustment mechanism as described in claim 1, characterized in that, The mounting bracket (100) is provided with a first limit sensor (410) and a second limit sensor (411). The first limit sensor (410) is used to detect whether the adjustment member (200) has moved to the initial position, and the second limit sensor (411) is used to detect whether the adjustment member (200) has moved to the limited position. When the adjustment member (200) is in the initial position, the two adjustment members (200) are spaced apart by a first distance, and when the adjustment member (200) is in the defined position, the two adjustment members (200) are spaced apart by a second distance, wherein the first distance is greater than the second distance.

4. The position adjustment mechanism as described in claim 1, characterized in that, Along the extension direction of the limiting groove (101), fault alarm sensors are provided on the end faces of both ends of the limiting block (210), or fault alarm sensors are provided on the end walls of the limiting groove (101). When the limiting block (210) abuts against the end wall of the limiting groove (101), the fault alarm sensor will sound an alarm.

5. The position adjustment mechanism as described in claim 1, characterized in that, The mounting bracket (100) is provided with a guide rail (110), the guide rail (110) extends along the moving direction of the adjusting member (200), and the adjusting member (200) is slidably disposed on the guide rail (110).

6. The position adjustment mechanism as described in claim 5, characterized in that, There are two guide rails (110) and they are disposed on both sides of the limiting groove (101). Both adjustment members (200) are slidably connected to the two guide rails (110) through sliders (111). The extension direction of the adjustment member (200) is perpendicular to the extension direction of the guide rail (110).

7. The position adjustment mechanism as described in claim 1, characterized in that, The drive mechanism includes: A drive motor (300) is mounted on the mounting bracket (100); Two synchronous pulleys (310) are provided, one of which is rotatably mounted on the mounting bracket (100), and the other is connected to the drive motor (300) for transmission. A timing belt (320) is driven between the two timing pulleys (310), and the two adjusting members (200) are respectively connected to the timing belt (320) located on both sides of the two timing pulleys (310).

8. A laser processing device, characterized in that, It includes a hopper assembly, a transport mechanism, and a position adjustment mechanism as described in any one of claims 1-7, wherein the transport mechanism is used to transport a wafer (600) from the hopper assembly to an adjustment member (200) of the position adjustment mechanism.

9. The laser processing equipment as described in claim 8, characterized in that, A hopper sensor (420) is provided on the side of the mounting bracket (100) facing the hopper assembly. The hopper sensor (420) is used to detect whether a wafer (600) is placed at the loading position of the hopper assembly; and / or, An adjustment sensor (440) is provided on the side of the mounting bracket (100) facing the hopper assembly. The adjustment sensor (440) is used to detect whether each wafer (600) stored in the hopper (500) of the hopper assembly protrudes from the hopper (500).

10. The laser processing equipment as described in claim 8, characterized in that, The mounting bracket (100) is provided with a barcode scanning component (400), which is used to scan the wafer (600) being transported by the transport mechanism during the movement of the transport mechanism from the hopper assembly to the adjusting member (200); and / or, A wafer sensor (430) is provided on the mounting bracket (100). The wafer sensor (430) is used to detect whether the conveying mechanism is carrying a wafer (600) during the process of the conveying mechanism moving from the hopper assembly to the adjusting member (200).

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