Grinder unit and chemical mechanical grinding equipment
By using an electromagnetic coil to generate magnetic attraction and power-off control in the grinding base, the problem of time-consuming and labor-intensive grinding disc replacement has been solved, enabling fast and labor-saving grinding disc replacement and reducing labor costs.
Patent Information
- Application Number
- CN202423242536.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-11-21
- Estimated Expiration
- 2034-12-26
AI Technical Summary
The existing grinding disc replacement process is time-consuming and labor-intensive, and the screw connections are prone to stripping, making disassembly difficult and increasing labor costs and time.
The grinding disc is connected and disconnected by using an electromagnetic coil to generate magnetic attraction in the grinding base and de-energizing it. The electromagnetic coil is energized to generate magnetic attraction to make the grinding disc contact the grinding base, and disconnection is achieved when the power is turned off, simplifying the replacement process.
It enables quick replacement of grinding discs, reducing labor costs and time consumption, and improving replacement efficiency.
Smart Images
Figure CN223572861U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of semiconductor equipment, concretely is a kind of grinder unit and chemical mechanical grinding equipment. BACKGROUND
[0002] Chemical mechanical polishing (CMP) equipment is an important equipment with wide application in the field of semiconductor manufacturing, optical element processing and the like.Chemical mechanical polishing technology carried out by chemical mechanical polishing equipment is a processing technology combining chemical corrosion and mechanical removal, and is mainly used to realize surface planarization of sample to be polished.
[0003] The grinding disc is a key component in the chemical mechanical polishing equipment.The flatness and precision of the grinding disc directly affect the grinding quality.As the grinding process proceeds, the surface of the grinding disc is gradually worn out, resulting in a decrease in the flatness of the grinding disc, thereby affecting the surface quality of the sample to be polished after grinding.Therefore, in order to maintain the grinding quality, the grinding disc needs to be replaced.
[0004] The grinding disc currently used is fixedly connected with the grinding base by screws.Each time the grinding disc is replaced, the worker needs to take out the screws and the old grinding disc, and then fix the new grinding disc on the grinding base by screws.The whole replacement process is time-consuming and laborious.Moreover, since the screws are small, they are easy to slip, which makes it difficult to take out the screws, further prolonging the replacement time and wasting labor cost. SUMMARY
[0005] To solve the above technical problems, the present application provides a grinder unit and a chemical mechanical polishing equipment.
[0006] In a first aspect, the embodiments of the present application disclose a grinder unit, comprising:
[0007] a grinding disc;
[0008] a grinding base;The grinding base comprises an electromagnetic coil;The grinding disc is attracted and connected with the grinding base when the electromagnetic coil is powered to generate magnetic attraction;The grinding disc is disconnected with the grinding base after the electromagnetic coil is powered off and the magnetic attraction disappears.
[0009] In some possible embodiments,
[0010] The electromagnetic coil is located in the interior of the grinding base.
[0011] In some possible embodiments,
[0012] The grinding base comprises a flange;
[0013] The flange plate is located at one end of the grinding base facing the grinding disc; the grinding disc is attracted to contact and connect with the flange plate when the electromagnetic coil is powered to generate magnetic attraction; the grinding disc is disconnected from the flange plate after the electromagnetic coil is powered off and the magnetic attraction disappears.
[0014] In some possible embodiments,
[0015] The grinding base comprises a grinding body and a support; the grinding body is internally provided with a cavity;
[0016] One end of the support is connected to the flange plate, and the other end of the support is placed in the cavity; the electromagnetic coil is wound on the support.
[0017] In some possible embodiments,
[0018] The flange plate comprises at least one protruding part, and the grinding disc comprises at least one recessed part;
[0019] The at least one protruding part and the at least one recessed part are matched one by one, and the protruding part is inserted into the recessed part when the flange plate and the grinding disc are in contact and connected.
[0020] In some possible embodiments,
[0021] The number of protruding parts is 2-6, and the number of recessed parts is 2-6.
[0022] In some possible embodiments,
[0023] The protruding part is located at the edge position of the flange plate, and the recessed part is located at the edge position of the grinding disc.
[0024] In some possible embodiments,
[0025] The grinder unit comprises a current measuring device and a control device;
[0026] The control device is used to control the power-on and power-off of the electromagnetic coil;
[0027] The current measuring device is electrically connected with the control device; the current measuring device is used to measure the current value passing through the electromagnetic coil and transmit the current value to the control device.
[0028] In some possible embodiments,
[0029] The grinder unit comprises a reminding device;
[0030] The reminding device is electrically connected with the control device;
[0031] The control device is used to control the reminding device to send a reminding signal when the current value is lower than a preset current value.
[0032] In some possible embodiments,
[0033] The flange plate is made of at least one of iron, nickel and cobalt;
[0034] The support is made of at least one of iron, nickel and cobalt;
[0035] The grinding disc is made of at least one of iron, nickel and cobalt.
[0036] In a second aspect, the embodiments of the present application disclose a chemical mechanical grinding device, comprising the grinder unit of any one of the above.
[0037] The technical scheme provided by the embodiments of the present application has the following technical effects:
[0038] The grinder unit of the embodiments of the present application comprises a grinding disc, a grinding base, the grinding base comprises an electromagnetic coil, the grinding disc is attracted to contact and connect with the grinding base when the electromagnetic coil generates magnetic attraction force by being electrified, and the grinding disc is disconnected from the grinding base after the electromagnetic coil is de-energized and the magnetic attraction force disappears. In the embodiments of the present application, the electromagnetic coil is arranged in the grinding base, and the contact connection and disconnection of the grinding disc and the grinding base are realized based on the fact that the electromagnetic coil generates magnetic attraction force by being electrified and does not generate magnetic attraction force by being de-energized, so that the replacement operation of the grinding disc is more time-saving and labor-saving. BRIEF DESCRIPTION OF DRAWINGS
[0039] In order to more clearly illustrate the technical schemes and advantages of the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creative labor.
[0040] Figure 1 is a schematic diagram of a grinder unit provided by the embodiments of the present application Figure 1 ;
[0041] Figure 2 is a schematic diagram of a grinder unit provided by the embodiments of the present application Figure 2 ;
[0042] Figure 3 is a schematic diagram of a flange plate connected with a support provided by the embodiments of the present application;
[0043] Figure 4 is a schematic diagram of a grinding disc provided by the embodiments of the present application. DETAILED DESCRIPTION
[0044] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.
[0045] It should be noted that the term "an embodiment" or "embodiment" in the specification of the embodiments of this application refers to a specific feature, structure, or characteristic that can be included in at least one implementation of this application. It should be understood that in the specification, claims, and accompanying drawings of the embodiments of this application, the terms "upper," "lower," "top," "bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" and "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented in orders other than those illustrated or described herein. Furthermore, in the description of this embodiment, unless otherwise stated, "a plurality of" means two or more. Additionally, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, or product that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or devices.
[0046] It should be understood that when a device or component is referred to as being "on," "adjacent to," or "connected to" other devices or components, it may be directly on, adjacent to, or connected to other devices or components, or there may be intervening devices or components. Conversely, when a device or component is referred to as being "directly on," "directly adjacent to," or "directly connected to" other devices or components, there are no intervening devices or components. It should be understood that although the terms first, second, third, etc., may be used to describe various components, areas, layers, and / or parts, these components, areas, layers, and / or parts should not be limited by these terms. These terms are only used to distinguish one component, area, layer, or part from another component, area, layer, or part. Therefore, without departing from the teachings of this application, the first component, area, layer, or part discussed below may be referred to as the second component, area, layer, or part. And the discussion of the second component, area, layer, or part does not imply that the first component, area, layer, or part necessarily exists in this application.
[0047] To make the objectives, technical solutions, and advantages disclosed in the embodiments of this application clearer, the embodiments of this application will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are merely illustrative of the embodiments of this application and are not intended to limit the embodiments of this application.
[0048] This application provides a grinding unit. Figure 1 This is a schematic diagram of a grinding unit provided in an embodiment of this application. Figure 1 ,like Figure 1 As shown, the polishing unit includes a polishing disc 1 and a polishing base 2. The polishing base 2 includes an electromagnetic coil 21. When the electromagnetic coil 21 is energized and generates a magnetic attraction, the polishing disc 1 is attracted and makes contact with the polishing base 2. When the electromagnetic coil 21 is de-energized and the magnetic attraction disappears, the polishing disc 1 is disconnected from the polishing base 2.
[0049] In this embodiment, by setting an electromagnetic coil 21 in the grinding base 2, and based on the magnetic attraction force generated when the electromagnetic coil 21 is energized and the absence of magnetic attraction force when it is de-energized, the contact connection and disconnection connection between the grinding disc 1 and the grinding base 2 are realized, thereby making the replacement operation of the grinding disc 1 more time-saving and labor-saving.
[0050] In this embodiment, the grinding disc 1 is used to fix the grinding pad and generates friction with the grinding pad during rotation, thereby removing the aged layer or blockages on the surface of the grinding pad and maintaining good grinding performance and cutting ability. The grinding base 2 is used to support and fix the grinding disc 1, ensuring that the grinding disc 1 can rotate and work stably during the grinding process. Since the surface of the grinding disc 1 will be damaged due to the grinding operation, it is necessary to replace the grinding disc 1 in a timely manner to ensure the grinding quality.
[0051] In the embodiment of the present application, the electromagnetic coil 21 is arranged in the grinding base 2. When the electromagnetic coil 21 is energized, current flows in the coil to form a closed current loop. The current in the current loop generates a magnetic field around the coil. The presence of the magnetic field causes the grinding base 2 to generate a magnetic attraction force, which has an attractive effect on substances with ferromagnetic properties.
[0052] In some possible embodiments, the main component of the electromagnetic coil 21 is a conductive wire. Copper wire is usually selected to prepare the conductive wire because it has good electrical conductivity and low resistivity, which can reduce heat loss of the electromagnetic coil 21 during energization. In addition, aluminum wire, silver wire and superconducting materials can also be used to prepare the conductive wire, which have better electrical conductivity but are more expensive.
[0053] In some possible embodiments, in order to prevent short circuit inside the electromagnetic coil 21, the outer surface of the conductive wire in the electromagnetic coil 21 is wrapped with one or more layers of insulating paint, such as polyester enameled wire and polyurethane enameled wire.
[0054] In the embodiment of the present application, when the electromagnetic coil 21 is energized, the grinding base 2 and the grinding disc 1 are connected by the magnetic attraction force generated by the energization of the electromagnetic coil 21. When the electromagnetic coil 21 is de-energized, the grinding base 2 and the grinding disc 1 are disconnected because the magnetic attraction force caused by the de-energization of the electromagnetic coil 21 disappears. Therefore, by controlling the de-energization of the electromagnetic coil 21, the old grinding disc 1 can be conveniently removed from the grinder unit, and by controlling the energization of the electromagnetic coil 21, the new grinding disc 1 can be conveniently installed into the grinder unit. Such operation can realize the quick replacement of the grinding disc 1.
[0055] In some possible embodiments, the grinding disc 1 is prepared from at least one of iron, nickel and cobalt. By using a material with ferromagnetic properties to prepare the grinding disc 1, the grinding disc 1 can be magnetically attracted to the grinding base 2 which generates a magnetic attraction force due to the energization of the electromagnetic coil 21.
[0056] Figure 2 is a schematic view of a grinder unit provided by the embodiment of the present application Figure 2 , Figure 3 is a schematic view of a flange plate connected to a support, as shown in Figure 3 and Figure 1 The grinding base 2 includes a flange plate 22, a grinding body 23 and a support 24. The flange plate 22 is located at one end of the grinding base 2 facing the grinding disc 1. The grinding body 23 is located at the other end of the grinding base 2 away from the grinding disc 1, and the grinding body 23 has a cavity built therein. One end of the support 24 is connected to the flange plate 22, and the other end of the support 24 is placed in the cavity. The electromagnetic coil 21 is wound around the support 24.
[0057] In the embodiment, the flange 22 is detachably connected to the support 24. When the flange 22 or the support 24 is damaged, only the damaged part can be replaced, which helps to save cost.
[0058] In the embodiment, the electromagnetic coil 21 is spirally wound on the columnar support 24. The part of the support 24 where the electromagnetic coil 21 is wound is placed in the cavity of the grinding body 23.
[0059] In some possible embodiments, the electromagnetic coil 21 is wound on the support 24 in parallel winding, layer winding or spiral winding, etc. Different winding modes affect the inductance, resistance and magnetic field distribution of the electromagnetic coil 21.
[0060] In the embodiment, the flange 22 does not directly contact the electromagnetic coil 21, and there is a distance between the flange 22 and the electromagnetic coil 21. To ensure that the flange 22 in the magnetic field generated by the electromagnetic coil 21 has magnetic attraction, the support 24 and the flange 22 are made of a material with magnetic flux, so as to ensure that the flange 22 and the grinding disc 1 are magnetically connected.
[0061] In some possible embodiments, the flange 22 is made of at least one of iron, nickel and cobalt.
[0062] In some possible embodiments, the support 24 is made of at least one of iron, nickel and cobalt.
[0063] In the embodiment, the electromagnetic coil 21 is located inside the grinding base 2. As shown in FIG. 1, the electromagnetic coil 21 is arranged inside the grinding body 23, and in particular, the electromagnetic coil 21 is arranged at the middle position inside the grinding body 23, which can make the magnetic field generated by the electromagnetic coil uniformly distributed around the flange 22, so that the magnetic attraction of each position in the flange 22 is consistent, which helps the flange 22 and the grinding disc 1 to be tightly connected. Figure 4
[0064] In some possible embodiments, the electromagnetic coil 21 can also be arranged outside the grinding body 23. Correspondingly, in order to cooperate with the electromagnetic coil, the position and even the shape of the support 24 need to be adjusted. The electromagnetic coil 21 is arranged on the outer surface of the grinding body 23 near one end of the flange 22, and the magnetic field generated by the electromagnetic coil 21 when energized can also make the flange 22 have magnetic attraction, so as to realize the magnetic attraction connection between the flange 22 and the grinding disc 1. Arranging the electromagnetic coil 21 outside the grinding body 23 can more conveniently adjust the number of turns and the winding mode of the electromagnetic coil 21, so as to change the size of the magnetic field generated by the electromagnetic coil 21 when energized.
[0065] In the embodiment of the present application, the magnetic attraction force generated by energizing the electromagnetic coil 21 causes the polishing disc 1 to be attracted to and connected to the flange plate 22. Disconnection of the polishing disc 1 from the flange plate 22 is achieved by de-energizing the electromagnetic coil 21 to cause the magnetic attraction force to disappear.
[0066] Figure 4 is a schematic view of a polishing disc provided by the embodiment of the present application. As shown in Figure 4 the polishing disc 1 includes at least one recess 11. Figure 3 There are three recesses 11, and the serial number indicates one of them. As shown in Figure 3 the flange plate 22 includes at least one protrusion 221. Figure 3 There are three protrusions 221, and the serial number indicates one of them. At least one protrusion 221 in the flange plate 22 matches at least one recess 11 in the polishing disc 1, and the protrusion 221 is inserted into the recess 11 when the flange plate 22 is connected to the polishing disc 1. The one-to-one matching of the protrusion 221 in the flange plate 22 and the recess 11 in the polishing disc 1 can effectively prevent the polishing disc 1 from sliding relative to the flange plate 22.
[0067] In some possible embodiments, the recess 11 in the polishing disc 1 can be designed as a through hole or a groove. When the recess 11 is a through hole, the bottom surface of the protrusion 221 inserted into the through hole is required to be on the same plane as the polishing disc 1 to maintain the flatness of the surface of the polishing disc 1.
[0068] In the embodiment of the present application, to effectively prevent the polishing disc 1 from sliding relative to the flange plate 22, a certain number of protrusions 221 are required to be arranged at appropriate positions in the flange plate 22, and a certain number of recesses 11 are required to be arranged at appropriate positions in the polishing disc 1. To prevent the polishing disc 1 from sliding relative to the flange plate 22, the number of protrusions 221 and recesses 11 should not be too small. To reduce the preparation cost, the number of protrusions 221 and recesses 11 should not be too large. To maintain the balance between the structure function and the cost reduction, as shown in Figure 4 and three protrusions 221 are arranged uniformly at the edge positions of the flange plate 22, and three recesses 11 are arranged uniformly at the edge positions of the polishing disc 1.
[0069] In some possible embodiments, the number of protrusions 221 is 2-6. Correspondingly, the number of recesses 11 is 2-6.
[0070] Optionally, the number of protrusions 221 is 2; optionally, the number of protrusions 221 is 4; and optionally, the number of protrusions 221 is 6.
[0071] Optionally, the number of recesses 11 is 2; optionally, the number of recesses 11 is 4; optionally, the number of recesses 11 is 6.
[0072] In the embodiment of the present application, the flange 22 generates magnetic attraction force by energizing the electromagnetic coil 21, so as to realize the magnetic attraction connection between the flange 22 and the grinding disc 1. However, when the current through the electromagnetic coil 21 is too weak, the magnetic attraction force generated may be insufficient to realize the connection between the flange 22 and the grinding disc 1. Therefore, the current through the electromagnetic coil 21 needs to be controlled so that the magnetic attraction force generated can realize the connection between the flange 22 and the grinding disc 1.
[0073] In some possible embodiments, the grinder unit comprises a current measuring device and a control device. The control device is used to control the energization and de-energization of the electromagnetic coil 21, and is also used to adjust the current size through the electromagnetic coil 21. The current measuring device is electrically connected with the control device, and is used to measure the current value through the electromagnetic coil 21 and transmit the current value to the control device. When the current value through the electromagnetic coil 21 is lower than a preset current value, the control device adjusts the current size through the electromagnetic coil 21, so that the current value through the electromagnetic coil 21 reaches the preset current value.
[0074] In some possible embodiments, the grinder unit comprises a reminding device. The reminding device is electrically connected with the control device. When the current value measured by the current measuring device is lower than the preset current value, the grinding disc 1 has the risk of being separated from the flange 22, and at this time the control device controls the reminding device to send a reminding signal to inform the on-duty personnel to handle in time.
[0075] In the embodiment of the present application, when the grinding disc 1 needs to be replaced, the user can perform the following operations: click “grinding disc 1 replacement” on the user interface of the control device, at this time the electromagnetic coil 21 in the grinding base 2 is de-energized, the flange 22 loses magnetism, and the old grinding disc 1 can be directly taken off; contact the new grinding disc 1 with the flange 22, so that the protruding part 221 in the flange 22 and the recess 11 in the new grinding disc 1 are matched one by one; click “replacement completed” on the user interface of the control device, at this time the electromagnetic coil 21 in the grinding base 2 is energized, the flange 22 generates magnetism, and the new grinding disc 1 is fixed on the flange 22.
[0076] In some possible embodiments, the user only needs to give the instruction of “grinding disc 1 replacement”, and all the steps in the replacement operation of the grinding disc 1 are completed by machine operation. Moreover, in order to prevent the user from forgetting to replace the grinding disc 1, the replacement of the grinding disc 1 can also be set according to the actual working time of the grinding disc 1.
[0077] In the embodiment of the present application, the electromagnetic coil 21 is arranged in the grinding base 2, and the contact connection and disconnection of the grinding disc 1 and the grinding base 2 are realized based on the magnetic attraction generated by the energization of the electromagnetic coil 21 and the absence of magnetic attraction generated by the de-energization of the electromagnetic coil 21, so that the replacement operation of the grinding disc 1 is more time-saving and labor-saving.
[0078] In the embodiment of the present application, compared with the way of replacing the grinding disc 1 by disassembling the mounting screw in the prior art, the way of replacing the grinding disc 1 by energizing and de-energizing the electromagnetic coil 21 in the present application is more convenient and fast, and greatly reduces the labor cost.
[0079] The embodiment of the present application also provides a chemical mechanical grinding device. The chemical mechanical grinding device comprises the grinder unit described above. By installing the grinder unit described above in the chemical mechanical grinding device, the quick replacement of the grinding disc 1 can be realized.
[0080] It should be noted that the above-mentioned embodiments of the present application are in the order of description only, and do not represent the advantages and disadvantages of the embodiments. And the above describes a specific embodiment of the present application. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps recorded in the claims can be executed in an order different from that in the embodiments and still achieve the desired results. In addition, the processes depicted in the drawings do not necessarily require the specific order or continuous order shown to achieve the desired results. In some embodiments, multi-task processing and parallel processing are possible or can be advantageous.
[0081] Each embodiment in the specification is described in a progressive manner, and the same or similar parts between each embodiment can be referred to each other, and each embodiment focuses on the difference from other embodiments. Especially, for the device embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the related parts can be referred to the part of the method embodiment.
[0082] Those of ordinary skill in the art can understand that all or part of the steps of the above-mentioned embodiments can be completed by hardware, or by programs instructing relevant hardware to complete, and the programs can be stored in a computer readable storage medium. The storage medium mentioned above can be a read-only memory, a disk or an optical disk, etc.
[0083] The above is only the preferred embodiment of the present application, and does not limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.
Claims
1. A grinder unit, characterized by The grinder unit comprises: a grinding disc; a grinding base; the grinding base comprises an electromagnetic coil; the grinding disc is attracted to contact and connect with the grinding base when the electromagnetic coil is powered to generate magnetic attraction; the grinding disc is disconnected from the grinding base after the electromagnetic coil is powered off and the magnetic attraction disappears.
2. The grinder unit of claim 1, wherein, The electromagnetic coil is located inside the grinding base.
3. The grinder unit of claim 2, wherein, The grinding base comprises a flange plate; the flange plate is located at one end of the grinding base facing the grinding disc; the grinding disc is attracted to contact and connect with the flange plate when the electromagnetic coil is powered to generate magnetic attraction; the grinding disc is disconnected from the flange plate after the electromagnetic coil is powered off and the magnetic attraction disappears.
4. The grinder unit of claim 3, wherein, The grinding base comprises a grinding body and a support; the grinding body has a cavity inside; one end of the support is connected to the flange plate, and the other end of the support is placed in the cavity; the electromagnetic coil is wound around the support.
5. The grinder unit of claim 4, wherein, The flange plate comprises at least one protruding part, and the grinding disc comprises at least one recessed part; the at least one protruding part and the at least one recessed part are matched one by one, and the protruding part is inserted into the recessed part when the flange plate and the grinding disc are in contact and connected.
6. The grinder unit of claim 5, wherein, The number of protruding parts is 2-6, and the number of recessed parts is 2-6.
7. The grinder unit of claim 6, wherein, The protruding parts are located at the edge of the flange plate, and the recessed parts are located at the edge of the grinding disc.
8. The grinder unit of claim 1, wherein, The grinder unit comprises a current measuring device and a control device; the control device is used to control the power-on and power-off of the electromagnetic coil; the current measuring device is electrically connected to the control device; the current measuring device is used to measure the current value of the electromagnetic coil and transmit the current value to the control device.
9. The grinder unit of claim 8, wherein, The grinder unit comprises a reminding device; the reminding device is electrically connected to the control device; the control device is used to control the reminding device to send a reminder signal when the current value is lower than the preset current value.
10. The grinder unit of claim 4, wherein, The flange plate is made of at least one of iron, nickel and cobalt; The support is made of at least one of iron, nickel and cobalt; The grinding disc is made of at least one of iron, nickel and cobalt.
11. A chemical mechanical polishing apparatus characterized by comprising: The grinder unit comprises the grinding disc according to any one of claims 1 to 10.