Device for preparing quartz crucible

Abstract

The utility model discloses a device for preparing a quartz crucible, which comprises a die and a water jacket arranged outside the die, the upper parts of the die and the water jacket are open, a first cavity is formed between the bottom of the die and the bottom of the water jacket, a second cavity is formed between the side wall of the die and the side wall of the water jacket, and the first cavity is communicated with the second cavity. The first cavity and the second cavity are communicated with each other, the bottom of the water jacket is provided with an extraction opening which is communicated with the first cavity and the external space of the water jacket, the extraction opening is communicated with external evacuation equipment, an extraction assembly is arranged between the mold and the water jacket, and the extraction assembly is communicated with the mold. The air exhaust assembly comprises a plurality of air inlets, an air outlet and an airflow channel enabling the air inlets to communicate with the air outlet, the air inlets are formed in the second cavity, and the air outlet communicates with the air exhaust opening. The quality of a bubble depletion layer formed on the inner wall of the quartz crucible is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to fused quartz crucible production equipment technical field, especially relate to a device for preparing quartz crucible. BACKGROUND

[0002] At present, in the production process of quartz crucible, in order to form a bubble empty layer (also called transparent layer) on the inner wall of quartz crucible, the common forming mode is to apply vacuum extraction during the melting process of crucible. The quartz crucible includes a mold and a water jacket arranged outside the mold, and a gas-permeable plug (also called exhaust plug or air hole) on the mold is mainly used to control the pressure and gas flow between quartz sand and the inner wall of the mold, and the air is extracted through the cavity between the mold and the water jacket to act on the quartz crucible being melted, so as to form a bubble empty layer on the inner wall of the quartz crucible.

[0003] Among them, the narrow cavity is formed between the side wall of the mold and the side wall of the water jacket, and the wide cavity is formed between the bottom of the mold and the bottom of the water jacket, and the air extraction hole is arranged at the center of the bottom of the water jacket, so that the air extraction speed and negative pressure in the wide cavity are greater than those in the narrow cavity, and there is uneven pressure on the outer wall of the quartz crucible during the air extraction process, and the number of bubbles formed near the bottom is less during the production process, and the number of bubbles formed near the narrow cavity is more, which affects the quality of the bubble empty layer formed on the inner wall of the quartz crucible, and further affects the single crystal production. SUMMARY

[0004] The utility model discloses a device for preparing quartz crucible to realize uniform air extraction of the cavity between the mold and the water jacket, keep the mold in the balanced negative pressure state, and improve the quality of the bubble empty layer formed on the inner wall of the quartz crucible.

[0005] A device for preparing quartz crucible, comprising: a mold and a water jacket arranged outside the mold, the mold and the water jacket are open at the top,

[0006] Among them, the first cavity is formed between the bottom of the mold and the bottom of the water jacket, the second cavity is formed between the side wall of the mold and the side wall of the water jacket, the first cavity and the second cavity are communicated with each other, the water jacket is provided with an air extraction port at the bottom, which communicates the first cavity and the space outside the water jacket, and the air extraction port is communicated with the external air extraction equipment,

[0007] Among them, the air extraction assembly is arranged between the mold and the water jacket, the air extraction assembly includes a plurality of air inlets, an air outlet and an air flow channel connecting the plurality of air inlets with the air outlet, the air inlets are arranged in the second cavity, and the air outlet is communicated with the air extraction port.

[0008] Specifically, the plurality of air inlets comprises a plurality of first air inlets and a plurality of second air inlets, the plurality of first air inlets and the plurality of second air inlets are arranged in a cross manner, the plurality of first air inlets are uniformly distributed on a first circumference in a circumferential direction, the plurality of second air inlets are uniformly distributed on a second circumference in a circumferential direction, and the first circumference and the second circumference are spaced apart in an axial direction.

[0009] Specifically, the first circumference is located near the opening of the mold, and the second circumference is located below the first circumference.

[0010] Specifically, the air flow channel comprises an air outlet pipe and a plurality of air suction pipes in communication with the air outlet pipe, one end of each air suction pipe forms an air inlet of the air suction assembly, and one end of the air outlet pipe forms an air outlet of the air suction assembly.

[0011] Specifically, the air outlet pipe extends into the air suction port and has a gap between the air outlet pipe and the air suction port.

[0012] Specifically, the air outlet pipe is closed at an end opposite to the air outlet, and each air suction pipe is in communication with a side wall of the air outlet pipe at an end opposite to the air inlet.

[0013] Specifically, each air suction pipe comprises a first branch pipe and a second branch pipe connected to each other, the first branch pipe is parallel to the axis of the mold, the second branch pipe is perpendicular to the axis of the mold, and one end of the first branch pipe forms the air inlet.

[0014] Specifically, the air suction assembly further comprises a fixing member for connecting the air suction pipes and the side wall of the water jacket, and the fixing member is connected in series with a plurality of air suction pipes in a circumferential direction.

[0015] Specifically, the fixing member is annular.

[0016] Specifically, the air suction assembly further comprises a first fixing member and a second fixing member, the first fixing member is located at the first circumference, and the second fixing member is located at the second circumference.

[0017] Compared with the prior art, the device for preparing a quartz crucible has the following beneficial effects:

[0018] By arranging the air suction assembly between the mold and the water jacket, the air outlet of the air suction assembly performs air suction on the second cavity, the air suction port of the water jacket performs air suction on the first cavity, the first cavity and the second cavity jointly perform air suction, and the balanced negative pressure is achieved, thereby improving the quality of the bubble depletion layer formed on the inner wall of the mold. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 A schematic diagram of a front view of the device for preparing a quartz crucible provided in an embodiment of the present application is shown in FIG. 1.

[0020] Figure 2 A schematic diagram of the structure of the air extraction assembly provided in an embodiment of the present application is shown in FIG. 2.

[0021] Reference signs:

[0022] Mold 1;

[0023] Water jacket 2, air extraction port 21, gap 22, inner sink 23;

[0024] First cavity 3;

[0025] Second cavity 4;

[0026] Air extraction assembly 5, first air inlet 51, second air inlet 52, air outlet 53, air outlet pipe 54, air extraction pipe 55, first branch pipe 551, second branch pipe 552, first fixing member 61, second fixing member 62. DETAILED DESCRIPTION

[0027] In order to make the technical solutions and advantages in the embodiments of the present application clearer, the exemplary embodiments of the present application are further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0028] Embodiment One

[0029] The present embodiment provides a device for preparing a quartz crucible, which comprises a mold 1 and a water jacket 2 arranged outside the mold 1. The mold 1 and the water jacket 2 are open at the top. The water jacket 2 is provided with an inner sink 23, and the mold 1 extends to the inner sink 23. Specifically, the mold 1 has the same shape as the quartz crucible. The water jacket 2 is arranged outside the mold 1 and wraps the bottom and the sidewall of the mold 1. The bottom of the mold 1 and the bottom of the inner sink 23 form a first cavity 3. The sidewall of the mold 1 and the sidewall of the inner sink 23 form a second cavity 4. The first cavity 3 and the second cavity 4 are in communication. The bottom of the water jacket 2 is provided with an air extraction port 21 in communication with the inner sink 23. The top of the water jacket 2 is in contact with and sealed to the top of the mold 1.

[0030] The suction port 21 is located at the bottom of the water jacket 2 and penetrates through the water jacket 2, and the suction port 21 communicates the first cavity 3 with the space outside the water jacket 2, specifically, the suction port 21 is arranged at the middle of the groove bottom of the inner sink 23; when the suction port 21 is connected with the air exhaust device, the negative pressure air exhaust operation is performed on the first cavity 3 and the second cavity 4, since the suction port 21 is close to the first cavity 3, and the second cavity 4 is between the side wall of the mold 1 and the groove wall of the inner sink 23, compared with the first cavity 3, the second cavity 4 is more long and narrow, and is farther away from the suction hole 21, so that the air exhaust speed and the negative pressure of the second cavity 4 are smaller than those of the first cavity 3; in order to avoid the imbalance of the air exhaust speed and the negative pressure of the first cavity 3 and the second cavity 4, the device for preparing the quartz crucible is improved in the embodiment, which will be specifically described below.

[0031] Referring to Figure 1 , Figure 2 As shown in the figure, the mold 1 and the water jacket 2 are provided with an air exhaust assembly 5, the air exhaust assembly 5 includes a plurality of air inlets, an air outlet 53 and an air flow channel connecting the plurality of air inlets with the air outlet 53, the air inlets are arranged in the second cavity 4, and the air outlet 53 is connected to the suction port 21. The air outlet 53 is connected with the air exhaust device outside through the connection to the suction hole 21, and through the air flow channel and the plurality of air inlets located at the second cavity 4, the air flow of the second cavity 4 directly enters the air exhaust device through the air inlets, the air flow channel and the air outlet 53, without passing through the first cavity 3, thereby promoting the air exhaust effect of the second cavity 4.

[0032] The plurality of air inlets includes a plurality of first air inlets 51 and a plurality of second air inlets 52, the plurality of first air inlets 51 and the plurality of second air inlets 52 are arranged in cross, the plurality of first air inlets 51 are uniformly distributed on a first circumference in the circumferential direction, the plurality of second air inlets 52 are uniformly distributed on a second circumference in the circumferential direction, and the first circumference and the second circumference are spaced apart in the axial direction. The first circumference is located near the opening of the mold 1, and the second circumference is located below the first circumference. This is because the side wall of the mold 1 and the water jacket 2 is long, and the second cavity 4 is long and narrow, in order to make the uniformity of the air exhaust of the second cavity 4, the plurality of air inlets are spaced apart in the axial direction, so that the air flow in the second cavity 4 can flow more quickly and uniformly through the air inlets into the air flow channel, and then be sucked away by the air exhaust device through the air outlet 53. The plurality of first air inlets 51 and the plurality of second air inlets 52 are uniformly distributed in the circumferential direction, and the first air inlets 51 and the second air inlets 52 are alternately arranged, which is to promote the uniformity of the air exhaust flow of the second cavity 4.

[0033] The suction port 21 and the air outlet 53 of the air exhaust assembly 5 are both connected with the air exhaust device, and the air exhaust device has the function of air exhaust to vacuum in the embodiment, so as to realize the common air exhaust function of the suction port 21 and the air exhaust assembly 5.

[0034] In the embodiment, the air suction assembly 5 is arranged between the mold 1 and the water jacket 2, and the air outlet 53, the air inlet and the air flow channel of the air suction assembly 5 are arranged to directly perform the air suction operation on the second cavity 4, the air suction port 21 of the water jacket 2 performs the air suction operation on the first cavity 3, and the first cavity 3 and the second cavity 4 jointly perform the air suction operation to achieve the balanced negative pressure effect and improve the quality of forming the bubble depletion layer on the inner wall of the mold 1.

[0035] Embodiment two

[0036] The embodiment is based on the above-mentioned embodiment and optimizes the device for preparing the quartz crucible, in particular, provides a specific implementation mode of the air suction assembly.

[0037] The air suction assembly 5 is arranged between the mold 1 and the water jacket 2. As shown in Figure 2 The air flow channel includes an air outlet pipe 54 and a plurality of air suction pipes 55 in communication with the air outlet pipe 54, one end of each air suction pipe 55 forms the air inlet of the air suction assembly 5, and one end of the air outlet pipe 54 forms the air outlet 53 of the air suction assembly 5. The axial lengths of adjacent air suction pipes 55 are different along the axial length of the mold 1, so that the air inlets can be adaptively arranged at the lower part or the upper part of the second cavity 4 to improve the air inlet uniformity of the air suction pipe 55. Specifically, the axial length of the air suction pipe 55 corresponding to the first air inlet 51 is longer than the axial length of the air suction pipe 55 corresponding to the second air inlet 52. The air suction pipes 55 are uniformly distributed along the circumferential direction.

[0038] The air outlet pipe 54 extends into the air suction port 21 and is provided with a gap 22 between the air outlet pipe 54 and the air suction port 21. Specifically, the air outlet 53 extends into the air suction port 21, and the air outlet pipe 54 is arranged flush with the end face of the water jacket 2. The air outlet pipe 54 can also extend to the outside of the air suction port 21 without affecting the connection of the air outlet 53 and the air suction port 21 to the air suction equipment, respectively.

[0039] The end of the air outlet pipe 54 opposite to the air outlet 53 is closed, and the end of each air suction pipe 55 opposite to the air inlet is communicated to the side wall of the air outlet pipe 54.

[0040] Each air suction pipe 55 includes a first branch pipe 551 and a second branch pipe 552 connected to each other, the first branch pipe 551 extends parallel to the axis of the mold 1, and the second branch pipe 552 extends perpendicular to the axis of the mold 1, one end of the first branch pipe 551 forms the air inlet, the other end is connected to the second branch pipe 552, one end of the second branch pipe 552 is connected to the side wall of the air outlet pipe 54, and the other end is connected to the first branch pipe 551.

[0041] The air suction assembly 5 further includes a fixing member for connecting the air suction pipe 55 and the side wall of the water jacket 2, and the fixing member is connected in series with a plurality of air suction pipes 55 along the circumferential direction.

[0042] The fixing member in this embodiment is annular. When the fixing member is connected to the end of the suction pipe 55, the fixing member avoids the air inlet, so that the end of the suction pipe 55 can penetrate through the fixing member, without affecting the suction operation of the suction pipe 55. When the fixing member is connected to the pipe wall of the suction pipe 55, the middle part of the suction pipe 55 penetrates through the fixing member, also without affecting the suction operation of the suction pipe 55. The mounting structure of the fixing member and the suction pipe 55 does not occupy space. The fixing member is connected to the side wall of the water jacket 2, and at the same time, the fixing member is connected to the suction pipe 55. The above connection mode can be welded.

[0043] For example, the suction assembly 5 includes a first fixing member 61 located at the first circumference and a second fixing member 62 located at the second circumference. The first fixing member 61 and the second fixing member 62 can connect multiple suction pipes 55, improving the assembly stability of the overall suction assembly 5. The first fixing member 61 and the second fixing member 62 are provided with holes through which the suction pipes 55 penetrate. As described above, the suction pipes 55 corresponding to the first air inlet 51 penetrate through the first fixing member 61 and the second fixing member 62 and are flush with the end face of the first fixing member 61, and the suction pipes 55 corresponding to the second air inlet 52 penetrate through the second fixing member 62 and are flush with the end face of the second fixing member 62.

[0044] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0045] In addition, the terms "first" and "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0046] In this application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connecting", "fixed", and the like, should be construed in a broad sense, for example, can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be electrical connection or can communicate with each other; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0047] Although the preferred embodiments of the present application have been described, those skilled in the art can make further changes and modifications to these embodiments once they know the basic inventive concept. Therefore, the appended claims are intended to be interpreted as including all the preferred embodiments and all the changes and modifications falling within the scope of the present application.

[0048] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalent technologies, the present application also intends to include these modifications and variations.

Claims

1. An apparatus for preparing a quartz crucible, characterized in that, include: A mold and a water jacket disposed outside the mold, both having openings at their upper parts. A first cavity is formed between the bottom of the mold and the bottom of the water jacket, and a second cavity is formed between the sidewall of the mold and the sidewall of the water jacket. The first cavity and the second cavity are interconnected. The water jacket has an air extraction port at its bottom that connects the first cavity and the external space of the water jacket, and the air extraction port is connected to an external evacuation device. An air extraction assembly is provided between the mold and the water jacket. The air extraction assembly includes multiple air inlets, an air outlet, and an airflow channel connecting the multiple air inlets to the air outlet. The air inlets are arranged in the second cavity, and the air outlet is connected to the air extraction port.

2. The apparatus for preparing a quartz crucible according to claim 1, characterized in that: The plurality of air inlets include a plurality of first air inlets and a plurality of second air inlets, which are arranged in a cross pattern. The plurality of first air inlets are evenly distributed circumferentially on a first circumference, and the plurality of second air inlets are evenly distributed circumferentially on a second circumference. The first circumference and the second circumference are spaced apart axially.

3. The apparatus for preparing a quartz crucible according to claim 2, characterized in that: The first circumference is located near the opening of the mold, and the second circumference is located below the first circumference.

4. The apparatus for preparing a quartz crucible according to claim 1, characterized in that: The airflow channel includes an air outlet pipe and multiple air extraction pipes connected to the air outlet pipe. One end of each air extraction pipe forms the air inlet of the air extraction assembly, and one end of the air outlet pipe forms the air outlet of the air extraction assembly.

5. The apparatus for preparing a quartz crucible according to claim 4, characterized in that: The air outlet extends into the air intake and has a gap between it and the air intake.

6. The apparatus for preparing a quartz crucible according to claim 4, characterized in that: The end of the air outlet pipe opposite to the air outlet is closed, and the end of each air extraction pipe opposite to the air inlet is connected to the side wall of the air outlet pipe.

7. The apparatus for preparing a quartz crucible according to claim 4, characterized in that: Each of the suction pipes includes a first branch pipe and a second branch pipe connected to each other. The first branch pipe is relatively parallel to the axis of the mold, and the second branch pipe is relatively perpendicular to the axis of the mold. One end of the first branch pipe forms the air inlet.

8. The apparatus for preparing a quartz crucible according to claim 4, characterized in that: The air extraction assembly also includes a fixing member for connecting the side wall of the air extraction pipe and the water jacket, wherein the fixing member connects several air extraction pipes in series along the circumferential direction.

9. The apparatus for preparing a quartz crucible according to claim 8, characterized in that: The fastener is ring-shaped.

10. The apparatus for preparing a quartz crucible according to claim 2, characterized in that: The air extraction assembly further includes a first fixing member and a second fixing member, wherein the first fixing member is located at the first circumference and the second fixing member is located at the second circumference.

Images