Composite multi-element magnetic field arc cathode device

Abstract

The utility model discloses a composite multi-element magnetic field arc cathode device which is assembled in a vacuum cavity, the vacuum cavity is further provided with an arc striking device used in cooperation with the cathode device to form a loop, the cathode device comprises a protective cover and a flange seat, a fixing plate is arranged between the protective cover and the flange seat, and the protective cover is fixedly connected with the flange seat. The space between the protective cover and the flange seat is divided into an isolation cavity and a magnetic field cavity through the fixing plate; an electromagnetic coil and a permanent magnet are arranged in the magnetic field cavity, and the permanent magnet is located above the electromagnetic coil and is in the same axial direction with the electromagnetic coil; according to the device, a composite magnetic field is generated through the electromagnetic coil and the permanent magnet, and compared with a single magnetic field in the prior art, target particles are sputtered more finely, and meanwhile, the surface consumption of the target is more uniform.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating equipment technical field, concretely relates to a kind of composite multi-element magnetic field arc cathode device. BACKGROUND

[0002] Magnetron sputtering is a kind of physical vapor deposition (PVD), and general sputtering method can be used to prepare metal, semiconductor, insulator and other multi-materials, with the advantages of simple equipment, easy control, large coating area and strong adhesion, and the magnetron sputtering method developed in the 1970s realizes high speed, low temperature and low damage. The common feature of the existing rectangular planar magnetron sputtering cathode and the planar circular magnetron sputtering cathode is that the magnetic field provided inside is a fixed magnetic field. The sputtering area is fixed as a circular track under the action of magnetic field and electric field during sputtering, and the consumption of target material is V-shaped or U-shaped downward consumption in the fixed circular area.

[0003] At present, when the workpiece is coated by the cooperation of the cathode device and the target material, the cathode device used is a single magnetic field. The single magnetic field makes the target material sputtering particles larger, and the consumption surface of the target material is not uniform. Therefore, it is urgent to provide a composite multi-element magnetic field arc cathode device to make the target material sputtering particles more delicate and ensure uniform consumption of the target material consumption surface. UTILITY MODEL CONTENT

[0004] To solve the above technical problems, the utility model provides a kind of composite multi-element magnetic field arc cathode device, the device generates composite magnetic field by electromagnetic coil and permanent magnet, compared with single magnetic field in the prior art makes the target material particle sputtering more delicate, and the surface consumption of target material is more uniform.

[0005] The technical scheme of the utility model is: a kind of composite multi-element magnetic field arc cathode device, is assembled in vacuum cavity, and the vacuum cavity is also provided with arc striking device matched with the cathode device to form a loop, the cathode device includes protective cover and flange seat, fixed plate piece is arranged between the protective cover and flange seat, the protective cover and flange seat are separated into isolation cavity and magnetic field cavity by the fixed plate piece;

[0006] Electromagnetic coil and permanent magnet are arranged in the magnetic field cavity, the permanent magnet is located above the electromagnetic coil and is in the same axial direction with the electromagnetic coil;

[0007] It also includes cathode assembly arranged in the protective cover and connected with power supply.

[0008] Further, the fixing plate member is provided with a threaded hole, one end of a threaded rod is matched with the threaded hole and penetrates the fixing plate to fix the permanent magnet in the magnetic field cavity, and the other end of the threaded rod extends out of the protective cover.

[0009] Further, the protective cover is provided with a connecting rod, the connecting rod penetrates the protective cover and the fixing plate in sequence and is fixed with a coil support, and the electromagnetic coil is arranged on the coil support.

[0010] Further, the coil support is coaxial with the threaded rod.

[0011] Further, an insulating flange is bolted on the surface of the flange seat.

[0012] Further, a water cooling assembly arranged on the flange seat is further included, the water cooling assembly comprises a sealing plate bolted on the bottom of the flange seat, one side of the sealing plate forms a sealed cavity with the flange seat.

[0013] The water inlet pipeline and the water outlet pipeline are further included, the water inlet pipeline and the water outlet pipeline penetrate the protective cover, the fixing plate and the flange seat in sequence and are connected with the sealed cavity to form a water cooling loop.

[0014] Further, the other side of the sealing plate is bolted with a target material.

[0015] Further, the sealing plate is further provided with an arc ring matched with the target material, and the inner ring of the arc ring is a horn-shaped structure.

[0016] Further, the end of the protective cover is provided with a handle.

[0017] The beneficial technical effects of the utility model are as follows:

[0018] 1. The protective cover and the flange seat are isolated into two cavities by the fixing plate member, so that the magnetic field in the magnetron cavity is protected, the interference is reduced, and the protection effect is achieved.

[0019] 2. The magnetron cavity is provided with an electromagnetic coil and a permanent magnet, the composite magnetic field formed by the electromagnetic coil and the permanent magnet ensures that the target material particle sputtering is more delicate, and similarly, the composite magnetic field ensures that the surface of the target material is more uniform during consumption.

[0020] 3. The setting of the arc ring can effectively limit the direction of target material sputtering.

[0021] 4. The water cooling loop is arranged to cool the high-temperature target material.

[0022] The above description is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, and the utility model can be implemented according to the content of the specification, and the following preferred embodiments of the utility model are described in detail with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is the whole structure schematic view of the utility model;

[0024] Figure 2 It is the sectional view of the whole structure of the utility model;

[0025] Figure 3 It is the sectional view of the flange seat and sealing sheet metal connection of the utility model;

[0026] Figure 4 It is the structure schematic view of the electromagnetic coil and coil support connection of the utility model.

[0027] The signs are:

[0028] 100, shield; 110, isolation chamber; 200, flange seat; 210, magnetic field cavity; 300, arc ring; 400, insulating flange; 500, target material; 600, sealing sheet metal; 610, sealing chamber; 620, water inlet pipeline; 630, water outlet pipeline; 700, cathode assembly; 800, permanent magnet; 810, screw rod; 900, coil support; 910, connecting rod. DETAILED DESCRIPTION

[0029] In order to more clearly understand the technical means of the utility model, and can be implemented according to the content of the specification, the specific embodiments of the utility model are further described in detail below, the following examples are used to illustrate the utility model, but not to limit the scope of the utility model.

[0030] It should be noted that the terms "first", "second" and the like in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and do not necessarily describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so as to describe the embodiments of the present application.

[0031] In the description of the utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the embodiment and the drawing, or the orientation or positional relationship of the product of the utility model when it is usually placed, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, therefore it cannot be understood as a limitation on the utility model.

[0032] As Figures 1-4The utility model discloses a kind of composite multi-element magnetic field arc cathode devices, assemble in vacuum cavity, and the vacuum cavity (not marked in drawing) also be equipped with the arc leading device (not marked in drawing) that cooperation the cathode device uses, to form loop, the cathode device includes protective cover 100 and flange base 200, fixed plate piece is equipped between the protective cover 100 and flange base 200, the protective cover 100 and flange base 200 are separated into isolation chamber 110 and magnetic field cavity 210 by the fixed plate piece;

[0033] Electromagnetic coil and permanent magnet 800 are equipped in the magnetic field cavity 210, the permanent magnet 800 is located above the electromagnetic coil and with the same axial direction of the electromagnetic coil;

[0034] It further includes cathode assembly 700 being equipped in the protective cover 100 and being connected power supply.

[0035] It needs to be explained that protective cover 100 and flange base 200 are both the structure of one end opening, when protective cover 100 and flange base 200 are fixed by bolt, fixed plate piece is fixed between protective cover 100 and flange base 200 simultaneously, the cavity formed by protective cover 100 and flange base 200 is separated into isolation chamber 110 and magnetic field cavity 210 by fixed plate piece.

[0036] Among them, isolation chamber 110 is the part of protective cover 100, magnetic field cavity 210 is the part of flange base 200, because the whole cathode device is assembled on the surface of vacuum cavity, protective cover 100 is partially exposed outside, the environment outside protective cover 100 is isolated and protected by isolation chamber 110, and the influence on magnetic field cavity 210 is reduced.

[0037] In addition, electromagnetic coil and permanent magnet 800 are both located in magnetic field cavity 210, form composite magnetic field by electromagnetic coil and permanent magnet 800 cooperation, by composite magnetic field when the whole cathode device is energized, and loop is formed by cooperating with arc leading device in vacuum cavity, so that target material 500 particle sputtering is more delicate.

[0038] Furthermore, cathode assembly 700 is connected with the negative pole of power supply, and it is a more conventional component in prior art, so its principle will not be described in detail; Similarly, arc leading device is also the same, and it is also a conventional component in prior art, and its principle will not be described in detail here.

[0039] The fixed plate piece is equipped with screw hole, one end of screw rod 810 is matched with screw hole and passes through fixed sheet metal to fix permanent magnet 800 in magnetic field cavity 210, the other end of screw rod 810 extends outside protective cover 100.

[0040] The permanent magnet 800 is fixed by a screw rod 810, which is arranged to facilitate adjustment of the relative position of the permanent magnet 800 in the magnetic field cavity 210, and normally only needs to be adjusted before use.

[0041] The protective cover 100 is provided with a connecting rod 910, which sequentially penetrates the protective cover 100 and the fixed sheet metal and is fixed with a coil support, and the electromagnetic coil is arranged on the coil support 900 and is fixed by the coil support 900 to ensure that the position of the electromagnetic coil relative to the magnetic field cavity 210 does not change.

[0042] The coil support 900 and the screw rod 810 are in the same axial direction.

[0043] The surface of the flange seat 200 is bolted with an insulating flange 400 to insulate the cathode and the anode.

[0044] Further comprising a water cooling assembly arranged on the flange seat 200, the water cooling assembly comprising a sealing sheet metal 600 bolted to the bottom of the flange seat 200, one side of the sealing sheet metal 600 forming a sealed chamber 610 with the flange seat 200.

[0045] Further comprising a water inlet pipe 620 and a water outlet pipe 630, which sequentially penetrate the protective cover 100, the fixed plate and the flange seat 200 and communicate with the sealed chamber 610 to form a water cooling loop.

[0046] The cooling water enters the sealed chamber 610 through the water inlet pipe 620 and is discharged from the water outlet pipe 630 by the sealed chamber 610, forming a water cooling loop to cool the target material 500 bolted to the sealing sheet metal 600.

[0047] Because the target material 500 generates high temperature during sputtering, it needs to be cooled.

[0048] The other side of the sealing sheet metal 600 is bolted with the target material 500, facilitating replacement of the target material 500.

[0049] The sealing sheet metal 600 is further provided with an arc ring 300 used in cooperation with the target material 500, and the inner ring of the arc ring 300 is a horn-shaped structure, which guides the sputtering direction of the target material 500 particles.

[0050] The end of the protective cover 100 is provided with a handle to facilitate the holding and assembly of the entire cathode device.

[0051] The above examples are only specific embodiments of the present application, which are used to illustrate the technical solutions of the present application, rather than limiting the same, and the protection scope of the present application is not limited thereto. Although the present application has been described in detail with reference to the foregoing examples, it should be understood by those skilled in the art that any person skilled in the art can modify or easily think of changes to the technical solutions recorded in the foregoing examples, or make equivalent replacement to some of the technical features within the technical range disclosed by the present application. The modifications, changes or replacements do not cause the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should be covered within the protection scope of the present application.

Claims

1. A composite multi-element magnetic field arc cathode device, assembled in a vacuum cavity, wherein the vacuum cavity is further provided with an arc-initiating device for use with the cathode device to form a circuit, characterized in that, The cathode device includes a protective cover (100) and a flange seat (200). A fixing plate is provided between the protective cover (100) and the flange seat (200), and the fixing plate separates the protective cover (100) and the flange seat (200) into an isolation cavity (110) and a magnetic field cavity (210). The magnetic field cavity (210) is provided with an electromagnetic coil and a permanent magnet (800), and the permanent magnet (800) is located above the electromagnetic coil and on the same axis as the electromagnetic coil; It also includes a cathode assembly (700) disposed on the protective cover (100) and connected to a power source.

2. The composite multi-element magnetic field arc cathode device according to claim 1, characterized in that, The fixing plate is provided with screw holes. One end of the screw (810) cooperates with the screw holes and passes through the fixing sheet metal to fix the permanent magnet (800) to the magnetic field cavity (210). The other end of the screw (810) extends out of the protective cover (100).

3. The composite multi-element magnetic field arc cathode device according to claim 2, characterized in that, The protective cover (100) is provided with a connecting rod (910), which passes through the protective cover (100) and the fixed sheet metal in sequence and is fixed with a coil bracket. The electromagnetic coil is wound on the coil bracket (900).

4. The composite multi-element magnetic field arc cathode device according to claim 3, characterized in that, The coil support (900) and the screw (810) are on the same axis.

5. The composite multi-element magnetic field arc cathode device according to claim 1, characterized in that, An insulating flange (400) is bolted to the surface of the flange seat (200).

6. The composite multi-element magnetic field arc cathode device according to claim 1, characterized in that, It also includes a water-cooling assembly disposed on the flange seat (200), the water-cooling assembly including a sealing sheet metal (600) bolted to the bottom of the flange seat (200), one side of the sealing sheet metal (600) and the flange seat (200) forming a sealing chamber (610); It also includes an inlet pipe (620) and an outlet pipe (630), which pass through the protective cover (100), the fixing plate and the flange seat (200) in sequence and are connected to the sealed chamber (610) to form a water cooling circuit.

7. The composite multi-element magnetic field arc cathode device according to claim 6, characterized in that, The target material (500) is bolted to the other side of the sealing sheet metal (600).

8. The composite multi-element magnetic field arc cathode device according to claim 7, characterized in that, The sealing sheet metal (600) is also provided with an arc ring (300) for use with the target material (500), and the inner ring of the arc ring (300) is a trumpet-shaped structure.

9. The composite multi-element magnetic field arc cathode device according to claim 1, characterized in that, The protective cover (100) is provided with a handle at its end.

Images