Single crystal furnace thermal insulation cylinder, single crystal furnace thermal field and single crystal furnace

Abstract

The utility model relates to a single crystal furnace thermal insulation cylinder, a single crystal furnace thermal field and a single crystal furnace, the single crystal furnace thermal insulation cylinder comprises a plurality of thermal insulation sections which are coaxially connected in sequence, and a nested structure is arranged between every two adjacent thermal insulation sections; each nested structure comprises a first connecting ring and a second connecting ring, and the inner diameter of the first connecting ring of the same nested structure is matched with the outer diameter of the second connecting ring; the first connecting ring and the second connecting ring of the same nested structure are arranged at the connected ends of the two adjacent heat preservation sections correspondingly, the two adjacent heat preservation sections are connected in a nested mode through the first connecting ring and the second connecting ring, and the first connecting ring and the second connecting ring which are mutually nested are in threaded fit. According to the scheme, the sealing performance of the joints of all the sections of the heat preservation barrel is improved, the heat preservation effect is improved, heat loss and power loss are reduced, the production cost is reduced, the overall structural stability of the heat preservation barrel can be enhanced, the centering performance of all the heat preservation sections is good, and the uniformity and consistency of a thermal field in the single crystal growth process are guaranteed.

Description

Technical Field

[0001] This application relates to the field of single crystal furnace technology, and in particular to a single crystal furnace insulation cylinder. Background Technology

[0002] A Czochralski (CZ) single crystal furnace is a directional solidification device for silicon. Its function is to grow single crystal silicon into a crystal rod with a specific crystal growth direction through several stages, including melting, crystal pulling, shoulder formation, shoulder rotation, equal diameter setting, and finishing. CZ single crystal furnaces are energy-intensive and time-consuming production equipment. Under the same crystal orientation and size conditions, reducing production time and energy consumption is a desired improvement. The insulation cylinder, as an important component of the CZ single crystal furnace, has a significant impact on crystal growth. Its main function is to provide insulation, reducing heat loss and thus lowering energy consumption.

[0003] Existing insulation cylinders generally consist of an upper insulation cylinder, a middle insulation cylinder, and a lower insulation cylinder. These three cylinders are stacked sequentially from top to bottom and connected to each other using a snap-fit ​​method. This connection method easily leads to gaps at the joints of the upper, middle, and lower insulation cylinders. During the single crystal pulling process, heat can easily escape through these gaps, resulting in poor insulation performance, power loss, and increased production costs. In addition, the snap-fit ​​method can also lead to poor connection reliability between the layers of the insulation cylinder, which is not conducive to the overall hoisting of the insulation cylinder and makes the installation and disassembly of the insulation cylinder more cumbersome. Utility Model Content

[0004] Based on this, the present invention provides a single crystal furnace insulation cylinder, a single crystal furnace hot zone, and a single crystal furnace to solve the problems of easy heat loss and poor insulation effect of existing insulation cylinders, which leads to high power loss in single crystal pulling and increased production costs.

[0005] On the one hand, the present invention provides a single crystal furnace insulation cylinder, which includes multiple insulation sections connected coaxially in sequence, and a nested structure is provided between each two adjacent insulation sections;

[0006] Each of the nested structures includes a first connecting ring and a second connecting ring, wherein the inner diameter of the first connecting ring of the same nested structure matches the outer diameter of the second connecting ring;

[0007] The first connecting ring and the second connecting ring of the same nested structure are respectively disposed at one end of two adjacent insulation sections, and the two adjacent insulation sections are connected by the nested first connecting ring and the second connecting ring, and the nested first connecting ring and the second connecting ring are threadedly engaged.

[0008] In one embodiment, the single crystal furnace insulation cylinder includes three insulation sections, namely an upper insulation section, a middle insulation section, and a lower insulation section arranged from top to bottom;

[0009] The inner diameter of the upper insulation section is smaller than the inner diameters of the middle insulation section and the lower insulation section, and a variable diameter connection structure is provided between the upper insulation section and the middle insulation section.

[0010] In one embodiment, the variable diameter connection structure includes a variable diameter ring, and the nested structure is provided between the upper end of the variable diameter ring and the upper insulation section and between the lower end of the variable diameter ring and the middle insulation section. The diameter of the mating surface of the upper nested structure of the variable diameter ring is smaller than the diameter of the mating surface of the lower nested structure of the variable diameter ring.

[0011] In one embodiment, the inner diameter of the middle insulation section is the same as the inner diameter of the lower insulation section, and the outer diameter of the middle insulation section is the same as the outer diameter of the lower insulation section.

[0012] The sum of the thicknesses of the first connecting ring and the second connecting ring between the middle insulation section and the lower insulation section is equal to the thickness of the middle insulation section, and the sum of the thicknesses of the first connecting ring and the second connecting ring between the middle insulation section and the lower insulation section is equal to the thickness of the lower insulation section.

[0013] In one embodiment, the inner diameter of the first connecting ring is larger than the inner diameter of the insulation section connected to it, and / or the outer diameter of the second connecting ring is smaller than the outer diameter of the insulation section connected to it.

[0014] Furthermore, the first connecting ring and the second connecting ring of the same nested structure have the same height.

[0015] In one embodiment, the outer diameter of the first connecting ring is equal to the outer diameter of the insulation section connected to it; and / or

[0016] The inner diameter of the second connecting ring is equal to the inner diameter of the insulation section connected to it.

[0017] In one embodiment, the first connecting ring and the insulation section are integrally formed, and the second connecting ring and the insulation section are integrally formed.

[0018] On the other hand, the present invention provides a single crystal furnace thermal field, which includes the single crystal furnace insulation cylinder of any of the above embodiments.

[0019] In one embodiment, the hot zone of the single crystal furnace further includes a circular furnace bottom pressure plate, on which an mounting ring groove coaxial with the furnace bottom pressure plate is provided;

[0020] The lower end of the single crystal furnace insulation cylinder is embedded in the mounting ring groove and threadedly connected to the inner wall of the mounting ring groove.

[0021] On the other hand, the present invention provides a single crystal furnace, which includes the single crystal furnace hot zone of any of the above embodiments.

[0022] Compared with the prior art, this utility model has at least the following beneficial effects:

[0023] This single-crystal furnace insulation cylinder, by setting a nested structure between adjacent insulation sections and using threaded engagement of the nested structure, allows adjacent insulation sections to be connected through threaded nesting. This not only eliminates gaps at the joints of existing insulation cylinders, improves the sealing performance of the joints between the insulation sections, enhances the insulation effect, reduces heat loss and power consumption, and lowers production costs, but also makes the connection between the insulation sections more secure, improving the overall structural stability of the insulation cylinder and ensuring the alignment of each insulation section. This ensures the uniformity and consistency of the thermal field during single crystal growth, providing a guarantee for the successful pulling of single crystals. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of the single crystal furnace insulation cylinder in one embodiment;

[0025] Figure 2 This is a schematic diagram of a variable diameter connection structure for the insulation cylinder of a single crystal furnace in one embodiment;

[0026] Figure 3 This is a schematic diagram of the thermal field of a single crystal furnace in one embodiment.

[0027] The reference numerals in the accompanying drawings include: insulation section 1, upper insulation section 101, middle insulation section 102, lower insulation section 103, nested structure 2, first connecting ring 201, second connecting ring 202, variable diameter connecting structure 3, furnace bottom pressure plate 4, and mounting ring groove 401. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0029] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model.

[0030] The structures, proportions, sizes, etc., shown in the accompanying drawings of this specification are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the conditions under which this utility model can be implemented. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effects and purposes that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0031] The orientations or positional relationships indicated by terms such as "upper," "lower," "left," "right," "middle," "longitudinal," "transverse," "horizontal," "inner," "outer," "radial," and "circumferential" used in this specification are based on the orientations or positional relationships shown in the accompanying drawings and are only for the purpose of simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0032] The existing single crystal furnace insulation cylinders are usually connected by simple snap-fit ​​joints, which easily leads to gaps at the joints. During crystal pulling, heat can easily be lost through these gaps, resulting in poor insulation performance, power loss, and increased production costs.

[0033] To address the aforementioned issues, this utility model provides a single-crystal furnace insulation cylinder, which includes multiple insulation sections 1 connected coaxially in sequence, with a nested structure 2 provided between each pair of adjacent insulation sections 1.

[0034] Each nested structure 2 includes a first connecting ring 201 and a second connecting ring 202, wherein the inner diameter of the first connecting ring 201 of the same nested structure 2 matches the outer diameter of the second connecting ring 202;

[0035] The first connecting ring 201 and the second connecting ring 202 of the same nested structure 2 are respectively disposed at one end of two adjacent insulation sections 1, and the two adjacent insulation sections 1 are connected by the nested first connecting ring 201 and the second connecting ring 202, and the nested first connecting ring 201 and the second connecting ring 202 are threadedly engaged.

[0036] According to the single crystal furnace insulation cylinder provided in this embodiment of the utility model, by setting a nested structure 2 between adjacent insulation sections 1 and matching the inner and outer diameters of the first connecting ring 201 and the second connecting ring 202 of the nested structure 2, adjacent insulation sections 1 can be connected by nesting. This not only improves the sealing performance of the connection points of each section of the insulation cylinder and improves the insulation effect, but also reduces heat loss and power consumption, and lowers production costs. Furthermore, it can enhance the overall centering of the insulation cylinder and ensure the uniformity and consistency of the thermal field during single crystal growth.

[0037] In addition, the first connecting ring 201 and the second connecting ring 202 of the nested structure 2 in the single crystal furnace insulation cylinder are connected by threads, which can further improve the sealing of the connection of each section of the insulation cylinder, improve the insulation effect, and make the connection between each insulation section 1 more secure, thereby improving the overall structural stability of the insulation cylinder. When installing the insulation cylinder, it is also possible to choose to disassemble and install it individually or to hoist it as a whole, making the installation method of the insulation cylinder more diversified and the operation simple and convenient.

[0038] The single crystal furnace insulation cylinder provided in the embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0039] according to Figure 1 This invention provides an exemplary embodiment of a single-crystal furnace insulation cylinder, comprising multiple insulation sections 1, which are coaxially connected sequentially along the axial direction to form a complete insulation cylinder. The number of insulation sections 1 can be designed according to the size of the single-crystal furnace, the height of the crucible, the ambient temperature, etc., and this embodiment does not limit this number. For example, the number of insulation sections 1 can be 2, 3, or 4. The segmented design of the insulation cylinder allows each insulation section 1 to be independently disassembled and installed, facilitating independent cleaning, maintenance, and replacement of each insulation section 1, thus reducing the later maintenance costs of the insulation cylinder.

[0040] See Figure 1 In this embodiment, preferably, the heat preservation cylinder has three heat preservation sections 1, namely an upper heat preservation section 101, a middle heat preservation section 102 and a lower heat preservation section 103, and the upper heat preservation section 101, the middle heat preservation section 102 and the lower heat preservation section 103 are arranged coaxially from top to bottom.

[0041] Furthermore, in this embodiment, each insulation section 1 is made of a high-temperature resistant material with high hardness. For example, the insulation section 1 can be made of ceramic materials such as silicon nitride, silicon carbide, and boron nitride. This not only ensures the heat preservation performance of the insulation cylinder, but also makes each insulation section 1 have high hardness, which can meet the assembly and connection between each insulation section 1 and reduce the falling of debris.

[0042] In this embodiment, the insulation sections 1 are connected in a nested manner. Specifically, see [link to documentation]. Figure 1Each pair of adjacent insulation sections 1 is provided with a nested structure 2. For example, corresponding to the above-mentioned three-section insulation section 1 implementation, there are two sets of nested structures 2, located between the upper insulation section 101 and the middle insulation section 102, and between the middle insulation section 102 and the lower insulation section 103, respectively. By connecting the insulation sections 1 through nesting, gaps at the existing insulation cylinder connections can be avoided or reduced, improving the sealing of the connections between adjacent insulation sections 1, reducing heat loss at the insulation cylinder connections, thereby reducing the power consumption of the single crystal furnace and reducing production costs.

[0043] For details, see Figure 1 Each nested structure 2 includes a first connecting ring 201 and a second connecting ring 202. The inner diameter of the first connecting ring 201 and the outer diameter of the second connecting ring 202 within the same nested structure 2 match. For example, the inner diameter of the first connecting ring 201 and the outer diameter of the second connecting ring 202 within the same nested structure 2 are the same, allowing the first connecting ring 201 to fit snugly onto the second connecting ring 202 in the same group. Furthermore, the first connecting ring 201 and the second connecting ring 202 of the same nested structure 2 are respectively positioned at the end where two adjacent insulation sections 1 meet, allowing adjacent insulation sections 1 to be nested together via the nested structure 2, thereby ensuring the sealing of the connection between adjacent insulation sections 1. For example, in... Figure 1 In the example, the nested structure 2 between the middle insulation section 102 and the lower insulation section 103 is as follows: the first connecting ring 201 is disposed at the lower end of the middle insulation section 102, and the second connecting ring 202 is disposed at the upper end of the lower insulation section 103.

[0044] More specifically, in this embodiment, the first connecting ring 201 and the second connecting ring 202 of the same group, i.e., the nested first connecting ring 201 and the second connecting ring 202, are connected by a threaded structure. For example, see [link to documentation]. Figure 1 The inner wall of the first connecting ring 201 is provided with an internal thread, and the outer wall of the second connecting ring 202 is provided with an external thread. When two adjacent insulation sections 1 are connected, they are connected by the internal thread of the first connecting ring 201 and the external thread of the second connecting ring 202. This threaded connection can further improve the sealing of the connection between the sections of the insulation cylinder, improve the insulation effect, and make the connection between the insulation sections 1 more secure, thereby improving the overall structural stability of the insulation cylinder.

[0045] Furthermore, in this embodiment, the nested structures 2 on each insulation section 1 are integrally formed on the insulation section 1. For example, the first connecting ring 201 and the second connecting ring 202 can be set on the insulation section 1 by casting, or they can be formed by turning on the original insulation section 1. In this way, the integral forming method can ensure the connection stability between the nested structure 2 and the insulation section 1, and ensure the overall structural stability of the insulation cylinder.

[0046] Furthermore, in this embodiment, the inner diameter of the first connecting ring 201 is larger than the inner diameter of the insulation section 1 connected to it, and / or the outer diameter of the second connecting ring 202 is smaller than the outer diameter of the insulation section 1 connected to it; and the first connecting ring 201 and the second connecting ring 202 of the same nested structure 2 have the same height. For example, see Figure 1 The inner diameter of the first connecting ring 201 is larger than the inner diameter of the insulation section 1 connected to it, and the outer diameter of the second connecting ring 202 is smaller than the outer diameter of the insulation section 1 connected to it. This arrangement ensures that the inner side of the first connecting ring 201 is offset from the inner side of the insulation section 1, and the outer side of the second connecting ring 202 is offset from the outer side of the insulation section 1. This results in support steps forming at the ends of the insulation section 1 at both the first connecting ring 201 and the second connecting ring 202. Since the first connecting ring 201 and the second connecting ring 202 have the same height, when they engage, the connecting rings can abut against the support steps on adjacent insulation sections 1. These support steps provide restraint and support for the adjacent insulation sections 1, thereby ensuring the structural stability of the connections between the insulation sections 1 and improving the overall structural stability of the insulation cylinder.

[0047] Furthermore, in this embodiment, the outer diameter of the first connecting ring 201 is equal to the outer diameter of the insulation section 1 connected to it, and / or, the inner diameter of the second connecting ring 202 is equal to the inner diameter of the insulation section 1 connected to it. For example, see... Figure 1 The outer diameter of each first connecting ring 201 is equal to the outer diameter of the insulation section 1 connected to it, and the inner diameter of each second connecting ring 202 is equal to the inner diameter of the insulation section 1 connected to it. This arrangement ensures that the side of the first connecting ring 201 and the second connecting ring 202 facing away from the threaded surface is flush with the wall of the insulation section 1 connected to them, making the structure simpler and the appearance more aesthetically pleasing.

[0048] In this embodiment, in order to improve the heat collection effect of the upper part of the insulation cylinder, a narrowing section is provided at the upper part of the insulation cylinder. The inner diameter of the narrowing section is smaller than the inner diameter of the rest of the insulation cylinder, thereby reducing the internal space at the upper end of the insulation cylinder. Compared with the entire insulation cylinder being a straight cylinder, the space is relatively reduced, the heat preservation effect of the upper space is enhanced, and energy saving is beneficial.

[0049] Preferred, see Figure 2In this embodiment, the upper insulation section 101 is a narrow-diameter section, that is, the inner diameter of the upper insulation section 101 is smaller than the inner diameter of the middle insulation section 102 and the lower insulation section 103, so that the internal space of the upper insulation section 101 is smaller than the internal space of the middle insulation section 102 and the lower insulation section 103. In this way, the upper insulation section 101 and the middle insulation section 102 form a temperature step, which is beneficial to realize the segmented heating and insulation of single crystal.

[0050] Furthermore, in this embodiment, to achieve a variable diameter connection between the upper insulation section 101 and the middle insulation section 102, a variable diameter connection structure 3 is provided between the middle insulation sleeve and the upper insulation section 101, see [link to documentation]. Figure 2 The variable diameter connection structure 3 can specifically be a variable diameter ring. A nested structure 2 is provided between the upper end of the variable diameter ring and the lower end of the upper insulation section 101, and a nested structure 2 is provided between the lower end of the variable diameter ring and the upper end of the middle insulation section 102. Furthermore, the diameter of the mating surface of the nested structure 2 at the lower end of the variable diameter ring is larger than the diameter of the mating surface of the nested structure 2 at the upper end of the variable diameter ring. For example, see... Figure 2 The upper end of the reducing ring is provided with a first connecting ring 201, and the lower end is provided with a second connecting ring 202. The diameter of the second connecting ring 202 is larger than the diameter of the first connecting ring 201. This arrangement connects the upper insulation section 101 to the inner ring of the reducing ring, and the middle insulation section 102 to the outer ring of the reducing ring. The reducing ring connection between the upper insulation section 101 and the middle insulation section 102 is achieved radially. The structure is simple and reliable. Moreover, the threaded fit of the nested structure 2 ensures good sealing between the upper insulation section 101 and the middle insulation section 102 and the reducing ring, resulting in better insulation effect.

[0051] It should be understood that in other embodiments, the variable diameter ring can also be integrally formed and disposed at the lower end of the upper insulation section 101 or the upper end of the middle insulation section 102. For example, when the variable diameter ring is integrally formed at the lower end of the upper insulation section 101, a set of matching threaded connection surfaces can be provided between the lower end of the variable diameter ring and the upper end of the middle insulation section 102 to realize the variable diameter connection between the upper insulation section 101 and the middle insulation section 102.

[0052] See Figure 1In this embodiment, the inner diameter of the middle insulation section 102 is the same as the inner diameter of the lower insulation section 103, and the outer diameter of the middle insulation section 102 is the same as both the inner and outer diameters of the lower insulation section 103. Furthermore, the sum of the thicknesses of the first connecting ring 201 and the second connecting ring 202 between the middle insulation section 102 and the lower insulation section 103 is equal to the thickness of the middle insulation section 102. With this configuration, after the two insulation sections 1 are threaded together via the first connecting ring 201 and the second connecting ring 202, the inner and outer wall surfaces of the two insulation sections 1 are flush, resulting in a higher degree of fit between the two insulation sections 1, a simpler structure, a more regular shape, and a more aesthetically pleasing appearance.

[0053] On the other hand, this utility model embodiment also provides a single crystal furnace hot zone, which includes the single crystal furnace insulation cylinder of any of the above embodiments.

[0054] Furthermore, the single-crystal furnace thermal field in this embodiment also includes a furnace bottom pressure plate 4, which is used to support the insulation cylinder. (See [link]). Figure 3 The furnace bottom pressure plate 4 is circular, and an installation ring groove 401 coaxial with the furnace bottom pressure plate 4 is provided on the furnace bottom pressure plate 4. The lower end of the insulation cylinder is embedded in the installation ring groove 401 and is threadedly connected to the inner wall of the installation ring groove 401. Specifically, the furnace bottom pressure plate 4 has a threaded structure on the inner wall of the installation ring groove 401, and the lower end of the insulation cylinder also has a threaded structure, so that the insulation cylinder can be threadedly engaged with the installation ring groove 401 through the threaded structure, ensuring the sealing between the insulation cylinder and the furnace bottom pressure plate 4 and improving the overall insulation effect of the thermal field.

[0055] Furthermore, this embodiment of the invention also provides a single crystal furnace, which includes the aforementioned single crystal furnace hot zone.

[0056] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0057] The above embodiments merely illustrate several implementation methods of this application, and their descriptions are relatively specific and detailed. However, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A single crystal furnace susceptor, characterized by: The single crystal furnace heat preservation cylinder comprises a plurality of heat preservation sections (1) coaxially connected in sequence, and a nesting structure (2) is arranged between each two adjacent heat preservation sections (1); Each nesting structure (2) comprises a first connecting ring (201) and a second connecting ring (202), and the inner diameter of the first connecting ring (201) matches the outer diameter of the second connecting ring (202) in the same nesting structure (2); The first connecting ring (201) and the second connecting ring (202) of the same nesting structure (2) are arranged at one end of the adjacent two heat preservation sections (1), and the adjacent two heat preservation sections (1) are connected by nesting the first connecting ring (201) and the second connecting ring (202), and the first connecting ring (201) and the second connecting ring (202) are threadedly connected.

2. The single crystal furnace susceptor of claim 1, wherein: The single crystal furnace heat preservation cylinder comprises three heat preservation sections (1), namely an upper heat preservation section (101), a middle heat preservation section (102) and a lower heat preservation section (103) arranged from top to bottom. The inner diameter of the upper heat preservation section (101) is smaller than the inner diameters of the middle heat preservation section (102) and the lower heat preservation section (103), and a variable-diameter connecting structure (3) is arranged between the upper heat preservation section (101) and the middle heat preservation section (102).

3. The single crystal furnace susceptor of claim 2, wherein: The variable-diameter connecting structure (3) comprises a variable-diameter ring, and the nesting structure (2) is arranged between the upper end of the variable-diameter ring and the upper heat preservation section (101) and between the lower end of the variable-diameter ring and the middle heat preservation section (102), and the diameter of the joint surface of the nesting structure (2) at the upper end of the variable-diameter ring is smaller than the diameter of the joint surface of the nesting structure (2) at the lower end of the variable-diameter ring.

4. The single crystal furnace holding cylinder according to claim 2, characterized by: The inner diameter of the first connecting ring (201) is greater than the inner diameter of the heat preservation section (1) connected thereto, and / or the outer diameter of the second connecting ring (202) is smaller than the outer diameter of the heat preservation section (1) connected thereto; The height of the first connecting ring (201) is the same as that of the second connecting ring (202) in the same nesting structure (2).

5. The single crystal furnace retort of claim 4, wherein: The outer diameter of the first connecting ring (201) is equal to the outer diameter of the heat preservation section (1) connected thereto; and / or The inner diameter of the second connecting ring (202) is equal to the inner diameter of the heat preservation section (1) connected thereto.

6. The single crystal furnace retort of claim 5, wherein: The inner diameter of the middle heat preservation section (102) is the same as the inner diameter of the lower heat preservation section (103), and the outer diameter of the middle heat preservation section (102) is the same as the outer diameter of the lower heat preservation section (103); The sum of the thicknesses of the first connecting ring (201) and the second connecting ring (202) between the middle heat preservation section (102) and the lower heat preservation section (103) is equal to the thickness of the middle heat preservation section (102), and the sum of the thicknesses of the first connecting ring (201) and the second connecting ring (202) between the middle heat preservation section (102) and the lower heat preservation section (103) is equal to the thickness of the lower heat preservation section (103).

7. The single crystal furnace susceptor of claim 1, wherein: The first connecting ring (201) and the second connecting ring (202) are integrally formed with the heat preservation section (1).

8. A heat zone of a single crystal furnace, characterized by: The single crystal furnace heat preservation cylinder comprises the single crystal furnace heat preservation cylinder according to any one of claims 1-7.

9. The heat zone of claim 8, wherein: Also included is a circular furnace bottom pressure disc (4) provided with a mounting ring groove (401) concentric with the furnace bottom pressure disc (4); The lower end of the single crystal furnace insulation cylinder is embedded into the mounting ring groove (401) and is threadedly connected with the inner wall of the mounting ring groove (401).

10. A single crystal furnace characterized by: The single crystal furnace thermal field of claim 8 or 9 is included.

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