Door body structure and coating device

Abstract

The utility model discloses a door body structure and a coating device, and relates to the field of coating equipment. The door body structure comprises a structure body, a hinge mechanism and a door plate, the hinge mechanism is arranged on the structure body, a door opening is formed in the structure body, the door plate covers the door opening, one end of the door plate is hinged to the hinge mechanism, and the rotating center line of the door plate is horizontal; the hinge mechanism has a first state and a second state which can be switched, and in the first state, the distance between the end, connected with the hinge mechanism, of the door plate and the structure body is larger than that between the end, connected with the hinge mechanism, of the door plate and the structure body in the second state. The door body structure has the advantages of being more stable and reliable in structure and higher in safety.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coating equipment field, specifically, relate to a door body structure and coating device. BACKGROUND

[0002] There are various devices with large weight door body on the market, the door body of such devices generally adopts lateral hinge type installation, under the action of force, the door body rotates in the horizontal plane.

[0003] In actual application, due to the different load bearing of different parts of lateral hinge, gradually deforms even fails with the application time elapses, leading to the gradually poor sealing effect, and the door body also has the risk of toppling, easy to cause harm to the on-site personnel. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a door body structure, it has more stable and reliable structure, higher safety characteristics.

[0005] Another purpose of the utility model is to provide a coating device, it has more stable and reliable structure, higher safety characteristics.

[0006] The embodiment of the utility model provides a technical scheme:

[0007] A door body structure, including structure main part, hinge mechanism and door plate, the hinge mechanism is arranged on the structure main part, the structure main part is opened with door hole, the door plate covers the door hole, one end of the door plate is hinged with the hinge mechanism, and the rotation center line of the door plate is horizontal.

[0008] The hinge mechanism has switchable first state and second state, in the first state, the distance between one end of the door plate connected with the hinge mechanism and the structure main part is greater than the distance between one end of the door plate connected with the hinge mechanism and the structure main part in the second state.

[0009] In optional implementation, the hinge mechanism includes hinge seat and hinge shaft, the hinge seat is connected with the structure main part, the hinge seat is provided with the waist type hole, the hinge shaft is sleeved in the waist type hole, and the long axis length of the waist type hole is greater than the diameter of the hinge shaft, and the door plate is connected with the hinge shaft.

[0010] In the first state, the hinge shaft is at one end of the waist type hole farther away from the structure main part, and in the second state, the hinge shaft is at one end of the waist type hole closer to the structure main part.

[0011] In optional implementation, the long axis of the waist type hole extends in the first direction, and the first direction is towards the opening direction of the door hole.

[0012] In an optional embodiment, the axial direction of the hinge shaft extends in a second direction, which is parallel to the horizontal direction.

[0013] In an optional embodiment, the difference between the length of the long axis of the waist-shaped hole and the diameter of the hinge shaft is within the range of 2mm-5mm.

[0014] In an optional embodiment, the bottom end of the door panel has a shaft hole, which is sleeved on the hinge shaft.

[0015] In an optional embodiment, the hinge mechanism further comprises an elastic assembly, which is arranged on the hinge seat and connected with the hinge shaft, for continuously applying force to the hinge shaft to drive the hinge shaft to slide from the end of the waist-shaped hole farther away from the structural body to the end closer to the structural body.

[0016] In an optional embodiment, the hinge seat is further provided with an assembly rear cavity, which is at the end of the waist-shaped hole closer to the structural body; the elastic assembly comprises a tension member and a first elastic module, one end of the tension member is connected with the hinge shaft, and the other end extends into the assembly rear cavity;

[0017] The first elastic module is in the assembly rear cavity and in a compressed state, one end of the first elastic module abuts against the cavity wall of the assembly rear cavity closer to the waist-shaped hole, and the other end abuts against the end of the tension member extending into the assembly rear cavity.

[0018] In an optional embodiment, the hinge seat is provided with a first assembly hole for connecting the assembly rear cavity with the end of the waist-shaped hole closer to the structural body, and the tension member is slidably arranged in the first assembly hole; and / or,

[0019] The outer side wall of the end of the tension member away from the hinge shaft is convexly provided with a stop flange, the first elastic module is sleeved on the outer side wall of the tension member, and the end of the first elastic module away from the waist-shaped hole abuts against the stop flange.

[0020] In an optional embodiment, in the first state, there is a gap between the end of the tension member extending into the assembly rear cavity and the cavity wall of the assembly rear cavity away from the waist-shaped hole, and the width of the gap is greater than or equal to the difference between the length of the long axis of the waist-shaped hole and the diameter of the hinge shaft.

[0021] In an optional embodiment, the hinge seat is further provided with an assembly front cavity, which is located at one end of the waist-shaped hole away from the structural body; the elastic assembly further comprises a thrust piece and a second elastic module, one end of the thrust piece is connected with the hinge shaft, and the other end extends into the assembly front cavity;

[0022] The second elastic module is located in the assembly front cavity and is in a compressed state, one end of the second elastic module abuts against a cavity wall of the assembly front cavity away from the waist-shaped hole, and the other end abuts against one end of the thrust piece extending into the assembly front cavity.

[0023] In an optional embodiment, the hinge seat is further provided with a second assembly hole for connecting the assembly front cavity with one end of the waist-shaped hole away from the structural body, and the thrust piece is slidably arranged in the second assembly hole; and / or,

[0024] One end of the thrust piece away from the second elastic module abuts against the hinge shaft.

[0025] In an optional embodiment, the door plate comprises a main body segment and a transmission segment connected at an included angle, the main body segment is used for covering the door hole, and the connection position of the main body segment and the transmission segment is hinged with the hinge mechanism;

[0026] The door body structure further comprises a driving mechanism connected with the transmission segment, which is used for driving the transmission segment to rotate the main body segment to open or cover the door hole.

[0027] In an optional embodiment, the driving mechanism is located at one side of the structural body, and a driving end of the driving mechanism is rotatably connected with the transmission segment.

[0028] In an optional embodiment, the surface of the door plate is provided with a sealing ring, and the sealing ring surrounds the door hole.

[0029] In an optional embodiment, the structural body is provided with a first position sensor, the door plate is provided with a first trigger, and when the door plate is rotated upward to cover the door hole, the first trigger triggers the first position sensor to send a first position signal; and / or,

[0030] The structural body is provided with a second position sensor, the door plate is provided with a second trigger, and when the door plate is rotated downward to the maximum stroke, the second trigger triggers the second position sensor to send a second position signal.

[0031] The embodiment of the utility model provides a kind of coating device, it includes the door body structure before-mentioned, the door body structure includes structure main body, hinge mechanism and door plate, the hinge mechanism is set on the structure main body, the structure main body is opened with door hole, the door plate covers the door hole, a section of the door plate is hinged with the hinge mechanism, and the rotating center line of the door plate is horizontal;The hinge mechanism has the first state and the second state of switchable, in the first state, the distance between the one end of the door plate connected with the hinge mechanism and the structure main body is greater than the distance between the one end of the door plate connected with the hinge mechanism and the structure main body in the second state.

[0032] In optional implementation, the door plate is provided with magnetron sputtering cathode, in the state that the door plate covers the door hole, the magnetron sputtering cathode extends into the structure main body inside through the door hole.

[0033] Compared with prior art, the door body structure provided by the utility model, one end of door plate is connected with structure main body by hinge mechanism, and rotating center line of door plate is horizontal, i.e. the gravity of door plate can be evenly applied to hinge mechanism, so that different parts of hinge mechanism are evenly stressed, and are not prone to deformation and failure.Therefore, the door body structure provided by the utility model has the advantages of more stable and reliable structure, higher safety. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the utility model, and therefore should not be regarded as limiting the scope. For ordinary skilled person in the art, other related drawings can also be obtained according to these drawings without creative labor.

[0035] Figure 1 The coating device provided by the embodiment of the utility model is the structure schematic view in a state;

[0036] Figure 2 For Figure 1 The partial cutaway schematic view shown in the figure;

[0037] Figure 3 For Figure 2 The enlarged schematic view of A area in the figure;

[0038] Figure 4 The structure schematic view of hinge mechanism;

[0039] Figure 5 The cutaway schematic view of hinge mechanism;

[0040] Figure 6 The structure schematic view of door plate;

[0041] Figure 7 A structure schematic view of the coating device in another state according to an embodiment of the present application is provided.

[0042] Figure 8 For Figure 7 An enlarged schematic view of the B area in the middle;

[0043] Figure 9 For Figure 1 An enlarged schematic view of the C area in the middle.

[0044] Icon: 100-coating device; 110-base; 111-supporting part; 120-structure main body; 121-door hole; 122-first arrival sensor; 123-second arrival sensor; 130-hinge mechanism; 131-hinge seat; 1311-first assembly hole; 1312-second assembly hole; 1313-assembly main body; 1314-mounting part; 132-hinge shaft; 133-waist-shaped hole; 134-assembly rear cavity; 135-tension member; 1351-stop flange; 136-first elastic module; 137-assembly front cavity; 138-thrust member; 139-second elastic module; 140-door plate; 141-shaft hole; 142-main body section; 143-transmission section; 144-matching hole; 145-magnetic control sputtering cathode; 146-sealing ring; 147-first trigger; 148-second trigger; 150-driving mechanism; 151-driving member; 1511-fixed end; 1512-telescopic end; 152-rotation shaft. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0046] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present application.

[0047] It should be noted that: similar labels and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0048] In the description of the utility model, it is understood that the terms "upper", "lower", "inner", "outer", "left", "right" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly used when the utility model product is used, or the orientation or positional relationship commonly understood by those skilled in the art, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0049] In addition, the terms "first", "second" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.

[0050] In the description of the utility model, it is also necessary to explain that, unless otherwise explicitly specified and limited, the terms "arrangement", "connection" and the like should be understood broadly, for example, "connection" can be fixed connection, can also be detachable connection, or integrally connected; can be mechanical connection, can also be electrical connection; can be direct connection, can also be indirect connection through intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0051] The specific embodiments of the utility model will be described in detail below with reference to the drawings.

[0052] Embodiment

[0053] Please refer to Figure 1 , Figure 2 and Figure 3 , Figure 1 It is the structure schematic drawing of the film coating device 100 provided by the embodiment in a state, Figure 2 It is the partial cutaway schematic view of Figure 1 , Figure 3 It is the enlarged schematic view of A area in Figure 2 .

[0054] The film coating device 100 provided by the embodiment is used to coat film on substrate. The film coating device 100 is configured with door body structure, and the door body structure includes base 110, structure main body 120, hinge mechanism 130, door plate 140 and driving mechanism 150.

[0055] The structural body 120 is arranged on the base 110, and a door opening 121 is formed on one side surface of the structural body 120 in a first direction, which can be parallel to the horizontal direction; the hinge mechanism 130 is arranged at the bottom of the structural body 120, the door plate 140 covers the door opening 121, and the bottom end of the door plate 140 is hinged to the hinge mechanism 130, and the rotation center line of the door plate 140 is horizontal, that is, it can rotate in the vertical plane; the driving mechanism 150 is arranged in the base 110 and connected with the door plate 140, for driving the door plate 140 to rotate downward to open the door opening 121, and for driving the door plate 140 to rotate upward to cover the door opening 121.

[0056] It should be noted that in another embodiment, the door opening 121 can also be formed on one side of the structural body 120 in the vertical direction, that is, the first direction is along the vertical direction, for example, on the upper surface of the structural body 120. In this case, the hinge mechanism 130 can be arranged on one side of the structural body 120 in the horizontal direction, and one end of the door plate 140 is hinged to the hinge mechanism 130. In the state that the door plate 140 covers the door opening 121, the door plate 140 can rotate upward in the vertical plane to open the door opening 121; in the state that the door opening 121 is open, the door plate 140 can rotate downward in the vertical plane to cover the door opening 121.

[0057] In this embodiment, two door openings 121 are formed on one side surface of the structural body 120 in the first direction, and the number of door plates 140 corresponds to two, and each door plate 140 is correspondingly provided with at least one hinge mechanism 130 and one driving mechanism 150. In another embodiment, the number of door openings 121 and door plates 140 can be adjusted according to actual application conditions, and only the number of hinge mechanisms 130 and driving mechanisms 150 needs to be correspondingly adjusted.

[0058] Figure 1 The direction indicated by the X arrow is the first direction, the direction indicated by the Y arrow is the second direction, and the direction indicated by the Z arrow is the vertical direction. In this embodiment, the first direction is perpendicular to the second direction.

[0059] In fact, the door plate 140 is provided with a magnetron sputtering cathode 145 and a sealing ring 146, and the coating device 100 provided in this embodiment has a working state and a maintenance state. The working state is that the door plate 140 covers the door opening, and the maintenance state is that the door plate is opened and does not cover the door opening. The door plate 140 is driven to rotate in the vertical plane by the driving mechanism 150, so as to realize switching between the working state and the maintenance state.

[0060] In the working state, the door panel 140 is in a roughly vertical position, covering the door opening 121. The magnetron cathode is located inside the door opening 121, and the sealing ring 146 surrounds the door opening 121, thus sealing the gap between the door panel 140 and the main structural body 120. In this state, both the magnetron sputtering cathode 145 and the sealing ring 146 are located on the surface of the door panel 140 near the main structural body 120. Because the rotation center line of the door panel 140 is horizontal, the weight of the door panel 140 is evenly applied to the hinge mechanism 130, making the hinge mechanism 130 less prone to deformation and failure, resulting in a more stable and reliable structure and higher safety.

[0061] Maintenance status such as Figure 1 As shown, in this state, the door panel 140 is approximately horizontal, the door opening 121 is open, and the door panel 140 and the surface of the main body 120 containing the door opening 121 form an angled space. The magnetron sputtering cathode 145 and the sealing ring 146 are both located on the upper surface of the door panel 140. In this state, maintenance personnel can stand around the door panel 140 to perform maintenance on the magnetron sputtering cathode 145, providing a larger operating space and ensuring greater safety as they are outside the rotation trajectory of the door panel 140.

[0062] Please refer to the following: Figure 4 and Figure 5 , Figure 4 The diagram shown is a structural schematic of the hinge mechanism 130. Figure 5 The diagram shown is a cross-sectional view of the hinge mechanism 130.

[0063] Understandably, because the bottom of the door panel 140 is hinged, during its rotation in the vertical plane under the drive of the drive mechanism 150, the distance between the part of the door panel 140 closer to the top and the wall of the structural body 120 where the door opening 121 is opened is greater. In other words, during the transition from maintenance state to working state, the bottom of the door panel 140 is the first to come into contact with the structural body 120 compared to other parts. At this time, the bottom of the sealing ring 146 has been squeezed, and there is still an angle between the door panel 140 as a whole and the wall of the structural body 120 where the door opening 121 is opened, which makes it impossible for the door panel 140 to rotate smoothly to a vertical state, that is, it cannot successfully cover the door opening 121.

[0064] To solve this problem, the hinge mechanism 130 provided in this embodiment has a switchable first state and a second state. In the first state, the distance between the bottom end of the door panel 140 and the structural body 120 in the first direction is greater than the distance between the bottom end of the door panel 140 and the structural body 120 in the first direction in the second state.

[0065] Specifically, the hinge mechanism 130 comprises a hinge seat 131 and a hinge shaft 132, the hinge seat 131 is connected with the bottom of the structure body 120, the hinge seat 131 is provided with a waist-shaped hole 133, the hinge shaft 132 extends in a second direction, the second direction is parallel to the horizontal direction, and the hinge shaft 132 is sleeved in the waist-shaped hole 133; the long axis of the waist-shaped hole 133 extends in a first direction, and the length of the long axis of the waist-shaped hole 133 is greater than the diameter of the hinge shaft 132; the bottom end of the door plate 140 has a shaft hole 141 extending in the second direction, and the shaft hole 141 is sleeved on the hinge shaft 132.

[0066] In the first state, the hinge shaft 132 is located at one end of the waist-shaped hole 133 far away from the structure body 120; in the second state, the hinge shaft 132 is located at one end of the waist-shaped hole 133 close to the structure body 120. Because the length of the long axis of the waist-shaped hole 133 is greater than the diameter of the hinge shaft 132, in the process of rotating the door plate 140, under the influence of the change of the acting force, the hinge shaft 132 can slide along the long axis of the waist-shaped hole 133, so as to change the distance between the bottom end of the door plate 140 and the structure body 120 in the first direction, thereby protecting the bottom of the sealing ring 146 and preventing the bottom of the sealing ring 146 from being damaged by extrusion before the door plate 140 covers the door hole 121.

[0067] When the door plate 140 is rotated upward to the bottom end abutting against the bottom end of the structure body 120 under the driving of the driving mechanism 150, under the continuous driving force output by the driving mechanism 150, the door plate 140 drives the hinge shaft 132 to slide in the waist-shaped hole 133, specifically to slide a certain distance in the direction of the long axis of the waist-shaped hole 133 away from the door hole 121, to reach the first state, thereby giving way for further rotation of the door plate 140, avoiding the bottom of the sealing ring 146 from being damaged, ensuring the door plate 140 to continue to rotate upward to the position, and finally ensuring the smooth in-place working state, and realizing the covering of the door hole 121.

[0068] Actually, the hinge seat 131 comprises an assembly body 1313 and a mounting portion 1314, the assembly body 1313 is connected with the bottom of the structure body 120, the mounting portion 1314 is connected with the assembly body 1313 and protrudes from the side surface of the structure body 120 where the door hole 121 is opened, and the waist-shaped hole 133 is arranged on the mounting portion.

[0069] The position of the waist-shaped hole 133 protrudes from the wall surface of the structure body 120 where the door opening 121 is located. The door plate 140 cooperates with the hinge shaft 132 sleeved in the waist-shaped hole 133, so that the bottom end of the door plate 140 does not extend into the bottom of the structure body 120, and the stroke of the bottom end before being stopped during the upward rotation of the door plate 140 is increased to a certain extent, so that the long axis of the waist-shaped hole 133 can be reduced to a smaller size, and the stability of the rotation of the door plate 140 is improved. It should be noted that in actual application, the specific position and size of the waist-shaped hole 133 need to be adjusted according to the thickness size of the door plate 140 actually applied.

[0070] In the embodiment, the difference between the long axis length of the waist-shaped hole 133 and the diameter of the hinge shaft 132 is in the range of 2mm-5mm, and can be 2mm, 3mm, 4mm or 5mm, etc. As preferred, the difference between the long axis length of the waist-shaped hole 133 and the diameter of the hinge shaft 132 is 3mm in the embodiment, that is, a sliding stroke of 3mm in the first direction can be provided for the hinge shaft 132. In another embodiment, the size relationship between the waist-shaped hole 133 and the hinge shaft 132 can be adjusted according to the actual application conditions.

[0071] Please refer to Figure 6 , Figure 6 for the structural schematic diagram of the door plate 140.

[0072] In the embodiment, the door plate 140 includes a body segment 142 and a transmission segment 143. The body segment 142 is used to cover the door opening 121, and the magnetron sputtering cathode 145 and the sealing ring 146 are arranged on the surface of the body segment 142. One end of the transmission segment 143 is connected to the bottom end of the body segment 142, and the connection position of the two is hinged with the hinge mechanism 130. The other end of the transmission segment 143 extends obliquely downward to the inside of the base 110 and is connected with the driving mechanism 150. In the state that the body segment 142 covers the door opening 121, the transmission segment 143 protrudes from the side surface of the body segment 142 away from the door opening 121.

[0073] It should be noted that the base 110 in the embodiment is a surface hollow structure, and the connection between the driving mechanism 150 arranged in the inside of the base 110 and the transmission segment 143 is not blocked. In the embodiment, the included angle between the body segment 142 and the transmission segment 143 of the door plate 140 is greater than or equal to 90°, so that the extension stroke of the driving mechanism 150 is reduced, and the movement efficiency of the door plate 140 is improved. In another embodiment, the included angle between the body segment 142 and the transmission segment 143 can be adjusted according to the actual application conditions.

[0074] The driving mechanism 150 comprises a driving member 151 and a rotating shaft 152. The driving member 151 has a fixed end 1511 and an extension end 1512. The fixed end 1511 is movably connected with the base 110, and the extension end 1512 is connected with the rotating shaft 152. The rotating shaft 152 extends in the second direction. The end of the transmission segment 143 away from the main body segment 142 is provided with a matching hole 144, and the rotating shaft 152 is sleeved in the matching hole 144.

[0075] In the embodiment, the driving member 151 is an electric cylinder. In other embodiments, a linear driving device such as an oil cylinder can also be used for replacement according to actual application conditions.

[0076] It can be understood that the included angle between the main body segment 142 and the transmission segment 143 of the door plate 140 is greater than or equal to 90°, and in the maintenance state, the door plate 140 is substantially horizontal. Figure 1 In the maintenance state shown, if it is needed to switch to the working state, the extension end 1512 of the driving member 151 is extended, and the end of the transmission segment 143 away from the main body segment 142 is applied with a pushing force in the first direction away from the structure main body 120 by the rotating shaft 152. Under the action of the pushing force, the transmission segment 143 drives the main body segment 142 to rotate upward around the hinge shaft 132, and in the rotating process, the rotating shaft 152 rotates in the matching hole 144 of the transmission segment 143, and the fixed end 1511 of the driving member 151 rotates in the vertical plane relative to the base 110. When the main body segment 142 rotates to the door hole 121 of the cover structure main body 120, the switching to the working state is completed.

[0077] If it is needed to switch from the working state to the maintenance state, the extension end 1512 of the driving member 151 is retracted, and the end of the transmission segment 143 away from the main body segment 142 is applied with a pulling force in the first direction toward the structure main body 120 by the rotating shaft 152. Under the action of the pulling force, the transmission segment 143 drives the main body segment 142 to rotate downward around the hinge shaft 132, and in the rotating process, the rotating shaft 152 rotates in the matching hole 144 of the transmission segment 143, and the fixed end 1511 of the driving member 151 rotates in the vertical plane relative to the base 110. When the main body segment 142 rotates downward to the maximum stroke, the switching to the maintenance state is completed.

[0078] It can be understood that in the maintenance state, the door plate 140 is substantially horizontal, and its center of gravity is the lowest. In order to prevent the door plate 140 from falling due to the failure of the driving mechanism 150 and to further improve the safety, in the embodiment, the base 110 has a support portion 111 for upwardly supporting the door plate 140 when the door plate 140 rotates downward to the maximum stroke. In other words, when the door plate 140 moves downward to contact the support portion 111 of the base 110, it reaches the maximum stroke of downward rotation, i.e., reaches the maintenance state. In the embodiment, the support portion 111 of the base 110 actually supports the main body segment 142 of the door plate 140.

[0079] Because the waist-shaped hole 133 provides a certain sliding space for the hinge shaft 132, the door plate 140 inevitably has a motion stroke mutation during the rotation, i.e. jumping, resulting in an unstable rotation process. In order to solve this problem, in the embodiment, the hinge mechanism 130 further comprises an elastic assembly arranged on the hinge seat 131 and connected with the hinge shaft 132, for continuously exerting an action force on the hinge shaft 132 in the first horizontal direction close to the door hole 121.

[0080] In the working state, the driving mechanism 150 basically only plays a role of maintaining the stable state of the door plate 140, and the action force exerted on the door plate 140 is small. In this state, affected by the action force of the elastic assembly, the hinge shaft 132 remains in the state of being close to the door hole 121 at one end of the waist-shaped hole 133, i.e. the hinge mechanism 130 is in the second state.

[0081] When it is needed to switch from the maintenance state to the working state, the driving mechanism 150 exerts a large pushing force on the transmission section 143, at this time, the horizontal component of the pushing force of the driving mechanism 150 is large, pushing the door plate 140 to move away from the door hole 121, driving the hinge shaft 132 to slide from the end close to the door hole 121 to the end away from the door hole 121 at the waist-shaped hole 133. In the process of the main body section 142 of the door plate 140 gradually rotating upward, the horizontal component gradually decreases, and when the horizontal component decreases to be equal to the pushing force of the elastic assembly, a critical state is reached. Then, the pushing force of the elastic assembly gradually exceeds the horizontal component of the driving mechanism 150, so that the hinge shaft 132 slowly slides to the end close to the door hole 121 at the waist-shaped hole 133.

[0082] Please refer to Figure 7 and Figure 8 , Figure 7 It is a partial cross-sectional schematic view of the coating device 100 provided in another state of the embodiment, Figure 8 It is an enlarged schematic view of the B area in Figure 7 .

[0083] When the main body section 142 rotates upward to the bottom end abutting against the bottom end of the side surface where the door hole 121 is located on the structure body 120, under the action of the driving force and the abutting force, the door plate 140 drives the hinge shaft 132 to slide to the end away from the door hole 121 at the waist-shaped hole 133, avoiding the bottom of the sealing ring being pressed and damaged, and ensuring the door plate 140 to continue to rotate upward. When the top end of the main body section 142 rotates to contact the top end of the side surface where the door hole 121 is located on the structure body 120, the hinge shaft 132 is still at the end away from the door hole 121 at the waist-shaped hole 133, i.e. there is a gap between the bottom end of the main body section 142 and the side surface where the door hole 121 is located on the structure body 120, as shown in Figure 7 .

[0084] In this state, the driving mechanism 150 reduces a part of driving force, and under the action of the elastic assembly, the hinge shaft 132 returns to the end of the waist-shaped hole 133 close to the door opening 121, i.e. drives the bottom end of the main body section 142 to translate a distance, so as to realize the surface adhesion of the main body section 142 to the surface of the structural body 120, realize the covering of the door opening 121, obtain the ideal sealing effect, and reach the working state.

[0085] For the connection structure of the elastic assembly and the hinge seat 131, in the embodiment, the hinge seat 131 is further provided with an assembly rear cavity 134 at the end of the waist-shaped hole 133 close to the structural body 120; the elastic assembly includes a tension member 135 and a first elastic module 136, one end of the tension member 135 is connected with the hinge shaft 132, and the other end extends into the assembly rear cavity 134; the first elastic module 136 is in the assembly rear cavity 134 and in a compressed state, one end of the first elastic module 136 abuts against the cavity wall of the assembly rear cavity 134 close to the waist-shaped hole 133, and the other end abuts against the end of the tension member 135 extending into the assembly rear cavity 134.

[0086] In addition, the hinge seat 131 is further provided with a first assembly hole 1311 connecting the assembly rear cavity 134 with the end of the waist-shaped hole 133 close to the structural body 120, and the tension member 135 is slidably arranged in the first assembly hole 1311. The outer side wall of the end of the tension member 135 away from the hinge shaft 132 is provided with a stop flange 1351, the first elastic module 136 is sleeved on the outer side wall of the tension member 135, and the end of the first elastic module 136 away from the waist-shaped hole 133 abuts against the stop flange 1351.

[0087] It can be understood that when the hinge shaft 132 slides in the waist-shaped hole 133, the tension member 135 will synchronously slide in the first assembly hole 1311. In order to ensure that the hinge shaft 132 can smoothly slide from the end of the waist-shaped hole 133 away from the door opening 121 to the end close to the door opening 121, i.e. ensure that the hinge mechanism 130 can smoothly switch from the first state to the second state, in the embodiment, in the first state, there is a gap between the end of the tension member 135 extending into the assembly rear cavity 134 and the cavity wall of the assembly rear cavity 134 away from the waist-shaped hole 133, and the width of the gap is greater than or equal to the difference between the long axis length of the waist-shaped hole 133 and the diameter of the hinge shaft 132.

[0088] The hinge seat 131 is further provided with an assembly front cavity 137 at the end of the waist-shaped hole 133 away from the structure main body 120; the elastic assembly further comprises a thrust piece 138 and a second elastic module 139, one end of the thrust piece 138 is connected with the hinge shaft 132, and the other end extends into the assembly front cavity 137; the second elastic module 139 is in the assembly front cavity 137 and is in a compressed state, one end of the second elastic module 139 abuts against the cavity wall on the side of the assembly front cavity 137 away from the waist-shaped hole 133, and the other end abuts against the end of the thrust piece 138 extending into the assembly front cavity 137.

[0089] The hinge seat 131 is further provided with a second assembly hole 1312 for connecting the assembly front cavity 137 with the end of the waist-shaped hole 133 away from the structure main body 120, and the thrust piece 138 is slidably arranged in the second assembly hole 1312.

[0090] The tension piece 135 always exerts a pulling force on the hinge shaft 132 in the direction close to the door hole 121 under the elastic force of the first elastic module 136, and the thrust piece 138 always exerts a pushing force on the hinge shaft 132 in the direction close to the door hole 121 under the elastic force of the second elastic module 139.

[0091] In fact, in the embodiment, the end of the tension piece 135 extending into the waist-shaped hole 133 is threadedly connected with the hinge shaft 132 to limit the rotation of the hinge shaft 132, and the end of the thrust piece 138 away from the second elastic module 139 abuts against the hinge shaft 132. In another embodiment, the end of the thrust piece 138 away from the second elastic module 139 can also be connected with the hinge shaft 132 in a manner of welding or thread connection.

[0092] The first elastic module 136 and the second elastic module 139 are both multiple disc springs stacked in the first direction, and in another embodiment, the first elastic module 136 and the second elastic module 139 can also be selected as other elastic elements according to actual application conditions to replace the disc springs in the embodiment.

[0093] It should be noted that the number of the hinge mechanisms 130 configured by one door plate 140 in the embodiment can be multiple, that is, the number of the hinge seats 131 and the hinge shafts 132 is multiple, the multiple hinge shafts 132 are coaxially and spaced apart in the second direction, the door plate 140 also has multiple shaft holes 141 coaxially and spaced apart in the second direction, the multiple shaft holes 141 are one-to-one sleeved on the multiple hinge shafts 132, and the multiple hinge shafts 132 jointly support and limit the cathode door body to ensure the stability of the cathode door body during rotation. One door plate 140 can also be configured with only one hinge mechanism 130, the hinge mechanism 130 comprises multiple hinge seats 131, one hinge shaft 132 is sleeved in the multiple waist-shaped holes 133 corresponding to the multiple hinge seats 131, and the door plate 140 has one shaft hole 141 sleeved on the hinge shaft 132.

[0094] Please refer to Figure 9 , Figure 9 As shown in Figure 1 the enlarged schematic view of the C region in the middle.

[0095] In this embodiment, the structural body 120 is further provided with a first position sensor 122, and the door plate 140 is provided with a first trigger 147, which triggers the first position sensor 122 to send a first position signal when the door plate 140 is turned upward to cover the door hole 121. The base 110 is provided with a second position sensor 123, and the door plate 140 is provided with a second trigger 148, which triggers the second position sensor 123 to send a second position signal when the door plate 140 is turned downward to the maximum stroke.

[0096] It can be understood that when the door plate 140 is switched from the maintenance state to the working state, the first position sensor 122 is triggered to send the first position signal; when the door plate 140 is switched from the working state to the maintenance state, the second position sensor 123 is triggered to send the second position signal. In actual application, the coating device 100 provided in the embodiment is configured with an upper computer, and the first position signal and the second position signal are transmitted to the upper computer, and the upper computer takes the first position signal and the second position signal as part of the basis for automatically controlling the coating device 100.

[0097] In summary, the door body structure provided in the embodiment has the characteristics of convenient maintenance operation, more stable and reliable structure, and higher safety. Benefiting from the advantages of the door body structure, the coating device 100 provided in the embodiment has the characteristics of larger maintenance space, higher safety, and better sealing.

[0098] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can be variously modified and changed. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A door structure, characterized in that, The device includes a main structure, a hinge mechanism, and a door panel. The hinge mechanism is mounted on the main structure, which has a door opening. The door panel covers the door opening, and one end of the door panel is hinged to the hinge mechanism. The rotation center line of the door panel is horizontal. The hinge mechanism has a switchable first state and a second state. In the first state, the distance between the end of the door panel connected to the hinge mechanism and the main body of the structure is greater than the distance between the end of the door panel connected to the hinge mechanism and the main body of the structure in the second state.

2. The door structure according to claim 1, characterized in that, The hinge mechanism includes a hinge base and a hinge shaft. The hinge base is connected to the main structure. The hinge base is provided with an oblong hole. The hinge shaft is sleeved in the oblong hole, and the length of the major axis of the oblong hole is greater than the diameter of the hinge shaft. The door panel is connected to the hinge shaft. In the first state, the hinge axis is located at the end of the waist-shaped hole further away from the main body of the structure; in the second state, the hinge axis is located at the end of the waist-shaped hole closer to the main body of the structure.

3. The door structure according to claim 2, characterized in that, The long axis of the waist-shaped hole extends in a first direction, which faces the opening direction of the doorway.

4. The door structure according to claim 2, characterized in that, The hinge axis extends axially in a second direction, which is parallel to the horizontal direction.

5. The door structure according to claim 2, characterized in that, The difference between the length of the major axis of the waist-shaped hole and the diameter of the hinge shaft is in the range of 2mm-5mm.

6. The door structure according to claim 2, characterized in that, The door panel has a shaft hole, which is fitted onto the hinge shaft.

7. The door structure according to claim 2, characterized in that, The hinge mechanism further includes an elastic component disposed on the hinge seat and connected to the hinge shaft, for continuously applying force to the hinge shaft to drive the hinge shaft to slide from the end of the waist-shaped hole further away from the structural body to the end closer to the structural body.

8. The door structure according to claim 7, characterized in that, The hinge seat is also provided with an assembly cavity, which is located at one end of the waist-shaped hole near the main body of the structure; the elastic component includes a tension member and a first elastic module, one end of the tension member is connected to the hinge shaft, and the other end extends into the assembly cavity; The first elastic module is located in the assembled cavity and is in a compressed state. One end of the first elastic module abuts against the cavity wall of the assembled cavity near the waist-shaped hole, and the other end abuts against the end of the tension member that extends into the assembled cavity.

9. The door structure according to claim 8, characterized in that, The hinge seat is provided with a first assembly hole that connects the assembled cavity to the end of the waist-shaped hole near the main body of the structure, and the tension member is slidably disposed in the first assembly hole; and / or, A stop flange protrudes from the outer wall of the end of the tension member away from the hinge axis. The first elastic module is sleeved on the outer wall of the tension member, and the end of the first elastic module away from the waist-shaped hole abuts against the stop flange.

10. The door structure according to claim 8, characterized in that, In the first state, there is a gap between one end of the tension member extending into the assembly cavity and the side wall of the assembly cavity away from the waist-shaped hole, and the width of the gap is greater than or equal to the difference between the length of the major axis of the waist-shaped hole and the diameter of the hinge axis.

11. The door structure according to claim 7, characterized in that, The hinge seat is also provided with a pre-assembly cavity, which is located at the end of the waist-shaped hole away from the main body of the structure; the elastic component also includes a thrust member and a second elastic module, one end of the thrust member is connected to the hinge shaft, and the other end extends into the pre-assembly cavity; The second elastic module is located in the pre-assembly cavity and is in a compressed state. One end of the second elastic module abuts against the cavity wall of the pre-assembly cavity away from the waist-shaped hole, and the other end abuts against the end of the thrust member that extends into the pre-assembly cavity.

12. The door structure according to claim 11, characterized in that, The hinge seat is further provided with a second assembly hole that connects the front assembly cavity to the end of the waist-shaped hole away from the main structure, and the thrust member is slidably disposed in the second assembly hole; and / or, The end of the thrust member away from the second elastic module abuts against the hinge shaft.

13. The door structure according to claim 1, characterized in that, The door panel includes a main body section and a transmission section connected at an angle. The main body section is used to cover the door opening, and the connection position between the main body section and the transmission section is hinged to the hinge mechanism. The door structure also includes a drive mechanism, which is connected to the transmission section and is used to drive the transmission section to rotate the main body section to open or close the doorway.

14. The door structure according to claim 13, characterized in that, The drive mechanism is located on one side of the main structure, and the drive end of the drive mechanism is rotatably connected to the transmission section.

15. The door structure according to claim 1, characterized in that, A sealing ring is provided on the surface of the door panel, and the sealing ring surrounds the door opening.

16. The door structure according to claim 1, characterized in that, The main body of the structure is provided with a first positioning sensor, and the door panel is provided with a first trigger. When the door panel is rotated upward to cover the door opening, the first trigger triggers the first positioning sensor to send a first positioning signal. And / or, The main body of the structure is provided with a second positioning sensor, and the door panel is provided with a second trigger. When the door panel rotates downward to its maximum stroke, the second trigger triggers the second positioning sensor to send a second positioning signal.

17. A coating apparatus, characterized in that, Includes the door structure as described in any one of claims 1-16.

18. The coating apparatus according to claim 17, characterized in that, A magnetron sputtering cathode is provided on the door panel. With the door panel covering the door opening, the magnetron sputtering cathode extends into the interior of the main structure through the door opening.

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