Main shaft sealing structure and scribing machine

Abstract

The utility model discloses a main shaft sealing structure and a scribing machine. The main shaft sealing structure comprises a fixed assembly, a sliding assembly, an elastic sealing ring and a shape supplementing plate. The fixing assembly is provided with a sliding groove. The sliding assembly is arranged in the sliding groove in a sliding mode and provided with a mounting hole. The elastic sealing ring is arranged in the mounting hole, and the elastic sealing ring is used for being arranged on the periphery of the main shaft in a sleeving mode and is tightly attached to the arc-shaped part of the main shaft; the shape supplementing plate is arranged on the inner ring of the elastic sealing ring and provided with a first attaching face attached to the inner wall of the elastic sealing ring and a second attaching face used for being attached to the plane part of the main shaft. According to the utility model, the shape of the main shaft is compensated through the shape compensating plate, so that the waterproof sealing of the main shaft can be realized through the elastic sealing ring, and the processing cost of parts is greatly reduced; besides, under the elastic force action of the elastic sealing ring, even if the shape supplementing plate is abraded, the shape supplementing plate can be tightly attached to the main shaft, the sealing effect is guaranteed, and the abrasion service life is greatly prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing technical field more specifically, relate to a main shaft sealing structure and wafer dicing machine. BACKGROUND

[0002] For the semi-automatic single-shaft wafer cutting machine with horizontal structure layout, the electric spindle needs to be reciprocatingly extended and contracted and moved up and down when working, which makes its sealing become a technical problem in the industry. The traditional sealing method usually involves using soft materials such as rubber plates, and machining holes with the same shape as the cross section of the spindle on these materials, and scraping off moisture through the contact between the rubber around the hole and the outer periphery of the spindle when the spindle moves. However, this method has the following defects: poor sealing performance, and it is difficult to completely remove the water stains on the spindle, because it is difficult to machine holes with the same shape as the cross section of the spindle on soft materials, which affects the sealing effect; short service life, the rubber plate is easy to wear after long-time friction with the spindle, and once it is worn, the interference contact amount originally used to ensure sealing will be reduced, resulting in sealing failure.

[0003] Therefore, how to realize reliable sealing of the spindle has become a technical problem to be solved by the technical personnel in the field. SUMMARY

[0004] Therefore, the utility model discloses a kind of main shaft sealing structure, to realize the reliable sealing of main shaft.

[0005] Another purpose of the utility model is to provide a wafer dicing machine comprising the main shaft sealing structure.

[0006] To achieve the above purpose, the utility model provides the following technical scheme:

[0007] A main shaft sealing structure for waterproof sealing of a main shaft, the circumferential outer wall of the main shaft has an arc portion and a flat portion, comprising:

[0008] A fixed component is provided with a sliding groove.

[0009] A sliding component is slidably arranged in the sliding groove and provided with a mounting hole.

[0010] An elastic sealing ring is arranged in the mounting hole, and the elastic sealing ring is used to be sleeved on the outer periphery of the main shaft and tightly fit with the arc portion of the main shaft.

[0011] A complementary plate is arranged in the inner ring of the elastic sealing ring and has a first fit surface that fits with the inner wall of the elastic sealing ring and a second fit surface that tightly fits with the flat portion of the main shaft.

[0012] Optionally, in the main shaft sealing structure, the complementary plate and the cross-sectional shape of the main shaft are complementary to form a circular cross-section.

[0013] Optionally, in the main shaft sealing structure, the planar part of the main shaft comprises two planar structures arranged at an angle.

[0014] The complementary plate has two second fitting surfaces arranged at an angle, and a deformation slot is arranged on the complementary plate and between the two second fitting surfaces. The deformation slot is used for deforming the complementary plate under the action of the elastic sealing ring, so that the two second fitting surfaces respectively fit the two planar structures of the main shaft.

[0015] Optionally, in the main shaft sealing structure, the sliding assembly comprises:

[0016] A sliding plate is slidably arranged in the sliding groove, and the mounting hole is formed through the sliding plate.

[0017] A first pressing plate is connected to the first side of the sliding plate and has a first avoiding hole communicating with the mounting hole.

[0018] A second pressing plate is connected to the second side of the sliding plate and has a second avoiding hole communicating with the mounting hole, and the elastic sealing ring and the complementary plate are pressed between the first pressing plate and the second pressing plate.

[0019] Optionally, in the main shaft sealing structure, the two sides of the sliding plate are respectively provided with a first mounting groove and a second mounting groove, and the first mounting groove and the second mounting groove correspond to the positions of the mounting hole.

[0020] The first pressing plate is arranged in the first mounting groove, and the second pressing plate is arranged in the second mounting groove.

[0021] Optionally, in the main shaft sealing structure, the fixing assembly comprises:

[0022] A baffle is arranged on the baffle and has a sliding fitting groove, and the main shaft passes through the sliding fitting groove and slides in the sliding fitting groove.

[0023] A first sliding guide rail is connected with the baffle.

[0024] A second sliding guide rail is connected with the baffle and is arranged opposite to the first sliding guide rail, and the first sliding guide rail and the second sliding guide rail form the sliding groove.

[0025] Optionally, in the main shaft sealing structure, a first matching step is arranged on a side of the first sliding guide facing the baffle, a second matching step is arranged on a side of the second sliding guide facing the baffle, and the first matching step and the second matching step are arranged along the extension direction of the sliding groove.

[0026] The two sides of the sliding plate are respectively provided with a first boss and a second boss which are in sliding cooperation with the first matching step and the second matching step.

[0027] Optionally, in the main shaft sealing structure, an upper baffle is connected between the first sliding guide and the second sliding guide, the upper baffle is arranged at the same end of the first sliding guide and the second sliding guide, and is arranged above the main shaft.

[0028] Optionally, in the main shaft sealing structure, the number of the elastic sealing rings is one; or,

[0029] A plurality of embedding grooves are arranged on the inner wall of the mounting hole along the axial direction of the mounting hole, and the number of the elastic sealing rings is a plurality, and each of the elastic sealing rings is embedded in each of the embedding grooves.

[0030] A wafer scribing machine comprises the main shaft sealing structure.

[0031] The main shaft sealing structure is used for waterproof sealing of the main shaft, the circumferential outer wall of the main shaft has an arc-shaped portion and a flat portion, the main shaft sealing structure comprises a fixing assembly, a sliding assembly, an elastic sealing ring and a complementary plate. The fixing assembly is provided with a sliding groove; the sliding assembly is slidably arranged in the sliding groove and is provided with a mounting hole; the elastic sealing ring is arranged in the mounting hole, the elastic sealing ring is used for sleeving the outer periphery of the main shaft and tightly abutting the arc-shaped portion of the main shaft; and the complementary plate is arranged in the inner ring of the elastic sealing ring and has a first abutting surface abutting the inner wall of the elastic sealing ring and a second abutting surface abutting the flat portion of the main shaft. In assembly, the main shaft sealing structure disclosed in the utility model is sleeved on the main shaft, the main shaft passes through the elastic sealing ring, the arc-shaped portion of the main shaft abuts the elastic sealing ring, and the flat portion abuts the complementary plate. Under the elastic force of the elastic sealing ring, each position of the main shaft in the circumferential direction can tightly abut the elastic sealing ring and the complementary plate. With the reciprocating movement of the main shaft along the axial direction, the elastic sealing ring and the complementary plate can scrape off the water on the outer wall of the main shaft, so that the waterproof performance of the main shaft is realized. When the main shaft moves along the radial direction, the sliding assembly can slide in the sliding groove along with the main shaft.

[0032] Compared to existing technologies, the spindle sealing structure provided by this utility model uses a shaping plate to shape the spindle, enabling waterproof sealing of the spindle to be achieved through an elastic sealing ring, thereby forming a sealing structure with hole-shaft fit. This significantly reduces the processing cost of parts while ensuring the sealing effect. In addition, under the elastic force of the elastic sealing ring, even if the shaping plate wears, it can still be tightly fitted to the spindle, ensuring the sealing effect and greatly improving wear life.

[0033] The dicing machine provided by this utility model includes the above-mentioned spindle sealing structure, so it also has the above-mentioned structure and beneficial effects. Other structures refer to the prior art and will not be described in detail here. Attached Figure Description

[0034] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is an exploded view of the spindle sealing structure and the spindle disclosed in an embodiment of the present utility model;

[0036] Figure 2 This is a schematic diagram of the spindle sealing structure and the assembly structure of the spindle disclosed in this embodiment of the utility model. Figure One ;

[0037] Figure 3 for Figure 2 A magnified view of a section at point A in the middle;

[0038] Figure 4 This is a schematic diagram of the spindle sealing structure and the assembly structure of the spindle disclosed in this embodiment of the utility model. Figure Two ;

[0039] Figure 5 This is an exploded view of the spindle sealing structure disclosed in an embodiment of this utility model;

[0040] Figure 6 This is a schematic diagram of the structure of the shaping plate disclosed in the embodiment of this utility model. Figure One ;

[0041] Figure 7 This is a schematic diagram of the structure of the shaping plate disclosed in the embodiment of this utility model. Figure Two ;

[0042] Figure 8 This is a schematic diagram of the assembly structure of the sliding plate and the first pressure plate disclosed in an embodiment of the present utility model;

[0043] Figure 9 for Figure 8 the cross-sectional view at R-R;

[0044] Figure 10 for Figure 9 the enlarged view at B;

[0045] Figure 11 the structural schematic view of the sliding plate according to the embodiment of the utility model discloses;

[0046] Figure 12 the structural schematic view of the first pressing plate according to the embodiment of the utility model discloses Figure One ;

[0047] Figure 13 the structural schematic view of the first pressing plate according to the embodiment of the utility model discloses Figure Two ;

[0048] Figure 14 the structural schematic view of the main shaft according to the embodiment of the utility model discloses.

[0049] Wherein, 100 is the sliding slot, 101 is the first sliding guide rail, 102 is the second sliding guide rail, 103 is the upper baffle, 110 is the baffle, 111 is the sliding cooperation groove;

[0050] 200 is the sliding plate, 201 is the mounting hole, 202 is the second installation groove, 203 is the first boss, 204 is the second boss, 210 is the first pressing plate, 211 is the first avoiding hole, 220 is the second pressing plate;

[0051] 300 is the elastic sealing ring;

[0052] 400 is the supplementary plate, 401 is the first lamination surface, 402 is the second lamination surface, 403 is the deformation clamping groove;

[0053] 500 is the main shaft, 501 is the arc-shaped part, 502 is the planar part. DETAILED DESCRIPTION

[0054] The core of the utility model lies in disclosing a kind of main shaft sealing structure, to realize the reliable sealing of main shaft 500.

[0055] Another core of the utility model lies in disclosing a kind of wafer stepper including the main shaft sealing structure described above.

[0056] Hereinafter, the embodiments will be described with reference to the accompanying drawings. In addition, the embodiments shown below do not have any limiting effect on the utility model content recited in the claims. In addition, the entire contents of the configuration represented in the following embodiments are not limited to what is necessary as a solution to the utility model recited in the claims. Note that, for the convenience of description, only the parts related to the utility model are shown in the drawings. In the case of no conflict, the embodiments in the utility model and the features in the embodiments can be combined with each other.

[0057] In combination Figures 1-14 The utility model discloses a main shaft sealing structure for waterproof sealing of main shaft 500, the circumferential outer wall of main shaft 500 has arc part 501 and plane part 502, and the main shaft sealing structure includes fixed assembly, sliding assembly, elastic sealing ring 300 and complementary plate 400. Fixed assembly is provided with sliding slot 100;Sliding assembly is slidably arranged in sliding slot 100 and is provided with mounting hole 201;Elastic sealing ring 300 is arranged in mounting hole 201, and elastic sealing ring 300 is used to be set on the outer periphery of main shaft 500 and is tightly combined with arc part 501 of main shaft 500;Complementary plate 400 is arranged in the inner ring of elastic sealing ring 300 and has first fit 401 that is combined with the inner wall of elastic sealing ring 300 and second fit 402 that is used for being combined with plane part 502 of main shaft 500.

[0058] In assembly, the main shaft sealing structure disclosed by the utility model is sleeved on main shaft 500, and main shaft 500 passes through elastic sealing ring 300, and at the same time, arc part 501 of main shaft 500 is combined with elastic sealing ring 300, and plane part 502 is combined with complementary plate 400. Under the action of the elasticity of elastic sealing ring 300, each position of main shaft 500 in the circumference can be tightly combined with elastic sealing ring 300 and complementary plate 400. Along with the reciprocating movement of main shaft 500 in the axial direction, elastic sealing ring 300 and complementary plate 400 can scrape the water on the outer wall of main shaft 500, and the waterproof performance of main shaft 500 is realized. When main shaft 500 moves along the radial direction, sliding assembly can slide in sliding slot 100 along with main shaft 500.

[0059] Those skilled in the art can understand that the inner diameter of elastic sealing ring 300 is slightly smaller than the outer diameter of arc part 501 of main shaft 500, so that elastic sealing ring 300 can be tightly clamped on main shaft 500, and at the same time, the second fit 402 of complementary plate 400 is tightly matched with plane part 502 of main shaft 500, so that reliable sealing of main shaft 500 is realized.

[0060] Compared with the prior art, the utility model discloses a complementing plate 400 to the main shaft 500 is complemented, so that the waterproof seal of main shaft 500 can be realized through elastic packing ring 300, thereby forming the sealing structure of hole shaft cooperation, under the condition that guaranteeing sealing effect, greatly reduce the processing cost of spare part, in addition, under the elastic force of elastic packing ring 300, even if complementing plate 400 appears abrasion, complementing plate 400 can be tightly attached on main shaft 500 under the elastic force of elastic packing ring 300, guarantee the sealing effect, greatly improve the abrasion life.

[0061] Specifically, elastic packing ring 300 adopts elastic rubber material quality, complementing plate 400 can adopt engineering plastics material, to hold tightly main shaft 500, but it has certain hardness, engineering plastics compare traditional rubber material, friction coefficient is smaller, reciprocating resistance is also smaller, guarantee the moving efficiency of main shaft 500.

[0062] Preferably, in order to guarantee the sealing effect of elastic packing ring 300, the cross section shape of complementing plate 400 and main shaft 500 is complementary, and forms a circular cross section, to adapt to the inner ring shape of elastic packing ring 300.

[0063] Combination Figure 14 In the specific embodiment disclosed in the utility model, the plane part 502 of main shaft 500 includes two plane structures arranged at an angle, and correspondingly, combination Figure 6 And Figure 7 Complementing plate 400 has two second abutting surfaces 402 arranged at an angle, and in addition, a deformation slot 403 is arranged on complementing plate 400, which is arranged between the two second abutting surfaces 402, for deforming complementing plate 400 under the action of elastic packing ring 300, so that the two second abutting surfaces 402 are tightly attached to the two plane structures of main shaft 500 respectively.

[0064] Those skilled in the art can understand that when the plane part 502 of main shaft 500 includes only one plane structure, the number of second abutting surfaces 402 is also one.

[0065] In a specific embodiment, combination Figure 5The sliding assembly comprises a sliding plate 200, a first pressing plate 210 and a second pressing plate 220, the sliding plate 200 is slidably arranged in the sliding groove 100, and a mounting hole 201 is formed through the sliding plate 200; the first pressing plate 210 is connected to a first side of the sliding plate 200 and is provided with a first avoiding hole 211 in communication with the mounting hole 201; the second pressing plate 220 is connected to a second side of the sliding plate 200 and is provided with a second avoiding hole in communication with the mounting hole 201, and the elastic sealing ring 300 and the complementary plate 400 are pressed between the first pressing plate 210 and the second pressing plate 220 to avoid being taken out of the mounting hole 201. The main shaft 500 passes through the first avoiding hole 211 and the second avoiding hole.

[0066] Specifically, in combination with Figure 12 and Figure 13 , the shapes of the first avoiding hole 211 and the second avoiding hole are matched with the cross-sectional shape of the main shaft 500, and also comprise a flat portion and an arc-shaped portion, in order to prevent the elastic sealing ring 300 from being taken out of the mounting hole 201, the inner diameters of the arc-shaped portions of the first avoiding hole 211 and the second avoiding hole are smaller than the outer diameter of the elastic sealing ring 300 and larger than the inner diameter of the elastic sealing ring 300. The hole diameter of the mounting hole 201 is slightly larger than or equal to the outer diameter of the elastic sealing ring 300, so that the elastic sealing ring 300 can be installed in the mounting hole 201, and tightly fit with the inner wall of the mounting hole 201 when the elastic sealing ring 300 is deformed by expansion.

[0067] Further, in order to facilitate the installation of the first pressing plate 210 and the second pressing plate 220, the first installation groove and the second installation groove 202 are arranged on the two sides of the sliding plate 200, respectively, and the positions of the first installation groove and the second installation groove 202 correspond to the positions of the mounting hole 201; the first pressing plate 210 is arranged in the first installation groove, and the second pressing plate 220 is arranged in the second installation groove 202. Among them, the first pressing plate 210 and the second pressing plate 220 can be connected with the sliding plate 200 through bolts. The first pressing plate 210 and the second pressing plate 220 are usually arranged in a rectangular structure, and the shapes of the first installation groove and the second installation groove 202 are matched with the rectangular structure. The structures of the first pressing plate 210 and the second pressing plate 220 can be referred to each other.

[0068] In a specific embodiment disclosed in the utility model, the fixing assembly comprises a baffle 110, a first sliding guide rail 101 and a second sliding guide rail 102, the baffle 110 is provided with a sliding cooperation groove 111, the main shaft 500 passes through the sliding cooperation groove 111 and slides in the sliding cooperation groove 111; the first sliding guide rail 101 is bolted with the baffle 110; the second sliding guide rail 102 is bolted with the baffle 110 and is arranged opposite to the first sliding guide rail 101, and the first sliding guide rail 101 and the second sliding guide rail 102 form the above-mentioned sliding groove 100.

[0069] Further optimization scheme, the first side of the first sliding guide rail 101 facing the baffle 110 is provided with a first matching step, the first side of the second sliding guide rail 102 facing the baffle 110 is provided with a second matching step, the first matching step and the second matching step are arranged along the extension direction of the sliding groove 100; combined Figure 11 , the two sides of the sliding plate 200 are respectively provided with a first convex platform 203 and a second convex platform 204 which are slidingly matched with the first matching step and the second matching step.

[0070] In order to improve the waterproof effect, combined Figure 5 , the first sliding guide rail 101 and the second sliding guide rail 102 are connected with an upper baffle 103, the upper baffle 103 is arranged at the same end of the first sliding guide rail 101 and the second sliding guide rail 102, and is arranged above the main shaft 500, so as to form an open sliding guide structure with the first sliding guide rail 101 and the second sliding guide rail 102. The upper baffle 103 is used to prevent the water droplets splashed in the cutting process from entering the guide area from the upper part and the upper surface of the sliding plate 200, so as to avoid the sealing failure. In addition, the upper baffle 103 can also limit the sliding stroke of the sliding plate 200. The bottom end of the first sliding guide rail 101 and the second sliding guide rail 102 is not provided with a baffle, so as to avoid the condensation and overflow of water in the sliding groove 100, causing sealing failure.

[0071] The cross-sectional shape of the first convex platform 203 and the second convex platform 204 is not limited to rectangular or trapezoidal, and the cross-sectional shape of the first matching step and the second matching step is adapted to it.

[0072] Combined Figure 5 , along the extension direction of the sliding groove 100, the first end of the sliding fitting groove 111 is an arc-shaped structure adapted to the arc-shaped part 501 of the main shaft 500, and the second end of the sliding fitting groove 111 can be a planar structure adapted to the planar part 502 of the main shaft 500, so that the cross-sectional shape of the sliding fitting groove 111 is the same as the cross-sectional shape of the moving track of the main shaft 500 in the vertical direction. When the main shaft 500 moves in the vertical direction, the baffle 110 is fixed, and the main shaft 500 moves in the sliding fitting groove 111. Since the cross-sectional shape of the sliding fitting groove 111 is the same as the cross-sectional shape of the moving track of the main shaft 500 in the vertical direction, it can limit the main shaft 500, so that the sliding plate 200 has high displacement accuracy while cooperating with the main shaft 500 to move, and improves the stability and practicability of the main shaft sealing structure.

[0073] Those skilled in the art can understand that the number of elastic sealing rings 300 along the axial direction of the mounting hole 201 can be one or more. When there are multiple elastic sealing rings 300, multiple embedding grooves for embedding the respective elastic sealing rings 300 one by one are arranged on the side wall of the mounting hole 201 along the axial direction of the mounting hole 201, and the elastic sealing rings 300 are arranged at intervals to form a multi-stage wiper structure and a labyrinth seal waterproof structure. The number of elastic sealing rings 300 can be adjusted by the operator according to the use requirement to form different degrees of sealing for the main shaft 500. Alternatively, the multiple elastic sealing rings 300 are directly pressed in the mounting hole 201 by the first pressing plate 210 and the second pressing plate 220 along the axial direction of the mounting hole 201, so as to increase the holding force of the multiple elastic sealing rings 300 and further improve the sealing effect on the main shaft 500.

[0074] The wafer scriber disclosed in the utility model comprises the main shaft sealing structure described above, and therefore has the same structure and beneficial effects as described above.

[0075] In combination Figure 1 When the main shaft 500 moves along the vertical direction, the sliding plate 200 can be driven to move along the vertical direction in the sliding groove 100, and when the main shaft 500 reciprocally extends and retracts along the axial direction, the elastic sealing ring 300 and the complementary plate 400 can completely wipe off the water droplets on the main shaft 500.

[0076] The terms "first" and "second" and the like in the specification and claims of the utility model are used to distinguish different objects, and are not used to describe a specific order, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as "first" and "second" can explicitly or implicitly include one or more features. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. In addition, in the description of the embodiments of the utility model, "multiple" means two or more than two.

[0077] The above description of the disclosed embodiments enables those skilled in the art to implement or use the utility model. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the utility model. The specific technical means in some embodiments can be partially or wholly combined into another embodiment without being explicitly excluded by another embodiment. Therefore, the utility model will not be limited to these embodiments shown in the text, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A spindle sealing structure for waterproof sealing of a spindle (500), wherein the circumferential outer wall of the spindle (500) has an arcuate portion (501) and a planar portion (502), characterized in that, include: A fixed component is provided with a sliding groove (100); A sliding component is slidably disposed in the slide groove (100) and is provided with mounting holes (201). An elastic sealing ring (300) is disposed in the mounting hole (201). The elastic sealing ring (300) is used to be sleeved on the outer periphery of the spindle (500) and to fit tightly against the arc-shaped part (501) of the spindle (500). The shaping plate (400) is disposed in the inner ring of the elastic sealing ring (300) and has a first contact surface (401) that fits against the inner wall of the elastic sealing ring (300) and a second contact surface (402) for tightly fitting against the flat portion (502) of the spindle (500).

2. The spindle sealing structure as described in claim 1, characterized in that, The cross-sectional shape of the complementary plate (400) is complementary to that of the main shaft (500), forming a circular cross-section.

3. The spindle sealing structure as described in claim 2, characterized in that, The planar portion (502) of the main shaft (500) includes two planar structures arranged at an angle; The shaping plate (400) has two second mating surfaces (402) arranged at an angle. The shaping plate (400) is provided with a deformation groove (403) between the two second mating surfaces (402). The deformation groove (403) is used to allow the shaping plate (400) to deform under the action of the elastic sealing ring (300) so that the two second mating surfaces (402) respectively fit with the two planar structures of the main shaft (500).

4. The spindle sealing structure as described in claim 1, characterized in that, The sliding component includes: A sliding plate (200) is slidably disposed in the sliding groove (100), and the mounting hole (201) is provided through the sliding plate (200). The first pressure plate (210) is connected to the first side of the sliding plate (200) and has a first clearance hole (211) communicating with the mounting hole (201). The second pressure plate (220) is connected to the second side of the sliding plate (200) and has a second clearance hole communicating with the mounting hole (201). The elastic sealing ring (300) and the shaping plate (400) are pressed between the first pressure plate (210) and the second pressure plate (220).

5. The spindle sealing structure as described in claim 4, characterized in that, The sliding plate (200) is provided with a first mounting groove and a second mounting groove (202) on both sides, and the positions of the first mounting groove and the second mounting groove (202) correspond to the mounting hole (201); The first pressure plate (210) is disposed in the first mounting groove, and the second pressure plate (220) is disposed in the second mounting groove (202).

6. The spindle sealing structure as described in claim 4, characterized in that, The fixing component includes: A baffle (110) is provided with a sliding groove (111), and the main shaft (500) passes through the sliding groove (111) and slides within the sliding groove (111); The first sliding guide rail (101) is connected to the baffle (110); The second sliding guide rail (102) is connected to the baffle (110) and is arranged opposite to the first sliding guide rail (101), and the groove (100) is formed between the first sliding guide rail (101) and the second sliding guide rail (102).

7. The spindle sealing structure as described in claim 6, characterized in that, The first sliding guide rail (101) has a first mating step on the side facing the baffle (110), and the second sliding guide rail (102) has a second mating step on the side facing the baffle (110), and both the first mating step and the second mating step are arranged along the extension direction of the slide groove (100). The sliding plate (200) is provided with a first boss (203) and a second boss (204) on both sides, which slide in cooperation with the first mating step and the second mating step.

8. The spindle sealing structure as described in claim 6, characterized in that, An upper stop bar (103) is connected between the first sliding guide rail (101) and the second sliding guide rail (102). The upper stop bar (103) is disposed at the same end of the first sliding guide rail (101) and the second sliding guide rail (102) and is used to be disposed above the main shaft (500).

9. The spindle sealing structure as described in claim 1, characterized in that, The number of the elastic sealing rings (300) is one; or, Along the axial direction of the mounting hole (201), a plurality of insert grooves are arranged at intervals on the inner wall of the mounting hole (201), and the number of elastic sealing rings (300) is multiple, and they are embedded in each of the insert grooves in a corresponding manner.

10. A dicing machine, characterized in that, Includes the spindle sealing structure as described in any one of claims 1-9.

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