Magnetron sputtering coating machine mounting base convenient to adjust

Abstract

The utility model discloses a magnetron sputtering coating machine mounting base convenient to adjust. The magnetron sputtering coating machine mounting base comprises a main body structure, the main body structure comprises a bottom plate for placing the magnetron sputtering coating machine and a surrounding edge, and the surrounding edge is positioned at the top of the bottom plate; the fixing mechanism is used for fixing the magnetron sputtering coating machine; the fixing mechanism comprises convex plates arranged at the tops of four frames of the surrounding edge and a positioning plate arranged on one side of the convex plates, an adjusting screw rod is installed in the center of each convex plate in a threaded mode, a hand wheel is welded to one end of each adjusting screw rod, and the other end of each adjusting screw rod is connected to the center of one side of the positioning plate through a bearing seat; and the limiting mechanism is used for limiting the positioning plate. Through cooperation of the main body structure and the fixing mechanism, the device can be firmly fixed after magnetron sputtering coating placement is completed, the device is prevented from falling down due to external collision and shaking, and meanwhile, magnetron sputtering coating devices of different sizes can be used in a matched mode according to actual needs.

Description

Technical Field

[0001] This utility model relates to the technical field of magnetron sputtering coating equipment, specifically to a conveniently adjustable mounting base for a magnetron sputtering coating machine. Background Technology

[0002] A magnetron sputtering coating machine is a process testing instrument used in the field of materials science. It is mainly used to deposit thin films on substrate surfaces under vacuum conditions using the sputtering principle to prepare metals, alloys, compounds, semiconductors, ceramics, dielectric composite films, and other chemically reactive films. Its working principle is based on the sputtering phenomenon. Typically, the material to be deposited is made into a plate target and fixed on the cathode. The substrate is placed on the anode facing the target, at a certain distance. After the system is evacuated to a high vacuum, it is filled with a gas at a certain pressure (usually argon). A voltage of several thousand volts is applied between the cathode and anode, generating a glow discharge between the two electrodes. The positive ions generated by the discharge fly towards the cathode under the influence of the electric field and collide with atoms on the target surface. The target atoms that escape from the target surface after the collision are called sputtered atoms, and these sputtered atoms are deposited on the substrate surface to form a film.

[0003] A base is required during the installation of magnetron sputtering coating. A search revealed Chinese patent application CN202220095772.8, which discloses an easily adjustable mounting base for a magnetron sputtering coating machine. This base includes four corner supports and four connecting rods. The four corner supports are connected adjacently by the four connecting rods to form the main body of the base. The coating machine is placed on the main body of the base, with the four corner supports supporting the four corners of the coating machine. Support legs are provided on the lower side walls of the corner supports for shock absorption and adjusting the balance of the main body of the base. This invention uses shock-absorbing springs to buffer the shaking generated during the operation of the magnetron sputtering coating machine, effectively preventing the machine from moving due to vibration, thus ensuring the stability of the equipment operation.

[0004] The above technical solution still has defects. Although it can place the magnetron sputtering coating equipment, the stability after placement is poor. Once it encounters an accidental collision or shaking, the equipment is unstable and prone to tipping over, which can easily damage the equipment and cause injury. Therefore, we need to propose a conveniently adjustable mounting base for the magnetron sputtering coating machine. Utility Model Content

[0005] The purpose of this utility model is to provide a conveniently adjustable mounting base for a magnetron sputtering coating machine. Through the cooperation of the main structure and the fixing mechanism, it can be firmly fixed after the magnetron sputtering coating is placed, preventing the equipment from tipping over due to external collisions and shaking. At the same time, since the position of the positioning plate can be adjusted by the positioning screw, it can also be adapted to use for magnetron sputtering coating equipment of different sizes according to actual needs. It has high practicality and applicability, thus solving the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] An easily adjustable mounting base for a magnetron sputtering coating machine, comprising:

[0008] Main structure;

[0009] The main structure includes a base plate and a surrounding edge for placing the magnetron sputtering coating machine, with the surrounding edge located on top of the base plate;

[0010] It also includes a fixing mechanism for securing the magnetron sputtering coating machine;

[0011] The fixing mechanism includes a convex plate on the top of the four side frames of the perimeter and a positioning plate on one side of the convex plate. An adjusting screw is threaded onto the center of the convex plate. A handwheel is welded to one end of the adjusting screw, and the other end of the adjusting screw is connected to the center of one side of the positioning plate through a bearing seat.

[0012] It also includes a limiting mechanism for limiting the positioning plate.

[0013] Preferably, the positioning plate has two sets of guide plates symmetrically arranged on its side. The convex plate has guide openings on both sides of the adjusting screw, and the guide plates are slidably inserted into the guide openings.

[0014] Preferably, the limiting mechanism includes teeth and limiting teeth disposed on the surface of the guide plate. The teeth are distributed in an equidistant array on the surface of the guide plate, and the tooth grooves formed by the teeth and adjacent limiting teeth are adapted to each other.

[0015] Preferably, both the teeth and the limiting teeth have an inclined surface on one side, with the inclined surface on the teeth facing the positioning plate side, and the inclined surface on the limiting teeth facing the opposite direction to the inclined surface on the teeth.

[0016] Preferably, a protrusion is provided on one side of the convex plate, a connecting plate is provided at the upper end of the limiting tooth, and two sets of sliding rods are symmetrically provided on the top of the connecting plate, with the sliding rods slidably inserted into the protrusion.

[0017] Preferably, a compression spring is sleeved on the slide rod between the protrusion and the connecting plate, and a top plate is provided at the upper end of both sets of slide rods, with a pull ring provided on the top plate.

[0018] Preferably, a heat dissipation notch is provided at the center of the base plate, a channel-shaped heat dissipation vent is provided at the bottom of the heat dissipation notch, a fan is installed inside the heat dissipation vent, and a filter plate is installed inside the heat dissipation notch.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] This utility model features a main structure including a base plate and a surrounding edge, as well as a fixing structure including a convex plate and a positioning plate. The positioning plate is driven by an adjusting screw threaded onto the convex plate. This device has a simple structure and is easy to use. Through the cooperation of the main structure and the fixing mechanism, it can be firmly fixed after the magnetron sputtering coating is placed, preventing the equipment from tipping over due to external collisions and shaking. At the same time, since the position of the positioning plate can be adjusted by the positioning screw, it can also be adapted to magnetron sputtering coating equipment of different sizes according to actual needs, and has high practicality and applicability. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of this utility model;

[0022] Figure 2 This is a schematic diagram of the convex plate of this utility model;

[0023] Figure 3 This is a schematic diagram of the structure of the guide plate of this utility model;

[0024] Figure 4 This is a schematic diagram of the structure of the limiting tooth of this utility model;

[0025] Figure 5 This is a schematic diagram of the structure of the base plate of this utility model.

[0026] In the diagram: 1. Base plate; 2. Edge; 3. Wheels; 4. Protruding plate; 5. Positioning plate; 6. Adjusting screw; 7. Handwheel; 8. Bearing seat; 9. Guide plate; 10. Tooth; 11. Limiting tooth; 12. Protrusion; 13. Connecting plate; 14. Slide rod; 15. Compression spring; 16. Top plate; 17. Pull ring; 18. Heat dissipation vent; 19. Fan; 20. Filter plate. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Please see Figure 1-2 This utility model provides a technical solution:

[0029] An easily adjustable mounting base for a magnetron sputtering coating machine, comprising:

[0030] Main structure; The main structure includes a base plate 1 and a surrounding edge 2 for placing the magnetron sputtering coating machine, with the surrounding edge 2 located on top of the base plate 1;

[0031] It also includes a fixing mechanism for fixing the magnetron sputtering coating machine; the fixing mechanism includes a convex plate 4 set on the top of the four frames of the perimeter 2 and a positioning plate 5 on one side of the convex plate 4. An adjusting screw 6 is threaded on the center of the convex plate 4. A handwheel 7 is welded to one end of the adjusting screw 6, and the other end of the adjusting screw 6 is connected to the center of one side of the positioning plate 5 through a bearing seat 8.

[0032] This utility model features a main structure including a base plate 1 and a surrounding edge 2, and a fixing structure including a protruding plate 4 and a positioning plate 5. The positioning plate 5 is driven by an adjusting screw 6 threaded onto the protruding plate 4. In use, the magnetron sputtering coating is placed at the center of the base plate 1 by hoisting, and the positioning plate 5 is driven by rotating the handwheel 7 to clamp and fix the four sides of the magnetron sputtering coating equipment, thus achieving an effective fixing function. At the same time, the position of the positioning plate 5 can be adjusted according to the size of the magnetron sputtering coating equipment, thereby adapting to various models of magnetron sputtering coating equipment.

[0033] In summary, this device has a simple structure and is easy to use. Through the cooperation of the main structure and the fixing mechanism, it can be firmly fixed after the magnetron sputtering coating is placed, preventing the equipment from tipping over due to external collisions and shaking. At the same time, since the position of the positioning plate 5 can be adjusted by the positioning screw, it can also be adapted to magnetron sputtering coating equipment of different sizes according to actual needs, and has high practicality and applicability.

[0034] The bottom of the base plate 1 is also equipped with wheels 3, which facilitates the adjustment of the position and direction of the equipment.

[0035] For further details, please refer to Figure 1-4 :

[0036] It also includes a limiting mechanism for limiting the positioning plate 5. Two sets of guide plates 9 are symmetrically arranged on the side of the positioning plate 5. Guide openings are provided on both sides of the adjusting screw 6 on the protruding plate 4, and the guide plates 9 are slidably inserted into the guide openings. The limiting mechanism includes teeth 10 and limiting teeth 11 arranged on the surface of the guide plate 9. The teeth 10 are evenly distributed in an array on the surface of the guide plate 9, and the tooth grooves formed by the teeth 10 and adjacent limiting teeth 11 are adapted to each other. An inclined surface is provided on one side of both the teeth 10 and the limiting teeth 11. The inclined surface on the teeth 10 faces the positioning plate 5, and the inclined surface on the limiting teeth 11 faces the opposite direction to the inclined surface on the teeth 10. A protrusion 12 is provided on one side of the protruding plate 4. A connecting plate 13 is provided at the upper end of the limiting teeth 11. Two sets of sliding rods 14 are symmetrically arranged on the top of the connecting plate 13, and the sliding rods 14 are slidably inserted into the protrusion 12. A compression spring 15 is sleeved on the slide rod 14 between the protrusion 12 and the connecting plate 13, and a top plate 16 is provided at the upper end of the two sets of slide rods 14, and a pull ring 17 is provided on the top plate 16.

[0037] On the one hand, by setting a guide plate 9 on the positioning plate 5, the running trajectory of the positioning plate 5 can be guided; on the other hand, the guide plate 9 is provided with teeth 10 with inclined surfaces, and the limiting teeth 11 and the teeth 10 are adapted to each other. When clamping the magnetron sputtering coating equipment, the adjusting screw 6 can drive the positioning plate 5 to move to one side of the equipment, and the inclined surfaces of the limiting teeth 11 and the teeth 10 slide relative to each other without causing obstruction.

[0038] When the positioning plate 5 is attached to the outer wall of the equipment, the limiting tooth 11 falls into the corresponding tooth groove. Since the vertical surface of the limiting tooth 11 is attached to the vertical surface of the tooth 10, the guide plate 9 cannot retract, thereby locking the position of the positioning plate 5 and preventing the positioning plate 5 from loosening or detaching from the outer wall of the equipment during collision, shaking or long-term use, thus improving the stability and firmness of the equipment fixation.

[0039] When the equipment needs to be removed, pull the pull ring 17 on the top plate 16 to disengage the limiting tooth 11 from the groove formed by the adjacent tooth 10, and then rotate the handwheel 7 to drive the positioning plate 5 to retract and disengage from the outer wall of the equipment.

[0040] The teeth 10 on the guide plate 9 can be modified to be recessed, that is, grooves that match the limiting teeth 11 are opened on the surface of the guide plate 9. In this way, the teeth 10 will not contact the guide opening when the guide plate 9 retracts, thus avoiding wear.

[0041] In addition, please see Figure 1 and Figure 5 :

[0042] A heat dissipation notch is provided at the center of the base plate 1. A channel-type heat dissipation vent 18 is provided at the bottom of the heat dissipation notch. A fan 19 is installed inside the heat dissipation vent 18, and a filter plate 20 is installed inside the heat dissipation notch.

[0043] This design allows for auxiliary heat dissipation during use after the device is placed, enhancing the base's versatility and further improving the device's practicality.

[0044] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A conveniently adjustable mounting base for a magnetron sputtering coating machine, characterized in that, include: Main structure; The main structure includes a base plate (1) and a surrounding edge (2) for placing a magnetron sputtering coating machine, with the surrounding edge (2) located on top of the base plate (1); It also includes a fixing mechanism for securing the magnetron sputtering coating machine; The fixing mechanism includes a convex plate (4) set on the top of the four side frames of the perimeter (2) and a positioning plate (5) on one side of the convex plate (4). An adjusting screw (6) is threaded on the center of the convex plate (4). A handwheel (7) is welded to one end of the adjusting screw (6), and the other end of the adjusting screw (6) is connected to the center of one side of the positioning plate (5) through a bearing seat (8). It also includes a limiting mechanism for limiting the positioning plate (5).

2. The easily adjustable magnetron sputtering coating machine mounting base according to claim 1, characterized in that: The positioning plate (5) has two sets of guide plates (9) symmetrically arranged on its side. The protruding plate (4) has guide openings on both sides of the adjusting screw (6), and the guide plates (9) are slidably inserted into the inside of the guide openings.

3. The easily adjustable magnetron sputtering coating machine mounting base according to claim 1, characterized in that: The limiting mechanism includes teeth (10) and limiting teeth (11) disposed on the surface of the guide plate (9). The teeth (10) are distributed in an equidistant array on the surface of the guide plate (9), and the tooth grooves formed by the teeth (10) and the adjacent limiting teeth (11) are compatible.

4. The easily adjustable magnetron sputtering coating machine mounting base according to claim 3, characterized in that: Both the tooth (10) and the limiting tooth (11) have an inclined surface on one side. The inclined surface on the tooth (10) faces the positioning plate (5), while the inclined surface on the limiting tooth (11) faces the opposite direction to the inclined surface on the tooth (10).

5. The easily adjustable magnetron sputtering coating machine mounting base according to claim 4, characterized in that: A protrusion (12) is provided on one side of the protrusion plate (4), and a connecting plate (13) is provided on the upper end of the limiting tooth (11). Two sets of sliding rods (14) are symmetrically arranged on the top of the connecting plate (13), and the sliding rods (14) are slidably inserted into the protrusion (12).

6. The easily adjustable magnetron sputtering coating machine mounting base according to claim 5, characterized in that: A compression spring (15) is sleeved on the slide rod (14) between the protrusion (12) and the connecting plate (13), and a top plate (16) is provided on the upper end of the two sets of slide rods (14), and a pull ring (17) is provided on the top plate (16).

7. The easily adjustable magnetron sputtering coating machine mounting base according to claim 1, characterized in that: A heat dissipation notch is provided at the center of the base plate (1), and a channel-type heat dissipation port (18) is provided at the bottom of the heat dissipation notch. A fan (19) is installed inside the heat dissipation port (18), and a filter plate (20) is installed inside the heat dissipation notch.

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