Special vacuum drying box for chip

Abstract

The utility model discloses a special vacuum drying box for chips, belongs to the technical field of chip drying, solves the problem that the chips are inconvenient to take out from a heating cavity, and comprises a box body, a drying mechanism is fixedly connected to the inner wall of the box body, and a discharging mechanism is fixedly connected to the outer surface of the drying mechanism. And the outer surface of the box body is fixedly connected with a control panel. An electric telescopic rod is started, the output end of the electric telescopic rod drives a sealing plate to slide on the inner wall of the box body, so that a through hole is separated from a connecting plate, then a gear motor is started, an output shaft of the gear motor drives chain wheels to rotate, the two chain wheels synchronously rotate through a chain, and a movable frame slides out of a resistance heating wire; and a sliding plate can slide out of the outer surface of the movable frame conveniently, so that the chip can be cooled quickly, the chip can be discharged conveniently, and the situation that the inner wall of a resistance heating wire is scalded by workers is prevented.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip drying technical field, especially a special vacuum drying oven for chip. BACKGROUND

[0002] The manufacturing process of a chip is an extremely complex and precise flow, involves photoetching, etching, deposition, doping and other key procedures. In these procedures, the chip inevitably contacts various chemical reagents, solvents and cleaning liquid and other substances, resulting in moisture, organic residues and other volatile impurities on the surface and inside of the chip.

[0003] The existing chip drying oven, after drying is completed, the chip is often in the heating cavity, due to the high temperature environment and the closed nature of the cavity, so that the chip is difficult to cool down quickly, the operator when taking out the chip, it is easy to be scalded due to high temperature, this not only damages the health of the operator, but also may cause production interruption due to accidents, influence production efficiency and enterprise benefit, therefore, there is the problem that the chip is not convenient to take out from the heating cavity. UTILITY MODEL CONTENT

[0004] (I) technical problem solved

[0005] In view of the above problems existing in the prior art, the utility model provides a special vacuum drying oven for chip.

[0006] (II) technical scheme

[0007] In order to realize the above object, the utility model is realized through the following technical scheme: a special vacuum drying oven for chip, including the box, the inner wall of the box is fixedly connected with drying mechanism, the outer surface of the drying mechanism is fixedly connected with the discharge mechanism, and the outer surface of the box is fixedly connected with the control panel, the drying mechanism includes the heating cavity fixedly connected in the inner wall of the box, the inner wall of the heating cavity is slidably connected with the moving frame, the outer surface of the moving frame is provided with a plurality of grooves, the outer surface of the groove is slidably connected with the sliding plate, and the inside of the heating cavity is fixedly connected with a plurality of resistance heating wires, the discharge mechanism includes the connecting plate fixedly connected on the outer surface of the moving frame, and the outer surface of the through hole is slidably connected with the outer surface of the connecting plate, and the lower surface of the heating cavity is slidably connected with the sealing plate, and the outer surface of the box is rotatably connected with the sealing door plate.

[0008] A preferred scheme of the utility model is provided with a movable frame, a sealing plate, a connecting plate and a box body, the movable frame is fixedly connected to the box body, the sealing plate is fixedly connected to the movable frame, the connecting plate is fixedly connected to the sealing plate, and the box body is fixedly connected to the connecting plate.

[0009] By adopting the above technical scheme, the outer surface of the heating cavity is sealed by the sealing plate, and the sealing property in the heating cavity is improved.

[0010] A preferred scheme of the utility model is provided with a movable frame, a sealing plate, a connecting plate and a box body, the movable frame is fixedly connected to the box body, the sealing plate is fixedly connected to the movable frame, the connecting plate is fixedly connected to the sealing plate, and the box body is fixedly connected to the connecting plate.

[0011] By adopting the above technical scheme, the outer surface of the heating cavity is sealed by the sealing plate, and the sealing property in the heating cavity is improved.

[0012] A preferred scheme of the utility model is provided with a movable frame, a sealing plate, a connecting plate and a box body, the movable frame is fixedly connected to the box body, the sealing plate is fixedly connected to the movable frame, the connecting plate is fixedly connected to the sealing plate, and the box body is fixedly connected to the connecting plate.

[0013] By adopting the above technical scheme, the outer surface of the heating cavity is sealed by the sealing plate, and the sealing property in the heating cavity is improved.

[0014] A preferred scheme of the utility model is provided with a movable frame, a sealing plate, a connecting plate and a box body, the movable frame is fixedly connected to the box body, the sealing plate is fixedly connected to the movable frame, the connecting plate is fixedly connected to the sealing plate, and the box body is fixedly connected to the connecting plate.

[0015] By adopting the above technical scheme, the outer surface of the heating cavity is sealed by the sealing plate, and the sealing property in the heating cavity is improved.

[0016] A preferred scheme of the utility model is provided with a movable frame, a sealing plate, a connecting plate and a box body, the movable frame is fixedly connected to the box body, the sealing plate is fixedly connected to the movable frame, the connecting plate is fixedly connected to the sealing plate, and the box body is fixedly connected to the connecting plate.

[0017] By adopting the technical scheme, the vacuum pump is started to facilitate the vacuum pump to extract the gas in the resistance heating wire, so that the resistance heating wire can maintain a vacuum state.

[0018] (III) Beneficial Effects

[0019] The utility model provides a special vacuum drying box for chip. Have the following beneficial effects:

[0020] 1. By starting electric telescopic rod, the output end of electric telescopic rod drives sealing plate to slide on the inner wall of box, make through -hole and connecting plate separate, then start deceleration motor, the output shaft of deceleration motor drives sprocket to rotate, make two groups of sprocket synchronous rotation through chain, make mobile frame slide out from resistance heating wire, and then facilitate the slide plate to slide out from the outer surface of mobile frame, can rapidly cool down chip, and then facilitate the chip to unload, prevent the staff from the case of scalding of resistance heating wire inner wall.

[0021] 2. By placing chip on the outer surface of slide plate, then slide plate is slid into recess, facilitate the chip to be sent into resistance heating wire, through a plurality of recesses, the space utilization rate in resistance heating wire is improved. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme in the embodiment of the utility model, the following will be briefly introduced the drawings needed to be used in the embodiment description, obviously, the drawings in the following description only some embodiments of the utility model, for those skilled in the art, under the premise of not paying creative labor, other drawings can also be obtained according to these drawings.

[0023] Figure 1 It is the overall structure schematic diagram of the utility model;

[0024] Figure 2 It is the overall front cross section structure schematic diagram of the utility model;

[0025] Figure 3 It is the overall side cross section structure schematic diagram of the utility model;

[0026] Figure 4 It is the overall overhead cross section structure schematic diagram of the utility model.

[0027] In the figure, 1, box body; 2, drying mechanism; 201, pressure relief valve body; 202, moving frame; 203, vacuum pump; 204, sliding plate; 205, resistance heating wire; 206, heating cavity; 207, reinforcing rod; 208, groove; 209, connecting pipeline; 3, discharging mechanism; 301, sealing door plate; 302, electric telescopic rod; 303, through hole; 304, sealing plate; 305, speed reducer motor; 306, threaded rod; 307, chain; 308, connecting plate; 309, chain wheel; 4, control panel. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model.

[0029] Embodiment 1

[0030] Referring to Figure 1 , Figure 2 , Figure 3 and Figure 4 , the first embodiment of the utility model provides a special vacuum drying box for chip, including box body 1, the inner wall of box body 1 is fixedly connected with drying mechanism 2, the outer surface of drying mechanism 2 is fixedly connected with discharging mechanism 3, and the outer surface of box body 1 is fixedly connected with control panel 4, discharging mechanism 3 includes connecting plate 308 fixedly connected to the outer surface of moving frame 202, and the outer surface of heating cavity 206 is provided with through hole 303, the outer surface of through hole 303 is slidably connected with the outer surface of connecting plate 308, and the lower surface of heating cavity 206 is slidably connected with sealing plate 304, and the outer surface of box body 1 is rotatably connected with sealing door plate 301.

[0031] Specific discharging mechanism 3 further includes electric telescopic rod 302 fixedly connected to the lower surface of heating cavity 206, the outer surface of electric telescopic rod 302 is fixedly connected to the inner wall of box body 1, and the output end of electric telescopic rod 302 is fixedly connected with the outer surface of sealing plate 304, and sealing plate 304 is arranged below through hole 303, the outer surface of box body 1 is fixedly connected with speed reducer motor 305, and the outer surface of connecting plate 308 is threadedly connected with threaded rod 306, one end of threaded rod 306 and the output shaft of speed reducer motor 305 are both fixedly connected with chain wheel 309, the outer surfaces of the two groups of chain wheels 309 are meshingly connected with chain 307, the outer surface of sealing plate 304 is slidably connected with the outer surface of connecting plate 308, and the outer surface of sealing plate 304 is slidably connected with the inner wall of box body 1.

[0032] Further start electric telescopic rod 302, the output end of electric telescopic rod 302 drives sealing plate 304 to slide on the inner wall of box 1, so that through-hole 303 and connecting plate 308 are separated, then start the reduction motor 305, the output shaft of reduction motor 305 drives the sprocket 309 to rotate, through the chain 307 makes two groups of sprocket 309 synchronous rotation, makes the moving frame 202 from the electric resistance heating wire 205 slide out, in turn facilitates the slide plate 204 from the outer surface of moving frame 202 slide out, can quickly cool the chip, in turn facilitates the chip to be discharged, prevents the staff from scalding the inner wall of electric resistance heating wire 205.

[0033] Embodiment 2

[0034] With reference to Figure 1 、 Figure 2 、 Figure 3 and Figure 4 , the second embodiment of the utility model, this embodiment is based on the last embodiment, drying mechanism 2 includes the heating cavity 206 that is fixedly connected to the inner wall of box 1, the inner wall of heating cavity 206 is slidably connected with moving frame 202, the outer surface of moving frame 202 is provided with a plurality of grooves 208, the outer surface of groove 208 is slidably connected with slide plate 204, and a plurality of electric resistance heating wires 205 are fixedly connected in the heating cavity 206, wherein the slide plate 204 adopts the metal plate with through hole.

[0035] Specifically, the outer surface of moving frame 202 is fixedly connected with two reinforcing rods 207, both ends of reinforcing rod 207 are fixedly connected to the outer surface of moving frame 202, the inner wall of electric resistance heating wire 205 is fixedly connected with pressure relief valve body 201, and the inner wall of electric resistance heating wire 205 is fixedly connected with connecting pipeline 209, the other end of connecting pipeline 209 is fixedly connected with vacuum pump 203, and the outer surface of vacuum pump 203 is fixedly connected to the outer surface of box 1.

[0036] Further, the chip is placed on the outer surface of slide plate 204, then the slide plate 204 is slid into the groove 208, facilitating the chip to be sent into the electric resistance heating wire 205, the space between the slide plate 204 is adjusted through a plurality of grooves 208, in turn facilitating to improve the space utilization of electric resistance heating wire 205.

[0037] Working principle: through the chip is placed on the outer surface of the sliding plate 204, and then sliding plate 204 is slid into the groove 208, it is convenient to send the chip into the resistance heating wire 205, through a plurality of groove 208, it is convenient to adjust the spacing between the sliding plate 204, and then it is convenient to improve the space utilization rate in the resistance heating wire 205, then start the vacuum pump 203 and resistance heating wire 205, the vacuum pump 203 through the connecting pipeline 209, the gas in the resistance heating wire 205 is extracted, the resistance heating wire 205 heats the inside of the heating cavity 206, and then it is convenient to dry the chip, when drying is completed, open the sealing door plate 301, start the electric telescopic rod 302, the output end of the electric telescopic rod 302 drives the sealing plate 304 to slide on the inner wall of the box 1, so that the through hole 303 and the connecting plate 308 are separated, then start the speed reducer 305, the output shaft of the speed reducer 305 drives the sprocket 309 to rotate, through the chain 307, the two groups of sprocket 309 rotate synchronously, the sprocket 309 rotates and drives the threaded rod 306 to rotate, the threaded rod 306 rotates and drives the connecting plate 308 to slide on the outer surface of the through hole 303, the connecting plate 308 slides and drives the moving frame 202 to slide on the inner wall of the resistance heating wire 205, so that the moving frame 202 slides out of the resistance heating wire 205, and then it is convenient to slide the sliding plate 204 out of the outer surface of the moving frame 202, the chip can be quickly cooled, and then it is convenient to discharge the chip, preventing the staff from being scalded by the inner wall of the resistance heating wire 205.

[0038] It should be noted that in this document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.

Claims

1. A dedicated vacuum drying oven for chips, comprising a chamber (1), characterized in that: A drying mechanism (2) is fixedly connected to the inner wall of the box (1), a discharge mechanism (3) is fixedly connected to the outer surface of the drying mechanism (2), and a control panel (4) is fixedly connected to the outer surface of the box (1). The drying mechanism (2) includes a heating cavity (206) fixedly connected to the inner wall of the box (1). A movable frame (202) is slidably connected to the inner wall of the heating cavity (206). Multiple sets of grooves (208) are opened on the outer surface of the movable frame (202). A sliding plate (204) is slidably connected to the outer surface of the grooves (208). Multiple sets of resistance heating wires (205) are fixedly connected inside the heating cavity (206). The discharge mechanism (3) includes a connecting plate (308) fixedly connected to the outer surface of the movable frame (202), and the outer surface of the heating cavity (206) is provided with a through hole (303). The outer surface of the through hole (303) is slidably connected to the outer surface of the connecting plate (308), and a sealing plate (304) is slidably connected to the lower surface of the heating cavity (206). A sealing door plate (301) is rotatably connected to the outer surface of the box (1).

2. The dedicated vacuum drying oven for chips according to claim 1, characterized in that: The discharge mechanism (3) further includes an electric telescopic rod (302) fixedly connected to the lower surface of the heating cavity (206). The outer surface of the electric telescopic rod (302) is fixedly connected to the inner wall of the box (1), and the output end of the electric telescopic rod (302) is fixedly connected to the outer surface of the sealing plate (304). The sealing plate (304) is located below the through hole (303).

3. A dedicated vacuum drying oven for chips according to claim 2, characterized in that: A geared motor (305) is fixedly connected to the outer surface of the housing (1), and a threaded rod (306) is threadedly connected to the outer surface of the connecting plate (308). A sprocket (309) is fixedly connected to one end of the threaded rod (306) and the output shaft of the geared motor (305). A chain (307) is meshed on the outer surfaces of the two sets of sprockets (309).

4. A dedicated vacuum drying oven for chips according to claim 3, characterized in that: The outer surface of the sealing plate (304) is slidably connected to the outer surface of the connecting plate (308), and the outer surface of the sealing plate (304) is slidably connected to the inner wall of the box (1).

5. A dedicated vacuum drying oven for chips according to claim 1, characterized in that: Two sets of reinforcing rods (207) are fixedly connected to the outer surface of the movable frame (202), and both ends of the reinforcing rods (207) are fixedly connected to the outer surface of the movable frame (202).

6. A dedicated vacuum drying oven for chips according to claim 5, characterized in that: The inner wall of the resistance heating wire (205) is fixedly connected to a pressure relief valve body (201), and the inner wall of the resistance heating wire (205) is fixedly connected to a connecting pipe (209). The other end of the connecting pipe (209) is fixedly connected to a vacuum pump (203), and the outer surface of the vacuum pump (203) is fixedly connected to the outer surface of the housing (1).

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