Vacuum drying device

Abstract

A vacuum drying device comprises a vacuum assembly, at least two lead screw driving assemblies arranged on the two sides of the vacuum assembly respectively and a sealing assembly arranged at the output ends of the lead screw driving assemblies. The sealing assembly comprises two supporting plates arranged at the output ends of the two lead screw driving assemblies correspondingly, a sealing plate arranged at one ends of the supporting plates and a storage table arranged on the sealing plate. A vacuum cavity is formed in the cavity, and an opening of the vacuum cavity faces the sealing assembly. The storage table is connected with the sealing plate through at least six elastic pieces. According to the vacuum drying device, through the elastic piece between the storage table and the sealing plate, the storage table can move towards the sealing plate for a certain distance in a buffering mode, and therefore the situation that a product or device is damaged due to rigid contact between the storage table and the adapter box is avoided; and the mechanization degree and the applicability of the device are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a vacuum drying device. BACKGROUND

[0002] The wafer is the silicon wafer used for making silicon semiconductor circuit, which is widely used in integrated circuit manufacturing and is the basis of semiconductor devices. The wafer carrier carrying the wafer is also very important. Under normal circumstances, the cleanliness of the wafer carrier needs to reach the particle control standard of more than 0.1 microns, so the cleaning and drying device of the wafer carrier is particularly important. For example, Chinese patent CN202321742167.6 discloses a drying device for wafer transfer box, which includes a base, the upper surface of the base is fixedly connected with a driving mechanism and a support frame at both ends, the driving mechanism is provided with a pretreatment mechanism at one end, the support frame is provided with a drying mechanism, before drying, the pretreatment mechanism is driven by the first motor to the inside of the transfer box, then the second motor drives the first sprocket to rotate, the second sprocket is driven by the chain to rotate synchronously, so as to drive the rotating shaft to rotate, so as to drive the cleaning disc and the cleaning plate to rotate, the surface, the outer peripheral surface of the cleaning disc and the cleaning plate are provided with water absorbing brushes, the brushes are scattered outward under the action of centrifugal force, and the moisture on the inner wall of the wafer transfer box is absorbed. However, the internal surface gap of the general wafer carrier is relatively large, and there may be residual moisture during the cleaning process of the device, and the drying efficiency of the device is not high. In addition, when the device is placed by the mechanical hand, the placement position of the mechanical hand needs to be adjusted according to the size of the wafer carrier, the degree of mechanization is not high, and the applicability is low. SUMMARY

[0003] Therefore, the utility model provides a kind of vacuum drying device to solve the above problems.

[0004] A vacuum drying device is used for vacuum drying an adapter box. The vacuum drying device comprises a vacuum assembly, at least two screw rod driving assemblies arranged on two sides of the vacuum assembly respectively, and a sealing assembly arranged at the output end of the screw rod driving assemblies. The vacuum assembly comprises a cavity, at least four infrared heating pipes arranged in the cavity, and a vacuum pipe arranged on the cavity. The sealing assembly comprises two support plates arranged at the output end of the two screw rod driving assemblies respectively, a sealing plate arranged at one end of the support plates, and a placement table arranged on the sealing plate. A vacuum chamber is formed in the cavity, and the opening of the vacuum chamber faces the sealing assembly. The placement table and the sealing plate are connected through at least six elastic members, and the elastic members comprise a guide sleeve fixedly arranged on the sealing plate, a guide column movably arranged in the guide sleeve, and a spring arranged in the guide column. One end of the guide column is fixedly connected with the sealing plate, and the end of the guide column away from the sealing plate is provided with an outer step. An inner step is formed in the guide sleeve, and a sliding groove for sleeving the spring is formed on the side of the guide column facing the sealing plate. One end of the spring abuts against the bottom surface of the sliding groove, and the other end of the spring abuts against the sealing plate.

[0005] Further, the four infrared heating pipes are located at four corner positions of the vacuum chamber.

[0006] Further, the connection between the vacuum pipe and the cavity is sealingly arranged, one end of the vacuum pipe is communicated with the vacuum chamber, and the other end of the vacuum pipe is connected with the output end of an external compression molding machine.

[0007] Further, the output direction of the screw rod driving assembly is parallel to the arrangement direction of the vacuum assembly and the sealing assembly.

[0008] Further, the sealing plate is provided with a sealing ring on the side facing the vacuum assembly.

[0009] Further, one side of the placement table is provided with a limiting block, and the limiting block is provided with a limiting groove with an opening on the side facing the placement table.

[0010] Further, the adapter box comprises a box body, a containing cavity formed in the box body, and a flange arranged on one side of the box body, and the flange is matched with the limiting groove.

[0011] Compared with the prior art, the vacuum drying device provided by the utility model has the sealing plate cover arranged on the cavity, so that the vacuum chamber is in a sealed state, the gas in the vacuum chamber is drawn away by the compression molding machine, the temperature is increased by the heating pipe, thus a low-pressure high-temperature environment is manufactured, the adaptive box is rapidly dried, thus the drying efficiency of the adaptive box in the drying stage is improved, and the production capacity is greatly improved. The elastic element between the object placing table and the sealing plate of the vacuum drying device enables the object placing table to be buffered to move an end distance towards the sealing plate, so that the object placing table and the adaptive box are prevented from being in hard contact to damage the product or the device, the adaptive box with different specifications is placed by the mechanical hand, and thus the mechanization degree and the applicability of the device are improved. BRIEF DESCRIPTION OF DRAWINGS

[0012] Figure 1 The structure schematic diagram of the vacuum drying device provided by the utility model is shown.

[0013] Figure 2 The vacuum drying device has the vacuum assembly shown in the sectional view. Figure 1

[0014] The vacuum drying device has the sealing assembly shown in the sectional view. Figure 3 Figure 1 The vacuum drying device has the limiting block shown in the structure schematic diagram.

[0015] Figure 4 Figure 3 The vacuum drying device has the adaptive box shown in the structure schematic diagram.

[0016] Figure 5 The vacuum drying device has the adaptive box shown in the structure schematic diagram. Figure 1

[0017] The vacuum drying device has the adaptive box shown in the structure schematic diagram. Figure 6 Figure 1 The vacuum drying device has the adaptive box shown in the structure schematic diagram.

[0018] Figure 7 The vacuum drying device has the adaptive box shown in the structure schematic diagram. Figure 1 SPECIFIC EMBODIMENT

[0019] The specific embodiments of the utility model are further described in detail below. It should be understood that the description of the embodiments of the utility model herein is not used to limit the protection scope of the utility model.

[0020] As Figure 1 ​​​​As shown, it is the vacuum drying device's structure schematic view provided by the utility model. The vacuum drying device includes a vacuum component 10, at least two respectively set up in the two sides of the vacuum component 10's screw rod drive assembly 20, and a sealing assembly 30 set up in the output end of the screw rod drive assembly 20. It can be thought that the vacuum drying device also includes some other functional modules, such as power module, compression molding machine and the like, which are the technology that the person skilled in the art is accustomed to, and here will not be described one by one.

[0021] Please see Figures 2 to 6 , it needs to be explained that the vacuum drying device is used to carry out vacuum drying to an adapter box 40, and according to the theoretical knowledge of water vapor evaporation, the lower the air pressure is, the lower the boiling point will be, so that the rapid drying of the adapter box 40 is realized.

[0022] The vacuum component 10 includes a cavity 11, at least four infrared heating pipes 12 set in the cavity 11, and a vacuum pipe 13 set on the cavity 11.

[0023] The cavity 11 is provided with a vacuum chamber 14, and the inlet of the vacuum chamber 14 faces the sealing assembly 30. During the drying operation, the sealing assembly 30 seals the vacuum chamber 14, and the specific sealing condition will be described below.

[0024] The cavity 11 is provided with a thermal sensor 15, and the input end of the thermal sensor 15 is located in the vacuum chamber 14, so that the temperature in the vacuum chamber 14 is detected in real time.

[0025] The four infrared heating pipes 12 are located at the four corner positions of the vacuum chamber 14, the input end of the infrared heating pipe 12 is located outside the cavity 11, and is connected with the external power module. The connection between the four infrared heating pipes 12 and the cavity 11 is sealed, so that the vacuum chamber 14 in the vacuum environment is heated to dry the adapter box 40 in the vacuum chamber 14.

[0026] The connection between the vacuum pipe 13 and the cavity 11 is sealed, and one end of the vacuum pipe 13 communicates with the vacuum chamber 14, and the other end is connected with the output end of an external compression molding machine, so that the vacuum chamber 14 is subjected to vacuumizing operation.

[0027] The output direction of the screw rod drive assembly 20 is parallel to the arrangement direction of the vacuum component 10 and the sealing assembly 30, so that the screw rod drive assembly 20 can drive the sealing assembly 30 to approach or move away from the vacuum component 10. The structure and working principle of the screw rod drive assembly 20 are prior art, which will not be described here.

[0028] The sealing assembly 30 comprises two support plates 31 respectively arranged at the output ends of the two lead screw driving assemblies 20, a sealing plate 32 arranged at one end of the support plates 31, and a placing table 33 arranged on the sealing plate 32.

[0029] The two support plates 31 are respectively fixedly connected with the two ends of the sealing plate 32 away from the lead screw driving assemblies 20, so that the sealing plate 32 can be driven by the two lead screw driving assemblies 20 to approach or move away from the cavity 11.

[0030] The sealing plate 32 is provided with a sealing ring 34 on the side facing the vacuum assembly 10, and the sealing plate 32 matches the opening of the vacuum chamber 14, so that when the sealing plate 32 is arranged on the cavity 11, the sealing ring 34 is located at the connection between the sealing plate 32 and the cavity 11, thereby sealing the vacuum chamber 14.

[0031] The placing table 33 is arranged on the side of the sealing plate 32 with the sealing ring 34, and the placing table 33 and the sealing plate 32 are connected by at least six elastic members 35. The elastic member 35 comprises a guide sleeve 351 fixedly arranged on the sealing plate 32, a guide column 352 movably arranged in the guide sleeve 351, and a spring 353 arranged in the guide column 352.

[0032] One end of the guide column 352 is fixedly connected with one side of the placing table 33, and the end away from the placing table 33 is provided with an outer step 354. An inner step 355 is formed in the guide sleeve 351, and when the guide column 352 is arranged in the guide sleeve 351, the outer step 354 can be clamped in the inner step 355, so as to avoid the guide column 352 from falling off the guide sleeve 351.

[0033] A sliding groove 356 for placing the spring 353 is formed in the side of the guide column 352 facing the sealing plate 32. One end of the spring 353 abuts against the bottom surface of the sliding groove 356, and the other end abuts against the sealing plate 32, so that the placing table 33 can move towards the sealing plate 32 under external pressure, so as to provide a buffer space between the placing table 33 and the sealing plate 32 when the robot places the adaptive box 40 with different height specifications, thereby avoiding the placing table 33 and the adaptive box 40 from being damaged due to hard contact, and improving the applicability of the device.

[0034] As Figure 7As shown, it is the dry placement of the large-scale adapter box by the vacuum drying device. When the adapter box 40 is placed on the placement table 33 by the mechanical hand, the placement table 33 will be pressed down by the adapter box 40 because the preset point of the mechanical hand is unchanged. Until the gap between the end of the outer step 354 of the guide column 352 and the sealing plate 32 is contacted. The mechanical hand reaches the preset point and releases the adapter box 40 to complete the product loading operation.

[0035] One side of the placement table 33 is provided with a limiting block 36, which is provided with a limiting groove 37 with an opening on one side of the placement table 33. The limiting groove 37 matches part of the adapter box 40, thereby limiting the adapter box 40 in the horizontal direction. The matching of the limiting groove 37 and part of the adapter box 40 will be described below.

[0036] The adapter box 40 includes a box body 41, a containing cavity 42 opened in the box body 41, and a flange 43 provided on one side of the box body 41.

[0037] Both sides of the box body 41 are respectively provided with a handle 44 for carrying the adapter box 40.

[0038] The containing cavity 42 is provided with a plurality of parallel wafer grooves 45 arranged at intervals, which are used to place wafers to achieve the purpose of carrying wafers.

[0039] When the adapter box 40 is placed on the placement table 33, the opening of the containing cavity 42 is located on the side of the box body 41 away from the placement table 33. Thus, during the low-pressure drying operation, the evaporated water vapor will be absorbed by the plastic molding machine through the vacuum pipe 13. At normal temperature and pressure, the water vapor will become liquid, so the plastic molding machine will pass the air at normal temperature and pressure into the vacuum chamber 14 to open the vacuum chamber 14.

[0040] The flange 43 matches the limiting groove 37, and the flange 43 can slide in the limiting groove 37, and the sliding direction is parallel to the output direction of the screw drive assembly 20. Thus, through the cooperation of the flange 43 and the limiting groove 37, the adapter box 40 is limited in the horizontal direction.

[0041] Compared with the prior art, the vacuum drying device provided by the utility model is characterized in that the sealing plate 32 is arranged on the cavity 11, so that the vacuum chamber 14 is in a sealed state, the gas in the vacuum chamber 14 is drawn away by the compression molding machine, and the temperature is increased by the heating pipe 12, so that a low-pressure high-temperature environment is formed, the adaptive box 40 is rapidly dried, the drying efficiency of the adaptive box 40 in the drying stage is improved, and the production capacity is greatly improved. The vacuum drying device is characterized in that the elastic element 35 is arranged between the object placing table 33 and the sealing plate 32, so that the object placing table 33 can be buffered to move an end distance towards the sealing plate 32, so that the object placing table 33 and the adaptive box 40 are prevented from being in hard contact to damage the product or the device, the mechanical hand can be adapted to the adaptive box 40 with different specifications, and the mechanization degree and the applicability of the device are improved.

[0042] The above is only the preferred embodiment of the utility model, and is not used for limiting the protection scope of the utility model, and any modification, equivalent replacement or improvement in the spirit of the utility model is covered in the claim scope of the utility model.

Claims

1. A vacuum drying apparatus for vacuum drying an adapter box, characterized in that: The vacuum drying device includes a vacuum assembly, at least two lead screw drive assemblies respectively disposed on both sides of the vacuum assembly, and a sealing assembly disposed at the output end of the lead screw drive assemblies. The vacuum assembly includes a cavity, at least four infrared heating tubes disposed within the cavity, and a vacuum tube disposed on the cavity. The sealing assembly includes two support plates respectively disposed at the output ends of two of the lead screw drive assemblies, a sealing plate disposed at one end of the support plates, and a platform disposed on the sealing plate. A vacuum chamber is formed within the cavity. The opening faces the sealing assembly. The platform and the sealing plate are connected by at least six elastic elements. Each elastic element includes a guide sleeve fixedly mounted on the sealing plate, a guide post movably passing through the guide sleeve, and a spring disposed within the guide post. One end of the guide post is fixedly connected to the sealing plate, and the end away from the sealing plate is provided with an outer step. An inner step is provided inside the guide sleeve. A groove for fitting the spring is provided on the side of the guide post facing the sealing plate. One end of the spring abuts against the bottom surface of the groove, and the other end abuts against the sealing plate.

2. The vacuum drying apparatus according to claim 1, characterized in that: The four infrared heating tubes are located at the four corners of the vacuum chamber.

3. The vacuum drying apparatus according to claim 1, characterized in that: The connection between the vacuum tube and the cavity is sealed, and one end of the vacuum tube is connected to the vacuum chamber, while the other end is connected to the output end of an external compression molding machine.

4. The vacuum drying apparatus according to claim 1, characterized in that: The output direction of the lead screw drive assembly is parallel to the arrangement direction of the vacuum assembly and the sealing assembly.

5. The vacuum drying apparatus according to claim 1, characterized in that: A sealing ring is provided on the side of the sealing plate facing the vacuum assembly.

6. The vacuum drying apparatus according to claim 1, characterized in that: A limiting block is provided on one side of the shelf, and the limiting block has a limiting groove with an opening on the side facing the shelf.

7. The vacuum drying apparatus according to claim 6, characterized in that: The adapter box includes a box body, an accommodating chamber formed in the box body, and a flange disposed on one side of the box body, the flange matching the limiting groove.

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