Optical MEMS pressure sensing device for measuring surface pressure of water tank and water tank

Abstract

The utility model relates to an optical MEMS pressure sensing device for measuring the surface pressure of a water tank, and the device comprises a pressure obtaining mechanism which is constructed to be of a disc structure with an inner cavity, a first plane of the pressure obtaining mechanism is provided with a pressure obtaining diaphragm, and a second plane of the pressure obtaining mechanism is provided with a second pressure obtaining diaphragm; a second plane of the pressure acquisition mechanism is provided with a filling hole communicated with an inner cavity of the disc structure, and the filling hole is arranged to be sealed and covered by a sealing cover; the pressure sensing mechanism is arranged in an inner cavity of the connecting rod connected with the pressure acquisition mechanism; the pressure transmission mechanism is arranged to be of a pipeline structure communicating with an inner cavity of the pressure obtaining mechanism and an inner cavity of the connecting rod, and the pipeline structure is arranged to be filled with pressure conduction liquid. In addition, the utility model further provides the water tank. The optical MEMS pressure sensing device provided by the embodiment of the utility model is convenient to install and arrange, good in anti-vibration effect, high in measurement accuracy, convenient to use and high in adaptability.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical fiber sensing monitoring, in particular to an optical MEMS pressure sensing device for measuring the surface pressure of a water tank and the water tank. BACKGROUND

[0002] The water pressure monitoring of a fire water tank is crucial to ensure the adequacy and timeliness of the fire water. In the event of a fire, the fire fighting system needs to quickly provide sufficient water and pressure to extinguish the flames. If the water pressure of the fire water tank is insufficient, the fire fighting system may not work properly, thus delaying the opportunity to extinguish the fire, causing serious property loss and casualties.

[0003] Generally, fire water tanks, such as fire engine water tanks, are relatively large and are in flight during operation. The pressure monitoring thereof needs to measure the dynamic and static load in the water tank, and measure the impact pressure of the water in the water tank on the wallboard when it is static and running. In some known solutions, strain gauges are bonded to the outside of the structure to measure the load after calibration, but the precision is poor, and the strain gauges are installed in the water tank for a long time, which is easy to fall off and measure inaccurately. In addition, some electric pressure sensors are also used for measurement, but the size is not suitable, power supply is required, and the sensor cannot be immersed in water for a long time, the sealing effect is not good, and the measurement is not accurate due to the influence of inertial acceleration. In short, the problems of the known solutions are that the accuracy and stability of the pressure sensor need to be ensured, and the reliability and timeliness of data transmission.

[0004] Therefore, the prior art still needs to be improved and improved.

[0005] It should be noted that the above introduction to the technical background is only to facilitate the clear and complete description of the technical solutions of the present application, and to facilitate the understanding of those skilled in the art. The above technical solutions cannot be considered as known to those skilled in the art merely because they are described in the background section of the present application. Content of the utility model

[0006] In order to solve one or more of the above technical problems, the present application proposes an optical MEMS pressure sensing device for measuring the surface pressure of a water tank, which can measure the static pressure and / or dynamic pressure of the water in the fire water tank, and can feed back the pressure value in the water tank in real time. The measurement process is not affected by external electromagnetic interference, and the anti-vibration effect is good, the measurement accuracy is high, the cost is low, the use is convenient, the adaptability is strong, and the device can be disassembled and calibrated at any time.

[0007] In a first aspect of the present disclosure, an optical MEMS pressure sensing device for water tank surface pressure measurement is provided, which comprises: a pressure acquisition mechanism configured as a disc structure with an inner cavity, a first plane of the pressure acquisition mechanism is provided with a pressure acquisition diaphragm, a second plane of the pressure acquisition mechanism is provided with a perfusion hole communicating with the inner cavity of the disc structure, the perfusion hole is covered and sealed by a sealing cover; a pressure sensing mechanism arranged in the inner cavity of a connecting rod connected with the pressure acquisition mechanism; a pressure transmission mechanism arranged as a pipeline structure communicating the inner cavity of the pressure acquisition mechanism and the inner cavity of the connecting rod, and the pipeline structure is filled with a pressure conducting liquid.

[0008] Further, in some embodiments, the pressure acquisition mechanism is provided with a first boss and a second boss facing in opposite directions, the first plane is arranged on the first boss, the second plane is arranged on the second boss, and the first plane and the second plane are arranged parallel to each other.

[0009] Further, in some embodiments, the pressure conducting liquid comprises a liquid with small surface tension, compression resistance, and weather resistance characteristics. More preferably, the pressure conducting liquid comprises silicone oil or propylene glycol.

[0010] Further, in some embodiments, the thermal expansion coefficient of the pressure conducting liquid is arranged to be similar to the thermal expansion coefficient of the material constituting the inner cavity of the pressure acquisition mechanism. More preferably, in some embodiments, the thermal expansion coefficient of the pressure conducting liquid is arranged to be the same as the thermal expansion coefficient of the material constituting the inner cavity of the pressure acquisition mechanism.

[0011] Further, in some embodiments, the inner cavity of the pressure acquisition mechanism is arranged as a tee section, the tee section is arranged to be composed of a first pipe section, a second pipe section, and a third pipe section communicating with each other, wherein the other end of the first pipe section of the tee section is provided with the pressure acquisition diaphragm, the other end of the second pipe section of the tee section is provided with the perfusion hole, and the other end of the third pipe section of the tee section is arranged to communicate with the inner cavity of the connecting rod.

[0012] Further, in some embodiments, the junction of the other end of the third pipe section of the tee section and the inner cavity of the connecting rod is arranged to be the same diameter as the inner cavity of the connecting rod.

[0013] Further, in some embodiments, the central axis of the first pipe section of the tee section is arranged to coincide with the central axis of the second pipe section of the tee section.

[0014] Further, in some embodiments, the middle axis of the third pipe section of the above-mentioned tee pipe section is arranged to intersect and be perpendicular to the middle axis of the first pipe section of the above-mentioned tee pipe section.

[0015] Further, in some embodiments, the MEMS fiber F-P pressure sensitive sheet of the above-mentioned pressure sensing mechanism is arranged in the inner cavity of the above-mentioned connecting rod towards the above-mentioned pressure transmission mechanism.

[0016] In the second aspect of the present disclosure, a water tank is also provided, which is a special-shaped tank or a regular tank, and the water tank comprises the above-mentioned optical MEMS pressure sensing device arranged on the inner surface of the water tank.

[0017] According to the above and the following some embodiments, the present disclosure has the beneficial effects of:

[0018] 1) In some embodiments, by arranging a pressure transmission mechanism, and arranging the pressure transmission mechanism to communicate the pipe structure of the inner cavity of the pressure acquisition mechanism and the inner cavity of the connecting rod, and filling the pressure conducting liquid in the pipe structure, so as to realize the axial installation of the pressure sensing mechanism, the pressure acquisition mechanism can be measured normally, and the present situation that the conventional optical MEMS pressure sensor can only be measured axially and frontally is changed, so as to change the direction of pressure acquisition and monitoring, and overcome the influence of poor effect of axial installation and normal measurement. Further, the thermal expansion coefficient of the pressure conducting liquid is arranged to be the same as the thermal expansion coefficient of the material constituting the inner cavity of the pressure acquisition mechanism, so that when encountering thermal expansion and contraction inside the water tank, it is ensured that the thermal expansion and contraction of the pressure conducting liquid and the inner cavity are the same, thereby preventing the appearance of gaps or additional pressure due to expansion.

[0019] 2) Further, in some embodiments, by arranging the first boss and the second boss in opposite directions on the pressure acquisition mechanism, and arranging the first plane of the first boss and the second plane of the second boss to be parallel to each other, the optical MEMS pressure sensing device is designed to adapt to underwater impact load, so that each direction can be equally divided and the stress is more uniform, and the ability to resist underwater impact load is stronger.

[0020] 3) Further, in some embodiments, the inner cavity of the pressure acquisition mechanism is provided as a tee section, which is provided to be composed of a first tube section, a second tube section and a third tube section that are in communication with each other, wherein the other end of the second tube section is provided with a perfusion hole and a sealing cover is provided to seal and cover the perfusion hole, so as to facilitate filling the inner cavity (or internal tube structure) with a given amount of pressure-conducting liquid from the perfusion hole and facilitate maintenance filling. Further, in some embodiments, the junction of the other end of the third tube section of the tee section and the inner cavity of the connecting rod is provided to have the same diameter as the inner cavity of the connecting rod, so as to ensure that the width (diameter) of the MEMS optical fiber F-P pressure sensing sheet of the pressure sensing mechanism is consistent with, for example, has substantially the same cross-sectional area as, the width (diameter) of the connecting rod, so as to ensure that the pressure sensing area remains consistent during pressure transmission. Further, in some embodiments, the central axis of the first tube section of the tee section is provided to coincide with the central axis of the second tube section of the tee section, so that the overall center of gravity of the pressure acquisition mechanism is located on the central axis, preventing the center of gravity from being offset to affect the detection accuracy. Further, in some embodiments, in order to completely realize the axial installation normal measurement, the central axis of the third tube section of the tee section is provided to intersect and be perpendicular to the central axis of the first tube section of the tee section. BRIEF DESCRIPTION OF DRAWINGS

[0021] The above and other features, advantages, and aspects of embodiments of the present disclosure will become more apparent upon consideration of the following detailed description, taken in conjunction with the accompanying drawings, in which:

[0022] Figure 1 A diagram of an optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown;

[0023] Figure 2 A cross-sectional view of an optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown;

[0024] Figure 3 A cross-sectional view of an optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown from another perspective;

[0025] Figure 4 A diagram of an optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown from another perspective;

[0026] Figure 5 A cross-sectional view of an optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown from yet another perspective; and

[0027] In the various drawings, the same or corresponding reference signs represent the same or corresponding parts, wherein: the optical MEMS pressure sensing device 100 for water tank surface pressure measurement; the pressure acquisition mechanism 10; the disc structure 10-1; the first boss 10-3; the first plane 10-3-1; the second boss 10-4; the second plane 10-4-1; the pressure transmission mechanism 20; the first pipe segment 20-1; the second pipe segment 20-2; the sealing cover 20-2-1; the third pipe segment 20-3; the connecting rod 30-1; the MEMS fiber F-P pressure sensing sheet 30-2; the optical cable 30-3; the fiber auxiliary fixing hole 30-4. DETAILED DESCRIPTION

[0028] Embodiments of the present disclosure will be described in more detail with reference to the drawings. Although certain embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure can be more thoroughly and completely understood. It should be understood that the drawings and embodiments of the present disclosure are for exemplary purposes only and are not intended to limit the scope of protection of the present disclosure.

[0029] In the description of embodiments of the present disclosure, the term "comprising" and its conjugations should be understood to encompass the meaning of "including but not limited to". The term "based on" should be understood as "based at least in part on". The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment". The terms "first", "second", etc. can refer to different or identical objects. Other explicit and implicit definitions can also be included below.

[0030] It should be understood that the fire extinguishing machine water tank (firefighting water tank) is large, there are different attitude adjustments during flight, there are inertial forces, and in general, the dynamic or static load conditions in the water tank need to be measured. The impact pressure of the water in the water tank on the wall plate (inner wall of the water tank) when it is static and running. If a strain gauge is bonded to the outside of the structure, the load measurement can be achieved after calibration, which will result in poor accuracy. In addition, the strain gauge installed inside the water tank will easily fall off after a long time, which will result in inaccurate measurement or even no measurement. In addition, if an electrical pressure sensor is used for measurement, it will usually be unsuitable due to its size and the need for power supply, especially not suitable for long-term immersion in water. In addition, it is also affected by the poor sealing effect, and is easily affected by the inertial acceleration, resulting in inaccurate measurement.

[0031] To this end, the present disclosure proposes an optical MEMS pressure sensing device for water tank surface pressure measurement. The optical MEMS pressure sensing device can measure the static pressure and / or dynamic pressure of water in a fire-fighting water tank, provide real-time feedback of the pressure value in the water tank, and is not affected by external electromagnetic interference during the measurement process. The optical MEMS pressure sensing device for water tank surface pressure measurement has good anti-vibration effect, high measurement accuracy, low cost, convenient use, strong adaptability, and can be disassembled and calibrated at any time. Thus, the optical MEMS pressure sensing device for water tank surface pressure measurement has an outer shape as shown in Figure 1 . Figure 1 A diagram of an optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown. In this example embodiment, the optical MEMS pressure sensing device for water tank surface pressure measurement 100 is integrally configured as an outer shape structure connected by a disc structure 10-1 and a connecting rod 30-1.

[0032] The following will be described in detail in conjunction with the accompanying drawings.

[0033] Figure 2 A cross-sectional view of an optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown. In this example embodiment, an optical MEMS pressure sensing device for water tank surface pressure measurement 100 is shown, which includes: a pressure acquisition mechanism 10 configured as a disc structure 10-1 having an inner cavity, a first plane 10-3-1 of the pressure acquisition mechanism 10 is provided with a pressure acquisition diaphragm, and a second plane 10-4-1 of the pressure acquisition mechanism 10 is provided with a perfusion hole communicating with the inner cavity of the disc structure 10-1, wherein the perfusion hole is covered and sealed by a sealing cover 20-2-1; a pressure sensing mechanism 30 arranged in the inner cavity of the connecting rod 30-1 connected with the pressure acquisition mechanism 10; a pressure transmission mechanism 20 arranged as a pipeline structure communicating the inner cavity of the pressure acquisition mechanism 10 and the inner cavity of the connecting rod 30-1, and the pipeline structure is filled with a pressure conducting liquid (a diagram showing the pipeline structure filled with liquid is not shown in the diagram).

[0034] Further, in some embodiments, the pressure acquisition mechanism 10 is provided with a first protrusion 10-3 and a second protrusion 10-4 facing in opposite directions, a first plane 10-3-1 is provided on the first protrusion 10-3, a second plane 10-4-1 is provided on the second protrusion 10-4, and the first plane 10-3-1 and the second plane 10-4-1 are arranged to be parallel to each other. By providing the first protrusion 10-3 and the second protrusion 10-4 facing in opposite directions on the pressure acquisition mechanism, and arranging the first plane 10-3-1 of the first protrusion 10-3 and the second plane 10-4-1 of the second protrusion 10-4 to be parallel to each other, the optical MEMS pressure sensing device 100 is designed to adapt to underwater impact load, so that each direction can divide the force and then be more evenly stressed, and the ability to resist underwater impact load is stronger.

[0035] Further, in some embodiments, the pressure conducting liquid includes silicone oil or propylene glycol. The pressure is conducted from the vertical to the axial direction. In particular, in some embodiments, the thermal expansion coefficient of the pressure conducting liquid is arranged to be the same as the thermal expansion coefficient of the material constituting the inner cavity of the pressure acquisition mechanism. It should be understood that the pressure conducting liquid is filled in the pipeline structure, so that the axial installation of the pressure sensing mechanism is realized, the pressure acquisition mechanism can be measured normally, the current situation that the traditional optical MEMS pressure sensor can only be measured axially and frontally is changed, thereby changing the direction of pressure acquisition and monitoring, and overcoming the influence of poor axial installation and normal measurement effect. Further, the thermal expansion coefficient of the pressure conducting liquid is arranged to be similar to (preferably, the same as) the thermal expansion coefficient of the material constituting the inner cavity of the pressure acquisition mechanism, so that when the thermal expansion and contraction of the inner cavity is encountered, the thermal expansion and contraction of the pressure conducting liquid is ensured to be the same as that of the inner cavity, thereby preventing the gap or additional pressure caused by the expansion.

[0036] Further, in the figure, the MEMS fiber F-P pressure sensitive sheet 30-2 of the pressure sensing mechanism 30 is arranged in the inner cavity of the connecting rod 30-1 towards the pressure transmission mechanism 20. Preferably, in order to realize high-precision measurement and reduce the influence of temperature, the diameter of the inner cavity of the connecting rod 30-1 is not more than 3 times the diameter (size) of the MEMS fiber F-P pressure sensitive sheet.

[0037] Alternatively, in some embodiments, the other end of the connecting rod can lead out the optical cable 30-3 (or optical fiber). Specifically, in some embodiments, the optical cable 30-3 can be led out and then a connector can be made, or the optical cable 30-3 can be removed and a connector can be designed in structure, a vacuum sealed feedthrough is adopted to ensure that the inside and outside of the connector are in a sealed state, and the connector is directly arranged on the optical MEMS pressure sensing device 100.

[0038] Alternatively, the MEMS fiber F-P pressure sensitive sheet can adopt a spring diaphragm structure, which can have a stretching and shrinking range, and the pressure sensitive element is encapsulated inside, so that the spring diaphragm structure acts as a pressure conversion device to convert force into contact pressure and then into internal pressure to achieve pressure measurement effect. For some special field load measurement, the application is relatively large, and the intermediate calibration conversion is avoided because the structure itself already has this effect. As long as the force value of the calibrated sensor is calibrated, the load measurement in the special area can be realized.

[0039] The pressure transmission mechanism will be further described below in conjunction with the drawings.

[0040] Figure 3 A cross-sectional view of another perspective of the optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown. In this example embodiment, the inner cavity of the pressure acquisition mechanism is provided as a three-way pipe section (the pipe structure of the three-way pipe section can be regarded as a pressure transmission mechanism), which is provided to consist of a first pipe section 20-1, a second pipe section 20-2 and a third pipe section 20-3 that are in communication with each other, wherein the other end of the first pipe section 20-1 of the three-way pipe section is provided with a pressure acquisition diaphragm (in the first plane 10-3-1), the other end of the second pipe section 20-2 of the three-way pipe section is provided with a perfusion hole, and the other end of the third pipe section 20-3 of the three-way pipe section is provided to communicate with the inner cavity of the connecting rod 30-1. Further, in some embodiments, the junction of the other end of the third pipe section 20-3 of the three-way pipe section and the inner cavity of the connecting rod 30-1 is provided to be the same diameter as the inner cavity of the connecting rod 30-1; so as to ensure the width (diameter) of the MEMS fiber F-P pressure sensitive sheet of the pressure sensing mechanism, for example, the cross-sectional area is basically the same, so as to ensure that the pressure sensing area remains consistent during pressure transmission. Further, in some embodiments, the central axis of the first pipe section 20-1 of the three-way pipe section is provided to coincide with the central axis of the second pipe section 20-2 of the three-way pipe section; so that the overall center of gravity of the pressure acquisition mechanism is on the central axis, preventing the center of gravity from shifting and affecting the detection accuracy. Further, in some embodiments, the central axis of the third pipe section 20-3 of the three-way pipe section is provided to intersect and be perpendicular to the central axis of the first pipe section 20-1 of the three-way pipe section; so as to completely realize the axial installation normal measurement.

[0041] Figure 4Another view of the optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown. In this example embodiment, the first and second bosses 10-3 and 10-4 facing in opposite directions are more clearly shown on the pressure acquisition mechanism 10; the first plane 10-3-1 of the first boss 10-3 and the second plane 10-4-1 of the second boss 10-4 are parallel to each other, and the design is such that the optical MEMS pressure sensing device is adapted to underwater impact load, so that the directions can be bisected by force and then be more evenly stressed, and the ability to resist underwater impact load is stronger.

[0042] Figure 5 Another view of the optical MEMS pressure sensing device for water tank surface pressure measurement according to an embodiment of the present disclosure is shown. In this example embodiment, the first and second bosses 10-3 and 10-4 facing in opposite directions are more clearly shown on the pressure acquisition mechanism 10; the first plane 10-3-1 of the first boss 10-3 and the second plane 10-4-1 of the second boss 10-4 are parallel to each other, and the design is such that the optical MEMS pressure sensing device is adapted to underwater impact load, so that the directions can be bisected by force and then be more evenly stressed, and the ability to resist underwater impact load is stronger.

[0043] In summary, it should be understood that the present disclosure aims to design an optical MEMS pressure sensing device with a higher sealing protection level, encapsulate the MEMS optical fiber F-P pressure sensitive sheet in the shell, fill the inside with pressure conducting liquid, transmit pressure through the pressure acquisition diaphragm, realize surface pressure measurement, and can be installed at any position such as the bottom, sidewall or upper wall of the water tank, can measure the static and / or dynamic pressure of the water in the water tank, real-time feedback the pressure value in the water tank, the measurement process is not affected by external electromagnetic interference, has good anti-vibration effect, high measurement accuracy, low cost, convenient to use, strong adaptability, and can be disassembled and calibrated at any time.

[0044] In addition, the present disclosure does not aim to change the principle of optical fiber F-P cavity sensing stress and strain, and the pressure sensing mechanism can adopt the existing optical fiber F-P cavity sensing stress and strain sensor, and the person skilled in the art can improve the size of the optical fiber F-P cavity sensing stress and strain sensor according to the context of the present disclosure and install it in the inner cavity of the connecting rod.

[0045] In other embodiments, the present disclosure also provides a water tank which can be a special-shaped tank or a regular tank, as long as the optical MEMS pressure sensing device is arranged on the inner surface of the water tank.

[0046] Embodiments of the present disclosure have been described above, with the understanding that these embodiments are exemplary only and are not exhaustive of overall disclosure. Many modifications and variations will be apparent to those of ordinary skill in the art. The scope of the disclosure, therefore, is to be determined from the following claims, which are to be accorded the full breadth of equivalents to which they are entitled under the law. The selection of the terms to be used in the description herein is intended to best explain the principles of the embodiments, the practical application of the embodiments, or the technical improvements over the prior art, or to enable other of ordinary skill in the art to understand the embodiments disclosed herein.

[0047] The above description is merely illustrative of the embodiments of the present disclosure and is not intended to limit the scope of the disclosure. Various modifications and changes can be made by those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present disclosure shall be included in the scope of the present disclosure.

Claims

1. An optical MEMS pressure sensing device for measuring surface pressure in a water tank, characterized in that, include: The pressure acquisition mechanism is configured as a disc structure with an inner cavity. A pressure acquisition diaphragm is provided on the first plane of the pressure acquisition mechanism, and an injection hole communicating with the inner cavity of the disc structure is provided on the second plane of the pressure acquisition mechanism. The injection hole is configured to be sealed and covered by a sealing cap. The pressure sensing mechanism is disposed in the inner cavity of the connecting rod connected to the pressure acquisition mechanism; The pressure transmission mechanism is configured as a pipeline structure connecting the inner cavity of the pressure acquisition mechanism and the inner cavity of the connecting rod, and the pipeline structure is filled with a pressure-conducting liquid.

2. The optical MEMS pressure sensing device according to claim 1, characterized in that, The pressure acquisition mechanism is provided with a first protrusion and a second protrusion facing opposite directions. The first plane is provided on the first protrusion, and the second plane is provided on the second protrusion. The first plane and the second plane are arranged to be parallel to each other.

3. The optical MEMS pressure sensing device according to claim 1, characterized in that, The pressure-conducting liquid includes silicone oil, propylene glycol, or other liquids with low surface tension, compressibility, and weather resistance.

4. The optical MEMS pressure sensing device according to claim 1, characterized in that, The coefficient of thermal expansion of the pressure-conducting liquid is set to be similar to that of the material constituting the inner cavity of the pressure-generating mechanism.

5. The optical MEMS pressure sensing device according to claim 1, characterized in that, The inner cavity of the pressure acquisition mechanism is configured as a three-way pipe section, which is composed of a first pipe section, a second pipe section, and a third pipe section that are interconnected. The other end of the first pipe section of the three-way pipe section is provided with the pressure acquisition diaphragm, the other end of the second pipe section of the three-way pipe section is provided with the injection hole, and the other end of the third pipe section of the three-way pipe section is configured to connect to the inner cavity of the connecting rod.

6. The optical MEMS pressure sensing device according to claim 5, characterized in that, The joint where the other end of the third section of the tee connects to the inner cavity of the connecting rod is configured to have the same diameter as the inner cavity of the connecting rod.

7. The optical MEMS pressure sensing device according to claim 5, characterized in that, The central axis of the first segment of the tee pipe section is set to coincide with the central axis of the second segment of the tee pipe section.

8. The optical MEMS pressure sensing device according to claim 7, characterized in that, The central axis of the third segment of the tee pipe section is set to intersect and be perpendicular to the central axis of the first segment of the tee pipe section.

9. The optical MEMS pressure sensing device according to claim 7, characterized in that, The MEMS fiber optic FP pressure sensor of the pressure sensing mechanism is disposed in the inner cavity of the connecting rod facing the pressure transmission mechanism.

10. A water tank, characterized in that, The water tank is either an irregularly shaped or a regular-shaped tank, and the water tank includes: An optical MEMS pressure sensing device as described in any one of claims 1-9 is disposed on the inner surface of the water tank.

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