Turnover test assembly

Abstract

The utility model relates to a turnover test assembly, which comprises a machine table and a test machine, the testing machine is arranged on the machine table in a turnover mode, and the testing machine can be turned over to a first position and a second position; wherein in the first position, the test machine is located at a wafer test station; at the second position, the testing machine leaves the wafer testing station; the overturning test assembly further comprises a locking mechanism, and the locking mechanism is used for locking the machine body of the test machine when the test machine is overturned to the first position. According to the technical scheme of the utility model, when the testing machine is overturned to the wafer testing station at the first position, the machine body of the testing machine can be locked through the locking mechanism, so that the machine body of the testing machine can be kept fixed, and the safety and controllability of the testing process are ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip test equipment technical field, in particular to a turnover test subassembly. BACKGROUND

[0002] The existing turnover test subassembly includes a machine table and a test machine. The machine table is a probe table machine table, and the test machine is arranged on the machine table in a turnover manner. The test machine can be turned to a first position and a second position. In the first position, the test machine is located at a wafer test station, and at this time, the test machine can test a wafer on the machine table. In the second position, the test machine leaves the wafer test station, which facilitates subsequent processing of the wafer, avoids obstruction, and also facilitates personnel to debug the test machine.

[0003] In the first position, the wafer test station requires the machine body to be fixed, otherwise it may adversely affect the test process. SUMMARY

[0004] Therefore, the utility model provides a turnover test subassembly, and mainly solves the technical problem of how to ensure that the machine body of the test machine is fixed in the wafer test station.

[0005] To achieve the above purpose, the utility model mainly provides the following technical scheme:

[0006] The embodiment of the utility model provides a turnover test subassembly, which comprises a machine table and a test machine. The test machine is arranged on the machine table in a turnover manner. The test machine can be turned to a first position and a second position. In the first position, the test machine is located at a wafer test station. In the second position, the test machine leaves the wafer test station.

[0007] The turnover test subassembly further comprises a locking mechanism. The locking mechanism is used to lock the machine body of the test machine when the test machine is turned to the first position.

[0008] In some embodiments, the locking mechanism comprises a locking piece. The locking piece is rotatably arranged on the machine table. When the locking piece is turned to a first position, the machine body of the test machine turned to the first position is locked on the machine table, so as to lock the machine body of the test machine turned to the first position. When the locking piece is turned to a second position, the machine body is released, so that the test machine can be turned from the first position to the second position.

[0009] In some embodiments, the machine body of the test machine is provided with a matching part. The matching part is detachable.

[0010] When the testing machine is flipped to the first position and the lock is rotated to the first position a, the lock fixes the machine body to the machine table by fixing the matching part.

[0011] In some embodiments, the side of the lock is provided with a groove; when the testing machine is flipped to the first position and the lock is rotated to the first position a, the lock fixes the matching part by the groove wall; when the testing machine is flipped to the first position and the lock is rotated to the second position a, the groove wall is moved away from the matching part to release the machine body.

[0012] In some embodiments, the matching part is in a columnar shape.

[0013] And / or, the machine table is provided with a support block, which is detachable; when the testing machine is flipped to the first position, the machine table provides support to the matching part through the support block.

[0014] In some embodiments, the number of locks is two, and they are arranged in sequence with intervals; both of the locks are rotatably arranged on the machine table through one end, and the other end of the two locks is connected through a connecting rod, and the other end of the two locks is hinged to the connecting rod.

[0015] In some embodiments, the two locks are synchronously rotatable to the first position a and the second position a through the connecting rod.

[0016] In some embodiments, when the machine body of the testing machine is provided with a matching part, the number of the matching parts is equal to the number of the locks and one-to-one correspondence.

[0017] In some embodiments, the flip testing assembly further comprises a driving mechanism for driving the lock to rotate to the first position a and the second position a.

[0018] In some embodiments, the driving mechanism comprises a driving cylinder, and the driving mechanism drives the lock to rotate to the first position a and the second position a through the driving cylinder.

[0019] By the above technical solution, the flip testing assembly has at least the following advantages:

[0020] When the testing machine is flipped to the first position of the wafer testing station, the machine body of the testing machine can be locked by the locking mechanism, so that the machine body can be kept stationary to ensure the safety and controllability of the testing process.

[0021] The above description is only a summary of the technical scheme of the present application, in order to more clearly understand the technical means of the present application, and can be implemented according to the content of the specification, the following is the preferred embodiment of the present application and the detailed description of the drawings as follows. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description, obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained from the structure shown in the drawings without creative labor.

[0023] Figure 1 is a schematic view of the locking structure of the flip test assembly unlocking the test machine, which is an embodiment of the present application;

[0024] Figure 2 is Figure 1 the enlarged schematic view of A in figure

[0025] Figure 3 is a structural schematic view of the locking mechanism locking the test machine.

[0026] Reference signs: 1, machine table; 2, test machine; 3, locking mechanism; 4, driving mechanism; 11, support block; 21, matching part; 30, groove; 31, locking piece; 32, connecting rod; 301, slot wall. DETAILED DESCRIPTION

[0027] The technical scheme in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application, obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor belong to the scope of protection of the present application.

[0028] It should be noted that if the present application embodiments involve directional indications (such as up, down, left, right, front, back, …), the directional indications are only used to explain the relative position relationship, movement condition and the like between the components in a certain specific posture (such as shown in the drawings), if the specific posture changes, the directional indications also change accordingly.

[0029] In addition, if the description of "first", "second" and the like is involved in the embodiments of the utility model, the description of "first", "second" and the like is only for the purpose of description, and cannot be understood as indicating or implying the relative importance of the indicated technical features or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included at least one of the features. In addition, the technical solutions of various embodiments can be combined with each other, but it must be based on the realization of ordinary skilled in the art, when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0030] As shown in Figure 1 An embodiment of the utility model provides a turnover test assembly, which comprises a table 1 and a test machine 2. The test machine 2 is arranged on the table 1 in a turnover mode. The test machine 2 can be turned to a first position and a second position. In the first position, the test machine 2 is located at a wafer test station, so that the test machine 2 can test the wafer on the table 1. In the second position, the test machine 2 leaves the wafer test station, to facilitate subsequent processing of the wafer, avoid obstruction, and facilitate personnel to debug the test machine 2.

[0031] The turnover test assembly of the utility model can further comprise a locking mechanism 3, which is used to lock the body of the test machine 2 when the test machine 2 is turned to the first position.

[0032] In the above example, when the test machine 2 is turned to the wafer test station in the first position, the body of the test machine 2 can be locked by the locking mechanism 3, so that the body of the test machine 2 can be kept stationary to ensure the safety and controllability of the test process.

[0033] In order to realize the function of the above-mentioned locking mechanism 3, in some embodiments, as shown in Figures 2-3 The locking mechanism 3 can comprise a locking piece 31, which is rotatably arranged on the table 1. The locking piece 31 is used to lock the body of the test machine 2 turned to the first position on the table 1 when the locking piece 31 is turned to the first position a, to lock the body of the test machine 2 turned to the first position. The locking piece 31 is also used to unlock the body of the test machine 2 when the locking piece 31 is turned to the second position a, to realize the unlocking of the test machine 2, so that the test machine 2 can be turned from the first position to the second position.

[0034] In the above example, by turning the locking piece 31 to the first position a and the second position a, the locking and unlocking of the body of the test machine 2 can be realized, which is convenient to operate.

[0035] In some embodiments, as shown in Figures 2-3As shown, the body of the aforementioned testing machine 2 can be provided with a cooperating part 21, which can be in a columnar shape, so that the cooperating part 21 forms a pressing column. The cooperating part 21 is detachable, for example, the cooperating part 21 can be detachably fixed on the body of the testing machine 2 by screws or the like. When the testing machine 2 is flipped to the first position and the locking piece 31 is rotated to the first position a, the locking piece 31 fixes the body against the machine table 1 by abutting against the cooperating part 21.

[0036] In the aforementioned example, the cooperating part 21 cooperates with the locking piece 31 to lock the body of the testing machine 2, and the cooperating part 21 is prone to wear. Since the cooperating part 21 is detachable, when the cooperating part 21 is damaged, it can be replaced in time.

[0037] In some embodiments, as shown in Figures 2-3 The side surface of the aforementioned locking piece 31 can be provided with a groove 30. When the testing machine 2 is flipped to the first position and the locking piece 31 is rotated to the first position a, the locking piece 31 abuts against the cooperating part 21 through the groove wall 301. When the testing machine 2 is flipped to the first position and the locking piece 31 is rotated to the second position a, the groove wall 301 moves away from the cooperating part 21 to release the body.

[0038] In the aforementioned example, the groove 30 can abut against the cooperating part 21 through the groove wall 301 on one hand, and on the other hand, the groove 30 also has the effect of strengthening the structural strength of the locking piece 31.

[0039] In some embodiments, as shown in Figures 2-3 The aforementioned machine table 1 can be provided with a supporting block 11, which is detachable, for example, the supporting block 11 can be detachably fixed on the machine table 1 by screws or the like. When the testing machine 2 is flipped to the first position, the machine table 1 provides support to the cooperating part 21 through the supporting block 11.

[0040] In the aforementioned example, the supporting block 11 cooperates with the cooperating part 21 to provide support to the testing machine 2, and the supporting block 11 is prone to wear, and by making the supporting block 11 detachable, when the supporting block 11 is damaged, it can be replaced in time.

[0041] In some embodiments, the aforementioned locking piece 31 can be two in number and arranged in sequence. Both of the two locking pieces 31 are rotatably arranged on the machine table 1 through one end of each locking piece 31. The other end of the two locking pieces 31 is connected by a connecting rod 32, and the other end of the two locking pieces 31 is hinged to the connecting rod 32. The two locking pieces 31 can be synchronously rotated to the aforementioned first position a and second position a through the connecting rod 32.

[0042] In the above example, relative to a single lock piece 31, the structure of the two lock pieces 31 can improve the locking effect on the body of the test machine 2. In addition, since the two lock pieces 31, the machine table 1 and the connecting rod 32 form a planar four-bar mechanism, the two lock pieces 31 can be linked to achieve multiple lock parallel locking, thereby improving the locking and unlocking efficiency.

[0043] It should be noted that when the body of the test machine 2 is provided with the matching part 21, the number of the matching part 21 is equal to the number of the lock piece 31 and one-to-one correspondence. The support block 11 provides support to the matching part 21 through the support surface. In the design and installation, it is necessary to ensure that the two matching parts 21 and their support surfaces are on the same horizontal plane.

[0044] In some embodiments, as shown in Figures 2-3 The flip test assembly can further include a driving mechanism 4 for driving the lock piece 31 to rotate to the first position a and the second position a.

[0045] By setting the driving mechanism 4 to drive the lock piece 31 to move, the manpower can be saved.

[0046] In order to realize the function of the driving mechanism 4, in some embodiments, the driving mechanism 4 can include a driving cylinder, which can be a gas cylinder or the like. The driving mechanism 4 drives the lock piece 31 to rotate to the first position a and the second position a through the driving cylinder.

[0047] In the above example, the parallel link mechanism can convert the cylinder force into the force arm torque.

[0048] The above is only the preferred embodiment of the present application, and does not limit the patent range of the present application. Any equivalent structural transformation made by using the content of the present application specification and drawings, or direct / indirect application in other related technical fields is included in the patent protection range of the present application.

Claims

1. A flip test assembly characterized by, The test assembly comprises a machine table (1) and a test machine (2); the test machine (2) is reversibly arranged on the machine table (1), and the test machine (2) can be reversed to a first position and a second position; wherein, in the first position, the test machine (2) is located at a wafer test station; in the second position, the test machine (2) leaves the wafer test station; The test assembly further comprises a locking mechanism (3), which is used to lock the body of the test machine (2) when the test machine (2) is reversed to the first position.

2. The test assembly according to claim 1, wherein The locking mechanism (3) comprises a locking piece (31), which is rotatably arranged on the machine table (1); the locking piece (31) is used to rotate to a first position a to lock the body of the test machine (2) reversed to the first position on the machine table (1), so as to lock the body of the test machine (2) reversed to the first position; the locking piece (31) is also used to rotate to a second position a to release the body, so that the test machine (2) can be reversed from the first position to the second position.

3. The test assembly according to claim 2, wherein The body of the test machine (2) is provided with a matching part (21), and the matching part (21) is detachable; When the test machine (2) is reversed to the first position and the locking piece (31) is rotated to the first position a, the locking piece (31) locks the body on the machine table (1) by locking the matching part (21).

4. The test assembly according to claim 3, wherein The side surface of the locking piece (31) is provided with a groove (30); when the test machine (2) is reversed to the first position and the locking piece (31) is rotated to the first position a, the locking piece (31) locks the matching part (21) by the groove wall (301) of the groove; when the test machine (2) is reversed to the first position and the locking piece (31) is rotated to the second position a, the groove wall (301) moves away from the matching part (21) to release the body.

5. The test assembly according to claim 3 or 4, wherein The matching part (21) is in a columnar shape; And / or, the machine table (1) is provided with a supporting block (11), and the supporting block (11) is detachable; when the test machine (2) is reversed to the first position, the machine table (1) supports the matching part (21) through the supporting block (11).

6. The test assembly according to any one of claims 2-4, wherein The number of the locking pieces (31) is two, and the two locking pieces (31) are arranged in sequence and at intervals; one end of each of the two locking pieces (31) is rotatably arranged on the machine table (1), and the other end of each of the two locking pieces (31) is connected through a connecting rod (32), and the other end of each of the two locking pieces (31) is hinged on the connecting rod (32). Two of the locking pieces (31) are synchronously rotatable to the first a position and the second a position by the connecting rod (32).

7. The flip test assembly of claim 6, wherein, When the test machine (2) is provided with a matching part (21) on the body, the number of the matching parts (21) is equal to the number of the locking pieces (31) and one-to-one correspondence.

8. The flip test assembly of any of claims 2-4, wherein, Further comprising a driving mechanism (4) for driving the locking pieces (31) to rotate to the first a position and the second a position.

9. The flip test assembly of claim 8, wherein, The driving mechanism (4) comprises a driving cylinder, and the driving mechanism (4) drives the locking pieces (31) to rotate to the first a position and the second a position by the driving cylinder.

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