Silicon wafer basket assembly line equipment

Abstract

The utility model relates to silicon wafer basket assembly line equipment which comprises a rack, an input conveying belt, an output conveying belt and a lifting mechanism. The rack is of a double-layer structure and comprises an upper layer and a lower layer. The input conveyor belt is mounted on the lower layer of the rack; the output conveyor belt is mounted on the upper layer of the rack; the lifting mechanism is installed on one side of the rack, penetrates through the upper layer and the lower layer of the rack and is connected with the input conveying belt and the output conveying belt, and the input conveying belt and the output conveying belt are located on the same side of the lifting mechanism. The input conveying belts, the output conveying belts and the lifting mechanisms are arranged side by side. According to the silicon wafer conveying device, the rack of a double-layer structure is utilized, the input conveying belt, the output conveying belt and the lifting mechanism are reasonably arranged, efficient input and lifting output of the silicon wafer baskets are achieved, a double-channel conveying mode is adopted, the feeding and discharging rhythms of the silicon wafer baskets are improved, and the conveying efficiency of silicon wafers is remarkably improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of silicon wafer production, in particular to a silicon wafer flower basket assembly line device. BACKGROUND

[0002] Silicon wafer refers to a thin sheet or sheet substrate made of high-purity silicon material, which is the direct downstream of polycrystalline silicon. According to different application scenarios, silicon wafers can be divided into photovoltaic silicon wafers and semiconductor silicon wafers. In the photovoltaic field, silicon wafers are made of solar-grade polycrystalline silicon as raw material, mainly used for the manufacture of downstream photovoltaic cells. At present, photovoltaic silicon wafers are mainly in single crystal form. In the semiconductor field, semiconductor silicon wafers are usually made of electronic-grade polycrystalline silicon as raw material, and after processes such as crystal pulling and slicing, they become single crystal silicon wafers, which are further processed into wafers. It is the basic material of integrated circuits, transistors and other semiconductor devices. No matter which kind of silicon wafer, its production process needs to convey the silicon wafer to transfer between different processes, and in order to realize the efficient conveying of the silicon wafer, the flower basket structure is often used. For example, Chinese patent 201220437239.1 discloses a flower basket conveying device, which conveys the flower basket loaded with silicon wafers through a conveying belt, but it can only realize the horizontal transportation of a single flower basket, occupies a large area, has simple functions and low production efficiency. CONTENT OF THE UTILITY MODEL

[0003] The present application provides a silicon wafer flower basket assembly line device to solve the problem of large occupation area, simple function and low efficiency of conveying silicon wafers of the flower basket conveying device in the prior art.

[0004] According to the silicon wafer flower basket assembly line device provided by the present application, the silicon wafer flower basket assembly line device comprises:

[0005] The rack is a double-layer structure comprising an upper layer and a lower layer;

[0006] The input conveying belt is installed on the lower layer of the rack;

[0007] The output conveying belt is installed on the upper layer of the rack;

[0008] The lifting mechanism is installed on one side of the rack and penetrates the upper layer and the lower layer of the rack. The lifting mechanism is connected to the input conveying belt and the output conveying belt, and the input conveying belt and the output conveying belt are located on the same side of the lifting mechanism. The input conveying belt, the output conveying belt and the lifting mechanism are provided with two groups of parallel structures.

[0009] In some embodiments, the lifting mechanism comprises a driving motor, a lead screw, a lifting nut and a lifting platform. The lead screw is vertically arranged and connected to the output end of the driving motor. The lifting nut is threadedly connected to the lead screw. The lifting platform is connected to the lifting nut.

[0010] In some embodiments, the lifting mechanism further comprises a lifting guide rod, the lifting guide rod is provided with a plurality of lifting guide rods which are arranged in parallel around the screw rod, and the lifting platform is further connected with the lifting guide rod.

[0011] In some embodiments, the lifting guide rod is provided with four lifting guide rods which are arranged symmetrically around the screw rod.

[0012] In some embodiments, the top of the lifting guide rod is provided with a mounting plate, the mounting plate is provided with a buffer cylinder, the piston rod of the buffer cylinder is arranged downward and can contact the flower basket placed on the lifting platform.

[0013] In some embodiments, the input conveyor belt comprises an input motor, an input driving roller and an input synchronous belt, the input motor is connected with the input driving roller, and the input synchronous belt is sleeved on the input driving roller.

[0014] In some embodiments, the input conveyor belt further comprises a counting sensor, the counting sensor is arranged in the range of the input synchronous belt, and the detection end of the counting sensor faces the running path of the flower basket.

[0015] In some embodiments, the output conveyor belt comprises an output motor, an output driving roller and an output synchronous belt, the output motor is connected with the output driving roller, and the output synchronous belt is sleeved on the output driving roller.

[0016] In some embodiments, the lower layer of the rack is longer than the upper layer, the input conveyor belt is longer than the output conveyor belt, and the initial end of the input conveyor belt is vacant.

[0017] In some embodiments, the rack is assembled by aluminum profiles.

[0018] The technical scheme of the present application, the silicon wafer flower basket assembly line equipment comprises a rack, an input conveyor belt, an output conveyor belt and a lifting mechanism; the rack is a double-layer structure comprising an upper layer and a lower layer; the input conveyor belt is installed on the lower layer of the rack; the output conveyor belt is installed on the upper layer of the rack; the lifting mechanism is installed on one side of the rack and penetrates through the upper layer and the lower layer of the rack, the lifting mechanism is connected with the input conveyor belt and the output conveyor belt respectively, and the input conveyor belt and the output conveyor belt are located on the same side of the lifting mechanism; the input conveyor belt, the output conveyor belt and the lifting mechanism are all provided with two groups in parallel. The present application utilizes the rack with a double-layer structure, reasonably arranges the input conveyor belt, the output conveyor belt and the lifting mechanism, realizes efficient input and output of the silicon wafer flower basket, and can meet the requirement of inputting at the bottom layer and outputting at the upper layer; wherein the input conveyor belt and the output conveyor belt are arranged on the same side of the lifting mechanism, so that the equipment occupies less area and saves production space; at the same time, the input conveyor belt, the output conveyor belt and the lifting mechanism are all provided with two groups in parallel, which can realize double-channel silicon wafer flower basket transportation and significantly improve the transportation efficiency of the silicon wafer. BRIEF DESCRIPTION OF DRAWINGS

[0019] The accompanying drawings, which are incorporated herein and constitute part of the specification, illustrate embodiments consistent with the application and, together with the description, function to explain the principles of the application.

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the accompanying drawings required by the embodiments or prior art description will be briefly introduced as follows. Obviously, those skilled in the art can obtain other drawings according to these drawings without any creative effort.

[0021] Figure 1 A front view structural schematic diagram of a wafer basket flow line device according to an embodiment of the present application is shown.

[0022] Figure 2 A left view structural schematic diagram of a wafer basket flow line device according to an embodiment of the present application is shown.

[0023] Figure 3 A top view structural schematic diagram of a wafer basket flow line device according to an embodiment of the present application is shown.

[0024] Among them, the above-mentioned drawings include the following reference signs:

[0025] 1, rack; 2, input conveyor belt; 21, input motor; 22, input driving roller; 23, input synchronous belt; 24, counting sensor; 3, output conveyor belt; 31, output motor; 32, output driving roller; 33, output synchronous belt; 4, lifting mechanism; 41, driving motor; 42, lead screw; 43, lifting nut; 44, lifting platform; 45, lifting guide rod; 46, mounting plate; 47, buffer air cylinder; 5, basket. DETAILED DESCRIPTION

[0026] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0027] It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the present application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art.

[0028] For purposes of the description hereinafter, the terms "upper", "lower", "right", "left", "vertical", "horizontal", "top", "bottom", "lateral", "medial", and derivatives thereof (e.g., "vertical ly", "horizontally", etc.) can refer to the relative positions on a device as shown by the figures. However, when a device is turned over or rotated 90 degrees, the relative positions on the device will of course be reversed. Thus, the exemplary term "lower" can refer to what is otherwise described as the upper when the device is inverted or otherwise turned right side up. Likewise, the exemplary terms "upper" and "lower" can refer to what is otherwise described as the lower and upper, respectively, when the device is inverted or otherwise turned right side up. The exemplary terms "right" and "left" can refer to what is otherwise described as the left and right, respectively, when the device is inverted or otherwise turned right side up. The exemplary terms "horizontal" and "vertical" can refer to what is otherwise described as the vertical and horizontal, respectively, when the device is inverted or otherwise turned right side up. Therefore, the specific spatial and directional terms referenced above are used in connection with the examples disclosed herein for purposes of explanation only, and do not serve as limitations of the present application. It is understood that the spatial and directional terms can be interchanged under appropriate circumstances, so that the disclosed examples can be practiced in other orientations than those explicitly described or claimed.

[0029] It is to be noted that the terms "first", "second", and the like herein do not denote any

[0030] It is to be understood that the terms "including", "comprising", "consisting" and "having" and variations thereof herein are intended to be open-ended and do not exclude additional steps, components or elements. For example, it is intended that steps, components or elements not expressly listed are optional and can be added to those processes, compositions, systems, devices, or apparatuses.

[0031] Figures 1 to 3 An embodiment of a wafer basket flow line apparatus of the present application is schematically illustrated. A wafer basket flow line apparatus is disclosed for enabling low level loading and high level unloading of wafers for material transfer between stations.

[0032] As Figures 1 to 3As shown, the silicon wafer basket assembly line equipment of this application embodiment includes: a frame 1, which has a double-layer structure, including an upper layer and a lower layer; an input conveyor belt 2, which is installed on the lower layer of the frame 1; an output conveyor belt 3, which is installed on the upper layer of the frame 1; and a lifting mechanism 4, which is installed on one side of the frame 1, passing through the upper and lower layers of the frame 1. The lifting mechanism 4 is connected to the input conveyor belt 2 and the output conveyor belt 3, and the input conveyor belt 2 and the output conveyor belt 3 are located on the same side of the lifting mechanism 4. The input conveyor belt 2, the output conveyor belt 3, and the lifting mechanism 4 are all provided in two parallel sets.

[0033] Through the above structural design, this application utilizes a double-layer frame 1 and rationally arranges the input conveyor belt 2, output conveyor belt 3, and lifting mechanism 4 to achieve efficient input and output of the silicon wafer basket 5, meeting the requirements of silicon wafers being input from the bottom layer to output from the top layer. Among them, the input conveyor belt 2 and the output conveyor belt 3 are set on the same side of the lifting mechanism 4, making the equipment occupy a smaller area and saving production space. At the same time, the input conveyor belt 2, the output conveyor belt 3, and the lifting mechanism 4 are all set in two parallel sets, which can realize dual-channel silicon wafer basket 5 transportation, significantly improving the silicon wafer transportation efficiency.

[0034] In some embodiments of this application, such as Figures 1 to 3 As shown, the lifting mechanism 4 includes a drive motor 41, a lead screw 42, a lifting nut 43, and a lifting platform 44. The lead screw 42 is vertically arranged and connected to the output end of the drive motor 41, and is driven by the drive motor 41. The lifting nut 43 is threadedly connected to the lead screw 42, and the lifting platform 44 is connected to the lifting nut 43, moving up and down with the lifting nut 43. In this embodiment, the drive motor 41 is located below the lead screw 42, and its output end is connected upward to the lead screw 42, which can make full use of the bottom space of the frame 1, making the structure of the device more compact and smaller in size. The lifting pair composed of the lead screw 42 and the lifting nut 43 can convert rotational motion into linear motion, which is simple and easy to control, and can effectively ensure the stability of the basket 5 during the lifting process, protecting the multilayer silicon wafers loaded in the basket 5 from collisions and displacement risks. In some preferred embodiments of this application, the lead screw 42 and the lifting nut 43 adopt a ball screw pair, which has better lubrication, lower resistance, and longer service life.

[0035] In some embodiments of this application, such as Figures 1 to 3 As shown, the lifting mechanism 4 also includes multiple lifting guide rods 45, which are arranged parallel to each other around the lead screw 42. The lifting platform 44 is also connected to the lifting guide rods 45. The lifting guide rods 45 can further stabilize the movement of the lifting platform 44, avoid minor vibrations and swaying, and reliably ensure the safety of the silicon wafer. In the embodiments of this application, as... Figure 2As shown, the lifting platform 44 is fixedly connected with the lifting guide rod 45, the lifting guide rod 45 is lifted together with the lifting platform 44, and the lifting guide rod 45 is slidably connected with the rack 1 to realize lifting guidance. The lifting guide rod 45 and the rack 1 can be connected through a linear bearing to reduce resistance and improve the smoothness of sliding.

[0036] In some embodiments of the present application, as shown in Figures 1 to 3 As shown, the lifting guide rod 45 is provided with four lifting guide rods 45, which are symmetrically arranged around the lead screw 42 in a central symmetric manner to improve the guiding effect.

[0037] In some embodiments of the present application, as shown in Figures 1 to 3 As shown, the top of the lifting guide rod 45 is provided with a mounting plate 46, the mounting plate 46 is provided with a buffer air cylinder 47, the piston rod of the buffer air cylinder 47 is arranged downward and can contact the flower basket 5 placed on the lifting platform 44 to stabilize the position of the flower basket 5 through contact and relieve the impact during the lifting of the flower basket 5. Thus, in the embodiments of the present application, the lifting platform 44, the lifting guide rod 45 and the mounting plate 46 form a semi-enclosed containing space to effectively protect the flower basket 5 safe and stable, and avoid the flower basket 5 from falling and causing serious equipment failure. In actual transportation process, after the input conveyor belt 2 transports the flower basket 5 to the lifting platform 44, the buffer air cylinder 47 extends the piston rod downward, and the piston rod stops after contacting the top of the flower basket 5, thereby stabilizing the flower basket 5 and buffering the upward impact received by the flower basket 5.

[0038] In some embodiments of the present application, as shown in Figure 1 As shown, the input conveyor belt 2 includes an input motor 21, an input driving roller 22 and an input synchronous belt 23, the input motor 21 is connected with the input driving roller 22, and the input synchronous belt 23 is sleeved on the input driving roller 22. The input driving roller 22 drives the input synchronous belt 23 to ensure stable operation of the input synchronous belt 23 and reliably realize the feeding and transportation of the flower basket 5.

[0039] In some embodiments of the present application, as shown in Figure 1 As shown, the input conveyor belt 2 further includes a counting sensor 24, the counting sensor 24 is arranged in the range of the input synchronous belt 23, and the detection end thereof faces the running path of the flower basket 5. Through the counting sensor 24, the feeding of the flower basket 5 can be counted, thereby providing feedback data for production and facilitating management and control. In addition, the counting sensor 24 can also be used to detect whether the flower basket 5 exists or not and judge whether the input conveyor belt 2 works normally.

[0040] In some embodiments of the present application, as shown in Figure 1As shown, the output conveying belt 3 comprises an output motor 31, an output driving roller 32 and an output synchronous belt 33, the output motor 31 is connected with the output driving roller 32, and the output synchronous belt 33 is sleeved on the output driving roller 32.

[0041] In some embodiments of the present application, a pushing mechanism (not shown) is further arranged between the lifting mechanism 4 and the output conveying belt 3, and the pushing mechanism is linked with the buffer cylinder 47. After the piston rod of the buffer cylinder 47 is lifted, the flower basket 5 is pushed to transfer the flower basket 5 from the lifting platform 44 to the output conveying belt 3. The pushing mechanism comprises a pushing cylinder, which is transversely arranged at the lifting platform 44 and located at the opposite side of the lifting mechanism relative to the output conveying belt. The piston rod of the pushing cylinder is arranged towards the output conveying belt 3 to transfer the flower basket 5 to the output conveying belt 3 by pushing.

[0042] In some embodiments of the present application, as shown in Figure 1 and Figure 3 The lower layer of the rack 1 is longer than the upper layer, and correspondingly, the input conveying belt 2 is also longer than the output conveying belt 3. Therefore, the space above the initial end (i.e. the left end) of the input conveying belt 2 is vacant, which can provide sufficient space for the loading process of the flower basket 5, avoid the flower basket 5 from being bumped during loading, and effectively improve the loading speed and safety.

[0043] In some embodiments of the present application, the rack 1 is assembled by aluminum profiles, which is low in material cost, simple in structure and has sufficient mechanical strength.

[0044] In summary, the silicon wafer flower basket assembly line equipment of the embodiments of the present application comprises a rack, an input conveying belt, an output conveying belt and a lifting mechanism. The rack is a double-layer structure comprising an upper layer and a lower layer. The input conveying belt is installed on the lower layer of the rack. The output conveying belt is installed on the upper layer of the rack. The lifting mechanism is installed on one side of the rack and penetrates through the upper layer and the lower layer of the rack. The lifting mechanism is connected with the input conveying belt and the output conveying belt respectively, and the input conveying belt and the output conveying belt are located on the same side of the lifting mechanism. The input conveying belt, the output conveying belt and the lifting mechanism are all provided with two groups arranged side by side. The present application utilizes the double-layer structure of the rack to reasonably arrange the input conveying belt, the output conveying belt and the lifting mechanism, realizes the efficient input and output of the silicon wafer flower basket, and can meet the requirement of inputting from the bottom layer to outputting from the upper layer. The input conveying belt and the output conveying belt are arranged on the same side of the lifting mechanism, so that the equipment occupies less floor area and saves production space. Meanwhile, the input conveying belt, the output conveying belt and the lifting mechanism are all provided with two groups arranged side by side, which can realize double-channel transportation of the silicon wafer flower basket and significantly improve the transportation efficiency of the silicon wafer.

[0045] The above merely provides preferred embodiments of the present application, and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the principles and technical scope of the present application shall fall into the scope of the present application.

Claims

1. A silicon wafer basket assembly line device, characterized in that, include: The frame (1) is a double-layer structure, comprising an upper layer and a lower layer; An input conveyor belt (2) is installed on the lower layer of the frame (1); Output conveyor belt (3), which is installed on the upper layer of the frame (1); A lifting mechanism (4) is installed on one side of the frame (1), passing through the upper and lower layers of the frame (1). The lifting mechanism (4) is connected to the input conveyor belt (2) and the output conveyor belt (3) respectively, and the input conveyor belt (2) and the output conveyor belt (3) are located on the same side of the lifting mechanism (4). The input conveyor belt (2), the output conveyor belt (3) and the lifting mechanism (4) are each provided with two sets in parallel.

2. The silicon wafer basket assembly line equipment according to claim 1, characterized in that, The lifting mechanism (4) includes: a drive motor (41), a lead screw (42), a lifting nut (43), and a lifting platform (44); the lead screw (42) is vertically arranged and connected to the output end of the drive motor (41); the lifting nut (43) is threadedly connected to the lead screw (42); and the lifting platform (44) is connected to the lifting nut (43).

3. The silicon wafer basket assembly line equipment according to claim 2, characterized in that, The lifting mechanism (4) also includes lifting guide rods (45), and there are multiple lifting guide rods (45) arranged in parallel around the lead screw (42). The lifting platform (44) is also connected to the lifting guide rods (45).

4. The silicon wafer basket assembly line equipment according to claim 3, characterized in that, The lifting guide rod (45) is provided in four parts, and the four lifting guide rods (45) are symmetrically arranged with the lead screw (42) as the center.

5. The silicon wafer basket assembly line equipment according to claim 3, characterized in that, The top of the lifting guide rod (45) is provided with a mounting plate (46), and a buffer cylinder (47) is provided on the mounting plate (46). The piston rod of the buffer cylinder (47) is set downward and can contact the flower basket (5) placed on the lifting platform (44).

6. The silicon wafer basket assembly line equipment according to claim 1, characterized in that, The input conveyor belt (2) includes an input motor (21), an input drive roller (22), and an input synchronous belt (23). The input motor (21) is connected to the input drive roller (22), and the input synchronous belt (23) is fitted on the input drive roller (22).

7. The silicon wafer basket assembly line equipment according to claim 6, characterized in that, The input conveyor belt (2) further includes a counting sensor (24), which is located within the range of the input synchronization belt (23) and its detection end is directed toward the travel path of the flower basket (5).

8. The silicon wafer basket assembly line equipment according to claim 1, characterized in that, The output conveyor belt (3) includes an output motor (31), an output drive roller (32), and an output synchronous belt (33). The output motor (31) is connected to the output drive roller (32), and the output synchronous belt (33) is sleeved on the output drive roller (32).

9. The silicon wafer basket assembly line equipment according to claim 1, characterized in that, The lower layer of the frame (1) is longer than the upper layer, the input conveyor belt (2) is longer than the output conveyor belt (3), and there is no space above the beginning of the input conveyor belt (2).

10. The silicon wafer basket assembly line equipment according to claim 1, characterized in that, The frame (1) is assembled from aluminum profiles.

Images