Automatic alignment device for silicon optical wafer test

Abstract

The utility model discloses an automatic alignment device for testing a silicon optical wafer, which comprises a bottom plate, a first alignment plate arranged at the top of the bottom plate, a second alignment plate arranged at the top of the first alignment plate, and four guide assemblies uniformly arranged between the first alignment plate and the bottom plate, the guide assembly comprises two first guide rails fixedly connected to the bottom of the bottom plate, first sliding blocks slidably connected to the outer sides of the first guide rails, two second guide rails fixedly connected to the tops of the first sliding blocks and perpendicular to the first guide rails, and second sliding blocks slidably connected to the outer sides of the second guide rails. The first alignment plate is fixedly connected to the tops of the four second sliding blocks, a first alignment assembly used for driving the first sliding blocks to move horizontally is arranged on the side, close to the first sliding blocks, of the top of the bottom plate, and a second alignment assembly used for driving the second sliding blocks to move horizontally is arranged on one sides of the first sliding blocks. Through the above structure, the precise guide assembly and the precise alignment assembly can realize precise alignment in the silicon optical wafer testing process, and the testing efficiency and accuracy are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon light wafer test, especially relates to a kind of automatic alignment device for silicon light wafer test. BACKGROUND

[0002] With the progress of information technology and the increasing demand for data transmission speed and bandwidth, silicon photonics, as an emerging technology, has gradually become an important means to solve the performance bottleneck of traditional electronic devices. Silicon photonics uses the photoelectric properties of silicon materials to combine optical signals with electronic signals, achieving efficient information processing and transmission.

[0003] In the production and testing process of silicon light wafer, it is crucial to ensure the accurate alignment of the optoelectronic devices on the wafer. When the robot in the equipment mechanical module takes out the silicon light wafer from the wafer box and sends it to the testing platform. After the wafer is placed on the platform, the center of the wafer may deviate due to inaccurate positioning, and the wafer needs to be aligned to ensure the accuracy of the position precision. Therefore, the technical personnel in the field provide an automatic alignment device for silicon light wafer test to solve the problems raised in the background technology. SUMMARY

[0004] The utility model aims at providing an automatic alignment device for silicon light wafer test, which can achieve accurate alignment in the testing process of silicon light wafer through precise guide components and alignment components, improving the testing efficiency and accuracy.

[0005] To achieve the above-mentioned purpose, an automatic alignment device for silicon light wafer test is provided, which includes a bottom plate, a first alignment plate is provided on the top of the bottom plate, a second alignment plate is provided on the top of the first alignment plate, four guide components are evenly provided between the first alignment plate and the bottom plate, the guide component includes two first guide rails fixedly connected to the bottom of the bottom plate, a first sliding block slidingly connected to the outer side of the first guide rail, two second guide rails fixedly connected to the top of the first sliding block and arranged perpendicular to the first guide rail, and a second sliding block slidingly connected to the outer side of the second guide rail, the first alignment plate is fixedly connected to the top of the four second sliding blocks, a first alignment component is provided on the top of the bottom plate and close to one side of the first sliding block to drive the horizontal movement of the first sliding block, a second alignment component is provided on one side of the first sliding block to drive the horizontal movement of the second sliding block, and a third alignment component is provided on the top of the first alignment plate and symmetrically located on both sides of the second alignment plate to drive the up-down movement of the second alignment plate.

[0006] According to the automatic alignment device for silicon light wafer test, the first alignment component includes a first motor fixedly connected to the top of the bottom plate and a first lead screw threadedly connected to the inside of the first sliding block, and the first lead screw is fixedly connected with the output shaft of the first motor.

[0007] According to the automatic alignment device for silicon light wafer testing, the second alignment assembly comprises a support plate fixedly connected to one side of the first sliding block, a second motor fixedly connected to the top of the support plate and a second screw rod threadedly connected to the inside of the second sliding block, and the second screw rod is fixedly connected with the output shaft of the second motor.

[0008] According to the automatic alignment device for silicon light wafer testing, the third alignment assembly comprises a mounting frame fixedly connected to the top of the first alignment plate, a third screw rod rotatably connected to the inside of the mounting frame, a third motor fixedly connected to the top of the mounting frame and a movable plate threadedly connected to the outside of the third screw rod, the top end of the third screw rod penetrates through the inside of the mounting frame and is fixedly connected with the output shaft of the third motor, and the second alignment plate is fixedly connected between the movable plates.

[0009] According to the automatic alignment device for silicon light wafer testing, the first guide rail and the second guide rail are both trapezoidal structures.

[0010] According to the automatic alignment device for silicon light wafer testing, the movable plates are slidably connected with guide rods inside the movable plates, and the bottom ends of the guide rods are fixedly connected with the top of the first alignment plate.

[0011] The automatic alignment device for silicon light wafer testing has the following beneficial effects:

[0012] Compared with the prior art, the automatic alignment device for silicon light wafer testing adjusts the horizontal position of the silicon light wafer through the first alignment assembly and the second alignment assembly, and adjusts the vertical position of the silicon light wafer through the third alignment assembly, so that accurate alignment in the silicon light wafer testing process can be realized through the precise guide assembly and the alignment assembly, and the testing efficiency and accuracy are improved.

[0013] Additional aspects and advantages of the present application will be given in part in the following description, some of which will become apparent from the following description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0014] The present application will be further described below in combination with the drawings and embodiments.

[0015] Figure 1 It is a whole structure schematic view of the automatic alignment device for silicon light wafer testing.

[0016] Figure 2 It is a third alignment assembly structure schematic view of the automatic alignment device for silicon light wafer testing.

[0017] Figure 3 It is a first alignment assembly and second alignment assembly structure schematic view of the automatic alignment device for silicon light wafer testing.

[0018] Legend:

[0019] 1, bottom plate; 2, first alignment plate; 3, second alignment plate; 4, first slider; 5, first guide rail; 6, second slider; 7, second guide rail; 8, first motor; 9, first screw; 10, second motor; 11, second screw; 12, support plate; 13, mounting frame; 14, third screw; 15, movable plate; 16, third motor; 17, guide rod. DETAILED DESCRIPTION

[0020] This part will describe the specific embodiments of the utility model in detail, the preferred embodiment of the utility model is shown in the drawings, the role of the drawings is to supplement the description of the text part with graphics, so that people can intuitively and visually understand each technical feature and the overall technical scheme of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0021] Referring to Figure 1 , Figure 2 and Figure 3 , the utility model discloses an automatic alignment device for silicon light wafer test, the bottom plate 1, the bottom plate 1 top is equipped with the first alignment plate 2, the first alignment plate 2 top is equipped with the second alignment plate 3, the first alignment plate 2 and the bottom plate 1 between evenly be equipped with four guide assemblies, and the guide assembly includes two first guide rails 5 fixedly connected to the bottom of the bottom plate 1, the first slider 4 slidingly connected to the outer side of the first guide rail 5, two second guide rails 7 fixedly connected to the top of the first slider 4 and arranged perpendicularly with the first guide rail 5 and the second slider 6 slidingly connected to the outer side of the second guide rail 7, the first guide rail 5 and the second guide rail 7 are all trapezoidal structures, the first alignment plate 2 is fixedly connected to the top of four second sliders 6, and the bottom plate 1 top and one side close to the first slider 4 is equipped with the first alignment assembly for driving the first slider 4 horizontal movement, the first slider 4 one side is equipped with the second alignment assembly for driving the second slider 6 horizontal movement, and the first alignment plate 2 top and the two sides of the second alignment plate 3 are symmetrically equipped with the third alignment assembly for driving the second alignment plate 3 up and down movement.

[0022] The middle part of the second alignment plate 3 is provided with a placing groove for placing the silicon light wafer to be tested, the first alignment assembly and the second alignment assembly are used for adjusting the horizontal position of the silicon light wafer, and the third alignment assembly is used for adjusting the vertical position of the silicon light wafer, so that through the precise guide assembly and the alignment assembly, the accurate alignment in the silicon light wafer test process can be realized, and the test efficiency and accuracy are improved.

[0023] In order to realize the horizontal movement of the first alignment plate 2, the first alignment assembly includes a first motor 8 fixedly connected to the top of the bottom plate 1 and a first screw 9 threadedly connected to the inside of the first slider 4, and the first screw 9 is fixedly connected with the output shaft of the first motor 8.

[0024] When the first motor 8 starts, the first slide block 4 will be driven to move horizontally along the first guide rail 5 by the first screw rod 9, thereby realizing accurate positioning of the first positioning plate 2.

[0025] In order to further realize fine adjustment of the second positioning plate 3 in the horizontal direction, the second positioning assembly includes a support plate 12 fixedly connected to one side of the first slide block 4, a second motor 10 fixedly connected to the top of the support plate 12, and a second screw rod 11 screwedly connected to the inside of the second slide block 6, the second screw rod 11 being fixedly connected with the output shaft of the second motor 10.

[0026] When the second motor 10 starts, the second slide block 6 will be driven to move horizontally along the second guide rail 7 by the second screw rod 11, thereby realizing accurate positioning of the second positioning plate 3 in another direction.

[0027] In order to realize movement of the second positioning plate 3 in the vertical direction, the third positioning assembly includes a mounting frame 13 fixedly connected to the top of the first positioning plate 2, a third screw rod 14 rotatably connected to the inside of the mounting frame 13, a third motor 16 fixedly connected to the top of the mounting frame 13, and movable plates 15 screwedly connected to the outside of the third screw rod 14, the top end of the third screw rod 14 penetrating through the inside of the mounting frame 13 and being fixedly connected with the output shaft of the third motor 16, the second positioning plate 3 being fixedly connected between the movable plates 15, guide rods 17 being slidably connected in the inside of the movable plates 15, the bottom ends of the guide rods 17 being fixedly connected with the top of the first positioning plate 2, the movable plates 15 sliding on the outside of the guide rods 17 when moving up and down, thereby ensuring stability of movement.

[0028] When the third motor 16 starts, the movable plates 15 will be driven to move up and down by the third screw rod 14, thereby realizing accurate positioning of the second positioning plate 3 in the vertical direction.

[0029] Working principle: The middle part of the second positioning plate 3 is provided with a placing groove for placing a silicon light wafer to be tested; when the first motor 8 starts, the first slide block 4 will be driven to move horizontally along the first guide rail 5 by the first screw rod 9, thereby realizing accurate positioning of the first positioning plate 2; when the second motor 10 starts, the second slide block 6 will be driven to move horizontally along the second guide rail 7 by the second screw rod 11, thereby realizing accurate positioning of the second positioning plate 3 in another direction; when the third motor 16 starts, the movable plates 15 will be driven to move up and down by the third screw rod 14, thereby realizing accurate positioning of the second positioning plate 3 in the vertical direction.

[0030] The first positioning assembly and the second positioning assembly are arranged to adjust the horizontal position of the silicon light wafer, and the third positioning assembly is arranged to adjust the vertical position of the silicon light wafer, so that through the precise guide assembly and the positioning assembly, accurate positioning of the silicon light wafer during the testing process can be realized, and the testing efficiency and accuracy are improved.

[0031] The utility model embodiment makes the detailed explanation in combination with the drawing, but the utility model is not limited to the above -mentioned embodiment, still can make various changes in the knowledge range of ordinary skill in the art person who has possessed under the premise of not departing from the utility model tenet.

Claims

1. An automatic alignment device for testing a silicon optical wafer, characterized by, The utility model provides a kind of positioning device, including bottom plate (1), the top of the bottom plate (1) is equipped with first alignment plate (2), the top of the first alignment plate (2) is equipped with second alignment plate (3), four guide assemblies are evenly provided between the first alignment plate (2) and bottom plate (1), the guide assembly includes two first guide rails (5) fixedly connected to the bottom of bottom plate (1), first slider (4) slidingly connected to the outer side of first guide rail (5), two second guide rails (7) fixedly connected to the top of first slider (4) and being arranged perpendicularly with first guide rail (5) and second slider (6) slidingly connected to the outer side of second guide rail (7), the first alignment plate (2) is fixedly connected to the top of four second sliders (6), the top of the bottom plate (1) and close to the side of first slider (4) is equipped with first alignment component for driving first slider (4) horizontal movement, the side of first slider (4) is equipped with second alignment component for driving second slider (6) horizontal movement, the top of the first alignment plate (2) and the two sides of second alignment plate (3) are symmetrically equipped with third alignment component for driving second alignment plate (3) up and down movement.

2. The automatic alignment device for testing a silicon optical wafer according to claim 1, wherein The first alignment component includes first motor (8) fixedly connected to the top of bottom plate (1) and first lead screw (9) screwedly connected to the inside of first slider (4), and the output shaft of the first lead screw (9) is fixedly connected with the first motor (8).

3. The automatic alignment device for testing a silicon optical wafer according to claim 1, wherein The second alignment component includes support plate (12) fixedly connected to the side of first slider (4), second motor (10) fixedly connected to the top of support plate (12) and second lead screw (11) screwedly connected to the inside of second slider (6), and the output shaft of the second lead screw (11) is fixedly connected with the second motor (10).

4. The automatic alignment device for testing a silicon optical wafer according to claim 1, wherein The third alignment component includes mounting bracket (13) fixedly connected to the top of first alignment plate (2), third lead screw (14) rotatably connected to the inner side of mounting bracket (13), third motor (16) fixedly connected to the top of mounting bracket (13) and movable plate (15) screwedly connected to the outer side of third lead screw (14), the top end of the third lead screw (14) penetrates the inside of mounting bracket (13) and is fixedly connected with the output shaft of third motor (16), and the second alignment plate (3) is fixedly connected between movable plate (15).

5. The automatic alignment device for testing a silicon optical wafer according to claim 4, wherein The first guide rail (5) and the second guide rail (7) are both trapezoidal structures.

6. The automatic alignment device for testing a silicon optical wafer according to claim 5, wherein The inside of the movable plate (15) is slidingly connected with guide rod (17), and the bottom end of the guide rod (17) is fixedly connected with the top of the first alignment plate (2).

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