Filter element purging device and vacuum deposition equipment

Abstract

The utility model provides a filter element purging device and vacuum deposition equipment, and relates to the technical field of semiconductor equipment. The back-blowing device is suitable for being arranged on a filter element device, the filter element device is arranged in an installation barrel body, and the back-blowing device comprises a back-blowing air source, a first pipeline air pipe connected with the back-blowing air source and a second pipeline; the first pipeline extends into the filter element device and is connected with a purging air pipe arranged in the filter element device, the purging air pipe is connected with a rotating device, and the rotating device is suitable for driving the purging air pipe to rotate in the filter element device to perform circumferential purging on the filter element device; and the second pipeline is connected to the mounting barrel body and is suitable for ventilating after the purging of the purging air pipe is finished so as to blow back powder drifting in a clearance space between the inner side of the mounting barrel body and the outer side of the filter element device into the reaction container.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor equipment technical field, specifically, relate to a filter core purging device. BACKGROUND

[0002] Traditional filter core purging mode is through pulse valve air blowing, and certain pressure airflow is formed in the filter core, and the filter core surface powder is blown away. This mode is relatively effective for filter bag purging, and the purging effect for metal filter core is poor, and the reason is that the metal filter core is not like the filter bag, and the powder can be shaken off, and the large flow air blowing will directly affect the vacuum tank bottom pressure, and may cause the equipment pressure alarm. In addition, the existing vacuum deposition equipment needs to stop the equipment for back purging of the filter core in the vacuum environment, first back blowing to make the powder adsorbed on the filter core surface fall back into the reaction tank, and then the work can continue, and this will cause the work tact to be interrupted, and affect the work efficiency. UTILITY MODEL CONTENTS

[0003] The utility model discloses a filter core purging device, which aims at improving the above-mentioned problems.

[0004] The utility model adopts the following schemes:

[0005] A filter core purging device is suitable for being arranged on a filter core device, the filter core device is arranged in a mounting barrel, and the filter core purging device comprises a back blowing gas source, a first pipeline air pipe connected with the back blowing gas source and a second pipeline.

[0006] Further, a plurality of back blowing air holes on the back blowing air pipe are arranged towards the inner wall of the filter core device to back blow the filter core device.

[0007] Further, the mounting barrel is provided with a back blowing gap to connect the second pipeline, and the back blowing gap is arranged above the mounting barrel to facilitate back blowing of the powder from top to bottom.

[0008] Further, a first valve is arranged on the first pipeline, and a second valve is arranged on the second pipeline to control the on-off of the first pipeline and the second pipeline respectively.

[0009] Further, the distance between the back blowing air pipe and the inner wall of the filter core device is 1mm-5mm.

[0010] The utility model also provides a vacuum deposition equipment, including reaction container, at least be provided with first filter core device and second filter core device on reaction container, first filter core device and second filter core device all are provided with the filter core blowing device of any one described above, and first filter core device and second filter core device are connected to vacuum device through first vacuum pipeline and second vacuum pipeline respectively.

[0011] Further, the first vacuum pipeline and the second vacuum pipeline are respectively provided with a third valve and a fourth valve for controlling the opening and closing of the vacuum state in the first filter core device and the second filter core device.

[0012] Beneficial effects:

[0013] The filter core blowing device provided by the present application can adapt to back blowing in a vacuum environment. By first blowing the inside of the filter core device to blow away the powder adsorbed on the outside of the filter core device, and then blowing downward on the outside of the filter core device to blow back the scattered dust into the reaction container, the powder is prevented from being re-adsorbed on the outside of the filter core device after the vacuum is opened again. By setting a rotating blowing mode, the blowing effect and blowing process can be improved. In a vacuum deposition equipment provided with multiple filter core devices and filter core blowing devices, the filter core blowing can be performed synchronously during the process by a dynamic blowing process, which can shorten the process time and improve the efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a structural schematic view of a vacuum deposition equipment according to an embodiment of the utility model;

[0015] Figure 2 is a structural schematic view of a filter core blowing device according to an embodiment of the utility model;

[0016] Figure: installation barrel 1, back blowing gas source 2, filter core device 3, blowing gas pipe 4, cover 5, sealing cover 6, rotating device 7, pressure switch 8, first pipeline 9, second pipeline 10, reaction container 11, vacuum device 12, first vacuum pipeline 13, second vacuum pipeline 14, first valve V1 of first filter core blowing device, second valve V2 of first filter core blowing device, third valve V3, first valve V4 of second filter core blowing device, second valve V5 of second filter core blowing device, fourth valve V6. DETAILED DESCRIPTION

[0017] Embodiment 1

[0018] In combination with Figure 1 and Figure 2As shown, the embodiment provides a vacuum deposition equipment, which comprises a reaction container 11, at least two filter core devices 3 are arranged on the reaction container 11, and the two filter core devices 3 are respectively defined as a first filter core device and a second filter core device, a filter core purging device is arranged on each of the first filter core device and the second filter core device, and the first filter core device and the second filter core device are connected to a vacuum device 12 through a first vacuum pipeline and a second vacuum pipeline 14 respectively. The filter core purging device is suitable to be arranged on the filter core device 3, the filter core device 3 is arranged in a mounting barrel 1, the filter core purging device comprises a back blowing gas source 2, a first pipeline 9 and a second pipeline 10 connected to the back blowing gas source 2, wherein the first pipeline 9 extends into the filter core device 3 and is connected to a purging gas pipe 4 arranged in the filter core device 3, the purging gas pipe 4 is connected to a rotating device 7, the rotating device 7 is suitable to drive the purging gas pipe 4 to rotate in the filter core device 3 to perform circumferential purging on the filter core device 3, and the second pipeline 10 is connected to the mounting barrel 1, the second pipeline 10 is suitable to ventilate after the purging gas pipe 4 finishes purging to blow the powder in the gap space between the inside of the mounting barrel 1 and the outside of the filter core device 3 back into the reaction container 11.

[0019] In the embodiment, the vacuum device 12 is connected to the first filter core device and the second filter core device through the first vacuum pipeline and the second vacuum pipeline 14, so as to be communicated to the reaction container 11. The filter core device 3 can be a multi-void metal filter core, the internal cavity of which is communicated to the vacuum device 12, and the first vacuum pipeline and the second vacuum pipeline 14 are respectively provided with a third valve V3 and a fourth valve V6 for controlling the opening and closing of the vacuum state in the first filter core device and the second filter core device. The filter core device 3 is installed in the mounting barrel 1, and has a gap between the filter core device 3 and the inner wall of the mounting barrel 1 for gas to pass through, and the mounting barrel 1 is provided with a cover 5 for fixing the filter core device 3. The back blowing gas source 2 can adopt a gas storage pressure tank, which is connected with a pressure switch 8.

[0020] The first pipeline 9 is communicated with the blowing gas pipeline 4, the upper end of the blowing gas pipeline 4 is connected with a rotary motor for driving the blowing gas pipeline 4 to rotate, the blowing gas pipeline 4 extends downwards into the inside of the filter core device 3 and is close to the inner wall of the filter core device 3, so that the gas can be blown to the inner wall of the filter core device 3, the loss of gas pressure is reduced, and the rotary blowing mode is used to blow each position of the inner wall of the filter core device 3. The rotary motor is arranged above the cover body 5, and a sealing cover 6 is arranged at the connecting position. In the embodiment, a plurality of blowing gas holes for blowing the filter core device 3 are arranged on the blowing gas pipeline 4. The blowing gas holes are arranged closely and have small diameters, so that the flow rate of the gas is increased when the gas is blown out, and the blowing effect is enhanced. In a preferred embodiment, the distance between the blowing gas pipeline 4 and the inner wall of the filter core device 3 is 1mm-5mm, and close blowing can reduce the loss of blowing gas.

[0021] The installation barrel 1 is provided with a blowing gap for connecting the second pipeline 10, the blowing gap is arranged above the installation barrel 1, so that the powder can be back blown from top to bottom. The first pipeline 9 is provided with a first valve, and the second pipeline 10 is provided with a second valve, so as to control the opening and closing of the first pipeline 9 and the second pipeline 10 respectively.

[0022] When the filter core blowing device works, the first valve is opened, the gas in the back blowing gas source 2 flows to the blowing gas pipeline 4 along the first pipeline 9, at this time, the rotary device 7 rotates to drive the blowing gas pipeline 4 to rotate, the high-pressure gas radiates and blows 1-2 circles along the inner side of the filter core device 3, and the powder on the outer surface of the filter core device 3 is blown away; then the first valve is closed, the second valve is opened, the gas in the back blowing gas source 2 flows to the blowing gap in the installation barrel 1 along the second pipeline 10, and the powder scattered in the region in the previous step is blown into the tank. It should be noted that when the corresponding filter core device 3 is back blown, the vacuum channel of the filter core device 3 needs to be closed to prevent the powder from being re-adsorbed after being blown away.

[0023] In the embodiment, the powder is blown away from the surface of the filter core device 3 first, and then the powder is blown back into the reaction container 11, so that the powder is not adsorbed to the surface of the filter core device 3 again after being blown away due to the opening of the vacuum device 12; the filter core device 3 is back blown in a rotary mode, and the process of vacuumizing is used in cooperation, so that the powder adhered to the surface of the filter core device 3 can be effectively blown away.

[0024] Embodiment 2

[0025] Combined Figure 1 As shown in the drawings, the utility model still provides a kind of blowing process of vacuum deposition equipment, define the filter core blowing device arranged on the first filter core device as the first filter core blowing device, define the filter core blowing device arranged on the second filter core device as the second filter core blowing device, then include the following steps:

[0026] S1, keep the system vacuum, close the third valve V3, the fourth valve V6 remains open, open the first valve V1 of the first filter core purging device, close the second valve V2 of the first filter core purging device, to rotate the first filter core device;

[0027] S2, close the first valve V1 of the first filter core purging device, open the second valve V2 of the first filter core purging device, blow the powder between the filter core and the installation barrel 1 in the first filter core device back to the reaction container 11;

[0028] S3, close the second valve V2 of the first filter core purging device, the fourth valve V6, open the third valve V3, the first valve V4 of the second filter core purging device, close the second valve V5 of the second filter core purging device, rotate the blowing pipe 4 of the second filter core purging device to backflush the second filter core device;

[0029] S4, close the first valve V4 of the second filter core purging device, open the second valve V5 of the second filter core purging device, blow the powder between the filter core and the barrel back to the reaction container 11, complete the purging of the second filter core device;

[0030] S5, open the fourth valve V6, continue the process.

[0031] In this embodiment, when purging the first filter core device, the second filter core device remains in the vacuum open state, so that a downward suction force is generated in the area between the first filter core device and the installation barrel 1, which helps the powder to fall into the reaction container 11 in time, and vice versa. In this embodiment, the process can continue without stopping the process, which can shorten the process time and improve the efficiency. It should be noted that in other embodiments, the filter core device 3 can be provided with more, and the vacuum pressure of the filter core device 3 is closed in turn to backflush one by one.

[0032] Compared with the traditional purging method, the filter core purging adopts internal dynamic purging and filter core outer wall purging, and combines the process design of multiple filter cores purging in turn, which realizes effective filter core backflushing and better effect.

[0033] It should be understood that: the above is only the preferred embodiment of the present application, the protection scope of the present application is not limited to the above-mentioned embodiments, any technical solution belonging to the idea of the present application is within the protection scope of the present application.

[0034] The above introduction of the drawings used in the embodiments only shows some embodiments of the present application, and should not be regarded as the limitation of the scope. For ordinary skilled in the art, other related drawings can be obtained without creative labor according to these drawings.

Claims

1. A filter cartridge purging device, suitable for mounting on a filter cartridge assembly, the filter cartridge assembly being disposed within an installation housing, characterized in that, The system includes a backflush air source, a first pipeline connected to the backflush air source, and a second pipeline. The first pipeline extends into the interior of the filter element device and connects to a purge air pipe disposed inside the filter element device. The purge air pipe is connected to a rotating device, which is adapted to drive the purge air pipe to rotate inside the filter element device to perform circumferential purging of the filter element device. The second pipeline is connected to the mounting barrel and is adapted to ventilate after the purge air pipe has finished purging, so as to blow the powder dispersed in the gap space between the inner side of the mounting barrel and the outer side of the filter element device back into the reaction vessel.

2. The filter element purging device according to claim 1, characterized in that, The purging air pipe is provided with multiple purging air holes facing the inner wall of the filter element device to purge the filter element device.

3. The filter element purging device according to claim 1, characterized in that, The mounting barrel is provided with a purging gap to connect to the second pipeline. The purging gap is located above the mounting barrel to facilitate backflushing of the powder from top to bottom.

4. The filter element purging device according to claim 1, characterized in that, A first valve is installed on the first pipeline, and a second valve is installed on the second pipeline to control the opening and closing of the first pipeline and the second pipeline, respectively.

5. The filter element purging device according to claim 1, characterized in that, The distance between the purge air pipe and the inner wall of the filter element device is 1mm to 5mm.

6. A vacuum deposition apparatus, comprising a reaction vessel, characterized in that, The reaction vessel is provided with at least a first filter element device and a second filter element device. Both the first filter element device and the second filter element device are provided with the filter element purging device as described in claim 4. The first filter element device and the second filter element device are respectively connected to a vacuum device through a first vacuum pipeline and a second vacuum pipeline.

7. The vacuum deposition apparatus according to claim 6, characterized in that, The first vacuum line and the second vacuum line are respectively equipped with a third valve and a fourth valve to control the opening and closing of the vacuum state in the first filter element device and the second filter element device, respectively.

Images