Electronic component testing device and sorting machine

Abstract

The utility model relates to an electronic component testing device and a sorting machine. The electronic component testing device comprises a pressure head assembly and a testing seat assembly, the pressure head assembly comprises a pressure head used for picking up an electronic component and a light source used for providing illumination for the electronic component, the pressure head is provided with an illumination channel and an air exhaust channel, one end of the air exhaust channel is communicated with the illumination channel, and the other end of the air exhaust channel is communicated with the testing seat assembly. Air in the illumination channel is sucked through an air suction channel to form negative pressure, so that the electronic element is adsorbed to the tail end of the illumination channel; the electronic component testing device further comprises a shading part arranged between the pressure head assembly and the testing seat assembly, the shading part surrounds the peripheral side of the illumination channel, and when the pressure head assembly adsorbs an electronic component to be assembled on the testing seat assembly, the shading part is arranged on the periphery of the illumination channel. And the shading piece is abutted between the pressure head and the test seat assembly to form a sealed shading space. According to the electronic component testing device and the sorting machine provided by the invention, a reliable photosensitive testing function can be realized.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor testing, in particular to an electronic component testing device and a handler. BACKGROUND

[0002] A handler is a device for testing and sorting semiconductor devices. In the prior art, a handler usually comprises a press head and a test seat. The press head is arranged on a mechanical arm. The mechanical arm drives the press head to pick up a semiconductor device by vacuum suction and place the semiconductor device into the test seat for electrical performance testing. After the testing is completed, the mechanical arm moves the semiconductor device to a discharge position, thereby completing the testing and sorting of the semiconductor device.

[0003] However, the existing handler uses a suction nozzle structure to suction the semiconductor device above the semiconductor device, which is not convenient for arranging light components and constructing a light-proof environment. Therefore, it is difficult to meet the testing requirements of devices that require light testing, such as the light testing of photosensitive semiconductor devices. At present, the light testing of photosensitive semiconductor devices is usually performed manually using a test fixture and a test board in a dark box that is completely light-proof, which has a low degree of automation.

[0004] Therefore, it is necessary to provide a new technical solution to overcome the deficiencies of the prior art. CONTENT OF THE INVENTION

[0005] Based on this, the present application provides an electronic component testing device and a handler, which can realize reliable light testing.

[0006] To this end, the present application adopts the following technical solution: an electronic component testing device, comprising a press head assembly and a test seat assembly, wherein the press head assembly comprises a press head for picking up an electronic component and a light source for providing light to the electronic component, the press head has a light channel and a suction channel, one end of the suction channel communicates with the light channel, and the suction channel is used to suck the gas in the light channel to form a negative pressure, so as to adsorb the electronic component to the end of the light channel; the electronic component testing device further comprises a light shielding member arranged between the press head assembly and the test seat assembly, the light shielding member surrounds the periphery of the light channel, and when the press head assembly adsorbs the electronic component and is assembled on the test seat assembly, the light shielding member abuts between the press head and the test seat assembly and forms a sealed light shielding space.

[0007] In some embodiments, one of the press head and the test seat assembly is provided with an assembly groove, the light shielding member is assembled in the assembly groove, and protrudes out of the assembly groove when not under pressure.

[0008] In some embodiments, the inner wall surface of the light channel is provided with a black matte coating capable of reducing light reflection.

[0009] In some embodiments, the light shielding member is a black sponge or a black rubber member.

[0010] In some embodiments, the end of the light irradiation channel has a supporting end surface and a limiting claw protruding beyond the supporting end surface, the electronic component is adsorbed against the supporting end surface, and the periphery of the electronic component is in contact with the limiting claw.

[0011] In some embodiments, the limiting claw is a plurality of limiting claws, and the plurality of limiting claws are arranged around the supporting end surface, the electronic component is located in a space enclosed by the plurality of limiting claws, and the electronic component is limited to move in a direction at an angle to the central axis of the light irradiation channel.

[0012] In some embodiments, the supporting end surface includes a plurality of corner portions, and the area of the supporting end surface at the corner portions is increased.

[0013] In some embodiments, the pressing head assembly includes an adapter bottom plate, a guide plate, and a plurality of pressing heads, the guide plate and the plurality of pressing heads are fixed on the adapter bottom plate, and the guide plate and the test seat assembly have a guide matching mechanism.

[0014] In some embodiments, the guide matching mechanism includes a guide column provided on one of the guide plate and the test seat assembly, and a guide sleeve provided on the other.

[0015] In some embodiments, the adapter bottom plate is provided with a through hole in communication with the light irradiation channel, and the light source is mounted above the through hole and forms a sealed connection with the through hole.

[0016] In some embodiments, the adapter bottom plate is provided with an air passage, one end of the air passage is in communication with the air suction passage of the pressing head, and the other end is connected to a vacuum pumping device.

[0017] The application also adopts the following technical solution: a sorting machine, which includes a feeding device, a collecting device, a conveying device, and a test device as described in any of the above, wherein the conveying device is used to move the electronic component to be tested provided at the feeding device to the test device, and is used to move the electronic component tested by the test device to the collecting device for recovery.

[0018] The electronic component testing device provided by the application comprises a pressure head assembly and a testing seat assembly, the pressure head has a light irradiation channel and a gas suction channel, the gas in the light irradiation channel can be sucked through the gas suction channel to form a negative pressure, so that the electronic component is adsorbed at the end of the light irradiation channel, and the light irradiation on the electronic component can be realized; meanwhile, a light shielding piece is arranged around the periphery of the light irradiation channel, the light shielding piece abuts between the pressure head and the testing seat assembly to form a sealed light shielding space during testing, a light shielding environment beneficial to light irradiation testing is formed, the interference of external light is avoided, and the reliability of light irradiation testing is ensured; through the improvement of the testing device, the testing efficiency of the device with light irradiation testing requirement is greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of these drawings.

[0020] Figure 1 It is a sectional view of an embodiment of the electronic component testing device of the application.

[0021] Figure 2 It is a perspective assembly view of the pressure head assembly and the testing seat assembly in an embodiment of the electronic component testing device of the application without the light source.

[0022] Figure 3 It is a perspective assembly view of the pressure head assembly and the testing seat assembly in an embodiment of the electronic component testing device of the application without the light source. Figure 2 It is a perspective exploded view of the components shown in the figure.

[0023] Figure 4 It is a perspective assembly view of the pressure head and the electronic component in an embodiment of the electronic component testing device of the application.

[0024] Figure 5 It is a perspective assembly view of the pressure head and the electronic component in an embodiment of the electronic component testing device of the application. Figure 4 It is a perspective exploded view of the components shown in the figure.

[0025] Figure 6 It is a sectional view of the components shown in the figure. Figure 2

[0026] It is an enlarged view of part A in the figure. Figure 7 Figure 6

[0027] ​​The element reference numbers are as follows: 100, electronic component testing device; 10, pressure head assembly; 11, light source; 12, pressure head; 120, light irradiation channel; 121, air suction channel; 123, pressure head base body; 124, protruding cylinder; 1241, support end face; 1242, limiting claw; 13, adapter bottom plate; 130, through hole; 131, light source sealing groove; 132, air path channel; 14, guide plate; 140, guide sleeve; 20, testing seat assembly; 201, assembly groove; 202, guide column; 21, bearing jig; 22, testing base; 3, light shielding member; 5, electronic component. DETAILED DESCRIPTION

[0028] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. However, the present application can be practiced in a number of different ways beyond the specific embodiments described herein and by one of ordinary skill in the art without departing from the spirit of the present application, and it is therefore intended that all such variations be considered as falling within the scope of the present application. It should be noted that the following description will be mainly presented in terms of methods, although descriptions in terms of apparatus, systems, computer program products, computer-readable media, computer-implemented methods, apparatus, and / or systems are also presented and claimed. These representations are merely meant to aid in visualizing the implementations of the present application. The methods are not, and are not meant to be, limited by the order of the blocks, or the process flow, described. Further, the description is meant to encompass all such possible variations.

[0029] It should be noted that when an element or layer is referred to as being "on" or "connected to" another element or layer, it can be directly on or connected to the other element or layer, or intervening elements or layers can be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements or layers present. The use of "vertical", "horizontal", "up", "down", "left", "right", and terms of similar import (when used in the descriptions above and appended claims) is for the purpose of illustration only and is not intended to limit the scope of the present application.

[0030] In addition, the terms "first", "second", etc., are used herein only to describe various tings and do not imply a relative importance or a number of the indicated elements. Thus, a feature defined with "first", "second" can include at least one of the feature explicitly or implicitly. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise specifically limited.

[0031] In the present application, unless otherwise explicitly specified and limited, the "on", "under", "above" and "over" of the first feature to the second feature can be that the first feature is directly in contact with the second feature, or the first feature is indirectly in contact with the second feature through an intermediate medium. Moreover, the "on", "above" and "over" of the first feature to the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "under", "below" and "under" of the first feature to the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0032] Unless otherwise defined, all technical and scientific terms used in the specification of the present application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the present application solely for the purpose of describing the specific embodiments of the present application and is not intended to be limiting of the present application. As used in the description of the application, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0033] Referring to Figures 1 to 7 As shown in the drawings, the present application provides an electronic component testing device 100 for testing electronic components 5. In some embodiments, the electronic components 5 are semiconductor devices that need to be tested under light, such as photosensitive semiconductor chips and the like. Referring to Figure 1 As shown in the drawings, in the present embodiment, the electronic component testing device 100 comprises a press head assembly 10 and a testing seat assembly 20, wherein the press head assembly 10 comprises a transfer base plate 13, a press head 12 for picking up the electronic components 5, and a light source 11 for providing light to the electronic components 5, the light source 11 and the press head 12 being connected to the transfer base plate 13. The transfer base plate 13 is directed towards the testing seat assembly 20 for cooperating with the testing seat assembly 20 to realize the assembly of the electronic components 5 to the testing seat assembly 20. The press head assembly 10 is floating relative to the testing seat assembly 20 to realize the assembly and removal of the electronic components 5 to the testing seat assembly 20. In order to highlight the structure of the press head 12 and the testing seat assembly 20, the light source 11, the housing, and the air cylinder for realizing the floating of the press head assembly 10 and the like components are omitted in Figures 2 to 7 the drawings, and mainly the press head 12 and the transfer base plate 13 and the like components are retained.

[0034] Referring to Figures 3 to 6 As shown in the drawings, the press head 12 has a light passage 120 and an air suction passage 121, one end of the air suction passage 121 being communicated with the light passage 120. The air suction passage 121 is used to suck the gas in the light passage 120 to form a negative pressure, so as to adsorb the electronic components 5 to the end of the light passage 120. The electronic component testing device 100 further comprises a light shielding member 3 surrounding the periphery of the light passage 120, when the press head assembly 10 adsorbs the electronic components 5 to be assembled on the testing seat assembly 20, the light shielding member 3 abuts between the press head 12 and the testing seat assembly 20 and forms a sealed light shielding space. In the present embodiment, the light shielding member 3 is compressed between the press head 12 and the testing seat assembly 20 to form a sealed light shielding connection.

[0035] The present application can realize the adsorption and pick-and-place of the electronic component 5 without affecting the light irradiation on the electronic component 5 by setting the light irradiation channel 120 and the air extraction channel 121 on the pressure head 12. Meanwhile, the light shielding member 3 is set around the circumferential side of the light irradiation channel 120. During the test, the light shielding member 3 abuts between the pressure head 12 and the test seat assembly 20 to form a sealed light shielding space, thereby forming a light shielding environment conducive to the light irradiation test, avoiding the interference of external light, and ensuring the reliability of the light irradiation test.

[0036] Please refer to Figure 3 As shown in the figure, one of the pressure head 12 and the test seat assembly 20 is provided with an assembly groove 201, and the light shielding member 3 is assembled in the assembly groove 201, and protrudes out of the assembly groove 201 when not under pressure, and elastically deforms to realize the sealed light shielding when under pressure. In the present embodiment, the assembly groove 201 is provided on the test seat assembly 20; in other embodiments, the assembly groove 201 can also be provided on the pressure head 12. In the present embodiment, the light shielding member 3 is a black sponge, and in other embodiments, the light shielding member 3 can be a black rubber member, which can play a role in shielding light.

[0037] Please refer to Figure 4 and Figure 5 As shown in the figure, in the present embodiment, the pressure head assembly 10 includes a plurality of pressure heads 12, and the plurality of pressure heads 12 are arranged in an array. One action of the pressure head assembly 10 can realize the assembly test of a plurality of electronic components 5. The pressure head 12 includes a pressure head base 123 and a protruding cylinder 124 extending downward from the middle part of the pressure head base 123. The pressure head base 123 is a plate-shaped body substantially in the shape of a square, and the protruding cylinder 124 is a hollow cylinder, and the light irradiation channel 120 is formed in the protruding cylinder 124. In the present embodiment, the inner wall surface of the light irradiation channel 120 is provided with a black matte coating capable of reducing light reflection, so as to avoid the reflection of light on the inner wall surface of the light irradiation channel 120 and affect the test, and ensure the accuracy and reliability of the light irradiation test result.

[0038] The end of the light channel 120 has a support end face 1241 and a limiting claw 1242 protruding beyond the support end face 1241. The electronic component 5 is adsorbed against the support end face 1241, and the periphery of the electronic component 5 is in contact with the limiting claw 1242. That is, the bottom end face of the protruding cylinder 124 forms the support end face 1241, and the size of the electronic component 5 is greater than the size of the light channel 120. When adsorbed, the edge of the upper surface of the electronic component 5 is attached to the support end face 1241. In this embodiment, the support end face 1241 is a rectangular frame, and the electronic component 5 to be matched is a rectangular chip. The support end face 1241 of the rectangular frame includes several corner portions, and the area of the support end face 1241 at the corner portions is increased to protect the corners of the electronic component 5 and prevent the edge collapse phenomenon during pressure testing. Specifically, the four corner portions of the support end face 1241 are extended outward to form a square plane, and the corners of the electronic component 5 fall at the approximate center of the square plane. In this embodiment, the protruding cylinder 124 is a square hollow cylinder, that is, the light channel 120 is a square channel. In other embodiments, the shape and area of the light channel 120 can be adjusted as needed, and the present application does not limit this.

[0039] The limiting claw 1242 protrudes from the support end face 1241 to limit the electronic component 5 during picking and placing. The limiting claw 1242 is a plurality of claws arranged around the support end face 1241. The electronic component 5 is located in the space enclosed by the plurality of limiting claws 1242 and is limited by the plurality of limiting claws 1242 from moving in a direction at an angle to the central axis of the light channel 120. The limiting claw 1242 has the functions of upward grabbing and limiting lateral displacement of the electronic component 5. The limiting claw 1242 can be clamped to the side of the electronic component 5 to prevent the electronic component 5 from falling due to insufficient vacuum during movement. The limiting claw 1242 limits the lateral displacement of the electronic component 5 to keep the electronic component 5 within the area covered by the pressure head 12, avoiding damage caused by exposure of the electronic component 5, and improving test reliability.

[0040] Please continue to refer to Figure 6 and Figure 7 As shown, the pressure head base 123 has a gas extraction channel 121 formed therein. One end of the gas extraction channel 121 communicates with the light channel 120, and the other end of the gas extraction channel 121 communicates with the gas path channel 132 in the adapter board 13. The gas path channel 132 is arranged in the adapter board 13, one end of which communicates with the gas extraction channel 121 of the pressure head 12, and the other end of which is connected to the vacuum extraction equipment. During suction, the gas flow path is as shown by the dashed arrows in Figure 6 .

[0041] Please refer to Figure 2 , Figure 3 and Figure 6As shown, the adapter board 13 is provided with a plurality of through holes 130, the light source 11 is installed above the through holes 130 and forms a sealed connection with the through holes 130, the pressure head 12 is fixed below the adapter board 13, and the light irradiation channel 120 of the pressure head 12 is in communication with the through holes 130. The upper surface of the adapter board 13 is provided with a light source sealing groove 131 around the through holes 130, a sealing ring is installed in the light source sealing groove 131, and the light source 11 forms a sealed connection with the adapter board 13 through the sealing ring. The sealed connection between the light source 11 and the adapter board 13 can avoid gas leakage, so that the gas in the light irradiation channel 120 can be sucked out to form a negative pressure, so as to adsorb the electronic element 5 at the end of the light irradiation channel 120. Further, the sealing ring between the light source 11 and the adapter board 13 is made of light shielding material, so as to shield light, prevent light emitted by the light source 11 from leaking out, and prevent external light from entering the light irradiation channel 120.

[0042] Please continue to refer to Figure 3 As shown, the pressure head assembly 10 further includes a guide plate 14, and the guide plate 14 and the plurality of pressure heads 12 are fixed on the adapter board 13. The guide plate 14 and the test seat assembly 20 have a guide matching mechanism therebetween, which is used to guide the matching between the pressure head 12 and the test seat assembly 20, so as to realize rapid and accurate alignment. The guide matching mechanism includes a guide column 202 provided on one of the guide plate 14 and the test seat assembly 20, and a guide sleeve 140 provided on the other. In the embodiment, the guide sleeve 140 is provided on the guide plate 14, and the guide column 202 is provided on the test seat assembly 20; in other embodiments, the guide column 202 can be provided on the guide plate 14, and the guide sleeve 140 can be provided on the test seat assembly 20. The upper end of the guide column 202 is conical, which is used to play a guiding role, and the part below the conical part is cylindrical, which is used to realize accurate positioning. In the embodiment, the guide sleeve 140 and the guide column 202 are independent components, which can be replaced independently after long-term use and wear, without replacing the entire guide plate 14 or the bearing fixture 21 of the test seat assembly 20, so as to reduce maintenance cost.

[0043] Please refer to Figure 6 As shown, the test seat assembly 20 is also composed of a plurality of components. In the embodiment, the test seat assembly 20 includes a bearing fixture 21 and a plurality of test bases 22, the test bases 22 are assembled on the bearing fixture 21, and the plurality of test bases 22 are arranged in one-to-one correspondence with the pressure heads 12. The test base 22 is provided with a probe, and the probe is electrically connected to a test circuit board to contact and test the electronic element 5. The specific structure of the test seat assembly 20 can be implemented according to the existing scheme, and the present application will not be described here.

[0044] In assembly, the light source 11 is assembled on the upper surface of the adapter base plate 13, and the pressing head 12 and the guide plate 14 are assembled on the lower surface of the adapter base plate 13 through connecting members such as screws; at this time, the through hole 130 on the adapter base plate 13 is in communication with the light irradiation channel 120 of the pressing head 12 from top to bottom, the light emitted by the light source 11 is irradiated downward through the through hole 130 and the light irradiation channel 120, and the air extraction channel 121 of the pressing head 12 is in communication with the air path channel 132 in the adapter base plate 13, the air path channel 132 has an air port on the side surface of the adapter base plate 13, and the air port is connected to the vacuumizing equipment.

[0045] In operation, the lower end of the light irradiation channel 120 of the pressing head 12 contacts the electronic component 5, the electronic component 5 is aligned with the light irradiation channel 120 due to the limiting effect of the limiting claw 1242, the vacuumizing equipment extracts the air in the light irradiation channel 120 through the air path channel 132 and the air extraction channel 121, so that the electronic component 5 is adsorbed on the support end surface 1241 at the lower end of the light irradiation channel 120; the pressing head assembly 10 moves toward the test seat assembly 20 with the adsorbed electronic component 5 to assemble the electronic component 5 into the test base 22 for testing; after the test is completed, the pressing head assembly 10 moves away from the test seat assembly 20 with the adsorbed electronic component 5 to take out the electronic component 5 and put it into the material collecting device for material collection.

[0046] The application also provides a sorting machine, which comprises a feeding device, a material collecting device, a conveying device and the electronic component testing device 100 according to any one of the above, wherein the conveying device is used for moving the electronic component 5 to be tested provided at the feeding device to the electronic component testing device 100 and moving the electronic component 5 tested by the electronic component testing device 100 to the material collecting device for recycling.

[0047] As can be known from the above description of the specific embodiments, the electronic component testing device 100 provided by the application comprises the pressing head assembly 10 and the test seat assembly 20, the pressing head 12 has the light irradiation channel 120 and the air extraction channel 121, the air in the light irradiation channel 120 can be extracted through the air extraction channel 121 to form negative pressure, so that the electronic component 5 is adsorbed at the end of the light irradiation channel 120, and the light irradiation of the electronic component 5 can be realized; meanwhile, the light shielding member 3 is arranged around the circumferential side of the light irradiation channel 120, the light shielding member 3 abuts between the pressing head 12 and the test seat assembly 20 and forms a sealed light shielding space during testing, a light shielding environment conducive to light irradiation testing is formed, the interference of external light is avoided, and the reliability of light irradiation testing is ensured; through the improvement of the testing device, the testing efficiency of devices with light irradiation testing requirements is greatly improved.

[0048] The technical features of the above embodiments can be combined in any manner, and to make the description concise, not all possible combinations of the technical features in the above embodiments are described, however, as long as the combinations of the technical features do not exist contradictions, they should be considered as the scope of the present application.

[0049] The above-described embodiments are merely illustrative of several embodiments of the present application, which are described in more detail and in a specific manner, but should not be construed as limiting the scope of the patent application. It should be noted that for those of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. An electronic component testing device, comprising a pressure head assembly (10) and a test socket assembly (20), characterized in that, The pressure head assembly (10) includes a pressure head (12) for picking up electronic components (5) and a light source (11) for providing illumination to the electronic components (5). The pressure head (12) has an illumination channel (120) and a suction channel (121). One end of the suction channel (121) is connected to the illumination channel (120). The suction channel (121) draws gas from the illumination channel (120) to form a negative pressure, thereby adsorbing the electronic components (5) onto the illumination. The end of the channel (120); the electronic component testing device (100) also includes a light shield (3) disposed between the pressure head assembly (10) and the test seat assembly (20). The light shield (3) surrounds the periphery of the light channel (120). When the pressure head assembly (10) adsorbs electronic components (5) and assembles them on the test seat assembly (20), the light shield (3) abuts against the pressure head (12) and the test seat assembly (20) to form a sealed light shielding space.

2. The electronic component testing device according to claim 1, characterized in that, One of the pressure head (12) and the test seat assembly (20) is provided with a mounting groove (201), and the light shield (3) is assembled in the mounting groove (201) and protrudes from the mounting groove (201) when not under pressure.

3. The electronic component testing device according to claim 1, characterized in that, The inner wall of the light channel (120) is provided with a black matte coating that can reduce light reflection; the light shield (3) is a black sponge or a black rubber component.

4. The electronic component testing apparatus according to claim 1 or 2, characterized in that, The end of the illumination channel (120) has a support end face (1241) and a limiting claw (1242) protruding beyond the support end face (1241). The electronic component (5) is adsorbed and abutted against the support end face (1241), and the periphery of the electronic component (5) contacts and is limited by the limiting claw (1242).

5. The electronic component testing apparatus according to claim 4, characterized in that, The limiting claws (1242) are multiple and arranged around the support end face (1241). The electronic component (5) is located in the space formed by the multiple limiting claws (1242) and is restricted by the multiple limiting claws (1242) to move in a direction that is at an angle to the central axis of the illumination channel (120).

6. The electronic component testing apparatus according to claim 5, characterized in that, The supporting end face (1241) includes several corner portions, and the area of ​​the supporting end face (1241) at the corner portions is increased.

7. The electronic component testing apparatus according to claim 1, characterized in that, The pressure head assembly (10) includes a base plate (13), a guide plate (14), and a plurality of pressure heads (12). The guide plate (14) and the plurality of pressure heads (12) are fixed on the base plate (13). The guide plate (14) and the test seat assembly (20) have a guiding engagement mechanism. The guiding engagement mechanism includes a guide post (202) disposed on one of the guide plate (14) and the test seat assembly (20), and a guide sleeve (140) disposed on the other.

8. The electronic component testing apparatus according to claim 7, characterized in that, The adapter base plate (13) is provided with a through hole (130) communicating with the light channel (120), and the light source (11) is installed above the through hole (130) and forms a sealed connection with the through hole (130).

9. The electronic component testing apparatus according to claim 7, characterized in that, The adapter base plate (13) is provided with an air passage (132). One end of the air passage (132) is connected to the air extraction passage (121) of the pressure head (12), and the other end is connected to a vacuum pumping device.

10. A sorting machine, characterized in that, It includes a feeding device, a receiving device, a conveying device, and an electronic component testing device (100) as described in any one of claims 1 to 9, wherein the conveying device is used to transfer the electronic component (5) to be tested provided at the feeding device to the electronic component testing device (100), and to move the electronic component (5) after testing by the electronic component testing device (100) to the receiving device for recycling.

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