Spring type basket detection device and cleaning equipment

Abstract

The utility model provides a spring type basket detection device and cleaning equipment. The spring type basket detection device comprises a detector, a telescopic rod, a return spring and a hammer head, the detector synchronously moves along with the manipulator, one end of the telescopic rod is located at the top of the detector, the other end of the telescopic rod movably extends out of the bottom of the detector, a hammer head is arranged at the extending end, and a detected device is arranged in the telescopic rod; wherein the hammer head is suitable for being in contact with a flower basket below the manipulator, the return spring abuts against the bottom of the detector and the top of the hammer head, and the detector is matched with the detected device to detect the moving state of the telescopic rod. By arranging the return spring, after the basket is taken down, the hammer head and the detector are pushed through elastic potential energy stored by the return spring, so that the telescopic rod can rebound, the situation that the telescopic rod is not rebounded in place due to the fact that liquid medicine crystallizes on the surface of the telescopic rod is avoided, the detection accuracy is improved, the basket pressing situation is prevented, and workpieces and equipment are protected.

Description

TECHNICAL FIELD

[0001] The utility model belongs to solar cell production equipment technical field, concretely relates to spring formula basket detection device and cleaning equipment. BACKGROUND

[0002] In the solar cell cleaning process, needs to load the carrier such as piece box or flower basket and so on of silicon wafer, is sequentially cleaned in each process tank, in the cleaning process, is relied on mechanical arm to promote, carries and cleans flower basket to realize, if the abnormality such as unhooking occurs, flower basket is not taken out, will produce flower basket stacking, causes the damage of workpiece and silicon wafer basket, the current market is generally through the detector set on the mechanical hand detection feedback, the existing detector is usually through the state of telescopic rod to judge whether there is flower basket, telescopic rod is compressed when hanging basket, the detector sends signal to show that there is flower basket at this time, after taking down flower basket, due to the volatility of the chemical liquid in the process tank, the chemical liquid can crystallize on the telescopic rod, if there is no reset device, will lead to telescopic rod rebound not in time (at this time, the detector still detects that there is flower basket), lead to the reduction of detection accuracy, easily causes the basket to be pressed, causes the damage of workpiece and equipment.

[0003] Therefore, it is necessary to provide spring formula basket detection device and cleaning equipment that can assist telescopic rod rebound. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing spring formula basket detection device and cleaning equipment.

[0005] In order to solve the above technical problem, the utility model provides spring formula basket detection device, include: detector, telescopic rod, reset spring and hammer head, the detector follows the synchronous movement of mechanical hand, one end of telescopic rod is located at the top of detector, the other end of telescopic rod is movable and extends the bottom of detector and is provided with hammer head on the extension end, and the detector is arranged in telescopic rod, wherein, the hammer head is suitable for contacting the flower basket below the mechanical hand, the reset spring bears the bottom of detector and the top of hammer head, and the detector cooperates with the detector to detect the movement state of telescopic rod.

[0006] Further, the reset spring is sleeved on the outer wall of the telescopic rod.

[0007] Further, the extension end of the telescopic rod and the hammer head are fixed by thread cooperation.

[0008] Further, the spring formula basket detection device further includes a signal line, the signal line is arranged on the side wall of the detector, and the detector is electrically connected with the upper computer through the signal line.

[0009] Further, a pair of waist-shaped holes are arranged on both sides of the detector, and the detector is fixed by bolts passing through the waist-shaped holes.

[0010] Further, the bottom of the hammer head is in a circular arc shape.

[0011] Further, a counterweight is arranged inside the hammer head.

[0012] Further, the telescopic rod is in sliding connection with the detector, and the detector is provided with a movable channel for the telescopic rod to move up and down.

[0013] Further, limit plates are arranged at both ends of the return spring, the limit plate at the upper end of the return spring is in abutment with the detector, and the limit plate at the lower end of the return spring is in abutment with the hammer head.

[0014] The utility model also provides a cleaning equipment, include: box, process groove and above -mentioned spring formula basket detection device, be provided with liftable movable support arm in the box, be provided with a plurality of mechanical hands on the support arm, the inner wall of mechanical hand is provided with a plurality of hanging boards, the lateral wall of hanging board is provided with a plurality of hooks, the distance between the mechanical hand is adapted to the size of flower basket, the hook is suitable for extending into the gap of flower basket, process groove is located below the hanging board, and the process groove is suitable for cleaning silicon wafer, the detector of spring formula basket detection device is located in the lateral wall of hanging board, and the detector is electrically connected with host computer.

[0015] Further, the spring formula basket detection device is located between two adjacent hooks of the same hanging board.

[0016] Further, a horizontal moving assembly is arranged on the support arm, and the mechanical hand is connected with the movable end of the horizontal moving assembly.

[0017] Further, the horizontal moving assembly is a horizontal moving cylinder, and the mechanical hand is connected with the piston rod of the horizontal moving cylinder.

[0018] Further, a lifting assembly is arranged in the box, and the support arm is connected with the moving end of the lifting assembly.

[0019] Further, the lifting assembly comprises a lifting cylinder, the lifting cylinder is arranged on the inner wall of the box, and the piston rod of the lifting cylinder is connected with the support arm.

[0020] Compared with the prior art, the utility model at least has one of the following beneficial effects:

[0021] 1. By setting the detection device, when extracting the basket, the manipulator drives the hanging plate to move downward to drive the hammer head to contact with the basket, the telescopic rod is compressed, the return spring is in the compressed state, the hook is inserted into the notch on the basket, the detector is close to the detector, the detector senses the detector, which represents that the manipulator has the basket, after taking down the basket, the return spring pushes the hammer head and the detector through the stored elastic potential, so that the telescopic rod can rebound, the detector is separated from the detector, the detector cannot sense the detector, which represents that the manipulator has no basket, avoids the situation that the telescopic rod cannot rebound in place caused by the liquid crystal on the surface of the telescopic rod, improves the detection accuracy, prevents the basket pressing situation, and protects the workpiece and equipment;

[0022] 2. By setting the box, the box has simple and reliable structure, can stably support the supporting arm, the process tank and the detection assembly, provides a good working environment for the cleaning equipment of the spring type basket detection device, the supporting arm lifting drives the manipulator to lift, when the basket is hung and taken, the manipulator is matched with the width of the basket, and the manipulator descends, so that the hook can be inserted into the notch of the basket, and the hanging and taking of the basket is completed.

[0023] 3. By setting the process tank, the process tank is suitable for storing cleaning liquid, and the basket can be cleaned after being placed in the process tank. ACCURACY

[0024] In order to more clearly illustrate the specific embodiment of the utility model or the technical scheme in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiment or the prior art description, and obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating labor.

[0025] Figure 1 It is the structure schematic view of the cleaning equipment of the spring type basket detection device of the utility model;

[0026] Figure 2 It is the structure schematic view of the manipulator, the hanging plate, the detection assembly and the basket of the utility model;

[0027] Figure 3 It is the structure schematic view of the spring type basket detection device of the utility model;

[0028] Figure 4 It is the main body structure cross section schematic view of the spring type basket detection device of the utility model.

[0029] In the drawing:

[0030] 100. Box body; 110. Support arm; 120. Robotic arm; 130. Hanging plate; 131. Hook; 132. Mounting hole; 140. Flower basket; 141. Notch; 150. Process groove; 160. Lifting assembly; 161. Lifting cylinder.

[0031] 200. Detection component; 210. Detector; 211. Waist-shaped hole; 220. Telescopic rod; 230. Return spring; 240. Hammer head; 250. Signal line. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0033] Example 1

[0034] like Figures 1-4 As shown, this utility model provides a spring-loaded basket detection device 200, including: a detector 210, a telescopic rod 220, a return spring 230, and a hammer 240; the detector 210 moves synchronously with the robot arm 120, and one end of the telescopic rod 220 is located at the top of the detector 210. The other end of the telescopic rod 220 extends movably from the bottom of the detector 210, and the hammer 240 is provided on the extended end. The object to be detected is disposed inside the telescopic rod 220, and the hammer 240 is adapted to contact the basket 140 below the robot arm 120. The return spring 230 abuts between the bottom of the detector 210 and the top of the hammer 240. The detector 210 and the object to be detected cooperate to detect the movement state of the telescopic rod 220.

[0035] Specifically, the principle of detector 210 and the detected object working together is as follows: when the detected object is close to detector 210, detector 210 senses the detected object; when the detected object is separated from detector 210, detector 210 can no longer sense the detected object. By changing the signal emitted by detector 210, it is determined whether the robot arm 120 has a flower basket.

[0036] It should be understood that, in order for the telescopic rod 220 to move relative to the detector, the detector 210 is provided with a movable channel for the telescopic rod 220 to move up and down. In addition, in order to prevent the telescopic rod 220 from falling out of the detector 210, a limiting part is provided at the top of the telescopic rod 220, and the size of the limiting part exceeds the movable channel.

[0037] Based on the embodiment, the preferred solution is to wrap the return spring 230 around the outer wall of the telescopic rod 220, so that the telescopic rod 220 is surrounded in the return spring 230, and the biasing is not easy to occur during the up and down movement, and the return spring 230 can be reliably installed between the bottom of the detector 210 and the top of the hammer head 240. Alternatively, the extension end of the telescopic rod 220 is fixed with the hammer head 240 through threaded cooperation, and rotating the hammer head 240 can complete the installation or disassembly, which is convenient for assembly and maintenance of the detection device.

[0038] The spring basket detection device 200 further comprises a signal line 250 arranged on the side wall of the detector 210, and the detector 210 is electrically connected with the upper computer through the signal line 250. The signal line 250 can accurately transmit signals to the upper computer, and the upper computer knows whether the mechanical hand 120 has a flower basket, thereby improving the accuracy of detection.

[0039] The detector 210 is provided with a pair of waist-shaped holes 211 on both sides, which are used for installing and fixing the detector 210. Taking the hanging plate as an example, a pair of mounting holes 132 adapted to the waist-shaped holes are designed on the hanging plate, and the bolts pass through the waist-shaped holes 211 and the mounting holes 132 to connect the detector 210 with the hanging plate 130. The waist-shaped holes 211 are arranged to facilitate the fixation of the detector 210 with the hanging plate 130, thereby improving the installation efficiency.

[0040] It should be noted that, as shown in Figure 3 The bottom of the hammer head is arc-shaped to reduce the contact area with the flower basket. A counterweight is arranged inside the hammer head to facilitate the rebound of the telescopic rod. Limiting plates are arranged at both ends of the return spring 230. The limiting plate at the upper end of the return spring 230 abuts against the detector 210, and the limiting plate at the lower end of the return spring 230 abuts against the hammer head 240, so as to improve the reliability of the installation of the return spring 230.

[0041] Embodiment 2

[0042] As shown in Figures 1-3As shown, the utility model provides a cleaning equipment, this cleaning equipment includes: box 100, process tank 150 and spring type basket detection device 200, the box 100 is lifted and is provided with support arm 110, a plurality of mechanical hands 120 are provided on support arm 110, a plurality of hanging boards 130 are provided on the inner wall of mechanical hand 120, a plurality of hooks 131 are provided on the side wall of hanging board 130, wherein the distance between mechanical hand 120 and the size of flower basket are adapted, and the hook 131 is suitable for extending into the gap 141 of flower basket 140;Through the setting box 100, the simple and reliable structure of box 100 can stably support the supposition support arm 110, process tank 150 and spring type basket detection device 200, and provide good working environment for cleaning equipment;The setting of the lifting of support arm 110 drives the lifting of mechanical hand 120;When hanging and taking flower basket, the width of mechanical hand 120 is adapted to the width of flower basket, and mechanical hand 120 is lowered to enable hook 131 to be inserted into the gap 141 of flower basket 140, and the hanging and taking of flower basket are completed;Process tank 150 is arranged below hanging board 130, wherein the process tank 150 is suitable for cleaning silicon wafer;Through the setting of process tank 150, the process tank 150 is suitable for storing cleaning liquid, and the cleaning of flower basket is realized after the flower basket is placed in process tank 150.

[0043] Spring type basket detection device 200 includes detector 210, telescopic rod 220, return spring 230 and hammer head 240;The detector 210 is arranged on the side wall of hanging board 130, one end of telescopic rod 220 is located at the top of detector 210, the other end of telescopic rod 220 extends out of the bottom of detector 210 and the extension end is provided with hammer head 240, a detected device is arranged in telescopic rod 220, and return spring sleeve 230 is arranged on the outer wall of telescopic rod 220. Wherein, the hammer head 240 is suitable for abutting against the flower basket 140, the return spring 230 abuts against the bottom of the detector 210 and the top of the hammer head 240, the detector 210 cooperates with the detected device to detect the state of telescopic rod 220, and the detector 210 is electrically connected with the upper computer.

[0044] By setting the spring basket detection device 200, when the flower basket is extracted, the mechanical hand 120 drives the hanging plate 130 to move downward, thereby driving the hammer head 240 to contact the bottom plate of the flower basket, the telescopic rod 220 is compressed, the return spring 230 is in a compressed state, the hook 131 is inserted into the gap 141 on the flower basket 140, the detector 210 contacts the detector 210, the detector 210 sends a signal to the upper computer to convey that the mechanical hand 120 has a flower basket, and is sent to the next process tank 150 by the mechanical hand 120 for cleaning. After the flower basket is removed, the return spring 230 pushes the hammer head 240 and the detector 210 by the stored elastic potential energy, so that the telescopic rod 220 can rebound, and the detector 210 is separated from the detector 210, and the industrial computer displays that the mechanical hand 120 has no flower basket, thereby avoiding the situation that the telescopic rod 220 cannot rebound to the position due to the crystallization of the liquid medicine on the surface of the telescopic rod 220, improving the accuracy of detection, preventing the basket pressing situation, and protecting the workpiece and the equipment.

[0045] The spring basket detection device 200 further comprises a signal line 250 arranged on the side wall of the detector 210, wherein the detector 210 is electrically connected with the upper computer through the signal line 250; the signal line 250 can accurately transmit signals to the upper computer, and the upper computer knows whether the mechanical hand 120 has a flower basket, thereby improving the accuracy of detection.

[0046] A pair of waist-shaped holes 211 are arranged on both sides of the detector 210, and a pair of mounting holes 132 adapted to the waist-shaped holes 211 are arranged on the side wall of the hanging plate 130, wherein bolts pass through the waist-shaped holes 211 and the mounting holes 132 to connect the detector 210 with the hanging plate 130; the waist-shaped holes 211 facilitate the fixation of the detector 210 with the hanging plate 130, thereby improving the installation efficiency.

[0047] It should be noted that, as shown in Figure 2 The preferred solution is that the spring basket detection device 200 is located between the adjacent two hooks 131 of the same hanging plate 130, so as to ensure that the hammer head 240 can directly contact the bottom plate of the flower basket.

[0048] A horizontal moving assembly (not shown in the figure) is arranged on the support beam, and the mechanical hand 120 is connected with the movable end of the horizontal moving assembly; the movable end of the horizontal moving assembly can drive the mechanical hand 120 to slide, thereby driving the spring basket detection device 200 to move horizontally.

[0049] The horizontal moving assembly is a horizontal moving cylinder (not shown in the figure), and the mechanical hands 120 are connected with the piston rod of the horizontal moving cylinder; the horizontal moving cylinder moves accurately and can drive the mechanical hands 120 to move horizontally accurately, so that the distance between the mechanical hands 120 is adapted to the length of the flower basket, thereby enabling the hooks 131 to be inserted into and separated from the gap 141 on the flower basket 140, and the extraction of the flower basket is completed.

[0050] The box 100 is provided with a lifting assembly 160, and the support arms 110 are connected with the moving end of the lifting assembly 160; the lifting assembly 160 can drive the support arms 110 to lift, thereby driving the mechanical hands 120 to lift, and the flower basket hung on the hooks 131 can be lifted to be transported to a processing position.

[0051] The lifting assembly 160 comprises a lifting cylinder 161, which is arranged on the inner wall of the box 100, and the piston rod of the lifting cylinder 161 is connected with the support arms 110; the lifting cylinder 161 moves accurately and can drive the support arms 110 to lift accurately, thereby enabling the flower basket to be placed at an accurate cleaning station, and the cleaning efficiency is improved.

[0052] Embodiment 3

[0053] The working process of the cleaning equipment with the spring type basket detection device is as follows: after the flower basket is placed in the process tank 150 and cleaned, the flower basket needs to be transferred to the next process tank 150 for cleaning; at this time, the horizontal moving assembly drives the mechanical hands 120 to move horizontally so that the distance between the mechanical hands 120 is adapted to the length of the flower basket, and the lifting assembly 160 drives the support arms 110 to descend; at this time, the hanging plate 130 descends to drive the hammer head 240 to descend synchronously, the hammer head 240 abuts against the flower basket, the hanging plate 130 continues to descend, at this time, the detector 210 contacts the detected detector 210, the return spring 230 is compressed to store elastic potential energy at this time, the detector 210 transmits a signal to the upper computer through the signal line 250, indicating that there is a flower basket on the mechanical hand 120; at this time, the mechanical hand 120 moves to transfer and place the flower basket to the next process tank 150, the hook 131 leaves the gap 141 of the flower basket 140, after the flower basket is removed, the return spring 230 pushes the hammer head 240 and the detector 210, so that the telescopic rod 220 can rebound, at this time, the situation that the telescopic rod 220 does not rebound to the position due to the crystallization of the liquid medicine on the surface of the telescopic rod 220 is avoided, the detected detector 210 is separated from the detector 210, and the industrial computer displays that the mechanical hand 120 has no flower basket, the detection accuracy is improved, the situation of pressing the basket is prevented, and the workpiece and the equipment are protected.

[0054] With the above ideal embodiment of the present application as the inspiration, through the above description, relevant staff can make various changes and modifications without deviating from the technical idea of the present application. The technical scope of the present application is not limited to the content in the specification, and the technical scope must be determined according to the scope of claims.

Claims

1. A spring basket detection device, characterized by, Include: The detector, telescopic rod, return spring and hammer head; The detector follows the synchronous movement of the robot, one end of the telescopic rod is located at the top of the detector, the other end of the telescopic rod is movably extended from the bottom of the detector, and the extended end is provided with the hammer head, and the telescopic rod is provided with a detector inside; Wherein, the hammer head is suitable for contacting the flower basket below the robot, the return spring abuts against the bottom of the detector and the top of the hammer head, and the detector cooperates with the detector to detect the movement state of the telescopic rod.

2. The spring basket detection device of claim 1, wherein, The return spring is sleeved on the outer wall of the telescopic rod.

3. The spring basket detection device of claim 1, wherein, The extended end of the telescopic rod is fixed with the hammer head through thread cooperation.

4. The spring basket detection device of claim 1, wherein, Also include: Signal line, the signal line is arranged on the side wall of the detector, and the detector is electrically connected with the upper computer through the signal line.

5. The spring basket detection device of claim 1, wherein, A pair of waist-shaped holes are arranged on both sides of the detector, and the detector is fixed by bolts passing through the waist-shaped holes.

6. The spring basket detection device of claim 1, wherein, The bottom of the hammer head is arc-shaped.

7. The spring basket detection device of claim 1, wherein, The hammer head is provided with a counterweight inside.

8. The spring basket detection device of claim 1, wherein, The telescopic rod is slidably connected with the detector, and the detector is provided with a movable channel for the telescopic rod to move up and down.

9. The spring basket detection device of claim 1, wherein, The both ends of the return spring are provided with limit plates, the limit plate at the upper end of the return spring abuts against the detector, and the limit plate at the lower end of the return spring abuts against the hammer head.

10. A cleaning apparatus characterized by, Include: Box, process tank, and spring basket detection device of any one of claims 1 to 9; The box is provided with a support arm that can move up and down, a plurality of robots are arranged on the support arm, a plurality of hanging plates are arranged on the inner wall of the robot, a plurality of hooks are arranged on the side wall of the hanging plate, the distance between the robots is matched with the size of the flower basket, and the hooks are suitable for extending into the gap of the flower basket; The process tank is arranged below the hanging plate, and the process tank is suitable for cleaning the silicon wafer; The detector of the spring basket detection device is arranged on the side wall of the hanging plate, and the detector is electrically connected with the upper computer.

11. The cleaning apparatus of claim 10, wherein, The spring basket detection device is located between the adjacent two hooks of the same hanging plate.

12. The cleaning apparatus of claim 10, wherein, The support arm is provided with a horizontal moving assembly, and the robot is connected with the movable end of the horizontal moving assembly.

13. The cleaning apparatus of claim 12, wherein, The horizontal moving assembly is a horizontal moving cylinder, and the robot is connected with the piston rod of the horizontal moving cylinder.

14. The cleaning apparatus of claim 10, wherein, The box is provided with a lifting assembly, and the support arm is connected with the moving end of the lifting assembly.

15. The cleaning apparatus of claim 14, wherein, The lifting assembly includes a lifting cylinder, the lifting cylinder is arranged on the inner wall of the box, and the piston rod of the lifting cylinder is connected with the support arm.

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