Vacuum induction welding furnace

Abstract

The utility model provides a vacuum induction welding furnace, which relates to the field of semiconductor device processing equipment and comprises a product moving device, a vacuum cavity, an inductor, a temperature measuring head and a temperature measuring head moving device. The product moving device comprises a product clamp used for bearing products. The product clamp can enter and leave the vacuum cavity; the inductor is fixed in the vacuum cavity; the product clamp can move to the opposite side of the inductor; the temperature measuring head and the temperature measuring head moving device are fixed in the vacuum cavity; the temperature measuring head is fixed on the temperature measuring head moving device; the temperature measuring head moving device can drive the temperature measuring head to move. The vacuum induction welding furnace provided by the utility model solves the problem that in the prior art, the temperature of an induction brazed product is difficult to obtain, so that the temperature of the product is difficult to control by controlling induction power, and the accurate temperature of the semiconductor product subjected to induction welding can be obtained.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor device processing equipment, especially to vacuum induction welding furnace. BACKGROUND

[0002] Induction brazing is realized by using the resistance heat of induction current in the welding piece, and the induction heating mode is different from other heating modes, which is not to transmit heat to the workpiece by the environment or medium, but to transmit high-frequency or power-frequency electric energy to the metal workpiece by the induction coil, and the eddy current generated in the workpiece heats up, which is a self-heating to melt the brazing filler metal and spread it. Induction brazing has the advantages of concentrated energy transmission, extremely fast temperature rise, and local brazing.

[0003] The application of the prior art induction brazing in semiconductor brazing has been disclosed in a kind of vacuum induction brazing device and its using method of Chinese patent application No. 202010297249.9, which provides a kind of vacuum induction brazing device, and high heating efficiency can be realized by using induction brazing (because it does not need to cause heat loss by medium conduction heat), while the temperature control of traditional brazing is realized by detecting the temperature of heat conduction plate by thermocouple, and the temperature of heat conduction plate is controlled by controlling the temperature, and after using induction brazing, it does not have the structure of heat conduction plate, and the temperature of the brazed semiconductor product cannot be obtained directly by using existing temperature measuring tools. UTILITY MODEL CONTENT

[0004] In view of the above technical problems, the vacuum induction welding furnace provided by the utility model can obtain the accurate temperature of the semiconductor product subjected to induction welding.

[0005] To achieve the above purpose, the technical scheme adopted by the utility model is as follows:

[0006] The vacuum induction welding furnace provided by the utility model comprises a product moving device, a vacuum cavity, an inductor, a temperature measuring head and a temperature measuring head moving device. The product clamp can enter and leave the inside of the vacuum cavity. The inductor is fixed in the vacuum cavity. The product clamp can be moved to the opposite side of the inductor. The temperature measuring head and the temperature measuring head moving device are fixed in the vacuum cavity. The temperature measuring head is fixed on the temperature measuring head moving device. The temperature measuring head moving device can drive the temperature measuring head to move.

[0007] The vacuum induction welding furnace provided by the utility model preferably further comprises a nitrogen gas pipeline. The nitrogen gas pipeline is connected to the vacuum cavity.

[0008] The vacuum induction welding furnace provided by the utility model preferably further comprises a reducing gas pipeline. The reducing gas pipeline is connected to the vacuum cavity.

[0009] The technical scheme has the following advantages or beneficial effects:

[0010] The utility model provides a vacuum induction welding furnace relates to the semiconductor device processing equipment field, including product mobile device, vacuum cavity, inductor, temperature measuring head and temperature measuring head mobile device, product clamp for bearing product is included in product mobile device, product clamp can enter and leave the inside of vacuum cavity, inductor is fixed in the vacuum cavity, product clamp can move to the inductor opposite measurement, temperature measuring head with temperature measuring head mobile device is fixed in the vacuum cavity, temperature measuring head is fixed on temperature measuring head mobile device, temperature measuring head mobile device can drive temperature measuring head moves, the vacuum induction welding furnace provided by the utility model solves the product temperature acquisition difficulty of induction brazing in the prior art, thereby difficult to control the problem of induction power control product temperature, can obtain the accurate temperature of the semiconductor product of induction welding. BRIEF DESCRIPTION OF DRAWINGS

[0011] The utility model and its features, shape and advantages will become more apparent by reading the detailed description of the non-limiting embodiments with reference to the following drawings. The same reference signs indicate the same parts throughout the drawings. The drawings are not necessarily drawn to scale, the emphasis is on showing the main principles of the utility model.

[0012] Figure 1 It is the whole structure schematic diagram of vacuum induction welding furnace provided by the utility model embodiment 1. DETAILED DESCRIPTION

[0013] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. It should be noted that the terms used in the utility model are only for describing the specific embodiments, and are not intended to limit the exemplary embodiments according to the present application.

[0014] The technical scheme in the utility model embodiments will be described below with reference to the drawings in the utility model embodiments. Obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments. Therefore, the detailed description of the utility model embodiments provided in the following drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiments of the utility model, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the utility model.

[0015] Embodiment 1:

[0016] The vacuum induction welding furnace provided by the utility model embodiment 1, such as Figure 1As shown, including product moving device 1, vacuum cavity 2, inductor 3, temperature measuring head 4 and temperature measuring head moving device 5; Product moving device 1 includes product clamp 11 for carrying products; Product clamp 11 can enter and exit the inside of vacuum cavity 2; Inductor 3 is fixed in vacuum cavity 2; Product clamp 11 can be moved to inductor 3 relative to the measurement; Temperature measuring head 4 and temperature measuring head moving device 5 are fixed in vacuum cavity 2; Temperature measuring head 4 is fixed on temperature measuring head moving device 5; Temperature measuring head moving device 5 can drive temperature measuring head 4 to move.

[0017] The vacuum induction welding furnace provided by the embodiment 1 of the utility model is working, first of all through product moving device 1, the product outside is moved to the vacuum cavity, (through the gate with the air tightness function on the vacuum cavity), make product clamp 11 move to inductor 3 nearby, make inductor 3 work, the product that product clamp 11 clamps can be heated;Then the vacuum cavity 2 is extracted into vacuum;Then through temperature measuring head moving device 5, temperature measuring head 4 is moved to and product is adhered;Again control inductor 3 works, product temperature rises, through the signal of temperature measuring head 4 (and the electric connection transmission of external control), the temperature of product is perceived, thereby the power of inductor 3 is adjusted, thereby the temperature of product is adjusted to target temperature value.Compared with the prior art needs to measure the temperature measuring structure of heat conduction plate by temperature measuring head, the embodiment directly measures the temperature of product by the characteristics of directly heating product by induction welding, obtains the direct temperature of product, and the temperature data is more accurate, so that the induction power can be conveniently feedback controlled to adjust the temperature of product, and the temperature control effect is more accurate.

[0018] The vacuum induction welding furnace provided by the embodiment 1 of the utility model solves the problem that the temperature of the product induction brazed is difficult to obtain in the prior art, so that the induction power is difficult to control to control the temperature of the product, and the accurate temperature of the semiconductor product induction welded can be obtained.

[0019] As a preferred scheme, in the embodiment, nitrogen gas pipeline 6 and reducing gas pipeline 7 are further included; Nitrogen gas pipeline 6 communicates with the vacuum cavity; Reducing gas pipeline 7 communicates with the vacuum cavity. After the product reaches the target temperature, reducing gas needs to be introduced into the vacuum cavity 2 and heat preservation is needed, after the heat preservation time ends, the residual gas in the vacuum cavity 2 is extracted, the vacuum cavity 2 enters the vacuum state, and the inductor 3 heats the product to the target brazing temperature value at a set temperature rising slope, when the brazing temperature is reached, the inductor 3 enters the heat preservation program and performs timed heat preservation according to the set value; The conventional cooling method for the welded product is to cool the heat conduction plate, and in the embodiment, nitrogen gas can be filled into the vacuum cavity 2 through nitrogen gas pipeline 6 to cool the product until it approaches room temperature, and then the product is taken out from the cavity by the product moving device 1, and the welding process is completed.

[0020] In summary, the utility model provides a vacuum induction welding furnace relates to semiconductor device processing equipment field, including product mobile device, vacuum cavity, inductor, temperature measuring head and temperature measuring head mobile device, the product mobile device includes the product clamp for bearing product, the product clamp can enter and leave the inside of vacuum cavity, the inductor is fixed in the vacuum cavity, the product clamp can move to the inductor opposite measurement, temperature measuring head with temperature measuring head mobile device is fixed in the vacuum cavity, temperature measuring head is fixed on temperature measuring head mobile device, temperature measuring head mobile device can drive temperature measuring head moves, the utility model provides a vacuum induction welding furnace, solved in the prior art, the product temperature acquisition difficult of induction brazing, thereby difficult to control the problem of induction power control product temperature, can obtain the accurate temperature of the semiconductor product of induction welding.

[0021] The above description is only the preferred embodiment of the utility model, and does not limit the patent range of the utility model, and any equivalent structural transformation, direct or indirect application in other related technical fields using the contents of the utility model specification and drawings are also included in the patent protection range of the utility model.

Claims

1. A vacuum induction welding furnace, characterized in that, Includes product moving device, vacuum chamber, sensor, temperature measuring head and temperature measuring head moving device; The product moving device includes a product clamp for carrying the product; the product clamp can enter and exit the vacuum chamber. The sensor is fixed inside the vacuum chamber; the product clamp is movable to the side opposite the sensor. The temperature measuring head and the temperature measuring head moving device are fixed inside the vacuum chamber; the temperature measuring head is fixed on the temperature measuring head moving device; the temperature measuring head moving device can drive the temperature measuring head to move.

2. The vacuum induction welding furnace as described in claim 1, characterized in that, It also includes a nitrogen pipeline; the nitrogen pipeline is connected to the vacuum chamber.

3. The vacuum induction welding furnace as described in claim 1, characterized in that, It also includes a reducing gas pipeline; the reducing gas pipeline is connected to the vacuum chamber.

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