Double-air-port source bottle

Abstract

The utility model discloses a double-air-port source bottle which comprises a bottle body, a cover plate, an air inlet pipe, an air outlet pipe, an air inlet connector and an air outlet connector. The cover plate covers the bottle body and is in flange connection with the bottle body; the air inlet pipe and the air outlet pipe are fixedly arranged on the cover plate and communicate with the interior of the bottle body. A rectangular groove is formed in each of pipe openings of the air inlet pipe and the air outlet pipe; arc-shaped grooves are formed in the sides, far away from the rectangular grooves, of pipe openings of the air inlet pipe and the air outlet pipe respectively, the arc-shaped groove of the air inlet pipe is located below the central horizontal plane of the pipe openings, and the arc-shaped groove of the air outlet pipe is located above the central horizontal plane of the pipe openings; the air inlet joint and the air outlet joint are respectively provided with a rectangular bulge and an arc-shaped bulge which are mutually embedded with the grooves in the pipe orifices of the air inlet pipe and the air outlet pipe; sealing bulges are convexly arranged on the air inlet joint and the air outlet joint on the inner sides of the arc-shaped bulge and the rectangular bulge respectively, and are sleeved in pipe orifices of the air inlet pipe and the air outlet pipe; the air inlet connector and the air outlet connector are sleeved with locking pieces used for fixing the connectors and the pipe opening respectively.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor source bottle, especially a double gas port source bottle. BACKGROUND

[0002] The source bottle is a device capable of sublimating or vaporizing solid or liquid into gas by heating, and the gas inlet and the gas outlet have different functions and technical requirements. The source bottle is usually equipped with a high-precision filter at the gas inlet to remove impurities such as particulate matter, moisture and other components that may contaminate the reaction gas, to ensure the purity of the gas entering the source bottle. The design of the gas outlet needs to consider how to maintain appropriate back pressure, which is crucial for the uniform distribution of the reaction gas. Therefore, the correct airflow direction inside the source bottle is crucial for the use of the source bottle.

[0003] Therefore, the present inventors have specially designed a double gas port source bottle, which is the subject of the present application. CONTENT OF THE UTILITY MODEL

[0004] The utility model discloses a double gas port source bottle, which adopts two kinds of pipe openings that cannot be mixed and used, and can effectively prevent the operator from connecting the inlet and outlet pipelines incorrectly.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0006] A double gas port source bottle, comprising a bottle body, a cover plate, an air inlet pipe, an air outlet pipe, an air inlet connector and an air outlet connector. The bottle body is used to place a precursor. The cover plate is flange-connected to the bottle body. The air inlet pipe is fixedly arranged on one side of the cover plate and communicates with the inside of the bottle body. The air outlet pipe is fixedly arranged on the cover plate away from the air inlet pipe and communicates with the inside of the bottle body. Rectangular grooves for connector positioning are formed on the air inlet pipe and the air outlet pipe. An arc-shaped groove is formed on the side of the air inlet pipe and the air outlet pipe away from the rectangular groove. The arc-shaped groove on the air inlet pipe is below the center horizontal plane of the pipe opening, and the arc-shaped groove on the air outlet pipe is above the center horizontal plane of the pipe opening. Rectangular protrusions and arc-shaped protrusions are arranged on the air inlet connector and the air outlet connector, respectively, and are embedded in the grooves on the air inlet pipe and the air outlet pipe. Sealing protrusions are arranged on the air inlet connector and the air outlet connector on the inner side of the arc-shaped protrusions and the rectangular protrusions, and are sleeved in the pipe openings of the air inlet pipe and the air outlet pipe. Locking members for fixing the connectors and the pipe openings are arranged on the air inlet connector and the air outlet connector.

[0007] Further, air inlet valve bodies and air outlet valve bodies for controlling the communication of the air inlet pipe and the air outlet pipe are arranged on the air inlet pipe and the air outlet pipe, respectively. The air inlet valve bodies are used for filtering and removing impurities. The air outlet valve bodies are used for maintaining the back pressure of the air outlet pipe.

[0008] Further, the outer edge of the cover plate is circumferentially provided with an upper fixing hole penetrating the cover plate; the cover plate on the inner side of the upper fixing hole is provided with an annular protrusion for sealing the inside of the bottle body; the cover plate on the inner side of the annular protrusion is provided with an air inlet hole and an air outlet hole; the air inlet pipe is in communication with the inside of the bottle body through the air inlet hole; and the air outlet pipe is in communication with the inside of the bottle body through the air outlet hole.

[0009] Further, the outer edge of the cover plate is circumferentially provided with an upper fixing hole penetrating the cover plate; the cover plate on the inner side of the upper fixing hole is provided with an annular protrusion for sealing the inside of the bottle body; the cover plate on the inner side of the annular protrusion is provided with an air inlet hole and an air outlet hole; the air inlet pipe is in communication with the inside of the bottle body through the air inlet hole; and the air outlet pipe is in communication with the inside of the bottle body through the air outlet hole.

[0010] Further, the annular groove and the annular protrusion can be additionally provided with an O-shaped sealing ring.

[0011] Further, the air inlet valve body and the air outlet valve body are respectively provided with a control pipeline communication on-off valve.

[0012] Further, the locking member is respectively screwed with the air inlet connector and the air outlet connector.

[0013] After the above technical scheme is adopted, the utility model has the following beneficial effects:

[0014] 1. The utility model adopts a unique pipe connection mode, that is, the air inlet connector and the air outlet connector are respectively provided with a rectangular protrusion and an arc protrusion which are respectively embedded in the grooves on the air inlet pipe and the air outlet pipe, so as to effectively prevent the risk of misconnection of the inlet and outlet pipelines by the operator.

[0015] 2. The cover plate and the bottle body are connected through flanges, and the outer edge of the cover plate is circumferentially provided with an upper fixing hole penetrating the cover plate, which is used in cooperation with the corresponding lower fixing hole on the bottle body to realize the stable connection between the cover plate and the bottle body. Meanwhile, the annular protrusion on the cover plate is embedded in the annular groove of the bottle body, which not only plays a fixing role, but also strengthens the sealing property of the inside of the bottle body. DRAWINGS

[0016] Figure 1 It is a three-dimensional schematic view of the utility model;

[0017] Figure 2 It is a structural schematic view of the air inlet connector and the air outlet connector of the utility model;

[0018] Figure 3 It is a structural schematic view of the utility model after the air inlet connector and the air outlet connector are removed;

[0019] Figure 4 is a structure schematic view of the cover plate of the utility model;

[0020] Figure 5 is a structure schematic view of the bottle body of the utility model;

[0021] Figure 6 is a bottom view schematic view of the bottle body of the utility model.

[0022] The reference signs in the drawings represent:

[0023] 1, bottle body; 100, lower fixed hole; 101, annular groove; 102, air inlet; 103, air outlet; 104, serpentine channel; 2, cover plate; 200, upper fixed hole; 201, annular protrusion; 202, air inlet hole; 203, air outlet hole; 3, air inlet pipe; 4, air outlet pipe; 5, air inlet connector; 6, air outlet connector; 7, rectangular groove; 8, arc-shaped groove; 9, rectangular protrusion; 10, arc-shaped protrusion; 11, sealing protrusion; 12, locking member; 13, air inlet valve body; 14, air outlet valve body; 15, on-off valve. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the utility model more clear and obvious, the utility model is further described in detail below by combining with the drawings and examples. It should be understood that the specific examples described herein are only used to explain the utility model, and are not used to limit the utility model.

[0025] Please refer to Figures 1 to 6A kind of double gas port source bottle, including bottle body 1, cover plate 2, air inlet pipe 3, air outlet pipe 4, air inlet connector 5 and air outlet connector 6;Bottle body 1 is used to place precursor inside;Cover plate 2 is covered on bottle body 1 and carries out flange connection with bottle body 1;Air inlet pipe 3 is fixedly arranged on the side of cover plate 2 and air inlet pipe 3 is communicated with the inside of bottle body 1;Air outlet pipe 4 is fixedly arranged on the side of cover plate 2 away from air inlet pipe 3 and air outlet pipe 4 is communicated with the inside of bottle body 1;Rectangular groove 7 for connector positioning is respectively set on the pipe orifice of air inlet pipe 3 and air outlet pipe 4;An arc-shaped groove 8 is respectively set on the side of pipe orifice of air inlet pipe 3 and air outlet pipe 4 away from rectangular groove 7, the arc-shaped groove 8 on air inlet pipe 3 is below the center horizontal plane of pipe orifice, and the arc-shaped groove 8 on air outlet pipe 4 is above the center horizontal plane of pipe orifice;Rectangular protrusion 9 and arc-shaped protrusion 10 that are mutually embedded with the groove on the pipe orifice of air inlet pipe 3 and air outlet pipe 4 are respectively arranged on air inlet connector 5 and air outlet connector 6;Sealing protrusion 11 is respectively protruded on air inlet connector 5 and air outlet connector 6 in the inside of arc-shaped protrusion 10 and rectangular protrusion 9, and sealing protrusion 11 is sleeved in the pipe orifice of air inlet pipe 3 and air outlet pipe 4;Locking member 12 for fixing connector and pipe orifice is respectively sleeved on air inlet connector 5 and air outlet connector 6;The volume of bottle body 1 in the utility model is small, leading to shorter purging distance, without needing to separately set structure for purging;In addition, air outlet pipe 4 is fixedly arranged on the side of cover plate 2 away from air inlet pipe 3, which provides operable space for installing other components.

[0026] As shown in Figure 1 , air inlet valve body 13 and air outlet valve body 14 for controlling the communication of the pipeline are respectively arranged on air inlet pipe 3 and air outlet pipe 4, air inlet valve body 13 is used for filtering and removing impurities;Air outlet valve body 14 is used for maintaining the back pressure of air outlet pipe 4, and air inlet valve body 13 and air outlet valve body 14 are both valve bodies commonly used in source bottle in the market, which will not be described here.

[0027] As shown in Figure 4 , upper fixing hole 200 penetrating cover plate 2 is circumferentially arranged on the outer edge of cover plate 2;Annular protrusion 201 for sealing the inside of bottle body 1 is arranged on the inside of upper fixing hole 200 of cover plate 2;Air inlet hole 202 and air outlet hole 203 are arranged on the inside of annular protrusion 201 of cover plate 2;Air inlet pipe 3 is communicated with the inside of bottle body 1 through air inlet hole 202;Air outlet pipe 4 is communicated with the inside of bottle body 1 through air outlet hole 203.

[0028] As shown in Figure 5As shown, the upper end of the bottle body 1 is provided with a lower fixed hole 100 corresponding to the upper fixed hole 200 in the circumferential direction, and the lower fixed hole 100 is fixed by a bolt from the upper fixed hole 200 and fixed by a nut at the end of the bolt; The upper end of the bottle body 1 inside the lower fixed hole 100 is provided with an annular groove 101, and the bottle body 1 is sealed by embedding the annular protrusion 201 into the annular groove 101; The upper end of the bottle body 1 inside the annular groove 101 is provided with an air inlet 102 and an air outlet 103; The air inlet 102 and the air outlet 103 are communicated with the air inlet pipe 3 and the air outlet pipe 4 respectively; The upper end of the bottle body 1 inside the annular groove 101 is provided with a serpentine channel 104 for communicating the air inlet 102 and the air outlet 103, and the serpentine channel 104 is used for placing the hafnium tetrachloride powder to be sublimed and limiting the flow line of the carrier gas.

[0029] Preferably, an O-shaped sealing ring can be added between the annular groove 101 and the annular protrusion 201, which is used to prevent the leakage of the medium in the bottle body 1 and reduce the wear of the annular groove 101 and the annular protrusion 201 due to direct contact.

[0030] As shown in the figure, Figure 1 The air inlet valve body 13 and the air outlet valve body 14 are respectively provided with a control pipeline communication on-off valve 15.

[0031] As shown in the figure, Figure 1 The locking member 12 is respectively screwed with the air inlet connector 5 and the air outlet connector 6.

[0032] The use process of the utility model is as follows:

[0033] S1, the hafnium tetrachloride powder is placed in the serpentine channel 104 inside the bottle body 1;

[0034] S2, the cover plate 2 is sealed and fixed with the bottle body 1 by flange, the air inlet connector 5 and the air outlet connector 6 are fixedly connected with the air inlet pipe 3 and the air outlet pipe 4 respectively, and then the on-off valve 15 on the air inlet valve body 13 and the air outlet valve body 14 is opened;

[0035] S3, purging: the air inlet connector 5 is communicated with high-purity nitrogen source, and the air outlet connector 6 discharges air, so that the environment in the bottle body 1 is only filled with high-purity nitrogen;

[0036] S4, the source bottle is uniformly heated;

[0037] S5, the carrier gas is introduced into the air inlet pipe 3 from the air inlet connector 5, and then flows into the bottle body 1 and the serpentine channel 104, so that the sublimed hafnium tetrachloride gas is carried out with the carrier gas (such as nitrogen) and used in the processing chamber.

[0038] The above merely describes a preferred embodiment of the present application, and the protection scope of the present application is not limited thereto, and any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the present application, which should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A dual vent source bottle characterized by: The utility model provides a kind of precursor vaporization device, including bottle body (1), cover plate (2), air inlet pipe (3), air outlet pipe (4), air inlet joint (5) and air outlet joint (6);The bottle body (1) inside is used to place precursor;The cover plate (2) is covered on bottle body (1) and carries out flange connection with bottle body (1);The air inlet pipe (3) is fixedly arranged on the side of cover plate (2) and the air inlet pipe (3) is communicated with the inside of bottle body (1);The air outlet pipe (4) is fixedly arranged on the side of cover plate (2) away from air inlet pipe (3) and the air outlet pipe (4) is communicated with the inside of bottle body (1);Rectangular groove (7) for joint positioning is respectively arranged on the pipe orifice of air inlet pipe (3) and air outlet pipe (4);Arc-shaped groove (8) is respectively arranged on the side of pipe orifice of air inlet pipe (3) and air outlet pipe (4) away from rectangular groove (7), and the arc-shaped groove (8) on air inlet pipe (3) is below the horizontal plane of pipe orifice center, and the arc-shaped groove (8) on air outlet pipe (4) is above the horizontal plane of pipe orifice center;Rectangular projection (9) and arc-shaped projection (10) that are respectively embedded with the groove on the pipe orifice of air inlet pipe (3) and air outlet pipe (4) are respectively arranged on air inlet joint (5) and air outlet joint (6);Sealing projection (11) is respectively protruded on air inlet joint (5) and air outlet joint (6) in the inside of arc-shaped projection (10) and rectangular projection (9), and sealing projection (11) is sleeved in the pipe orifice of air inlet pipe (3) and air outlet pipe (4);Locking member (12) for fixing joint and pipe orifice is respectively sleeved on air inlet joint (5) and air outlet joint (6).

2. The dual vent source bottle of claim 1, wherein: Air inlet valve body (13) and air outlet valve body (14) for controlling the communication of the pipeline are respectively arranged on air inlet pipe (3) and air outlet pipe (4);The air inlet valve body (13) is used for filtering and removing impurities;The air outlet valve body (14) is used for maintaining the back pressure of air outlet pipe (4).

3. The dual vent source bottle of claim 1, wherein: Upper fixed hole (200) that penetrates cover plate (2) is opened in the circumferential direction of the outer edge of cover plate (2);Annular projection (201) for sealing the inside of bottle body (1) is arranged on the inside of upper fixed hole (200) of cover plate (2);Air inlet hole (202) and air outlet hole (203) are opened on the inside of annular projection (201) of cover plate (2);The inside of bottle body (1) is communicated with air inlet pipe (3) through air inlet hole (202);The inside of bottle body (1) is communicated with air outlet pipe (4) through air outlet hole (203).

4. The dual vent source bottle of claim 3, wherein: The upper end of the bottle body (1) is provided with a lower fixed hole (100) corresponding to the upper fixed hole (200) in the circumferential direction; an annular groove (101) is formed in the bottle body (1) inside the lower fixed hole (100), and the bottle body (1) is sealed by embedding the annular protrusion (201) into the annular groove (101); an air inlet (102) and an air outlet (103) are formed in the bottle body (1) inside the annular groove (101); the air inlet (102) and the air outlet (103) are respectively communicated with the air inlet pipe (3) and the air outlet pipe (4); a serpentine channel (104) for communicating the air inlet (102) and the air outlet (103) is formed in the bottle body (1) inside the annular groove (101).

5. The dual vent source bottle of claim 4, wherein: An O-shaped sealing ring can be additionally arranged between the annular groove (101) and the annular protrusion (201).

6. The dual vent source bottle of claim 2, wherein: The air inlet valve body (13) and the air outlet valve body (14) are respectively provided with a control pipeline communication on-off valve (15).

7. The dual vent source bottle of claim 1, wherein: The locking members (12) are respectively threadedly connected with the air inlet joint (5) and the air outlet joint (6).

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