Staggered floor prevention type annular carrier plate feeding equipment
By using an anti-misalignment ring-shaped carrier plate feeding device, which utilizes height adjustment equipment and sensing devices to detect the position of the carrier plate, the problems of low feeding efficiency and misalignment of ring-shaped carrier plates are solved, achieving efficient and accurate carrier plate conveying and space saving.
Patent Information
- Application Number
- CN202423319227.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-11-25
- Estimated Expiration
- 2034-12-30
AI Technical Summary
The existing ring-shaped carrier plate feeding method is inefficient and prone to misalignment, which can cause the robotic arm to damage the carrier plate. It also occupies a lot of space and is costly.
The anti-misalignment ring-shaped carrier plate feeding equipment is adopted, including height adjustment equipment, sensing device and data box. The sensing device detects the position of the carrier plate in real time to prevent misalignment, and the alarm device handles abnormal conditions in a timely manner.
It achieves efficient and accurate carrier feeding, reduces space occupation, avoids carrier damage, and reduces operating costs.
Smart Images
Figure CN223591745U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a feeding equipment, especially to a mistake-proof layer type annular carrier plate feeding equipment. BACKGROUND
[0002] For the existing semiconductor processing, annular carrier plates are needed to carry and feed some components such as wafers. After the annular carrier plates complete feeding, they enter a dispensing feeding station and wait for a new use cycle. The conventional way is to manually carry and place them at the starting discharge port of the processing equipment. Alternatively, a feeding belt is used to return the annular carrier plates to the initial position.
[0003] However, manual carrying is low in efficiency. If the feeding belt is used and there is a horizontal station difference, a large space in the factory area will be occupied, and the use cost is high.
[0004] Currently, a vertical guide feeding mode is also used to send the annular carrier plates that have completed feeding at the top to the lower end for preparation. The annular carrier plates are usually transported in batches in a cumulative manner. During transportation, the annular carrier plates may be stacked in layers. Thus, the subsequent material taking robot cannot effectively dock, and the annular carrier plates are easily damaged, which may cause scrap.
[0005] In view of the above defects, the present design actively researches and innovates to create a mistake-proof layer type annular carrier plate feeding equipment, so that it has more industrial use value. CONTENT OF THE UTILITY MODEL
[0006] To solve the above technical problems, the utility model aims to provide a mistake-proof layer type annular carrier plate feeding equipment.
[0007] The mistake-proof layer type annular carrier plate feeding equipment of the utility model comprises a bottom carrier plate, a bearing support is installed on the bottom carrier plate, wherein: a height adjustment device is installed on the bottom carrier plate, a feeding box is connected to the driving end of the height adjustment device after passing through the bearing support, the bearing support is located at the opening of the feeding box, a plurality of sensing devices are installed, the collection port of the sensing device is aligned with the opening of the feeding box, a data box is installed on the bottom carrier plate, and the data box is electrically connected with the sensing device.
[0008] Further, the mistake-proof layer type annular carrier plate feeding equipment, wherein the bearing support comprises a plurality of vertical columns connected with the bottom carrier plate, a bearing plate is installed on the vertical column, and the sensing device is installed on the bearing plate; the height adjustment device is an electric cylinder, a driving plate is installed on the driving end of the electric cylinder, a plurality of force rods are installed on the driving plate, and the force rods are connected with the lower end of the feeding box after passing through the bearing plate.
[0009] Further, the anti-mistake layer type annular carrier plate feeding device, wherein the bottom carrier plate is located below the driving plate and is provided with a limiting support rod.
[0010] Further, the anti-mistake layer type annular carrier plate feeding device, wherein the feeding box comprises a box body, a box cover is connected to the box body through a hinge, and a plurality of parallelly distributed placement grooves are arranged on the inner side surfaces of the two mirror image distributed side plates of the box body.
[0011] Further, the anti-mistake layer type annular carrier plate feeding device, wherein the sensing device is a laser sensor, or the sensing device is an infrared sensor.
[0012] Further, the anti-mistake layer type annular carrier plate feeding device, wherein a PLC module is arranged in the data box, the PLC module is electrically connected with the sensing device, and a communication module is further connected to the PLC module.
[0013] Further, the anti-mistake layer type annular carrier plate feeding device, wherein the communication module is a 5G module, or the communication module is a USB transmission interface.
[0014] Further, the anti-mistake layer type annular carrier plate feeding device, wherein the data box is provided with an alarm device, and the alarm device is an LED lamp or a buzzer.
[0015] Through the above scheme, the anti-mistake layer type annular carrier plate feeding device has at least the following advantages:
[0016] 1. The height adjusting device is arranged, the feeding box can be switched between two workstations, auxiliary feeding is realized, the feeding belt is not needed for descending transmission, and the occupation of the space of the workstations is reduced.
[0017] 2. The feeding box is provided with the placement grooves, the annular carrier plate can be auxiliary limited, and the active anti-mistake layer layout requirement is met.
[0018] 3. The sensing device is arranged, the existence of the mistake layer abnormality can be found in time, the abnormal state can be alarmed in time, the intervention processing is facilitated, and the annular carrier plate in the mistake layer state is not damaged due to the abnormal clamping of the material taking mechanical arm.
[0019] 4. The sensing device can be on-site distinguished with the data box, and the operation and maintenance personnel can quickly process.
[0020] 5. The overall structure is simple, and the anti-mistake layer type annular carrier plate feeding device can meet the matching use of the conventional annular carrier plate processing equipment.
[0021] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the use of a non-misaligned ring-shaped carrier plate feeding device.
[0023] The meanings of the labels in the figures are as follows.
[0024] 1. Bottom carrier plate 2. Support bracket
[0025] 3. Height adjustment equipment 4. Feeding box
[0026] 5. Sensor device 6. Data box
[0027] 7. Bearing plate 8. Drive plate
[0028] 9. Force application rod; 10. Limiting support rod
[0029] 11 Placement slot 12 Annular carrier plate Detailed Implementation
[0030] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.
[0031] like Figure 1 The anti-misalignment layered annular carrier plate feeding device includes a bottom carrier plate 1, on which a support bracket 2 is installed to allow for lifting to a standby position, facilitating docking with the working height of subsequent material handling equipment. Its unique feature is that a height adjustment device 3 is installed on the bottom carrier plate 1, with its drive end passing through the support bracket 2 and connected to a feeding box 4. This allows for batch vertical displacement of the annular carrier plates 12. Furthermore, this invention installs several sensing devices 5 at the opening of the feeding box 4 on the support bracket 2, with the sensor ports aligned with the opening of the feeding box 4. This effectively senses the placement of the annular carrier plates 12 within the feeding box 4 and transmits the corresponding data to the back-end processing equipment of the processing equipment. Of course, for convenient local data processing, this invention can also install a data box 6 on the bottom carrier plate 1, which is electrically connected to the sensing devices 5.
[0032] In combination with a preferred embodiment of the utility model, the bearing support 2 comprises a plurality of columns connected with the bottom loading plate 1, the columns are provided with the bearing plate 7, and the sensing device 5 is installed on the bearing plate 7. Meanwhile, in order to realize stable lifting and falling reset, the height adjusting equipment 3 is an electric cylinder, the driving end of the electric cylinder is provided with the driving plate 8, a plurality of force rods 9 are installed on the driving plate 8, and the force rods 9 are connected with the lower end of the feeding box 4 after penetrating through the bearing plate 7. In this way, the feeding box 4 can be driven to move up and down by the force rods 9, and the feeding mechanical arm at the upper end can also be docked, and the taking mechanical arm below can also be docked after falling. Moreover, the limiting support rod 10 is installed below the driving plate 8 when the bottom loading plate 1 is located below the driving plate 8. In this way, when the driving plate 8 is in a standby state, auxiliary support can be realized, and the burden of the driving end of the electric cylinder can be reduced. Furthermore, the driving plate 8 can be prevented from abnormally sinking under high load, and the electric cylinder will not be damaged. Of course, during implementation, the height adjusting equipment 3 can also adopt a linear motor, a cylinder and other equipment capable of realizing vertical direction displacement driving, and details are not described herein.
[0033] Further, the feeding box 4 comprises a box body, a box cover is connected to the box body through a hinge, and a plurality of parallel distribution placing grooves 11 are arranged on the inner side of the two mirror image distribution side plates of the box body. In this way, the feeding mechanical arm can be inserted into the annular loading plate 12 in the placing groove 11 one by one, and batch loading can be realized. When subsequent abnormality needs to be checked, the box cover can be opened to place and correct the deviation.
[0034] In combination with actual implementation, the sensing device 5 is a laser sensor, which can timely find the annular loading plate 12 in a skew state. Of course, an infrared sensor can also be selected according to different cumulative storage intervals or the shape of the annular loading plate 12.
[0035] Further, in order to realize convenient local layer error sensing and identification, a PLC module is installed in the data box 6, the PLC module is electrically connected with the sensing device 5, and a communication module is further connected to the PLC module. In this way, corresponding discrimination is realized through pre-recording programs of the PLC module. Meanwhile, in order to realize communication with corresponding terminal equipment, the communication module is a 5G module or a USB transmission interface, which is convenient for realizing remote alarm. Of course, in order to meet the convenience of local alarm and facilitate on-site operation and maintenance personnel to timely intervene and correct the annular loading plate 12 in the error state, the utility model is connected with an alarm device on the data box 6, and the alarm device is an LED lamp or a buzzer.
[0036] It should be noted that, Figure 1 The connection line of the sensing device 5 is only a schematic diagram, and after actual assembly, corresponding wire pipelines will be integrated, and the exposed connection line will not appear.
[0037] The working principle of the utility model is as follows:
[0038] The height adjusting device 3 drives the feeding box 4 to ascend to reach a feeding position. The feeding mechanical arm inserts the annular carrier plate 12 into the placing groove 11 in the feeding box 4 layer by layer.
[0039] Then, the height adjusting device 3 drives the feeding box 4 to fall back, and the limiting support rod 10 assists the support of the driving plate 8, thereby completing the lifting of the feeding box 4. Thus, the feeding box 4 is in a waiting feeding position. At this time, the sensing device 5 scans the placing state of each annular carrier plate 12 and transmits the scanned data to the data box 6. If there is a mislayered placement, the reflection values obtained by the adjacent two sensing devices 5 have a large difference.
[0040] If there is no mislayered placement, after the data box 6 passes the verification, the feeding mechanical arm starts to feed. If the data box 6 finds abnormal mislayered placement after the verification, an alarm is given in time, and the operation and maintenance personnel come to the scene for adjustment.
[0041] As can be seen from the above description and the accompanying drawings, the present application has the following advantages:
[0042] 1. The height adjusting device is provided, the feeding box can be switched between two stations, auxiliary feeding is realized, the feeding belt does not need to be used for descending transmission, and the occupation of the station space is reduced.
[0043] 2. The feeding box is provided with the placing groove, the annular carrier plate can be assisted and limited, and the active mislayered layout requirement is met.
[0044] 3. The sensing device is provided, the mislayered abnormality can be found in time, the abnormal state can be alarmed in time, the intervention treatment is facilitated, the annular carrier plate in the mislayered state is not abnormally clamped by the feeding mechanical arm, and damage of the annular carrier plate is avoided.
[0045] 4. The sensing device can be on-site distinguished with the data box, and the operation and maintenance personnel can quickly treat.
[0046] 5. The overall structure is simple, and the present application can meet the matching use of the conventional annular carrier plate processing equipment.
[0047] In addition, the indicated direction or position relationship described in the present application is the direction or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the indicated device or structure must have a specific direction or be operated in a specific direction, so it cannot be understood as a limitation on the present application.
[0048] The above merely is preferred implementation manner of the present application, and is not used for limiting the present application, it should be pointed out, for ordinary skilled person in the technical field, on the premise of not departing from the technical principle of the present application, can also make several improvements and variations, these improvements and variations also should be regarded as the protection scope of the present application.
Claims
1. A mistake-proofing ring-shaped carrier plate feeding device, comprising a bottom carrier plate, a bearing support is installed on the bottom carrier plate, characterized in that: The bottom carrier plate is provided with a height adjusting device, a driving end of the height adjusting device is connected with a feeding box through a bearing support, the bearing support is located at an opening of the feeding box, a plurality of sensing devices are installed, collection ports of the sensing devices are aligned with the opening of the feeding box, a data box is installed on the bottom carrier plate, and the data box is electrically connected with the sensing devices.
2. The pick-to-light carousel load plate feeding apparatus of claim 1, wherein: The bearing support comprises a plurality of columns connected with the bottom carrier plate, a bearing plate is installed on the columns, and the sensing devices are installed on the bearing plate; the height adjusting device is an electric cylinder, a driving plate is installed on a driving end of the electric cylinder, a plurality of force rods are installed on the driving plate, and the force rods are connected with lower ends of the feeding box through the bearing plate.
3. The pick-and-place, tiered annular carrier plate feeding apparatus of claim 2, wherein: The bottom carrier plate is provided with a limiting support rod below the driving plate.
4. The mistake-proof, tiered annular carrier panel feed apparatus of claim 1, wherein: The feeding box comprises a box body, a box cover is connected with the box body through a hinge, and a plurality of parallel distribution placement grooves are arranged on inner sides of two mirror image side plates of the box body.
5. The mistake-proof, tiered annular carrier panel feed apparatus of claim 1, wherein: The sensing device is a laser sensor, or the sensing device is an infrared sensor.
6. The mistake-proof, tiered annular carrier panel feed apparatus of claim 1, wherein: A PLC module is installed in the data box, the PLC module is electrically connected with the sensing device, and a communication module is further connected with the PLC module.
7. The pick-to-light carousel load plate feeding apparatus of claim 6, wherein: The communication module is a 5G module, or the communication module is a USB transmission interface.
8. The mistake-proof, tiered annular carrier panel feed apparatus of claim 1, wherein: An alarm device is connected with the data box, the alarm device is an LED lamp or a buzzer.