Double-clip type target material hoop with rectangular movable ring

Abstract

The utility model discloses a double-clip type target material hoop with a rectangular movable ring, which comprises an upper hoop body and a lower hoop body, and the upper hoop body and the lower hoop body are locked and fixed through a bolt after being mutually spliced, so that a target material is hermetically connected with a connecting end of a rotating cathode; the inner wall of the upper hoop body and the inner wall of the lower hoop body are provided with sequentially-connected annular grooves used for containing metal sealing rings, and the metal sealing rings are pressed, covered and fixed into the sealing grooves in the outer wall of the target material along with clamping of the upper hoop body and the lower hoop body. An annular movable ring is further arranged in the annular groove, and the annular movable ring makes contact with and moves along the inclined face of the annular groove, so that the metal sealing ring is pushed to slide into the sealing groove in the outer wall of the target material. According to the double-clip type target hoop, only the metal sealing ring needs to be placed near the sealing groove in the outer wall of the target, and the annular movable ring slides along the inclined surface of the annular groove along with the clamping of the upper hoop body and the lower hoop body, so that the metal sealing ring is pushed into the sealing groove in the outer wall of the target, the alignment difficulty of the metal sealing ring is greatly reduced, and the target can be conveniently and quickly positioned. Therefore, the sealing performance of the rotating cathode is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to target material hoop technology field, especially in a pair of clamping formula target material hoop with rectangular movable ring. BACKGROUND

[0002] In the vacuum magnetron sputtering coating equipment, the target material is usually installed outside the magnetic bar assembly, and needs to continuously pass in the cooling water in the target material to cool the magnetic bar assembly, so the end of the target material needs to be sealed and connected with the connecting end of the rotating cathode.

[0003] In the traditional rotating cathode, the target material hoop is usually used for sealing connection, but at present, the conventional pair of clamping hoop is basically used for sealing connection. Since the metal sealing ring is the key to determine the sealing performance in the pair of clamping hoop, it needs to be accurately embedded in the sealing groove of the target material outer wall to realize the sealing connection. But in the actual installation process, when the upper hoop body and the lower hoop body are clamped, the metal sealing ring is in the visual blind area, so the installation worker needs to repeatedly align to make the metal sealing ring embedded in the sealing groove of the target material outer wall. UTILITY MODEL CONTENTS

[0004] The utility model discloses a pair of clamping formula target material hoop with rectangular movable ring, only need to place the metal sealing ring in the vicinity of the sealing groove of the target material outer wall, along with the clamping of the upper hoop body and the lower hoop body, the annular movable ring slides along the inclined surface of the ring groove, thereby pushing the metal sealing ring into the sealing groove of the target material outer wall, greatly reducing the alignment difficulty of the metal sealing ring, thereby improving the sealing performance of the rotating cathode.

[0005] To solve the above technical problems, the utility model provides a pair of clamping formula target material hoop with rectangular movable ring, including upper hoop body and lower hoop body, the upper hoop body and the lower hoop body are mutually spliced and are locked and fixed through bolt, thereby sealing and connecting the connecting end of the target material and the rotating cathode.

[0006] The inner wall of the upper hoop body and the lower hoop body is provided with the ring groove that is connected in sequence, for placing the metal sealing ring, along with the clamping of the upper hoop body and the lower hoop body, the metal sealing ring is fixedly covered in the sealing groove of the target material outer wall.

[0007] The ring groove is also provided with the annular movable ring, and the annular movable ring is in contact with the inclined surface of the ring groove and moves, thereby sliding the metal sealing ring into the sealing groove of the target material outer wall.

[0008] Preferably, the annular movable ring is processed with a step on one side, and the metal sealing ring is clamped by the side wall of the ring groove together.

[0009] Preferably, the annular movable ring is processed with an inclined surface on the side away from the step, and the inclined surface of the side wall of the ring groove is in sliding contact.

[0010] Preferably, the metal sealing ring is a ring-shaped sealing ring with a rectangular cross section.

[0011] Preferably, a notch is formed on the metal sealing ring, and the diameter of the metal sealing ring is gradually reduced with the clamping of the upper clamp body and the lower clamp body, and finally the metal sealing ring is pressed and fixed in the sealing groove of the outer wall of the target material.

[0012] Preferably, the upper clamp body and the lower clamp body are symmetrically provided with a stop edge on the same side, and the inner side of the stop edge is a slope which is in contact with the connecting end of the adapter, thereby locking the axial position of the target material.

[0013] Compared with the prior art, the utility model has the beneficial effects that:

[0014] The pair of clamp type target material clamps only need to place the metal sealing ring near the sealing groove of the outer wall of the target material, and with the clamping of the upper clamp body and the lower clamp body, the annular movable ring slides along the slope of the ring groove, thereby pushing the metal sealing ring into the sealing groove of the outer wall of the target material, greatly reducing the alignment difficulty of the metal sealing ring, and thereby improving the sealing performance of the rotary cathode. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is the connection position view of the pair of clamp type target material clamps with a rectangular movable ring of the utility model;

[0016] Figure 2 is the structure schematic view of the pair of clamp type target material clamps with a rectangular movable ring provided by the utility model from a first perspective;

[0017] Figure 3 is the structure schematic view of the pair of clamp type target material clamps with a rectangular movable ring provided by the utility model from a second perspective;

[0018] Figure 4 is the sectional view of the pair of clamp type target material clamps with a rectangular movable ring provided by the utility model;

[0019] Figure 5 is the structure schematic view of the lower clamp body provided by the utility model;

[0020] Figure 6 is the structure schematic view of the annular movable ring and the metal sealing ring provided by the utility model.

[0021] In the drawing: 1, upper clamp body; 2, lower clamp body; 3, ring groove; 4, metal sealing ring; 41, notch; 5, annular movable ring; 6, stop edge; 100, target material; 200, connecting end. DETAILED DESCRIPTION

[0022] The utility model will be made further detailed description below combining with the drawings and specific embodiments. The advantages and features of the utility model will be more clear according to the following description and claims. It should be noted that, the drawings all adopt very simplified form and all use non-precise proportion, only to facilitate, clearly assist the purpose of the description of the utility model embodiment.

[0023] In the description of the utility model, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model.

[0024] In the description of the utility model, it needs to be understood that the terms "mounting", "connecting", "connection" should be understood in a broad sense unless otherwise explicitly specified and limited, for example, can be fixed connection, can also be detachable connection, or integrally connected, can be mechanical connection, can also be electrical connection, can be directly connected, can also be indirectly connected through an intermediate medium, and can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances. Embodiment

[0025] The utility model provides a kind of pair of clamps formula target material hoop with rectangular movable ring, please refer to Figure 1 , including upper hoop body 1 and lower hoop body 2, the upper hoop body 1 and the lower hoop body 2 are mutually spliced and then fixed by bolt locking, to connect the connecting end 200 of target material 100 and rotating cathode with sealing connection.

[0026] Specifically, please refer to Figure 2 And Figure 3 , the inner wall of the upper hoop body 1 and the lower hoop body 2 is provided with the ring groove 3 of mutual connection, for placing metal sealing ring 4, with the clamping of the upper hoop body 1 and the lower hoop body 2, the metal sealing ring 4 is pressed and fixed in the sealing groove of the outer wall of the target material 100;The ring groove 3 is also provided with annular movable ring 5, and the annular movable ring 5 is contacted and moved along the inclined surface of the ring groove 3, to push the metal sealing ring 4 and slide into the sealing groove of the outer wall of the target material 100.

[0027] Further, please refer to Figures 4-6 , the annular movable ring 5 one side is processed with step, and the sidewall of the ring groove 3 is collectively clamped with the metal sealing ring 4.

[0028] And the side of the annular movable ring 5 away from the step is processed with a slope, and is in sliding contact with the slope of the sidewall of the ring groove 3.

[0029] In the embodiment, the metal sealing ring 4 is a rectangular cross-section annular sealing ring, and a notch 41 is formed on the metal sealing ring 4, and as the upper hoop body 1 and the lower hoop body 2 are clamped, the diameter of the metal sealing ring 4 is gradually reduced, and finally is pressed and fixed in the sealing groove on the outer wall of the target material 100.

[0030] Specifically, the upper hoop body 1 and the lower hoop body 2 are symmetrically provided with a stop edge 6 on the same side, and the inner side of the stop edge 6 is a slope, which is in contact with the connection part of the connecting end 200, so as to lock the axial position of the target material 100.

[0031] The pair of clamping type target material hoop only needs to place the metal sealing ring 4 near the sealing groove on the outer wall of the target material 100, and as the upper hoop body 1 and the lower hoop body 2 are clamped, the annular movable ring 5 slides along the slope of the ring groove 3, so as to push the metal sealing ring 4 into the sealing groove on the outer wall of the target material, which greatly reduces the alignment difficulty of the metal sealing ring 4, and improves the sealing performance of the rotary cathode.

[0032] The above description is only the description of the preferred embodiment of the utility model, and does not limit the scope of the utility model, and any change and modification of the above disclosure by the ordinary skilled in the art is within the protection scope of the claims.

Claims

1. A pair of target clamping collets with rectangular movable rings, characterized in that, The application relates to a target material sealing device for a rotary cathode, which comprises an upper hoop body (1) and a lower hoop body (2), the upper hoop body (1) and the lower hoop body (2) are mutually spliced and fixed by bolt locking, so as to seal and connect a target material (100) and a connecting end (200) of a rotary cathode; The inner walls of the upper hoop body (1) and the lower hoop body (2) are provided with sequentially-arranged ring grooves (3) for placing metal sealing rings (4), the metal sealing rings (4) are pressed and fixed in sealing grooves on the outer wall of the target material (100) by the clamping of the upper hoop body (1) and the lower hoop body (2). The ring grooves (3) are further provided with annular movable rings (5), the annular movable rings (5) are in contact with the inclined surfaces of the ring grooves (3) and push the metal sealing rings (4) to slide into the sealing grooves on the outer wall of the target material (100).

2. A split target collet with a rectangular floating ring as defined in claim 1, wherein, One side of the annular movable rings (5) is provided with a step, and the step and the side wall of the ring groove (3) jointly clamp the metal sealing ring (4).

3. A split target collet with a rectangular floating ring as defined in claim 2, wherein, The side, away from the step, of the annular movable ring (5) is provided with an inclined surface, and the inclined surface is in sliding contact with the inclined surface of the side wall of the ring groove (3).

4. A split target collet with a rectangular floating ring as defined in claim 1, wherein, The metal sealing ring (4) is a ring-shaped sealing ring with a rectangular cross section.

5. A clamp-on target collet with a rectangular movable ring as defined in claim 4, characterized in that The metal sealing ring (4) is provided with a notch (41), the diameter of the metal sealing ring (4) is gradually reduced by the clamping of the upper hoop body (1) and the lower hoop body (2), and the metal sealing ring (4) is finally pressed and fixed in the sealing groove on the outer wall of the target material (100).

6. A split target collet with a rectangular free ring as defined in claim 1, wherein, The upper hoop body (1) and the lower hoop body (2) are symmetrically provided with a stop edge (6) on the same side, the inner side of the stop edge (6) is an inclined surface, the inclined surface is in contact with the connecting part of the connecting end (200), so as to lock the axial position of the target material (100).

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