Safety module of deposition process tank

Abstract

The utility model provides a safety module of a deposition process tank, and relates to the technical field of semiconductor equipment. The device is suitable for being arranged on a process tank body, a feeding valve and a discharging valve are arranged on a feeding pipeline and a discharging pipeline of the process tank body respectively, the device comprises an inert gas source, a first protective gas circuit and a second protective gas circuit, the first protective gas circuit and the second protective gas circuit are connected with the inert gas source, and the first protective gas circuit is connected to the upstream end of the feeding valve. The second protective gas circuit is connected to the downstream end of the discharge valve; the inert gas source is suitable for conveying inert gas to the upstream end of the feeding valve and the downstream end of the discharging valve so that the pressure of the upstream end of the feeding valve and the pressure of the downstream end of the discharging valve can be larger than the atmospheric pressure, and it is guaranteed that gas leaked into the process tank from the feeding valve and the discharging valve is the inert gas. And therefore, air is prevented from leaking into the process tank body. By means of the scheme, the problem that air leaks into the feeding port and the discharging port can be effectively solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor equipment, specifically, relates to a safety module of deposition process tank body. BACKGROUND

[0002] In order to ensure the safety of the process, the existing fluidized bed silicon-carbon deposition generally replaces the air in the process tank by a large amount of high-purity nitrogen, and cooperates with oxygen concentration measurement to determine whether the process can be carried out, so as to prevent the explosion and other dangers in the process caused by excessively high oxygen concentration. However, the powder ball valve and the related sealing position provided on the existing process tank cannot ensure no leakage, because the valve will inevitably stick to the material during use, leading to inevitable internal leakage of the valve and safety risks. At the same time, the inaccurate or error oxygen concentration monitoring also causes safety risks in the process. SUMMARY

[0003] The utility model discloses a safety module of deposition process tank body to solve the above-mentioned problems.

[0004] The utility model discloses the following scheme:

[0005] A safety module of deposition process tank body is adapted to be arranged on a process tank body, a feed valve and a discharge valve are respectively arranged on a feed pipeline and a discharge pipeline of the process tank body, and the safety module comprises an inert gas source and first and second protection gas paths connected to the inert gas source. The upstream end of the feed valve is connected to the first protection gas path, the downstream end of the discharge valve is connected to the second protection gas path, and a pressure switch is arranged at the upstream end of the feed valve and the downstream end of the discharge valve. The inert gas source is adapted to deliver inert gas to the upstream end of the feed valve and the downstream end of the discharge valve to ensure that the pressure of the upstream end of the feed valve and the downstream end of the discharge valve is greater than the atmospheric pressure, so that the gas leaked from the feed valve and the discharge valve into the process tank body is inert gas, thereby preventing air from leaking into the process tank body.

[0006] Further, a first valve is arranged on the first protection gas path, and a second valve is arranged on the second protection gas path. The first valve and the second valve are respectively used to control the on-off of the first protection gas path and the second protection gas path.

[0007] Further, the inert gas source is adapted to deliver nitrogen to the first protection gas path and the second protection gas path.

[0008] Further, the process tank body is connected to a vacuum device, and the vacuum device is adapted to extract the gas in the process tank body, the feed pipeline and the discharge pipeline.

[0009] Further, the interface on the process tank body is connected by metal hard sealing.

[0010] Further, a third valve is arranged on the feeding pipeline, the first protective gas pipeline is connected to the pipeline between the third valve and the feeding valve; a fourth valve is arranged on the discharging pipeline, and the second protective gas pipeline is connected to the pipeline between the fourth valve and the discharging valve.

[0011] Further, an inert gas storage cavity is arranged on the feeding pipeline to store inert protective gas.

[0012] Beneficial effects:

[0013] The scheme fully considers the leakage risk, each interface of the process tank body adopts a metal hard sealing form, the powder ball valve connected with the process tank body has an internal leakage risk, therefore, the inert gas protection pipeline is arranged in front of the feeding valve and behind the discharging valve, and corresponding pipeline pressure monitoring is provided, so that the gas leaked into the process cavity is nitrogen, and air leakage into the tank body is avoided. In addition, the scheme can realize gas replacement in the pipeline, and can protect the material for some air-sensitive powders. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 is a structure schematic view of a safety module of a deposition process tank body according to an embodiment of the present application;

[0015] Figure: process tank body 1.1, stirring motor 1.2, pressure switch 1.4 / 1.5, feeding pipeline 1.6, discharging pipeline 1.7, vacuum device 2.1, inert gas source 3.1, first protective gas pipeline 3.2, second protective gas pipeline 3.3, feeding valve PV2, discharging valve PV3, first valve V1, second valve V2, third valve PV1, fourth valve PV4, and fifth valve V5. DETAILED DESCRIPTION

[0016] In combination with Figure 1The embodiment provides a safety module of a deposition process tank body, which is suitable for being arranged on a process tank body 1.1, a feed valve PV2 and a discharge valve PV3 are arranged on a feed pipeline 1.6 and a discharge pipeline 1.7 of the process tank body 1.1 respectively, and the safety module comprises an inert gas source 3.1 and a first protection gas path 3.2 and a second protection gas path 3.3 connected with the inert gas source 3.1, wherein the first protection gas path 3.2 is connected to an upstream end of the feed valve PV2, the second protection gas path 3.3 is connected to a downstream end of the discharge valve PV3, and a pressure switch is arranged at the upstream end of the feed valve PV2 and the downstream end of the discharge valve PV3; the inert gas source 3.1 is suitable for conveying inert gas to the upstream end of the feed valve PV2 and the downstream end of the discharge valve PV3, so that the pressure of the upstream end of the feed valve PV2 and the downstream end of the discharge valve PV3 is greater than the atmospheric pressure, so as to ensure that the gas leaked from the feed valve PV2 and the discharge valve PV3 into the process tank body 1.1 is inert gas, and air is prevented from leaking into the process tank body 1.1.

[0017] In the embodiment, the process tank body 1.1 is connected with a vacuum device 2.1, and the vacuum device 2.1 is suitable for extracting gas in the process tank body 1.1 and the feed pipeline 1.6 and the discharge pipeline 1.7. A fifth valve V5 is arranged on a vacuum channel of the vacuum device 2.1. A first valve V1 is arranged on the first protection gas path 3.2, and a second valve V2 is arranged on the second protection gas path 3.3, and the first valve V1 and the second valve V2 are respectively used for controlling the opening and closing of the first protection gas path 3.2 and the second protection gas path 3.3. A stirring device is further arranged in the process tank body 1.1, and the stirring device is connected with a stirring motor 1.2.

[0018] In the embodiment, the feed pipeline 1.6 and the discharge pipeline 1.7 refer to channels for guiding powder materials into or out of the process tank body. Before the process, the vacuum device 2.1 extracts the gas in the process tank body 1.1, opens the feed valve PV2 and the discharge valve PV3, and extracts the gas in the feed pipeline and the discharge pipeline; then the feed valve PV2 and the discharge valve PV3 are closed, the first valve V1 and the second valve V2 are opened, and high-purity inert gas is injected into the feed pipeline and the discharge pipeline, and the high-purity inert gas can be nitrogen or other inert gas, until the pressure switches 1.4 and 1.5 on the feed pipeline and the discharge pipeline reach a set high-pressure value (at this time, the high-pressure value needs to be greater than the atmospheric pressure); during the process, due to the existence of slight internal leakage of the feed valve PV2 and the discharge valve PV3, the pressure value of the pressure switch 1.4 or 1.5 slowly decreases, when the pressure decreases to a low-pressure value (the low-pressure value needs to be greater than the atmospheric pressure, so as to ensure that there is no air backflow), the first valve V1 and the second valve V2 are opened, and nitrogen is injected into the pipeline to the high-pressure value, and the cycle is repeated.

[0019] In this embodiment, in order to ensure the sealing performance, the interfaces on the process tank 1.1 are connected by metal hard sealing, for example, welding or other processes can be used for sealing connection at the interfaces.

[0020] In an embodiment, a third valve PV1 is further arranged on the feed pipe 1.6, and the first protective gas path 3.2 is connected to the pipe between the third valve PV1 and the feed valve PV2; a fourth valve PV4 is further arranged on the discharge pipe 1.7, and the second protective gas path 3.3 is connected to the pipe between the fourth valve PV4 and the discharge valve PV3. Meanwhile, inert gas storage cavities are arranged on the feed pipe 1.6 and the discharge pipe 1.7 for storing inert protective gas. Here, since the inert gas pressure in the inert gas storage cavity is higher than the atmospheric pressure, when leakage occurs, air will not enter the inert gas storage cavity due to the pressure relationship.

[0021] It should be noted that during the feeding and discharging processes, the first valve V1 and the second valve V2 can also be kept open to realize feeding and discharging under nitrogen protection. The feed valve PV2 and the discharge valve PV3 are closed only when the reaction is carried out. In this embodiment, the feed valve PV2 and the discharge valve PV3 are common ball valves. The nitrogen protection mode is adopted in this embodiment scheme to prevent air from entering. This scheme is simple and effective, and is suitable for occasions where dangerous gas is isolated from air.

[0022] It should be understood that: the above is only the preferred embodiment of the present application, the protection scope of the present application is not limited to the above-mentioned embodiments, any technical solution belonging to the idea of the present application is within the protection scope of the present application.

[0023] The above introduction of the drawings used in the embodiments only shows some embodiments of the present application, and should not be considered as limiting the scope, and for ordinary skilled in the art, other related drawings can be obtained according to the drawings without creative labor.

Claims

1. A safety module for a deposition process tank adapted to be disposed on a process tank having a feed line and a discharge line each having a feed valve and a discharge valve respectively, characterized in that, The inert gas source is connected with a first protective gas path and a second protective gas path, wherein the first protective gas path is connected to the upstream end of the feeding valve, the second protective gas path is connected to the downstream end of the discharging valve, and a pressure switch is arranged at the upstream end of the feeding valve and the downstream end of the discharging valve; the inert gas source is adapted to deliver inert gas to the upstream end of the feeding valve and the downstream end of the discharging valve so that the pressure of the upstream end of the feeding valve and the downstream end of the discharging valve is greater than the atmospheric pressure, thereby ensuring that the gas leaked from the feeding valve and the discharging valve into the process tank is inert gas, and preventing air from leaking into the process tank.

2. The safety module of a deposition process tank according to claim 1, characterized in that, A first valve is arranged on the first protective gas path, and a second valve is arranged on the second protective gas path, and the first valve and the second valve are respectively used for controlling the opening and closing of the first protective gas path and the second protective gas path.

3. The safety module of a deposition process tank according to claim 1, characterized in that, The inert gas source is adapted to deliver nitrogen to the first protective gas path and the second protective gas path.

4. The safety module of a deposition process tank according to claim 1, characterized in that, The process tank is connected with a vacuum device, and the vacuum device is adapted to extract the gas in the process tank and the feeding pipeline and the discharging pipeline.

5. The safety module of a deposition process tank according to claim 1, characterized in that, The interface on the process tank is connected by a metal hard seal.

6. The safety module of a deposition process tank of claim 1, wherein, A third valve is further arranged on the feeding pipeline, and the first protective gas path is connected to the pipeline between the third valve and the feeding valve; a fourth valve is further arranged on the discharging pipeline, and the second protective gas path is connected to the pipeline between the fourth valve and the discharging valve.

7. The safety module of a deposition process tank according to claim 1, characterized in that, An inert gas storage cavity is arranged on the feeding pipeline for storing inert protective gas.

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