Gas circuit device for MPCVD (Micro Pressure Chemical Vapor Deposition) equipment

Abstract

The utility model discloses a gas circuit device for MPCVD equipment, and relates to the technical field of crystal growth, the gas circuit device comprises a mounting plate, the surface of the mounting plate is provided with a gas circuit device, the outer side of the mounting plate is provided with a first gas pipe, and one end of the first gas pipe far away from the gas circuit device is fixedly connected with a fixed column; a cavity is formed in the fixing column, the fixing column communicates with the first air pipe through the cavity, and a sealing plug is arranged in the cavity; after an external pipeline and the fixing column are connected through the threaded groove by a worker, the sealing plug can automatically retract, so that communication of the pipelines is guaranteed, after the pipelines are disconnected, the sealing plug can be sealed again through the opening through the elastic force of the spring, and therefore the sealing effect is guaranteed, and the service life of the pipeline is prolonged. No extra sealing operation of workers is needed, the purpose that gas in the pipeline is isolated from the outside is achieved, and the diamond growing efficiency of the MPCVD equipment and the diamond growing quality are guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth technology, specifically to a gas path device for MPCVD equipment. Background Technology

[0002] MPCVD (Multi-frequency Plasma Chemical Vapor Deposition) is currently the mainstream equipment for synthesizing crystals. It mainly uses microwave plasma chemical vapor deposition to achieve crystal growth. The gas path device of the MPCVD equipment is a crucial part of the entire system, which is responsible for accurately delivering various gases to the reaction chamber.

[0003] However, some existing gas path devices for MPCVD equipment, when not connected to external pipelines, require complete isolation from the outside environment. This is because MPCVD uses high-purity gases such as hydrogen, nitrogen, and methane. Air and air particles are not allowed to enter the gas connection pipelines. Air contains a large amount of nitrogen and other gases. Nitrogen content affects the efficiency of diamond growth in MPCVD, while other impurities affect the quality of the grown diamonds. Furthermore, to prevent nitrogen and other gases or impurities from entering the pipeline, additional sealing is required. This undoubtedly increases the operational steps for staff, and oversights or forgetting to seal the pipeline can occur, resulting in poor practicality. Therefore, we propose a gas path device for MPCVD equipment to solve these problems. Utility Model Content

[0004] To address the shortcomings of existing technologies that are difficult to seal, this invention provides a gas path device for MPCVD equipment.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0006] This utility model discloses a gas path device for MPCVD equipment, including a mounting plate. The gas path device is disposed on the surface of the mounting plate, and a first gas pipe is disposed on the outer side of the mounting plate. A fixing post is fixedly connected to the end of the first gas pipe away from the gas path device. A cavity is formed inside the fixing post, and the fixing post communicates with the first gas pipe through the cavity. A sealing plug, which is frustoconical in shape, is disposed inside the cavity. Two connecting plates are fixedly connected to the surface of the sealing plug, and two guide grooves are formed on the inner wall of the cavity. The connecting plates are slidably connected. Inside the guide groove, a limiting rod is fixedly connected. The connecting plate is slidably sleeved on the surface of the limiting rod. A spring is fixedly connected between the limiting rod and the inner wall of the guide groove. The spring is movably sleeved on the outside of the limiting rod. A sealing gasket is provided on the outside of the fixing post. A connecting assembly is provided on the rear surface of the sealing plug. A top rod is fixedly connected to the front surface of the sealing plug. An opening communicating with the cavity is opened on the front surface of the fixing post. A threaded groove is opened on the inner wall of the opening. The sealing plug extends out of the outside of the fixing post through the opening.

[0007] As a preferred embodiment of the present invention, the connecting assembly includes a fixing plate, the fixing plate and the rear surface of the sealing plug are fixedly connected, and two first connecting blocks are fixedly connected to both sides of the fixing plate.

[0008] As a preferred embodiment of this utility model, two connecting rods are provided inside the cavity. The opposite ends of the two connecting rods slide through the interior of the fixed column, and the adjacent ends of the two connecting rods are fixedly connected to two second connecting blocks.

[0009] As a preferred technical solution of this utility model, the first connecting block and the second connecting block on the same side are both connected by a pull rod through a shaft.

[0010] As a preferred embodiment of this utility model, an L-shaped connecting plate is fixedly connected to one end of the connecting rod located outside the fixed column, and the L-shaped connecting plate and the sealing gasket are fixedly connected.

[0011] As a preferred embodiment of this utility model, the gas circuit device includes a manual right-angle shut-off valve, the first gas pipe is connected to the manual right-angle shut-off valve, a gas-liquid filter is provided at the left end of the manual right-angle shut-off valve, a gas mass flow controller is provided on the left side of the gas-liquid filter, and a pneumatic valve is provided on the left side of the gas mass flow controller.

[0012] As a preferred embodiment of this utility model, a fixing seat is fixedly connected to the surface of the mounting plate, and a second air pipe is fixedly sleeved inside the fixing seat.

[0013] In a preferred embodiment of this invention, the manual right-angle shut-off valve, the gas-liquid filter, the gas mass flow controller, the pneumatic valve, and the second air pipe are all connected by pipelines.

[0014] The beneficial effects of this utility model are as follows: This gas path device for MPCVD equipment allows the sealing plug to automatically retract after the operator connects the external pipe and the fixed column through the threaded groove. When the connection between the pipes is broken, the sealing plug will reseal the opening due to the elasticity of the spring itself, eliminating the need for additional sealing operations by the operator. This prevents dust and particulate matter in the air from entering the pipe when it is not connected, achieving the purpose of isolating the gas in the pipe from the outside world, ensuring the efficiency and quality of diamond growth in MPCVD equipment, and demonstrating high practicality and good sealing effect. Attached Figure Description

[0015] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0016] Figure 1 This is a schematic diagram of the gas path device for MPCVD equipment according to the present invention;

[0017] Figure 2 This is a schematic diagram of the structure of the first trachea of ​​this utility model;

[0018] Figure 3 This is a cross-sectional view of the guide groove of this utility model;

[0019] Figure 4 This is a first schematic cross-sectional view of the fixing column of this utility model;

[0020] Figure 5 This is a second schematic diagram of the cross-sectional structure of the fixed column of this utility model.

[0021] In the diagram: 1. Mounting plate; 2. First air pipe; 3. Fixing column; 4. Sealing plug; 5. Connecting plate; 6. Guide groove; 7. Limiting rod; 8. Spring; 9. Sealing gasket; 10. Top rod; 11. Through port; 12. Fixing plate; 13. First connecting block; 14. Connecting rod; 15. Second connecting block; 16. Pull rod; 17. L-shaped connecting plate;

[0022] 101. Manual right-angle shut-off valve; 102. Gas-liquid filter; 103. Gas mass flow controller; 104. Pneumatic valve; 105. Mounting base; 106. Second gas pipe;

[0023] 301. Cavity;

[0024] 1101. Threaded groove. Detailed Implementation

[0025] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0026] Example: Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, this utility model discloses a gas path device for MPCVD equipment, including a mounting plate 1. A gas path device is provided on the surface of the mounting plate 1. A first gas pipe 2 is provided on the outer side of the mounting plate 1. A fixing post 3 is fixedly connected to the end of the first gas pipe 2 away from the gas path device. A cavity 301 is formed inside the fixing post 3, and the fixing post 3 is connected to the first gas pipe 2 through the cavity 301. A sealing plug 4 is provided inside the cavity 301. The sealing plug 4 is frustoconical in shape. Two connecting plates 5 are fixedly connected to the surface of the sealing plug 4. Two guide grooves 6 are formed on the inner wall of the cavity 301. The connecting plates 5 are slidably connected to the inside of the guide grooves 6. A limiting rod 7 is fixedly connected inside the guide grooves 6. The connecting plates 5 are slidably sleeved on the surface of the limiting rod 7. A spring 8 is fixedly connected between the limiting rod 7 and the inner wall of the guide groove 6. The spring 8 is movably sleeved on the outside of the limiting rod 7. A sealing gasket 9 is provided on the outside of the fixing post 3, and the surface of the sealing gasket 9 is in contact with the surface of the fixing post 3. The sealing gasket 9 further improves the sealing between the fixing post 3 and the external pipe. The sealing plug 4 has a connecting component on its rear surface and a top rod 10 fixedly connected to its front surface. The front surface of the fixing column 3 has an opening 11 that communicates with the cavity 301. The inner wall of the opening 11 has a threaded groove 1101. The sealing plug 4 extends out of the fixing column 3 through the opening 11. After the operator connects the external pipe and the fixing column 3 through the threaded groove 1101, the sealing plug 4 will automatically retract, thus ensuring the continuity of the pipe. When the pipe is disconnected, the spring 8 will cause the sealing plug 4 to re-seal the opening 11, thus ensuring the sealing effect. No additional sealing operation is required from the operator, preventing dust and particles in the air from entering the pipe when it is not connected. It also effectively prevents air and air particles from entering the gas connection pipe, achieving the purpose of isolating the gas in the pipe from the outside, ensuring the efficiency and quality of diamond growth in the MPCVD equipment. It is highly practical and has a good sealing effect.

[0027] The connecting assembly includes a fixing plate 12, which is fixedly connected to the rear surface of the sealing plug 4, and two first connecting blocks 13 are fixedly connected to both sides of the fixing plate 12.

[0028] The cavity 301 has two connecting rods 14 inside. The opposite ends of the two connecting rods 14 slide through the interior of the fixed column 3. The near ends of the two connecting rods 14 are fixedly connected to two second connecting blocks 15.

[0029] Among them, the first connecting block 13 and the second connecting block 15 on the same side are both connected by a pull rod 16 through a shaft.

[0030] Among them, the end of the connecting rod 14 located outside the fixed column 3 is fixedly connected to an L-shaped connecting plate 17, and the L-shaped connecting plate 17 and the sealing gasket 9 are fixedly connected.

[0031] The connection components eliminate the need for additional operator intervention, automatically sealing the gaps with the gasket 9 during pipe connection, thus improving the device's practicality and convenience.

[0032] The gas circuit device includes a manual right-angle shut-off valve 101, a first gas pipe 2 connected to the manual right-angle shut-off valve 101, a gas-liquid filter 102 at the left end of the manual right-angle shut-off valve 101, a gas mass flow controller 103 at the left side of the gas-liquid filter 102, a pneumatic valve 104 at the left side of the gas mass flow controller 103, a fixing seat 105 fixedly connected to the surface of the mounting plate 1, and a second gas pipe 106 fixedly sleeved inside the fixing seat 105. The manual right-angle shut-off valve 101, the gas-liquid filter 102, the gas mass flow controller 103, the pneumatic valve 104, and the second gas pipe 106 are all connected by pipelines.

[0033] During operation, the operator rotates the connection end of the external pipe into the opening 11 through the threaded groove 1101. First, the connection end of the external pipe will abut against the end of the push rod 10. Then, the external pipe will move closer to the side of the fixed column 3. At this time, the push rod 10 will drive the sealing plug 4 to retract into the cavity 301. Subsequently, the connection end of the external pipe will be rotated to make it threadedly connected with the threaded groove 1101.

[0034] During the movement of the sealing plug 4, the connecting plate 5 will move. At this time, the connecting plate 5 will slide inside the guide groove 6 under the restriction of the limiting rod 7, and the spring 8 will deform.

[0035] Furthermore, during the movement of the sealing plug 4, the fixing plate 12 will move, which in turn will cause the first connecting block 13 to move. Since the length of the pull rod 16 is fixed, the connecting rod 14 will be pulled into the cavity 301 by the cooperation of the first connecting block 13, the pull rod 16, and the second connecting block 15. The movement of the connecting rod 14 will cause the L-shaped connecting plate 17 to move, which in turn will cause the sealing gasket 9 to move closer to the center. As a result, the sealing gasket 9 will compress the external pipe, thereby sealing the gap between the external pipe and the fixing column 3.

[0036] Then the gas passes through the inside of the first gas pipe 2, and then the gas passes through the gas-liquid filter 102 to filter out impurities in the gas. Subsequently, the gas passes through the gas mass flow controller 103, and the gas flow rate can be controlled. If it is not necessary to continue to deliver gas, the pipeline can be shut off by the pneumatic valve 104.

[0037] When the external pipe and the fixed column 3 are separated, the spring 8 will reset the sealing plug 4 by its own elasticity, so that the sealing plug 4 will block the opening 11 again.

[0038] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A gas path device for an MPCVD equipment, comprising a mounting plate (1), characterized in that, The mounting plate (1) is provided with an air passage device on its surface. A first air pipe (2) is provided on the outer side of the mounting plate (1). A fixing post (3) is fixedly connected to the end of the first air pipe (2) away from the air passage device. A cavity (301) is opened inside the fixing post (3). The fixing post (3) is connected to the first air pipe (2) through the cavity (301). A sealing plug (4) is provided inside the cavity (301). The sealing plug (4) is shaped like a frustum. Two connecting plates (5) are fixedly connected to the surface of the sealing plug (4). Two guide grooves (6) are opened on the inner wall of the cavity (301). The connecting plates (5) are slidably connected inside the guide grooves (6). A limiting rod (7) is fixedly connected, and the connecting plate (5) is slidably sleeved on the surface of the limiting rod (7). A spring (8) is fixedly connected between the limiting rod (7) and the inner wall of the guide groove (6). The spring (8) is movably sleeved on the outside of the limiting rod (7). A sealing gasket (9) is provided on the outside of the fixed column (3). A connecting component is provided on the rear surface of the sealing plug (4). A top rod (10) is fixedly connected to the front surface of the sealing plug (4). A through-hole (11) communicating with the cavity (301) is opened on the front surface of the fixed column (3). A threaded groove (1101) is opened on the inner wall of the through-hole (11). The sealing plug (4) extends out of the outside of the fixed column (3) through the through-hole (11).

2. The gas path device for MPCVD equipment according to claim 1, characterized in that, The connecting assembly includes a fixing plate (12), which is fixedly connected to the rear surface of the sealing plug (4). Two first connecting blocks (13) are fixedly connected to both sides of the fixing plate (12), and two connecting rods (14) are provided inside the cavity (301).

3. A gas path device for an MPCVD equipment according to claim 2, characterized in that, The opposite ends of the two connecting rods (14) slide through the interior of the fixed column (3), and the near ends of the two connecting rods (14) are fixedly connected to two second connecting blocks (15).

4. A gas path device for an MPCVD equipment according to claim 3, characterized in that, A pull rod (16) is rotatably connected between the first connecting block (13) and the second connecting block (15) on the same side via a shaft.

5. A gas path device for an MPCVD equipment according to claim 3, characterized in that, The connecting rod (14) is fixedly connected to an L-shaped connecting plate (17) at one end outside the fixed column (3), and the L-shaped connecting plate (17) and the sealing gasket (9) are fixedly connected.

6. A gas path device for an MPCVD equipment according to claim 1, characterized in that, The gas circuit device includes a manual right-angle shut-off valve (101), the first gas pipe (2) is connected to the manual right-angle shut-off valve (101), a gas-liquid filter (102) is provided at the left end of the manual right-angle shut-off valve (101), and a gas mass flow controller (103) is provided on the left side of the gas-liquid filter (102).

7. A gas path device for an MPCVD equipment according to claim 6, characterized in that, A pneumatic valve (104) is provided on the left side of the gas mass flow controller (103), and a fixing seat (105) is fixedly connected to the surface of the mounting plate (1).

8. A gas path device for an MPCVD equipment according to claim 7, characterized in that, The second air pipe (106) is fixedly sleeved inside the fixed base (105). The manual right-angle shut-off valve (101), gas-liquid filter (102), gas mass flow controller (103), pneumatic valve (104) and the second air pipe (106) are all connected by pipelines.

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