Gas pipeline sealing structure and chip mounter

Abstract

The utility model belongs to the technical field of sealing structures, and discloses a gas pipeline sealing structure and a chip mounter, and the gas pipeline sealing structure comprises a mounting seat, a gas pipeline assembly and an annular sealing ring. A pipeline cavity is formed in the mounting seat; the gas pipeline assembly comprises a gas pipeline and an abutting part, the gas pipeline is arranged in the pipeline cavity and extends out of the mounting base, and the abutting part is arranged at the end, extending out of the mounting base, of the gas pipeline and abuts against the mounting base; an annular containing groove is formed in the pipeline cavity, and the annular sealing ring is arranged in the annular containing groove and elastically abuts against the groove bottom of the annular containing groove and the outer wall of the gas pipeline. The annular sealing ring is arranged in the annular containing groove, after the gas pipeline is inserted, the annular sealing ring is fixed, the sealing effect is achieved, the abutting part shields the end, close to the outside, of the pipeline cavity, and air, water vapor, dust and the like in the external environment are not prone to entering the pipeline cavity to make contact with the annular sealing ring. Even if a small amount of water enters, the sealing performance of the annular sealing ring is not affected by the erosion effect on the annular sealing ring.

Description

TECHNICAL FIELD

[0001] The utility model relates to a sealed structure technical field especially relates to a gas pipeline sealed structure and paster. BACKGROUND

[0002] The wafer picking machine is a kind of equipment for automated production, it can accurately pick wafer from production line and transport it to next process or detection station.Usually it has the characteristics of high precision, high speed and high reliability, can greatly improve the automation degree and production efficiency of production line, and is widely used in the field such as semiconductor equipment production.Usually, the gas pipeline needs to be set when the wafer picking machine picks, and the gas pipeline is vacuumed to fix the target, so the gas pipeline needs to be sealed to ensure the effect of vacuuming.

[0003] In the prior art, the sealing structure is usually plugged through the blind hole on the side, and the sealing structure continuously contacts the external environment during use, which can easily cause aging, thereby affecting the sealing effect of the sealing structure and reducing the suction efficiency of the gas pipeline. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of gas pipeline sealed structure, to reduce the contact of sealing structure and external environment, guarantee the sealing effect of sealing structure.

[0005] To achieve this purpose, on the one hand, the utility model adopts the following technical solutions:

[0006] A kind of gas pipeline sealed structure, comprising:

[0007] Mounting seat, the mounting seat includes pipeline cavity;

[0008] Gas pipeline assembly, the gas pipeline assembly includes gas pipeline and abutting portion, the gas pipeline is set in the pipeline cavity and extends out the mounting seat, the abutting portion is set to the end of the gas pipeline extending out the mounting seat and abuts with the outer wall of the mounting seat;

[0009] Annular sealing ring, annular containing groove is provided around the gas pipeline in the pipeline cavity, the annular sealing ring is set in the annular containing groove and respectively with the groove bottom of the annular containing groove and the outer wall of the gas pipeline elastic abutment.

[0010] As preferably, the end of the pipeline cavity close to the abutting portion is provided with installation port communicated with the annular containing groove, the cross-sectional area of the installation port is greater than the cross-sectional area enclosed by the slot opening of the annular containing groove and less than the cross-sectional area enclosed by the groove bottom of the annular containing groove.

[0011] As preferably, the inner annular surface of the annular sealing ring is arc surface, and the middle part of the arc surface is convex.

[0012] Preferably, the cross-sectional shape of the annular sealing ring is circular.

[0013] Preferably, the bottom of the annular accommodating groove is shaped to fit the outer ring surface of the annular sealing ring.

[0014] Preferably, the opposite two sidewalls of the annular accommodating groove are both in abutment with the annular sealing ring.

[0015] Preferably, the inner ring surface and the outer ring surface of the annular sealing ring are both provided with contact protrusions extending along the axial direction of the annular sealing ring, the contact protrusions of the inner ring surface are in abutment with the gas pipeline, and the contact protrusions of the outer ring surface are in abutment with the bottom of the annular accommodating groove.

[0016] Preferably, the mounting seat is provided with a recess on the side close to the abutment portion, and the abutment portion protrudes out of the recess.

[0017] Preferably, the annular sealing ring is made of rubber, silica gel or polytetrafluoroethylene.

[0018] In another aspect, the utility model provides a chip mounter which uses the above-mentioned gas pipeline sealing structure, and the gas pipeline is provided with a chip suction table at the end far away from the mounting seat.

[0019] Beneficial effects: the gas pipeline sealing structure provided by the utility model comprises a mounting seat, a gas pipeline assembly and an annular sealing ring. The mounting seat comprises a pipeline cavity; the gas pipeline assembly comprises a gas pipeline and an abutment portion, the gas pipeline is arranged in the pipeline cavity and protrudes out of the mounting seat, and the abutment portion is arranged at the end of the gas pipeline protruding out of the mounting seat and is in abutment with the mounting seat; an annular accommodating groove is arranged in the pipeline cavity, and the annular sealing ring is arranged in the annular accommodating groove and is in elastic abutment with the bottom of the annular accommodating groove and the outer wall of the gas pipeline respectively. The annular sealing ring is arranged in the annular accommodating groove, is fixed after the gas pipeline is inserted and plays a sealing effect, the abutment portion blocks the end of the pipeline cavity close to the outside, and air, water vapor, dust and the like in the external environment are not easy to enter the pipeline cavity and contact the annular sealing ring. Even if a small amount of them enter, they are difficult to erode the annular sealing ring and affect the sealing performance of the annular sealing ring. BRIEF DESCRIPTION OF DRAWINGS

[0020] Fig. 1 is a sectional view of the gas pipeline sealing structure provided by the utility model;

[0021] Fig. 2 is an external schematic view of the gas pipeline sealing structure provided by the utility model;

[0022] Fig. 3It is the structure schematic view of the annular sealing ring of the gas pipeline sealing structure.

[0023] In the drawing:

[0024] 1, mounting seat; 11, pipeline cavity; 12, annular accommodating groove; 13, mounting port;

[0025] 2, gas pipeline assembly; 21, gas pipeline; 22, abutting portion;

[0026] 3, annular sealing ring; 31, contact protrusion;

[0027] 4, recessed portion;

[0028] 5, suction piece table. DETAILED DESCRIPTION

[0029] The utility model will be further explained in detail by the following drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawing, not all structures.

[0030] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0031] In the utility model, unless otherwise explicitly specified and limited, the first feature is "on" or "below" the second feature, which can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0032] In the description of the present embodiment, the terms "upper", "lower", "right", "left", and the like, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0033] As shown in Figs. 1-3 The present embodiment provides a gas pipeline sealing structure, which comprises a mounting seat 1, a gas pipeline assembly 2 and an annular sealing ring 3. The mounting seat 1 comprises a pipeline cavity 11 for mounting the gas pipeline 21. The gas pipeline assembly 2 comprises the gas pipeline 21 and an abutting portion 22, the gas pipeline 21 is arranged in the pipeline cavity 11 and extends out of the mounting seat 1, and the abutting portion 22 is arranged at one end of the gas pipeline 21 extending out of the mounting seat 1 and abuts against the outer peripheral wall of the mounting seat 1. When taking a slice, the pipeline cavity 11 is vacuumized, and the part of the gas pipeline 21 extending out of the mounting seat 1 can be used for suction and fixation of the material, so as to ensure the air tightness between the inner wall of the pipeline cavity 11 and the gas pipeline 21, so that external gas cannot enter therebetween when vacuumizing, thereby affecting the suction and fixation effect of the material. The annular receiving groove 12 is arranged around the gas pipeline 21 in the pipeline cavity 11, and the annular sealing ring 3 is arranged in the annular receiving groove 12 and elastically abuts against the groove bottom of the annular receiving groove 12 and the outer wall of the gas pipeline 21, respectively. When the annular sealing ring 3 is arranged, the annular sealing ring 3 can be inserted into the annular receiving groove 12 from the opening of the pipeline cavity 11 close to the outside, and then the gas pipeline 21 is inserted into the pipeline cavity 11. During the insertion process, the gas pipeline 21 contacts the annular sealing ring 3 and causes elastic deformation of the annular sealing ring 3. The deformed annular sealing ring 3 can elastically abut against the groove bottom of the annular receiving groove 12 and the outer wall of the gas pipeline 21, respectively. The gas pipeline 21 is fixed relative to the abutting portion 22, and the two are inserted into or pulled out of the pipeline cavity 11 together. After the annular sealing ring 3 elastically abuts against the outer wall of the gas pipeline 21, the gap between the pipeline cavity 11 and the gas pipeline 21 is isolated by the annular sealing ring 3, so that the gas pipeline 21 is not affected by the external air when vacuumizing.

[0034] Specifically, the annular sealing ring 3 is arranged in the annular receiving groove 12, and after the gas pipeline 21 is inserted, the annular sealing ring 3 is fixed and has a sealing effect. The abutting portion 22 blocks the end of the pipeline cavity 11 close to the outside, so that the air, water vapor, dust and the like in the external environment are not easy to enter the pipeline cavity 11 and contact the annular sealing ring 3. Even if a small amount enters, it is also difficult to erode the annular sealing ring 3 and affect the sealing performance of the annular sealing ring 3.

[0035] It can be understood that the above-mentioned annular accommodation groove 12 and the annular sealing ring 3 refer to a closed structure containing an internal cavity, which can be circular, oval or other shapes. That is, if the cross section of the gas pipeline 21 is oval, the above-mentioned annular accommodation groove 12 and the annular sealing ring 3 are oval rings. Further, in the embodiment, the cross section of the gas pipeline is circular.

[0036] Further, in the embodiment, the gas pipeline 21 and the pipeline cavity 11 can be relatively fixed by threaded connection, clamping or the like. Taking threaded connection as an example, a screw hole can be arranged on the abutting portion 22, a threaded hole is arranged on the mounting seat 1, a screw is used to pass through the screw hole and is screwed with the threaded hole, the joint portion and the gas pipeline 21 are fixed on the mounting seat 1 at the same time, and at this time, the gas pipeline 21 and the pipeline cavity 11 are relatively fixed.

[0037] Specifically, in the embodiment, the pipeline cavity 11 is provided with a mounting port 13 communicating with the annular accommodation groove 12 at one end close to the abutting portion 22, the cross section area of the mounting port 13 is greater than the cross section area enclosed by the groove of the annular accommodation groove 12 and is less than the cross section area enclosed by the groove bottom of the annular accommodation groove 12. When installing the annular sealing ring 3, the annular sealing ring 3 needs to be inserted from one end of the pipeline cavity 11 close to the abutting portion 22, and when the gas pipeline 21 is not inserted into the abutting portion 22, it is manifested as inserting the annular sealing ring 3 from one end of the pipeline cavity 11 close to the outside. The mounting port 13 communicating with the annular accommodation groove 12 facilitates the annular sealing ring 3 to be installed in the annular accommodation groove 12, avoids the annular sealing ring 3 from being twisted due to too small inlet and affects the sealing effect. In addition, the mounting port 13 should not be too large, and the cross section area of the mounting port 13 is less than the cross section area enclosed by the groove bottom of the annular accommodation groove 12, so that the annular sealing ring 3 placed in the annular accommodation groove 12 can be better limited and fixed. The annular accommodation groove 12 has a side wall close to the mounting port 13, which can abut and limit the annular sealing ring 3 when the gas pipeline 21 is pulled out, preventing the annular sealing ring 3 from being taken out. It can be understood that the cross section area of the abutting portion 22 is greater than the cross section area of the mounting port 13, which can cover the mounting port 13, preventing excessive air, water vapor and the like from entering the annular accommodation groove 12 and eroding the annular sealing ring 3.

[0038] Specifically, in the embodiment, the inner annular surface of the annular sealing ring 3 is an arc surface, and the middle part of the arc surface is convex. The inner annular surface is the surface of the annular sealing ring 3 close to the center of the circle, and the outer annular surface is the surface of the annular sealing ring 3 away from the center of the circle. When the gas pipeline 21 is inserted into the pipeline cavity 11, the annular sealing ring 3 needs to be elastically deformed to provide sufficient radial space for the insertion of the gas pipeline 21. Therefore, the elastic deformation of the contact part of the annular sealing ring 3 and the gas pipeline 21 facilitates the insertion of the gas pipeline 21. The inner annular surface of the annular sealing ring 3 is an arc surface, and the middle part of the arc surface is convex. When the gas pipeline 21 is inserted, it will first abut against the side part of the arc surface and provide a component force away from the center of the annular sealing ring 3 to the arc surface, thereby causing the arc surface to contract and allowing the gas pipeline 21 to be inserted. In addition, the arc surface is relatively smooth, and the friction between the arc surface and the gas pipeline 21 is small, which does not hinder the insertion of the gas pipeline 21.

[0039] Further, in the embodiment, the cross-sectional shape of the annular sealing ring 3 is circular, the inner annular surface of the annular sealing ring 3 elastically abuts against the gas pipeline 21, and the outer annular surface of the annular sealing ring 3 elastically abuts against the groove bottom of the annular receiving groove 12. When the cross-sectional shape is circular, the gas pipeline 21 will provide a component force away from the center of the annular sealing ring 3 during insertion. The surface of the annular sealing ring 3 close to the groove bottom is also an arc surface with a convex middle part, which is easy to elastically deform, facilitating the annular sealing ring 3 to enter the annular receiving groove 12 as a whole and facilitating the insertion of the gas pipeline 21.

[0040] Specifically, in the embodiment, the groove bottom of the annular receiving groove 12 is shaped to fit the outer annular surface of the annular sealing ring 3. When the groove bottom of the annular receiving groove 12 fits the outer annular surface of the annular sealing ring 3, it can better limit the annular sealing ring 3 and ensure that the annular sealing ring 3 is in the right position. In some other embodiments, the cross-sectional shape of the annular sealing ring 3 can also be circular, and the cross-sectional shape of the annular receiving groove 12 can be rectangular. At this time, the annular receiving groove 12 provides sufficient deformation space for the annular sealing ring 3, and the annular sealing ring 3 can fill the gap in the groove bottom of the annular receiving groove 12 when it deforms.

[0041] Specifically, in the embodiment, the opposite two side walls of the annular receiving groove 12 abut against the annular sealing ring 3. After the gas pipeline 21 is inserted into the pipeline cavity 11, the annular sealing ring 3 deforms and abuts against the two side walls of the annular receiving groove 12, respectively. After abutting, the annular sealing ring 3 will not slide along the axis of the gas pipeline 21 relative to the gas pipeline 21, avoiding the reduction of the sealing effect caused by sliding. It can be understood that the size of the annular sealing ring 3 matches the size of the annular receiving groove 12, so as to facilitate the abutting effect of the annular sealing ring 3 and the other parts.

[0042] Specifically, in the embodiment, the inner ring surface and the outer ring surface of the annular sealing ring 3 are provided with contact protrusions 31 extending along the axial direction of the annular sealing ring 3, the contact protrusions 31 of the inner ring surface abut against the gas pipeline 21, and the contact protrusions 31 of the outer ring surface abut against the groove bottom of the annular accommodating groove 12. The contact protrusions 31 protrude from the inner ring surface and the outer ring surface, and after the installation of the gas pipeline 21, the contact protrusions 31 can be extruded and deformed before the inner ring surface and the outer ring surface and the gas pipeline 21 and the groove bottom of the annular accommodating groove 12, thereby improving the engagement tightness of the inner ring surface and the gas pipeline 21 and the outer ring surface and the groove bottom of the annular accommodating groove 12 and ensuring the sealing effect of the annular sealing ring 3. Further, the contact protrusions 31 can be one or a plurality of parallel contact protrusions, which are not limited in the embodiment.

[0043] Specifically, in the embodiment, the side of the mounting seat 1 close to the abutting portion 22 is provided with a recessed portion 4, and the abutting portion 22 extends out of the recessed portion 4. When the gas pipeline 21 is installed and disassembled, manual operation is required to insert or pull out the gas pipeline 21 from the accommodating cavity, and the abutting portion 22 is convenient for the operator to use the hand to bear the force, and the space between the recessed portion 4 and the engaging portion is convenient for avoiding the hand of the operator. The arrangement of the recessed portion 4 and the engaging portion can avoid the hand injury of the operator when the gas pipeline 21 is inserted, and the arrangement of the recessed portion 4 and the engaging portion can enable the operator to place the hand to hold the abutting portion 22 and pull out the gas pipeline 21.

[0044] Specifically, in the embodiment, the annular sealing ring 3 is made of rubber, silica gel or polytetrafluoroethylene. The annular sealing ring 3 made of rubber, silica gel or polytetrafluoroethylene has good elasticity, wear resistance and other physical properties, and is convenient for the annular sealing ring 3 to realize the sealing effect.

[0045] Specifically, the embodiment provides a chip mounter using the above-mentioned gas pipeline sealing structure, and the end of the gas pipeline 21 away from the mounting seat 1 is provided with a suction table 5. It can be understood that the suction table 5 is used for sucking and fixing materials, and the gas pipeline 21 is communicated with the table surface of the suction table 5. Further, the vacuum generator realizes the suction of the materials through the pipeline cavity 11, the gas pipeline 21 and the suction table 5 in sequence. The chip mounter using the above-mentioned gas pipeline sealing structure can ensure that the sealing structure is not excessively exposed to the outside, thereby affecting the sealing effect.

[0046] Obviously, the above-mentioned embodiments of the utility model are only for clear illustration of the utility model, and are not the limitation of the embodiments of the utility model. For ordinary skilled in the art, various obvious changes, re-adjustment and replacement can be made without departing from the protection scope of the utility model. Here, it is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent replacement and improvement made within the spirit and principle of the utility model should be included in the protection scope of the utility model claim.

Claims

1. A gas pipeline sealing structure, characterized in that, include: Mounting base (1), the mounting base (1) includes a pipe cavity (11); A gas pipeline assembly (2) includes a gas pipeline (21) and an abutment (22). The gas pipeline (21) is disposed in the pipeline cavity (11) and extends out of the mounting seat (1). The abutment (22) is disposed at one end of the gas pipeline (21) extending out of the mounting seat (1) and abuts against the outer peripheral wall of the mounting seat (1). An annular sealing ring (3) is provided in the pipe cavity (11) surrounding the gas pipe (21), and the annular sealing ring (3) is provided in the annular receiving groove (12) and elastically abuts against the bottom of the annular receiving groove (12) and the outer wall of the gas pipe (21).

2. The gas pipeline sealing structure according to claim 1, characterized in that, The pipe cavity (11) is provided with an installation port (13) that communicates with the annular receiving groove (12) at one end near the abutment part (22). The cross-sectional area of ​​the installation port (13) is larger than the cross-sectional area enclosed by the opening of the annular receiving groove (12) and smaller than the cross-sectional area enclosed by the bottom of the annular receiving groove (12).

3. The gas pipeline sealing structure according to claim 1, characterized in that, The inner ring surface of the annular sealing ring (3) is an arc-shaped surface, and the middle part of the arc-shaped surface is raised.

4. The gas pipeline sealing structure according to claim 3, characterized in that, The cross-sectional shape of the annular sealing ring (3) is circular.

5. The gas pipeline sealing structure according to any one of claims 1-4, characterized in that, The bottom of the annular receiving groove (12) fits the outer ring surface of the annular sealing ring (3).

6. The gas pipeline sealing structure according to any one of claims 1-4, characterized in that, The opposite side walls of the annular receiving groove (12) abut against the annular sealing ring (3).

7. The gas pipeline sealing structure according to any one of claims 1-4, characterized in that, The inner and outer ring surfaces of the annular sealing ring (3) are provided with contact protrusions (31) extending along the axial direction of the annular sealing ring (3). The contact protrusions (31) on the inner ring surface abut against the gas pipe (21), and the contact protrusions (31) on the outer ring surface abut against the bottom of the annular receiving groove (12).

8. The gas pipeline sealing structure according to any one of claims 1-4, characterized in that, The mounting base (1) has a recess (4) on the side near the abutment (22), and the abutment (22) extends out of the recess (4).

9. The gas pipeline sealing structure according to any one of claims 1-4, characterized in that, The annular sealing ring (3) is made of rubber, silicone or polytetrafluoroethylene.

10. A pick-and-place machine, characterized in that, Using the gas pipeline sealing structure as described in any one of claims 1-9, a suction plate stage (5) is provided at the end of the gas pipeline (21) away from the mounting base (1).

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