High-rigidity lifting adjusting device for chip precision detection

Abstract

The utility model discloses a high-rigidity lifting adjusting device for chip precision detection. The high-rigidity lifting adjusting device comprises a detection objective table, an electric displacement mechanism, a precision detection mechanism and an upper computer, the electric displacement mechanism comprises a lower plate fixed at the top of the detection objective table, an upper plate arranged on one side of the lower plate, and a plurality of crossed roller guide rails arranged between the upper plate and the lower plate; a motor is installed at the top of the lower plate, and a transmission mechanism used for converting the rotating force of the motor into the rotating force for driving the upper plate to do linear motion is fixed to the side, facing the upper plate, of the lower plate; the one-way positioning precision and the repeated positioning precision can reach the micron level, the precise detection effect is achieved, the motor is controlled, the upper plate is driven to do linear motion, the crossed roller guide rails provide the high-precision guiding effect, the stability and precision of the upper plate in the lifting process are ensured, lifting is automatically adjusted, manual adjustment is not needed, the adjusting efficiency is high, the adjusting speed is high, and the working efficiency is high. And the accuracy is high.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip detection technical field especially relates to a chip precision detection high rigidity lifting adjustment device. BACKGROUND

[0002] Precision detection lifting adjustment device is widely used in chip industry, and as the core component of mobile phones, computers and other electronic products, the technology of chip is increasingly enhanced, the social demand gradually increases, and the manufacturing precision of chip is also improved. In the manufacturing process of chip, some precision detection is usually needed for chip, and the lifting adjustment device of detection mechanism is particularly important. With the development of manufacturing technology, the performance requirement of chip detection lifting adjustment device is higher and higher. The existing chip detection lifting adjustment device has the following problems:

[0003] 1. The existing chip detection lifting adjustment device is usually a horizontal displacement table plus an adapter plate, which is converted into a lifting shaft, and the cumulative precision error is large.

[0004] 2. The existing chip detection lifting adjustment device needs manual adjustment of the height of the detection mechanism every time the type is changed, and the adjustment efficiency is low.

[0005] 3. The overall structure of the existing chip detection lifting adjustment device is large, the precision is not high, the rigidity is insufficient, and the operation is complex.

[0006] Therefore, in view of the above problems, it is necessary to innovate and improve the original chip precision detection lifting adjustment device. SUMMARY

[0007] The utility model overcomes the insufficient prior art, provides a kind of chip precision detection high rigidity lifting adjustment device.

[0008] To achieve the above purpose, the technical scheme adopted by the utility model is as follows: a kind of chip precision detection high rigidity lifting adjustment device, comprising: detection object table, electric displacement mechanism, precision detection mechanism, upper computer;

[0009] The electric displacement mechanism includes: a lower plate fixed on the top of the detection object table, an upper plate arranged on one side of the lower plate, and a plurality of cross roller guides arranged between the upper plate and the lower plate;The top of the lower plate is provided with a motor, and the side of the lower plate towards the upper plate is fixed with a transmission mechanism for converting the rotary force of the motor into driving the upper plate to move linearly;

[0010] The top of the detection object table is provided with a chip carrier, and the top of the chip carrier is provided with a chip body;The precision detection mechanism is used for detecting the chip body to be detected, and is installed on one side of the upper plate;The upper computer is used to issue control instructions.

[0011] The transmission mechanism is located in the middle part of the lower plate, a plurality of cross roller guides are symmetrically distributed on the two sides of the transmission mechanism, one side of the cross roller guide is fixed with one side of the lower plate, and the other side is fixed with one side of the upper plate.

[0012] In a preferred embodiment of the utility model, the transmission mechanism comprises: a motor seat installed on one side of the lower plate close to the top, a ball screw rod arranged at the bottom of the motor seat, and a shaft coupling installed at the top end of the ball screw rod, and one side of the upper plate is threadedly connected with the side surface of the ball screw rod.

[0013] In a preferred embodiment of the utility model, the side surface of the ball screw rod is rotatably connected with the inner side of the motor seat through a bearing, the motor is installed on the top of the motor seat, and the output end is fixed with one end of the ball screw rod through the shaft coupling.

[0014] In a preferred embodiment of the utility model, the precision detection mechanism comprises: a camera installed on one side of the upper plate, a lens arranged in the camera, and a light source installed on the camera.

[0015] In a preferred embodiment of the utility model, the camera is located on the top of the chip carrier and the chip body.

[0016] In a preferred embodiment of the utility model, the upper computer is in communication connection with the camera through a transmission line, and the upper computer is in electric connection with the motor through a cable.

[0017] The utility model solves the defects in the background art, and has the following beneficial effects:

[0018] (1) the utility model provides a kind of chip precision detection high-rigidity lifting adjustment device, and electric displacement mechanism is placed vertically on detection platform, and it is directly connected with detection platform, without other mechanism switching, precision detection mechanism is directly locked in the upper plate, located the upper of the semiconductor device to be detected, fully utilizes space structure, and the overall structure is small, and it occupies small space, the lower plate adopts convex design, is directly locked in detection platform, reduce self weight, while, rigidity is also improved, by the cooperation of upper computer and precision detection mechanism and electric displacement mechanism, unidirectional positioning accuracy and repeat positioning accuracy can reach micron level, realize the effect of precision detection, and upper computer controls motor according to different chip models, drives the upper plate to do linear motion by transmission mechanism, cross roller guide provides high-precision guiding effect, ensures the stability and precision of the upper plate in lifting process, automatically adjusts lifting, realizes the characteristics of no manual adjustment, high adjustment efficiency, fast speed and good accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0019] The utility model is further illustrated below in combination with the drawings and embodiments;

[0020] Fig. 1 It is the perspective structural diagram of preferred embodiment of the utility model;

[0021] Fig. 2 It is the overhead structure diagram of preferred embodiment of the utility model;

[0022] Fig. 3 It is the side structure diagram of preferred embodiment of the utility model;

[0023] In the drawing: 1, chip carrier; 2, chip body; 3, detection object table; 4, lower plate; 5, upper plate; 6, cross roller guide; 7, motor; 8, transmission mechanism; 9, precision detection mechanism. DETAILED DESCRIPTION

[0024] The utility model will be further explained in detail in combination with the drawings and embodiments, these drawings are all simplified schematic diagram, just with the schematic way to illustrate the basic structure of the utility model, therefore it just shows the constitution related to the utility model.

[0025] As Figs. 1-3 Indicated, a kind of chip precision detection high rigidity lifting adjustment device, comprising: detection object table 3, electric displacement mechanism, precision detection mechanism 9, host computer;Electric displacement mechanism includes: fixed in the top of detection object table 3 lower plate 4, be arranged in the lower plate 4 one side upper plate 5, and be arranged between upper plate 5 and lower plate 4 several cross roller guides 6;The top of lower plate 4 is equipped with motor 7, and the side of lower plate 4 towards upper plate 5 is fixed with transmission mechanism 8 for converting the rotary force of motor 7 into the driving linear motion of upper plate 5;The top of detection object table 3 is equipped with chip carrier 1, and the top of chip carrier 1 is provided with chip body 2;Precision detection mechanism 9 is used to realize detection to the chip body 2 to be measured, and is installed in the one side of upper plate 5;Host computer is used to issue control instruction.

[0026] It should be noted that the transmission mechanism 8 is located in the middle of the lower plate 4, and the plurality of cross roller guides 6 are symmetrically distributed on both sides of the transmission mechanism 8. One side of the cross roller guide 6 is fixed to one side of the lower plate 4, and the other side is fixed to one side of the upper plate 5. The lower plate 4 is locked on the detection carrier table 3 by the fixing bolt, and the precision detection mechanism 9 is connected with the upper plate 5 by the fixing bolt. The upper computer and the precision detection mechanism 9 are connected by the transmission line. The upper computer is connected with the motor 7 by the cable. The chip carrier 1 is placed on the detection carrier table 3, and the automatic detection can be started. The electric displacement mechanism is vertically placed on the detection carrier table 3 and directly connected with the detection carrier table 3 without other mechanism switching. The precision detection mechanism 9 is directly locked on the upper plate 5 above the semiconductor device to be detected, fully utilizes the space structure, and has small overall structure and small space occupation. The lower plate 4 adopts convex design and is directly locked on the detection carrier table 3, which reduces the weight and improves the rigidity. Through the cooperation of the upper computer, the precision detection mechanism 9 and the electric displacement mechanism, the one-way positioning accuracy and the repeat positioning accuracy can reach micron level, and the precision detection effect is realized. The upper computer controls the motor 7 according to different chip models, drives the upper plate 5 to do linear motion through the transmission mechanism 8, and the cross roller guide 6 provides high-precision guiding effect to ensure the stability and precision of the upper plate 5 in the lifting process. The automatic adjustment of lifting realizes the characteristics of no manual adjustment, high adjustment efficiency, fast speed and good accuracy.

[0027] In some embodiments, the transmission mechanism 8 comprises a motor seat installed on one side of the lower plate 4 near the top, a ball screw arranged at the bottom of the motor seat, and a shaft coupling installed at the top end of the ball screw. One side of the upper plate 5 is threadedly connected with the side surface of the ball screw.

[0028] It should be noted that the side surface of the ball screw is rotatably connected with the inner side of the motor seat through a bearing. The motor 7 is installed on the top of the motor seat, and the output end is fixed with one end of the ball screw through the shaft coupling. The motor 7 is connected with the ball screw through the shaft coupling to transmit the rotary force to the ball screw. When the ball screw rotates in the motor seat, the upper plate 5 is driven to do linear motion along the cross roller guide 6 through the threaded connection, which avoids the friction loss and error accumulation that may exist in the traditional transmission mode, realizes the high-precision lifting adjustment of the chip carrier 1, and ensures the stability and precision in the detection process.

[0029] In some embodiments, the precision detection mechanism 9 comprises a camera installed on one side of the upper plate 5, a lens arranged inside the camera, and a light source installed on the camera.

[0030] It needs to be explained that the camera is located on the top of the chip carrier 1 and the chip body 2; the upper computer is connected with the camera in communication through the transmission line, and the upper computer is electrically connected with the motor 7 through the cable; the camera shoots the chip to be measured through the lens, obtains the detailed image information of the chip, the light source provides sufficient illumination, ensures that the image shot is clear, the upper computer communicates with the camera through the transmission line, receives and processes the image data shot by the camera, realizes high-precision detection of the chip, and avoids errors and unstable factors that may exist in the traditional detection mode.

[0031] When the utility model is used, the chip body 2 is placed in the chip carrier 1, and the chip carrier 1 is locked on the detection carrier platform 3. The precision detection mechanism 9 is uploaded to the host computer, the host computer identifies the chip model, and sends displacement instructions to the motor 7. The motor 7 starts to rotate, and the motor 7 moves the upper plate 5 through the transmission mechanism 8, and the upper plate 5 drives the precision detection mechanism 9 to rise and fall to adjust the focal length, the detection range and other parameters, and output accurate detection results. The overall structure design reflects that the chip precision detection high-rigidity lifting adjusting device does not need manual adjustment, the adjusting efficiency is high, the speed is fast, the rigidity is high, and the cumulative error of switching is avoided.

[0032] The above is according to the ideal embodiment of the utility model, and for the person skilled in the art, the utility model is obviously not limited to the details of the above exemplary embodiments, and can be realized in other specific forms without departing from the spirit or basic characteristics of the utility model. Therefore, from any point of view, the embodiments should be regarded as exemplary and non-limiting, and the scope of the utility model is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the utility model. Any reference signs in the claims should not be regarded as limiting the claims.

[0033] In addition, it should be understood that, although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description manner of the specification is only for the sake of clarity, and the person skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that can be understood by the person skilled in the art.

Claims

1. A high-rigidity lifting adjusting device for precise detection of a chip, characterized in that, Include: The detection of the stage (3), electric displacement mechanism, precision detection mechanism (9), host computer; The electric displacement mechanism includes: the lower plate (4) fixed on the top of the detection stage (3), the upper plate (5) arranged on one side of the lower plate (4), and a plurality of cross roller guides (6) arranged between the upper plate (5) and the lower plate (4); the top of the lower plate (4) is provided with a motor (7), and one side of the lower plate (4) facing the upper plate (5) is fixed with a transmission mechanism (8) for converting the rotating force of the motor (7) into the driving force of the upper plate (5) for linear motion; The top of the detection stage (3) is provided with a chip carrier (1), and the top of the chip carrier (1) is provided with a chip body (2); the precision detection mechanism (9) is used for detecting the chip body (2) to be detected, and is installed on one side of the upper plate (5); the host computer is used to issue control instructions.

2. The chip precision detection high-rigidity lifting adjusting device according to claim 1, characterized in that: The transmission mechanism (8) is located in the middle of the lower plate (4), and a plurality of cross roller guides (6) are symmetrically distributed on both sides of the transmission mechanism (8), one side of the cross roller guide (6) is fixed with one side of the lower plate (4), and the other side is fixed with one side of the upper plate (5).

3. The chip precision detection high-rigidity lifting adjusting device according to claim 1, characterized in that: The transmission mechanism (8) includes: a motor seat installed on one side of the lower plate (4) near the top, a ball screw arranged at the bottom of the motor seat, and a shaft coupling installed at the top end of the ball screw, one side of the upper plate (5) is threadedly connected with the side surface of the ball screw.

4. The chip precision detection high-rigidity lifting adjusting device according to claim 3, characterized in that: The side surface of the ball screw is rotatably connected with the inner side of the motor seat through a bearing, and the motor (7) is installed on the top of the motor seat, and the output end is fixed with one end of the ball screw through the shaft coupling.

5. The chip precision detection high-rigidity lifting adjusting device according to claim 1, characterized in that: The precision detection mechanism (9) includes: a camera installed on one side of the upper plate (5), a lens arranged inside the camera, and a light source installed on the camera.

6. The chip precision detection high-rigidity lifting adjusting device according to claim 5, characterized in that: The camera is located on the top of the chip carrier (1) and the chip body (2).

7. The chip precision detection high-rigidity lifting adjusting device according to claim 5, characterized in that: The host computer is connected with the camera through a transmission line, and the host computer is electrically connected with the motor (7) through a cable.

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