Cooling device and sports device

Abstract

The application provides a cooling device and a motion device. The cooling device is used in the motion device and comprises a first cooling mechanism, a second cooling mechanism, a third cooling mechanism, three cooling pipeline assemblies and a cooling medium circulating mechanism. The first cooling mechanism covers at least part of a first driving device, the second cooling mechanism covers at least part of a second driving device, and the third cooling mechanism covers at least part of a third driving device. The cooling medium circulating mechanism is connected with the first cooling mechanism, the second cooling mechanism and the third cooling mechanism through the three cooling pipeline assemblies to realize the circulation of the cooling medium. Each cooling pipeline assembly comprises a hard pipe part, a hose part and an expansion part. The hard pipe part is connected with the expansion part at least at one end, so that the heat transfer efficiency is improved, the driving devices in the motion device can be effectively cooled, and the precision and reliability of the motion device in a high vacuum environment are ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor sports equipment, concretely relates to a cooling device and sports device. BACKGROUND

[0002] With the rapid development of semiconductor manufacturing technology, especially in the advanced process era, the miniaturization of devices has reached an unprecedented level in terms of precision and quality during the manufacturing process. As the basic material of semiconductor chips, any tiny defect on the wafer can lead to the failure of the entire chip, so the detection of wafer defects becomes crucial. However, as the device size continues to shrink, the size of fatal defects on the wafer also decreases accordingly, which greatly increases the difficulty of defect detection.

[0003] Traditional optical detection equipment is limited by optical wavelength and cannot meet the detection needs of ultra-small defects in advanced processes. In contrast, electron beam detection equipment, with its excellent resolution and detection accuracy, has become an indispensable tool for defect detection in the next generation of semiconductor processes. Electron beam detection technology can break through the limitations of optical wavelength and achieve accurate identification of nanoscale defects, providing strong support for the sustainable development of the semiconductor manufacturing industry.

[0004] In the electron beam detection system, the motion device plays a crucial role in achieving precise positioning on the wafer plane and ensuring high accuracy and reliability in the detection process. However, the working environment of the motion device is extremely harsh, requiring operation in a high vacuum environment to avoid scattering and energy loss caused by the interaction of the electron beam with air molecules. This special requirement makes it impossible to effectively apply traditional heat dissipation methods, such as solid heat conduction, to the cooling of the drive device.

[0005] Currently, the existing solution in the prior art usually uses an external heat exchanger for the motor to cool the drive device. However, this cooling method has obvious shortcomings, such as limited cooling effect, which cannot effectively reduce the temperature of the drive device during high-load operation, thereby affecting the precision and performance of the motion device. UTILITY MODEL CONTENTS

[0006] In view of the insufficient cooling effect of the drive device of the motion device in the prior art during high-load operation, the present application provides a cooling device and a motion device. The cooling device improves the heat transfer efficiency by setting up a first cooling mechanism, a second cooling mechanism, a third cooling mechanism, a cooling pipeline assembly, and a cooling medium circulation mechanism, which can effectively cool the drive device in the motion device and ensure the precision and reliability of the motion device in a high vacuum environment.

[0007] An embodiment of the present application provides a cooling device for a motion device, the motion device comprising a first driving device, a second driving device and a third driving device, a first mover of the first driving device reciprocating in a first direction, a second mover of the second driving device reciprocating in a second direction, and a third mover of the third driving device reciprocating in a third direction, the first direction, the second direction and the third direction being perpendicular to each other.

[0008] The cooling device comprises a first cooling mechanism, a second cooling mechanism, a third cooling mechanism and a cooling medium circulation mechanism, the first cooling mechanism covering at least part of the first driving device, the second cooling mechanism covering at least part of the second driving device, and the third cooling mechanism covering at least part of the third driving device.

[0009] Three cooling pipeline assemblies, the cooling medium circulation mechanism being connected to the first cooling mechanism, the second cooling mechanism and the third cooling mechanism through the three cooling pipeline assemblies respectively to realize circulation of the cooling medium, each of the cooling pipeline assemblies comprising a hard pipe part, a flexible pipe part and an expansion part, and the hard pipe part being connected to the expansion part at least at one end.

[0010] As an embodiment, the hard pipe part comprises a first hard pipe part and a second hard pipe part.

[0011] Each of the cooling pipeline assemblies comprises N groups of sequentially connected flexible pipe parts, first hard pipe parts, expansion parts and second hard pipe parts, N being an integer not less than 1, and the values of N in different cooling pipeline assemblies being the same or different.

[0012] One end of the flexible pipe part in the first group is connected to the cooling medium circulation mechanism.

[0013] One end of the second hard pipe part in the Nth group is connected to one of the first cooling mechanism, the second cooling mechanism and the third cooling mechanism.

[0014] As an embodiment, a first cooling pipeline assembly comprises a first cooling medium supply pipeline and a first cooling medium return pipeline; a second cooling pipeline assembly comprises a second cooling medium supply pipeline and a second cooling medium return pipeline; and a third cooling pipeline assembly comprises a third cooling medium supply pipeline and a third cooling medium return pipeline.

[0015] The first cooling medium supply pipeline and the first cooling medium return pipeline each comprise one group of sequentially connected flexible pipe parts, first hard pipe parts, expansion parts and second hard pipe parts.

[0016] The second cooling medium supply pipeline and the second cooling medium return pipeline each include two groups of sequentially connected hose sections, first hard pipe sections, expansion sections, and second hard pipe sections.

[0017] The third cooling medium supply pipeline and the third cooling medium return pipeline each include at least two groups of sequentially connected hose sections, first hard pipe sections, expansion sections, and second hard pipe sections.

[0018] As an embodiment, a first cooling medium inlet and a first cooling medium outlet are respectively formed on the first cooling mechanism, a first cooling medium passage is formed in the first cooling mechanism, and two ends of the first cooling medium passage are respectively in communication with the first cooling medium inlet and the first cooling medium outlet.

[0019] A second cooling medium inlet and a second cooling medium outlet are respectively formed on the second cooling mechanism, a second cooling medium passage is formed in the second cooling mechanism, and two ends of the second cooling medium passage are respectively in communication with the second cooling medium inlet and the second cooling medium outlet.

[0020] A third cooling medium inlet and a third cooling medium outlet are respectively formed on the third cooling mechanism, a third cooling medium passage is formed in the third cooling mechanism, and two ends of the third cooling medium passage are respectively in communication with the third cooling medium inlet and the third cooling medium outlet.

[0021] The cooling medium circulation mechanism is in communication with the first cooling medium inlet through the first cooling medium supply pipeline, in communication with the first cooling medium outlet through the first cooling medium return pipeline, in communication with the second cooling medium inlet through the second cooling medium supply pipeline, in communication with the second cooling medium outlet through the second cooling medium return pipeline, in communication with the third cooling medium inlet through the third cooling medium supply pipeline, and in communication with the third cooling medium outlet through the third cooling medium return pipeline.

[0022] As an embodiment, the first driving device is a linear motor, including a U-shaped first stator and a plate-shaped first mover, the first mover is partially disposed in a U-shaped slot of the first stator, and the first stator drives the first mover to reciprocate in the first direction; the first cooling mechanism includes a first cooling section A and a first cooling section B, the first cooling section A is disposed above an upper surface of the first mover, and the first cooling section B is disposed below a lower surface of the first mover; and / or,

[0023] The second driving device is a linear motor, comprising a U-shaped second stator and a plate-shaped second mover, the second mover is partially arranged in the U-shaped slot of the second stator, and the second stator drives the second mover to reciprocate along the second direction; the second cooling mechanism comprises a second cooling part A and a second cooling part B, the second cooling part A is arranged above the upper surface of the second mover, and the second cooling part B is arranged below the lower surface of the second mover.

[0024] As an embodiment, the third driving device comprises a rotary motor, a lead screw and the third mover, the rotary motor drives the lead screw to rotate so that the third mover on the lead screw reciprocates along the third direction;

[0025] The third cooling mechanism comprises a third cooling part A and a third cooling part B, and the third cooling part A and the third cooling part B can form a containing cavity containing the rotary motor after being combined.

[0026] As an embodiment, a first heat-conducting gasket is arranged between the first cooling part A and the first mover, and / or a first heat-conducting gasket is arranged between the first cooling part B and the first mover.

[0027] A second heat-conducting gasket is arranged between the second cooling part A and the second mover, and / or a second heat-conducting gasket is arranged between the second cooling part B and the second mover.

[0028] A third heat-conducting gasket is arranged between the third cooling part A and the rotary motor, and / or a third heat-conducting gasket is arranged between the third cooling part B and the rotary motor.

[0029] As an embodiment, the cooling device further comprises a first cooling medium circulation pipeline, a second cooling medium circulation pipeline and a distribution mechanism.

[0030] The outlet of the cooling medium circulation mechanism is in communication with the inlet of the first cooling medium circulation pipeline, and the inlet of the cooling medium circulation mechanism is in communication with the outlet of the second cooling medium circulation pipeline.

[0031] The outlet of the first cooling medium circulation pipeline is in communication with the first cooling medium supply pipeline, the second cooling medium supply pipeline and the third cooling medium supply pipeline through the distribution mechanism respectively.

[0032] The inlet of the second cooling medium circulation pipeline is in communication with the first cooling medium return pipeline, the second cooling medium return pipeline and the third cooling medium return pipeline through the distribution mechanism respectively.

[0033] Another embodiment of the present application provides a motion device comprising the above-mentioned cooling device.

[0034] The first driving device, the second driving device, the third driving device, the first base, the second base, the third base, the first support plate and the second support plate are further included.

[0035] The first driving device is arranged between the first base and the second base, and includes a first mover and a first stator.

[0036] The second driving device is arranged between the second base and the first support plate, and includes a second mover and a second stator.

[0037] The third base is fixed perpendicularly to the first support plate, and a receiving portion is formed between the third base and the first support plate.

[0038] As an embodiment, the cooling device further includes a shunt mechanism connected to the cooling medium circulation mechanism and the cooling pipeline assembly.

[0039] As described above, the cooling device and the motion device have the following beneficial effects.

[0040] The cooling device includes the first cooling mechanism, the second cooling mechanism, the third cooling mechanism, the cooling pipeline assembly and the cooling medium circulation mechanism, which perform heat exchange for the first driving device, the second driving device and the third driving device, improve the heat transfer efficiency, effectively cool the driving devices, effectively prevent thermal deformation of the driving devices during operation, and ensure stable operation of the motion device in a high-vacuum environment. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 A structure schematic diagram of the cooling device according to Embodiment One of the present application is shown.

[0042] Figure 2 A structure diagram of a first driving device and a first cooling mechanism or a structure diagram of a second driving device and a second cooling mechanism in the cooling device of the first embodiment of the present application is shown;

[0043] Figure 3 A structure diagram of a third driving device and a third cooling mechanism in the cooling device of the first embodiment of the present application is shown;

[0044] Figure 4 (a) A structure diagram of a first cooling mechanism or a second cooling mechanism in the cooling device of the second embodiment of the present application is shown; Figure 4 (b) Another structure diagram of the first cooling mechanism or the second cooling mechanism in the cooling device of the second embodiment of the present application is shown;

[0045] Figure 5 (a) A structure diagram of a third cooling mechanism in the cooling device of the second embodiment of the present application is shown; Figure 5 (b) Another structure diagram of the third cooling mechanism in the cooling device of the second embodiment of the present application is shown;

[0046] Figure 6 (a) A structure diagram of a first cooling mechanism or a second cooling mechanism in the cooling device of the third embodiment of the present application is shown; Figure 6 (b) Another structure diagram of the first cooling mechanism or the second cooling mechanism in the cooling device of the third embodiment of the present application is shown;

[0047] Figure 7 (a) A structure diagram of a third cooling mechanism in the cooling device of the third embodiment of the present application is shown; Figure 7 (b) Another structure diagram of the third cooling mechanism in the cooling device of the third embodiment of the present application is shown;

[0048] Figure 8 (a) A structure diagram of a first cooling mechanism or a second cooling mechanism in the cooling device of the fourth embodiment of the present application is shown; Figure 8 (b) Another structure diagram of the first cooling mechanism or the second cooling mechanism in the cooling device of the fourth embodiment of the present application is shown;

[0049] Figure 9 (a) A structure diagram of a third cooling mechanism in the cooling device of the fourth embodiment of the present application is shown; Figure 9 (b) Another structure diagram of the third cooling mechanism in the cooling device of the fourth embodiment of the present application is shown;

[0050] Figure 10 (a) shows a perspective view of the first cooling mechanism or the second cooling mechanism in the cooling device of the fifth embodiment of the present application; Figure 10 (b) shows a top view of Figure 10 (a); Figure 10 (c) shows another perspective view of the first cooling mechanism or the second cooling mechanism in the cooling device of the fourth embodiment of the present application; Figure 10 (d) shows a bottom view of Figure 10 (c);

[0051] Figure 11 (a) shows a perspective view of the third cooling mechanism in the cooling device of the fifth embodiment of the present application; Figure 11 (b) shows a top view of Figure 11 (a); Figure 11 (c) shows another perspective view of the third cooling mechanism in the cooling device of the fourth embodiment of the present application; Figure 11 (d) shows a bottom view of Figure 11 (c);

[0052] Figure 12 (a) shows a perspective view of the third cooling mechanism in the cooling device of the fifth embodiment of the present application;

[0053] Figure 13 (c) shows another perspective view of the third cooling mechanism in the cooling device of the fourth embodiment of the present application;

[0054] Element number explanation

[0055] 10, first driving device; 11, first mover; 12, first stator; 13, first base;

[0056] 20, second driving device; 21, second mover; 22, second stator; 23, second base; 24, first support plate;

[0057] 30, third driving device; 31, rotary motor; 32, screw; 33, third mover; 34, third base; 35, second support plate;

[0058] 100, first cooling mechanism; 101, first cooling portion A; 102, first cooling portion B; 103, first cooling medium inlet; 104, first cooling medium outlet; 105, first cooling medium passage; 107, first protrusion; 110, first cooling medium supply line; 120, first cooling medium return line; 1051, first cooling medium flow passage A; 1052, first cooling medium flow passage B; 1053, first cooling medium flow passage C; 1054, first cooling medium cavity flow passage A; 1055, first cooling medium cavity flow passage B; 1056, first cooling medium inflow flow passage A; 1057, first cooling medium return flow passage A; 1058, first cooling medium inflow flow passage B; 1059, first cooling medium return flow passage B; 1061, first cooling medium flow passage connection pipe A; 1062, first cooling medium flow passage connection pipe B; 1063, first cooling medium cavity flow passage connection pipe; 1064, first cooling medium inflow-return flow passage connection pipe;

[0059] 200, second cooling mechanism; 201, second cooling portion A; 202, second cooling portion B; 203, second cooling medium inlet; 204, second cooling medium outlet; 205, second cooling medium passage; 207, second protrusion; 210, second cooling medium supply line; 220, second cooling medium return line; 2051, second cooling medium flow passage A; 2052, second cooling medium flow passage B; 2053, second cooling medium flow passage C; 2054, second cooling medium cavity flow passage A; 2055, second cooling medium cavity flow passage B; 2056, second cooling medium inflow flow passage A; 2057, second cooling medium return flow passage A; 2058, second cooling medium inflow flow passage B; 2059, second cooling medium return flow passage B; 2061, second cooling medium flow passage connection pipe A; 2062, second cooling medium flow passage connection pipe B; 2063, second cooling medium cavity flow passage connection pipe; 2064, second cooling medium inflow-return flow passage connection pipe;

[0060] 300, third cooling mechanism; 301, third cooling portion A; 302, third cooling portion B; 303, third cooling medium inlet; 304, third cooling medium outlet; 305, third cooling medium passage; 307, third protrusion; 310, third cooling medium supply line; 320, third cooling medium return line; 3051, third cooling medium flow passage A; 3052, third cooling medium flow passage B; 3053, third cooling medium cavity flow passage A; 3054, third cooling medium cavity flow passage B; 3055, third cooling medium inflow flow passage A; 3056, third cooling medium return flow passage A; 3057, third cooling medium inflow flow passage B; 3058, third cooling medium return flow passage B; 3061, third cooling medium flow passage connecting pipe; 3062, third cooling medium cavity flow passage connecting pipe; 3063, third cooling medium inflow-return flow passage connecting pipe;

[0061] 400, cooling medium circulation mechanism; 410, first cooling medium circulation pipe; 420, second cooling medium circulation pipe; 500, distribution mechanism; 600, damping mechanism; 710, hose portion; 720, hard pipe portion; 721, first hard pipe portion; 722, second hard pipe portion; 730, stretchable portion. DETAILED DESCRIPTION

[0062] Other advantages and effects of the present application can be easily understood by those skilled in the art from the above description. The present application can also be implemented or applied in other different embodiments, and the details in the present description can be modified or changed based on different viewpoints and applications without departing from the spirit of the present application.

[0063] Please refer to Figures 1 to 13 It is to be noted that the drawings provided in the present embodiment only schematically illustrate the basic concept of the present application, and thus only the components related to the present application are shown in the drawings, not the components number, shape and size in actual implementation. The shape, number and proportion of each component in actual implementation can be randomly changed, and the component layout pattern can be more complicated.

[0064] Electron beam detection technology uses the information excited by the interaction between high-energy electrons and the surface material of the wafer to form an image, and realizes the detection of wafer defects, critical dimensions and the like through image processing and operation. In the electron beam detection system, the motion device as one of the core components can move along the X-axis, Y-axis and Z-axis directions to realize precise positioning on the wafer plane. However, the working environment of the motion device is extremely harsh, and it needs to run in a high vacuum environment to avoid scattering and energy loss caused by the interaction between the electron beam and air molecules. Therefore, the traditional solid heat conduction cooling method cannot effectively reduce the heat of the driving device of the motion device.

[0065] At present, there are still some problems to be solved in the cooling technology of the existing electron beam detection equipment in the prior art. First, the cooling method of external heat exchanger of motor is not divided by equipment, but this way often leads to low heat exchange efficiency and poor cooling effect, which cannot meet the strict requirements of high-precision detection on temperature control. Secondly, the assembly process of the cooling medium pipeline is complex and prone to error, and at the same time, the stability of the pipeline in the motion process is insufficient, which may affect the reliability of the cooling system and the overall performance of the equipment. Finally, the thermal deformation of the motor generated in the working process is a problem that cannot be ignored, which directly affects the precision and stability of the motion device, and further affects the accuracy of the detection result.

[0066] In view of the above defects, the present application provides a cooling device and a motion device. The following embodiments are described in detail.

[0067] Embodiment one

[0068] The present embodiment provides a cooling device, as shown in Figure 1 The cooling device includes a first cooling mechanism 100, a second cooling mechanism 200, a third cooling mechanism 300, a cooling medium circulation mechanism 400 and three groups of cooling pipeline assemblies.

[0069] The cooling device is used in a motion device, which includes a first driving device 10, a second driving device 20 and a third driving device 30, as shown in Figure 2 and Figure 3 The first mover 11 of the first driving device 10 reciprocates along the first direction, the second mover 21 of the second driving device 20 reciprocates along the second direction, and the third mover 33 of the third driving device reciprocates along the third direction. The first direction, the second direction and the third direction are perpendicular to each other, for example, the first direction is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction.

[0070] As shown in Figures 1 to 3As shown, the first cooling mechanism 100 covers at least part of the first driving device 10, the second cooling mechanism 200 covers at least part of the second driving device 20, and the third cooling mechanism 300 covers at least part of the third driving device 30. The cooling medium circulation mechanism 400 is connected to the first cooling mechanism 100, the second cooling mechanism 200 and the third cooling mechanism 300 through three cooling pipeline assemblies respectively, so as to realize the circulation of the cooling medium. Each cooling pipeline assembly includes a hard pipe part 720, a hose part 710 and an expansion part 730; at least one end of the hard pipe part 720 is connected to the expansion part 730 to facilitate the connection between the hard pipe part 720 and other pipe parts; the hose part 710 can move along a certain direction with the motion device. The material of the hard pipe part 720 can be stainless steel, such as 316L or 316Ti, etc. The hose part 710 can be a bellows, which can be a 316L metal bellows with PTFE lining; the hose part 710 has the characteristics of flexibility and bendability, and can realize multi-degree-of-freedom motion decoupling. The expansion part 730 can be a bellows, which can be a 316L bellows or a 316Ti bellows; the expansion part 730 is used to connect the hard pipe part 720 to realize the soft connection of the hard pipe part 720. Since the cooling device of the embodiment is used in a vacuum environment, if the hard pipe part 720 is hard connected, it may be deformed due to assembly errors, which is easy to break and cause liquid leakage in a vacuum environment. The expansion part 730 is arranged between the hard pipe parts 720 to avoid the above problems.

[0071] The cooling device provided by the embodiment can significantly reduce the heat generation of the driving device in a high vacuum environment, ensure that the motion device can work continuously and stably, and will not affect its precision and performance due to overheating; simplify the layout and connection mode of the pipeline, so that the assembly process is more convenient and efficient; at the same time, the temperature of the driving device is effectively reduced, the occurrence of thermal deformation is reduced, the precision of the motion device is improved, the service life of the motion device is prolonged, and the maintenance cost is reduced.

[0072] In an optional embodiment, as shown in Figure 1 The hard pipe part 720 includes a first hard pipe part 721 and a second hard pipe part 722, and the first hard pipe part 721 and the second hard pipe part 722 are connected through the expansion part 730. The hose part 710, the first hard pipe part 721, the expansion part 730 and the second hard pipe part 722 connected in sequence form a group of pipelines, each cooling pipeline assembly includes N groups of the above-mentioned pipelines (i.e. the hose part 710, the first hard pipe part 721, the expansion part 730 and the second hard pipe part 722 connected in sequence), and N is an integer not less than 1. When N is an integer not less than 2, the second hard pipe part 722 of the (N-1)th group of pipelines is connected to the hose part 710 of the Nth group of pipelines, and the value of N in different cooling pipeline assemblies can be the same or different.

[0073] One end of the hose section 710 in the first group of pipes is connected to the cooling medium circulating mechanism 400 through a joint, and one end of the second hard pipe section 722 in the Nth group of pipes in different cooling pipe assemblies is respectively connected to the first cooling mechanism 100, the second cooling mechanism 200 and the third cooling mechanism 300.

[0074] In an optional embodiment, as shown in Figure 1 The three cooling pipe assemblies are respectively named as a first cooling pipe assembly, a second cooling pipe assembly and a third cooling pipe assembly, wherein the first cooling pipe assembly comprises the first cooling medium supply pipe 110 and the first cooling medium return pipe 120; the second cooling pipe assembly comprises the second cooling medium supply pipe 210 and the second cooling medium return pipe 220; and the third cooling pipe assembly comprises the third cooling medium supply pipe 310 and the third cooling medium return pipe 320.

[0075] One hose section 710 represents one degree of freedom. If each cooling pipe assembly is connected to the mover in the driving device, the number of hose sections 710 provided in different cooling pipe assemblies is the same as the number of directions in which the driving device needs to move. If each cooling pipe assembly is connected to the stator in the driving device, no hose section 710 can be provided in each cooling pipe assembly.

[0076] In this embodiment, for example, Figure 1 The first cooling medium supply pipe 110 and the first cooling medium return pipe 120 each comprise one group of sequentially connected hose sections 710, first hard pipe sections 721, expansion sections 730 and second hard pipe sections 722. One end of the hose section 710 away from the first hard pipe section 721 is connected to the cooling medium circulating mechanism 400, and one end of the second hard pipe section 722 away from the expansion section 730 is connected to the first cooling mechanism 100. The first cooling mechanism 100 covers at least part of the first mover 11 of the first driving device 10. Since the first mover 11 moves in the first direction, only one hose section 710 needs to be provided.

[0077] The second cooling medium supply pipeline 210 and the second cooling medium return pipeline 220 each include two groups of sequentially connected hose sections 710, first hard pipe sections 721, expansion sections 730 and second hard pipe sections 722, one end of the first group of hose sections 710 away from the first hard pipe section 721 is connected with the cooling medium circulating mechanism 400, one end of the second group of hose sections 710 away from the first hard pipe section 721 is connected with one end of the second group of second hard pipe sections 722 away from the expansion section 730, one end of the second group of second hard pipe sections 722 away from the expansion section 730 is connected with the second cooling mechanism 200, the second cooling mechanism 200 covers at least part of the second mover 21 of the second driving device 20, the second mover 21 can move in the second direction in addition to moving in the first direction with the first mover 11, therefore two hose sections 710 are needed, and the two hose sections 710 are perpendicular to each other.

[0078] The third cooling medium supply pipeline 310 and the third cooling medium return pipeline 320 each include at least two groups of sequentially connected hose sections 710, first hard pipe sections 721, expansion sections 730 and second hard pipe sections 722. Since the third cooling medium supply pipeline 310 and the third cooling medium return pipeline 320 in the embodiment are connected with the third cooling mechanism 300, and the third cooling mechanism 300 covers at least part of the rotating motor 31 (equivalent to part of a stator) of the third driving device 30, therefore the third cooling medium supply pipeline 310 and the third cooling medium return pipeline 320 each include two groups of sequentially connected hose sections 710, first hard pipe sections 721, expansion sections 730 and second hard pipe sections 722, that is, the same as the second cooling medium supply pipeline 210 and the second cooling medium return pipeline 220.

[0079] In an optional embodiment, as shown in Figure 2 , the first cooling mechanism 100 is respectively provided with a first cooling medium inlet 103 and a first cooling medium outlet 104, and a first cooling medium passage 105 is formed in the first cooling mechanism 100, and two ends of the first cooling medium passage 105 are respectively communicated with the first cooling medium inlet 103 and the first cooling medium outlet 104. As shown in Figure 1 , the cooling medium circulating mechanism 400 is communicated with the first cooling medium inlet 103 through the first cooling medium supply pipeline 110, and the cooling medium circulating mechanism 400 is communicated with the first cooling medium outlet 104 through the first cooling medium return pipeline 120.

[0080] Similarly, as shown in Figure 1 and Figure 2As shown in

[0081] As shown in Figure 1 and Figure 3 As shown in

[0082] As shown in Figure 2 In an optional embodiment, as shown in

[0083] As shown in Figure 2 In an optional embodiment, as shown in

[0084] As shown in Figure 3As shown, the third driving device 30 comprises a rotary motor 31, a screw rod 32 and a third mover 33. The rotary motor 31 drives the screw rod 32 to rotate so as to make the third mover 33 on the screw rod 32 reciprocate along a third direction. The third cooling mechanism 300 comprises a third cooling part A 301 and a third cooling part B 302. The third cooling part A 301 and the third cooling part B 302 combine to form a receiving cavity which can accommodate the rotary motor 31.

[0085] In an optional embodiment, a first heat-conducting gasket is arranged between the first cooling part A 101 and the first mover 11 and between the first cooling part B 102 and the first mover 11.

[0086] A second heat-conducting gasket is arranged between the second cooling part A 201 and the second mover 21 and between the second cooling part B 202 and the second mover 21.

[0087] A third heat-conducting gasket is arranged between the third cooling part A 301 and the rotary motor 31 and between the third cooling part B 302 and the rotary motor 31.

[0088] The first heat-conducting gasket, the second heat-conducting gasket and the third heat-conducting gasket have high thermal conductivity and low hardness, and can be embedded in the uneven part between the contact surface of the cooling mechanism and the mover or the contact surface of the cooling mechanism and the rotary motor, so as to reduce the thermal resistance of the contact surface and achieve better cooling effect under the condition of reducing the roughness requirement of the contact surface. The material of the first heat-conducting gasket, the second heat-conducting gasket and the third heat-conducting gasket can be copper, indium or the like.

[0089] In an optional embodiment, as shown, Figure 1 The cooling device further comprises a first cooling medium circulating pipeline 410, a second cooling medium circulating pipeline 420 and a shunt mechanism 500. The outlet of the cooling medium circulating mechanism 400 is in communication with the inlet of the first cooling medium circulating pipeline 410, and the inlet of the cooling medium circulating mechanism 400 is in communication with the outlet of the second cooling medium circulating pipeline 420. The outlet of the first cooling medium circulating pipeline 410 is in communication with the first cooling medium supply pipeline 110, the second cooling medium supply pipeline 210 and the third cooling medium supply pipeline 310 through the shunt mechanism 500. The inlet of the second cooling medium circulating pipeline 420 is in communication with the first cooling medium return pipeline 120, the second cooling medium return pipeline 220 and the third cooling medium return pipeline 320 through the shunt mechanism 500. In this way, heat exchange between the cooling medium circulating mechanism 400 and the first cooling mechanism 100, the second cooling mechanism 200 and the third cooling mechanism 300 is achieved.

[0090] Embodiment Two

[0091] This embodiment also provides a cooling device, as shown in Figure 4and Figure 5 The same as embodiment one is not described again, and the difference between the embodiment and embodiment one is that:

[0092] As Figure 4 (a) and Figure 4 As shown in (a) and (b), the first cooling medium passage 105 includes a first cooling medium flow channel A 1051, a first cooling medium flow channel B 1052 and a first cooling medium flow channel C 1053. The first cooling medium flow channel A 1051 and the first cooling medium flow channel B 1052 are opened in the interior of the first cooling part A 101, the first cooling medium flow channel A 1051 and the first cooling medium flow channel B 1052 are parallel, and both are arranged along the length direction of the first cooling part A 101; the first cooling medium flow channel C 1053 is opened in the interior of the first cooling part B 102, and the first cooling medium flow channel C 1053 is arranged in a circumferential direction (i.e. sequentially arranged along the length and width direction) around the interior of the first cooling part B 1052. The first cooling medium flow channel A 1051, the first cooling medium flow channel B 1052 and the first cooling medium flow channel C 1053 are processed by drilling and sealing one end or both ends of the drilled hole with a plug, so that the flow channel formed in this way has fewer bends, effectively reducing the flow resistance inside the flow channel, reducing the pressure drop of the cooling medium inside the flow channel, and the cross-sectional area of the flow channel inlet is smaller, which can promote the flow rate of the cooling medium and help rapid heat exchange.

[0093] The first cooling medium inlet 103 and the first cooling medium outlet 104 are opened on the first cooling part A 101, the first cooling medium inlet 103 is communicated with the inlet of the first cooling medium flow channel A 1051, the outlet of the first cooling medium flow channel A 1051 is communicated with the inlet of the first cooling medium flow channel C 1053 through the first cooling medium flow channel connecting pipe A 1061, the outlet of the first cooling medium flow channel C 1053 is communicated with the inlet of the first cooling medium flow channel B 1052 through the first cooling medium flow channel connecting pipe B 1062, and the outlet of the first cooling medium flow channel B 1052 is communicated with the first cooling medium outlet 104. The first cooling medium flow channel connecting pipe A 1061 and the first cooling medium flow channel connecting pipe B 1062 are flexible pipes, preferably metal bellows, and the material of the metal bellows is preferably 304 stainless steel or 316L stainless steel. The connecting pipes connecting the flow channels in the cooling part A with the flow channels in the cooling part B appearing in the following description are all flexible pipes, the selection of the flexible pipes is as above, and the following is not described again.

[0094] As Figure 4 (a) and Figure 4(b) shows, the second cooling medium passage 205 includes a second cooling medium flow channel A 2051, a second cooling medium flow channel B 2052 and a second cooling medium flow channel C 2053. The second cooling medium flow channel A 2051 and the second cooling medium flow channel B 2052 are opened in the interior of the second cooling part A 201, the second cooling medium flow channel A 2051 and the second cooling medium flow channel B 2052 are parallel, and are both arranged along the length direction of the second cooling part A 201; the second cooling medium flow channel C 2053 is opened in the interior of the second cooling part B 202, and the second cooling medium flow channel C 2053 is arranged in a circumferential direction (i.e. sequentially arranged along the length and width direction) in the interior of the second cooling part B 2052. The second cooling medium flow channel A 2051, the second cooling medium flow channel B 2052 and the second cooling medium flow channel C 2053 are processed by drilling and sealing one end or both ends of the drilled hole with a plug, so that the flow channel formed in this way has fewer bends, effectively reducing the flow resistance inside the flow channel, reducing the pressure drop of the cooling medium in the flow channel, and the cross-sectional area of the flow channel inlet is smaller, which can promote the flow rate of the cooling medium and help rapid heat exchange.

[0095] The second cooling medium inlet 203 and the second cooling medium outlet 204 are opened on the second cooling part A 201, the second cooling medium inlet 203 is communicated with the inlet of the second cooling medium flow channel A 2051, the outlet of the second cooling medium flow channel A 2051 is communicated with the inlet of the second cooling medium flow channel C 2053 through the second cooling medium flow channel connecting pipe A 2061, the outlet of the second cooling medium flow channel C 2053 is communicated with the inlet of the second cooling medium flow channel B 2052 through the second cooling medium flow channel connecting pipe B 2062, and the outlet of the second cooling medium flow channel B 2052 is communicated with the second cooling medium outlet 204.

[0096] As shown in Figure 5 (a) and Figure 5 (b) shows, the third cooling medium passage 305 includes a third cooling medium flow channel A 3051 and a third cooling medium flow channel B 3052. The third cooling medium flow channel A 3051 is opened in the interior of the third cooling part A 301, and the third cooling medium flow channel A 3051 is arranged in a circumferential direction (i.e. sequentially arranged along the length and width direction) in the interior of the third cooling part A 301; the third cooling medium flow channel B 3052 is opened in the interior of the third cooling part B 302, and the third cooling medium flow channel B 3052 is arranged in a circumferential direction (i.e. sequentially arranged along the length and width direction) in the interior of the third cooling part B 302. The third cooling medium flow channel A 3051 and the third cooling medium flow B 3052 are communicated through the third cooling medium flow channel connecting pipe 3061.

[0097] The third cooling medium inlet 303 is arranged at the lower part of the third cooling part A 301, and the third cooling medium outlet 304 is arranged at the upper part of the third cooling part B 302. Alternatively, the third cooling medium inlet 303 is arranged at the upper part of the third cooling part B 302, and the third cooling medium outlet 304 is arranged at the lower part of the third cooling part A 301.

[0098] Embodiment three

[0099] This embodiment also provides a cooling device, as shown in Figure 6 and Figure 7 The same as embodiment one or embodiment two will not be repeated, and the difference between this embodiment and embodiment one or embodiment two is that:

[0100] The first cooling medium passage 105 also includes a first cooling medium flow channel A 1051, a first cooling medium flow channel B 1052, and a first cooling medium flow channel C 1053. As shown in Figure 6 (a), the first cooling medium flow channel A 1051 and the first cooling medium flow channel B 1052 are arranged inside the first cooling part A 101, and the first cooling medium flow channel A 1051 and the first cooling medium flow channel B 1052 are both in the shape of a plurality of "S" shapes connected in sequence, and the first cooling medium flow channel A 1051 and the first cooling medium flow channel B 1052 are parallel and symmetrical, so as to increase the contact area of the cooling medium and the first cooling part A 101, which helps to improve the heat exchange efficiency, and the smooth transition at the bend of the flow channel can effectively reduce the flow resistance. It can be understood that the flow channels with the same shape described below have the same effect, which will not be repeated. As shown in Figure 6 (b), the first cooling medium flow channel C 1053 is arranged inside the first cooling part B 102, and the first cooling medium flow channel C 1053 is formed by a plurality of "S" grooves connected in sequence along the circumferential direction of the inside of the first cooling part B 102.

[0101] The second cooling medium passage 205 also includes a second cooling medium flow channel A 2051, a second cooling medium flow channel B 2052, and a second cooling medium flow channel C 2053. As shown in Figure 6 (a), the second cooling medium flow channel A 2051 and the second cooling medium flow channel B 2052 are arranged inside the second cooling part A 201, and the second cooling medium flow channel A 2051 and the second cooling medium flow channel B 2052 are both in the shape of a plurality of "S" shapes connected in sequence, and the second cooling medium flow channel A 2051 and the second cooling medium flow channel B 2052 are parallel and symmetrical. As shown in Figure 6As shown in (b), the second cooling medium flow channel C 2053 is opened inside the second cooling section B 202. The second cooling medium flow channel C 2053 is formed by connecting multiple "S"-shaped grooves end to end in the circumferential direction inside the second cooling section B 202.

[0102] like Figure 7 (a) and Figure 7 As shown in (b), the third cooling medium flow channel 305 includes a third cooling medium flow channel A 3051 and a third cooling medium flow channel B 3052. The third cooling medium flow channel A 3051 is located inside the third cooling section A 301. Since the rotary motor 31 is cylindrical, the third cooling section A 301 is a hollow semi-cylindrical shape. The third cooling medium flow channel A 3051 is formed by connecting multiple "S"-shaped grooves end-to-end. The third cooling medium flow channel B 3052 is located inside the third cooling section B 302. Similarly, the third cooling medium flow channel B 3052 is formed by connecting multiple "S"-shaped grooves end-to-end.

[0103] Example 4

[0104] This embodiment also provides a cooling device, such as... Figure 8 and Figure 9 As shown, the similarities between this embodiment and embodiments one through three will not be repeated here. The differences between this embodiment and embodiments one through three are as follows:

[0105] The first cooling medium channel 105 includes a first cooling medium cavity flow channel A 1054 and a first cooling medium cavity flow channel B 1055. For example... Figure 8 As shown in (a), a cavity is formed within the first cooling section A 101 to create a first cooling medium cavity flow channel A 1054. Multiple first protrusions 107 are provided within the first cooling medium cavity flow channel A 1054. The height of each first protrusion 107 is less than the height of the first cooling medium cavity flow channel A 1054. This increases the contact area between the cooling medium and the first cooling section A 101, thus improving heat exchange efficiency. It is understood that similar structures described below also have the above-mentioned effects; however, these effects will not be elaborated further when such structures are used in the following descriptions. The shape of the first protrusion 107 can be a regular shape, such as a cylinder. Figure 8(b) shows, the inside of the first cooling part B 102 is hollowed out to form a first cooling medium cavity flow channel B 1055, a plurality of first protrusions 107 are arranged in the first cooling medium cavity flow channel B 1055, and the height of the first protrusions 107 is less than the height of the first cooling medium cavity flow channel B 1055. The first cooling medium inlet 103 is arranged on the first cooling part B 102, the first cooling medium outlet 104 is arranged on the first cooling part A 101, the first cooling medium inlet 103 is communicated with the inlet of the first cooling medium cavity flow channel B 1055, the outlet of the first cooling medium cavity flow channel B 1055 is communicated with the inlet of the first cooling medium cavity flow channel A 1054 through the first cooling medium cavity flow channel connecting pipe 1063, and the outlet of the first cooling medium cavity flow channel A 1054 is communicated with the first cooling medium outlet 104. The first cooling medium inlet 103 arranged on the first cooling part B 102 can ensure that the cooling medium can be continuously discharged under the action of gravity, and the cooling medium flow of the first cooling medium cavity flow channel A 1054 and the first cooling medium cavity flow channel B 1055 is short, which can effectively avoid the problem that the temperature difference between the inlet and the outlet of the cooling medium cavity flow channel is too large.

[0106] The second cooling medium channel 205 includes a second cooling medium cavity flow channel A 2054 and a second cooling medium cavity flow channel B 2055. As Figure 8 (a) shows, the inside of the first cooling part B 102 is hollowed out to form a first cooling medium cavity flow channel B 1055, a plurality of first protrusions 107 are arranged in the first cooling medium cavity flow channel B 1055, and the height of the first protrusions 107 is less than the height of the first cooling medium cavity flow channel B 1055. The first cooling medium inlet 103 is arranged on the first cooling part B 102, the first cooling medium outlet 104 is arranged on the first cooling part A 101, the first cooling medium inlet 103 is communicated with the inlet of the first cooling medium cavity flow channel B 1055, the outlet of the first cooling medium cavity flow channel B 1055 is communicated with the inlet of the first cooling medium cavity flow channel A 1054 through the first cooling medium cavity flow channel connecting pipe 1063, and the outlet of the first cooling medium cavity flow channel A 1054 is communicated with the first cooling medium outlet 104. The first cooling medium inlet 103 arranged on the first cooling part B 102 can ensure that the cooling medium can be continuously discharged under the action of gravity, and the cooling medium flow of the first cooling medium cavity flow channel A 1054 and the first cooling medium cavity flow channel B 1055 is short, which can effectively avoid the problem that the temperature difference between the inlet and the outlet of the cooling medium cavity flow channel is too large. Figure 8 (b) shows, the inside of the first cooling part B 102 is hollowed out to form a first cooling medium cavity flow channel B 1055, a plurality of first protrusions 107 are arranged in the first cooling medium cavity flow channel B 1055, and the height of the first protrusions 107 is less than the height of the first cooling medium cavity flow channel B 1055. The first cooling medium inlet 103 is arranged on the first cooling part B 102, the first cooling medium outlet 104 is arranged on the first cooling part A 101, the first cooling medium inlet 103 is communicated with the inlet of the first cooling medium cavity flow channel B 1055, the outlet of the first cooling medium cavity flow channel B 1055 is communicated with the inlet of the first cooling medium cavity flow channel A 1054 through the first cooling medium cavity flow channel connecting pipe 1063, and the outlet of the first cooling medium cavity flow channel A 1054 is communicated with the first cooling medium outlet 104. The first cooling medium inlet 103 arranged on the first cooling part B 102 can ensure that the cooling medium can be continuously discharged under the action of gravity, and the cooling medium flow of the first cooling medium cavity flow channel A 1054 and the first cooling medium cavity flow channel B 1055 is short, which can effectively avoid the problem that the temperature difference between the inlet and the outlet of the cooling medium cavity flow channel is too large.

[0107] As Figure 9 (a) and Figure 9(b) as shown, the third cooling medium passage 305 includes a third cooling medium cavity flow passage A 3053 and a third cooling medium cavity flow passage B 3054. The third cooling portion A 301 is hollowed to form the third cooling medium cavity flow passage A 3053, the third cooling portion B 302 is hollowed to form the third cooling medium cavity flow passage B 3054, the third cooling medium cavity flow passage A 3053 and the third cooling medium cavity flow passage B 3054 are both provided with third protrusions 307, the height of the third protrusions 307 is less than the height of the third cooling medium cavity flow passage A 3053 and the height of the third cooling medium cavity flow passage B 3054. The third cooling medium inlet 303 is arranged at the lower part of the third cooling portion A 301, the third cooling medium outlet 304 is arranged at the upper part of the third cooling portion B 302, the third cooling medium inlet 303 is communicated with the third cooling medium cavity flow passage A 3053, the third cooling medium cavity flow passage A 3053 is communicated with the third cooling medium cavity flow passage B 3054 through the third cooling medium cavity flow passage connecting pipe 3062, and the third cooling medium cavity flow passage B 3054 is communicated with the third cooling medium outlet 304. Arranging the third cooling medium inlet 303 at the lower part of the third cooling portion A 301 is conducive to the discharge of the cooling medium under the action of gravity, and the cooling medium flow in the third cooling medium cavity flow passage A 3053 and the third cooling medium cavity flow passage B 3054 is short, effectively avoiding the problem of excessive temperature difference between the inlet and outlet of the cooling medium cavity flow passage.

[0108] Example five

[0109] This embodiment also provides a cooling device, as shown in Figure 10 and Figure 11 The same as the first embodiment to the fourth embodiment, the difference between the first embodiment to the fourth embodiment is:

[0110] The first cooling medium passage 105 includes a first cooling medium inflow flow passage A 1056, a first cooling medium return flow passage A 1057, a first cooling medium inflow flow passage B 1058, and a first cooling medium return flow passage B 1059. As shown in Figure 10 (a) and Figure 10(b) As shown, the first cooling medium inflow passage A 1056 and the first cooling medium return flow passage A 1057 are arranged in the first cooling portion A 101, and the first cooling medium inflow passage A 1056 and the first cooling medium return flow passage A 1057 are arranged around each other, and the outlet of the first cooling medium inflow passage A 1056 is in communication with the inlet of the first cooling medium return flow passage A 1057. The first cooling medium inflow passage A 1056 and the first cooling medium return flow passage A 1057 form a double circulation structure, which can increase the contact area of the cooling medium with the first cooling portion A 101. The first cooling medium inflow passage A 1056 and the first cooling medium return flow passage A 1057 are evenly distributed in the first cooling portion A 101, effectively improving the heat exchange efficiency, and the flow passage bends smoothly, effectively reducing the flow resistance. It can be understood that the following double circulation structure also has the above-mentioned effect, which will not be described hereinafter. As shown in Figure 10 (c) and Figure 10 (d) As shown, the first cooling medium inflow passage B 1058 and the first cooling medium return flow passage B 1059 are arranged in the first cooling portion B 102, and the first cooling medium inflow passage B 1058 and the first cooling medium return flow passage B 1059 are arranged around each other, forming a double circulation structure, and are evenly distributed in the first cooling portion B 102. The outlet of the first cooling medium inflow passage B 1058 is in communication with the inlet of the first cooling medium return flow passage B 1059. When the first cooling medium inlet 103 is arranged on the first cooling portion A 101, and the first cooling medium outlet 104 is arranged on the first cooling portion B 102, the inlet of the first cooling medium inflow passage A 1056 is in communication with the first cooling medium inlet 103, the outlet of the first cooling medium return flow passage A 1057 is in communication with the inlet of the first cooling medium inflow passage B 1058 through the first cooling medium inflow and return flow passage connecting pipe 1064, and the outlet of the first cooling medium return flow passage B 1059 is in communication with the first cooling medium outlet 104. When the first cooling medium inlet 103 is arranged on the first cooling portion B 102, and the first cooling medium outlet 104 is arranged on the first cooling portion A 101, the inlet of the first cooling medium inflow passage B 1058 is in communication with the first cooling medium inlet 103, the outlet of the first cooling medium return flow passage B 1059 is in communication with the inlet of the first cooling medium inflow passage A 1056, and the outlet of the first cooling medium return flow passage A 1057 is in communication with the first cooling medium outlet 104.

[0111] The second cooling medium passage 205 includes a second cooling medium inflow passage A 2056, a second cooling medium return flow passage A 2057, a second cooling medium inflow passage B 2058, and a second cooling medium return flow passage B 2059. As shown in Figure 10 (a) and Figure 10(b) As shown, the second cooling medium inflow passage A 2056 and the second cooling medium return flow passage A 2057 are arranged in the second cooling portion A 201, and the second cooling medium inflow passage A 2056 and the second cooling medium return flow passage A 2057 are arranged around each other, and the outlet of the second cooling medium inflow passage A 2056 is communicated with the inlet of the second cooling medium return flow passage A 2057. The second cooling medium inflow passage A 2056 and the second cooling medium return flow passage A 2057 are uniformly distributed in the second cooling portion A 201, and the second cooling medium inflow passage A 2056 and the second cooling medium return flow passage A 2057 form a double circulation structure. As shown in Figure 10 (c) and Figure 11 (d) As shown, the second cooling medium inflow passage B 2058 and the second cooling medium return flow passage B 2059 are arranged in the second cooling portion B 202, and the second cooling medium inflow passage B 2058 and the second cooling medium return flow passage B 2059 are arranged around each other, forming a double circulation structure, and are uniformly distributed in the second cooling portion B 202, and the outlet of the second cooling medium inflow passage B 2058 is communicated with the inlet of the second cooling medium return flow passage B 2059. When the second cooling medium inlet 203 is arranged on the second cooling portion A 201, and the second cooling medium outlet 204 is arranged on the second cooling portion B 202, the inlet of the second cooling medium inflow passage A 2056 is communicated with the second cooling medium inlet 203, the outlet of the second cooling medium return flow passage A 2057 is communicated with the inlet of the second cooling medium inflow passage B 2058 through the second cooling medium inflow and return flow passage connecting pipe 2064, and the outlet of the second cooling medium return flow passage B 2059 is communicated with the second cooling medium outlet 204. When the second cooling medium inlet 203 is arranged on the second cooling portion B 202, and the second cooling medium outlet 204 is arranged on the second cooling portion A 201, the inlet of the second cooling medium inflow passage B 2058 is communicated with the second cooling medium inlet 203, the outlet of the second cooling medium return flow passage B 2059 is communicated with the inlet of the second cooling medium inflow passage A 2056, and the outlet of the second cooling medium return flow passage A 2057 is communicated with the second cooling medium outlet 204.

[0112] The third cooling medium passage 305 includes a third cooling medium inflow passage A 3055, a third cooling medium return flow passage A 3056, a third cooling medium inflow passage B 3057, and a third cooling medium return flow passage B 3058. As shown in Figure 11 (a) and Figure 11(b) As shown, the third cooling medium inflow passage A 3055 and the third cooling medium return flow passage A 3056 are arranged in the third cooling portion A 301, the third cooling medium inflow passage A 3055 and the third cooling medium return flow passage A 3056 are arranged around each other, and the outlet of the third cooling medium inflow passage A 3055 and the inlet of the third cooling medium return flow passage A 3056 are communicated. The third cooling medium inflow passage A 3055 and the third cooling medium return flow passage A 3056 are uniformly distributed in the third cooling portion A 301, and the third cooling medium inflow passage A 3055 and the third cooling medium return flow passage A 3056 form a double circulation structure. As shown in Figure 11 (c) and Figure 12 (d) As shown, the third cooling medium inflow passage B 3057 and the third cooling medium return flow passage B 3058 are arranged in the third cooling portion B 302, the third cooling medium inflow passage B 3057 and the third cooling medium return flow passage B 3058 are arranged around each other, forming a double circulation structure, and are uniformly distributed in the third cooling portion B 302. The outlet of the third cooling medium inflow passage B 3057 and the inlet of the third cooling medium return flow passage B 3058 are communicated. When the third cooling medium inlet 303 is arranged at the lower part of the third cooling portion A 301, and the third cooling medium outlet 304 is arranged at the upper part of the third cooling portion B 302, the inlet of the third cooling medium inflow passage A 3055 is communicated with the third cooling medium inlet 303, the outlet of the third cooling medium return flow passage A 3056 and the inlet of the third cooling medium inflow passage B 3057 are communicated through the third cooling medium inflow-return flow passage connecting pipe 3063, and the outlet of the third cooling medium return flow passage B 3058 is communicated with the third cooling medium outlet 304. When the third cooling medium inlet 303 is arranged at the lower part of the third cooling portion B 302, and the third cooling medium outlet 304 is arranged at the upper part of the third cooling portion A 301, the inlet of the third cooling medium inflow passage B 3057 is communicated with the third cooling medium inlet 303, the outlet of the third cooling medium return flow passage B 3058 is communicated with the inlet of the third cooling medium inflow passage A 3055, and the outlet of the third cooling medium return flow passage A 3056 is communicated with the third cooling medium outlet 304.

[0113] Example Six

[0114] This embodiment provides a motion device, as shown in Figure 13 and Figure 13 The motion device includes the cooling device described in examples one to five, and further includes a first driving device 10, a second driving device 20, a third driving device 30, a first base 13, a second base 23, a third base 34, a first support plate 24, and a second support plate 35.

[0115] The first driving device 10 is arranged between the first base 13 and the second base 23. The first driving device 10 comprises a first mover 11 and a first stator 12, the first stator 12 is fixed on the first base 13, the first mover 11 is fixedly connected with the second base 23 to drive the second base 23 to reciprocate along a first direction, and the first cooling mechanism 100 covers part of the surface of the first mover 11.

[0116] The second driving device 20 is arranged between the second base 23 and the first support plate 24. The second driving device 20 comprises a second mover 21 and a second stator 22, the second stator 22 is fixed on the second base 23, the second mover 21 is fixedly connected with the first support plate 24 to drive the first support plate 24 to reciprocate along a second direction, and the second cooling mechanism 100 covers part of the surface of the second mover 21.

[0117] The third base 34 is fixed vertically on the first support plate 24, and a containing portion is formed between the third base 34 and the first support plate 24, and the third driving device 30 is arranged in the containing portion. The third driving device 30 comprises a rotary motor 31, a lead screw 32 and a third mover 33, the output shaft of the rotary motor 31 is connected to the lead screw, the third mover 33 is arranged on the lead screw 32, the rotary motor 31 is fixedly connected to the third base 34, the lead screw 32 is connected to the third base 34 through a bearing, the third mover 33 is fixedly connected with the second support plate 35 to drive the second support plate 35 to reciprocate along a third direction, and the third cooling mechanism 300 wraps the outer side wall of the rotary motor 31.

[0118] In an optional embodiment, as shown in Figure 13 The movement device further comprises a flow distribution mechanism 500, the flow distribution mechanism 500 is connected with the cooling medium circulation mechanism 400 and the cooling pipeline assembly, and the flow distribution mechanism 500 is fixed on the first base 13 through a damping mechanism 600.

[0119] Specifically, as shown in ​ The hose part of the first group of pipelines in the first cooling pipeline assembly, the second cooling pipeline assembly and the third cooling pipeline assembly is bent once, and the bottom of the end of the hose part close to the flow distribution mechanism 500 is fixedly connected with the first base 13, the top of the end of the movement pipeline away from the flow distribution mechanism 500 is fixedly connected with the second base 23, and the bent part of the movement pipeline can move with the second base 23. The hose part of the second group of pipelines in the second cooling pipeline assembly and the third cooling pipeline assembly is bent once, and the bottom of the end of the hose part close to the previous group of pipelines is fixedly connected with the second base 23, the top of the end of the movement pipeline away from the previous group of pipelines is fixedly connected with the first support plate 24, and the movement pipeline can move with the first support plate 24. The medium flow direction of the hose part of the first group of pipelines is perpendicular to the medium flow direction of the hose part of the second group of pipelines.

[0120] The cooling medium used in the cooling device of the embodiment can be a liquid or a gas, etc., the liquid can be water, etc., and the gas can be an inert gas such as nitrogen, etc. The cooling device provided by the embodiment can significantly reduce the temperature of the motion device, and ensure the precision and reliability of the motion device in a high-vacuum environment.

[0121] The above embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the present application. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the present application should be covered by the claims of the present application.

Claims

1. Cooling device, characterized in that The cooling device is used in a motion device, the motion device comprising a first driving device (10), a second driving device (20) and a third driving device (30), a first mover (11) of the first driving device (10) reciprocating in a first direction, a second mover (21) of the second driving device (20) reciprocating in a second direction, a third mover (33) of the third driving device (30) reciprocating in a third direction, the first direction, the second direction and the third direction being perpendicular to each other; The cooling device comprises a first cooling mechanism (100), a second cooling mechanism (200), a third cooling mechanism (300) and a cooling medium circulating mechanism (400), the first cooling mechanism (100) covering at least part of the first driving device (10), the second cooling mechanism (200) covering at least part of the second driving device (20), the third cooling mechanism (300) covering at least part of the third driving device (30); Three cooling pipeline assemblies, the cooling medium circulating mechanism (400) being connected to the first cooling mechanism (100), the second cooling mechanism (200) and the third cooling mechanism (300) respectively through the three cooling pipeline assemblies to realize the circulation of the cooling medium, each of the cooling pipeline assemblies comprising a hard pipe part (720), a hose part (710) and an expansion part (730), the hard pipe part (720) being connected to the expansion part (730) at least at one end. The hard pipe part (720) comprises a first hard pipe part (721) and a second hard pipe part (722); 2. Cooling device according to claim 1, characterized in that The cooling pipeline assembly comprises N groups of sequentially connected hose parts (710), first hard pipe parts (721), expansion parts (730) and second hard pipe parts (722), N being an integer not less than 1, the values of N in different cooling pipeline assemblies being the same or different; One end of the hose part (710) in the first group is connected to the cooling medium circulating mechanism (400); One end of the second hard pipe part (722) in the Nth group is connected to one of the first cooling mechanism (100), the second cooling mechanism (200) and the third cooling mechanism (300). The first cooling pipeline assembly comprises a first cooling medium supply pipeline (110) and a first cooling medium return pipeline (120); the second cooling pipeline assembly comprises a second cooling medium supply pipeline (210) and a second cooling medium return pipeline (220); the third cooling medium pipeline assembly comprises a third cooling medium supply pipeline (310) and a third cooling medium return pipeline (320); 3. Cooling device according to claim 2, characterized in that The first cooling medium supply pipeline (110) and the first cooling medium return pipeline (120) each comprise one group of sequentially connected hose parts (710), first hard pipe parts (721), expansion parts (730) and second hard pipe parts (722); ​ The second cooling medium supply pipeline (210) and the second cooling medium return pipeline (220) each include two groups of sequentially connected hose sections (710), first hard pipe sections (721), expansion sections (730), and second hard pipe sections (722); The third cooling medium supply pipeline (310) and the third cooling medium return pipeline (320) each include at least two groups of sequentially connected hose sections (710), first hard pipe sections (721), expansion sections (730), and second hard pipe sections (722).

4. Cooling device according to claim 3, characterized in that A first cooling medium inlet (103) and a first cooling medium outlet (104) are respectively formed in the first cooling mechanism (100), and a first cooling medium channel (105) is formed in the first cooling mechanism (100), with two ends of the first cooling medium channel (105) respectively in communication with the first cooling medium inlet (103) and the first cooling medium outlet (104); A second cooling medium inlet (203) and a second cooling medium outlet (204) are respectively formed in the second cooling mechanism (200), and a second cooling medium channel (205) is formed in the second cooling mechanism (200), with two ends of the second cooling medium channel (205) respectively in communication with the second cooling medium inlet (203) and the second cooling medium outlet (204); A third cooling medium inlet (303) and a third cooling medium outlet (304) are respectively formed in the third cooling mechanism (300), and a third cooling medium channel (305) is formed in the third cooling mechanism (300), with two ends of the third cooling medium channel (305) respectively in communication with the third cooling medium inlet (303) and the third cooling medium outlet (304); The cooling medium circulation mechanism (400) is in communication with the first cooling medium inlet (103) through the first cooling medium supply pipeline (110), and the cooling medium circulation mechanism (400) is in communication with the first cooling medium outlet (104) through the first cooling medium return pipeline (120); the cooling medium circulation mechanism (400) is in communication with the second cooling medium inlet (203) through the second cooling medium supply pipeline (210), and the cooling medium circulation mechanism (400) is in communication with the second cooling medium outlet (204) through the second cooling medium return pipeline (220); the cooling medium circulation mechanism (400) is in communication with the third cooling medium inlet (303) through the third cooling medium supply pipeline (310), and the cooling medium circulation mechanism (400) is in communication with the third cooling medium outlet (304) through the third cooling medium return pipeline (320).

5. The cooling device of claim 1, wherein The first driving device (10) is a linear motor, comprising a first stator (12) in a U shape and a first mover (11) in a plate shape, the first mover (11) is partially arranged in a U-shaped slot of the first stator (12), the first stator (12) drives the first mover (11) to reciprocate along the first direction; the first cooling mechanism (100) comprises a first cooling part A (101) and a first cooling part B (102), the first cooling part A (101) is arranged above the upper surface of the first mover (11), and the first cooling part B (102) is arranged below the lower surface of the first mover (11); and / or, The second driving device (20) is a linear motor, comprising a second stator (22) in a U shape and a second mover (21) in a plate shape, the second mover (21) is partially arranged in a U-shaped slot of the second stator (22), the second stator (22) drives the second mover (21) to reciprocate along the second direction; the second cooling mechanism (200) comprises a second cooling part A (201) and a second cooling part B (202), the second cooling part A (201) is arranged above the upper surface of the second mover (21), and the second cooling part B (202) is arranged below the lower surface of the second mover (21).

6. The cooling device of claim 1, wherein The third driving device (30) comprises a rotary motor (31), a lead screw (32) and the third mover (33), the rotary motor (31) drives the lead screw (32) to rotate so that the third mover (33) on the lead screw (32) reciprocates along the third direction; The third cooling mechanism (300) comprises a third cooling part A (301) and a third cooling part B (302), the third cooling part A (301) and the third cooling part B (302) can form a containing cavity which can contain the rotary motor (31) after combination.

7. Cooling device according to claim 5 or 6, characterized in that First, the cooling part A (101) and the first mover (11) are arranged with a first heat-conducting gasket; and / or, Second, the cooling part A (201) and the second mover (21) are arranged with a second heat-conducting gasket; and / or, Third, the cooling part A (301) and the rotary motor (31) are arranged with a third heat-conducting gasket.

8. The cooling device of claim 3, wherein The cooling device further comprises a first cooling medium circulation pipeline (410), a second cooling medium circulation pipeline (420) and a shunt mechanism (500); The outlet of the cooling medium circulation mechanism (400) is in communication with the inlet of the first cooling medium circulation pipeline (410), and the inlet of the cooling medium circulation mechanism (400) is in communication with the outlet of the second cooling medium circulation pipeline (420); The outlet of the first cooling medium circulation pipeline (410) is communicated with the first cooling medium supply pipeline (110), the second cooling medium supply pipeline (210) and the third cooling medium supply pipeline (310) through the flow distribution mechanism (500) respectively; The inlet of the second cooling medium circulation pipeline (420) is communicated with the first cooling medium return pipeline (120), the second cooling medium return pipeline (220) and the third cooling medium return pipeline (320) through the flow distribution mechanism (500) respectively.

9. A motion device characterized by, The cooling device according to any one of claims 1-8; Further comprising a first driving device (10), a second driving device (20), a third driving device (30), a first base (13), a second base (23), a third base (34), a first support plate (24) and a second support plate (35); The first driving device (10) is arranged between the first base (13) and the second base (23), and comprises a first mover (11) and a first stator (12), wherein the first stator (12) is fixed on the first base (13), the first mover (11) is fixedly connected with the second base (23) to drive the second base (23) to reciprocate along a first direction, and a first cooling mechanism (100) covers part of the surface of the first mover (11); The second driving device (20) is arranged between the second base (23) and the first support plate (24), and comprises a second mover (21) and a second stator (22), wherein the second stator (22) is fixed on the second base (23), the second mover (21) is fixedly connected with the first support plate (24) to drive the first support plate (24) to reciprocate along a second direction, and a second cooling mechanism (200) covers part of the surface of the second mover (21); The third base (34) is fixed perpendicularly on the first support plate (24), and a containing portion is formed between the third base (34) and the first support plate (24), and the third driving device (30) is arranged in the containing portion; The third driving device (30) comprises a rotary motor (31), a lead screw (32) and a third mover (33), the output shaft of the rotary motor (31) is connected to the lead screw (32), the third mover (33) is arranged on the lead screw (32) The rotary motor (31) and the lead screw (32) are fixedly connected to the third base (34), the third mover (33) is fixedly connected with the second support plate (35) to drive the second support plate (35) to reciprocate along a third direction, and a third cooling mechanism (300) wraps the outer side wall of the rotary motor (31).

10. The motion device of claim 9, wherein, Also included is a flow distribution mechanism (500) that connects the cooling medium circulation mechanism (400) and the cooling pipe assembly, and is fixed to the first base (13) by a damping mechanism (600).

Images