Cooling device and processing equipment

Abstract

The utility model provides a cooling device and processing equipment, the cooling device is used for being connected with a reaction furnace, the reaction furnace comprises a shell and an inner container, a clearance space is formed between the shell and the inner container, the cooling device comprises a gas circuit mechanism, the gas circuit mechanism comprises a connector, an exhaust pipeline, an exhaust part and an exhaust pipeline, and the connector is used for being connected with the reaction furnace and communicating with the clearance space; the connector is connected and communicated with the exhaust pipeline, the exhaust part is connected and communicated with the exhaust pipeline and the exhaust pipeline, the exhaust part is used for driving gas to flow from the exhaust pipeline to the exhaust pipeline, and the exhaust pipeline is communicated with the external environment; wherein a first interlayer space is formed in the exhaust pipeline; the cooling mechanism comprises a liquid inlet pipeline and a liquid discharge pipeline, the liquid inlet pipeline and the liquid discharge pipeline are both connected with the exhaust pipeline and communicate with the first interlayer space, the liquid inlet pipeline is used for connecting cooling liquid and transmitting the cooling liquid to the first interlayer space, and the liquid discharge pipeline is used for receiving the cooling liquid absorbing heat in the first interlayer space.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor and photovoltaic product manufacturing, and in particular to a cooling device and processing equipment. Background Technology

[0002] In the manufacturing process of semiconductors and photovoltaic products, sheet materials need to undergo coating processing. This coating process can be carried out in a reactor, which heats the sheet material to the required temperature for coating. However, after processing, the reactor remains at a high temperature, requiring workers to wait for it to cool naturally before removing the processed sheet material. This incurs significant waiting time and impacts the efficiency of sheet material processing. Utility Model Content

[0003] In view of the above, it is necessary to provide a cooling device and processing equipment to solve the above-mentioned defects.

[0004] In a first aspect, embodiments of this application provide a cooling device for connection to a reactor. The reactor includes an outer shell and an inner liner, with a gap space between the outer shell and the inner liner. The cooling device includes: a gas path mechanism, comprising a connector, a suction pipe, a suction component, and an exhaust pipe. The connector is used to connect to the reactor and communicate with the gap space. The connector is connected to and communicates with the suction pipe. The suction component is connected to and communicates with both the suction pipe and the exhaust pipe. The suction component is used to drive gas to flow from the suction pipe to the exhaust pipe. The exhaust pipe is communicated with the external environment. A first interlayer space is provided in the suction pipe. A cooling mechanism includes a liquid inlet pipe and a liquid outlet pipe, both of which are connected to the suction pipe and communicate with the first interlayer space. The liquid inlet pipe is used to access coolant and transmit coolant to the first interlayer space. The liquid outlet pipe is used to receive coolant that has absorbed heat in the first interlayer space.

[0005] Optionally, a second interlayer space is provided in the connector. Both the inlet pipe and the outlet pipe are connected to the connector and communicate with the second interlayer space. The inlet pipe is used to transfer coolant to the second interlayer space, and the outlet pipe is used to receive the coolant that has absorbed heat in the second interlayer space.

[0006] Optionally, the number of connectors is multiple, and the multiple connectors are spaced apart, with each connector used to connect to a corresponding reactor; the gas path mechanism also includes: multiple connecting valves, each of which corresponds to one of the multiple connectors, each connecting valve being located between the exhaust pipe and the corresponding connector, and the connecting valves being used to open or close to connect or block the corresponding connector and the exhaust pipe.

[0007] Optionally, the cooling device further includes: a first detection element connected to the extraction element, the first detection element being used to detect the temperature at one end of the extraction element connected to the extraction pipeline and output corresponding first detection information; and a processor being communicatively connected to the extraction element and the first detection element, the processor being used to receive the first detection information and to trigger the extraction element to stop working.

[0008] Optionally, the cooling device further includes: a second detection element connected to the connector, the second detection element being used to detect the temperature in the second interlayer space and output corresponding second detection information; and a processor, the processor being communicatively connected to the air extraction component and the second detection element, the processor being used to receive the second detection information and to trigger the air extraction component to stop working.

[0009] Optionally, the cooling device further includes: a liquid receiving box, which is located at the bottom of the exhaust pipe and connected to the exhaust pipe, for receiving coolant leaking from the inner wall of the exhaust pipe; a liquid level detection element, which is connected to the liquid receiving box, for detecting the liquid level in the liquid receiving box and outputting corresponding liquid level detection information; and a processor, which is communicatively connected to the liquid level detection element, for receiving the liquid level detection information and for issuing an alarm.

[0010] Optionally, the gas path mechanism further includes: a heat exchanger, which is connected and communicated with the exhaust pipe, and is also connected and communicated with the liquid inlet pipe and the liquid outlet pipe. The heat exchanger is used to receive coolant through the liquid inlet pipe to cool the gas entering the heat exchanger; the liquid outlet pipe is also used to receive the coolant after it has absorbed heat in the heat exchanger.

[0011] Optionally, the gas path mechanism also includes: a muffler, which is installed on the exhaust pipe and is used to reduce the noise when the exhaust pipe is venting; and a pressure relief valve, which is installed on the exhaust pipe and is used to open when the gas pressure in the exhaust pipe is greater than a preset threshold, so that the gas in the exhaust pipe can be discharged to the external environment.

[0012] Optionally, the cooling mechanism further includes: a drip tray, with at least a portion of the inlet pipe located on the drip tray and at least a portion of the drain pipe located on the drip tray, the drip tray being used to collect coolant leaking from the inlet pipe and the drain pipe.

[0013] Secondly, this application provides a processing apparatus, including: a reaction furnace, the reaction furnace including an outer shell and an inner liner, with a gap space between the outer shell and the inner liner; and a cooling device as described in any of the above.

[0014] The cooling device and processing equipment provided in this application, with the operation of the extraction component, can drive the gas in the gap space of the reactor to flow through the connector and extraction pipe. The coolant in the first and second interlayer spaces can cool the gas during the flow process, and the cooled gas can be discharged into the external environment. Thus, the cooling device can extract the gas from the gap space after the reactor has finished processing the sheet material, and drive the gas from the external environment to continuously flow through the gap space, achieving air-cooled cooling of the reactor. This accelerates the cooling efficiency of the reactor, allowing the sheet material inside the reactor to cool down more quickly and exit the reactor faster. It can also improve the processing efficiency of the processing equipment for sheet materials. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the processing equipment in the embodiments of this application.

[0016] Figure 2 This is a schematic diagram of the reactor structure in an embodiment of this application.

[0017] Figure 3 This is a schematic diagram of the cooling device in the embodiments of this application.

[0018] Figure 4 This is a side view of the cooling device in an embodiment of this application.

[0019] Figure 5 This is a partial structural schematic diagram of the gas passage mechanism in an embodiment of this application.

[0020] Figure 6 This is a front view of the cooling device in an embodiment of this application.

[0021] Figure 7 This is a top view of the cooling device in an embodiment of this application.

[0022] Figure 8 This is a schematic diagram of the cooling device in an embodiment of this application.

[0023] Explanation of key component symbols:

[0024] 100. Processing equipment; 101. Reactor; 10. Shell; 20. Inner liner; 21. Reaction space; 22. Gap space; 102. Cooling device; 30. Gas path mechanism; 31. Connector; 311. Second interlayer space; 32. Vacuum extraction pipeline; 321. First interlayer space; 33. Vacuum extraction component; 34. Exhaust pipeline; 35. Connecting valve; 36. Heat exchanger; 37. Silencer; 38. Pressure relief valve; 40. Cooling mechanism; 41. Liquid inlet pipeline; 411. Main liquid inlet pipe; 412. Branch liquid inlet pipe; 42. Liquid outlet pipeline; 421. Main liquid outlet pipe; 422. Branch liquid outlet pipe; 43. Liquid inlet / outlet connecting pipe; 44. Liquid receiving tray; 50. Processor; 60. First detection component; 70. Second detection component; 80. Liquid receiving box; 90. Liquid level detection component. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments.

[0026] The term "multiple" in this application refers to two or more. Furthermore, it should be understood that the terms "first," "second," etc., used in the description of this application are used only for descriptive purposes and should not be construed as indicating or implying relative importance, nor as indicating or implying order.

[0027] In the description of the embodiments in this application, the words "exemplary" or "for example" are used to indicate that they are examples, illustrations, or descriptions. Any embodiment or design that is described as "exemplary" or "for example" in the embodiments of this application should not be construed as being more preferred or advantageous than other embodiments or design options. Specifically, the use of the words "exemplary" or "for example" is intended to present the relevant concepts in a specific manner.

[0028] Please see Figure 1 and Figure 2 , Figure 1 This application illustrates a processing apparatus 100 provided in an embodiment. Figure 2 The reactor 101 of the processing equipment 100 is shown.

[0029] In one embodiment, the processing equipment 100 may include a reactor 101 and a cooling device 102. The reactor 101 may include an outer shell 10 and an inner liner 20. A reaction space 21 is formed in the inner liner 20, which can accommodate multiple sheet-like materials (not shown). The inner liner 20 is located inside the outer shell 10, and the outer shell 10 and the inner liner 20 can be fixed relative to each other, with a gap space 22 formed between them. The cooling device 102 can be fixedly connected to the outer shell 10 and communicate with the gap space 22.

[0030] A heating mechanism (not shown) can be installed within the gap space 22. The heating mechanism can heat the inner liner 20 using the principle of electric or magnetic heating, thereby heating the reaction space 21 and the sheet material within it. A reaction gas can be introduced into the inner liner 20. When the sheet material is heated, it comes into contact with the reaction gas, which can achieve a coating process on the sheet material.

[0031] In the embodiments of this application, the type of sheet material is not specifically limited. For example, the sheet material can be, but is not limited to, silicon wafers, silicon carbide wafers, and silicon wafers. For example, the sheet material can be a silicon wafer, and the processing equipment 100 can perform a coating process on the sheet material according to a chemical vapor deposition process.

[0032] It is understood that after the sheet material in the reaction space 21 is processed, the cooling device 102 can extract air from one end of the gap space 22, thereby removing the heated gas from the reactor 101. Simultaneously, as the temperature in the gap space 22 decreases, the other end of the gap space 22 remains connected to the external environment. Gas from the external environment can enter the gap space 22 under the influence of the gas pressure within it and continue to be extracted under the drive of the cooling device 102. In other words, the cooling device 102 can extract the heated gas from the gap space 22 and continuously drive gas from the external environment through the gap space 22, thereby achieving air cooling of the reactor 101 and cooling of the reaction space 21. After the temperature in the reaction space 21 drops, the operator can remove the processed sheet material from the reaction space 21 and replenish the reaction space 21 with unprocessed sheet material. This can accelerate the heat dissipation efficiency of the reactor 101 after processing the sheet material, thereby reducing the time for workers to wait for the temperature inside the reactor 101 to drop, allowing the processed sheet material to exit the reactor 101 faster, and improving the processing efficiency of the processing equipment 100 for sheet materials.

[0033] It is understandable that the length, width, and height directions of the processing equipment 100 can be defined as the first horizontal direction, the second horizontal direction, and the vertical direction, respectively. For example, the first horizontal direction could be... Figure 1 The X direction and its opposite direction are shown. The second horizontal direction can be... Figure 1 The Y-direction and its opposite direction are shown; the vertical direction can be... Figure 1 The Z direction and its opposite direction are shown.

[0034] In the embodiments of this application, no specific limitation is made on the fixing method during fixed connection and fixed installation. For example, the fixing method may include, but is not limited to, bolt fixing, welding fixing, threaded connection fixing, integral molding fixing, etc.

[0035] Please refer to the following: Figure 3 and Figure 4 In some embodiments, the cooling device 102 may include an air passage mechanism 30 and a cooling mechanism 40. The air passage mechanism 30 may include a connector 31, an air extraction pipe 32, an air extraction component 33, an exhaust pipe 34, a connecting valve 35, and a heat exchanger 36.

[0036] There can be multiple connectors 31, which can be spaced apart in the vertical direction. Each connector 31 can be connected to a corresponding reactor 101 or left unconnected. When a connector 31 is connected to a reactor 101, the connector 31 communicates with the corresponding gap space 22, and the end of the gap space 22 away from the connector 31 is connected to the external environment.

[0037] Multiple connecting valves 35 correspond one-to-one with multiple connecting heads 31. Each connecting valve 35 can be fixedly connected and communicate with its corresponding connecting head 31, and can also be fixedly connected and communicate with the air extraction pipeline 32, thereby achieving a fixed connection and communication between the connecting head 31 and the air extraction pipeline 32. The multiple connecting heads 31, multiple connecting valves 35, and air extraction pipeline 32 can remain relatively fixed.

[0038] Part of the extraction pipe 32 can extend vertically, part can extend horizontally in a second direction, and the remaining part can extend horizontally in a first direction. When the extraction pipe 32 is connected to the connector 31, the extraction pipe 32 can also be connected to the corresponding gap space 22. One end of the extraction pipe 32 is closed, and the other end is fixedly connected to and communicates with the heat exchanger 36. Gas in the extraction pipe 32 can enter the heat exchanger 36, and the heat exchanger 36 can cool the gas entering the heat exchanger 36.

[0039] Please refer to the following: Figure 5 The extraction pipe 32 has a first interlayer space 321, which can contain coolant, and is spaced apart from the gas passage in the extraction pipe 32. Similarly, the connector 31 has a second interlayer space 311, which can contain coolant, and is spaced apart from the gas passage in the connector 31.

[0040] The end of the heat exchanger 36 furthest from the extraction pipe 32 can be fixedly connected to and communicate with the extraction component 33. The extraction pipe 32 can be kept relatively fixed to the extraction component 33. The extraction component 33 can drive the gas flow in the extraction pipe 32, causing the gas in the extraction pipe 32 to approach the extraction component 33, thereby driving the gas in the gap space 22 to enter the extraction pipe 32 through the connector 31 and the connecting valve 35, thus realizing the extraction of gas from the gap space 22.

[0041] The exhaust pipe 34 is fixedly connected to the end of the extraction component 33 away from the extraction pipe 32, and communicates with the extraction component 33. The end of the exhaust pipe 34 away from the extraction component 33 can be left open. The extraction component 33 can extract gas from the heat exchanger 36 and discharge the gas cooled by the heat exchanger 36 to the external environment through the exhaust pipe 34.

[0042] The cooling mechanism 40 may include an inlet pipe 41 and a drain pipe 42. The inlet pipe 41 can be connected to coolant. The inlet pipe 41 can be fixedly connected to the connector 31, the extraction pipe 32, and the heat exchanger 36. The drain pipe 42 can also be fixedly connected to the connector 31, the extraction pipe 32, and the heat exchanger 36. Parts of the inlet pipe 41 and the drain pipe 42 can extend vertically, part can extend horizontally in a second direction, and the remaining parts can extend horizontally in a first direction. The inlet pipe 41 can be connected to the second interlayer space 311, the first interlayer space 321, and the heat exchanger 36, thereby transferring coolant to these spaces. The coolant in the second interlayer space 311 and the first interlayer space 321 can absorb the heat from the gas entering the connector 31 and the exhaust pipe 32 from the gap space 22, reducing the gas temperature and thus minimizing damage to the gas path mechanism 30. The heat exchanger 36 can cool the gas inside it using the coolant transferred through the inlet pipe 41. The outlet pipe 42 can be connected to the second interlayer space 311, the first interlayer space 321, and the heat exchanger 36 to receive the cooled coolant after heat absorption from these spaces and discharge it from the cooling mechanism 40.

[0043] It is understandable that the introduction of coolant into the second interlayer space 311 and the first interlayer space 321 can cool the gas during its transmission to the extraction component 33, reducing damage to the extraction component 33 caused by high-temperature gas. The cooling effect of the heat exchanger 36 on the gas further enhances the cooling of the gas during transmission, reducing damage to the extraction component 33 caused by high-temperature gas. At the same time, the gas is cooled by the coolant before being discharged into the external environment, which can reduce the damage of the gas's heat to the external environment and reduce the probability of personnel in the external environment being harmed by the gas's heat.

[0044] The gas path mechanism 30 works in conjunction with the cooling mechanism 40 to draw gas from the gap space 22 to cool the reaction space 21 while simultaneously cooling the gas in transit, thereby reducing the damage of high-temperature gas to the gas path mechanism 30. This improves the cooling efficiency of the reaction space 21 and the processing efficiency of sheet materials. At the same time, it extends the service life of the cooling device 102.

[0045] It is understood that the coolant in the second interlayer space 311 of the connector 31 cools the gas entering the connector 31, reducing the heat of the gas from damaging the connecting valve 35 connected to the connector 31, thereby improving the service life of the connecting valve 35. Specifically, when the connector 31 is not connected to the reactor 101, i.e., when the connector 31 is empty, the corresponding connecting valve 35 can be closed, while the connecting valve 35 corresponding to the connector 31 connected to the reactor 101 can be opened, thus preventing gas drawn from the gap space 22 from leaking from the empty connector 31. In the embodiments of this application, the type of connecting valve 35 is not specifically limited. For example, the connecting valve 35 can be, but is not limited to, a butterfly valve.

[0046] The connecting valve 35 can have an interlayer space for connecting coolant. The method of connecting and discharging coolant in the interlayer space of the connecting valve 35 can be the same as or similar to the method of connecting and discharging coolant in the second interlayer space 311, and will not be described in detail here.

[0047] In the embodiments of this application, the type of connector 31 is not specifically limited. For example, connector 31 may be, but is not limited to, a stainless steel double-layer water-cooled elbow.

[0048] It is understood that a coolant circulation system can be configured in the environment where the processing equipment 100 is located. Both the inlet pipe 41 and the outlet pipe 42 are connected to the circulation system. The inlet pipe 41 can receive coolant that has not absorbed heat from the circulation system, and the outlet pipe 42 can transfer coolant that has absorbed heat back to the circulation system. In the embodiments of this application, the type of coolant is not specifically limited. For example, the coolant can be, but is not limited to, water.

[0049] It is understood that both the inlet pipe 41 and the outlet pipe 42 can be pipes formed by a main pipe and multiple branch pipes, and each branch pipe can be equipped with multiple sub-branch pipes to transport coolant. The main pipes of both the inlet pipe 41 and the outlet pipe 42 can be connected to the circulation system, and multiple valves and filters can be installed on the main pipes. The valves on the main pipes can adjust the flow rate of coolant in the inlet pipe 41 and the outlet pipe 42, as well as the entry and exit of coolant; the filters can reduce impurities in the coolant, reducing blockages when the coolant flows into the second interlayer space 311, the first interlayer space 321, the heat exchanger 36, or the branch pipes.

[0050] The main pipe of the inlet pipe 41 and the main pipe of the outlet pipe 42 can be connected, and the connection point is located at the bottom of the two main pipes. Multiple branch pipes can be formed from the side of the main pipes, and multiple sub-branch pipes can be formed from the side of the corresponding branch pipes. The multiple branch pipes and multiple sub-branch pipes can be connected to the connector 31, the exhaust pipe 32, and the heat exchanger 36 respectively, thereby supplying coolant to the second interlayer space 311, the first interlayer space 321, and the heat exchanger 36, and receiving coolant.

[0051] For example, the liquid inlet pipe 41 may include a main liquid inlet pipe 411 and multiple branch liquid inlet pipes 412, all of which are fixedly connected to and communicate with the main liquid inlet pipe 411. The main liquid inlet pipe 411 may be connected to unheated coolant and transfer the coolant to the multiple branch liquid inlet pipes 412. Among the multiple branch liquid inlet pipes 412, at least one branch liquid inlet pipe 412 is fixedly connected to and communicates with the heat exchanger 36; at least one branch liquid inlet pipe 412 is fixedly connected to the exhaust pipe 32 and communicates with the first interlayer space 321; at least one branch liquid inlet pipe 412 is fixedly connected to multiple connectors 31 and the exhaust pipe 32 through its extended sub-branch pipes, and communicates with the first interlayer space 321 and the second interlayer space 311.

[0052] The drain pipe 42 may include a main drain pipe 421 and multiple branch drain pipes 422, all of which are fixedly connected to and communicate with the main drain pipe 421. The main drain pipe 421 can receive coolant that has absorbed heat. Among the multiple branch drain pipes 422, at least one branch drain pipe 422 is fixedly connected to and communicates with the heat exchanger 36; at least one branch drain pipe 422 is fixedly connected to the extraction pipe 32 and communicates with the first interlayer space 321; at least one branch drain pipe 422 is fixedly connected to multiple connectors 31 and the extraction pipe 32 through its extended sub-branch pipes, and communicates with the first interlayer space 321 and the second interlayer space 311.

[0053] It is understood that the extraction pipeline 32 can be formed by connecting multiple units, each unit being a pipe section, a connector, or a valve. At least some of the units in the extraction pipeline 32 can have a first interlayer space 321, and the first interlayer spaces 321 of adjacent units can be connected by bends. That is, the first interlayer space 321 in each pipe section and the bend connecting each pipe section can cooperate to form the first interlayer space 321 in the extraction pipeline 32. In the embodiments of this application, the type of unit used in the extraction pipeline 32 is not specifically limited. For example, each unit in the extraction pipeline 32 can be, but is not limited to, double-layer water-cooled corrugated pipes, stainless steel double-layer water-cooled bends, double-layer water-cooled corrugated bends, double-layer water-cooled tees, etc.

[0054] It is understood that the corrugated pipe unit in the suction line 32 can deform, thereby allowing the suction line 32 to be adjusted to a suitable shape according to its installation position and its connection position with the liquid inlet line 41 and the liquid outlet line 42. Similarly, at least a portion of the structure of the liquid inlet line 41 and at least a portion of the structure of the liquid outlet line 42 can deform.

[0055] It is understood that the heat exchanger 36 can be connected to the extraction component 33 via a pipe. In the embodiments described in this application, the type of pipe connecting the heat exchanger 36 and the extraction component 33 is not specifically limited. For example, the pipe connecting the heat exchanger 36 and the extraction component 33 can be, but is not limited to, a single-layer corrugated pipe.

[0056] Similarly, the exhaust pipe 34 can be made of at least one of the following: corrugated straight pipe, corrugated bend, stainless steel straight pipe, and stainless steel bend.

[0057] It is understood that the heat exchanger 36 used in the embodiments of this application can be a heat exchanger 36 commonly used in the relevant field, and its working principle will not be described in detail here.

[0058] In some embodiments, an inlet / outlet connecting pipe 43 may be connected between the inlet pipe 41 and the outlet pipe 42. The inlet / outlet connecting pipe 43 may be detachably connected to the inlet pipe 41 and the outlet pipe 42. The inlet / outlet connecting pipe 43 may be connected to the inlet pipe 41 and the outlet pipe 42 after the cooling device 102 has finished extracting and cooling the gas. At this time, by injecting liquid into the inlet pipe 41 or the outlet pipe 42, the liquid can flow through the inlet pipe 41, the outlet pipe 42 and the inlet / outlet connecting pipe 43, thereby achieving flushing of the closed loop formed by the inlet pipe 41 and the outlet pipe 42.

[0059] For example, the inlet / outlet connection pipe 43 can be connected to the main inlet pipe 411 of the inlet pipe 41 and to the main outlet pipe 421 of the outlet pipe 42.

[0060] In the embodiments of this application, the method of detachable connection is not specifically limited. For example, the inlet / outlet connection pipe 43 can be detachably connected to the inlet pipe 41 and the outlet pipe 42 by means of clamps.

[0061] In some embodiments, the cooling mechanism 40 may further include a drip tray 44. The inlet line 41 and the drain line 42 are fixedly mounted on the drip tray 44 via a bracket. The drip tray 44 is located at the bottom of at least a portion of the structure of the inlet line 41 and at least a portion of the structure of the drain line 42. The drip tray 44 can collect coolant leaking from the inlet line 41 and the drain line 42.

[0062] It is understandable that after long-term use, there is a possibility of coolant leakage at the connection points of the various components of the inlet pipe 41 and the outlet pipe 42. The drip tray 44 can catch the leaked coolant, thereby preventing coolant from dripping onto the ground and affecting personnel movement, and preventing coolant from dripping onto other equipment in the environment where the processing equipment 100 is located and affecting the operation of other equipment.

[0063] Please refer to the following: Figure 6 and Figure 7 In some embodiments, the gas path mechanism 30 may further include a muffler 37 and a pressure relief valve 38. The muffler 37 is fixedly installed at the end of the exhaust pipe 34 away from the extraction component 33. The muffler 37 can reduce the noise when the gas from the exhaust pipe 34 is discharged to the external environment. The pressure relief valve 38 can be fixedly installed on the exhaust pipe 34 and spaced apart from the muffler 37. The pressure relief valve 38 can open when the gas pressure in the exhaust pipe 34 exceeds a preset threshold, allowing the gas in the exhaust pipe 34 to be discharged to the external environment through the opened pressure relief valve 38.

[0064] It is understood that the pressure relief valve 38 can be a mechanical component. When the valve cannot remain closed due to the air pressure in the exhaust pipe 34, the pressure relief valve 38 can automatically open. At this time, the pressure in the exhaust pipe 34 can be equal to or greater than a preset threshold. The preset threshold of the pressure relief valve 38 is related to the material, structure, and manufacturing process of the pressure relief valve 38. The embodiments of this application do not specifically limit the preset threshold of the pressure relief valve 38.

[0065] Please refer to the following: Figure 8 In some embodiments, the cooling device 102 may further include a processor 50, a first detection element 60, and a second detection element 70. The processor 50 may be communicatively connected to the vacuum element 33, and the processor 50 may control the operation and shutdown of the vacuum element 33.

[0066] The first detection element 60 is a temperature detection element. The first detection element 60 can be fixedly installed at one end of the extraction element 33 near the extraction pipe 32. The first detection element 60 can detect the temperature of the gas received by the extraction element 33 and output corresponding first detection information. The first detection element 60 is communicatively connected to the processor 50. The processor 50 can receive the first detection information to determine the temperature of the gas received by the extraction element 33. The processor 50 can control the extraction element 33 to stop working when the temperature of the gas received by the extraction element 33 exceeds a first threshold.

[0067] The second detection element 70 is a temperature detection element. The number of second detection elements 70 can be equal to the number of connectors 31, and each second detection element 70 can be fixedly installed on the corresponding connector 31. The second detection element 70 can detect the temperature of the second interlayer space 311 in the corresponding connector 31 and output the corresponding second monitoring information. The second detection element 70 is communicatively connected to the processor 50. The processor 50 can receive the second detection information to determine the temperature in the second interlayer space 311. The processor 50 can control the vacuum element 33 to stop working when the temperature in the second interlayer space 311 is greater than a second threshold.

[0068] In the embodiments of this application, the method of communication connection is not specifically limited. The communication connection can be a wired communication connection implemented through devices such as signal lines, or a wireless communication connection implemented through technologies such as 3G, 4G, 5G, Bluetooth, and wireless local area networks.

[0069] It is understandable that when the temperature of the gas received by the extraction component 33 exceeds the first threshold, the gas temperature is too high, and the high-temperature gas entering the extraction component 33 may cause damage to the extraction component 33. At this time, the processor 50 can control the extraction component 33 to stop working, thereby reducing the amount of high-temperature gas entering the extraction component 33. The reason for the excessively high gas temperature entering the extraction component 33 may be that there is a coolant leak in the first interlayer space 321, the second interlayer space 311, or the heat exchanger 36. The operator can inspect the gas path mechanism 30 when the extraction component 33 stops working. In the embodiments of this application, the specific value of the first threshold is not limited.

[0070] It is understood that the gas received by the connector 31 connected to the reactor 101 is uncooled gas, meaning the temperature of the gas passing through the connector 31 can be higher than the temperature of the gas passing through other components in the gas path mechanism 30. When the temperature of the second interlayer space 311 exceeds the second threshold, the temperature of the coolant in the second interlayer space 311 becomes too high, and there is a possibility of coolant evaporation. When the coolant in the second interlayer space 311 cools the gas, there is a possibility that it will be directly evaporated due to the excessively high gas temperature, and the coolant will be unable to continue cooling the gas after evaporation. At this time, continued gas transmission may cause damage to the connecting valve 35 and the extraction pipeline 32 due to high temperature. The processor 50 can control the extraction component 33 to stop working when the temperature of the second interlayer exceeds the second threshold, thereby suspending the extraction of gas in the gap space 22 and reducing the probability of damage to the extraction pipeline 32 and the connecting valve 35. In the embodiments of this application, the specific value of the second threshold is not limited.

[0071] It is understood that the processor 50 can issue an alarm while controlling the exhaust unit 33 to stop working. The alarm issued by the processor 50 can be transmitted to an alarm device (not shown) connected to the processor 50, which can then alert personnel upon receiving the alarm. In the embodiments of this application, the type of alarm device is not specifically limited. For example, the alarm device can be a buzzer, which can alert personnel by playing a warning audio. As another example, the alarm device can be an indicator light, which can illuminate to alert personnel.

[0072] In some embodiments, the cooling device 102 may further include a drip tray 80 and a level detection element 90. The drip tray 80 may be fixedly installed at the bottom of the suction pipe 32 and communicate with the suction pipe 32. The drip tray 80 may collect coolant leaking from the inner wall of the suction pipe 32. The level detection element 90 may be fixedly installed on the drip tray 80. The level detection element 90 is communicatively connected to the processor 50. The level detection element 90 may detect the coolant level in the drip tray 80 and output level detection information to the processor 50. The processor 50 may determine whether the drip tray 80 is full based on the level detection information, and issue an alarm when it determines that the drip tray 80 is full.

[0073] It is understandable that after prolonged use, the structure between the first interlayer space 321 and the inner wall of the extraction pipe 32 may become damaged, allowing coolant in the first interlayer space 321 to enter the space in the extraction pipe 32 where gas passes through, and then fall into the drip tray 80 under gravity. The drip tray 80 can collect the leaked coolant, reducing the probability of coolant stagnating in the space in the extraction pipe 32 and affecting gas flow, as well as reducing the probability of coolant entering the extraction component 33 and damaging it.

[0074] The processor 50 can issue an alarm to remind staff to clean the liquid collection box 80, so that the liquid collection box 80 can continuously collect the leaked liquid in the exhaust pipe 32.

[0075] It is understood that, through the cooling device 102 and processing equipment 100 provided in the embodiments of this application, the working of the extraction component 33 can drive the gas in the gap space 22 of the reactor 101 to flow through the connector 31, the extraction pipe 32, the heat exchanger 36, the extraction component 33 and the exhaust pipe 34. The coolant in the first interlayer space 321, the second interlayer space 311 and the heat exchanger 36 can cool the gas in the flow process, and the cooled gas can be discharged to the external environment.

[0076] During the process of gas entering the gas passage mechanism 30 within the gap space 22, gas from the external environment can enter the gap space 22 under the influence of pressure changes within it. Thus, after the reactor 101 completes the processing of the sheet material, the cooling device 102 can extract the gas heated during the processing of the sheet material from the gap space 22 and drive the gas from the external environment to continuously flow through the gap space 22, achieving air cooling of the reactor 101. This accelerates the cooling efficiency of the reaction space 21 within the reactor 101, allowing the sheet material within the reaction space 21 to cool down more quickly and enabling the processed sheet material to exit the reactor 101 faster. This improves the processing efficiency of the processing equipment 100 for sheet materials.

[0077] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments described above should be considered exemplary and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application.

Claims

1. A cooling device for connecting with a reaction furnace, the reaction furnace comprising an outer shell and an inner shell, a gap space being formed between the outer shell and the inner shell, characterized in that, The cooling device comprises: An air path mechanism, which comprises a connecting head, an air extraction pipeline, an air extraction member and an air exhaust pipeline, the connecting head is used for connecting the reaction furnace and communicating with the gap space, the connecting head is connected with the air extraction pipeline and communicates with each other, the air extraction member is connected with the air extraction pipeline and the air exhaust pipeline and communicates with each other, the air extraction member is used for driving the gas to flow from the air extraction pipeline to the air exhaust pipeline, and the air exhaust pipeline communicates with the external environment; wherein, a first interlayer space is arranged in the air extraction pipeline; A cooling mechanism, which comprises a liquid inlet pipeline and a liquid outlet pipeline, the liquid inlet pipeline and the liquid outlet pipeline are connected with the air extraction pipeline and communicate with the first interlayer space, the liquid inlet pipeline is used for connecting the cooling liquid and transmitting the cooling liquid to the first interlayer space, and the liquid outlet pipeline is used for receiving the cooling liquid after absorbing heat in the first interlayer space.

2. The cooling device of claim 1, wherein, A second interlayer space is arranged in the connecting head, the liquid inlet pipeline and the liquid outlet pipeline are connected with the connecting head and communicate with the second interlayer space, the liquid inlet pipeline is used for transmitting the cooling liquid to the second interlayer space, and the liquid outlet pipeline is used for receiving the cooling liquid after absorbing heat in the second interlayer space.

3. The cooling device of claim 1, wherein, The number of the connecting heads is plural, the connecting heads are arranged at intervals, and each connecting head is used for connecting a corresponding reaction furnace; the air path mechanism further comprises: A plurality of connecting valves, the connecting valves correspond to the connecting heads one by one, each connecting valve is arranged between the air extraction pipeline and the corresponding connecting head, and the connecting valve is used for opening or closing to communicate or block the corresponding connecting head and the air extraction pipeline.

4. The cooling device of claim 1, wherein, The cooling device further comprises: A first detection member, which is connected with the air extraction member, and is used for detecting the temperature of one end of the air extraction member connected with the air extraction pipeline and outputting corresponding first detection information; A processor, which is communicatively connected with the air extraction member and the first detection member, is used for receiving the first detection information and triggering the air extraction member to stop working.

5. The cooling device of claim 2, wherein, The cooling device further comprises: A second detection member, which is connected with the connecting head, is used for detecting the temperature in the second interlayer space and outputting corresponding second detection information; A processor, which is communicatively connected with the air extraction member and the second detection member, is used for receiving the second detection information and triggering the air extraction member to stop working.

6. The cooling device of claim 1, wherein, The cooling device further comprises: A liquid receiving box, which is arranged at the bottom of the air extraction pipeline and communicates with the air extraction pipeline, and is used for receiving the cooling liquid leaked from the inner wall of the air extraction pipeline; A liquid level detection member, which is connected with the liquid receiving box, is used for detecting the liquid level of the liquid receiving box and outputting corresponding liquid level detection information; A processor, which is communicatively connected with the liquid level detection member, is used for receiving the liquid level detection information and issuing an alarm.

7. The cooling device of claim 1, wherein, The air path mechanism further comprises: A heat exchanger is connected with the gas extraction pipeline and communicates with the liquid inlet pipeline and the liquid outlet pipeline, and is used to receive cooling liquid through the liquid inlet pipeline to cool the gas entering the heat exchanger; the liquid outlet pipeline is also used to receive the cooling liquid after absorbing heat in the heat exchanger.

8. The cooling device of claim 1, wherein, The gas path mechanism further comprises: A muffler is arranged on the exhaust pipeline, and the muffler is used to reduce the noise when the exhaust pipeline exhausts; A pressure relief valve is arranged on the exhaust pipeline, and the pressure relief valve is used to open when the air pressure in the exhaust pipeline is greater than a preset threshold, so that the gas in the exhaust pipeline can be discharged to the external environment.

9. The cooling device of claim 1, wherein, The cooling mechanism further comprises: A liquid receiving disc is arranged on the liquid inlet pipeline and the liquid outlet pipeline, and the liquid receiving disc is used to receive the cooling liquid leaking from the liquid inlet pipeline and the liquid outlet pipeline.

10. A processing apparatus characterized by comprising: Comprise: A reaction furnace comprises an outer shell and an inner container, and a gap space is arranged between the outer shell and the inner container; The cooling device according to any one of claims 1 to 9.

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