Plane and straight line precision testing device

Abstract

The utility model provides a plane and straight line precision testing device, and the device comprises a first sensor assembly which is suspended above an objective table in a Z direction perpendicular to the plane where the objective table is located, and is configured to collect different position information of the top surface of an object to be tested in the moving process of the object to be tested; the first Z-direction driving assembly is coupled with the first sensor assembly and can move relative to the objective table in the Z direction, the sensing face of the first sensor assembly directly faces the objective table in the Z direction, and the first Z-direction driving assembly is configured to be adjustable relative to the position of the to-be-measured object; the second Z-direction driving assembly is independent of the first Z-direction driving assembly and can move in the Z direction relative to the objective table; and the second sensor assembly is coupled with the second Z-direction driving assembly and is configured to be adjustable in position along the Z direction through the second Z-direction driving assembly, and a sensing surface of the second sensor assembly is positioned on one side of the objective table relative to the Z direction so as to acquire different position information of the side surface of the object to be measured in the moving process of the object to be measured.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of gene sequencing apparatus, and particularly relates to a plane and straight line precision testing device. BACKGROUND

[0002] The function of a gene sequencer includes driving a biochemical reaction table to perform a snake-shaped movement and take a photo through a multi-axis movement slide table. In this process, the photo area is usually large and only focuses once before taking a photo, and focusing is usually not performed again during the photo process. Under this premise, in order to ensure that each focal plane can be normally photographed and no out-of-focus phenomenon occurs, not only is the movement precision of each axis of the movement slide table in the service life period required to be extremely high, but also the flatness of the biochemical reaction table in a long time is required to be extremely high.

[0003] In the prior art, the flatness of the biochemical reaction table and the straightness of the multi-axis movement slide table need to be monitored respectively, so as to intervene in time to maintain high precision. Correspondingly, a tool is needed to simultaneously collect the flatness of the biochemical reaction table and the straightness of each axis of the multi-axis movement slide table after a long time movement in the service life. However, the existing testing tool has poor applicability and cannot be adapted to different sizes and specifications of the measured parts; the existing tool cannot simultaneously monitor the straightness precision and the flatness precision of the measured part; the existing testing tool cannot realize the position fine adjustment of the measured part; and the existing tool is time-consuming and laborious to build and has low efficiency. How to solve the above problems and provide a plane and straight line precision testing device is considered by the person skilled in the art. CONTENT OF THE UTILITY MODEL

[0004] In order to solve the problems in the prior art, the embodiments of the present application provide a plane and straight line precision testing device which can solve the above problems.

[0005] The embodiments of the present application provide a plane and straight line precision testing device, which comprises a carrier table for carrying a measured object, and has a plane movement mechanism for driving the measured object to move in the plane where the carrier table is located; the plane and straight line precision testing device further comprises:

[0006] A first sensor assembly is suspended above the carrier table along a Z direction perpendicular to the plane where the carrier table is located, and the first sensor assembly is configured to collect different position information of the top surface of the measured object during movement of the measured object;

[0007] A first Z direction driving assembly is coupled with the first sensor assembly, and the first Z direction driving assembly is movably arranged along the Z direction relative to the carrier table, and a sensing surface of the first sensor assembly is opposite to the carrier table along the Z direction and is configured to be adjustable relative to the position of the measured object on the carrier table via the first Z direction driving assembly;

[0008] a second Z-direction driving assembly independent of the first Z-direction driving assembly, the second Z-direction driving assembly being movably arranged along the Z-direction relative to the object table;

[0009] a second sensor assembly coupled to the second Z-direction driving assembly, a sensing surface of the second sensor assembly being located on a side of the object table relative to the Z-direction to collect different position information of a side of the object to be measured during movement of the object to be measured, and the second sensor assembly being configured to be adjustable in position along the Z-direction via the second Z-direction driving assembly.

[0010] In an embodiment, the first Z-direction driving assembly and the second Z-direction driving assembly are respectively spaced apart from the object table, and are arranged on different sides of the object table.

[0011] In an embodiment, the planar and straight line precision testing device further comprises a cross beam and a base plate, the object table is arranged on the base plate, two ends of the first Z-direction driving assembly and the second Z-direction driving assembly are respectively connected to the cross beam and the base plate, and the first Z-direction driving assembly and the second Z-direction driving assembly are respectively connected to different ends of the cross beam.

[0012] In an embodiment, the planar movement mechanism comprises a second driving assembly and a third driving assembly, the object table is driven by the second driving assembly to be movably arranged along a Y-direction parallel to a plane on which the object table is arranged, and the third driving assembly is connected to the second driving assembly to enable the object table to be movably arranged along an X-direction parallel to the plane on which the object table is arranged, the Z-direction, the Y-direction and the X-direction intersecting.

[0013] In an embodiment, the planar and straight line precision testing device further comprises a fixed adapter assembly, the fixed adapter assembly being connected between the first sensor assembly and the first Z-direction driving assembly, and / or between the second sensor assembly and the second Z-direction driving assembly, the fixed adapter assembly comprising a fixed mounting plate and a fixed mounting bracket, the fixed mounting plate and the fixed mounting bracket having different positions relative to the object table, and the first sensor assembly and the second sensor assembly being arranged on the fixed mounting plate and / or the fixed mounting bracket.

[0014] In an embodiment, the fixed mounting plate and the fixed mounting bracket are detachably connected, and the fixed mounting plate and the fixed mounting bracket have different extension directions.

[0015] In an embodiment, the first Z-direction driving assembly comprises a first slider movably arranged along the Z-direction, the fixed adapter assembly further comprises a fixed adapter plate, the fixed mounting plate is connected with the fixed adapter plate, the fixed mounting support is connected with the fixed mounting plate, and the fixed adapter plate is drivingly connected with the first slider for driving the fixed mounting plate and the fixed mounting support to move along the Z-direction.

[0016] In an embodiment, at least one of the first sensor assembly and the second sensor assembly comprises a plurality of sensor units, the fixed mounting plate is provided with a plurality of spaced first mounting sites, the fixed mounting support is provided with a plurality of spaced second mounting sites, and the plurality of sensor units are arranged at the plurality of first mounting sites and / or the plurality of second mounting sites.

[0017] In an embodiment, the first Z-direction driving assembly comprises a first slider, a first guide frame, a first transmission shaft, and a first hand wheel, the first slider is used to drive the first sensor assembly to move along the Z-direction, the first slider is guidingly connected with the first guide frame, the first transmission shaft is drivingly connected with the first slider, and the first transmission shaft is drivingly connected with the first hand wheel through a pair of bevel gears.

[0018] In an embodiment, the planar and linear precision testing device further comprises a locking assembly connected with the first hand wheel, the locking assembly comprises a clamping block and a handle, the handle is rotatably connected with the clamping block for controlling the clamping block to lock or release the first hand wheel.

[0019] Further, the first Z-direction driving assembly is coupled with the first sensor assembly for driving the first sensor assembly to be adjustable relative to the position of the object to be measured on the object table, so as to collect different position information of the top surface of the object to be measured during the movement of the object to be measured. The second Z-direction driving assembly is coupled with the second sensor assembly for driving the second sensor assembly to be movably arranged along the Z-direction relative to the object table, so as to realize the position adjustment of the second sensor assembly along the Z-direction, thereby collecting different position information of the side surface of the object to be measured during the movement of the object to be measured. That is, the first Z-direction driving assembly cooperates with the first sensor assembly, and the second Z-direction driving assembly cooperates with the second sensor assembly to respectively collect different position information of the top surface and the side surface of the object to be measured during the movement of the object to be measured, thereby realizing the simultaneous monitoring of the linear precision and the planar precision of the object to be measured. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 A perspective view of a planar and linear precision testing device provided by an embodiment of the present application is shown.

[0021] Figure 2The three-dimensional view of the plane and straight line precision testing device provided by the embodiment of the present application cooperates with the object to be tested.

[0022] Figure 3 The three-dimensional view of the first driving assembly of the plane and straight line precision testing device provided by the embodiment of the present application.

[0023] Figure 4 The three-dimensional view of the second driving assembly, the third driving assembly and the object table of the plane and straight line precision testing device provided by the embodiment of the present application.

[0024] Figure 5 The working state diagram of the locking assembly of the plane and straight line precision testing device provided by the embodiment of the present application.

[0025] Figure 6 The three-dimensional view of the fixed adapter assembly and the sensor assembly of the plane and straight line precision testing device provided by the embodiment of the present application.

[0026] Figure 7 The three-dimensional view of one embodiment of the fixed adapter assembly of the plane and straight line precision testing device provided by the embodiment of the present application.

[0027] Figure 8 The three-dimensional view of another embodiment of the fixed adapter assembly of the plane and straight line precision testing device provided by the embodiment of the present application.

[0028] Main element symbol explanation

[0029] Plane and straight line precision testing device 10

[0030] First driving assembly 11

[0031] First sliding block 111

[0032] First guide frame 112

[0033] First transmission shaft 113

[0034] First hand wheel 114

[0035] First transmission gear set 115

[0036] Adapter frame 116

[0037] Support plate 117

[0038] First Z-direction driving assembly 1101

[0039] Second Z-direction driving assembly 1102

[0040] Second driving assembly 12

[0041] Second slider 121

[0042] Second guide frame 122

[0043] Second hand wheel 124

[0044] Third driving assembly 13

[0045] Third slider 131

[0046] Third guide frame 132

[0047] Third hand wheel 134

[0048] Fixed adapter assembly 14

[0049] Fixed mounting plate 141

[0050] First mounting site 1411

[0051] Fixed mounting bracket 142

[0052] Second mounting site 1421

[0053] Fixed adapter plate 143

[0054] Sensor assembly 15

[0055] Sensor unit 150

[0056] First sensor assembly 151

[0057] Second sensor assembly 152

[0058] Locking assembly 16

[0059] Clamping block 162

[0060] Handle 161

[0061] Object table 17

[0062] Cross beam 18

[0063] Bottom plate 19

[0064] Object to be measured 2.

[0065] The following specific embodiments will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0066] The following description will be given with reference to the accompanying drawings for a more complete description of the present application. The drawings illustrate exemplary embodiments of the present application. However, the present application may be implemented in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. These exemplary embodiments are provided to make the present application thorough and complete, and to fully convey the scope of the present application to those skilled in the art. Similar reference numerals denote the same or similar components. The terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to limit the present application. As used herein, the singular forms “a,” “an,” and “the” are intended to also include the plural forms unless the context clearly indicates otherwise. Furthermore, when used herein, “comprising” and / or “including” and / or “having,” integers, steps, operations, components, and / or components, but without excluding the presence or addition of one or more other features, regions, integers, steps, operations, components, and / or groups thereof. Unless otherwise defined, all terms used herein (including technical and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. Furthermore, unless explicitly defined herein, terms such as those defined in a general dictionary should be interpreted as having the same meaning as they have in the relevant technology and in the content of this application, and should not be interpreted as having an idealized or overly formal meaning.

[0067] The following description, in conjunction with the accompanying drawings, illustrates exemplary embodiments. It should be noted that components depicted in the drawings are not necessarily shown to scale; and identical or similar components will be designated with the same or similar reference numerals or similar technical terms.

[0068] The specific embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0069] like Figure 1 and Figure 2 As shown, this application embodiment provides a planar and linear accuracy testing device 10, which includes a first driving assembly 11, a second driving assembly 12, a third driving assembly 13, a fixed adapter assembly 14, a sensor assembly 15, a locking assembly 16, a stage 17, a crossbeam 18, and a base plate 19. The first driving assembly 11, second driving assembly 12, third driving assembly 13, fixed adapter assembly 14, sensor assembly 15, locking assembly 16, stage 17, and crossbeam 18 are disposed on the same side of the base plate 19 and supported by the base plate 19. The second driving assembly 12 and third driving assembly 13 are stacked and used to support and drive the stage 17. Multiple first driving assemblies 11 are spaced apart from the stage 17 and used to drive the fixed adapter assembly 14 and the sensor assembly 15. At least a portion of the crossbeam 18 is disposed between the multiple first driving assemblies 11 to connect them.

[0070] In an embodiment, the third driving assembly 13 is fixedly connected with the base plate 19, the second driving assembly 12 is drivingly connected with the third driving assembly 13, the object table 17 is driven by the second driving assembly 12, the third driving assembly 13 is used to drive the second driving assembly 12 and the object table 17 to move along the X direction, the second driving assembly 12 is used to drive the object table 17 to move along the Y direction, the X direction and the Y direction are respectively parallel to the plane where the object table 17 is located, and in this embodiment, the X direction and the Y direction are perpendicular to each other. The second driving assembly 12 and the third driving assembly 13 constitute a plane moving mechanism for driving the measured object 2 to move in the plane where the object table 17 is located. It should be understood that the plane moving mechanism of the present application can also include, for example, a rotary driving mechanism for driving the object table 17 to rotate around the Z direction in the plane (i.e., the XY plane) where the object table 17 is located, so as to realize the detection of multiple sides of the measured object 2.

[0071] Further, the plurality of first driving assemblies 11 are respectively connected with the base plate 19, the other ends of the plurality of first driving assemblies 11 away from the base plate 19 are connected with the cross beam 18, and are used to improve the mounting stability of the first driving assemblies 11. The sensor assembly 15 is drivingly connected with the first driving assembly 11 through the fixed adapter assembly 14, so as to drive the sensor assembly 15 to move along the Z direction perpendicular to the plane where the object table 17 is located, compared with the object table 17, so as to measure the measured object 2 arranged on the object table 17. The first driving assembly 11, the second driving assembly 12 and the third driving assembly 13 are all provided with locking assemblies 16, which are used to lock or release the first driving assembly 11, the second driving assembly 12 and the third driving assembly 13.

[0072] In an embodiment, the plurality of sensor assemblies 15 are used to measure the straightness and / or flatness of the measured object 2, and the plurality of first driving assemblies 11 are respectively used to drive the plurality of sensor assemblies 15 to move along the Z direction, respectively, compared with the object table 17.

[0073] Further, Figure 2 In the illustrated embodiment, the first driving assembly 11 includes a first Z direction driving assembly 1101 and a second Z direction driving assembly 1102, and the sensor assembly 15 includes a first sensor assembly 151 and a second sensor assembly 152. The two sensor assemblies 15 respectively correspond to detect different surfaces of the measured object 2, and can realize the synchronous measurement of multiple surfaces of the measured object 2. It should be understood that the first Z direction driving assembly 1101 and the second Z direction driving assembly 1102 further cooperate with the above-mentioned plane moving mechanism (i.e., the second driving assembly 12 and the third driving assembly 13) to realize the displacement of the sensor assembly 15 in the three-dimensional space, respectively, compared with the object table 17 and / or the measured object 2.

[0074] Specifically, the first sensor assembly 151 is suspended above the object table 17 along the Z direction perpendicular to the plane where the object table 17 is located, and the first sensor assembly 151 is configured to collect different position information of the top surface of the object 2 during movement of the object 2. In actual measurement, the sensing surface of the first sensor assembly 151 is preferably arranged opposite and spaced apart from the top surface of the object 2 along the Z axis. The first Z-direction driving assembly 1101 is coupled to the first sensor assembly 151, and the first Z-direction driving assembly 1101 is movably arranged along the Z direction relative to the object table 17. The sensing surface of the first sensor assembly 151 is opposite the object table 17 along the Z direction and is configured to be adjustable relative to the position of the object 2 on the object table 17 via the first Z-direction driving assembly 1101, thereby achieving adaptive detection of objects 2 of different sizes.

[0075] As shown in Figure 2 , the second Z-direction driving assembly 1102 is independent of the first Z-direction driving assembly 1101, and the second Z-direction driving assembly 1102 is movably arranged along the Z direction relative to the object table 17. The second sensor assembly 152 is coupled to the second Z-direction driving assembly 1102, and the sensing surface of the second sensor assembly 152 is located on the side of the object table 17 opposite the Z direction to collect different position information of the side surface of the object 2 during movement of the object 2 with the object table 17, and the second sensor assembly 152 is configured to be adjustable along the Z direction via the second Z-direction driving assembly 1102, thereby achieving precision detection of different Z-direction heights of the side surface of the object 2.

[0076] As shown in Figure 2 , the object 2 is supported by the object table 17 of the planar and linear precision testing device 10, and the object 2 moves with the object table 17. The plurality of first driving assemblies 11 respectively drive the plurality of sensor assemblies 15 to move relative to the object table 17, so that the plurality of sensor assemblies 15 can be in different positions and measure the straightness and / or flatness of the object 2 in a suitable attitude. The Z-direction movement of the plurality of first driving assemblies 11 driving the corresponding sensor assemblies 15 can be independently controlled, so that the position adjustment of the sensor assemblies 15 relative to the object table 17 can be realized by adjusting one coordinate parameter while keeping other orientations unchanged, and multiple data measurements can be realized by cooperation of the plurality of sensor assemblies 15, while ensuring the adaptability and stability of the measurement function.

[0077] For ease of understanding, Z direction, Y direction and X direction are introduced in the embodiments of the present application for description, the Z direction, Y direction and X direction are three mutually non-parallel directions in a spatial coordinate system; in subsequent embodiments, the Z direction, Y direction and X direction are taken as three mutually perpendicular reference directions in a three-dimensional Cartesian coordinate system for description, the directions shown in the embodiments of the present application are used to help understand the mutual positional relationship of various components, but the specific directions are not limited. Among them, the Z direction is represented by coordinate direction Z in the figure, the Y direction is represented by coordinate direction Y in the figure, and the X direction is represented by coordinate direction X in the figure.

[0078] In an embodiment, the plurality of first driving assemblies 11 are respectively arranged spaced apart from the object table 17, and the plurality of first driving assemblies 11 are arranged on different sides of the object table 17. Specifically, as shown in FIG. 1, the first Z-direction driving assembly 1101 and the second Z-direction driving assembly 1102 are configured to be arranged along the Z direction, and the first Z-direction driving assembly 1101 and the second Z-direction driving assembly 1102 are arranged on opposite sides of the object table 17 along the Y direction. Figures 1 to 2

[0079] In an embodiment, the two ends of each first driving assembly 11 (for example, the two ends of the first Z-direction driving assembly 1101 and the second Z-direction driving assembly) are respectively connected with the cross beam 18 and the bottom plate 19, and the plurality of first driving assemblies 11 (for example, the first Z-direction driving assembly 1101 and the second Z-direction driving assembly) are respectively connected to different ends of the cross beam 18.

[0080] In an embodiment, the object table 17 is drivingly connected with the second driving assembly 12, and is used to drive the object table 17 to move along the Y direction, the second driving assembly 12 is drivingly connected with the third driving assembly 13, and is used to drive the object table 17 to move along the X direction. The planar and straight line precision testing device 10 includes two first driving assemblies 11, the two first driving assemblies 11 are arranged on opposite sides of the object table 17 along the Y direction, and the Z direction, the Y direction and the X direction intersect.

[0081] In the embodiment, the Z direction, the Y direction and the X direction are perpendicular to each other as an example for illustration, that is, the first driving assembly 11 having the Z-direction movement degree of freedom, the second driving assembly 12 having the Y-direction movement degree of freedom, and the third driving assembly 13 having the X-direction movement degree of freedom are mutually matched, and the sensor assembly 15 and the object 2 on the object table 17 can have the ability to move freely in the three-dimensional space. Further, the bearing table of the planar and straight line precision testing device 10 can place the object 2 with various forms, and can observe and measure different surfaces of the object 2 with various forms, so that the planar and straight line precision testing device 10 can adapt to different objects 2.

[0082] In an optional embodiment of the present application, the fixed adapter assembly 14 is connected between any sensor assembly 15 and the corresponding first driving assembly 11. As shown in FIG. 2, the fixed adapter assembly 14 is connected between the first Z-direction driving assembly 1101 and the second Z-direction driving assembly 1102.​Figure 2 As shown, two first driving assemblies 11 are respectively arranged at two opposite sides of the object table 17 along the Y direction, the third driving assembly 13, the second driving assembly 12 and the object table 17 are arranged in a stack along the Z direction between the two first driving assemblies 11, and the cross beam 18 is arranged in extension along the Y direction and connected to the two first driving assemblies 11. The two sensor assemblies 15 are respectively connected to the two first driving assemblies 11 through the two fixed adapter assemblies 14, and the two sensor assemblies 15 are configured to be capable of respectively facing different surfaces of the object 2 to detect the straightness and / or flatness of different regions of the object 2.

[0083] It can be understood that the two opposite ends of the cross beam 18 are respectively fixed to the two first driving assemblies 11 along the Y direction, and the other ends of the two first driving assemblies 11 are respectively fixed to the bottom plate 19. The two first driving assemblies 11, the cross beam 18 and the bottom plate 19 form a stable connection structure to improve the installation stability. At the same time, the assembly efficiency of the flatness and straightness testing device 10 can also be improved.

[0084] In other embodiments, the object table 17 is arranged at a middle position of the bottom plate 19 through the second driving assembly 12 and the third driving assembly 13, and two or more first driving assemblies 11 are arranged around the object table 17 at intervals. The plurality of first driving assemblies 11 are connected to each other through a cross beam 18 having multiple ends. One or more sensor assemblies 15 are respectively arranged on the two or more first driving assemblies 11 to respectively face different surfaces of the object to be detected to detect the straightness and / or flatness of different regions thereof.

[0085] It can be understood that the two first driving assemblies 11 and the two sensor assemblies 15 matched therewith can at least simultaneously measure the straightness and flatness of different surfaces of the object 2 to improve the measurement efficiency. It should be understood that more first driving assemblies 11 and more sensor assemblies 15 matched therewith can be arranged to simultaneously measure the straightness and / or flatness of more orientations of the object 2.

[0086] Further combining Figures 3 to 5 As shown, in an embodiment, the first driving assembly 11 (taking the first Z-direction driving assembly 1101 as an example) includes a first sliding block 111, a first guide frame 112, a first transmission shaft 113 and a first hand wheel 114. The first sliding block 111 is used to drive the sensor assembly 15 (the first sensor assembly 151) to move along the Z direction, the first sliding block 111 is guidingly connected to the first guide frame 112, the first transmission shaft 113 is drivingly connected to the first sliding block 111, and the first transmission shaft 113 is drivingly connected to the first hand wheel 114 through a pair of bevel gears. The driving mode of the second Z-direction driving assembly 1102 is similar to that of the first Z-direction driving assembly 1101, which will not be described herein.

[0087] CombiningFigures 2 to 3 In the embodiment shown, the first driving assembly 11 (e.g. the first Z-direction driving assembly 1101) further comprises an adapter frame 116 and a support plate 117. The adapter frame 116 is used to connect the first slider 111 and the fixed adapter assembly 14, so as to enhance the connection strength between the first slider 111 and the fixed adapter assembly 14 and improve the measurement stability. The support plate 117 is used to connect the first guide frame 112 and the bottom plate 19, so as to provide support for the first guide frame 112 and improve the mounting strength of the first driving assembly 11.

[0088] In the embodiment, the first guide frame 112 is the main bearing structure of the first driving assembly 11, and one side of the first guide frame 112 is provided with a linear track. The first slider 111 is in sliding connection with the first guide frame 112 and is guided via the linear track. The first transmission shaft 113 is configured in parallel with the linear track, and the first transmission shaft 113 is in driving connection with the first slider 111. The first transmission shaft 113 and the first hand wheel 114 are in transmission connection through the first transmission gear set 115. By rotating the first hand wheel 114, the first transmission shaft 113 can be driven to rotate, and in turn the first slider 111 is driven to move.

[0089] It can be understood that the first transmission shaft 113 can be a lead screw, and the first slider 111 can be engaged with the first transmission shaft 113 through a threaded structure (not shown in the figure). The first transmission gear set 115 is a pair of bevel gears. It can be understood by those skilled in the art that by rotating the hand wheel, a pair of meshing bevel gears can be driven to rotate relative to each other, thereby driving the first transmission shaft 113 to rotate, and further driving the first slider 111 to move linearly along the Z-direction.

[0090] In the embodiment, the second driving assembly 12 and the third driving assembly 13 have substantially the same transmission structure as the first driving assembly 11. By rotating the second hand wheel 124, the second slider 121 is driven to move linearly along the Y-direction relative to the second guide frame 122, and in turn the object table 17 is driven to move linearly along the Y-direction. By rotating the third hand wheel 134, the third slider 131 is driven to move linearly relative to the third guide frame 132. The third slider 131 is connected with the second guide frame 122 to drive the second driving assembly 12 to move linearly along the X-direction through the second guide frame 122, and in turn the object table 17 is driven to move linearly along the X-direction.

[0091] As shown in the embodiment, the locking assembly 16 is connected with the third hand wheel 134. The locking assembly 16 comprises a clamping block 162 and a handle 161. The handle 161 is in rotational connection with the clamping block 162, and is used to control the clamping block 162 to lock or release the third hand wheel 134. Figure 5

[0092] ​In an alternative embodiment of the present application, the first driving assembly 11, the second driving assembly 12 and the third driving assembly 13 are each provided with a locking assembly 16, each of which is connected with the first hand wheel 114 or the second hand wheel 124 or the third hand wheel 134. The rotation shaft of the hand wheel (the first hand wheel 114 or the second hand wheel 124 or the third hand wheel 134) is clamped between the clamping blocks 162, and the knob 161 is connected with the clamping blocks 162 through a transmission shaft. By rotating the knob 161, the clamping blocks 162 can be tightened or loosened around the rotation shaft of the hand wheel, so as to lock or loosen the hand wheel. The hand wheel can also be provided with a scale along the circumference, and the locking assembly 16 can be provided with a pointer corresponding to the scale, which is used for indicating the rotation range, so as to finely adjust the first driving assembly 11, the second driving assembly 12 and the third driving assembly 13.

[0093] It can be understood that the first driving assembly 11, the second driving assembly 12 and the third driving assembly 13 are configured to be manually driven through the hand wheel. By additionally providing the locking assembly 16, the hand wheel can be locked. Thus, the possibility of self-motion of the first driving assembly 11, the second driving assembly 12 and the third driving assembly 13 can be avoided, and the shaking of the object table 17 and the sensor assembly 15 during measurement can be avoided, so as to improve the measurement accuracy.

[0094] Further combining Figures 6 to 8 As shown in the drawings, in an embodiment, the fixed adapter assembly 14 includes a fixed mounting plate 141 and a fixed mounting bracket 142. The fixed mounting plate 141 and the fixed mounting bracket 142 are different from the position of the object table 17, and the sensor assembly 15 is arranged on the fixed mounting plate 141 and / or the fixed mounting bracket 142.

[0095] In the present embodiment, each sensor assembly 15 (such as the first sensor assembly 151 or the second sensor assembly 152) includes a plurality of sensor units 150, which can have the same or different structures. The sensor units 150 can be selected from known and feasible sensor devices, such as laser detectors. The plurality of sensor units 150 can be mounted on at least one of the fixed mounting plate 141 and the fixed mounting bracket 142, i.e., the plurality of sensor units 150 can not be completely the same as the position of the object table 17.

[0096] In an embodiment, the fixed adapter assembly 14 further includes a fixed adapter plate 143. The fixed mounting plate 141 is connected with the fixed adapter plate 143, the fixed mounting bracket 142 is connected with the fixed mounting plate 141, and the fixed adapter plate 143 is drivingly connected with the first sliding block 111, so as to drive the fixed mounting plate 141 and the fixed mounting bracket 142 to move along the Z direction.

[0097] Combining Figure 2 and Figure 6As shown, in the present embodiment, the fixed adapter plate 143 is connected with the first slider 111 and extends along the plane where the Y direction and the X direction are located. A plurality of openings can be formed on the fixed adapter plate 143, which can be used to avoid the wire harness of the sensor assembly 15 and / or achieve weight reduction. The fixed mounting plate 141 is located at the end of the fixed adapter plate 143 away from the first slider 111 along the Z direction, and the fixed mounting plate 141 extends along the plane where the Z direction and the X direction are located. The fixed mounting bracket 142 is located at the side of the fixed mounting plate 141 away from the fixed adapter plate 143 along the Z direction, and the fixed mounting bracket 142 extends along the plane where the Y direction and the X direction are located.

[0098] It should be explained that, Figure 1 and Figure 2 In the present embodiment, the wire harness of the sensor assembly 15 is taken as an example to show that the wire harness extends linearly, and the first driving assembly 11 and the cross beam 18 can be provided with through holes through which the wire harness can pass. Alternatively, the wire harness of the sensor assembly 15 can also have other curved shapes to avoid the solid structures such as the first driving assembly 11, the fixed adapter assembly 14 and the cross beam 18, and the first driving assembly 11 and the cross beam 18 can also not be provided with corresponding avoiding through holes. Those skilled in the art can understand that this is certainly implementable.

[0099] In an embodiment, the fixed mounting plate 141 and the fixed mounting bracket 142 are detachably connected, and the fixed mounting plate 141 and the fixed mounting bracket 142 have different extension directions.

[0100] In the present embodiment, for example, Figure 7 As shown, the fixed adapter plate 143 and the fixed mounting bracket 142 can be located at the same side of the fixed mounting plate 141; in other embodiments, for example, Figure 8 As shown, the fixed adapter plate 143 and the fixed mounting bracket 142 can also be located at different sides of the fixed mounting plate 141.

[0101] It can be understood that the fixed adapter plate 143 is used to be fixed with the first slider 111, and the fixed mounting plate 141 and the fixed mounting bracket 142 can have different assembly modes compared with the fixed adapter plate 143, so as to change the shape of the fixed adapter assembly 14, so that the length of the fixed adapter assembly 14 along the Z direction, the Y direction and the X direction can be changed, so as to adjust the position or distance of the plurality of sensor units 150 provided on the fixed adapter assembly 14 compared with the object table 17, so as to adapt to different objects to be measured 2.

[0102] In an embodiment, a sensor assembly 15 is connected with a first driving assembly 11 through a fixed adapter assembly 14. The fixed mounting plate 141 is provided with a plurality of spaced first mounting sites 1411, the fixed mounting bracket 142 is provided with a plurality of spaced second mounting sites 1421, and the plurality of sensor units 150 are respectively arranged at the plurality of first mounting sites 1411 and / or the plurality of second mounting sites 1421.

[0103] In the embodiment, the plurality of first mounting sites 1411 are dispersedly arranged at the fixed mounting plate 141, and different first mounting sites 1411 can have different spatial positions. Meanwhile, the plurality of second mounting sites 1421 are dispersedly arranged at the fixed mounting bracket 142, and different second mounting sites 1421 can have different spatial positions. The plurality of sensor units 150 are respectively arranged at the plurality of first mounting sites 1411 and / or the plurality of second mounting sites 1421 to respectively collect the position information of the top surface and the side surface of the object 2 during the movement of the object 2. It can be understood that the plurality of first mounting sites 1411 and the plurality of second mounting sites 1421 can be used for the mounting of the plurality of sensor units 150, and the plurality of first mounting sites 1411 are dispersedly arranged at the fixed mounting plate 141, and the plurality of second mounting sites 1421 are dispersedly arranged at the fixed mounting bracket 142. The fixed mounting plate 141 and the fixed mounting bracket 142 can have various mounting forms, and the plurality of sensor units 150 can also have various mounting forms compared with the fixed mounting plate 141 and the fixed mounting bracket 142, which are not listed here. Based on this, the position or distance of the plurality of sensor units 150 arranged on the fixed adapter assembly 14 compared with the object table 17 can be adjusted to adapt to different objects 2.

[0104] Specifically, the plurality of sensor units 150 in the first sensor assembly 151 are located above the object table 17 along the Z direction, and the sensing surfaces of the plurality of sensor units 150 in the first sensor assembly 151 are configured to face the top surface of the object 2 along the Z direction. The first Z direction driving assembly 1101 drives the plurality of sensor units 150 in the first sensor assembly 151 to move along the Z direction, so as to adjust the distance between the plurality of sensor units 150 in the first sensor assembly 151 and the top surface of the object 2 along the Z direction.

[0105] Specifically, the plurality of sensor units 150 in the second sensor assembly 152 are located at the side of the object table 17, and the sensing surfaces of the plurality of sensor units 150 in the second sensor assembly 152 are configured to face the side of the object 2 to be measured. The second Z-direction driving assembly 1102 drives the plurality of sensor units 150 in the second sensor assembly 152 to move along the Z-direction, so as to adjust the position of the plurality of sensor units 150 in the second sensor assembly 152 along the Z-direction relative to the side of the object 2 to be measured.

[0106] In the description of the application with reference to the drawings, it is to be understood that various changes can be made and substitutions can be made without departing from the spirit and scope of the application as defined by the appended claims. These changes and substitutions are also to be encompassed by the scope of the application.

Claims

1. A flatness and straightness testing device comprising a stage for carrying an object to be tested, characterised in that, The plane and straight line precision testing device has a plane moving mechanism for driving the object to be tested to move in the plane where the object table is located. The plane and straight line precision testing device further comprises: a first sensor assembly suspended above the object table along a Z direction perpendicular to the plane where the object table is located, the first sensor assembly being configured to collect different position information of a top surface of the object to be tested during movement of the object to be tested; a first Z direction driving assembly coupled with the first sensor assembly, the first Z direction driving assembly being movably arranged along the Z direction relative to the object table, a sensing surface of the first sensor assembly being opposite to the object table along the Z direction and being configured to be adjustable relative to the position of the object to be tested on the object table via the first Z direction driving assembly; a second Z direction driving assembly independent of the first Z direction driving assembly, the second Z direction driving assembly being movably arranged along the Z direction relative to the object table; and a second sensor assembly coupled with the second Z direction driving assembly, a sensing surface of the second sensor assembly being located on a side of the object table relative to the Z direction to collect different position information of a side surface of the object to be tested during movement of the object to be tested, and the second sensor assembly being configured to be adjustable along the Z direction via the second Z direction driving assembly.

2. The flatness and straightness testing device of claim 1, wherein, The first Z direction driving assembly and the second Z direction driving member are respectively spaced apart from the object table and are arranged on different sides of the object table.

3. The device of claim 1, wherein, The plane and straight line precision testing device further comprises a cross beam and a base plate, the object table being arranged on the base plate, two ends of the first Z direction driving assembly and the second Z direction driving member being respectively connected with the cross beam and the base plate, and the first Z direction driving assembly and the second Z direction driving member being respectively connected to different ends of the cross beam.

4. The flatness and straightness testing device of claim 1, wherein, The plane moving mechanism comprises a second driving assembly and a third driving assembly, the object table being driven by the second driving assembly to be movably arranged along a Y direction parallel to the plane where the object table is located, and the third driving assembly being connected with the second driving assembly to enable the object table to be movably arranged along an X direction parallel to the plane, the Z direction, the Y direction and the X direction intersecting with each other.

5. The device of claim 1 wherein, The plane and straight line precision testing device further comprises a fixed adapter assembly connected between the first sensor assembly and the first Z direction driving assembly, and / or between the second sensor assembly and the second Z direction driving assembly, the fixed adapter assembly comprising a fixed mounting plate and a fixed mounting bracket, the fixed mounting plate and the fixed mounting bracket being different in position relative to the object table, and the first sensor assembly and the second sensor assembly being arranged on the fixed mounting plate and / or the fixed mounting bracket.

6. The device of claim 5, wherein the at least one of the first and second linear guides is a linear bearing. The fixed mounting plate and the fixed mounting bracket are detachably connected, and the fixed mounting plate and the fixed mounting bracket have different extension directions.

7. The device of claim 5, wherein the at least one of the first and second linear guides is a linear bearing. The first Z-direction driving assembly comprises a first slider movably arranged along the Z-direction, the fixed adapter assembly further comprises a fixed adapter plate, the fixed mounting plate is connected with the fixed adapter plate, the fixed mounting support is connected with the fixed mounting plate, and the fixed adapter plate is drivingly connected with the first slider for driving the fixed mounting plate and the fixed mounting support to move along the Z-direction.

8. The device of claim 5, wherein, At least one of the first sensor assembly and the second sensor assembly comprises a plurality of sensor units, the fixed mounting plate is provided with a plurality of spaced first mounting sites, the fixed mounting support is provided with a plurality of spaced second mounting sites, and the plurality of sensor units are arranged in the plurality of first mounting sites and / or the plurality of second mounting sites.

9. The device of claim 1 wherein, The first Z-direction driving assembly comprises a first slider, a first guide frame, a first transmission shaft and a first hand wheel, the first slider is used to drive the first sensor assembly to move along the Z-direction, the first slider is guidingly connected with the first guide frame, the first transmission shaft is drivingly connected with the first slider, and the first transmission shaft is drivingly connected with the first hand wheel through a pair of bevel gears.

10. The flatness and straightness testing device of claim 9, wherein, The planar and linear precision testing device further comprises a locking assembly connected with the first hand wheel, the locking assembly comprises a clamping block and a handle, the handle is rotatably connected with the clamping block for controlling the clamping block to lock or release the first hand wheel.

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