Semiconductor three-axis precision detection adjusting device

Abstract

The utility model discloses a semiconductor three-axis precision detection adjusting device, which comprises a base, three high-precision electric displacement tables, a plurality of adjusting blocks and a plurality of high-precision linear guide rails, wherein the three high-precision electric displacement tables are arranged on one side of the base; the plurality of adjusting blocks and the plurality of high-precision linear guide rails are fixed on one sides of the high-precision electric displacement tables; a detection mechanism mounting plate is mounted on one side of the adjusting block and the high-precision linear guide rail; the three high-precision electric displacement tables are locked on the base, so that three-axis linkage can be realized, and three-axis independent movement can also be realized. A coarse adjustment mechanism composed of an adjustment block, a detection mechanism installation plate and a high-precision linear guide rail is arranged on an upper plate of the high-precision electric displacement table in a stacked mode. The space structure is fully utilized, the whole structure is fine and small, and the occupied space is small. And through the use of the high-precision crossed roller guide rail and the transmission mechanism, the requirement of high-precision adjustment is met. And the upper computer remotely controls the motor and the precision detection mechanism, so that the characteristics of convenience in model changing, high adjusting efficiency, high speed and good accuracy are realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor device detection, especially to a semiconductor three-axis precision detection adjusting device. BACKGROUND

[0002] The precision detection adjusting device is widely applied in the semiconductor manufacturing industry, and the semiconductor device is the core component of electronic products such as mobile phones and computers, and its technology is increasingly enhanced, and its social demand is gradually increased, so that the manufacturing precision of the semiconductor device is also improved. In the manufacturing process of the semiconductor device, some precision detection is usually required for the semiconductor device, and the adjusting device of the detection mechanism is particularly important. With the development of manufacturing technology, the performance requirement of the semiconductor detection adjusting device is higher and higher. The existing semiconductor detection adjusting device has the following problems:

[0003] 1. The existing semiconductor detection adjusting device is usually manually adjusted to the approximate position, and the accuracy is poor.

[0004] 2. The existing semiconductor detection adjusting device needs manual adjustment of the detection mechanism height every time the type is changed, and the adjustment efficiency is low.

[0005] 3. The existing semiconductor detection adjusting device cannot simultaneously adjust three axes with high precision.

[0006] 4. The existing semiconductor detection adjusting device has a large overall structure, low precision and complex operation.

[0007] Therefore, it is necessary to innovate and improve the original semiconductor precision detection adjusting device in view of the above problems. SUMMARY

[0008] The utility model overcomes the insufficient prior art, provides a kind of semiconductor three-axis precision detection adjusting device.

[0009] To achieve the above purpose, the technical scheme adopted by the utility model is as follows: a kind of semiconductor three-axis precision detection adjusting device, comprising: base, three high-precision electric displacement tables installed in one side of the base, and a plurality of adjustment blocks and a plurality of high-precision linear guides fixed on one side of the high-precision electric displacement table;

[0010] The adjustment block and the high-precision linear guide are provided with a detection mechanism mounting plate on one side, and the detection mechanism mounting plate is provided with a precision detection mechanism for detecting the semiconductor to be detected on one side;

[0011] The high-precision electric displacement table comprises: a lower plate fixed on one side of the base, an upper plate installed on one side of the lower plate, and a plurality of cross roller guides arranged between the lower plate and the upper plate;Transmission mechanism for driving the upper plate to move linearly is arranged between the lower plate and the upper plate.

[0012] In a preferred embodiment of the utility model, three high-precision electric displacement tables are evenly distributed in linear array on one side of the base, one side of the cross roller guide rail is fixed with one side of the lower plate, and the other side is fixed with one side of the upper plate.

[0013] In a preferred embodiment of the utility model, the transmission mechanism comprises: a motor seat installed on one side of the lower plate close to the top, a ball screw provided at the bottom of the motor seat, and a motor installed on the top of the motor seat; the top end of the ball screw is provided with a shaft coupling, and one side of the upper plate is threadedly connected with the side surface of the ball screw.

[0014] In a preferred embodiment of the utility model, the side surface of the ball screw is rotatably connected with the inner side of the motor seat through a bearing, and the output end of the motor is fixed with one end of the ball screw through the shaft coupling.

[0015] In a preferred embodiment of the utility model, it further comprises: an upper computer for issuing control instructions; the upper computer is electrically connected with the motor and the precision detection mechanism.

[0016] In a preferred embodiment of the utility model, the precision detection mechanism comprises: a camera installed on one side of the detection mechanism mounting plate, a lens provided in the camera, and a light source installed on the camera.

[0017] In a preferred embodiment of the utility model, the upper computer is in communication connection with the camera through a transmission line.

[0018] In a preferred embodiment of the utility model, one side of the detection mechanism mounting plate is locked on one side of a plurality of high-precision linear guide rails, and the top is connected with a plurality of adjusting blocks through bolts.

[0019] The utility model solves the defects in the background art, and has the following beneficial effects:

[0020] (1) The utility model provides a kind of semiconductor three-axis precision detection adjusting device, by three high-precision electric displacement platform is locked in a pedestal, three-axis linkage can be, three-axis can be moved alone, three-axis can be simultaneously high-precision regulated.Adjusting block and detection mechanism mounting plate and high-precision linear guide rail composition coarse adjustment mechanism, superimposed arrangement is in the upper plate of high-precision electric displacement platform.Make full use of space structure, integral structure is small, and it occupies small space.Through the use of high-precision cross roller guide and transmission mechanism, the requirement of high-precision regulation is realized.Precision detection mechanism and the cooperation of high-precision electric displacement platform, unidirectional positioning accuracy and repeat positioning accuracy can reach micron level, realize the effect of precision detection.Upper computer remote control motor and precision detection mechanism, realize the characteristics such as convenient change type, high regulation efficiency, fast speed, accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0021] The utility model is further described below in connection with drawings and examples;

[0022] Figure 1 It is the perspective view of preferred embodiment of the utility model;

[0023] Figure 2 It is the side view structure diagram of preferred embodiment of the utility model;

[0024] Figure 3 It is the front view structure diagram of preferred embodiment of the utility model;

[0025] Figure 4 It is the top view structure diagram of preferred embodiment of the utility model;

[0026] In the drawing: 1, pedestal;2, high-precision electric displacement platform;21, lower plate;22, upper plate;23, cross roller guide;24, ball screw;25, motor;3, adjusting block;4, high-precision linear guide rail;5, detection mechanism mounting plate;6, precision detection mechanism;61, camera;62, light source. DETAILED DESCRIPTION

[0027] Now the utility model is further detailed in connection with drawings and examples, these drawings are all simplified schematic diagram, just with schematic way to show the basic structure of the utility model, therefore it just shows the structure related to the utility model.

[0028] As Figures 1-4As shown, a semiconductor three-axis precision detection adjustment device, comprising: a base 1, three high-precision electric displacement tables 2 installed on one side of the base 1, and a plurality of adjustment blocks 3 and a plurality of high-precision linear guides 4 fixed on one side of the high-precision electric displacement tables 2; One side of the adjustment block 3 and the high-precision linear guide 4 is provided with a detection mechanism mounting plate 5, and one side of the detection mechanism mounting plate 5 is provided with a precision detection mechanism 6 for detecting the semiconductor to be detected; The high-precision electric displacement table 2 comprises: a lower plate 21 fixed on one side of the base 1, an upper plate 22 installed on one side of the lower plate 21, and a plurality of cross roller guides 23 arranged between the lower plate 21 and the upper plate 22; A transmission mechanism for driving the upper plate 22 to move linearly is arranged between the lower plate 21 and the upper plate 22.

[0029] It should be noted that the three high-precision electric displacement tables 2 are uniformly distributed in a linear array on one side of the base 1, one side of the cross roller guide 23 is fixed to one side of the lower plate 21, and the other side is fixed to one side of the upper plate 22; The high-precision electric displacement table 2 is locked on the base 1 by the fixing bolt. The adjustment block 3 and the high-precision linear guide 4 are locked on the upper plate 22 of the high-precision electric displacement table 2. The detection mechanism mounting plate 5 is installed on one side of the adjustment block 3 and the high-precision linear guide 4, and the three high-precision electric displacement tables 2 are locked on one base 1, which can be three-axis linkage, three-axis movement alone, and three-axis high-precision adjustment. The coarse adjustment mechanism composed of the adjustment block 3, the detection mechanism mounting plate 5 and the high-precision linear guide 4 is arranged on the upper plate 22 of the high-precision electric displacement table 2. Make full use of the space structure, the overall structure is small and occupies small space. Through the use of high-precision cross roller guide 23 and transmission mechanism, the requirement of high-precision adjustment is realized. The cooperation of the precision detection mechanism 6 and the high-precision electric displacement table can achieve micron-level one-way positioning accuracy and repeat positioning accuracy, and realize the effect of precision detection.

[0030] In some embodiments, the transmission mechanism comprises: a motor seat installed on one side of the lower plate 21 near the top, a ball screw 24 arranged at the bottom of the motor seat, and a motor 25 installed at the top of the motor seat; The top end of the ball screw 24 is provided with a shaft coupling, and one side of the upper plate 22 is threadedly connected with the side surface of the ball screw 24.

[0031] It should be noted that the side surface of the ball screw 24 is rotatably connected with the inner side of the motor seat through a bearing, and the output end of the motor 25 is fixed with one end of the ball screw 24 through the shaft coupling; The motor 25 drives the ball screw 24 to rotate through the shaft coupling, and then pushes the upper plate 22 to move linearly through the threaded connection, and the cross roller guide 23 ensures the stable sliding of the upper plate 22 on the lower plate 21, improves the displacement precision and stability, realizes the accurate displacement of the upper plate 22, and meets the requirement of high-precision adjustment.

[0032] In some embodiments, further comprising: a host computer for issuing control instructions; the host computer is electrically connected with the motor 25 and the precision detection mechanism 6; the host computer serves as a control center, and can control the operation of the motor 25 by electrical connection; at the same time, the host computer is also electrically connected with the precision detection mechanism 6, and can receive the image data shot by the precision detection mechanism 6, and perform image processing and detection. The remote control of the host computer on the motor 25 and the precision detection mechanism 6 can realize the convenient change of the type, the high efficiency of the adjustment, the fast speed, and the good accuracy.

[0033] In some embodiments, the precision detection mechanism 6 comprises: a camera 61 mounted on one side of the detection mechanism mounting plate 5, a lens arranged inside the camera 61, and a light source 62 mounted on the camera 61.

[0034] It should be noted that the host computer is in communication connection with the camera 61 through the transmission line; the camera 61 serves as an image acquisition device, and captures the semiconductor image to be detected through the lens. The light source 62 provides illumination to ensure that the camera 61 can clearly shoot the semiconductor image. The host computer is in communication connection with the camera 61 through the transmission line, and can acquire and process the image data in real time. Through the cooperation of the camera 61, the lens and the light source 62, the accurate detection of the semiconductor is realized.

[0035] In some embodiments, one side of the detection mechanism mounting plate 5 is locked on one side of the plurality of high-precision linear guides 4, and the top is connected with the plurality of adjustment blocks 3 through bolts; so that the detection mechanism mounting plate 5 can slide on the high-precision linear guide 4, and be finely adjusted through the adjustment block 3, to ensure the accurate position of the detection mechanism. At the same time, the superimposed arrangement of the adjustment block 3 and the high-precision linear guide 4 fully utilizes the space structure, so that the overall structure is small and occupies small space.

[0036] When the utility model is used, the connecting bolt of the adjustment block 3 and the detection mechanism mounting plate 5 is adjusted according to the position and size of the detection unit to be detected on the semiconductor device. The detection mechanism is roughly adjusted to the approximate position. The high-precision electric displacement table 2 accurately moves to the corresponding position according to the instruction of the host computer, drives the precision detection mechanism 6 to rise and fall, and adjusts the focal length, the detection range and other parameters, and outputs accurate detection results. The overall structure design embodies the characteristics of the semiconductor three-axis precision detection adjustment device, which can be adjusted simultaneously in three axes, convenient to change type, high efficiency of adjustment, fast speed and good accuracy.

[0037] The above is based on the ideal embodiment of the present application, through the above description, for those skilled in the art, obviously, the present application is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present application, the present application can be realized in other specific forms. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary, and are non-limiting, the scope of the present application is defined by the appended claims rather than the above description, therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application. Any reference signs in the claims should not be considered as limiting the claims involved.

[0038] In addition, it should be understood that, although the present application is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be properly combined to form other embodiments that those skilled in the art can understand.

Claims

1. A semiconductor triaxial precision detection and adjustment device, characterized in that, include: The base (1), three high-precision electric displacement stages (2) installed on one side of the base (1), and several adjustment blocks (3) and several high-precision linear guides (4) fixed on one side of the high-precision electric displacement stages (2). A detection mechanism mounting plate (5) is installed on one side of the adjustment block (3) and the high-precision linear guide (4), and a precision detection mechanism (6) for detecting the semiconductor to be tested is provided on one side of the detection mechanism mounting plate (5). The high-precision electric displacement stage (2) includes: a lower plate (21) fixed on one side of the base (1), an upper plate (22) installed on one side of the lower plate (21), and a plurality of cross roller guides (23) arranged between the lower plate (21) and the upper plate (22); a transmission mechanism for driving the upper plate (22) to make linear motion is provided between the lower plate (21) and the upper plate (22).

2. The semiconductor triaxial precision detection and adjustment device according to claim 1, characterized in that: The three high-precision electric displacement stages (2) are evenly distributed on one side of the base (1) in a linear array. One side of the cross roller guide (23) is fixed to one side of the lower plate (21), and the other side is fixed to one side of the upper plate (22).

3. The semiconductor triaxial precision detection and adjustment device according to claim 1, characterized in that: The transmission mechanism includes: a motor seat mounted on the lower plate (21) near the top side, a ball screw (24) disposed at the bottom of the motor seat, and a motor (25) mounted on the top of the motor seat; a coupling is mounted on the top of the ball screw (24), and one side of the upper plate (22) is threadedly connected to the side of the ball screw (24).

4. The semiconductor triaxial precision detection and adjustment device according to claim 3, characterized in that: The side of the ball screw (24) is rotatably connected to the inner side of the motor seat through a bearing, and the output end of the motor (25) is fixed to one end of the ball screw (24) through the coupling.

5. The semiconductor triaxial precision detection and adjustment device according to claim 3, characterized in that: Also includes: A host computer for issuing control commands; the host computer is electrically connected to the motor (25) and the precision detection mechanism (6).

6. The semiconductor triaxial precision detection and adjustment device according to claim 5, characterized in that: The precision testing mechanism (6) includes: a camera (61) mounted on one side of the testing mechanism mounting plate (5), a lens disposed inside the camera (61), and a light source (62) mounted on the camera (61).

7. A semiconductor triaxial precision detection and adjustment device according to claim 6, characterized in that: The host computer is connected to the camera (61) via a transmission line.

8. The semiconductor triaxial precision detection and adjustment device according to claim 1, characterized in that: The mounting plate (5) of the detection mechanism is locked on one side of one side of several high-precision linear guides (4), and the top is connected to several adjustment blocks (3) by bolts.

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