Calibration device of film type pressure sensor

Abstract

The utility model relates to the technical field of pressure sensor detection, in particular to a calibration device of a film type pressure sensor, which comprises an upper base. A lower base; the air chamber assembly is arranged between the upper base and the lower base and comprises a pressing frame, a sealing piece arranged on the pressing frame and an air inlet hole used for applying uniform air pressure load to a pressure sensor to be tested; and the drawing type test plate is arranged below the air chamber assembly and is used for placing a pressure sensor to be tested. According to the utility model, uniform air pressure load is applied to the air chamber assembly through the air inlet hole, and then uniform air pressure load is applied to the to-be-tested pressure sensor, so that calibration of the to-be-tested pressure sensor is realized, at the same time, the pull-out test board facilitates taking and placing of the to-be-tested pressure sensor, and the calibration efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to pressure sensor detection technical field especially relates to a kind of calibration device of thin film pressure sensor. BACKGROUND

[0002] Thin film pressure sensor is a kind of sensor using the strain effect of thin film material to convert pressure signal into electrical signal, due to its simple structure, small volume, fast response and high sensitivity, thin film pressure sensor is widely used in aerospace, automobile, medical, industrial automation and other fields.

[0003] With the development of industrial automation and intelligentization, the use frequency of thin film pressure sensor is increasing, in order to ensure the accuracy and reliability of sensor in practical application, calibration process is particularly important, calibration of pressure sensor before delivery is a very important step, calibration process is to ensure that the output signal of sensor can accurately reflect the actual pressure value, by calibrating the output signal of sensor, to ensure that it can output accurate electrical signal under certain pressure.

[0004] The existing calibration method and equipment have some shortcomings: first, the traditional calibration process often relies on manual operation, which is easily affected by human factors, resulting in reduced repeatability and accuracy of calibration results;Second, the traditional calibration equipment calibration process is relatively cumbersome, usually single sensor point by point respectively calibration record data, time-consuming, unable to meet the needs of rapid production and real-time detection;Third, the data processing and analysis capability of existing calibration system is limited, it is difficult to evaluate the performance of sensor comprehensively, and it is difficult to identify the fault and drift of sensor in time.

[0005] Therefore, a new type of calibration system based on air pressure loading is urgently needed, which can overcome the above problems, realize large-area, multiple sensors simultaneous unified calibration, with the characteristics of fast calibration and automation, which will help to improve the use precision and reliability of sensor, promote the technological progress in various fields, so the present case is produced. CONTENT OF THE UTILITY MODEL

[0006] Other features and advantages of the utility model will be set forth in the subsequent specification, and become apparent from the specification, or be learned by practicing the utility model. The purpose and other advantages of the utility model can be realized and obtained by the structure specially pointed out in the specification and other specification drawings.

[0007] The utility model aims at overcoming the above shortcomings, and the utility model provides a kind of calibration device of thin film pressure sensor.

[0008] The utility model discloses a technical scheme that solves its technical problems is adopted: a kind of calibration device of thin film pressure sensor, comprising:

[0009] Upper base;

[0010] Lower base;

[0011] Gas chamber assembly, it is set between the upper base and the lower base, and including pressure frame, sealing element being set on the pressure frame, for the even gas pressure load of the pressure sensor to be measured with the air inlet hole of being applied;

[0012] Pull-out test plate, it is set below the gas chamber assembly and is used to place the pressure sensor to be measured.

[0013] The utility model discloses through the even gas pressure load of air inlet hole to gas chamber assembly, and then the even gas pressure load of the pressure sensor to be measured is applied, to realize the calibration of the pressure sensor to be measured, simultaneously, pull-out test plate facilitates the taking and placing of the pressure sensor to be measured, improves calibration efficiency.

[0014] In some embodiments, a kind of calibration device of thin film pressure sensor, comprising:

[0015] Upper base,

[0016] Lower base,

[0017] Connecting base, it is set between the upper base and the lower base, and is provided with n;

[0018] Gas chamber assembly, it is spaced apart between the upper base and the lower base and is provided with n+1, each gas chamber assembly includes pressure frame, sealing element being set on the pressure frame, for the even gas pressure load of the pressure sensor to be measured with the air inlet hole of being applied;

[0019] Pull-out test plate, it is set below the gas chamber assembly and is provided with n+1, and is used to place the pressure sensor to be measured;

[0020] Wherein, n≥1, and integer.

[0021] In the embodiment, gas chamber assembly is spaced apart by connecting base, and connecting base has n, so that gas chamber assembly has n+1, and pull-out test plate has n+1, therefore, n+1 pull-out test plate can place the pressure sensor to be measured simultaneously, the utility model can simultaneously calibrate multiple pressure sensor to be measured, and then improve calibration efficiency.

[0022] In some embodiments, sealing element is flexible rubber film. Flexible rubber film has high strength, high toughness and high elasticity characteristics, can withstand greater tensile and compression force, has better tear resistance, therefore, using flexible rubber film can improve service life.

[0023] In some embodiments, the sealing member is fixed on the pressing frame by rivets and coated with sealing glue on the edges thereof.

[0024] In some embodiments, the pressing frame is provided with side limiting strips at both ends, the side limiting strips are provided with limiting holes, the upper base and the lower base are provided with guiding holes I matched with the limiting holes, and the upper base, the pressing frame and the lower base are connected and fixed by the pin shafts in sequence through the guiding holes I, the limiting holes.

[0025] In some embodiments, the connecting base is provided with guiding holes II matched with the limiting holes, and the connecting base is connected and fixed by the pin shafts through the guiding holes II, the limiting holes.

[0026] In some embodiments, the air inlet holes are arranged on the upper base.

[0027] In some embodiments, the air inlet holes are arranged on the upper base and the connecting base respectively, and the air inlet holes on the upper base and the connecting base are connected by pipelines.

[0028] In some embodiments, the pull-out type test plate is provided with an inner groove for placing the pressure sensor to be tested.

[0029] In some embodiments, the length of the inner groove is 350 mm, the width is 22 mm, and the height is 5 mm.

[0030] By adopting the above technical scheme, the present application has the following beneficial effects:

[0031] This invention applies a uniform air pressure load to the air chamber assembly through the air inlet, thereby applying a uniform air pressure load to the pressure sensor under test (PST) for calibration. Simultaneously, the pull-out test plate facilitates the placement and removal of the PST, improving calibration efficiency. The air chamber assembly is spaced apart by connecting bases; if there are n connecting bases, there are n+1 air chamber assemblies and n+1 pull-out test plates. Therefore, n+1 pull-out test plates can simultaneously hold the PST, allowing for the simultaneous calibration of multiple PSTs, thus improving calibration efficiency. It should be understood that the above general description and the following detailed description are exemplary and explanatory only and do not limit this disclosure.

[0032] Undoubtedly, such and other objects of this invention will become more apparent after the following detailed description of the preferred embodiments, which are illustrated in various accompanying drawings and illustrations.

[0033] To make the above and other objects, features and advantages of this utility model more apparent and understandable, one or more preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0034] The accompanying drawings are provided to further understand the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation thereof.

[0035] In the accompanying drawings, the same parts use the same reference numerals, and the drawings are schematic and not necessarily drawn to actual scale.

[0036] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one or more embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on such drawings without creative effort.

[0037] Figure 1 This is an exploded view of a calibration device for a thin-film pressure sensor according to the present invention.

[0038] Figure 2 This is an exploded view of a calibration device for a thin-film pressure sensor according to some embodiments of the present invention;

[0039] Figure 3 This is an exploded view of a calibration device for a thin-film pressure sensor according to another embodiment of the present invention;

[0040] Figure 4The utility model discloses a kind of calibration device's principle diagram of thin film pressure sensor.

[0041] Figure 5 The utility model discloses a kind of calibration curve of capacitive pressure sensor of calibration device's principle diagram of thin film pressure sensor.

[0042] Main figure mark explanation:

[0043] 1, upper base; 2, lower base;

[0044] 3, air chamber assembly; 31, press frame; 311, side limit strip; 312, limit hole; 32, air inlet hole;

[0045] 4, pull-out test plate; 41, inner groove

[0046] 5, connecting base; 51, guide hole two;

[0047] 6, guide hole one. Specific embodiment

[0048] In order to make the purpose, technical scheme and advantage of the utility model more clear and obvious, the utility model is further described in detail in the following with specific embodiment.It should be understood that the specific embodiment described here is only used to explain the utility model, but not used to limit the utility model.

[0049] In addition, in the description of the utility model, it should be understood that the orientation or position relationship indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, so it cannot be understood as a limitation on the utility model.

[0050] In the utility model, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and other terms should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral;It can be directly connected, or indirectly connected through intermediate medium, it can be the communication inside two elements or the interaction relationship of two elements.But it is noted that direct connection means that the connection between the two main bodies does not build a connection relationship through transition structure, but only connected through connection structure to form a whole.For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0051] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact through an intermediate medium. In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0052] Referring to Figure 2 , Figure 2 It is an exploded view of a calibration device for a thin-film pressure sensor in some embodiments of the present application.

[0053] According to some embodiments of the present application, the present application provides a calibration device for a thin-film pressure sensor, comprising:

[0054] Upper base 1;

[0055] Lower base 2;

[0056] The air chamber assembly 3 is arranged between the upper base 1 and the lower base 2, and comprises a pressing frame 31, a sealing member arranged above the pressing frame 31, and an air inlet hole 32 for applying uniform air pressure load to the pressure sensor to be measured.

[0057] The pull-out test plate 4 is arranged below the air chamber assembly 3 and is used to place the pressure sensor to be measured.

[0058] The present application applies uniform air pressure load to the air chamber assembly 3 through the air inlet hole 32, and then applies uniform air pressure load to the pressure sensor to be measured, so as to realize the calibration of the pressure sensor to be measured. At the same time, the pull-out test plate 4 facilitates the taking and placing of the pressure sensor to be measured, and improves the calibration efficiency.

[0059] According to some embodiments of the present application, optionally, the sealing member is a flexible rubber film. The flexible rubber film has the characteristics of high strength, high toughness and high elasticity, can withstand large tensile and compressive force, and has good tear resistance. Therefore, the use of flexible rubber film can improve the service life.

[0060] According to some embodiments of the present application, optionally, the sealing member is fixed on the pressing frame 31 by rivets and coated with sealing glue on the edge thereof. The sealing member is fixedly arranged, so that the sealing member does not displace or deviate after inflation. The sealing glue is coated on the edge thereof, which can improve the air tightness of the sealing member and reduce the probability of air leakage.

[0061] According to some embodiments of the utility model, optionally, both ends of the pressing frame 31 are provided with side limiting strips 311, a plurality of limiting holes 312 are arranged on the side limiting strips 311, the upper base 1 and the lower base 2 are provided with guide holes one 6 matched with the limiting holes 312, and the upper base 1, the pressing frame 31 and the lower base 2 are connected and fixed by the pin shafts sequentially penetrating the guide holes one 6 and the limiting holes 312. The structure design is beneficial to the assembly and fixation between the components, and facilitates disassembly and replacement.

[0062] According to some embodiments of the utility model, optionally, the air inlet hole 32 is arranged on the upper base 1. The air inlet hole 32 arranged on the upper base 1 is beneficial to applying uniform air pressure to the air chamber assembly 3.

[0063] According to some embodiments of the utility model, optionally, the pull-out test plate 4 is provided with an inner groove 41 for placing the pressure sensor to be tested. The inner groove 41 is beneficial to placing the pressure sensor to be tested and is not easy to fall during taking and placing.

[0064] According to some embodiments of the utility model, optionally, the length of the inner groove 41 is 350 mm, the width is 22 mm, and the height is 5 mm. The pressure sensor to be tested within the size range of the inner groove 41 can be placed in the calibration device for calibration.

[0065] Refer to Figure 1 , Figure 3 , Figure 1 It is an exploded view of the calibration device of the thin film pressure sensor according to the utility model; Figure 3 It is an exploded view of the calibration device of the thin film pressure sensor according to another embodiment of the utility model.

[0066] According to some embodiments of the utility model, the utility model provides a calibration device of a thin film pressure sensor, which comprises:

[0067] an upper base 1,

[0068] a lower base 2,

[0069] a connecting base 5 arranged between the upper base 1 and the lower base 2 and provided with n;

[0070] an air chamber assembly 3 arranged between the upper base 1 and the lower base 2 and provided with n+1, each air chamber assembly 3 comprising a pressing frame 31, a sealing element arranged above the pressing frame 31, and an air inlet hole 32 for applying uniform air pressure load to the pressure sensor to be tested;

[0071] a pull-out test plate 4 arranged below the air chamber assembly 3 and provided with n+1, and used for placing the pressure sensor to be tested;

[0072] Wherein, n≥1, and is an integer.

[0073] According to some embodiments of the utility model, optionally, the connecting base 5 is provided with a guide hole two 51 matched with the limiting hole 312, and the connecting base 5 is connected and fixed by passing through the guide hole two 51 and the limiting hole 312 with a pin shaft.The connecting base 5 plays a spacing role, therefore, the connecting base 5 is provided with the guide hole two 51 matched with the limiting hole 312, which can connect and fix the connecting assembly with the upper base 1, the lower base 2 and the pressing frame 31.

[0074] According to some embodiments of the utility model, optionally, the air inlet hole 32 is arranged on the upper base 1 and the connecting base 5 respectively, and the air inlet hole 32 of the upper base 1 is connected with the air inlet hole 32 on the connecting base 5 through a pipeline.The air inlet hole 32 of the upper base 1 and the air inlet hole 32 on the connecting base 5 are connected through the pipeline, which facilitates the air pressure applied to the air chamber assembly 3, and saves the cost.

[0075] Embodiment 1

[0076] Referring to Figure 2 The embodiment provides a kind of calibration device of thin film pressure sensor, and the device includes:

[0077] The upper base 1;

[0078] The lower base 2;

[0079] Air chamber assembly 3, it is arranged between the upper base 1 and the lower base 2, and includes pressing frame 31, sealing element arranged on the pressing frame 31, for the air inlet hole 32 for the pressure sensor to be measured to apply uniform air pressure load, air inlet hole 32 is arranged on the upper base 1;

[0080] Pull-out test plate 4, it is arranged below air chamber assembly 3 and is used to place the pressure sensor to be measured;

[0081] Further, the sealing element is flexible rubber film, which is fixed on the pressing frame 31 by rivet, and the edge is coated with sealant to prevent gas leakage;

[0082] Further, the two ends of the pressing frame 31 are provided with side limiting strips 311, and a plurality of limiting holes 312 are arranged on the side limiting strips 311, the upper base 1 and the lower base 2 are provided with guide holes one 6 matched with the limiting holes 312, and the upper base 1, the pressing frame 31 and the lower base 2 are connected and fixed by passing through the guide holes one 6 and the limiting holes 312 with a pin shaft in sequence;

[0083] Further, the pull-out test plate 4 is provided with an inner groove 41 for placing the pressure sensor to be measured, the length of the inner groove 41 is 350mm, the width is 22mm, and the height is 5mm, and the pressure sensor to be measured within the size range can be placed in the calibration device for calibration.

[0084] Embodiment 2

[0085] With reference to Figure 1 The embodiment provides a calibrating device for a thin-film pressure sensor, which comprises:

[0086] an upper base 1,

[0087] a lower base 2,

[0088] a connecting base 5 arranged between the upper base 1 and the lower base 2 and provided with one;

[0089] two air chamber assemblies 3 arranged between the upper base 1 and the lower base 2 and provided with two, the two air chamber assemblies 3 are spaced apart through the connecting base 5, and each of the two air chamber assemblies 3 comprises a pressing frame 31, a sealing member arranged above the pressing frame 31 and an air inlet hole 32 for applying a uniform air pressure load to a to-be-tested pressure sensor; wherein the air inlet hole 32 of the air chamber assembly 3 close to the upper base 1 is arranged on the upper base 1, the air inlet hole 32 of the air chamber assembly 3 arranged in the middle is arranged on the connecting base 5, and the air inlet hole 32 on the upper base 1 and the air inlet hole 32 on the connecting base 5 are connected through a pipeline.

[0090] two pull-out test plates 4 arranged below the air chamber assemblies 3 and provided with two, and used for placing the to-be-tested pressure sensor;

[0091] Further, the sealing member is a flexible rubber film which is fixed on the pressing frame 31 through rivets and coated with sealing glue on the edges to prevent gas leakage.

[0092] Further, the pressing frame 31 is provided with a side limiting strip 311 at each end, the side limiting strip 311 is provided with a plurality of limiting holes 312, the upper base 1 and the lower base 2 are provided with guide holes one 6 matched with the limiting holes 312, and the connecting base 5 is provided with guide holes two 51 matched with the limiting holes 312, and the upper base 1, the pressing frame 31, the connecting base 5 and the lower base 2 are connected and fixed through a pin shaft in sequence through the guide holes one 6, the limiting holes 312 and the guide holes two 51.

[0093] Further, the pull-out test plate 4 is provided with an inner groove 41 for placing the to-be-tested pressure sensor, the length of the inner groove 41 is 350 mm, the width is 22 mm, and the height is 5 mm, and the to-be-tested pressure sensor within the size range can be placed in the calibrating device for calibration.

[0094] Embodiment 3

[0095] With reference to Figure 3 The embodiment provides a calibrating device for a thin-film pressure sensor, and the difference between the embodiment and the embodiment 1 or the embodiment 2 is that:

[0096] The connecting base 5 is provided with n, the air chamber assembly 3 is provided with n+1, and the pull-out test plate 4 is provided with n+1, wherein n is greater than or equal to 2 and is an integer.

[0097] Working principle: referring to Figures 4-5 Firstly, the pressure sensor to be measured is placed in the inner groove 41 of the pull-out test plate 4 of the calibration device, the pressure sensor to be measured is connected with the data acquisition module, and then the air inlet hole 32 of the calibration device is connected with the air pump through a pipeline;

[0098] Then, the air pressure value is set in the upper computer and a command is sent to the controller to open the air inlet valve, the air pump is used to send air to the air chamber assembly 3 of the calibration device, the air chamber assembly 3 is inflated to make the flexible rubber film expand and pressurize the inner groove 41, so that the pressure sensor to be measured is uniformly pressed, whether the air pressure in the air chamber assembly 3 reaches the preset value is measured by the air gauge, if the preset value is reached, the air inlet valve is controlled to be disconnected, the data acquisition module collects the output value of the pressure sensor to be measured, the output value can be voltage, capacitance, resistance, and is sent to the upper computer software for processing and saving;

[0099] Then, the air pressure is applied to the air chamber assembly 3 of the calibration device within the range of the pressure sensor to be measured in a fixed air pressure step, and the output value of the pressure sensor to be measured and the pressure output value of the standard pressure sensor at the corresponding air pressure value are recorded at each interval air pressure calibration point, the pressure calibration process is completed, in order to reduce noise interference, the calibration process can be repeated multiple times, and the average value of each group of collected data is taken as the final calibration curve value;

[0100] Finally, the relationship curve between the sensor output and the pressure can be drawn by a polynomial fitting method, the mapping relationship equation between the sensor output and the pressure is obtained, and the calibration is completed.

[0101] It should be understood that the embodiments disclosed in the utility model are not limited to the specific processing steps or materials disclosed herein, but should be extended to the equivalent alternatives of such features understood by those skilled in the related art. It should also be understood that the terms used herein are for the purpose of describing specific embodiments only and do not mean limitation.

[0102] The "embodiments" mentioned in the specification mean that the specific features or characteristics described in combination with the embodiments are included in at least one embodiment of the utility model. Therefore, the phrase or "embodiments" appearing throughout the specification does not necessarily mean the same embodiment.

[0103] Moreover, the described features or characteristics can be combined in any other suitable manner in one or more embodiments. In the above description, some specific details are provided for the purpose of providing a thorough understanding of embodiments of the application. However, persons of ordinary skill in the relevant art will appreciate that the application can be practiced without one or more of the specific details, or with other methods, components, materials, etc.

Claims

1. A calibration device for a thin-film pressure sensor, characterized by The utility model relates to a pressure sensor test device, which comprises: an upper base, a lower base, a gas chamber assembly arranged between the upper base and the lower base, and comprising a pressing frame, a sealing member arranged above the pressing frame, and an air inlet hole for applying uniform air pressure load to a pressure sensor to be tested; a pull-out test plate arranged below the gas chamber assembly and used for placing the pressure sensor to be tested.

2. A device for calibrating a thin-film pressure sensor according to claim 1, characterized in that The air inlet hole is arranged on the upper base.

3. A calibration device for a thin film pressure sensor, characterized in that The utility model relates to a pressure sensor test device, which comprises: an upper base, a lower base, a connecting base arranged between the upper base and the lower base, and provided with n; a gas chamber assembly arranged between the upper base and the lower base, and provided with n+1, each of which comprises a pressing frame, a sealing member arranged above the pressing frame, and an air inlet hole for applying uniform air pressure load to a pressure sensor to be tested; a pull-out test plate arranged below the gas chamber assembly and provided with n+1, and used for placing the pressure sensor to be tested; wherein n is an integer greater than or equal to 1.

4. A device for calibrating a thin-film pressure sensor according to claim 1 or 3, characterized in that The sealing member is a flexible rubber film.

5. A device for calibrating a thin-film pressure sensor as claimed in claim 4, characterized in that The sealing member is fixed to the pressing frame by rivets and coated with sealant on the edges.

6. The device for calibrating a thin-film pressure sensor according to claim 3, characterized in that Both ends of the pressing frame are provided with side limiting strips, and a plurality of limiting holes are arranged on the side limiting strips.

7. A device for calibrating a thin-film pressure sensor according to claim 6, characterized in that The upper base and the lower base are provided with guide holes I matched with the limiting holes.

8. The device for calibrating a thin-film pressure sensor according to claim 3, characterized in that The upper base, the pressing frame, and the lower base are connected and fixed in sequence by a pin shaft passing through the guide holes I and the limiting holes.

9. A device for calibrating a thin-film pressure sensor according to claim 1 or 3, characterized in that The connecting base is provided with guide holes II matched with the limiting holes.

10. A device for calibrating a thin film pressure sensor as claimed in claim 9, characterised in that, The connecting base is connected and fixed by a pin shaft passing through the guide holes II and the limiting holes. The air inlet holes are arranged on the upper base and the connecting base respectively, and the air inlet holes on the upper base and the connecting base are connected by pipelines. The pull-out test plate is provided with an inner groove for placing the pressure sensor to be tested. The length of the inner groove is 350 mm, the width is 22 mm, and the height is 5 mm.

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