Biological sample stage of scanning electron microscope

Abstract

The utility model discloses a biological sample table of a scanning electron microscope, which relates to the technical field of microscope sample tables and comprises a sample disc, symmetrical suspension frames are fixedly mounted on the top surface of the sample disc, a sleeve roller ring is rotatably connected to the middle of each suspension frame, a straight sliding strip is fixedly arranged on the outer surface of each sleeve roller ring, and a rubber containing cylinder is sleeved on the outer surface of each sleeve roller ring. The two ends of the conductive adhesive are attached to the two adhesive containing barrels respectively, the conductive adhesive can be suspended through the arrangement of the suspension frame, the two adhesive containing barrels can be controlled to rotate in a mirror image mode through the sleeve roller ring and the straight sliding strip to tension the conductive adhesive through the arrangement of the elastic assembly, and therefore the conductive adhesive can be tightly attached to the adhesive containing barrels through the straight sliding strip. The conductive adhesive is fixed, a sample on the conductive adhesive is prevented from shaking in the scanning imaging process, the conductive adhesive can be loosened through reverse rotation, the contact area between the conductive adhesive and the adhesive containing barrel is reduced, the conductive adhesive can be taken down by hooking the conductive adhesive from bottom to top through fingers of a worker, and operation is easy and convenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to microscope sample stage technical field more specifically, the utility model relates to a kind of biological sample stage of scanning electron microscope. BACKGROUND

[0002] Scanning electron microscope (abbreviation SEM) is an important material science research and microanalysis tool, mainly applied to material science, biology, geology, semiconductor industry, currently, sample can be divided into block sample, powdery sample and cross section sample, when fixing sample, need to paste good conductive glue on sample stage, then sample is adhered on adhesive tape, then sample stage is installed and scans image.

[0003] However, long conductive glue usually to ensure good conductivity and fixing effect, will adopt very strong adhesive, these adhesive molecules can be in full contact with sample stage surface and the surface of adherend and form a large number of intermolecular forces, to produce very strong adhesion, leading to sample scanning image, conductive glue is difficult to separate from sample stage, use is more inconvenient. UTILITY MODEL CONTENT

[0004] In order to overcome the above-mentioned defects of the prior art, the utility model provides a biological sample stage of scanning electron microscope to solve the problem that the conductive glue is difficult to separate from the sample stage and is inconvenient to use.

[0005] To solve the above technical problems, the utility model provides the following technical scheme: a biological sample stage of scanning electron microscope, including sample disc, the top surface of the sample disc is fixedly installed with symmetrical overhanging frame, the middle part of the overhanging frame is rotatably connected with sleeve roller, the outer surface of the sleeve roller is fixedly provided with straight slide, the outer surface of the sleeve roller is sleeved with glue setting cylinder, and the glue setting cylinder can slide linearly along the outer surface of the sleeve roller through the straight slide, the sample disc is also provided with tension component capable of adjusting the tension of conductive glue on the glue setting cylinder and position adjusting component for adjusting the position of the glue setting cylinder.

[0006] Preferably, the tension component includes a tension bracket, the tension bracket is fixedly installed on the top surface of the sample disc, a bearing seat is fixedly installed on the middle part of the top surface of the tension bracket, a bidirectional screw rod is rotatably connected to the bearing seat, slide seats are fixedly installed on the left and right sides of the top surface of the tension bracket, slide racks are slidably connected to the slide seats along the axial direction of the bidirectional screw rod, the left and right sides of the bidirectional screw rod are respectively threadedly connected with the two slide racks, and a gear ring is fixedly installed at one end of the sleeve roller, and the slide racks are engaged with the gear ring.

[0007] Preferably, the bottom of the slide rack is in inverted T-shaped structure, the tension component further includes a first knob, the first knob is fixedly installed on the middle part of the bidirectional screw rod, and the surface of the first knob is rough.

[0008] Preferably, the position adjusting assembly comprises a double-end sleeve rod, two ends of the double-end sleeve rod are respectively rotatably sleeved with two glue placing cylinders, a top surface of the sample disc is fixedly provided with a threaded frame, a top of the threaded frame is threadedly provided with an adjusting screw rod, one end of the adjusting screw rod is rotatably connected with a middle portion of the double-end sleeve rod, and the other end of the adjusting screw rod is fixedly connected with a second knob with a rough surface.

[0009] Preferably, the sample disc, the suspension frame, the sleeve roller and the glue placing cylinder are made of conductive metal materials.

[0010] Preferably, the suspension frame is provided in an inverted U-shaped structure.

[0011] Preferably, the two ends of the sleeve roller are fixedly provided with anti-coming-off rings, and the outer diameters of the anti-coming-off rings are greater than the outer diameter of the sleeve roller.

[0012] Compared with the prior art, the utility model discloses the following beneficial effects:

[0013] The utility model discloses two ends of conductive glue are pasted on two glue placing cylinders respectively, through the setting of suspension frame, can suspend conductive glue, through the setting of loose component, can utilize sleeve roller and straight slide and control two glue placing cylinders mirror image rotation and make conductive glue tight, make conductive glue fixed, avoid the sample on conductive glue and shake in the scanning imaging process, and the reverse rotation can relax conductive glue, and reduce the contact area between conductive glue and glue placing cylinder, and the staff's finger is hooked up from below to the conductive glue upwards, can take down it, and the operation is simple and convenient.

[0014] The utility model discloses rotating adjusting screw rod, can drive the glue placing cylinder of double-end sleeve rod both ends synchronous movement, thereby can adjust its position after sticking conductive glue, to guarantee that conductive glue is located the middle part of sample disc as far as possible, avoid the scanning uneven of electron beam to sample, influence the analysis to sample surface topography and structure, improve the practicality of sample table.

[0015] The utility model discloses that the sample disc, suspension frame, sleeve roller and glue placing cylinder are made of conductive metal materials, can make the electric charge that sample surface accumulates in time through the grounding structure of scanning electron microscope conduction, guarantee electron beam stable scanning, make the image clear, stable. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the main body structure schematic diagram of the utility model;

[0017] Figure 2 It is the utility model Figure 1 It is A area structure enlarged view in the utility model;

[0018] Figure 3 It is the loose component related structure schematic diagram of the utility model;

[0019] Figure 4 For the utility model Figure 3 The middle B area structure enlargement view;

[0020] Figure 5 For the utility model's position adjusting assembly structure schematic view.

[0021] [Reference signs]

[0022] 1, sample disc;2, overhanging frame;3, sleeve roller ring;31, anti-off ring;4, straight slide;5, glue placing cylinder;6, tensioning assembly;61, tensioning support;62, bearing seat;63, bidirectional screw;64, sliding seat;65, sliding rack;66, gear ring;67, first knob;7, position adjusting assembly;71, double-end sleeve rod;72, threaded frame;73, adjusting screw;74, second knob. DETAILED DESCRIPTION

[0023] In order to make the technical problems, technical schemes and advantages to be solved by the utility model more clear, specific embodiments will be described in detail below with reference to the drawings.

[0024] As shown in the accompanying Figure 1 to the accompanying Figure 5 The embodiment of the utility model provides a kind of biological sample stage of scanning electron microscope, including sample disc 1, the top surface of sample disc 1 is fixedly installed with symmetrical overhanging frame 2, the middle part of overhanging frame 2 is rotatably connected with sleeve roller ring 3, the outer surface of sleeve roller ring 3 is fixedly provided with straight slide 4, sleeve roller ring 3 is provided with glue placing cylinder 5 outside surface, and glue placing cylinder 5 can be linearly slid along the outer surface of sleeve roller ring 3 by straight slide 4, sample disc 1 is also provided with the tensioning of the conductive glue of glue placing cylinder 5 can be adjusted tensioning assembly 6 and be used for adjusting the position of glue placing cylinder 5 position adjusting assembly 7.

[0025] Specifically, the two ends of conductive glue are respectively pasted on two glue placing cylinders 5, by the setting of overhanging frame 2, conductive glue can be suspended, by the setting of tensioning assembly 6, two glue placing cylinders 5 mirror image rotation can be controlled by sleeve roller ring 3 and straight slide 4 to tighten conductive glue, so that conductive glue is fixed, avoid the sample on conductive glue to shake in the scanning imaging process, reverse rotation can relax conductive glue, and reduce the contact area between conductive glue and glue placing cylinder 5, and the conductive glue is hooked up from below to above by staff's finger, it can be taken down.

[0026] Among them, the above-mentioned sample stage can be installed into scanning electron microscope by sample disc 1, sample disc 1 is the structure for existing scanning electron microscope, not too much elaboration.

[0027] Preferably, the tensioning assembly 6 comprises a tensioning support 61 fixedly installed on the top surface of the sample disc 1, a bearing seat 62 fixedly installed on the middle of the top surface of the tensioning support 61, a bidirectional screw rod 63 rotationally connected to the bearing seat 62, a sliding seat 64 fixedly installed on the left and right sides of the top surface of the tensioning support 61, and a sliding rack 65 slidably connected to the sliding seat 64 along the axis direction of the bidirectional screw rod 63. The two sides of the bidirectional screw rod 63 are threadedly connected with the two sliding racks 65 respectively. One end of the sleeve roller 3 is fixedly installed with a gear ring 66, and the sliding rack 65 is engaged with the gear ring 66.

[0028] Specifically, by rotating the bidirectional screw rod 63 on the bearing seat 62 in the forward and reverse directions, the two sliding racks 65 can slide linearly towards or away from each other along the surface of the sliding seat 64, thereby engaging the gear ring 66 to drive the two glue setting cylinders 5 to mirror rotate, so as to tension or relax the conductive glue on the glue setting cylinders 5.

[0029] Preferably, the bottom of the sliding rack 65 is in an inverted T-shaped structure, and the tensioning assembly 6 further comprises a first knob 67 fixedly installed on the middle of the bidirectional screw rod 63, and the surface of the first knob 67 is rough so as to facilitate the rotation of the bidirectional screw rod 63.

[0030] Preferably, the positioning assembly 7 comprises a double-headed sleeve rod 71 rotationally sleeved with the two glue setting cylinders 5 at the two ends thereof, a threaded frame 72 fixedly installed on the top surface of the sample disc 1, an adjusting screw rod 73 threadedly installed on the top of the threaded frame 72, and a second knob 74 fixedly connected at one end of the adjusting screw rod 73 and having a rough surface.

[0031] Specifically, by rotating the adjusting screw rod 73 through the second knob 74, the adjusting screw rod 73 can be moved forward and backward along the threaded frame 72, and the two glue setting cylinders 5 at the two ends of the double-headed sleeve rod 71 can be synchronously moved, so that the position of the conductive glue can be adjusted after the conductive glue is applied, to ensure that the conductive glue is located as much as possible in the middle of the sample disc 1, thereby avoiding uneven scanning of the electron beam on the sample and affecting the analysis of the surface morphology and structure of the sample.

[0032] Preferably, the sample disc 1, the suspension frame 2, the sleeve roller 3 and the glue setting cylinders 5 are all made of conductive metal material. Since the electron beam continuously bombards the surface of the sample during the operation of the electron microscope, if the conductivity of the sample is poor, the electric charge is easy to accumulate on the surface in a large amount, resulting in problems such as flickering and distortion of the image due to the electric charge effect such as discharge phenomenon. Through the above structure, the electric charge accumulated on the surface of the sample can be conducted in time through the grounding structure of the scanning electron microscope, to ensure stable scanning of the electron beam and clear and stable image.

[0033] Preferably, the suspension frame 2 is in an inverted U-shaped structure.

[0034] Preferably, the two ends of the sleeve roller ring 3 are fixedly provided with anti-disengagement rings 31, and the outer diameter of the anti-disengagement ring 31 is larger than that of the sleeve roller ring 3, so as to prevent the glue cylinder 5 from slipping off the sleeve roller ring 3.

[0035] The working process of the utility model is as follows:

[0036] In use, the two ends of the conductive glue are respectively attached to the two glue cylinders 5, and through the forward and reverse rotation of the bidirectional screw rod 63 on the bearing seat 62, the two sliding racks 65 can slide linearly towards or away from each other along the surface of the sliding seat 64, so as to drive the two glue cylinders 5 to rotate in mirror image through the meshing of the gear ring 66, and the two glue cylinders 5 are controlled to rotate in mirror image to tension the conductive glue, so that the conductive glue is fixed, and the sample on the conductive glue is prevented from shaking in the scanning imaging process.

[0037] After the conductive glue is attached to the glue cylinder 5, the rotating adjusting screw rod 73 can be rotated to drive the two glue cylinders 5 at the two ends of the double-head sleeve rod 71 to move synchronously, so that the position of the conductive glue can be adjusted after the conductive glue is attached, to ensure that the conductive glue is located at the middle part of the sample disc 1 as much as possible.

[0038] Finally, it should be pointed out that: first, in the description of the present application, it should be pointed out that, unless otherwise specified and limited, the terms "installation", "connection", "connection" should be understood broadly, which can be mechanical connection or electrical connection, or the communication between two elements, or direct connection, "up", "down", "left", "right" and the like are only used to indicate the relative positional relationship, when the absolute position of the described object changes, the relative positional relationship may change;

[0039] Secondly: the utility model discloses the embodiment of the drawings, only relates to the structure involved in the embodiment of the present disclosure, other structures can refer to the usual design, in the case of no conflict, the same embodiment and different embodiments of the utility model can be combined with each other;

[0040] Finally: the above only for the preferred embodiment of the utility model, and does not limit the utility model, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A biological sample stage for a scanning electron microscope comprising a sample disc (1), characterised in that, The top surface of the sample disc (1) is fixedly provided with symmetrical overhanging frames (2), the middle part of the overhanging frame (2) is rotationally connected with a sleeve roller (3), the outer surface of the sleeve roller (3) is fixedly provided with a straight sliding strip (4), the outer surface of the sleeve roller (3) is sleeved with a glue setting cylinder (5), and the glue setting cylinder (5) can linearly slide along the outer surface of the sleeve roller (3) through the straight sliding strip (4), the sample disc (1) is further provided with a tightness adjusting assembly (6) capable of adjusting the tightness of the conductive glue on the glue setting cylinder (5) and a position adjusting assembly (7) for adjusting the position of the glue setting cylinder (5).

2. The biological sample stage for a scanning electron microscope of claim 1, wherein, The tightness adjusting assembly (6) comprises a tightness support (61) fixedly installed on the top surface of the sample disc (1), a bearing seat (62) fixedly installed on the middle part of the top surface of the tightness support (61), a bidirectional screw rod (63) rotationally connected on the bearing seat (62), a sliding seat (64) fixedly installed on the left and right sides of the top surface of the tightness support (61), a sliding rack (65) slidingly connected on the sliding seat (64) along the axial direction of the bidirectional screw rod (63), and the two sides of the bidirectional screw rod (63) are in threaded connection with the two sliding racks (65), respectively, and one end of the sleeve roller (3) is fixedly provided with a gear ring (66), and the sliding rack (65) is in meshing connection with the gear ring (66).

3. The biological sample stage for a scanning electron microscope of claim 2, wherein, The bottom of the sliding rack (65) is in inverted T-shaped structure, the tightness adjusting assembly (6) further comprises a first knob (67) fixedly installed on the middle part of the bidirectional screw rod (63), and the surface of the first knob (67) is rough.

4. The biological sample stage for a scanning electron microscope of claim 2, wherein, The position adjusting assembly (7) comprises a double-head sleeve rod (71) rotationally sleeved with the two glue setting cylinders (5), a threaded frame (72) fixedly installed on the top surface of the sample disc (1), an adjusting screw rod (73) screwedly installed on the top part of the threaded frame (72), and one end of the adjusting screw rod (73) is rotationally connected with the middle part of the double-head sleeve rod (71), and the other end is fixedly connected with a second knob (74) with a rough surface.

5. The biological sample stage for a scanning electron microscope of claim 1, wherein, The sample disc (1), the overhanging frame (2), the sleeve roller (3) and the glue setting cylinder (5) are all made of conductive metal material.

6. The biological sample stage for a scanning electron microscope of claim 1, wherein, The overhanging frame (2) is in inverted U-shaped structure.

7. The biological sample stage for a scanning electron microscope of claim 4, wherein, The two ends of the sleeve roller (3) are both fixedly provided with anti-dropping rings (31), and the outer diameter of the anti-dropping ring (31) is larger than that of the sleeve roller (3).

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