Online full-automatic semiconductor cleaning equipment

Abstract

The utility model discloses on-line full-automatic semiconductor cleaning equipment, which belongs to the technical field of semiconductor cleaning and comprises a base, a support frame is fixedly mounted at the top of the base, a first motor is fixedly mounted on the left side of the support frame, and the output end of the first motor is fixedly connected with a screw rod. The right side of the lead screw extends to an inner cavity of the supporting frame, the left side of the outer side of the lead screw is in threaded connection with a moving block, an electric push rod is fixedly installed at the bottom of the moving block, a placing frame is fixedly installed at the bottom of the electric push rod, an air drying groove is fixedly installed on the right side of the top of the base, and a supporting plate is fixedly installed on the right side of the air drying groove. A second motor is fixedly mounted on the right side of the supporting plate. The semiconductor material cleaning device can automatically clean a semiconductor material, reduces the labor amount of workers, improves the cleaning efficiency of the device, can quickly air-dry the cleaned semiconductor, avoids manual wiping of the workers, and improves the practicability of the device.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor cleaning technical field especially relates to an online full -automatic semiconductor cleaning equipment. BACKGROUND

[0002] Semiconductor is a kind of material with controllable conductivity, is widely used in modern electronic devices, also called microcircuit, microchip, integrated circuit, refers to the silicon chip containing integrated circuit, very small, often the part of computer or other electronic equipment, in the semiconductor manufacturing process, the impurities and pollutants on wafer surface need to use cleaning equipment to remove.

[0003] The existing cleaning equipment is all through artificial fetching semiconductor frame and is placed into equipment interior and is cleaned, increases the labor of staff, reduces the cleaning efficiency of device, and does not have the function of the quick air drying of semiconductor material, and through artificial wiping can cause damage to semiconductor material, brings certain economic loss;Therefore we propose an online full -automatic semiconductor cleaning equipment to solve this problem. UTILITY MODEL CONTENT

[0004] The utility model discloses a kind of online full -automatic semiconductor cleaning equipment, to solve the problem proposed in the above background technology.

[0005] To achieve the above object, the utility model adopts the following technical scheme:

[0006] An online full -automatic semiconductor cleaning equipment, including base, the top of the base is fixedly installed with support frame, the left side of the support frame is fixedly installed with first motor, the output end of the first motor is fixedly connected with lead screw, the right side of the lead screw extends to the inner chamber of support frame, the left side of the outer side of lead screw is screwed with moving block, the bottom of the moving block is fixedly installed with electric push rod, the bottom of the electric push rod is fixedly installed with placing frame, the right side of the top of base is fixedly installed with air drying groove, the right side of the air drying groove is fixedly installed with support plate, the right side of the support plate is fixedly installed with second motor, the output end of the second motor extends to the inside of support plate and is fixedly connected with half gear, the inner chamber of support plate is provided with moving frame, the top and bottom of the inner chamber of moving frame are fixedly installed with the toothed plate engaged with half gear, the left side of the moving frame is fixedly installed with air drying fan.

[0007] Preferably, the right side of the lead screw is rotatably connected with the right side of the inner chamber of the support frame, the left side of the inner chamber of the support frame is fixedly installed with first limit rod, the right side of the first limit rod penetrates the moving block and is fixedly connected with the right side of the inner chamber of the support frame.

[0008] Preferably, the top and bottom of the front and back sides of the inner cavity of the supporting plate are fixedly provided with second limiting rods, and the outer sides of the second limiting rods are in sliding contact with the inner part of the moving frame.

[0009] Preferably, the top of the base is fixedly provided with a first cleaning tank and a second cleaning tank from left to right, and the bottom of the left side of the first cleaning tank and the bottom of the right side of the second cleaning tank are both fixedly provided with a drain.

[0010] Preferably, the outer side of the first limiting rod is in sliding contact with the inner part of the moving block.

[0011] Preferably, the bottom of the base is fixedly provided with a foot pad at each corner.

[0012] Compared with the prior art, the device has the advantages that:

[0013] 1. In the device, the first motor and the electric push rod are started by an external controller, the electric push rod is extended to drive the placing frame to move downward, the placing frame is immersed in the first cleaning tank for cleaning, then the electric push rod is reset, the first motor is rotated in the forward direction to drive the screw rod to rotate, the screw rod drives the moving block in screw connection to move to the right, the placing frame is moved to the top of the second cleaning tank, then the placing frame is immersed in the second cleaning tank by the electric push rod for continuous cleaning, the semiconductor material can be automatically cleaned, the labor of the staff is reduced, and the cleaning efficiency of the device is improved.

[0014] 2. In the device, the second motor and the air-drying fan are started by an external controller, the second motor is rotated in the forward direction to drive the half gear to rotate, when the half gear is engaged with the toothed plate at the top, the moving frame is driven to move to the rear side, when the half gear is engaged with the toothed plate at the bottom, the moving frame is driven to move to the front side, and the moving frame drives the air-drying fan to move back and forth, the cleaned semiconductor can be quickly air-dried, manual wiping of the staff is avoided, and the practicability of the device is improved. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 A three-dimensional structure schematic view of an online full-automatic semiconductor cleaning device is provided in the device.

[0016] Figure 2 A sectional structure schematic view of an online full-automatic semiconductor cleaning device is provided in the device.

[0017] Figure 3 A partial structure schematic view of an online full-automatic semiconductor cleaning device is provided in the device.

[0018] Figure 4 A Figure 2 partial enlarged view of part A.

[0019] In the figure: 1, base; 2, support frame; 3, first motor; 4, screw rod; 5, moving block; 6, electric push rod; 7, placing frame; 8, first cleaning tank; 9, second cleaning tank; 10, air drying groove; 11, first limiting rod; 12, drain; 13, support plate; 14, second motor; 15, half gear; 16, moving frame; 17, toothed plate; 18, second limiting rod; 19, air drying fan; 20, foot pad. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0021] Reference Figures 1-4 An online full-automatic semiconductor cleaning equipment, including base 1, the top of base 1 is fixedly installed with support frame 2, the left side of support frame 2 is fixedly installed with first motor 3, the output end of first motor 3 is fixedly connected with screw rod 4, the right side of screw rod 4 extends to the inner cavity of support frame 2, the left side of the outer side of screw rod 4 is screwed with moving block 5, the bottom of moving block 5 is fixedly installed with electric push rod 6, the bottom of electric push rod 6 is fixedly installed with placing frame 7, the right side of the top of base 1 is fixedly installed with air drying groove 10, the right side of air drying groove 10 is fixedly installed with support plate 13, the right side of support plate 13 is fixedly installed with second motor 14, the output end of second motor 14 extends to the inside of support plate 13 and is fixedly connected with half gear 15, the inner cavity of support plate 13 is provided with moving frame 16, the top and bottom of the inner cavity of moving frame 16 are fixedly installed with toothed plate 17 engaged with half gear 15, the left side of moving frame 16 is fixedly installed with air drying fan 19.

[0022] In the embodiment, the right side of screw rod 4 is rotatably connected with the right side of the inner cavity of support frame 2, the left side of the inner cavity of support frame 2 is fixedly installed with first limiting rod 11, the right side of first limiting rod 11 penetrates moving block 5 and is fixedly connected with the right side of the inner cavity of support frame 2, the top and bottom of the inner cavity of support plate 13 are fixedly installed with second limiting rod 18, the outer side of second limiting rod 18 is in sliding contact with the inside of moving frame 16, through second limiting rod 18, moving frame 16 can be limited, and the stability of the movement of air drying fan 19 is improved.

[0023] In the embodiment, the top of base 1 is sequentially fixedly installed with first cleaning tank 8 and second cleaning tank 9 from left to right, the bottom of the left side of first cleaning tank 8 and the bottom of the right side of second cleaning tank 9 are fixedly provided with drain 12, the outer side of first limiting rod 11 is in sliding contact with the inside of moving block 5, the four corners of the bottom of base 1 are fixedly installed with foot pad 20, through first limiting rod 11, moving block 5 can be limited, and the stability of the movement of placing frame 7 is improved.

[0024] In this embodiment, in use, the first motor 3 and the electric push rod 6 are started by an external controller, the electric push rod 6 is extended to drive the placing frame 7 to move downwards, the placing frame 7 is immersed in the first cleaning tank 8 for cleaning, then the electric push rod 6 is reset, the first motor 3 is rotated to drive the lead screw 4 to rotate, the lead screw 4 drives the moving block 5 connected with the lead screw 4 to move to the right, the placing frame 7 is moved to the top of the second cleaning tank 9, then the placing frame 7 is immersed in the second cleaning tank 9 by the electric push rod 6 to continue cleaning, the semiconductor material can be automatically cleaned, then the above operation is repeated, the placing frame 7 is moved to the inside of the air-drying tank 10, the second motor 14 and the air-drying fan 19 are started by an external controller, the second motor 14 is rotated to drive the half gear 15 to rotate, when the half gear 15 is engaged with the toothed plate 17 at the top, the moving frame 16 is driven to move to the rear side, when the half gear 15 is engaged with the toothed plate 17 at the bottom, the moving frame 16 is driven to move to the front side, the moving frame 16 drives the air-drying fan 19 to move back and forth, the semiconductor after cleaning can be quickly air-dried.

[0025] The online full-automatic semiconductor cleaning equipment is described in detail. The principle and implementation of the present application are described by using specific examples. The above examples are used to help understand the method and core idea of the present application. It should be pointed out that, for ordinary skilled persons in the technical field, without departing from the principle of the present application, the present application can be improved and modified in many ways, and these improvements and modifications also fall within the protection scope of the present application.

Claims

1. An online fully automatic semiconductor cleaning device, comprising a base (1), characterized in that: A support frame (2) is fixedly installed on the top of the base (1). A first motor (3) is fixedly installed on the left side of the support frame (2). A lead screw (4) is fixedly connected to the output end of the first motor (3). The right side of the lead screw (4) extends into the inner cavity of the support frame (2). A moving block (5) is screwed to the left side of the outer side of the lead screw (4). An electric push rod (6) is fixedly installed at the bottom of the moving block (5). A placement frame (7) is fixedly installed at the bottom of the electric push rod (6). A drying trough (1) is fixedly installed on the right side of the top of the base (1). 0), a support plate (13) is fixedly installed on the right side of the air drying trough (10), a second motor (14) is fixedly installed on the right side of the support plate (13), the output end of the second motor (14) extends into the interior of the support plate (13) and is fixedly connected to a half gear (15), a movable frame (16) is provided in the inner cavity of the support plate (13), a toothed plate (17) that meshes with the half gear (15) is fixedly installed at the top and bottom of the inner cavity of the movable frame (16), and an air drying fan (19) is fixedly installed on the left side of the movable frame (16).

2. The online fully automatic semiconductor cleaning equipment according to claim 1, characterized in that: The right side of the lead screw (4) is rotatably connected to the right side of the inner cavity of the support frame (2). A first limiting rod (11) is fixedly installed on the left side of the inner cavity of the support frame (2). The right side of the first limiting rod (11) passes through the moving block (5) and is fixedly connected to the right side of the inner cavity of the support frame (2).

3. The online fully automatic semiconductor cleaning equipment according to claim 1, characterized in that: The second limiting rod (18) is fixedly installed on the top and bottom of the front and rear sides of the inner cavity of the support plate (13), and the outer side of the second limiting rod (18) slides in contact with the inside of the moving frame (16).

4. The online fully automatic semiconductor cleaning equipment according to claim 1, characterized in that: The base (1) has a first cleaning tank (8) and a second cleaning tank (9) fixedly installed on its top from left to right. Drainage outlets (12) are fixedly opened on the bottom left side of the first cleaning tank (8) and the bottom right side of the second cleaning tank (9).

5. The online fully automatic semiconductor cleaning equipment according to claim 2, characterized in that: The outer side of the first limiting rod (11) slides in contact with the inside of the moving block (5).

6. The online fully automatic semiconductor cleaning equipment according to claim 1, characterized in that: Foot pads (20) are fixedly installed at the four corners of the bottom of the base (1).

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