Exercise device

Abstract

The utility model belongs to the technical field of semiconductor equipment, and provides a motion device which comprises a motion part, a bearing frame body, a vibration reduction part and a failure detection part, a first to-be-debugged piece and a second to-be-debugged piece to be aligned are placed on the motion part, the motion part is located above the bearing frame body, two opposite ends of the vibration reduction part are connected to the motion part and the bearing frame body respectively, and the failure detection part is located above the vibration reduction part. The failure detection part is connected to the moving part and / or the bearing frame body and is used for detecting the spacing distance between the moving part and the bearing frame body, when the spacing distance is too small or too large, it is judged that the vibration reduction part fails, and then the moving device can be controlled to stop working in time; the to-be-debugged part and the motion device are prevented from being further damaged, and the working reliability of the motion device is effectively improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor equipment, in particular to a motion device. BACKGROUND

[0002] Integrated circuits are the core of modern electronic technology, by integrating thousands of electronic components into a small chip, greatly improving the performance of electronic products. With the rapid development of integrated circuit industry, the performance and yield of chip products are also increasingly high. In the manufacturing process of integrated circuits, wafer alignment technology is one of the key processes to ensure the performance and yield of chips, and has important application in bonding, lithography and other fields. Wafer alignment technology requires precise alignment between wafers to ensure that circuit patterns can be accurately transferred and copied in subsequent process flow. Wafer alignment requires the use of precision alignment devices for high-precision linear movement and angular rotation to achieve precise alignment.

[0003] However, in the prior art, due to the high precision of the wafer alignment device and the complex working condition, the working state of the damper in the alignment device will seriously affect the alignment accuracy and yield of the wafer, and when the damper fails, the alignment process cannot be stopped in time, which may cause irreversible damage to the wafer, and even damage to the alignment equipment. Based on this, the present application provides a motion device which can effectively judge whether the damper is failed to ensure the normal operation of the equipment and prevent damage to the wafer or equipment due to the failure of the damper. CONTENT OF THE UTILITY MODEL

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present application is to provide a motion device for solving the problems of easy damage to devices and equipment caused by damper failure in the prior art, which can effectively judge whether the damper is failed to prevent damage to devices and equipment caused by damper failure.

[0005] To achieve the above-mentioned purposes and other related purposes, the present application provides a motion device, comprising a motion part, a bearing frame, a damping part and a failure detection part.

[0006] The first and second to-be-adjusted parts to be aligned are placed on the motion part, the motion part is located above the bearing frame, the damping part is connected to the bearing frame and the motion part at opposite ends, so that the motion part is spaced apart from the bearing frame, and the failure detection part is connected to the motion part and / or the bearing frame, for detecting the spacing distance between the motion part and the bearing frame.

[0007] Optionally, the failure detection part comprises at least three non-collinear failure detection modules, and the at least three failure detection modules are spaced apart from each other between the motion part and the bearing frame.

[0008] Optionally, the top surface of the bearing frame is a polygonal structure, and the at least three failure detection modules are respectively arranged at different top corner regions of the top surface of the bearing frame.

[0009] Optionally, the top surface of the bearing frame is a rectangular structure, and the failure detection unit includes three failure detection modules, and the three failure detection modules are respectively arranged at three top corner regions of the top surface of the bearing frame.

[0010] Optionally, the top surface of the bearing frame is a polygonal structure, and each side of the top surface of the bearing frame corresponds to at least one failure detection module.

[0011] Optionally, the failure detection module includes a fixed sheet, a sensing sheet, a first limit sensor and a second limit sensor.

[0012] The fixed sheet is connected to the bearing frame, the first limit sensor and the second limit sensor are connected to the fixed sheet, and the first limit sensor is arranged above the second limit sensor, and the sensing sheet is connected below the moving part.

[0013] When the interval distance is a second distance, the sensing sheet triggers the first limit sensor.

[0014] When the interval distance is a first distance, the sensing sheet triggers the second limit sensor.

[0015] Wherein, the first distance is less than the second distance.

[0016] Optionally, the sensing sheet includes a sheet body and a sensing tab, the sheet body is fixedly connected below the moving part, and the sensing tab is displaced from one end of the sheet body away from the moving part and located on a side of the sheet body close to the first limit sensor and the second limit sensor.

[0017] Optionally, the first limit sensor is provided with a first limit hole slot, and the second limit sensor is provided with a second limit hole slot.

[0018] When the interval distance is the second distance, the sensing tab is located in the first limit hole slot.

[0019] When the interval distance is the first distance, the sensing tab is located in the second limit hole slot.

[0020] When the interval distance is greater than the first distance and less than the second distance, the sensing tab is located outside the first limit hole slot and the second limit hole slot.

[0021] Optionally, the failure detection module comprises a distance detector, the distance detector is connected to the bearing frame, and a detection surface of the distance detector faces the moving part to detect a distance between the moving part and the distance detector.

[0022] Optionally, the moving part comprises a first moving platform and a second moving platform, the first moving platform has a first placement area thereon, the second moving platform has a second placement area thereon, the first placement area and the second placement area are arranged in an up-down interval, the first to-be-adjusted component is placed on the first placement area, and the second to-be-adjusted component is placed on the second placement area.

[0023] As described above, the moving device provided by the application has at least the following beneficial effects:

[0024] The failure detection part is arranged in the moving device, the failure detection part comprises at least three non-collinear failure detection modules, the interval distance between the moving part and the bearing frame can be monitored in real time, when the interval distance is too small or too large, it is determined that the damping part is failure, and then the moving device can be controlled to stop working in time, further damage to the to-be-adjusted component or the moving device is avoided, real-time monitoring of the working state of the damping part is realized, the risk of damage to the to-be-adjusted component and the moving device is reduced, the working reliability of the moving device is improved, and the service life of the moving device is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0026] Figure 1 A structure schematic diagram of the moving device provided by the first embodiment of the application is shown.

[0027] Figures 2 to 4 Structure schematic diagrams of different arrangement modes of the failure detection module provided by the first embodiment of the application are shown respectively.

[0028] Figure 5 A structure schematic diagram of the failure detection module provided by the first embodiment of the application is shown.

[0029] Figure 6 A structure schematic diagram of the failure detection module provided by the first embodiment of the application is shown. Figure 5 A partial enlarged view of the first limiting sensor and the second limiting sensor in the failure detection module is shown.

[0030] Figure 7A structure diagram of a moving part is shown as an optional embodiment of the embodiment one of the present application.

[0031] Figure 8 A structure diagram of a moving device is shown as the embodiment two of the present application.

[0032] Reference signs are shown as follows:

[0033] 10, moving part; 11, first moving platform; 111, first carrier; 1111, first placement area; 112, first base; 12, second moving platform; 121, second carrier; 1211, second placement area; 122, second base; 20, damping part; 30, failure detection part; 31, failure detection module; 310, distance detector; 311, fixed sheet; 312, sensing sheet; 3121, sensing tab; 3122, sheet body; 313, first limit sensor; 3131, first limit hole slot; 314, second limit sensor; 3141, second limit hole slot; 40, bearing frame. DETAILED DESCRIPTION

[0034] In order to make the technical purposes, technical solutions and technical effects of the present application clearer, the technical solutions of the present application will be described clearly and completely in combination with embodiments below. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0035] Therefore, the detailed description of the embodiments of the present application below is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present application. In addition, the terms “first”, “second” are only for description purposes, and cannot be understood as indicating or implying relative importance.

[0036] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms “center”, “longitudinal”, “transverse”, “upper”, “lower”, “front”, “rear”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inner”, “outer” and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0037] In the description of the application, it should be noted that unless otherwise explicitly defined and limited, the terms "mounting", "connection", "connecting" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection. In addition, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the application. In the description, the exemplary description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0038] Embodiment one

[0039] The embodiment provides a motion device for realizing alignment positioning between a first to-be-adjusted part and a second to-be-adjusted part, for example, a wafer or other suitable device. Referring to Figure 1 The motion device of the embodiment includes a motion part 10, a damping part 20, a failure detection part 30 and a bearing frame 40.

[0040] The first to-be-adjusted part and the second to-be-adjusted part to be aligned are placed on the motion part 10, and the motion part 10 is used to align and position the first to-be-adjusted part and the second to-be-adjusted part. The motion part 10 is arranged above the bearing frame 40, and the damping part 20 is arranged between the motion part 10 and the bearing frame 40, used to isolate the vibration transmission between the bearing frame 40 and the motion part 10, and the damping part 20 is connected to the bearing frame 40 and the motion part 10 at opposite ends, so that the motion part 10 and the bearing frame 40 are arranged in a spaced manner. The failure detection part 30 is connected to the motion part 10 and / or the bearing frame 40, used to detect the spacing distance between the motion part 10 and the bearing frame 40, through the spacing distance, the working state of the damping part 20 can be reflected, when the spacing distance is too large or too small, it means that the damping part 20 is out of work, at this time, the motion device should be controlled to stop the alignment work, so as to avoid damage to the first to-be-adjusted part, the second to-be-adjusted part or the motion device, and improve the working reliability of the motion device.

[0041] In this embodiment, the failure detection part 30 includes at least three non-collinear failure detection modules 31, and the plurality of failure detection modules 31 are arranged between the moving part 10 and the bearing frame 40. Through the at least three non-collinear failure detection modules 31, the interval distance between the two planes of the moving part 10 and the bearing frame 40 can be monitored, and the parallelism between the moving part 10 and the bearing frame 40 can be reflected. When one or more of the failure detection modules 31 detect that the interval distance between the two planes is abnormal, it means that the damping part 20 is out of order, that is, the alignment operation can be stopped in time.

[0042] In an optional embodiment, the top surface of the bearing frame 40 is a polygonal structure, and the failure detection modules 31 are arranged at different corner regions of the top surface of the bearing frame 40. For example, one failure detection module 31 can be arranged at each corner region of the top surface of the bearing frame 40, or the failure detection modules 31 can be uniformly and spacedly arranged around the periphery of the top surface of the bearing frame 40, or can be arranged at part of the corner regions of the top surface of the bearing frame 40. It should be noted that the arrangement position of the failure detection modules 31 on the top surface of the bearing frame 40 should be dispersed enough to improve the accuracy of the detection effect of judging whether the damping part 20 is out of order.

[0043] In an optional embodiment, referring to Figure 2 and Figure 3 , the top surface of the bearing frame 40 is a rectangular structure, for example, a rectangular structure or a square structure, and the failure detection part 30 includes three failure detection modules 31, which are arranged at three corner regions of the top surface of the bearing frame 40. Through the three failure detection modules 31, the distance and parallelism between the moving part 10 and the bearing frame 40 can be detected, and the effective detection of whether the damping part 20 is out of order can be realized. Alternatively, the failure detection part 30 includes four failure detection modules 31, which are arranged at four corner regions of the top surface of the bearing frame 40.

[0044] In an optional embodiment, the top surface of the bearing frame 40 is a polygonal structure, and at least one failure detection module 31 is arranged on each side of the top surface of the bearing frame 40. For example, one failure detection module 31 is arranged on each side of the top surface of the bearing frame 40, or at least one failure detection module 31 can be arranged on part of the sides of the top surface of the bearing frame 40. The failure detection modules 31 can also be arranged at the corner regions of the top surface of the bearing frame 40, or at the middle regions corresponding to each side of the bearing frame 40.

[0045] In an optional embodiment, referring to Figure 4The top surface of the bearing frame 40 is in a rectangular structure, and the failure detection part 30 includes three failure detection modules 31, which are respectively arranged at the center regions corresponding to the three edges of the top surface of the bearing frame 40. Alternatively, the failure detection part includes four failure detection modules 31, which are respectively arranged at the center regions corresponding to the four edges of the top surface of the bearing frame 40.

[0046] In the embodiment, with reference to Figure 5 The failure detection module 31 includes a fixed sheet 311, a sensing sheet 312, a first limit sensor 313, and a second limit sensor 314. The fixed sheet 311 is connected to the bearing frame 40, the first limit sensor 313 and the second limit sensor 314 are connected to the fixed sheet 311, and the first limit sensor 313 is arranged above the second limit sensor 314, and the second limit sensor 314 is closer to the bearing frame 40 than the first limit sensor 313. The sensing sheet 312 is connected below the moving assembly. When the interval distance between the moving part 10 and the bearing frame 40 at the position of the failure detection module 31 is a second distance, the sensing sheet 312 triggers the first limit sensor 313, and when the interval distance between the moving part 10 and the bearing frame 40 at the position of the failure detection module 31 is a first distance, the sensing sheet 312 triggers the second limit sensor 314, thereby realizing real-time monitoring of the interval distance between the moving part 10 and the bearing frame 40. When the damping part 20 fails, the motion device can be controlled to stop working in time to prevent further damage to the object to be debugged or the motion device. The first distance is smaller than the second distance, and the first distance can be understood as the minimum distance between the moving part 10 and the bearing frame 40 when the damping part 20 is working normally, and the second distance can be understood as the maximum distance between the moving part 10 and the bearing frame 40 when the damping part 20 is working normally.

[0047] In an optional embodiment, the fixed sheet 311 includes a bottom plate and a vertical plate, and the vertical plate is vertically connected to the top of the bottom plate. Optionally, the fixed sheet 311 is in an L-shaped structure, and the end of the vertical plate is vertically connected to the end of the bottom plate to form the L-shaped fixed sheet 311. The bottom plate of the fixed sheet 311 can be fixedly connected to the bearing frame 40 by bolts, or can be fixedly connected to the bearing frame 40 by adhesion or other suitable methods, and the first limit sensor 313 and the second limit sensor 314 are connected to one side of the vertical plate of the fixed sheet 311.

[0048] In an optional embodiment, with reference to Figure 6The sensing sheet 312 includes a sheet body 3122 and a sensing tab 3121. The sheet body 3122 is fixedly connected to the lower portion of the moving part 10. The sensing tab 3121 is connected to one end of the sheet body 3122 away from the moving part 10 and is located on the side of the sheet body 3122 close to the first limit sensor 313 and the second limit sensor 314, for triggering the first limit sensor 313 or the second limit sensor 314. The sensing sheet 312 can adopt an integrated structure, in which the sensing tab 3121 is integrally formed with the sheet body 3122, or a discrete structure, in which the sensing tab 3121 is connected to one end of the sheet body 3122 away from the moving part 10. Optionally, the sheet body 3122 is a thin sheet in the shape of an inverted L. One horizontal side of the sheet body 3122 is fixedly connected to the lower portion of the moving part 10, and the other vertical side extends between the first limit sensor 313 and the second limit sensor 314.

[0049] Further, also referring to Figure 6 The first limit sensor 313 is provided with a first limit hole slot 3131, and the second limit sensor 314 is provided with a second limit hole slot 3141. When the interval distance between the moving part 10 at the position of the failure detection module 31 and the bearing frame 40 is a first distance, the sensing tab 3121 is located in the second limit hole slot 3141 to trigger the second limit sensor 314. When the interval distance between the moving part 10 at the position of the failure detection module 31 and the bearing frame 40 is a second distance, the sensing tab 3121 is located in the first limit hole slot 3131 to trigger the first limit sensor 313. When the interval distance at the position of the failure detection module is greater than the first distance and less than the second distance, the sensing tab 3121 is located outside the first limit hole slot 3131 and the second limit hole slot 3141. Optionally, when the interval distance is between the first distance and the second distance, the sensing tab 3121 is located between the first limit hole slot 3131 and the second limit hole slot 3141 in the vertical direction. When the interval distance decreases to the first distance, the sensing tab 3121 moves into the second limit hole slot 3141 to trigger the second limit sensor 314. When the interval distance increases to the second distance, the sensing tab 3121 moves into the first limit hole slot 3131 to trigger the first limit sensor 313.

[0050] Further, the first distance and the second distance can be adaptively set according to the size of the damping part 20. Specifically, for example, when the distance between the moving part 10 and the bearing frame 40 is 90mm-100mm after the damping part 20 is installed, the damping part 20 is in an effective state; when the interval distance between the moving part 10 and the bearing frame 40 is reduced to less than or equal to 90mm, the damper 20 is in an ineffective state and triggers the second limit sensor 314; when the interval distance between the moving part 10 and the bearing frame 40 is increased to greater than or equal to 100mm, the damper 20 is in an ineffective state and triggers the first limit sensor 313.

[0051] In the embodiment, with reference to Figures 2 to 4 , the damping part 20 includes a plurality of damping structures, which are arranged at intervals between the moving part 10 and the bearing frame 40. The damping part 20 may, for example, include four, five, six or more damping structures arranged at intervals. Alternatively, the damping part 20 includes four damping structures, and the top surface of the bearing frame 40 is a rectangular structure, and the four damping structures are arranged at the four corner regions of the top surface of the bearing frame 40, respectively.

[0052] In an optional embodiment, with reference to Figure 7 , the moving part 10 includes a first moving platform 11 and a second moving platform 12, the first moving platform 11 has a first placement area 1111 thereon, and the second moving platform 12 has a second placement area 1211 thereon, the first placement area 1111 and the second placement area 1211 are arranged at intervals in the up-down direction, a first to-be-adjusted component is placed on the first placement area 1111, and a second to-be-adjusted component is placed on the second placement area 1211. The first placement area 1111 can move on the first moving platform 11 towards the second placement area 1211, and / or the second placement area 1211 can move on the second moving platform 12 towards the first placement area 1111, so as to realize the alignment positioning between the first to-be-adjusted component and the second to-be-adjusted component.

[0053] Further, the first moving platform 11 includes a first carrier 111 and a first base 112 for bearing the first carrier 111, the first placement area 1111 is located on the first carrier 111, and the first carrier 111 can move towards the second carrier 121, so as to drive the first placement area 1111 to move towards the second placement area 1211. The second moving platform 12 can be arranged in a fixed structure or in a movable structure.

[0054] Further, the second motion platform 12 comprises a second carrier 121 and a second base 122 for carrying the second carrier 121, and a second placement area 1211 is located on the second carrier 121, and the second carrier 121 is capable of moving towards the first carrier 111 to drive the second placement area 1211 to move close to the first placement area 1111. The first motion platform 11 can be fixed or movable.

[0055] In summary, the motion device of the embodiment is provided with at least three non-collinear failure detection modules 31, through the inductive sheet 312 in the failure detection module 31, and in cooperation with the first limit sensor 313 and the second limit sensor 314, the interval distance between the motion part 10 and the bearing frame 40 is monitored in real time, when the interval distance is too small or too large, the second limit sensor 314 or the first limit sensor 313 can timely send out an alarm, and then the motion device is controlled to stop working in time, preventing the damage of the to-be-adjusted part or the damage of the motion device caused by the failure of the damping part 20, and the first distance and the second distance for controlling the interval distance range can be set in advance, without directly measuring the value of the interval distance, so that the failure detection module 31 has good working stability. It can be seen that the motion device of the embodiment reduces the risk of damage to the to-be-adjusted part, effectively improves the working reliability of the motion device, and prolongs the service life.

[0056] Embodiment two

[0057] The embodiment provides another motion device, which also comprises the motion part 10, the damping part 20 and the bearing frame 40 in the embodiment one, and the same parts as those in the embodiment one are not described herein, and the difference lies in that Figure 8 The failure detection module 31 of the embodiment comprises a distance detector 310, the distance detector 310 is located between the motion part 10 and the bearing frame 40 and connected to the bearing frame 40, the detection surface of the distance detector 310 faces the motion part 10, and the distance detector 310 is used for detecting the distance between the motion part 10 and the distance detector 310. Optionally, the distance detector 310 is a distance measuring sensor, for example, a laser range finder, which can directly measure the distance between the distance measuring sensor and the motion part 10 at the current position. When the damping part 20 works, at least three groups of interval distances between the motion part 10 and the bearing frame 40 measured by the distance detector 310 can be used to determine whether the interval distance value is within the distance range of the normal working state of the damping part 20, and then determine whether the damper is failed, so as to realize real-time monitoring of the working state of the damping part 20.

[0058] The above embodiments are only illustrative of the principles of the present application and its effects, and are not intended to limit the present application. Any modification, change or combination of the above embodiments made by those skilled in the art without departing from the spirit and scope of the present application shall be covered by the claims of the present application.

Claims

1. A motion device, characterized in that, It includes a motion unit (10), a load-bearing frame (40), a vibration damping unit (20), and a failure detection unit (30); The first and second components to be aligned are placed on the moving part (10), which is located above the support frame (40). The two ends of the vibration damping part (20) are respectively connected to the support frame (40) and the moving part (10) so that the moving part (10) and the support frame (40) are spaced apart. The failure detection part (30) is connected to the moving part (10) and / or the support frame (40) to monitor the distance between the moving part (10) and the support frame (40).

2. The motion device according to claim 1, characterized in that, The failure detection unit (30) includes at least three non-collinear failure detection modules (31), which are spaced apart from each other between the moving part (10) and the supporting frame (40).

3. The motion device according to claim 2, characterized in that, The top surface of the support frame (40) is a polygonal structure, and the at least three failure detection modules (31) are respectively located at different corner areas of the top surface of the support frame (40).

4. The motion device according to any one of claims 1 to 3, characterized in that, The top surface of the support frame (40) is a rectangular structure. The failure detection unit (30) includes three failure detection modules (31), which are respectively located at the three apex corners of the top surface of the support frame (40).

5. The motion device according to claim 2, characterized in that, The top surface of the support frame (40) is a polygonal structure, and each side of the top surface of the support frame (40) is provided with at least one failure detection module (31).

6. The motion device according to claim 2, characterized in that, The failure detection module (31) includes a fixed plate (311), a sensing plate (312), a first limit sensor (313), and a second limit sensor (314); The fixing plate (311) is connected to the support frame (40), the first limiting sensor (313) and the second limiting sensor (314) are connected to the fixing plate (311), and the first limiting sensor (313) is spaced above the second limiting sensor (314), and the sensing plate (312) is connected to the lower part of the moving part (10); When the interval distance is the second distance, the sensing sheet (312) triggers the first limit sensor (313); When the interval distance is the first distance, the sensing sheet (312) triggers the second limit sensor (314); Wherein, the first distance is less than the second distance.

7. The motion device according to claim 6, characterized in that, The sensing plate (312) includes a plate body (3122) and a sensing protrusion (3121). The plate body (3122) is fixedly connected to the lower part of the moving part (10). The sensing protrusion (3121) is located at one end of the plate body (3122) away from the moving part (10) and on the side of the plate body (3122) close to the first limit sensor (313) and the second limit sensor (314).

8. The motion device according to claim 7, characterized in that, The first limiting sensor (313) is provided with a first limiting hole (3131), and the second limiting sensor (314) is provided with a second limiting hole (3141); When the interval distance is the second distance, the sensing protrusion (3121) is located in the first limiting hole groove (3131); When the interval distance is the first distance, the sensing protrusion (3121) is located in the second limiting hole groove (3141); When the interval distance is greater than the first distance and less than the second distance, the sensing protrusion is located outside the first limiting hole groove and the second limiting hole groove.

9. The motion device according to claim 2, characterized in that, The failure detection module (31) includes a distance detector (310), which is connected to the support frame (40) and the detection surface of the distance detector (310) faces the moving part (10) to detect the distance between the moving part (10) and the distance detector (310).

10. The motion device according to claim 1, characterized in that, The motion unit (10) includes a first motion platform (11) and a second motion platform (12). The first motion platform (11) has a first placement area (1111), and the second motion platform (12) has a second placement area (1211). The first placement area (1111) and the second placement area (1211) are arranged vertically at intervals. The first component to be debugged is placed in the first placement area (1111), and the second component to be debugged is placed in the second placement area (1211).

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