Crystal bar online cleaning device

Abstract

The utility model discloses an on-line cleaning device for a crystal bar. The on-line cleaning device comprises a rack which stretches across a plurality of conveying belts arranged side by side. A transverse rail crossing all the conveying belts is horizontally arranged on the rack; the device further comprises a sliding frame capable of moving along the transverse rail, and the sliding frame is provided with a liftable stand column and a clamp which ascends and descends along with the stand column. The clamp comprises clamping ends arranged front and back in the axial direction of the conveying belt. The cleaning station is used for cleaning, after the clamp clamps the crystal bar on the conveying belt, the crystal bar is conveyed to the cleaning station on one side of the rack along with the sliding frame, and the crystal bar is driven to rotate during cleaning; an online cleaning mechanism is arranged on the cleaning station; the online cleaning mechanism comprises a rotating cleaning part, and the cleaning part can do reciprocating rectilinear motion in the axial direction of the crystal bar to wipe the side face of the crystal bar. The crystal bar turnover mechanism can quickly clamp, transport and turn over crystal bars on a production line, and the side faces of the crystal bars are cleaned while appearance defect detection is carried out.

Description

TECHNICAL FIELD

[0001] The utility model belongs to crystal bar production technical field especially relates to a crystal bar on -line cleaning device. BACKGROUND

[0002] Crystal bar is the basic material of semiconductor production. After the crystal grows, it needs to be cut into a certain length of crystal bar for transportation and use. Before processing the crystal bar, the crystal bar needs to be cleaned and appearance detected, and the crystal bar can be put into use after passing the detection. Usually, the crystal bar needs to be turned over by a crystal bar turning equipment to clean the side of the crystal bar and appearance detect.

[0003] In the process of appearance detection and cleaning, each side of the crystal bar needs to be observed and cleaned. However, the weight of a single crystal bar is generally about 300 kg, so it is difficult to turn over manually. In addition, an artificial cleaning station is usually provided on the appearance detection station, and the side of the crystal bar is cleaned by artificial during the appearance detection. The artificial cleaning efficiency is low and the consistency is poor.

[0004] The prior art Chinese patent application CN202111490952.2 discloses a crystal bar turning equipment and a crystal bar turning method. The crystal bar turning equipment includes a base, a bearing component on the base, a clamping component on the base, a rotating component on the clamping component, and a detection component. The bearing component moves relative to the base in a direction perpendicular to the bottom surface of the base to perform loading and unloading steps on the crystal bar. The clamping component includes a fixed end and a moving end. The detection component includes a detection module for detecting whether the position of the unloading surface of the crystal bar meets the preset position. A first control unit is in communication with the rotating component. If the position of the unloading surface does not meet the preset position, the detection module sends a first feedback signal to the first control unit. The first control unit controls the crystal bar to turn over based on the first feedback signal until the position of the unloading surface meets the preset position.

[0005] In the above-mentioned prior art, the crystal bar needs to be transferred to the clamping component by the bearing component before turning over. For online detection, the process is complicated and the efficiency is low.

[0006] Another prior art Chinese patent application CN202220956224.X discloses a crystal bar cleaning assembly line, which includes a crystal bar conveying line. The crystal bar conveying line has a loading end and an unloading end. The crystal bar conveying line is provided with a cleaning station and an air cutting station from the loading end to the unloading end. The cleaning station includes a crystal bar top surface cleaning station and a crystal bar side surface cleaning station.

[0007] In the above-mentioned prior art, the cleaning station is a separate station, which cannot clean the crystal bar while appearance detecting, resulting in an increase in process steps and a reduction in production efficiency. Utility model content

[0008] Therefore, the utility model provides a kind of crystal bar online inspection cleaning device, can be quickly clamped transport and overturn to the crystal bar on production line, while cleaning the side of crystal bar when carrying out appearance defect detection.

[0009] To solve above technical problem, the technical scheme of the utility model is to adopt a kind of crystal bar online cleaning device, including the rack that is across to several side-by-side arrangement's conveying belt;Horizontal setting is provided with the transverse rail that crosses all conveying belt on the rack;Still include the sliding frame that can move along transverse rail, the lifting column that is set on the sliding frame can be lifted and the clamp that lifts along lifting column;The clamp includes the clamping end that is set axially before and after along conveying belt;Two clamping ends are located at the same height, and can be mutually close or away for clamping or releasing crystal bar;Two clamping ends can be rotated synchronously, to drive the crystal bar that is clamped and rotates along its axis;Still include the cleaning station for carrying out cleaning, after the clamp clamps the crystal bar on conveying belt, follow sliding frame and transport crystal bar to the cleaning station on the one side of rack, and drive crystal bar to rotate when cleaning;

[0010] Setting has online cleaning mechanism on the cleaning station;The online cleaning mechanism includes rotating cleaning component, and the cleaning component can reciprocate linear motion along the axis of crystal bar and wipe the side of crystal bar.

[0011] As an improvement, the online cleaning mechanism further includes a back plate provided on the cleaning station, the back plate is arranged vertically and parallel to the conveying belt;The front surface of the back plate is provided with a cleaning track parallel to the conveying belt, and a cleaning trolley is arranged on the cleaning track and capable of moving back and forth along the cleaning track;The cleaning component is fixed on the cleaning trolley.

[0012] As a further improvement, the cleaning trolley is provided with a mounting plate, and the cleaning component is rotatably fixed on the mounting plate and driven by a cleaning motor.

[0013] As another further improvement, a screw is arranged parallel to the cleaning track, a threaded sleeve is fixed on the cleaning trolley and threadedly connected with the screw, and a driving motor is arranged for driving the screw to rotate.

[0014] As an improvement, the driving motor is fixed on the back surface of the back plate, and the screw is driven to rotate by a belt.

[0015] As an improvement, the cleaning component is in the shape of a cylinder, and the side wall of the cleaning component is made of flannel.

[0016] As a kind of improvement, the transverse rail includes boss arranged axially along transverse rail, and the sliding frame is provided with groove matched with the boss for sliding;The transverse rail is provided with parallel translational rack with the boss, and the sliding frame is provided with translational gear engaged with the translational rack;The translational gear is driven by translational motor.

[0017] As a kind of improvement, the sliding frame is provided with support plate;The opposite sides of the column are provided with sliding rail parallel with the column, and the support plate is provided with sliding groove matched with the sliding rail for sliding;The column is further provided with lifting rack parallel with the sliding rail, and the support plate is provided with lifting gear engaged with the lifting rack;The lifting gear is driven by lifting motor.

[0018] As a kind of improvement, the clamp includes crossbeam fixed at the bottom of the column, and the clamping end can move along the crossbeam;Further comprising screw rod arranged in parallel with the crossbeam, the clamping end is threadedly matched with the screw rod through internal thread, and the internal thread directions of the two clamping ends are opposite, so that when the screw rod rotates, the two clamping ends move in opposite directions.

[0019] As a kind of improvement, the clamping end includes disc-shaped base, and the base end faces of the left and right two clamping ends are oppositely arranged;The base end face is coated with soft pad.

[0020] The utility model discloses the beneficial effect that:

[0021] The crystal bar on -line cleaning device with the above structure, through the automatic grabbing of production line and sending to the cleaning station for cleaning, can also carry out appearance detection while cleaning.Crystal bar does not need to transfer between equipment, one -time completion grabs and rotates crystal bar when cleaning and detecting, so as to realize the cleaning and appearance detection of each side, and send back to production line after cleaning and detecting are completed.The whole cleaning and detecting process is simple and fast, thereby improve production efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is the structural diagram of the utility model.

[0023] Figure 2 It is the structural diagram of the sliding frame.

[0024] Figure 3 It is the structural diagram of the column.

[0025] Figure 4 It is the structural diagram of the clamp.

[0026] Figure 5 It is the structural diagram of the clamping end.

[0027] Figure 6 It is the structural diagram of the on -line cleaning mechanism.

[0028] Figure 7 Schematic view of the back of the online cleaning mechanism.

[0029] Marked in the figure:

[0030] 1 rack, 2 transverse rail, 3 sliding frame, 4 stand, 5 clamp, 6 cleaning station, 7 conveying belt;

[0031] 21 boss, 22 translation rack, 31 translation gear, 32 support plate, 42 lifting rack, 43 slide rail, 51 crossbeam, 52 lead screw, 53 clamping end, 54 base, 55 soft pad, 56 rotating shaft, 61 back plate, 62 cleaning rail, 63 screw, 64 cleaning trolley, 65 cleaning component, 66 mounting plate, 67 cleaning motor, 68 driving motor. DETAILED DESCRIPTION

[0032] In order for those skilled in the art to better understand the technical scheme of the utility model, the utility model will be further described in detail below in combination with specific embodiments.

[0033] As Figure 1 shown, the utility model provides a crystal bar online cleaning device, including the rack 1 of cross across a plurality of side by side arrangement's conveying belt 7, horizontal arrangement has the transverse rail 2 of crossing all conveying belt 7 on the rack 1, still including the sliding frame 3 that can move along the transverse rail 2, the sliding frame 3 is provided with the stand 4 that can lift and the clamp 5 that lifts along with stand 4, the clamp 5 includes the clamping end 53 that sets up before and after along the conveying belt axial, two clamping ends 53 are located at the same height, and can approach each other or away from each other for clamping or loosening crystal bar 100, two clamping ends 53 can synchronous rotation, to drive the crystal bar 100 that is held along the rotation of self axis, still including the cleaning station 6 for carrying out crystal bar cleaning, after the clamp 5 clamps the crystal bar 100 on conveying belt, follow the sliding frame 3 and convey the crystal bar 100 to the cleaning station 6 of the rack once, and drive the crystal bar to rotate when cleaning.

[0034] The principle of the utility model lies in that after the clamp 5 clamps the crystal bar 100, the crystal bar 100 is lifted using the lifting of stand 4, then moves to the cleaning station 6 (actually also the detection station at the same time) along with the sliding frame 3 and cleans. In the process of cleaning, in order to empty every side of the crystal bar 100, the clamp 5 can rotate axially so that the crystal bar 100 also rotates to expose every side in front of the cleaning station 6 for cleaning. After cleaning, the sliding frame 3 drives the clamp 5 to send the crystal bar 100 back to the conveying belt and convey to the next process.

[0035] As Figure 6 , Figure 7As shown, the cleaning station 6 is provided with an online cleaning mechanism; the online cleaning mechanism comprises a rotating cleaning component 65, which can reciprocate linearly along the axis of the crystal bar 100 to wipe the side surface of the crystal bar 100. Specifically, the cleaning component 65 is cylindrical, and the side wall thereof is flannelette. The high-speed rotation of the cleaning component 65 can clean and polish the surface of the crystal bar 100 without damaging the crystal bar 100. The cleaning component 65 can also move axially along the crystal bar 100 at high speed, thereby cleaning the entire crystal bar 100.

[0036] After cleaning one side surface, the clamp 5 drives the crystal bar 100 to rotate by 90° along the axis thereof, so that the other side surface of the crystal bar 100 is exposed to the cleaning component for cleaning.

[0037] More specifically, the online cleaning mechanism further comprises a back plate 61 provided on the cleaning station 6, which is arranged in parallel with and vertically to the conveying belt 7; the front surface of the back plate 61 is provided with a cleaning track 62 parallel to the conveying belt 7, and further comprises a cleaning trolley 64 which can move back and forth along the cleaning track 62; the cleaning component 65 is fixed on the cleaning trolley 64. The cleaning trolley 64 drives the cleaning component 65 to move axially along the crystal bar, and the operation is more stable.

[0038] The cleaning trolley 64 is provided with a mounting plate 66, and the cleaning component 65 is rotatably fixed on the mounting plate 65 and driven by a cleaning motor 67.

[0039] In addition, in order to facilitate the driving of the cleaning trolley 64, the online cleaning mechanism further comprises a screw rod 63 arranged in parallel with the cleaning track 62, and the cleaning trolley 64 is fixed with a screw sleeve which is threadedly matched with the screw rod 63; and further comprises a driving motor 68 for driving the screw rod 63 to rotate. The driving motor 68 is fixed on the back surface of the back plate 61, and drives the screw rod 63 to rotate by means of a belt. The driving motor 68 is installed on the back surface of the back plate 61, which is more space-saving.

[0040] In the utility model, the conveying belt 7 can be multiple, and the clamp 5 can successively pick up the crystal bars from the conveying belts 7 and convey them to the cleaning station 6 for cleaning. It can be predicted that the time consumed in the entire cleaning process should match the feeding speed of the multiple conveying belts 7, so as to avoid material congestion.

[0041] As Figure 2As shown in the drawings, in the embodiment, the transverse rail 2 on the rack 1 comprises a boss 21 arranged axially along the transverse rail 2, and the sliding frame 3 is provided with a groove matched with the boss 21 for sliding; the transverse rail 2 is provided with a parallel translation rack 22 with the boss 21, and the sliding frame 3 is provided with a translation gear 31 engaged with the translation rack 22; the translation gear 31 is driven by a translation motor. The boss 21 and the groove are matched to realize the guiding function, and the gear and the rack are matched to realize the accurate positioning, so as to ensure that the clamp 5 can accurately grab the crystal bar 100 on the plurality of conveying belts.

[0042] As shown in the drawings, Figure 3 In the embodiment, the sliding frame 3 is provided with a support plate 32; opposite sides of the column 4 are provided with a sliding rail 43 parallel to the column 4, and the support plate 32 is provided with a sliding groove matched with the sliding rail 43 for sliding; the column 4 is further provided with a lifting rack 42 parallel to the sliding rail 43, and the support plate 32 is provided with a lifting gear engaged with the lifting rack 42; the lifting gear is driven by a lifting motor. The column 4 is lifted under the cooperation of the lifting rack 42 and the gear, so as to drive the clamp 5 connected to the lower end of the column 4 to lift. The clamp 5 grabs the crystal bar 100 from the conveying belt by lifting, so as to facilitate the conveying and rotation.

[0043] As shown in the drawings, Figure 4 In the embodiment, the clamp 5 comprises a cross beam 51 fixed at the bottom of the column 4, and the clamping end 53 is movable along the cross beam 51; the clamp 5 further comprises a lead screw 52 arranged in parallel with the cross beam 51, the clamping end 53 is threadedly matched with the lead screw 52 through internal threads, and the internal threads of the two clamping ends 53 are opposite in direction, so that when the lead screw 53 rotates, the two clamping ends 53 move in opposite directions. The opposite movement directions of the clamping ends 53 mean that they can be close to each other or separated at the same time, so as to clamp or release the crystal bar 100. And the clamping is realized by the threaded matching, so even after unloading, it will not rebound, so when the crystal bar 100 is clamped, even if the power is lost, the clamping of the crystal bar 100 can still be realized, avoiding the crystal bar 100 from falling due to power loss.

[0044] As shown in the drawings, Figure 5 In the embodiment, the clamping end 53 comprises a disc-shaped base 54, and the base 54 end faces of the left and right clamping ends 53 are oppositely arranged; the base 54 end face is coated with a soft pad 55. The function of the soft pad 55 is to increase the friction between the crystal bar 100 and the soft pad 55, so as to avoid the crystal bar 100 from slipping. And the soft pad 55 can also avoid scratching the crystal bar. Specifically, the soft pad 55 can be made of rubber or other materials. In order to further improve the friction, the soft pad 55 is provided with a ring-shaped anti-skid groove

[0045] In order to realize the rotation of the base 54, a rotating shaft 56 is connected to the rear end of the base 54, the base 54 is connected with a bearing to the mounting seat on the clamping end 53; the rotating shaft 56 is driven by a rotating motor. Further, the rotating motor is a servo motor; during cleaning, the rotating motor drives the rotating shaft 56 to rotate by 90° each time. The servo motor can accurately control the angle of the rotating shaft rotation. For the square column-shaped crystal bar, each rotation by 90° will make the next side face the cleaning station 6, thereby facilitating the cleaning of the side face by the online cleaning mechanism.

[0046] The above is only the preferred embodiment of the present application, it should be pointed out that the above preferred embodiment should not be regarded as limiting the present application, the protection scope of the present application should be limited by the scope defined by the claims. For ordinary skilled in the art, without departing from the spirit and scope of the present application, a number of improvements and refinements can be made, these improvements and refinements should also be regarded as the protection scope of the present application.

Claims

1. An online cleaning device for crystal rods, characterized in that: The system includes a frame spanning several conveyor belts arranged side by side; a transverse track horizontally arranged on the frame spanning all the conveyor belts; a sliding frame movable along the transverse track, the sliding frame having a liftable column and a clamp that moves with the column; the clamp includes clamping ends arranged back and forth along the axial direction of the conveyor belt; the two clamping ends are at the same height and can move closer or further apart to clamp or release crystal rods; the two clamping ends can rotate synchronously, thereby driving the clamped crystal rods to rotate along their own axis; and a cleaning station for cleaning, after the clamps clamp the crystal rods on the conveyor belts, they follow the sliding frame to transport the crystal rods to the cleaning station on one side of the frame, and drive the crystal rods to rotate during cleaning; The cleaning station is equipped with an online cleaning mechanism; the online cleaning mechanism includes a rotating cleaning component, which can reciprocate linearly along the crystal rod axis to wipe the side of the crystal rod.

2. The online cleaning device for crystal rods according to claim 1, characterized in that: The online cleaning mechanism also includes a back plate set on the cleaning station, the back plate being parallel and vertical to the conveyor belt; a cleaning track parallel to the conveyor belt is installed on the front of the back plate, and a cleaning trolley that can move back and forth along the cleaning track is also included; the cleaning components are fixed on the cleaning trolley.

3. The online cleaning device for crystal rods according to claim 2, characterized in that: The cleaning trolley is equipped with a mounting plate, and the cleaning components are rotatably fixed on the mounting plate and driven by a cleaning motor.

4. The online cleaning device for crystal rods according to claim 2, characterized in that: It also includes a screw arranged parallel to the cleaning track, and a threaded sleeve that is threadedly engaged with the screw is fixed on the cleaning trolley; it also includes a drive motor for rotating the screw.

5. The online cleaning device for crystal rods according to claim 4, characterized in that: The drive motor is fixed to the back of the back plate and drives the screw to rotate using a belt.

6. The online cleaning device for crystal rods according to claim 1, characterized in that: The cleaning component is cylindrical, and its sidewalls are made of velvet.

7. The online cleaning device for crystal rods according to claim 1, characterized in that: The transverse track includes a boss arranged along the axial direction of the transverse track, and the sliding frame is provided with a groove that slides with the boss; the transverse track is provided with a translation rack parallel to the boss, and the sliding frame is provided with a translation gear that meshes with the translation rack; the translation gear is driven by a translation motor.

8. The online cleaning device for crystal rods according to claim 1, characterized in that: The sliding frame is provided with a support plate; the two sides opposite to the column are provided with slide rails parallel to the column, and the support plate is provided with a slide groove that slides with the slide rail; the column is also provided with a lifting rack parallel to the slide rail, and the support plate is provided with a lifting gear that meshes with the lifting rack; the lifting gear is driven by a lifting motor.

9. The online cleaning device for crystal rods according to claim 1, characterized in that: The clamp includes a crossbeam fixed to the bottom of the column, and the clamping end can move along the crossbeam; it also includes a lead screw arranged parallel to the crossbeam, and the clamping end is threaded with the lead screw through an internal thread, and the internal threads of the two clamping ends are in opposite directions, so that when the lead screw rotates, the two clamping ends move in opposite directions.

10. The online cleaning device for crystal rods according to claim 1, characterized in that: The clamping end includes a disc-shaped base, with the base end faces of the left and right clamping ends facing each other; a soft pad is provided on the base end face.

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