Laser lift-off device

Abstract

The present application relates to a laser lift-off apparatus, comprising: a laser beam generating unit that generates a laser beam; an optical unit receiving the laser beam and generating output light based on the laser beam; and a stage unit including a stage. The optical unit includes a driving mirror unit that changes an advancing path of at least a portion of the laser beam, where a direction or position of the driving mirror unit is changeable.

Description

[0001] Cross-references to related applications

[0002] This application claims priority to Korean Patent Application No. 10-2024-0009582, filed on January 22, 2024, the contents of which are incorporated herein by reference in their entirety. Technical Field

[0003] This disclosure generally relates to laser ablation equipment and laser ablation methods. Background Technology

[0004] Display devices can be manufactured as flexible devices using highly flexible substrates.

[0005] However, due to the high flexibility of flexible substrates, it is desirable to support them during the manufacturing process of display devices. Therefore, after forming a flexible substrate on a carrier substrate made of a material such as glass, the process for manufacturing a flat panel display device can be performed, and then the carrier substrate can be removed.

[0006] The carrier substrate can be removed by various methods, and laser lift-off methods using lasers have been actively studied among these methods. Utility Model Content

[0007] The embodiments provide laser stripping equipment and laser stripping methods that can prevent components of a display device from being damaged during a laser stripping process.

[0008] According to embodiments of the present disclosure, a laser stripping apparatus includes: a laser beam generating unit for generating a laser beam; an optical unit for receiving the laser beam to generate output light; and a stage unit including a stage, wherein the optical unit includes a driving mirror unit for changing the forward path of at least a portion of the laser beam, wherein the direction or position of the driving mirror unit is changeable.

[0009] In an embodiment, the optical unit may further include: a combiner that combines laser beams and provides the combined laser beams to a light former; and a light former that includes a driving mirror unit, wherein the light former can generate output light based on the combined laser beams.

[0010] In one embodiment, the driving mirror unit may include a first driving mirror unit and a second driving mirror unit, which are spaced apart from each other in a first direction. In such an embodiment, each of the first and second driving mirror units may include a reflective surface by which the laser beam is reflected. In such an embodiment, the orientation or position of the reflective surface may be variable.

[0011] In an embodiment, the first driving mirror unit can include a first reflecting member including a reflecting surface, and a first rotation shaft coupled to a surface adjacent to the reflecting surface of the first reflecting member, wherein the first rotation shaft extends in a second direction intersecting the first direction. In such an embodiment, a direction of the reflecting surface of the first driving mirror unit can be changeable.

[0012] In an embodiment, the reflecting surface of the first driving mirror unit can form a first angle with an imaginary surface perpendicular to a ground surface. In such an embodiment, the first angle can be about zero (0) degrees or more and less than about 90 degrees.

[0013] In an embodiment, as the magnitude of the first angle increases, a portion of an area in which the energy density of the output light is highest can move in the first direction.

[0014] In an embodiment, the first driving mirror unit can include a first reflecting member including a reflecting surface, and a first rotation shaft coupled to an opposite surface opposite to the reflecting surface of the first reflecting member, wherein the first rotation shaft extends in a second direction intersecting the first direction. In such an embodiment, a direction of the reflecting surface of the first driving mirror unit can be changeable.

[0015] In an embodiment, a position of the reflecting surface of the first driving mirror unit can be changeable by a movement of the first driving mirror unit in the first direction or in an opposite direction of the first direction.

[0016] In an embodiment, a position of the reflecting surface of the first driving mirror unit can be changeable by a movement of the first driving mirror unit in a third direction intersecting the first direction or in an opposite direction of the third direction.

[0017] In an embodiment, the laser beam can have a wavelength in a range of about 300 nanometers (nm) to about 410 nm.

[0018] According to another embodiment of the disclosure, a laser lift-off method includes disposing a carrier substrate on a stage, sealing the stage, allowing output light generated based on a laser beam to be incident on a back surface of the carrier substrate, and allowing a panel substrate disposed on a front surface of the carrier substrate to be lifted off from the carrier substrate, wherein the allowing the output light to be incident on the back surface of the carrier substrate includes generating the laser beam, allowing at least a portion of the laser beam to pass through a driving mirror unit such that a forward path of the at least a portion of the laser beam is changed, and generating the output light.

[0019] In an embodiment, the allowing the output light to be incident on the back surface of the carrier substrate can further include combining the laser beam.

[0020] In an embodiment, the first driving mirror unit can include a first reflection member including a reflection surface, and a first rotation shaft coupled to a surface adjacent to the reflection surface of the first reflection member, wherein the first rotation shaft extends in a second direction intersecting the first direction. In such an embodiment, a direction of the reflection surface of the first driving mirror unit can be changeable.

[0021] In an embodiment, the first driving mirror unit can include a first reflection member including a reflection surface, and a first rotation shaft coupled to a surface adjacent to the reflection surface of the first reflection member, wherein the first rotation shaft extends in a second direction intersecting the first direction. In such an embodiment, a direction of the reflection surface of the first driving mirror unit can be changeable.

[0022] In an embodiment, the reflection surface of the first driving mirror unit can form a first angle with an imaginary surface perpendicular to the ground surface. In such an embodiment, the first angle can be about zero (0) degrees or more and less than about 90 degrees.

[0023] In an embodiment, an energy density of a partial region of the output light can be the highest. In such an embodiment, as a size of the first angle increases, the partial region of the output light can move in the first direction.

[0024] In an embodiment, the first driving mirror unit can include a first reflection member including a reflection surface, and a first rotation shaft coupled to a surface adjacent to the reflection surface of the first reflection member, wherein the first rotation shaft extends in a second direction intersecting the first direction. In such an embodiment, a direction of the reflection surface of the first driving mirror unit can be changeable.

[0025] In an embodiment, a position of the reflection surface of the first driving mirror unit can be changeable by a movement of the first driving mirror unit in the first direction or the opposite direction of the first direction.

[0026] In an embodiment, a position of the reflection surface of the first driving mirror unit can be changeable by a movement of the first driving mirror unit in a third direction intersecting the first direction or the opposite direction of the third direction.

[0027] In an embodiment, the laser beam can have a wavelength in a range of about 300 nm to about 410 nm. BRIEF DESCRIPTION OF DRAWINGS

[0028] The above and other features of the present disclosure will become more apparent by describing in detail embodiments thereof with reference to the attached drawings, in which:

[0029] Figure 1is a schematic view showing a laser lift-off apparatus according to an embodiment of the present disclosure;

[0030] Figure 2 is a schematic view showing a light former according to an embodiment of the present disclosure;

[0031] Figure 3 is a schematic view showing a laser lift-off apparatus according to an embodiment of the present disclosure; Figure 2 is an enlarged view of a surrounding portion X of

[0032] Figure 4 is a schematic perspective view of a first drive mirror unit shown in Figure 3

[0033] Figure 5 and Figure 6 is a graph showing a size of a first angle of an energy density of output light for each region according to Figure 3

[0034] Figure 7 is a schematic view showing a laser lift-off apparatus according to another embodiment of the present disclosure; Figure 2 is an enlarged view of a surrounding portion X of

[0035] Figure 8 is a schematic perspective view of a first drive mirror unit shown in Figure 7

[0036] Figure 9 is a schematic view showing a laser lift-off apparatus according to another embodiment of the present disclosure; Figure 2 is an enlarged view of a surrounding portion X of

[0037] Figure 10 is a schematic view showing a laser lift-off apparatus according to another embodiment of the present disclosure; Figure 2 is an enlarged view of a surrounding portion X of

[0038] Figure 11 is a schematic view showing a stage unit according to an embodiment of the present disclosure;

[0039] Figure 12 is a schematic view showing a carrier substrate and a display panel that can be provided in Figure 11 a stage unit shown in

[0040] Figure 13 is a schematic view showing an operation of a laser lift-off apparatus according to an embodiment of the present disclosure;

[0041] Figure 14 is a schematic plan view of a region S1 shown in Figure 12

[0042] is a schematic plan view of a region S2 shown in Figure 15 Figure 14 ​​​​​

[0043] Figure 16 This is a schematic diagram illustrating the laser energy density applied to the carrier substrate and the panel substrate when performing a laser lift-off process according to an embodiment of the present disclosure;

[0044] Figure 17 This is a schematic diagram illustrating the use of a laser lift-off apparatus to peel a carrier substrate and a panel substrate apart from each other according to an embodiment of the present disclosure; and

[0045] Figure 18 and Figure 19 This is a flowchart illustrating a laser ablation method according to an embodiment of the present disclosure. Detailed Implementation

[0046] This disclosure will now be described more fully below with reference to the accompanying drawings, in which various embodiments are illustrated. However, this disclosure may be implemented in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of this disclosure to those skilled in the art. The same reference numerals throughout denote the same elements.

[0047] It will be understood that when an element is referred to as being "on" another element, it can be directly on the other element, or there can be an intervening element between them. Conversely, when an element is referred to as being "directly on" another element, there is no intervening element.

[0048] Throughout the specification, when a component is referred to as “connected” or “coupled” to another component, it may be directly connected or directly coupled to another component, or indirectly connected or indirectly coupled to another component with one or more intermediary components inserted between them.

[0049] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, "a," "an," and "the" are used interchangeably and mean one or more, unless the context clearly dictates otherwise. The term "comprises" and / or "comprising," or "includes" and / or "including" when used in this specification, specify the presence of stated features, regions, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, components, and / or groups thereof.

[0050] It will also be understood that the terms "comprises" and / or "comprising," or "includes" and / or "including" when used in this specification, specify the presence of stated features, regions, integers, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, regions, integers, steps, operations, elements, components, and / or groups thereof.

[0051] It will be understood that, although the terms "first," "second," etc. can be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. Thus, a "first" element discussed below could also be termed a "second" element without departing from the teachings of the present disclosure.

[0052] For ease of description, spatially relative terms, such as "below", "above", and the like, can be used herein for describing an element's relationship to another element as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is inverted, elements described as being "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the exemplary term "below" can encompass both an orientation of above and below. The device can be otherwise oriented (e.g., rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

[0053] In view of the measurements discussed and the errors associated with measurements of particular quantities (i.e., limitations of the measurement system), "about" or "approximately" as used herein includes the recited value and means within an acceptable range of deviation from the particular value as determined by one of ordinary skill in the art. For example, the term "about" can mean within one or more standard deviations, or within ±30%, ±20%, ±10%, ±5% of the recited value.

[0054] Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present disclosure and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0055] Embodiments are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments. Variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and / or tolerances, are expected. Thus, embodiments described herein are not to be construed as being limited to the particular shapes illustrated herein but are to include deviations in shapes that result from, for example, manufacturing. For example, a region illustrated or described as flat can often have rough and / or nonlinear features. Moreover, sharp angles illustrated can be rounded. Thus, the regions illustrated in the figures are schematic and their shapes are not intended to illustrate the precise shape of a region and are not intended to limit the scope of the present claims.

[0056] Figure 1 is a schematic diagram illustrating a laser lift-off apparatus according to an embodiment of the present disclosure.

[0057] Referring to Figure 1 Embodiments of the laser lift-off apparatus 10 can include a laser beam generation unit 100, an optical unit 200, a stage unit 300, and a chamber 400.

[0058] The laser lift-off apparatus 10 can be configured to remove the carrier substrate using a laser.

[0059] The laser beam generation unit 100 can generate a laser beam LSR. In an embodiment, for example, the laser beam generation unit 100 can generate the laser beam LSR using an excimer laser. However, embodiments of the present disclosure are not limited thereto. In some embodiments, the laser beam generation unit 100 can generate the laser beam LSR using a solid-state laser. In some embodiments, the laser beam generation unit 100 can include a plurality of light sources.

[0060] Each of the plurality of light sources can generate the laser beam LSR using a laser. The laser beam LSR can be generated in a Gaussian form. The laser beam LSR can have a wavelength in a range of about 300 nanometers (nm) to about 410 nm.

[0061] The optical unit 200 can receive the laser beam LSR transmitted from the laser beam generation unit 100. The optical unit 200 can generate output light LSRL based on the laser beam LSR. In an embodiment, for example, the output light LSRL can have a linear shape (or a rectangular shape) having a long axis length and a short axis length. The long axis length can refer to a line length, and the short axis length can refer to a line width. However, embodiments of the present disclosure are not limited thereto. In an embodiment, for example, the long axis length can refer to a line width, and the short axis length can refer to a line length. The shape of the output light LSRL can be variously modified.

[0062] The optical unit 200 can provide the output light LSRL to the stage unit 300.

[0063] The optical unit 200 can include a combiner 210 and a light former 230.

[0064] The combiner 210 can include at least one selected from a phase retarder, a lens, and a mirror.

[0065] The combiner 210 can generate a combined laser beam CLSR. The combiner 210 can provide the combined laser beam CLSR to the light former 230.

[0066] The light former 230 can generate the output light LSRL based on the combined laser beam CLSR. The light former 230 can provide the output light LSRL to the stage unit 300.

[0067] The stage unit 300 can include at least one stage on which a target object is disposed, for performing a laser lift-off process. This will be described in more detail later with reference to FIG. 2. Figure 11

[0068] ​The chamber 400 can provide an environment for performing a process. In an embodiment, for example, the chamber 400 can provide a space in which the stage unit 300 can be disposed, and provide an environment for a vacuum environment for a process and for an external air block, etc. The chamber 400 can separate at least one stage included in the stage unit 300 from the outside.

[0069] In an embodiment, for example, the chamber 400 can seal at least one stage from the outside to prevent ozone gas generated due to high irradiance of ultraviolet light radiation from being discharged to the outside.

[0070] Figure 2 is a schematic view illustrating a light former according to an embodiment of the disclosure.

[0071] Referring to Figure 2 , an embodiment of the light former 230 can include a telescope lens group 231, a cylindrical lens 232, a beam transport system 233, a homogenizer 234, a first convex lens 235, a driven mirror unit 236, and a second convex lens 237.

[0072] Although an embodiment in which the telescope lens group 231, the cylindrical lens 232, the beam transport system 233, and the homogenizer 234 are implemented with lenses is illustrated in Figure 2 , embodiments of the disclosure are not limited thereto. In some embodiments, the telescope lens group 231, the cylindrical lens 232, the beam transport system 233, and the homogenizer 234 can be implemented using at least one selected from lenses and mirrors.

[0073] The telescope lens group 231 can diffuse a combined laser beam CLSR of the first combined laser beam CLSR1 and the second combined laser beam CLSR2, which are provided thereto. The combined laser beam CLSR can have a circular shape. However, embodiments of the disclosure are not limited thereto. The combined laser beam CLSR can have various shapes.

[0074] In an embodiment, as illustrated in Figure 2 , the telescope lens group 231 can include a single lens. However, embodiments of the disclosure are not limited thereto. In some embodiments, the telescope lens group 231 can include a plurality of lenses.

[0075] The cylindrical lens 232 can control light input from the telescope lens group 231. In an embodiment, for example, the cylindrical lens 232 can control a light width of the input light to be further narrowed.

[0076] The beam transport system 233 can control light input from the cylindrical lens 232. In an embodiment, for example, the beam transport system 233 can rotate the input light, thereby rotating a light width direction.

[0077] In some embodiments, the light beam transport system 233 and the homogenizer 234 can include a saw lens or a light guide including or made of a mirror. Also, the homogenizer 234 can include a fly eye lens.

[0078] The first convex lens 235 can control light input from the homogenizer 234. In an embodiment, for example, the first convex lens 235 can control a light width of the input light to be further widened or increased.

[0079] The driving mirror unit 236 can include a first driving mirror unit 236a and a second driving mirror unit 236b. The first driving mirror unit 236a and the second driving mirror unit 236b can reflect at least a portion of light input from the first convex lens 235, thereby controlling a forward path (or an optical path). Reference will be made to FIGS. 4A and 4B for a detailed description of the operation of the driving mirror unit 236. Figures 3 to 10 The operation of the driving mirror unit 236 will be described in detail.

[0080] The second convex lens 237 can control a light width of light passing through the driving mirror unit 236, thereby generating output light LSRL. In an embodiment, for example, the second convex lens 237 can control the light width of light passing through the driving mirror unit 236 to be further narrowed or decreased, thereby generating the output light LSRL.

[0081] The output light LSRL can have a linear shape having a major axis length and a minor axis length.

[0082] The output light LSRL can be divided into first output light LSRL1, second output light LSRL2, and third output light LSRL3. The first output light LSRL1 and the second output light LSRL2 can be generated by light obtained by combining light whose forward path (or optical path) is changed by reflection and light whose forward path (or optical path) is not changed in a process in which the light passes through the driving mirror unit 236. The third output light LSRL3 can be generated by light whose forward path (or optical path) is not changed in the process in which the light passes through the driving mirror unit 236. The first output light LSRL1 and the second output light LSRL2 can have a high energy density compared to the third output light LSRL3. This will be described later with reference to FIGS. 6A and 6B. Figure 5 and Figure 6 will be described.

[0083] Figure 3 is an enlarged view of a surrounding portion X of Figure 2 according to the first embodiment of the disclosure. Figure 4 is Figure 3 is a schematic perspective view of the first driving mirror unit shown in FIG. 3. The configuration and operation of the second driving mirror unit 236b are substantially the same as those of the first driving mirror unit 236a, and thus, the first driving mirror unit 236a will be described in detail hereinafter, and any repetitive detailed description of the second driving mirror unit 236b will be omitted.

[0084] Reference Figure 3 and Figure 4 The embodiment of the first driving mirror unit 236a can include a first reflecting member RMa and a first rotation axis ARa.

[0085] The first reflecting member RMa can have a three-dimensional shape (e.g., a rectangular parallelepiped shape) extending in the first direction DR1 to the third direction DR3.

[0086] The first reflecting member RMa can include a reflecting surface. The reflecting surface RS of the first reflecting member RMa can form a first angle AG1 with an imaginary surface perpendicular to the ground surface and extending in the second direction DR2 and the third direction DR3. The first angle AG1 can have a magnitude of about zero (0) degrees or more and less than about 90 degrees.

[0087] At least a portion of the light IL input to the driving mirror unit 236 can be reflected from the reflecting surface RS such that its advancing path (or optical path) is changed (or at least a portion of the light IL input to the driving mirror unit 236 can form reflected light RL). The reflected light RL can be transmitted through the second convex lens 237. Light, of which the advancing path (or optical path) is not changed, among the light IL input to the driving mirror unit 236 can also be transmitted through the second convex lens 237.

[0088] The first rotation axis ARa can have a three-dimensional shape (e.g., a cylindrical shape) extending in the second direction DR2. The first rotation axis ARa can be coupled to an upper surface US adjacent to the reflecting surface RS of the first reflecting member RMa.

[0089] The first rotation axis ARa can be rotated by an external device (not shown) by a certain angle clockwise or counterclockwise (see the arrow indicated by a solid line). The direction of the reflecting surface RS of the first reflecting member RMa (i.e., the direction in which the reflecting surface RS of the first reflecting member RMa faces) can be changed by the operation of the first rotation axis ARa (e.g., rotated by a certain angle from the imaginary surface perpendicular to the ground surface and extending in the second direction DR2 and the third direction DR3). In an embodiment, for example, the first angle AG1 can be changed based on the operation of the first rotation axis ARa.

[0090] Figure 5 and Figure 6 is a graph showing the energy density of the output light for each region according to the magnitude of the first angle shown in FIG. 10. The horizontal axis indicates the position of the output light LSRL in the first direction DR1, and the vertical axis indicates the magnitude of the energy density of the output light LSRL. Figure 3 Figure 5 ​is a graph showing the magnitude of the energy density of the output light LSRL for each region when the magnitude of the first angle AG1 is about 5 degrees. Figure 6 is a graph showing the magnitude of the energy density of the output light LSRL for each region when the magnitude of the first angle AG1 is about 20 degrees.

[0091] Referring to Figure 5 , the energy density of the output light LSRL can be different for each region. It can be seen that the output light LSRL has a highest energy density of about 5.248 Watts per square centimeter (W / cm 2 ) in regions near its opposite ends or in the vicinity of the opposite ends thereof. The reason why the energy density of the regions near the opposite ends becomes high is as follows.

[0092] Light whose advancing path (or optical path) is changed by reflection and light whose advancing path (or optical path) is not changed in the process in which the light passes through the drive mirror unit 236 (see Figure 2 ) can each be transmitted through the second convex lens 237 and then constitute the output light LSRL. Any region of the output light LSRL can be formed of light whose advancing path (or optical path) is changed by reflection and light whose advancing path (or optical path) is not changed in the process in which the light passes through the drive mirror unit 236. As a result, several lights are combined in the regions near the opposite ends, so that the energy density in the regions near the opposite ends can become high.

[0093] On the other hand, it can be seen that the output light LSRL has an energy density of about 2.5 W / cm 2 in other regions. Light whose advancing path (or optical path) is not changed in the process in which the light passes through the drive mirror unit 236 can pass through the second convex lens 237 and then form the output light of the corresponding region.

[0094] Referring to Figure 6 , the energy density of the output light LSRL can be different for each region. It can be seen that the output light LSRL has a highest energy density of about 4.82 W / cm 2 in regions near its opposite ends or in the vicinity of the opposite ends thereof.

[0095] However, it can be seen that, compared to Figure 5 , the regions in which the output light LSRL has the highest energy density move toward the central portion of the output light LSRL (e.g., the point corresponding to 0 on the horizontal axis of the graph shown in Figure 6 ). In other words, it can be seen that, as the first angle AG1 becomes larger, the regions in which the output light LSRL has the highest energy density move toward the central portion.

[0096] Figure 7 is a graph showing the magnitude of the energy density of the output light LSRL for each region when the magnitude of the first angle AG1 is about 5 degrees. Figure 6 is a graph showing the magnitude of the energy density of the output light LSRL for each region when the magnitude of the first angle AG1 is about 20 degrees.

[0091] Referring to Figure 5 , the energy density of the output light LSRL can be different for each region. It can be seen that the output light LSRL has a highest energy density of about 5.248 Watts per square centimeter (W / cm 2 ) in regions near its opposite ends or in the vicinity of the opposite ends thereof. The reason why the energy density of the regions near the opposite ends becomes high is as follows.

[0092] Light whose advancing path (or optical path) is changed by reflection and light whose advancing path (or optical path) is not changed in the process in which the light passes through the drive mirror unit 236 (see Figure 2 ) can each be transmitted through the second convex lens 237 and then constitute the output light LSRL. Any region of the output light LSRL can be formed of light whose advancing path (or optical path) is changed by reflection and light whose advancing path (or optical path) is not changed in the process in which the light passes through the drive mirror unit 236. As a result, several lights are combined in the regions near the opposite ends, so that the energy density in the regions near the opposite ends can become high.

[0093] On the other hand, it can be seen that the output light LSRL has an energy density of about 2.5 W / cm 2 in other regions. Light whose advancing path (or optical path) is not changed in the process in which the light passes through the drive mirror unit 236 can pass through the second convex lens 237 and then form the output light of the corresponding region.

[0094] Referring to Figure 6 , the energy density of the output light LSRL can be different for each region. It can be seen that the output light LSRL has a highest energy density of about 4.82 W / cm 2 in regions near its opposite ends or in the vicinity of the opposite ends thereof.

[0095] However, it can be seen that, compared to Figure 5 , the regions in which the output light LSRL has the highest energy density move toward the central portion of the output light LSRL (e.g., the point corresponding to 0 on the horizontal axis of the graph shown in Figure 6 ). In other words, it can be seen that, as the first angle AG1 becomes larger, the regions in which the output light LSRL has the highest energy density move toward the central portion.

[0096] Figure 7Figure 2 An enlarged view of a surrounding portion X. Figure 8 is Figure 7 A schematic perspective view of the first driving mirror unit shown in FIG. 1. The configuration and operation of the second driving mirror unit 236b are substantially the same as those of the first driving mirror unit 236a, and thus, the first driving mirror unit 236a will be described in detail hereinafter, and any repetitive detailed description of the second driving mirror unit 236b will be omitted.

[0097] Referring to Figure 7 and Figure 8 , an embodiment of the first driving mirror unit 236a can include a first reflecting member RMa and a first rotating shaft ARa.

[0098] The first reflecting member RMa can have a three-dimensional shape (e.g., a rectangular parallelepiped shape) extending in the first direction DR1 to the third direction DR3.

[0099] The first reflecting member RMa can include a reflecting surface. The reflecting surface RS of the first reflecting member RMa can form a second angle AG2 with an imaginary surface perpendicular to the ground surface and extending in the second direction DR2 and the third direction DR3. The second angle AG2 can have a magnitude of about zero (0) degrees or more and less than about 90 degrees.

[0100] At least a portion of the light IL input to the driving mirror unit 236 can be reflected from the reflecting surface RS such that its advancing path (or optical path) is changed (or at least a portion of the light IL input to the driving mirror unit 236 can form reflected light RL). The reflected light RL can be transmitted through the second convex lens 237. Light, of which the advancing path (or optical path) is not changed, among the light IL input to the driving mirror unit 236 can also be transmitted through the second convex lens 237.

[0101] The first rotating shaft ARa can have a three-dimensional shape (e.g., a cylindrical shape) extending in the second direction DR2. The first rotating shaft ARa can be coupled to an opposite surface SS opposite to the reflecting surface RS of the first reflecting member RMa.

[0102] The first rotating shaft ARa can be rotated by an external device (not shown) by a certain angle clockwise or counterclockwise (see the arrow indicated by a solid line). The direction of the reflecting surface RS of the first reflecting member RMa can be changed by the operation of the first rotating shaft ARa (e.g., rotated by a certain angle from the imaginary surface perpendicular to the ground surface and extending in the second direction DR2 and the third direction DR3). In an embodiment, for example, the second angle AG2 can be changed based on the operation of the first rotating shaft ARa.

[0103] Figure 9 is another embodiment according to the present disclosureFigure 2 An enlarged view of the surrounding portion X. The configuration and operation of the second drive mirror unit 236b are substantially the same as those of the first drive mirror unit 236a, and thus, the first drive mirror unit 236a will be described in detail hereinafter, and any repetitive detailed description of the second drive mirror unit 236b will be omitted.

[0104] Referring to Figure 9 , the embodiment of the first drive mirror unit 236a can have a three-dimensional shape (for example, a rectangular parallelepiped shape) extending in the first direction DR1 to the third direction DR3.

[0105] The first drive mirror unit 236a can include a reflection surface RS. At least a portion of the light IL input to the drive mirror unit 236 can be reflected from the reflection surface RS such that its advancing path (or optical path) is changed (or at least a portion of the light IL input to the drive mirror unit 236 can form a reflected light RL). The reflected light RL can be transmitted through the second convex lens 237. The light, of which the advancing path (or optical path) is not changed, among the light IL input to the drive mirror unit 236 can also be transmitted through the second convex lens 237.

[0106] The first drive mirror unit 236a can be moved in the first direction DR1 or in the opposite direction of the first direction DR1 by an external device (not shown).

[0107] The position of the reflection surface RS of the first drive mirror unit 236a can be changed by the operation (for example, movement in the first direction DR1) of the first drive mirror unit 236a. Accordingly, the position where the reflection by the reflection surface RS is made, etc. can vary on a line extending in the first direction DR1. Further, when the area where the reflected light RL reaches varies, the position of the area where the energy density is highest in the output light LSRL can vary. In an embodiment, for example, when the first drive mirror unit 236a can be moved in the first direction DR1, the position of the area where the energy density is highest in the output light LSRL can be moved toward the central portion.

[0108] Figure 10 is an enlarged view of the surrounding portion X according to another embodiment of the disclosure. The configuration and operation of the second drive mirror unit 236b are substantially the same as those of the first drive mirror unit 236a, and thus, the first drive mirror unit 236a will be described in detail hereinafter, and any repetitive detailed description of the second drive mirror unit 236b will be omitted. Figure 2 An enlarged view of the surrounding portion X. The configuration and operation of the second drive mirror unit 236b are substantially the same as those of the first drive mirror unit 236a, and thus, the first drive mirror unit 236a will be described in detail hereinafter, and any repetitive detailed description of the second drive mirror unit 236b will be omitted.

[0109] Referring to Figure 10 , the embodiment of the first drive mirror unit 236a can have a three-dimensional shape (for example, a rectangular parallelepiped shape) extending in the first direction DR1 to the third direction DR3.

[0110] The first drive mirror unit 236a can include a reflecting surface RS. At least a part of the light IL input to the drive mirror unit 236 can be reflected from the reflecting surface RS such that its advancing path (or optical path) is changed (or at least a part of the light IL input to the drive mirror unit 236 can form a reflected light RL). The reflected light RL can be transmitted through the second convex lens 237. The light, of which the advancing path (or optical path) is not changed, among the light IL input to the drive mirror unit 236 can also be transmitted through the second convex lens 237.

[0111] The first drive mirror unit 236a can be moved in the third direction DR3 or the opposite direction of the third direction DR3 by an external device (not shown).

[0112] The position of the reflecting surface RS of the first drive mirror unit 236a can be changed by the operation (e.g., movement in the third direction DR3) of the first drive mirror unit 236a. Accordingly, the position where the reflection by the reflecting surface RS is made, etc. can be changed on a line extending in the first direction DR1. Further, when the area where the reflected light RL reaches is changed, the position of the area where the energy density is the highest in the output light LSRL can be changed. In an embodiment, for example, when the first drive mirror unit 236a can be moved in the third direction DR3, the position of the area where the energy density is the highest in the output light LSRL can be moved toward the center portion.

[0113] Figure 11 FIG. 1 is a schematic view showing a stage unit according to an embodiment of the present disclosure. Figure 11 may be a view showing Figure 1 the stage unit 300 shown in FIG. 1. In Figure 11 , a plan view of the stage unit 300 is shown.

[0114] In Figure 11 , the stage unit 300 having two stages is shown representatively. The features described below can be modified as appropriate to be applied to the case where the stage unit includes a single stage.

[0115] For ease of illustration and description, the carrier substrate and the display panel disposed on the first stage STG1 and the second stage STG2 are omitted in Figure 11

[0116] Referring to Figure 11 , an embodiment of the stage unit 300 can include a first movement guide MG1, a second movement guide MG2, a movement unit MU, a first stage STG1, and a second stage STG2.

[0117] ​The first movement guides MG1 can be disposed on a bottom surface of the stage unit 300. Each of the first movement guides MG1 can extend along a first direction DR1. The first movement guides MG1 can be arranged along a second direction DR2 different from the first direction DR1. The first movement guides MG1 can be spaced apart from each other in the second direction DR2.

[0118] The movement units MU can be disposed on the first movement guides MG1. The movement units MU can move along the first movement guides MG1 in the first direction DR1.

[0119] In an embodiment, as shown in FIG. 1A, four movement units MU are disposed at corresponding corners. However, embodiments of the present disclosure are not limited thereto. In some embodiments, the number or position of the movement units MU can be variously designed or modified. Figure 11

[0120] The movement units MU facing each other in the second direction DR2 can be coupled to each other by the second movement guides MG2. Each of the second movement guides MG2 can extend along the second direction DR2. The second movement guides MG2 can be arranged along the first direction DR1. The second movement guides MG2 can be spaced apart from each other in the first direction DR1.

[0121] The first stage STG1 and the second stage STG2 can be disposed on the second movement guides MG2. Also, the first stage STG1 and the second stage STG2 can be disposed between the movement units MU. In an embodiment, for example, the first stage STG1 can be disposed at one side of the stage unit 300, and the second stage STG2 can be disposed at the other side of the stage unit 300. The first stage STG1 and the second stage STG2 can move along the second movement guides MG2 in the second direction DR2.

[0122] Operations of the stage unit 300 will be described in detail hereinafter.

[0123] First, the movement units MU at opposite sides of the first stage STG1 can move along the first movement guides MG1 so that the first stage STG1 is located in a laser region AL. The laser region AL can be a region on which the output light LSRL is incident.

[0124] As described above with reference to Figure 2 In some embodiments, the output light LSRL can have a linear shape having a long axis length and a short axis length.

[0125] When the first stage STG1 is located in the laser region AL, the output light LSRL can be incident to the carrier substrate CST (see FIG. 1A) disposed on the first stage STG1. Figure 12 ​) on the back surface (or lower surface) thereof. The back surface of the carrier substrate CST can be a surface opposite to the front surface (or upper surface) on which the light emitting elements on the panel substrate PST (see Figure 12 ) are disposed.

[0126] The first stage STG1 can move in the second direction DR2 while the output light LSRL is incident. Accordingly, the output light LSRL can be uniformly incident on the back surface of the carrier substrate CST (see Figure 12 ) disposed on the first stage STG1. Accordingly, the panel substrate PST (see Figure 12 ) can be peeled from the carrier substrate CST (see Figure 12 ).

[0127] While the peeling on the first stage STG1 is performed, another carrier substrate can be disposed on the second stage STG2.

[0128] When the peeling on the first stage STG1 is completed, the moving units MU at both opposite sides of the first stage STG1 can move along the first moving guide MG1 so that the first stage STG1 is located outside the laser region AL. Also, the moving units MU at both opposite sides of the second stage STG2 can move along the first moving guide MG1 so that the second stage STG2 is located in the laser region AL.

[0129] While the peeling on the second stage STG2 is performed, a new carrier substrate can be disposed on the first stage STG1.

[0130] This operation can be alternately and repeatedly performed on each of the first stage STG1 and the second stage STG2.

[0131] Figure 12 is a schematic view illustrating a carrier substrate and a display panel that can be disposed in the stage unit illustrated in Figure 11 .

[0132] Referring to Figure 12 , the display panel DP can include a panel substrate PST, a display element layer DEL, and a sealing layer TFE.

[0133] First, the carrier substrate CST can be disposed on the stage STG (see Figure 13The carrier substrate CST can include a rigid material to be used as a support in a process of manufacturing the display panel DP. The carrier substrate CST can include a transparent material to allow a laser to be transmitted therethrough in a subsequent peeling process. In an embodiment, for example, the carrier substrate CST can include or be made of a glass using SiO2as a main ingredient. In an embodiment, the carrier substrate CST can include or be made of at least one selected from borosilicate glass, fused quartz glass, and quartz glass.

[0134] The panel substrate PST can be formed or disposed on a front surface of the carrier substrate CST. In some embodiments, the panel substrate PST can be a flexible substrate.

[0135] The panel substrate PST can include a plastic material. In an embodiment, for example, the panel substrate PST can include or be formed of a polyamide or a polyimide, which has high heat resistance to withstand a high-temperature process such as a low-temperature polysilicon (LTPS) manufacturing process, and has flexibility when the polyamide or the polyimide is processed in a film form. The panel substrate PST can be formed by spin-coating a polyamide or a polyimide solution on the carrier substrate CST and then curing the coated solution, or by attaching or laminating a film-type polyamide or polyimide substrate to the carrier substrate CST using an adhesive material.

[0136] The display element layer DEL can be formed or disposed on a front surface of the panel substrate PST.

[0137] Although not shown in the drawings, the display element layer DEL can include a light emitting element, a circuit element for driving the light emitting element, and the like. In some embodiments, the light emitting element can be an organic light emitting element. However, embodiments of the present disclosure are not limited thereto, and the light emitting element can include various display elements such as a liquid crystal display element or an electrophoretic display element in addition to the organic light emitting element.

[0138] The encapsulation layer TFE can be formed or disposed on a front surface of the display element layer DEL. The encapsulation layer TFE can seal the display element layer DEL.

[0139] The encapsulation layer TFE can be disposed in a form of a thin film or a plurality of layers. In an embodiment, for example, the encapsulation layer TFE can be a thin film encapsulation layer. The encapsulation layer TFE can have a structure in which a plurality of layers including, for example, silicon oxide (SiO x ) or silicon nitride (SiN x) or a layer made of the inorganic material and a structure in which layers including an organic material such as an epoxy or a polyimide or made of the organic material are alternately formed. However, embodiments of the present disclosure are not limited thereto, and the encapsulation layer TFE can include a layer including or made of a low-melting glass.

[0140] The upper protection layer UPL can be formed or disposed on a front surface of the encapsulation layer TFE.

[0141] When the process of manufacturing the display panel DP is completed, the panel substrate PST of the display panel DP can be peeled from the carrier substrate CST.

[0142] The upper protection layer UPL can effectively prevent the encapsulation layer TFE from being damaged while the panel substrate PST is removed or peeled from the carrier substrate CST. The upper protection layer UPL can be removed after the panel substrate PST is removed or peeled from the carrier substrate CST.

[0143] Figure 13 is a schematic diagram illustrating an operation of a laser lift-off apparatus according to an embodiment of the present disclosure. Figure 13 is shown to illustrate an operation in which the laser lift-off apparatus 10 peels the panel substrate PST and the carrier substrate CST from each other. Figure 12 is shown to illustrate an operation in which the laser lift-off apparatus 10 peels the panel substrate PST and the carrier substrate CST from each other. Figure 13 is shown to illustrate a cross-sectional view of the stage unit 300 according to an embodiment of the present disclosure.

[0144] Referring to Figure 13 , the carrier substrate CST can be disposed on the stage STG. Figure 13 The stage STG shown in Figure 11 may correspond to any one of the first stage STG1 and the second stage STG2 shown in

[0145] In an embodiment, for example, the carrier substrate CST can be disposed on the stage STG in a state in which the carrier substrate CST is inverted such that a front surface thereof faces downward and a back surface thereof faces upward. That is, the carrier substrate CST can be disposed on the stage STG such that the upper protection layer UPL formed on the front surface of the display panel DP is in contact with the stage STG. The stage STG can provide an area in which the carrier substrate CST is disposed.

[0146] In an embodiment, output light LSRL having a predetermined energy density can be incident on a back surface of the carrier substrate CST to allow the panel substrate PST to be peeled from the carrier substrate CST. When the output light LSRL is incident on a front surface of the carrier substrate CST, the display element layer DEL of the display panel DP can be damaged or broken. In an embodiment, the output light LSRL can be incident on the back surface of the carrier substrate CST to protect the display element layer DEL.

[0147] The stage STG can move along the second movement guide MG2 while the output light LSRL is incident. Therefore, the output light LSRL can be incident along the long axis of the panel substrate PST.

[0148] A portion of the panel substrate PST in contact with the carrier substrate CST can absorb light having a predetermined energy density from the output light LSRL.

[0149] When the absorbed energy exceeds a certain level, the bonded chain of the polyamide or polyimide constituting the panel substrate PST can be broken. When the bonded chain is broken, the carrier substrate CST and the panel substrate PST can be peeled from each other.

[0150] Figure 14 is a schematic plan view of the region S1 shown in FIG. 1. Figure 12 is a schematic plan view of the region S2 shown in FIG. 1. Figure 15 is a schematic plan view of the region S2 shown in FIG. 1. Figure 14 An arrangement of the carrier substrate CST and the panel substrate PST is schematically shown. Figure 14 A portion of the carrier substrate CST and the panel substrate PST is schematically shown. Hereinafter, reference will be made to Figure 15 A portion of the carrier substrate CST and the panel substrate PST is schematically shown. Hereinafter, reference will be made to Figure 14 and Figure 15 A process of peeling the carrier substrate CST and the panel substrate PST from each other will be described in more detail.

[0151] In an embodiment, the panel substrate PST can include a first substrate SUB1, a first barrier layer BL1, a second barrier layer BL2, and a second substrate SUB2. The panel substrate PST can include an active area AA in which pixels defined by a display element layer DEL (see FIG. 1) are disposed. Figure 12

[0152] The carrier substrate CST can include a first boundary region BR1 and a second boundary region BR2 corresponding to a boundary region BR. The boundary region BR can be a boundary of a region in which the panel substrate PST and the carrier substrate CST overlap each other and a region in which the panel substrate PST and the carrier substrate CST do not overlap each other. In an embodiment, for example, the panel substrate PST can be disposed inside the boundary region BR and can not be disposed outside the boundary region BR with respect to the boundary region BR.

[0153] The first substrate SUB1 can be disposed on the carrier substrate CST. The first substrate SUB1 can have an area smaller than that of the carrier substrate CST. Therefore, the first substrate SUB1 can not overlap at least a portion of the carrier substrate CST.

[0154] ​The first substrate SUB1 can include an organic material. In some embodiments, at least one selected from a polyamide resin and a polyimide resin can be included. However, embodiments of the present disclosure are not limited thereto.

[0155] The first barrier layer BL1 can be disposed on the first substrate SUB1. The first barrier layer BL1 can have an area greater than that of the first substrate SUB1. Accordingly, the first barrier layer BL1 can completely cover the first substrate SUB1. The first barrier layer BL1 can be in contact with at least a portion of the carrier substrate CST.

[0156] The first barrier layer BL1 can include an inorganic material. In some embodiments, the inorganic material can include at least one selected from silicon nitride (SiN x ), aluminum nitride (AlN x ), titanium nitride (TiN x ), silicon oxide (SiO x ), aluminum oxide (AlO x ), titanium oxide (TiO x ), silicon carbon oxide (SiO x C y ), and silicon nitride oxide (SiO x N y ). However, embodiments of the present disclosure are not limited thereto.

[0157] The second barrier layer BL2 can be disposed on the first barrier layer BL1. The second barrier layer BL2 can have an area greater than that of the first barrier layer BL1. Accordingly, the second barrier layer BL2 can completely cover the first barrier layer BL1.

[0158] The second barrier layer BL2 can include an inorganic material. The inorganic material can include at least one selected from the materials described above with reference to the first barrier layer BL1.

[0159] The second substrate SUB2 can be disposed on the second barrier layer BL2. The second substrate SUB2 can have an area greater than that of the first substrate SUB1. The second substrate SUB2 and the first substrate SUB1 can have end portions that do not overlap each other. When the second substrate SUB2 has an area greater than that of the first substrate SUB1, the second substrate SUB2 can form a protruding area A more protruding than the first substrate SUB1 in a length direction of the first substrate SUB1. The protruding area A can include a first protruding area A1 and a second protruding area A2.

[0160] The second substrate SUB2 can include an organic material. The organic material can include at least one selected from the materials described above with reference to the first substrate SUB1.

[0161] The protrusion region A can overlap with a portion of each of the first barrier layer BL1 and the second barrier layer BL2 disposed between the carrier substrate CST and the second substrate SUB2.

[0162] In such an embodiment, it is desirable for the laser lift-off apparatus 10 to apply appropriate energy to the region where the panel substrate PST and the carrier substrate CST are in contact with each other to allow the carrier substrate CST to be lifted off from the panel substrate PST. For example, when the laser lift-off apparatus 10 does not apply appropriate energy, the first substrate SUB1 is not properly lifted off, and thus, the risk or probability that components of the display panel DP will be damaged can increase.

[0163] For example, since the pixels are disposed in the active area AA, it is desirable for the active area AA to be lifted off with relatively low energy than the energy of the region other than the active area AA to prevent the pixels from being damaged. Experimentally, when the laser lift-off apparatus 10 applies high energy to the active area AA, the risk that the first substrate SUB1 is damaged by the output light LSRL will increase, and the risk that the adhesion between components on the first substrate SUB1 is weakened and the encapsulation layer is delaminated will increase. Thus, it is desirable to use output light LSRL having relatively low energy among the output light LSRL incident on the panel substrate PST to lift off the active area AA. The laser lift-off apparatus 10 according to the embodiment of the present disclosure can apply appropriately low energy to the active area AA. Thus, the risk of delaminating the encapsulation layer TFE can be reduced.

[0164] In the embodiment, since the protrusion region A is a region in which the first barrier layer BL1 and the second barrier layer BL2 are disposed between the carrier substrate CST and the second substrate SUB2, the intensity of the output light LSRL reaching the second substrate SUB2 can be reduced. Thus, compared to the active area AA, it is desirable to lift off the protrusion region A with relatively high energy. When high energy is not applied to the protrusion region A, the lift-off of a portion of the second substrate SUB2 at the protrusion region A can not be effectively performed. In a process of performing the lift-off, there is a risk that the second substrate SUB2 is damaged while a lift-off blade passes between the carrier substrate CST and the second substrate SUB2. The laser lift-off apparatus 10 according to the embodiment of the present disclosure can apply appropriately high energy to the protrusion region A using the driving mirror unit 236 (see Figure 2 ). Thus, the risk that the second substrate SUB2 is damaged can be significantly reduced.

[0165] The laser lift-off apparatus 10 according to the embodiment of the present disclosure allows appropriate energy to be provided for regions as described above. Thus, the energy incidence for each substrate region can be properly adjusted. This will be described in detail below with reference to Figure 16 and Figure 17 .

[0166] Figure 16 is a schematic diagram illustrating a laser energy density applied to the carrier substrate and the panel substrate when a laser lift-off process is performed according to an embodiment of the present disclosure. Figure 16 The energy density of the output light LSRL applied to the carrier substrate CST and the panel substrate PST is schematically illustrated. Figure 17 is a schematic diagram illustrating a laser lift-off apparatus according to an embodiment of the present disclosure.

[0167] Referring to Figure 16 and Figure 17 , the active area AA can be lifted off by the third output light LSRL3 having the first energy E1. The third output light LSRL3 can have the first energy E1 substantially uniform in the active area AA. The protruding area A and the boundary area BR can be lifted off by the first output light LSRL1 and the second output light LSRL2 having the second energy E2. The first output light LSRL1 and the second output light LSRL2 can have the second energy E2 substantially uniform in the vicinity of the protruding area A. The first output light LSRL1 and the second output light LSRL2 can have the first region W1 and the second region W2, respectively, which are portions in which the second energy E2 is constant in the energy density graph for each region.

[0168] The first energy E1 can be lower than the second energy E2. The first energy E1 and the second energy E2 can have an energy difference d1. The energy difference d1 can be 10% to 20% of the first energy E1. The second energy E2 can be higher than the first energy E1 by 10% to 20% of the first energy E1. However, embodiments of the present disclosure are not limited thereto.

[0169] Conventionally, the arrangement of the mirrors and the lenses of the homogenizer 234 is adjusted to vary the output light LSRL so as to have the first energy E1, and then the second energy E2. For example, the intensity of the output light LSRL is changed by adjusting the angle of the lenses or the distance between the lenses. It can be difficult to adjust the angle of the lenses or the distance between the lenses so that the energy difference d1 has 10% to 20% of the first energy E1. Furthermore, when the position of the lenses is misaligned compared to the existing position in the process of replacing the lenses, it can be difficult to change the energy by the predetermined energy difference d1.

[0170] Furthermore, when the angle of the lenses or the distance between the lenses is adjusted, the energy can be changed instantaneously, and thus, since the length of each of the first region W1 and the second region W2 is relatively short, it can be difficult to maintain the second energy E2 for a certain time. Accordingly, the second energy E2 can not be supplied for a sufficient time in the boundary area BR between the panel substrate PST and the carrier substrate CST, and thus, it can be difficult to lift off the substrates from each other.

[0171] The laser lift-off apparatus 10 according to the embodiment of the disclosure includes a driving mirror unit 236, thereby changing the intensity of the output light LSRL passing through the driving mirror unit 236 for each region. Accordingly, in the laser lift-off apparatus 10 according to the embodiment of the disclosure, the degree of change in the angle of the lens or the distance between the lenses can be reduced, and the length of each of the first region W1 and the second region W2 can be formed relatively long.

[0172] Figure 18 and Figure 19 is a flowchart illustrating a laser lift-off method according to an embodiment of the disclosure.

[0173] Referring to Figure 18 The laser lift-off method according to the embodiment of the disclosure can include a step S100 of disposing a carrier substrate on a stage, a step S200 of sealing the stage, a step S300 of allowing output light to be incident on a back surface of the carrier substrate, and a step S400 of lifting off a panel substrate from the carrier substrate.

[0174] Referring to Figures 1 to 18 In the step S100 of disposing the carrier substrate on the stage, the carrier substrate CST can be disposed on the stage STG. The carrier substrate CST can be disposed on the stage STG in a state in which the carrier substrate CST is inverted such that a front surface thereof faces downward and a back surface thereof faces upward. That is, the carrier substrate CST can be disposed on the stage STG such that an upper protection layer UPL formed on a front surface of the display panel DP is in contact with the stage STG.

[0175] The step S200 of sealing the stage can include a step of allowing the stage STG to be sealed by a chamber 400 after the carrier substrate CST is disposed on the stage STG.

[0176] The chamber 400 can seal at least one stage from the outside to prevent ozone gas generated due to a lift-off process from being discharged to the outside.

[0177] The step S300 of allowing output light to be incident on a back surface of the carrier substrate can include a step of allowing the output light LSRL to be incident on a back surface of the carrier substrate CST after the stage STG is sealed. When the output light LSRL is incident on a front surface of the carrier substrate CST, the display element layer DEL of the display panel DP can be damaged or broken. In an embodiment, the output light LSRL can be incident on the back surface of the carrier substrate CST, and thus the display element layer DEL of the display panel DP can be effectively prevented from being damaged or broken.

[0178] In an embodiment, as Figure 19As illustrated in FIG. 3, the step S300 of allowing the output light to be incident on the back surface of the carrier substrate can include a step S310 of generating a laser beam, a step S320 of allowing the laser beam to pass through the drive mirror unit, and a step S330 of generating the output light.

[0179] In the step S310 of generating the laser beam, the laser beam LSR can be generated by an excimer laser. In some embodiments, the laser beam LSR can include a plurality of light sources.

[0180] In embodiments, as described above with reference to FIG. 2, the laser beam LSR can be transmitted through the combiner 210, the telescope lens group 231, the cylindrical lens 232, the beam transport system 233, the homogenizer 234, and the first convex lens 235. Figure 2

[0181] The step S320 of allowing the laser beam to pass through the drive mirror unit can include a step of allowing light transmitted through the first convex lens 235 to pass through the drive mirror unit 236. The advancing path (or optical path) of at least some of the light transmitted through the first convex lens 235 can be changed by reflection in the process of the at least some light passing through the drive mirror unit 236.

[0182] The step S330 of generating the output light can include a step of adjusting the light width of the light passing through the drive mirror unit 236 while the light is transmitted through the second convex lens 237. The energy density of the output light LSRL can be different for each region. In embodiments, for example, each of a first output light LSRL1 and a second output light LSRL2 formed of light obtained by combining light whose advancing path (or optical path) is changed by the drive mirror unit 236 and light whose advancing path (or optical path) is not changed by the drive mirror unit 236 can have a high energy density. In such embodiments, a third output light LSRL3 formed of light whose advancing path (or optical path) is not changed by the drive mirror unit 236 can have a relatively low energy density compared to the first output light LSRL1 and the second output light LSRL2.

[0183] The output light LSRL can be incident on the back surface of the carrier substrate CST.

[0184] A portion of the panel substrate PST in contact with the carrier substrate CST can absorb light having a predetermined energy density from the output light LSRL.

[0185] When the absorbed energy exceeds a certain level, the bonded chain of the polyamide or polyimide constituting the panel substrate PST can be broken. When the bonded chain is broken, thermal evaporation, a bursting plasma, or a sound wave can occur. Accordingly, the panel substrate PST can be peeled from the carrier substrate CST. ​

[0186] In an embodiment, a peeling blade can be used when the panel substrate PST and the carrier substrate CST are peeled from each other. The peeling blade can peel the substrates at the boundary between the panel substrate PST and the carrier substrate CST.

[0187] According to embodiments of the present disclosure, the laser peeling apparatus and the laser peeling method can effectively prevent the risk of components of the display device being damaged during the laser peeling process.

[0188] The present disclosure is not to be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure will be thorough and complete, and will fully convey the concept of the present disclosure to those skilled in the art.

[0189] While the present disclosure has been particularly shown and described with reference to embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details can be made therein without departing from the spirit or scope of the present disclosure as defined by the following claims.

Claims

1. A laser lift-off apparatus, characterized by, Comprising: a laser beam generating unit generating a laser beam; an optical unit receiving the laser beam and generating an output light based on the laser beam; and a stage unit including a stage, wherein the optical unit includes a drive mirror unit changing a proceeding path of at least a portion of the laser beam, wherein a direction or a position of the drive mirror unit is changeable. The optical unit further includes:

2. The laser lift-off apparatus of claim 1, wherein, a combiner combining the laser beam and providing a combined laser beam to a light former; and the light former including the drive mirror unit, wherein the light former generates the output light based on the combined laser beam. The drive mirror unit includes a first drive mirror unit and a second drive mirror unit, the first drive mirror unit and the second drive mirror unit being spaced apart from each other in a first direction, 3. The laser lift-off apparatus of claim 1, wherein, wherein each of the first drive mirror unit and the second drive mirror unit includes a reflecting surface, the laser beam being reflected by the reflecting surface, and wherein a direction of the reflecting surface or a position of the reflecting surface is changeable. The first drive mirror unit includes:

4. The laser lift-off apparatus of claim 3, wherein, a first reflecting member including the reflecting surface; and a first rotation shaft coupled to a surface adjacent to the reflecting surface of the first reflecting member, wherein the first rotation shaft extends in a second direction intersecting the first direction, and wherein the direction of the reflecting surface of the first drive mirror unit is changeable. The reflecting surface of the first drive mirror unit forms a first angle with an imaginary surface perpendicular to a ground surface, and 5. The laser lift-off apparatus of claim 4, wherein, wherein the first angle is 0 degree or more and less than 90 degrees. As a magnitude of the first angle increases, a region where an energy density of the output light is highest moves in the first direction.

6. The laser lift-off apparatus of claim 5, wherein, The first drive mirror unit includes:

7. The laser lift-off apparatus of claim 3, wherein, a first reflecting member including the reflecting surface; and a first rotation shaft coupled to an opposite surface opposite to the reflecting surface of the first reflecting member, wherein the first rotation shaft extends in a second direction intersecting the first direction, and wherein the direction of the reflecting surface of the first drive mirror unit is changeable. The position of the reflecting surface of the first drive mirror unit is changeable by movement of the first drive mirror unit in the first direction or an opposite direction of the first direction.

8. The laser lift-off apparatus of claim 3, wherein, The position of the reflecting surface of the first drive mirror unit is changeable by movement of the first drive mirror unit in a third direction intersecting the first direction or an opposite direction of the third direction.

9. The laser lift-off apparatus of claim 3, wherein, The laser beam has a wavelength in a range of 300 nm to 410 nm.

10. The laser lift-off apparatus of claim 1, wherein, ​

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