Vacuum coating device

Abstract

The utility model relates to a vacuum coating device which comprises a plurality of vacuum coating units and a supporting body, the vacuum coating units are arranged on the left side and the right side of the supporting body respectively, or the vacuum coating units are arranged in the vertical direction of the supporting body. When the vacuum coating units are arranged on the left side and the right side of the supporting body respectively, the vacuum coating unit located on one side of the left side and the right side of the supporting body obliquely extends downwards in the direction away from the vacuum coating unit located on the other side of the supporting body from the top to the bottom of the supporting body, and the supporting body comprises a bottom supporting piece, a longitudinal supporting piece, a transverse supporting piece and a connecting piece. The longitudinal supporting piece is arranged on the bottom supporting piece, the transverse supporting piece is connected and perpendicular to the longitudinal supporting piece, connecting pieces are arranged at the left end and the right end of the transverse supporting piece, the connecting pieces are connected with the vacuum coating unit, and the connecting pieces are obliquely arranged. According to the vacuum coating device provided by the utility model, the productivity is improved in an effective use area.

Description

TECHNICAL FIELD

[0001] The utility model relates to a vacuum coating device. BACKGROUND

[0002] The PVD vacuum coating equipment is suitable for coating process of photovoltaic cell pieces such as perovskite and BC battery, and mainly comprises a high-vacuum coating unit, a transmission device and supporting legs. UTILITY MODEL CONTENTS

[0003] The utility model discloses a vacuum coating device, to solve the problem of low production capacity of the existing vacuum coating device.

[0004] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of:

[0005] A vacuum coating device, the device comprises a plurality of vacuum coating units and a support body, the left and right sides of the support body are respectively provided with the vacuum coating units, or a plurality of the vacuum coating units are arranged along the up-down direction of the support body; when the left and right sides of the support body are respectively provided with the vacuum coating units, the vacuum coating unit located on one side of the left and right sides of the support body extends downwardly and inclines away from the vacuum coating unit located on the other side of the support body from the top to the bottom of the support body, the support body comprises a bottom support, a longitudinal support, a transverse support and a connecting piece, the longitudinal support is arranged on the bottom support, the transverse support is connected with the longitudinal support and is perpendicular to the longitudinal support, the left end and the right end of the transverse support are located on the left side and the right side of the longitudinal support respectively, the left end and the right end of the transverse support are provided with the connecting pieces, the connecting pieces are connected with the vacuum coating units, the connecting pieces are arranged obliquely, and the oblique direction of the connecting pieces is consistent with the oblique direction of the corresponding vacuum coating unit.

[0006] According to some embodiments of the utility model, the device further comprises a supporting piece, the supporting piece is connected with the bottom of the connecting piece, and the supporting piece abuts against the bottom of the vacuum coating unit.

[0007] According to some embodiments of the utility model, the connecting piece is provided with a guide hole, the guide hole is in the shape of a waist-round hole, and the guide hole extends along the oblique direction of the connecting piece.

[0008] According to some embodiments of the utility model, the longitudinal support is provided with multiple, multiple longitudinal supports are sequentially arranged along the direction perpendicular to the transverse support.

[0009] According to some embodiments of the utility model, the device further includes a first reinforcing member, and the first reinforcing member is used for connecting two adjacent longitudinal supports.

[0010] According to some embodiments of the utility model, the device further includes a second reinforcing member and a third reinforcing member, the second reinforcing member is used for connecting the transverse support and the bottom support, the third reinforcing member is used for connecting the second reinforcing member and the bottom support, and the third reinforcing member is triangular.

[0011] According to some embodiments of the utility model, the transverse support is provided with multiple, multiple transverse supports are sequentially arranged along the height direction of the longitudinal support, and the length of the upper transverse support is less than that of the lower transverse support.

[0012] According to some embodiments of the utility model, the bottom support includes multiple cross beams and multiple longitudinal beams, the cross beam is connected with the longitudinal beam and is perpendicular to the longitudinal beam, and the bottom support is quadrangular.

[0013] According to some embodiments of the utility model, the device further includes a fourth reinforcing member, and the fourth reinforcing member is used for connecting two adjacent cross beams and longitudinal beams, and the fourth reinforcing member is triangular.

[0014] According to some embodiments of the utility model, when multiple vacuum coating units are arranged along the up-down direction of the support body, the vacuum coating unit includes a molecular pump and a rotating cathode target material, the support body has an accommodating cavity, the support body has oppositely arranged upper and lower sides, oppositely arranged front and rear sides, and oppositely arranged left and right sides, a partition plate is arranged in the accommodating cavity to divide the accommodating cavity into an upper coating cavity and a lower coating cavity, the upper side of the support body is provided with multiple molecular pumps and multiple rotating cathode target materials, and the lower side of the support body is provided with multiple molecular pumps and multiple rotating cathode target materials.

[0015] According to some embodiments of the utility model, the upper side of the support body is provided with an upper support plate, the lower side of the support body is provided with a lower support plate, the upper support plate and the lower support plate are provided with through holes corresponding to each chamber part, the through holes are communicated with the corresponding chambers, the surfaces of the upper support plate and the lower support plate away from each other are provided with a plurality of convex parts protruding from the surfaces, the convex parts are located between the adjacent two through holes, the support plate is formed with a molecular pump placing area and a cathode placing area on the front and back sides of the convex parts, the molecular pump placing area is provided with a molecular pump placing plate, and the molecular pump placing plate is provided with an opening communicated with the chamber.

[0016] Compared with the prior art, the utility model has the following advantages due to the technical scheme:

[0017] The vacuum coating device provided by the utility model is provided with vacuum coating units on the left and right sides of the support body, or a plurality of vacuum coating units are arranged in the up-down direction of the support body, so that the silicon wafer is prevented from falling off during the transmission process, and the production capacity is improved in the effective use area. BRIEF DESCRIPTION OF DRAWINGS

[0018] ATTACHED Figure 1 It is a first perspective view of the structure of the vacuum coating device of an embodiment of the utility model;

[0019] ATTACHED Figure 2 It is a first perspective view of the structure of the vacuum coating device of an embodiment of the utility model; Figure 1 It is an enlarged view of the convex platform;

[0020] ATTACHED Figure 3 It is a second perspective view of the structure of the vacuum coating device of an embodiment of the utility model;

[0021] ATTACHED Figure 4 It is a first perspective view of the structure of the support body of the vacuum coating device of an embodiment of the utility model;

[0022] ATTACHED Figure 5 It is a second perspective view of the structure of the support body of the vacuum coating device of an embodiment of the utility model;

[0023] ATTACHED Figure 6 It is a third perspective view of the structure of the support body of the vacuum coating device of an embodiment of the utility model;

[0024] ATTACHED Figure 7 It is an internal structure diagram of the vacuum cavity of the vacuum coating device of an embodiment of the utility model;

[0025] ATTACHED Figure 8 It is a first perspective view of the structure of the support body of the vacuum coating device of another embodiment of the utility model;

[0026] Figure 1 is a structural view of a support body of a vacuum coating device according to an embodiment of the present application; Figure 9 Figure 2 is a structural view of a support body of a vacuum coating device according to another embodiment of the present application; Figure 8 Figure 3 is a structural view of a convex part of the support body of the vacuum coating device according to the embodiment of the present application;

[0027] Figure 4 is a structural view of a support body of a vacuum coating device according to another embodiment of the present application; Figure 10 Figure 5 is a structural view of a second perspective view of the support body of the vacuum coating device according to the another embodiment of the present application.

[0028] In the above drawings:

[0029] 1-vacuum cavity, 101-branch plate, 102-boss, 103-stiffener;

[0030] 2-support body, 201-longitudinal support, 202-transverse support, 203-connector, 2031-guide hole, 204-supporting piece, 205-first stiffener, 206-second stiffener, 207-third stiffener, 208-fourth stiffener, 209-cross beam, 210-longitudinal beam; 211-upper support plate, 212-lower support plate, 213-convex part, 214-molecular pump placing plate, 215-cathode target material placing plate, 216-supporting leg;

[0031] 4-molecular pump; 5-cathode target material;

[0032] 6-conveying mechanism, 601-transmission shaft, 602-transmission gear, 603-transmission belt, 604-driving piece. DETAILED DESCRIPTION

[0033] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0034] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0035] The vacuum coating device comprises a plurality of vacuum coating units and a support body 2. The left and right sides of the support body 2 are respectively provided with vacuum coating units, or the plurality of vacuum coating units are arranged in the up-down direction of the support body 2. In a unit volume, the number of vacuum coating units and the number of molecular pumps and rotary cathodes are increased, and the production capacity in the effective use area is greatly improved.

[0036] In an embodiment, referring to Figures 1 to 7 , the left and right sides of the support body 2 are respectively provided with vacuum coating units, and the vacuum coating units are arranged obliquely. The vacuum coating unit located on one side of the left side and the right side of the support body 2 extends obliquely downward from the top to the bottom of the vacuum coating unit to the direction away from the vacuum coating unit located on the other side of the support body 2, that is, the vacuum coating unit located on the left side of the support body 2 extends obliquely downward from the top to the bottom of the vacuum coating unit to the direction away from the vacuum coating unit located on the right side of the support body 2, and the vacuum coating unit located on the right side of the support body 2 extends obliquely downward from the top to the bottom of the vacuum coating unit to the direction away from the vacuum coating unit located on the left side of the support body 2.

[0037] When the left and right sides of the support body 2 are respectively provided with vacuum coating units, the support body 2 comprises a bottom support, a longitudinal support 201, a transverse support 202, and a connecting piece 203. The longitudinal support 201 extends in the vertical direction (Z-axis), and the transverse support 202 extends in the X-axis direction. The longitudinal support 201 is arranged on the bottom support, and the transverse support 202 is connected with the longitudinal support 201 and is perpendicular to the longitudinal support 201. The left end and the right end of the transverse support 202 are respectively located on the left side and the right side of the longitudinal support 201. The transverse support 202 is divided into two sections, and the length of the transverse support 202 located on the left side of the longitudinal support 201 is equal to the length of the transverse support 202 located on the right side of the longitudinal support 201, that is, a symmetrical structure is formed. The left end and the right end of the transverse support 202 are respectively provided with the connecting piece 203, and the connecting piece 203 is connected with the vacuum coating unit. The connecting piece 203 is arranged obliquely, and the oblique direction of the connecting piece 203 is consistent with the oblique direction of the corresponding vacuum coating unit. The connecting piece 203 is arranged to connect the vacuum coating unit.

[0038] In this example, the oblique angle of the vacuum coating unit relative to the vertical center line is greater than 0 and less than or equal to 60°, and is preferably 30°, which can effectively prevent the silicon wafer from falling off during the transmission process.

[0039] The device further comprises a supporting piece 204 connected with the bottom of the connecting piece 203, and the supporting piece 204 abuts against the bottom of the vacuum coating unit to further support the vacuum coating unit. Figures 4-5 The connecting piece 203 is a square plate, and the supporting piece 204 is a square plate. The supporting piece 204 and the connecting piece 203 are perpendicular to form a space for supporting the vacuum coating unit.

[0040] In some embodiments, the connecting piece 203 is provided with a corresponding mounting hole on the corresponding vacuum coating unit, and the connecting piece 203 is connected with the vacuum coating unit by placing a fastener in the mounting hole. The fastener is a bolt and nut assembly, which facilitates the installation and disassembly of the vacuum coating unit.

[0041] In a preferred embodiment, the connecting piece 203 is provided with a guide hole 2031, which has a certain length, such as a waist round hole shape. The guide hole 2031 extends along the inclined direction of the connecting piece 203, and the vacuum coating unit is adjustably arranged in the guide hole 2031. When connecting the vacuum coating unit with the connecting piece 203, the appropriate position of the guide hole 2031 corresponding to the fastener is selected, and then the fastener is installed to fixedly connect the vacuum coating unit with the connecting piece 203, so that the setting position of the vacuum coating unit in the vertical direction can be adjusted.

[0042] In this example, the left end face and the right end face of the transverse support piece 202 are both inclined faces. The left end face of the transverse support piece 202 extends downward from its top to its bottom in a direction away from the right end face. The right end face of the transverse support piece 202 extends downward from its top to its bottom in a direction away from the left end face. The inclined direction of the left end face of the transverse support piece 202 is consistent with the inclined direction of the vacuum coating unit on the left side. The inclined direction of the right end face of the transverse support piece 202 is consistent with the inclined direction of the vacuum coating unit on the right side.

[0043] In this example, a plurality of longitudinal support pieces 201 are provided, and the plurality of longitudinal support pieces 201 are sequentially arranged in a direction perpendicular to the transverse support piece 202. A plurality of transverse support pieces 202 are provided, and the plurality of transverse support pieces 202 are sequentially arranged in the height direction of the longitudinal support piece 201 in the vertical direction. For the same longitudinal support piece 201, the length of the transverse support piece 202 located above is less than the length of the transverse support piece 202 located below, that is, the length of the uppermost transverse support piece 202 is less than the length of the lowermost transverse support piece 202. The left end face of the plurality of transverse support pieces 202 is an inclined face, and the inclined direction of the left end face of the plurality of transverse support pieces 202 is consistent. The right end face of the plurality of transverse support pieces 202 is an inclined face, and the inclined direction of the right end face of the plurality of transverse support pieces 202 is consistent. When the longitudinal support piece 201 is provided with a plurality of longitudinal support pieces 201, and the transverse support piece 202 is provided with a plurality of transverse support pieces 202, the connecting piece 203 on the lowermost transverse support piece 202 is connected with the supporting piece 204.

[0044] In some embodiments, the upper end of the longitudinal support piece 201 is provided with a groove, and the uppermost transverse support piece 202 is partially arranged in the groove.

[0045] In some embodiments, the device further comprises a first reinforcing member 205 for connecting two adjacent longitudinal support members 201, the first reinforcing member 205 extending along the Y-axis direction, and the first reinforcing member 205 is arranged to reinforce the strength of the entire support body 2. When the longitudinal support members 201 are arranged in multiple, a first reinforcing member 205 is arranged between every other two adjacent longitudinal support members 201, and the multiple first reinforcing members 205 arranged at the same height are arranged in a straight line.

[0046] In some embodiments, the device further comprises a second reinforcing member 206 for connecting the transverse support member 202 and the bottom support member, the second reinforcing member 206 extending in a direction parallel to the extending direction of the longitudinal support member 201; the second reinforcing member 206 is arranged in multiple, and the multiple second reinforcing members 206 are arranged in parallel. The second reinforcing member 206 is arranged to reinforce the strength of the entire support body 2.

[0047] The device further comprises a third reinforcing member 207 for connecting the second reinforcing member 206 and the bottom support member, the third reinforcing member 207 being a triangle, preferably a right triangle. In some embodiments, the second reinforcing member 206 is provided with a third reinforcing member 207 at the end away from the longitudinal support member 201.

[0048] The bottom support member comprises multiple cross beams 209 and multiple longitudinal beams 210, the cross beams 209 being parallel to the transverse support member 202, the longitudinal beams 210 being connected to the cross beams 209 and being perpendicular, the longitudinal beams 210 extending along the Y-axis direction, and the bottom support member being a quadrilateral. The device further comprises a fourth reinforcing member 208 for connecting two adjacent cross beams 209 and longitudinal beams 210, the fourth reinforcing member 208 being a triangle, and the fourth reinforcing member 208 is arranged to increase the strength of the bottom support member supporting the longitudinal support member 201, thereby improving the overall strength.

[0049] In this example, the vacuum coating unit comprises a vacuum cavity 1, a molecular pump 4, and a rotating cathode target material 5, the vacuum cavity 1 has oppositely arranged upper and lower sides, oppositely arranged front and rear sides, and oppositely arranged left and right sides, the vacuum coating unit comprises multiple chambers, the multiple chambers are formed by arranging reinforcing plates 103 in the vacuum coating unit, and the multiple chambers are distributed along the front-rear direction; multiple reinforcing plates 103 are distributed along the front-rear direction, perforations are formed on the reinforcing plates 103, so that the multiple chambers are all through, the perforations are used for the carrier to pass through, and the front end and the rear end of the vacuum cavity of the vacuum coating unit are both provided with openings, and the carrier (used for carrying silicon wafers) passes through the openings, the inside, and the openings of the rear end in sequence. The multiple reinforcing plates 103 are arranged to increase the overall strength, facilitate the formation of multiple molecular pump placement areas and cathode placement areas, and can realize large-batch processing of silicon wafers and increase the production capacity.

[0050] The upper side of the vacuum cavity 1 of the vacuum coating unit is provided with a support plate 101, the support plate 101 is provided with a through hole corresponding to each chamber, that is, one through hole corresponds to one chamber, the through hole is communicated with the corresponding chamber, and the support plate 101 is connected with a reinforcing plate 103; the upper surface of the support plate 101 is provided with a plurality of bosses 102 protruding from the upper surface thereof, the bosses 102 are located between adjacent two through holes, the upper surface of the boss 102 is higher than the upper surface of the support plate 101, and the front and rear sides of the support plate 101 located at the bosses 102 form a molecular pump placement area and a cathode placement area respectively, that is, the molecular pump placement area and the cathode placement area are arranged adjacent to each other; the molecular pump placement area corresponds to one chamber, and the cathode placement area corresponds to one chamber; the molecular pump placement area is provided with a molecular pump placement plate 214, and the molecular pump placement plate 214 is provided with an opening hole communicated with the chamber; the cathode placement area is provided with a cathode placement plate 215, and the cathode placement plate 215 is provided with an opening hole communicated with the chamber.

[0051] In this example, the upper surfaces of the support plates 101 in the molecular pump placement areas and the cathode placement areas are horizontal planes, and have high flatness, so as to ensure the air tightness of the vacuum coating unit as a whole after the molecular pump and the cathode are placed, facilitate processing, and save costs.

[0052] In another embodiment, referring to Figures 8 to 10 , a plurality of vacuum coating units are arranged along the up-down direction of the support body 2, and each vacuum coating unit includes a molecular pump and a rotating cathode target material; the support body 2 has a containing cavity, and a plurality of support legs 216 are arranged below the containing cavity; the support body 2 has an upper side and a lower side arranged opposite to each other, a front side and a rear side arranged opposite to each other, and a left side and a right side arranged opposite to each other; a partition plate is arranged in the containing cavity to divide the containing cavity into an upper coating cavity and a lower coating cavity. The upper side of the support body 2 is provided with a plurality of molecular pumps and a plurality of rotating cathode target materials, and the lower side of the support body 2 is provided with a plurality of molecular pumps and a plurality of rotating cathode target materials.

[0053] The upper coating cavity and the lower coating cavity each include a plurality of chambers, the plurality of chambers are formed by arranging a plurality of reinforcing plates in the containing cavity, and the plurality of chambers are distributed along the front-rear direction; the plurality of reinforcing plates are distributed along the front-rear direction, and the reinforcing plates are provided with perforations, so that the plurality of chambers are communicated, and the perforations are used for passing a carrier; the front end and the rear end of the support body 2 are provided with openings, and the carrier (used for carrying a silicon wafer) passes through the openings, the inside, and the openings of the rear end in sequence.

[0054] The upper side of the support body 2 is provided with an upper support plate 211, and the lower side of the support body 2 is provided with a lower support plate 212; the upper support plate 211 and the lower support plate 212 are both provided with through holes corresponding to the respective chamber parts, that is, one through hole corresponds to one chamber, and the through hole is in communication with the corresponding chamber; the upper support plate 211 and the lower support plate 212 are respectively connected with the corresponding reinforcing plates; the surfaces of the upper support plate 211 and the lower support plate 212 away from each other are provided with a plurality of protrusions 213 protruding from the surfaces thereof, the protrusions 213 are located between the adjacent two through holes, and the molecular pump placement area and the cathode placement area are respectively formed on the front and back sides of the protrusions 213 on the support plate, that is, the molecular pump placement area and the cathode placement area are adjacently arranged; the molecular pump placement area corresponds to one chamber, and the cathode placement area corresponds to one chamber; the molecular pump placement area is provided with a molecular pump placement plate 214, and the molecular pump placement plate 214 is provided with an opening hole in communication with the chamber; the cathode placement area is provided with a cathode placement plate 215, and the cathode placement plate 215 is provided with an opening hole in communication with the chamber.

[0055] In the example, two layers of upper and lower plating cavities are arranged, and the two-layer structure can simultaneously perform magnetic sputtering plating treatment on two sets of substrates, thereby doubling the production capacity in the effective use area.

[0056] The device of the two embodiments both includes a conveying mechanism 6 for driving the carrier to move along the arrangement direction of the molecular pump and the cathode target material; the conveying mechanism 6 includes a plurality of first driving assemblies and a plurality of second driving assemblies, the first driving assemblies and the second driving assemblies are respectively arranged on the left and right sides of the vacuum chamber 1, the first driving assemblies correspond to the second driving assemblies one by one, and the first driving assemblies and the second driving assemblies both include a driving member 604, a plurality of transmission shafts 601 and a plurality of transmission units; one end of the transmission shaft 601 is matched with the carrier located in the vacuum chamber 1, the other end of the transmission shaft 601 can extend out of the vacuum chamber 1, the other ends of the adjacent two transmission shafts 601 located on the same side of the vacuum chamber 1 are connected through the transmission unit, the driving member is connected with one transmission shaft 601, and the transmission unit and the driving member are both located outside the vacuum chamber 1. The driving member is located outside the vacuum chamber, and one end of the transmission gear 602 provided on the transmission shaft 601 is located outside the vacuum chamber 1 (the transmission gear 602 and the transmission belt 603 are both located outside the vacuum chamber).

[0057] The above embodiments are only for illustrating the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application should be covered within the protection scope of the present application.

Claims

1. A vacuum film deposition apparatus, characterized by comprising: The device comprises a plurality of vacuum coating units and a support body, the left and right sides of the support body are respectively provided with the vacuum coating units, or a plurality of the vacuum coating units are arranged along the up-down direction of the support body; when the left and right sides of the support body are respectively provided with the vacuum coating units, the vacuum coating unit located on one side of the left side and the right side of the support body extends downward from the top to the bottom in a direction away from the vacuum coating unit located on the other side of the support body, the support body comprises a bottom support, a longitudinal support, a transverse support and a connecting piece, the longitudinal support is arranged on the bottom support, the transverse support is connected with the longitudinal support and is perpendicular, the left end and the right end of the transverse support are located on the left side and the right side of the longitudinal support respectively, the left end and the right end of the transverse support are respectively provided with the connecting pieces, the connecting pieces are connected with the vacuum coating units, the connecting pieces are arranged obliquely, and the oblique direction of the connecting pieces is consistent with the oblique direction of the corresponding vacuum coating unit.

2. The vacuum coating apparatus according to claim 1, wherein The device further comprises a supporting piece, the supporting piece is connected with the bottom of the connecting piece, and the supporting piece abuts against the bottom of the vacuum coating unit.

3. The vacuum coating apparatus according to claim 1, wherein The connecting piece is provided with a guide hole, the guide hole is in the shape of a waist circle hole, and the guide hole extends along the oblique direction of the connecting piece.

4. The vacuum coating apparatus according to claim 1, wherein The longitudinal support is provided with a plurality of longitudinal supports, and the longitudinal supports are sequentially arranged in a direction perpendicular to the transverse support.

5. The vacuum coating apparatus according to claim 4, wherein The device further comprises a first reinforcing piece, and the first reinforcing piece is used for connecting two adjacent longitudinal supports.

6. The vacuum coating apparatus according to claim 1, wherein The device further comprises a second reinforcing piece and a third reinforcing piece, the second reinforcing piece is used for connecting the transverse support and the bottom support, the third reinforcing piece is used for connecting the second reinforcing piece and the bottom support, and the third reinforcing piece is in the shape of a triangle.

7. The vacuum coating apparatus according to claim 1, wherein The transverse support is provided with a plurality of transverse supports, and the transverse supports are sequentially arranged along the height direction of the longitudinal support, the length of the upper transverse support is less than the length of the lower transverse support.

8. The vacuum coating apparatus according to claim 1, wherein The bottom support comprises a plurality of crossbeams and a plurality of longitudinal beams, the crossbeams are connected with the longitudinal beams and are perpendicular, and the bottom support is in the shape of a quadrilateral. The device further comprises a fourth reinforcing piece, and the fourth reinforcing piece is used for connecting two adjacent crossbeams and longitudinal beams, and the fourth reinforcing piece is in the shape of a triangle.

9. The vacuum coating apparatus according to claim 1, wherein When a plurality of the vacuum coating units are arranged along the up-down direction of the support body, the vacuum coating unit comprises a molecular pump and a rotating cathode target material, the support body has a containing cavity, a partition plate is arranged in the containing cavity to divide the containing cavity into an upper coating cavity and a lower coating cavity, the upper side of the support body is provided with a plurality of molecular pumps and a plurality of rotating cathode target materials, and the lower side of the support body is provided with a plurality of molecular pumps and a plurality of rotating cathode target materials.

10. The vacuum coating apparatus according to claim 9, wherein The upper side of the support body is provided with an upper support plate, and the lower side of the support body is provided with a lower support plate, the upper support plate and the lower support plate are provided with through holes corresponding to each chamber part, the through holes are communicated with the corresponding chambers, the surfaces of the upper support plate and the lower support plate away from each other are provided with a plurality of convex parts protruding from the surfaces, the convex parts are located between two adjacent through holes, the front and back sides of the convex parts on the support plate are respectively formed into a molecular pump placing area and a cathode placing area, the molecular pump placing area is provided with a molecular pump placing plate, and the molecular pump placing plate is provided with an opening communicated with the chamber; the cathode placing area is provided with a cathode placing plate, and the cathode placing plate is provided with an opening communicated with the chamber.

Images