Graphite-based silicon carbide heat-conducting coating device

By designing a detachable flange connection and a graphite-based silicon carbide thermally conductive coating device with a multi-layer turbulence structure, the problem of easy clogging of the airflow diffuser was solved, thereby improving the vapor deposition effect and facilitating cleaning.

CN223607356UActive Publication Date: 2025-11-28JIANGSU HENGCHENG SEMICON MATERIALS CO LTD
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Patent Information

Application Number
CN202422721136.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-08
Publication Date
2025-11-28
Estimated Expiration
2034-11-08

AI Technical Summary

Technical Problem

In existing technologies, airflow diffusers are prone to clogging, resulting in poor vapor deposition and making them difficult to clean and replace.

Method used

A graphite-based silicon carbide thermally conductive coating device was designed, which adopts a detachable flange connection and a multi-layer turbulence structure, including components such as a fixed cylinder, an outer mesh cylinder, an internal threaded cylinder cover, and a mesh plate, which facilitates disassembly and cleaning and avoids clogging.

Benefits of technology

This enables the long-term effective use of the airflow diffuser, avoids blockage affecting airflow dispersion, and improves the vapor deposition effect.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a graphite-based silicon carbide heat-conducting coating device, which relates to the technical field of graphite-based processing and comprises a box body, an air flow diffuser is inserted at the bottom of the box body, a connecting pipe is arranged below the air flow diffuser, and the air flow diffuser comprises a fixed cylinder. The bottom of the box body, the bottom of the fixing cylinder and the top of the connecting pipe are detachably connected through flange connecting pieces, a lower edge plate is fixed to the top end in the fixing cylinder, the airflow diffuser is inserted into the bottom end in the box body from the bottom of the box body, and a flange at the bottom of the fixing cylinder and a flange at the bottom of the box body are overlapped. And the flange at the top of the connecting pipe is located at the bottom of the flange of the fixed cylinder, so that the box body and the flange of the connecting pipe can be connected with the flange of the fixed cylinder through bolts to achieve the clamping and limiting effects, the connecting pipe can achieve the detachable effect after being used for a period of time, the connecting pipe can be replaced conveniently, and it is avoided that blockage affects emission of airflow.
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Description

TECHNICAL FIELD

[0001] The utility model relates to graphite base processing technical field, in particular to a graphite base silicon carbide heat conduction coating device. BACKGROUND

[0002] According to the disclosure number "CN217127298U" proposed, change traditional air inlet and air outlet on the position of the box, set up the air inlet at the bottom of the box, set up the air outlet at the top of the box, the gas with deposition material enters from the air inlet at the bottom of the box, the gas needs first through the airflow diffuser before entering the inside of the box, the airflow diffuser diffuses the deposition airflow, avoids the airflow vertical effect on the sample surface, the airflow from the airflow diffuser rises, carries out the gas phase deposition to the sample in the box, in this way, utilize the airflow diffuser to diffuse the airflow, avoid the gas directly impacting the surface of the sample in the box, that is, avoid the vertical impact of the airflow on the sample surface influence gas phase deposition, improve the gas phase deposition rate of the sample.

[0003] The inventor found in the process of realizing the scheme that the prior art has the following problems which have not been well solved: the airflow is disturbed to be dispersed and discharged, and a certain amount of deposits will appear before and after the airflow flows through the airflow diffuser, the deposits will cause the mesh to be blocked, the airflow diffuser is located at the inner bottom of the box, and the whole is not convenient to take out, and when the mesh is blocked, the emission of the airflow will be seriously affected, thereby causing poor gas phase deposition effect. UTILITY MODEL CONTENTS

[0004] The main purpose of the utility model is to provide a graphite base silicon carbide heat conduction coating device, which can effectively solve the problems in the background art.

[0005] To achieve the above-mentioned purpose, the technical scheme adopted by the utility model is as follows:

[0006] A graphite base silicon carbide heat conduction coating device, comprising a box, a airflow diffuser is inserted at the bottom of the box, an adapter pipe is arranged below the airflow diffuser, the airflow diffuser comprises a fixed cylinder, the bottom of the fixed cylinder, the bottom of the box and the top of the adapter pipe are detachably connected by flange connectors, a lower edge plate is fixed at the top of the fixed cylinder, an outer mesh cylinder is arranged above the fixed cylinder, an inner threaded cylinder cover is arranged above the outer mesh cylinder, a lower edge plate is fixed at the top of the fixed cylinder, an inner mesh cylinder is inserted above the lower edge plate, a bottom edge plate is fixed to the outer wall of the bottom of the inner mesh cylinder, outer threaded cylinders are arranged at the top and bottom of the outer mesh cylinder, an outer mesh cylinder is fixed to the top of the inner mesh cylinder, an upper mesh plate is embedded in the top of the inner threaded cylinder cover, and a plurality of pressing columns are fixed to the top of the inner threaded cylinder cover.

[0007] Preferably, the outer thread cylinder below the outer mesh cylinder is inserted into the inner bottom end of the fixed cylinder and is threadedly connected with the inner wall thereof, the bottom of the outer thread cylinder is in contact with the top of the bottom edge plate, and the bottom of the bottom edge plate is in contact with the top of the lower edge plate.

[0008] Preferably, the inner thread cylinder cover is sleeved on the outer wall of the outer thread cylinder above the outer mesh cylinder and is threadedly connected with the outer wall, the lower mesh plate is embedded in the inner part of the outer thread cylinder, and the bottom of the lower mesh plate is in contact with the top of the upper edge plate and the bottom of the pressure column is in contact with the top of the lower mesh plate.

[0009] Preferably, the flange connector is combined by a bolt assembly and a flange plate.

[0010] Preferably, the top and bottom of the fixed cylinder flange are provided with sealing pads.

[0011] Compared with the prior art, the air flow diffuser has the following beneficial effects:

[0012] 1. The air flow diffuser is inserted into the inner bottom end of the box body from the position of the bottom of the box body, the flange of the fixed cylinder bottom is overlapped with the flange of the box body bottom, and the flange at the top of the connecting pipe is located at the bottom of the fixed cylinder flange, so that the flanges of the box body and the connecting pipe can clamp and limit the flange of the fixed cylinder through the connection of the bolts, the connecting pipe can be disassembled after a period of use, the connecting pipe is convenient to replace, and the influence of the air flow diffusion caused by the blockage is avoided.

[0013] 2. When the connecting pipe is taken out, the outer thread cylinders at the top and bottom of the outer mesh cylinder can be respectively rotated and separated from the inner wall of the lower edge plate and the inner wall of the inner thread cylinder cover, when the outer mesh cylinder is separated from the fixed cylinder, the inner mesh cylinder clamped between the bottom of the outer mesh cylinder and the top of the lower edge plate can be taken out, and when the outer mesh cylinder is separated from the inner thread cylinder cover, the lower mesh plate clamped between the bottom of the pressure column and the top of the upper edge plate can be taken out, and the disassembly is completed, and the outer mesh cylinder, the inner mesh cylinder, the upper mesh plate and the lower mesh plate can be cleaned, so that the air flow diffuser can be used for a long time. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a structure schematic view of the graphite-based silicon carbide heat-conducting coating device;

[0015] Figure 2 It is a disassembly structure schematic view of the graphite-based silicon carbide heat-conducting coating device;

[0016] Figure 3 It is an air flow diffuser explosion structure schematic view of the graphite-based silicon carbide heat-conducting coating device;

[0017] Figure 4The utility model relates to a kind of graphite-based silicon carbide heat-conducting coating device's pressure column bottom view structural schematic diagram.

[0018] In the drawing: 1, box body;2, airflow diffuser;21, fixed cylinder;211, lower edge plate;22, outer mesh cylinder;221, outer threaded cylinder;222, upper edge plate;23, inner threaded cylinder cover;231, upper mesh plate;232, pressure column;233, lower mesh plate;24, inner mesh cylinder;241, bottom edge plate;3, adapter pipe;4, flange connector;5, sealing gasket. DETAILED DESCRIPTION

[0019] In order to make the technical means, creative features, purposes and effects of the utility model easy to understand, the following will further describe the utility model in combination with specific embodiments.

[0020] As Figures 1-4 shown, a kind of graphite-based silicon carbide heat-conducting coating device, including box body 1, box body 1 bottom is provided with airflow diffuser 2, the lower portion of airflow diffuser 2 is equipped with adapter pipe 3, airflow diffuser 2 includes fixed cylinder 21, the bottom of box body 1, the bottom of fixed cylinder 21 and the top of adapter pipe 3 are respectively through flange connector 4 detachably connected fixed cylinder 21 inner top end is fixed with lower edge plate 211, the upper portion of fixed cylinder 21 is equipped with outer mesh cylinder 22, the upper portion of outer mesh cylinder 22 is equipped with inner threaded cylinder cover 23, fixed cylinder 21 inner top end is fixed with lower edge plate 211, fixed cylinder 21 is located in the upper portion of lower edge plate 211 and is inserted with inner mesh cylinder 24, inner mesh cylinder 24 bottom outer wall is fixed with bottom edge plate 241, the top and bottom of outer mesh cylinder 22 are all provided with outer threaded cylinder 221, outer mesh cylinder 22 inner top end is fixed with outer mesh cylinder 22, the top of inner threaded cylinder cover 23 is embedded with upper mesh plate 231, the inner top end of inner threaded cylinder cover 23 is fixed with several pressure columns 232.

[0021] Specifically, outer threaded cylinder 221 under outer mesh cylinder 22 is inserted into the inner bottom top end of fixed cylinder 21 and is connected with its inner wall thread, the bottom of this outer threaded cylinder 221 is in contact with the top of bottom edge plate 241, the bottom of bottom edge plate 241 is in contact with the top of lower edge plate 211, inner threaded cylinder cover 23 is sleeved on the outer wall of outer threaded cylinder 221 above outer mesh cylinder 22 and is connected with its thread, lower mesh plate 233 is embedded in the inside of this outer threaded cylinder 221, and the bottom of lower mesh plate 233 is in contact with the top of upper edge plate 222, the bottom of pressure column 232 is in contact with the top of lower mesh plate 233, while playing the role of multi-layer turbulence, it has the effect of convenient disassembly and cleaning.

[0022] Specifically, flange connector 4 is combined by bolt assembly and flange plate, which is convenient to disassemble.

[0023] Specifically, the top and bottom of fixed cylinder 21 flange are all provided with sealing gasket 5, to avoid the leakage of airflow, keep good sealing property.

[0024] Working principle: the airflow diffuser 2 is inserted into the inside bottom end of the box body 1 from the position of the bottom of the box body 1, the flange at the bottom of the fixing cylinder 21 is overlapped with the flange at the bottom of the box body 1, and the flange at the top of the connecting pipe 3 is located at the bottom of the flange of the fixing cylinder 21, so that the flanges of the box body 1 and the connecting pipe 3 can clamp and limit the flange of the fixing cylinder 21 through the connection of the bolts, so that the connecting pipe 3 can be disassembled after a period of use, facilitating replacement, avoiding blockage and affecting the emission of airflow, when the connecting pipe 3 is taken out, the outer thread cylinder 221 at the top and bottom of the outer net cylinder 22 can be respectively rotated and separated from the inner wall of the lower edge plate 211 and the inner wall of the inner thread cylinder cover 23, and when the outer net cylinder 22 is separated from the fixing cylinder 21, the inner net cylinder 24 clamped between the bottom of the outer net cylinder 22 and the top of the lower edge plate 211 can be taken out, and when the outer net cylinder 22 is separated from the inner thread cylinder cover 23, the lower net plate 233 clamped between the bottom of the pressing column 232 and the top of the upper edge plate 222 can be taken out, and the above completes the disassembly work, that is, the outer net cylinder 22, the inner net cylinder 24, the upper net plate 231 and the lower net plate 233 can be cleaned, so that the airflow diffuser 2 can be used for a long time;

[0025] The present application only improves the problems proposed in the background art, and the remaining structural components have been proposed in the comparative application, and will not be described in detail in the present application.

[0026] The circuit, electronic components and control module are all prior art, and those skilled in the art can realize them without further description, and the content protected by the present application does not involve improvement of software and methods.

[0027] The basic principles and main features of the present application and the advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited to the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A graphite-based silicon carbide thermally conductive coating device comprising a box (1), characterized in that: The bottom of the box (1) is provided with an airflow diffuser (2), and the lower portion of the airflow diffuser (2) is provided with a connecting pipe (3). The airflow diffuser (2) comprises a fixed cylinder (21). The bottom of the box (1), the bottom of the fixed cylinder (21), and the top of the connecting pipe (3) are respectively detachably connected to the fixed cylinder (21) through a flange connector (4). The inner top end of the fixed cylinder (21) is fixed with a lower edge plate (211). The upper portion of the fixed cylinder (21) is provided with an outer mesh cylinder (22). The upper portion of the outer mesh cylinder (22) is provided with an internally threaded cylinder cover (23). The inner top end of the fixed cylinder (21) is fixed with a lower edge plate (211). The fixed cylinder (21) is inserted with an inner mesh cylinder (24) above the lower edge plate (211). The bottom outer wall of the inner mesh cylinder (24) is fixed with a bottom edge plate (241). The top and bottom of the outer mesh cylinder (22) are provided with an externally threaded cylinder (221). The inner top end of the outer mesh cylinder (22) is fixed with an outer mesh cylinder (22). The top of the internally threaded cylinder cover (23) is embedded with an upper mesh plate (231). The inner top end of the internally threaded cylinder cover (23) is fixed with a plurality of pressing columns (232).

2. A graphite-based silicon carbide heat-conducting coating device according to claim 1, characterized in that: The externally threaded cylinder (221) below the outer mesh cylinder (22) is inserted into the inner bottom top end of the fixed cylinder (21) and is threadedly connected with the inner wall thereof. The bottom of the externally threaded cylinder (221) is in contact with the top of the bottom edge plate (241). The bottom of the bottom edge plate (241) is in contact with the top of the lower edge plate (211).

3. A graphite-based silicon carbide heat-conducting coating device according to claim 1, characterized in that: The internally threaded cylinder cover (23) is sleeved on the outer wall of the externally threaded cylinder (221) above the outer mesh cylinder (22) and is threadedly connected therewith. The inner portion of the externally threaded cylinder (221) is embedded with a lower mesh plate (233). The bottom of the lower mesh plate (233) is in contact with the top of the upper edge plate (222). The bottom of the pressing column (232) is in contact with the top of the lower mesh plate (233).

4. A graphite-based silicon carbide thermal coating device according to claim 1, wherein: The flange connector (4) is composed of a bolt assembly and a flange plate.

5. A graphite-based silicon carbide heat sink coated device according to claim 1, wherein: The top and bottom of the flange of the fixed cylinder (21) are provided with sealing gaskets (5).

Citation Information

Patent Citations

  • Graphite surface silicon carbide coating preparation device

    CN217127298U