Inner cavity sealing device of atomic layer deposition equipment
By employing components such as support boxes and transparent protective tubes in the atomic layer deposition equipment, the gas leakage problem caused by weakened valve sealing was solved, achieving sealing of the equipment cavity and reaction stability, thus ensuring reliable operation of the equipment.
Patent Information
- Application Number
- CN202422981492.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-04
- Publication Date
- 2025-11-28
- Estimated Expiration
- 2034-12-04
AI Technical Summary
In atomic layer deposition equipment, frequent opening and closing of control valves weakens the valve core's sealing performance, making it easy for gas to leak into the inner cavity through the pipeline. Furthermore, even slight leaks are difficult to detect in time, affecting the stability of the reaction within the cavity.
The design employs a combination of a support box, a transparent protective tube, a support ring, a moving linkage, a sealing mechanism, and a reset and pressure relief mechanism. It uses a sealing block and a reset spring to resist gas leakage, and the gas is stored in the transparent protective tube to prevent it from entering the equipment cavity, allowing for timely detection and maintenance.
Maintain the airtightness and reaction stability of the equipment's internal cavity, promptly detect and address leaks, and ensure the reliability of equipment operation and the continuity of the reaction.
Smart Images
Figure CN223607358U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to atomic layer deposition equipment technical field, concretely relates to a kind of atomic layer deposition equipment inner cavity sealing device. BACKGROUND
[0002] Atomic layer deposition is a kind of technology by gas phase precursor pulse alternately into reactor and chemisorption and reaction on deposition matrix to form deposition film.When precursor reaches deposition matrix surface, they will chemisorption and surface reaction on its surface.
[0003] The sealing property of the inner cavity of the atomic deposition equipment is important for the reaction in the cavity, and the gas source bottle in the current equipment is mainly connected with the inner cavity through a pipeline, and a corresponding control valve is provided on the pipeline. However, frequent opening and closing of the control valve can weaken the sealing property of the valve core, causing the gas in the gas source bottle to easily leak into the inner cavity through the pipeline, and the weak leakage is difficult to discover in time, thereby adversely affecting the reaction in the cavity. Therefore, an atomic layer deposition equipment inner cavity sealing device is proposed. SUMMARY
[0004] The utility model discloses a kind of atomic layer deposition equipment inner cavity sealing devices to solve the problem that frequent opening and closing of the control valve can weaken the sealing property of the valve core, causing the gas in the gas source bottle to easily leak into the inner cavity through the pipeline, and the weak leakage is difficult to discover in time, thereby adversely affecting the reaction in the cavity.
[0005] The utility model discloses a kind of atomic layer deposition equipment inner cavity sealing devices to solve the problem that frequent opening and closing of the control valve can weaken the sealing property of the valve core, causing the gas in the gas source bottle to easily leak into the inner cavity through the pipeline, and the weak leakage is difficult to discover in time, thereby adversely affecting the reaction in the cavity.
[0006] A kind of atomic layer deposition equipment inner cavity sealing device, including support box, multiple assembly holes are set on the side wall of the support box, multiple The transparent protective tube is arranged in the assembly hole, the inner side wall of the transparent protective tube is fixedly installed with support ring, and multiple communication holes are set on the side wall of support ring, the mobile connecting rod is slidably inserted in the support ring, and the both ends of the mobile connecting rod are provided with sealing mechanism, the one side of the mobile connecting rod is provided with reset pressure relief mechanism on the support ring, the end surface side wall of the transparent protective tube is provided with link mechanism.
[0007] Preferably, the sealing mechanism includes two sealing rings, both the sealing rings are fixedly installed at both ends of the transparent protective tube, and the sealing rings are distributed at both ends of the mobile connecting rod, both the sealing rings are slidably provided with sealing block, and both the sealing blocks are fixedly installed at both ends of the mobile connecting rod.
[0008] Preferably, the sealing mechanism comprises two sealing rings, both of which are fixedly installed at two ends of the transparent protective tube and are distributed at two ends of the moving connecting rod, and a sealing block is slidably arranged in each of the two sealing rings and is fixedly installed at two ends of the moving connecting rod.
[0009] Preferably, a plurality of through holes are formed in the side wall of the sliding ring and are arranged in a ring shape.
[0010] Preferably, the plurality of assembly holes are arranged in a linear shape and are arranged in an equidistant manner.
[0011] Preferably, the connecting mechanism comprises a connecting pipe, one end of which is fixedly installed on the transparent protective tube, and a connecting sleeve head is arranged on the transparent protective tube.
[0012] The beneficial effects of the utility model are as follows:
[0013] 1. In the utility model, the connecting pipe on one side is fixed on the pipeline of the gas source bottle by the connecting sleeve head, and then the connecting pipe on the other side is connected with the cavity in the equipment, so that when the control valve on the gas source bottle leaks due to weakened sealing performance, the generated gas will accumulate in the transparent protective tube and be resisted by the sealing block and the reset spring, thereby avoiding the gas from entering the cavity of the equipment, which can maintain the sealing performance of the cavity in the equipment and the stability of the reaction in the cavity, and when the sealing block is extruded and protrudes from the sealing ring, it can be easily found by the staff, so that timely maintenance and treatment can be performed. BRIEF DESCRIPTION OF DRAWINGS
[0014] Fig. 1 is the front view of the whole three-dimensional connection structure of the utility model;
[0015] Fig. 2 is the three-dimensional connection structure schematic view of the transparent protective tube and the connecting mechanism in the utility model;
[0016] Fig. 3 is the partial cross-sectional three-dimensional connection structure schematic view of the anti-skid pipe in the utility model.
[0017] Reference signs: 1, support box; 2, assembly hole; 3, connecting pipe; 4, connecting sleeve head; 5, transparent protective tube; 6, support ring; 7, moving connecting rod; 8, sliding ring; 9, reset spring; 10, sealing ring; 11, sealing block; 12, communication hole; 13, through hole. DETAILED DESCRIPTION
[0018] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0019] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0020] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0021] In the description of the embodiments of this utility model, it should be noted that the terms "inner", "outer", "upper", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0022] like Figs. 1-3 As shown, an internal cavity sealing device for an atomic layer deposition equipment includes a support box 1. The side wall of the support box 1 has multiple assembly holes 2, which are arranged linearly and are equally spaced. Each assembly hole 2 is provided with a transparent protective tube 5. By setting multiple assembly holes 2, more transparent protective tubes 5 can be installed, thereby accommodating more gas source cylinder pipelines.
[0023] The inner side wall of the transparent protective tube 5 is fixedly provided with a supporting ring 6, a plurality of communication holes 12 are formed in the side wall of the supporting ring 6, a moving connecting rod 7 is slidably inserted into the supporting ring 6, and the two ends of the moving connecting rod 7 are provided with sealing mechanisms, the sealing mechanisms include two sealing rings 10, the two sealing rings 10 are fixedly installed on the two ends of the transparent protective tube 5, and the sealing rings 10 are distributed on the two ends of the moving connecting rod 7, the two sealing rings 10 are slidably provided with sealing blocks 11, and the two sealing blocks 11 are fixedly installed on the two ends of the moving connecting rod 7, preferably the sealing blocks 11 and the sealing rings 10 are provided in different colors, so as to be easily distinguished. The transparent protective tube 5 can be easily observed, so that the position change of the sealing block 11 can be easily found, so that timely maintenance can be performed.
[0024] A reset pressure relief mechanism is arranged on one side of the moving connecting rod 7, the reset pressure relief mechanism includes two sliding rings 8, the two sliding rings 8 are fixedly installed on the moving connecting rod 7, and the sliding rings 8 are arranged on the two sides of the supporting ring 6, a plurality of through holes 13 are formed in the side wall of the sliding ring 8, and the plurality of through holes 13 are arranged in a ring shape, the plurality of through holes 13 can facilitate the flow of gas, thereby reducing the resistance of the gas flowing in the transparent protective tube 5.
[0025] The two sliding rings 8 are arranged between the two sealing blocks 11, the side wall of the two sliding rings 8 is fixedly provided with a reset spring 9, and the reset spring 9 is slidably sleeved on the moving connecting rod 7, one end of the reset spring 9 is fixedly installed on the side wall of the supporting ring 6, when the control valve on the gas source bottle is weakened in sealing performance and causes gas leakage, the generated gas will accumulate in the transparent protective tube 5, and will be resisted by the sealing block 11 and the reset spring 9, thereby avoiding the gas entering the cavity of the equipment, so as to maintain the sealing performance of the inner cavity of the equipment and the stability of the reaction in the inner cavity.
[0026] An adapter mechanism is arranged on the end face side wall of the transparent protective tube 5, the adapter mechanism includes an adapter pipe 3, one end of the adapter pipe 3 is fixedly installed on the transparent protective tube 5, and an adapter sleeve head 4 is arranged on the transparent protective tube 5, the adapter sleeve head 4 can facilitate the installation of the transparent protective tube 5 on the pipeline of the gas source bottle.
[0027] In summary: when installing, the adapter pipe 3 on one side is fixed on the pipeline of the gas source bottle by the adapter sleeve head 4, then the adapter pipe 3 on the other side is connected with the cavity in the equipment, so that when the control valve on the gas source bottle is weakened in sealing performance and causes gas leakage, the generated gas will accumulate in the transparent protective tube 5, and will be resisted by the sealing block 11 and the reset spring 9, thereby avoiding the gas entering the cavity of the equipment, and at the same time the sealing block 11 will be pushed to be dislocated with the sealing ring 10 under the action of the pressure, so as to facilitate the timely occurrence and maintenance of the equipment by the staff.
[0028] The above description enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. An atomic layer deposition apparatus inner cavity sealing device, characterized by, The utility model provides a support box, the side wall of support box (1) is equipped with a plurality of assembly hole (2), a plurality of assembly hole (2) are all provided with transparent protective tube (5), the inner side wall of transparent protective tube (5) is fixedly installed with support ring (6), and support ring (6) is equipped with a plurality of intercommunication hole (12) on the side wall, the movable connecting rod (7) is slidably inserted in support ring (6), and the both ends of movable connecting rod (7) are provided with sealing mechanism, and the one side of movable connecting rod (7) is provided with reset pressure relief mechanism on support ring (6), and the end face side wall of transparent protective tube (5) is provided with link mechanism.
2. The ALD chamber closure device of claim 1, wherein The sealing mechanism includes two sealing rings (10), both sealing rings (10) are fixedly installed on both ends of the transparent protective tube (5), and the sealing rings (10) are distributed on both ends of the movable connecting rod (7), both sealing rings (10) are slidably provided with sealing blocks (11), and both sealing blocks (11) are fixedly installed on both ends of the movable connecting rod (7).
3. The ALD chamber closure device of claim 2, wherein, The reset pressure relief mechanism includes two sliding rings (8), both sliding rings (8) are fixedly installed on the movable connecting rod (7), and the sliding rings (8) are arranged on both sides of the support ring (6), both sliding rings (8) are arranged between the two sealing blocks (11), reset springs (9) are fixedly installed on the side walls of both sliding rings (8), and the reset springs (9) are slidably sleeved on the movable connecting rod (7), one end of the reset spring (9) is fixedly installed on the side wall of the support ring (6).
4. The ALD chamber closure device of claim 3, wherein the at least one of the plurality of gas inlets is configured to provide a gas flow rate of about 0.1 to about 10 seem. The side wall of the sliding ring (8) is provided with a plurality of through holes (13), and the plurality of through holes (13) are arranged in a ring shape.
5. The ALD chamber closure device of claim 1, wherein, A plurality of assembly holes (2) are arranged in a linear shape, and a plurality of assembly holes (2) are arranged in an equal interval.
6. The ALD chamber closure device of claim 1, wherein, The link mechanism includes a link tube (3), one end of the link tube (3) is fixedly installed on the transparent protective tube (5), and the transparent protective tube (5) is provided with a link sleeve head (4).