Electrode assembly and reaction furnace

Abstract

The utility model relates to the technical field of photovoltaics or semiconductors, in particular to an electrode assembly and a reaction furnace, and solves the problem that high-position boat entering easily causes deformation and arcing of an electrode stem and even causes breakage of the electrode stem. The electrode assembly comprises a supporting assembly, a first electrode rod assembly and an elastic assembly, the supporting assembly can be connected with the inner wall of the cavity, the first electrode rod assembly and the supporting assembly are adjacently arranged in the vertical direction, and in the process that the boat structure is placed into the cavity, the first end of the first electrode rod assembly can be inserted into an electrode hole of the boat structure; the elastic assembly is arranged between the second end of the first electrode stem assembly and the supporting assembly, and when the boat structure falls, the elastic assembly provides elastic force for the first electrode stem assembly in the vertical direction, so that the first electrode stem assembly integrally falls along with the boat structure instead of only the first end of the first electrode stem assembly falls along with the boat structure; and the probability of deformation arcing and breakage of the first electrode rod assembly is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic or semiconductor technology, and in particular to an electrode assembly and a reaction furnace. BACKGROUND

[0002] The plasma enhanced chemical vapor deposition (PECVD) process is to ionize the process gas by using the discharge of the radio frequency power source to realize the film coating of the product. At present, the graphite boat is usually used to carry the product in the industry, and the graphite boat has two adjacent boat pieces. The boat piece has a conductive function, so that the positive and negative electrodes of the radio frequency power source only need to be introduced into the graphite boat to realize the discharge.

[0003] In the related art, the electrode rod of the radio frequency power source is fixedly installed on the cavity of the reaction furnace, and the electrode rod is in a cantilever state extending into the cavity. When the graphite boat enters the cavity, the high-position boat is realized by using the boat pushing structure. During the high-position boat process, the electrode rod is inserted into the electrode hole of the graphite boat, the graphite boat falls, and the end of the electrode rod inserted into the electrode hole falls with the graphite boat. At this time, the electrode rod is deformed and arcs, and even breaks. UTILITY MODEL CONTENT

[0004] Therefore, the electrode assembly and the reaction furnace provided by the embodiments of the present application solve the problem that the high-position boat easily causes the deformation and arcing of the electrode rod, and even causes the breakage of the electrode rod.

[0005] In a first aspect, an embodiment of the present application provides an electrode assembly applied to a reaction furnace. The reaction furnace includes a cavity having a cavity chamber capable of accommodating a boat structure. The electrode assembly includes: a support assembly capable of being connected with an inner wall of the cavity; a first electrode rod assembly disposed adjacent to the support assembly in a vertical direction, a first end of the first electrode rod assembly being capable of being inserted into an electrode hole of the boat structure during a process of placing the boat structure into the cavity chamber; and an elastic assembly disposed between a second end of the first electrode rod assembly and the support assembly and configured to provide an upward force to the second end of the first electrode rod assembly.

[0006] In combination with the first aspect, in some implementations of the first aspect, the electrode assembly further includes a guide assembly connected with the support assembly, the guide assembly extending along the vertical direction, and the second end of the first electrode rod assembly is slidably connected with the guide assembly.

[0007] With reference to the first aspect, in some implementations of the first aspect, the guide assembly comprises a guide rod connected with the support assembly, the guide rod extending in a vertical direction; the elastic assembly comprises a first spring sleeved on the guide rod and located below the second end of the first electrode rod assembly, two ends of the first spring being in abutment with the second end of the first electrode rod assembly and the support assembly respectively; and / or a second spring sleeved on the guide rod and located above the second end of the first electrode rod assembly, two ends of the second spring being connected with the second end of the first electrode rod assembly and the support assembly respectively.

[0008] With reference to the first aspect, in some implementations of the first aspect, the upper end of the guide rod has a limiting part; the support assembly comprises an upper support member connectable with the inner wall of the cavity and having a first guide hole, the limiting part being in abutment with the upper side of the upper support member, the guide rod passing through the first guide hole; a lower support member connectable with the inner wall of the cavity and having a second guide hole, the lower end of the guide rod penetrating into the second guide hole; and a limiting member provided on the side of the lower support member away from the upper support member and connected with the lower end of the guide rod.

[0009] With reference to the first aspect, in some implementations of the first aspect, the first electrode rod assembly comprises an electrode seat provided between the upper support member and the lower support member and having a third guide hole, the guide rod passing through the third guide hole; a first electrode rod, the second end of the first electrode rod being detachably connected with the electrode seat; and an electrode head connected with the first end of the first electrode rod, the electrode head being capable of being inserted into the electrode hole of the boat structure.

[0010] With reference to the first aspect, in some implementations of the first aspect, the electrode assembly further comprises a second electrode rod assembly capable of extending into the cavity chamber from the outside of the cavity and being in airtight connection with the cavity; and a flexible electrode rod assembly electrically connecting the second electrode rod assembly with the first electrode rod assembly.

[0011] With reference to the first aspect, in some implementations of the first aspect, the second electrode rod assembly comprises a second electrode rod, the first end of the second electrode rod being located outside the cavity, the second end of the second electrode rod extending into the cavity chamber; and a sealing member sealingly connecting the first end of the second electrode rod with the outside of the cavity.

[0012] In some implementations of the first aspect, the second end of the second electrode rod has a through slot; the flexible electrode rod assembly comprises: a flexible electrode rod including a flexible electrode rod body and a first connecting portion connected to each other, the first connecting portion has a cross-sectional area smaller than that of the flexible electrode rod body, and the first connecting portion extends into the through slot; and a first locking member located on a side of the second electrode rod away from the flexible electrode rod body and screwed with the first connecting portion.

[0013] In some implementations of the first aspect, the first electrode rod assembly has a through hole; the flexible electrode rod further comprises: a second connecting portion connected to an end of the flexible electrode rod body away from the first connecting portion, the second connecting portion has a cross-sectional area smaller than that of the flexible electrode rod body, and the second connecting portion extends into the through hole; and the flexible electrode rod assembly further comprises: a second locking member located on a side of the first electrode rod assembly away from the flexible electrode rod body and screwed with the second connecting portion.

[0014] In the second aspect, an embodiment of the present application provides a reaction furnace, comprising: a cavity having a chamber capable of accommodating a boat structure; and the electrode assembly of the first aspect arranged in the cavity.

[0015] The electrode assembly provided by the embodiment of the present application is arranged in the vertical direction and provides elastic force for the first electrode rod assembly in the vertical direction when the boat structure falls, so that the first electrode rod assembly as a whole falls with the boat structure instead of only the first end of the first electrode rod assembly falling with the boat structure, thereby reducing the probability of deformation, arc striking and fracture of the first electrode rod assembly. BRIEF DESCRIPTION OF DRAWINGS

[0016] The above and other objects, features and advantages of the present application will become more apparent from the following detailed description when taken in conjunction with the accompanying drawings in which:

[0017] Figure 1 Fig. 1 shows an application scenario of an electrode assembly provided by an embodiment of the present application.

[0018] Figure 2 Fig. 2 shows a partial enlarged view of the application scenario of the electrode assembly in area A. Figure 1 Fig. 3 shows a partial enlarged view of the application scenario of the electrode assembly in area B.

[0019] Figure 3 Fig. 4 shows a perspective view of a reaction furnace provided by an embodiment of the present application.

[0020] Figure 4 Fig. 1 shows a structural schematic diagram of a tail end cover and electrode assembly provided by an embodiment of the present application.

[0021] Figure 5 Fig. 2 shows a partial enlarged view of the tail end cover and electrode assembly in area A. Figure 4 Fig. 3 shows a partial enlarged view of the tail end cover and electrode assembly in area B.

[0022] Figure 6 Fig. 4 shows a side view of the tail end cover and electrode assembly provided by an embodiment of the present application.

[0023] Figure 7 Fig. 5 shows a partial enlarged view of the tail end cover and electrode assembly in area C. Figure 6 Fig. 6 shows a partial enlarged view of the tail end cover and electrode assembly in area D.

[0024] Figure 8 Fig. 7 shows a structural schematic diagram of a tail end cover and electrode assembly provided by another embodiment of the present application.

[0025] Figure 9 Fig. 8 shows a front view of the tail end cover and electrode assembly provided by an embodiment of the present application.

[0026] Figure 10 Fig. 9 shows a partial enlarged view of the tail end cover and electrode assembly in area E. Figure 9 Fig. 10 shows a partial enlarged view of the tail end cover and electrode assembly in area F.

[0027] Figure 11 Fig. 11 shows a front view of a reaction furnace and boat structure provided by an embodiment of the present application.

[0028] Reference signs:

[0029] 1, reaction furnace; 101, cavity; 1010, annular main body; 1020, tail end cover; 1030, tail end flange; 1040, furnace mouth flange; 1050, furnace door; 102, support seat; 103, observation window; 1001, cavity; 10, electrode assembly; 100, support assembly; 110, upper support; 1101, first guide hole; 1102, limiting groove; 120, lower support; 1201, second guide hole; 130, limiting piece; 200, first electrode rod assembly; 210, electrode seat; 2101, third guide hole; 220, first electrode rod; 2201, first end of first electrode rod; 2202, second end of first electrode rod; 230, electrode head; 201, first end of first electrode rod assembly; 202, second end of first electrode rod assembly; 203, through hole; 300, elastic assembly; 310, first spring; 400, guide assembly; 410, guide rod; 4101, upper end of guide rod; 4102, lower end of guide rod; 4110, limiting part; 500, second electrode rod assembly; 510, second electrode rod; 5101, first end of second electrode rod; 5102, second end of second electrode rod; 5112, through groove; 520, sealing piece; 600, flexible electrode rod assembly; 610, flexible electrode rod; 6110, flexible electrode rod main body; 6120, first connecting part; 6130, second connecting part; 620, first locking piece; 630, second locking piece; 700, locking screw; 800, locking nut; 2, boat structure; 21, boat piece; 2001, electrode hole; 2002, clamping groove; 3, boat pushing structure. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0031] The specific structure of the electrode assembly will be described below with reference to the drawings.

[0032] Figure 1 The application scenario schematic diagram of the electrode assembly provided by an embodiment of the present application is shown. Figure 2 The application scenario schematic diagram of the electrode assembly provided by an embodiment of the present application is shown. Figure 1 The local enlarged view of the application scenario of the electrode assembly is shown. Figure 3 The perspective view of the reaction furnace provided by an embodiment of the present application is shown. Figure 4 The structural schematic diagram of the tail end cover and the electrode assembly provided by an embodiment of the present application is shown. Figure 5 The structural schematic diagram of the tail end cover and the electrode assembly provided by an embodiment of the present application is shown. Figure 4A partial enlarged view of the tail end cover and the electrode assembly in the B area is shown. As shown in the figure Figures 1 to 5 As shown, the electrode assembly 10 is applied to the reaction furnace 1, which includes a cavity 101 having a chamber 1001 capable of accommodating the boat structure 2. The electrode assembly 10 includes a support assembly 100, a first electrode rod assembly 200, and an elastic assembly 300.

[0033] The support assembly 100 can be connected with the inner wall of the cavity 101, the first electrode rod assembly 200 is arranged vertically adjacent to the support assembly 100, and the first end 201 of the first electrode rod assembly can be inserted into the electrode hole 2001 of the boat structure 2 during the process of placing the boat structure 2 into the chamber 1001. The elastic assembly 300 is arranged between the second end 202 of the first electrode rod assembly and the support assembly 100, and is configured to provide an upward force to the second end 202 of the first electrode rod assembly.

[0034] The electrode assembly 10 is provided with the elastic assembly 300 in the vertical direction, and when the boat structure 2 falls, the elastic assembly 300 provides an elastic force to the first electrode rod assembly 200 in the vertical direction, so that the first electrode rod assembly 200 falls as a whole with the boat structure 2, rather than only the first end 201 of the first electrode rod assembly falls with the boat structure 2, thereby reducing the probability of deformation and arc of the first electrode rod assembly 200.

[0035] In addition, the electrode assembly 10 can also reduce the contact area between the first electrode rod assembly 200 and the electrode hole 2001 due to the deformation and arc of the first electrode rod assembly 200, thereby causing unstable current conduction of the boat structure 2, and further causing unstable electric field in the boat structure 2, thereby affecting the production quality of the products in the boat structure 2.

[0036] In addition, during high-temperature operation, once the first electrode rod assembly 200 deforms and arcs, it will remain permanently deformed, causing the first end 201 of the first electrode rod assembly to be unable to be inserted into the electrode hole 2001 of the boat structure 2 when the boat structure 2 is in a high position, thereby causing the boat structure 2 to fail to conduct electricity.

[0037] Exemplarily, the elastic assembly 300 can be located below the second end 202 of the first electrode rod assembly, and the elastic assembly 300 provides an upward thrust to the second end 202 of the first electrode rod assembly. When the boat structure 2 falls, the first electrode rod assembly 200 can compress the elastic assembly 300 in the vertical direction, so that the first electrode rod assembly 200 falls as a whole with the boat structure 2, rather than only the first end 201 of the first electrode rod assembly falls with the boat structure 2, thereby reducing the probability of deformation and arc of the first electrode rod assembly 200.

[0038] Exemplarily, the elastic assembly 300 can be located above the second end 202 of the first electrode rod assembly, and the elastic assembly 300 provides an upward pulling force for the second end 202 of the first electrode rod assembly. When the boat structure 2 falls, the first electrode rod assembly 200 can stretch the elastic assembly 300 in the vertical direction, so as to realize that the first electrode rod assembly 200 as a whole falls with the boat structure 2, instead of only the first end 201 of the first electrode rod assembly falls with the boat structure 2, thereby reducing the probability of deformation, arc and fracture of the first electrode rod assembly 200.

[0039] Exemplarily, as shown in Figure 2 The cavity 101 includes a ring-shaped body 1010 and a tail end cover 1020, the tail end cover 1020 is connected with one end of the ring-shaped body 1010 to close one end of the ring-shaped body 1010. The support assembly 300 can be connected with the inner wall of the tail end cover 1020.

[0040] Exemplarily, as shown in Figure 2 The cavity 101 further includes a tail end flange 1030, the tail end flange 1030 is connected with one end of the ring-shaped body 1010, and the tail end cover 1020 is connected with the tail end flange 1030 to close one end of the ring-shaped body 1010.

[0041] Exemplarily, as shown in Figure 3 The cavity 101 further includes a furnace mouth flange 1040 and a furnace door 1050, the furnace mouth flange 1040 is connected with the other end of the ring-shaped body 1010, and the furnace door 1050 is connected with the furnace mouth flange 1040 to close the other end of the ring-shaped body 1010.

[0042] Exemplarily, the reaction furnace 1 further includes a plurality of support seats 102, the plurality of support seats 102 are respectively connected with the tail end flange 1030 and the furnace mouth flange 1040 and are configured to support the boat structure 2. Exemplarily, the support seat 102 is a rod-shaped structure, the bottom of the boat structure 2 has a plurality of clamping grooves 2002, and the support seat 102 is partially located in the clamping groove 2002 to realize that the support seat 102 supports the boat structure 2.

[0043] The high-position boat feeding process of the embodiment of the present application is as follows:

[0044] The pushing boat structure 3 carries the boat structure 2 and sends the boat structure 2 into the chamber 1001 from above the support seat 102 until the first ends 201 of the first electrode rod assemblies can be inserted into the electrode holes 2001 of the boat structure 2, achieving high-position boat feeding. The pushing boat structure 3 moves downward, the boat structure 2 moves downward with the pushing boat structure 3, the first electrode rod assemblies 200 compress the elastic assemblies 300 in the vertical direction, so that the first electrode rod assemblies 200 move downward with the boat structure 2 until the boat structure 2 is placed on the support seat 102, and the boat structure 2 and the first electrode rod assemblies 200 stop moving downward. The pushing boat structure 3 continues to move downward to be separated from the boat structure 2, the pushing boat structure 3 exits the chamber 1001, and the high-position boat feeding process is completed.

[0045] Exemplarily, the boat structure 2 has two boat pieces 21, the boat pieces 21 have electrode holes 2001, and two groups of electrode assemblies 10 are arranged in the cavity 101. During the process of placing the boat structure 2 into the chamber 1001, the first ends 201 of the two first electrode rod assemblies can be inserted into the two electrode holes 2001 of the two boat pieces 21 respectively, and the two groups of electrode assemblies 10 are electrically connected with the positive electrode of the power supply and the negative electrode of the power supply respectively, so as to electrically connect the two boat pieces 21 with the positive electrode of the power supply and the negative electrode of the power supply respectively, thereby forming an electric field in the boat structure 2.

[0046] In some embodiments, the electrode assembly 10 further comprises a guide assembly 400, the guide assembly 400 is connected with the support assembly 100, and the guide assembly 400 extends in the vertical direction. The second end 202 of the first electrode rod assembly is slidably connected with the guide assembly 400.

[0047] By arranging the guide assembly 400, the movement of the first electrode rod assembly 200 in the vertical direction is more accurate, and the probability of deformation, arc and fracture of the first electrode rod assembly 200 is further reduced.

[0048] Exemplarily, the first electrode rod assembly 200 comprises a sliding block, the sliding block is located at the second end 202 of the first electrode rod assembly, the guide assembly 400 can be a sliding rail, the sliding rail extends in the vertical direction and is connected with the support assembly 100, and the sliding block is slidably connected with the sliding rail, so as to achieve that the second end 202 of the first electrode rod assembly is slidably connected with the guide assembly 400. By using the sliding rail to guide the movement of the first electrode rod assembly 200 in the vertical direction, the movement of the first electrode rod assembly 200 in the vertical direction is more accurate.

[0049] Exemplarily, the second end 202 of the first electrode rod assembly has a guide hole, the guide assembly 400 is a guide rod, the guide rod passes through the guide hole and is connected with the support assembly 100, and the guide rod is slidably connected with the inner wall of the guide hole, so as to achieve that the second end 202 of the first electrode rod assembly is slidably connected with the guide assembly 400.

[0050] In some embodiments, as Figure 4 andFigure 5 As shown, the guiding assembly 400 includes a guiding rod 410, which is connected with the support assembly 100 and extends in the vertical direction. The elastic assembly 300 includes a first spring 310, which is sleeved on the guiding rod 410 and is located below the second end 202 of the first electrode rod assembly. The two ends of the first spring 310 are in abutment with the second end 202 of the first electrode rod assembly and the support assembly 100, respectively. When the first electrode rod assembly 200 falls with the boat structure 2, the second end 202 of the first electrode rod assembly compresses the first spring 310 in the vertical direction, and the first spring 310 provides an upward thrust force for the second end 202 of the first electrode rod assembly. The above-mentioned elastic assembly 300 has a simple and reliable structure.

[0051] In some embodiments, the guiding assembly 400 includes a guiding rod 410, which is connected with the support assembly 100 and extends in the vertical direction. The elastic assembly 300 includes a second spring, which is sleeved on the guiding rod 410 and is located above the second end 202 of the first electrode rod assembly. The two ends of the second spring are connected with the second end 202 of the first electrode rod assembly and the support assembly 100, respectively. When the first electrode rod assembly 200 falls with the boat structure 2, the second end 202 of the first electrode rod assembly stretches the second spring in the vertical direction, and the second spring provides an upward pulling force for the second end 202 of the first electrode rod assembly. The above-mentioned elastic assembly 300 has a simple and reliable structure.

[0052] In some embodiments, the guiding assembly 400 includes a guiding rod 410, which is connected with the support assembly 100 and extends in the vertical direction. The elastic assembly 300 includes a first spring 310 and a second spring, both of which are sleeved on the guiding rod 410. The first spring 310 is located below the second end 202 of the first electrode rod assembly, and the two ends of the first spring 310 are in abutment with the second end 202 of the first electrode rod assembly and the support assembly 100, respectively. The second spring is located above the second end 202 of the first electrode rod assembly, and the two ends of the second spring are connected with the second end 202 of the first electrode rod assembly and the support assembly 100, respectively. The above-mentioned elastic assembly 300 has a simple and reliable structure.

[0053] In some embodiments, as shown in FIG. 6, the guiding assembly 400 includes a guiding rod 410, which is connected with the support assembly 100 and extends in the vertical direction. The elastic assembly 300 includes a first spring 310 and a second spring, both of which are sleeved on the guiding rod 410. The first spring 310 is located below the second end 202 of the first electrode rod assembly, and the two ends of the first spring 310 are in abutment with the second end 202 of the first electrode rod assembly and the support assembly 100, respectively. The second spring is located above the second end 202 of the first electrode rod assembly, and the two ends of the second spring are connected with the second end 202 of the first electrode rod assembly and the support assembly 100, respectively. The above-mentioned elastic assembly 300 has a simple and reliable structure. Figures 4 to 7As shown, the upper end 4101 of the guide rod has a limiting part 4110, and the support assembly 100 includes an upper support 110, a lower support 120, and a limiting part 130. The upper support 110 is connectable with the inner wall of the cavity 101, and the upper support 110 has a first guide hole 1101. The limiting part 4110 is in abutment with the upper side of the upper support 110, and the guide rod 410 passes through the first guide hole 1101. The lower support 120 is connectable with the inner wall of the cavity 101, and the lower support 120 has a second guide hole 1201. The lower end 4102 of the guide rod passes into the second guide hole 1201. The limiting part 130 is arranged on the side of the lower support 120 away from the upper support 110, is connected with the lower end 4102 of the guide rod, and the top surface of the limiting part 130 is in abutment with the side of the lower support 120 away from the upper support 110.

[0054] The structure and connection mode of the support assembly 100 and the guide rod 410 facilitate the installation and disassembly of the support assembly 100, the guide assembly 400, the elastic assembly 300, and the first electrode rod assembly 200.

[0055] Exemplarily, the upper support 110 and the lower support 120 are both connectable with the inner wall of the tail end cover 1020.

[0056] Exemplarily, the upper side of the upper support 110 has a limiting groove 1102, the limiting groove 1102 is in communication with the first guide hole 1101, and in the horizontal direction, the size of the limiting groove 1102 is greater than the size of the first guide hole 1101. The size of the limiting part 4110 is greater than the size of the first guide hole 1101, and the limiting part 4110 is located in the limiting groove 1102, so that the limiting part 4110 can be in abutment with the upper side of the upper support 110. The guide rod 410 passes through the first guide hole 1101 and the second end 202 of the first electrode rod assembly. Exemplarily, the top surface of the limiting part 4110 is flush with the top of the limiting groove 1102.

[0057] Exemplarily, the guide assembly 400 includes two guide rods 410, so as to further improve the guiding accuracy and stability of the guide assembly 400 to the movement of the first electrode rod assembly 200 in the vertical direction, so that the movement of the first electrode rod assembly 200 in the vertical direction is more accurate, and the probability of deformation, arc, and fracture of the first electrode rod assembly 200 is further reduced.

[0058] In some embodiments, as Figure 2 、 Figures 4 to 7As shown, the first electrode rod assembly 200 includes an electrode base 210, a first electrode rod 220, and an electrode head 230. The electrode base 210 is disposed between the upper support member 110 and the lower support member 120, and has a third guide hole 2101 through which the guide rod 410 passes. The second end 2202 of the first electrode rod is detachably connected to the electrode base 210, and the electrode head 230 is connected to the first end 2201 of the first electrode rod. The electrode head 230 can be inserted into the electrode hole 2001 of the boat structure 2.

[0059] The electrode holder 210 is slidably connected to the guide rod 410 through the third guide hole 2101. The structure is simple and facilitates the guidance of the movement of the electrode holder 210 in the vertical direction.

[0060] Exemplarily, the second end 2202 of the first electrode rod is detachably connected to the electrode holder 210 via a locking assembly. Exemplarily, the locking assembly includes a locking screw 700 and a locking nut 800, the shank of the locking screw 700 passing vertically through the second end 2202 of the first electrode rod and the electrode holder 210, and the locking nut 800 being threadedly connected to the end of the shank of the locking screw 700 to connect and lock the second end 2202 of the first electrode rod to the electrode holder 210.

[0061] In some embodiments, such as Figure 2 , Figure 4 and Figure 5 As shown, the electrode assembly 10 also includes a second electrode rod assembly 500 and a flexible electrode rod assembly 600. The second electrode rod assembly 500 can extend into the cavity 1001 from the outside of the cavity 101 and is hermetically connected to the cavity 101. The flexible electrode rod assembly 600 is electrically connected to the second electrode rod assembly 500 and the first electrode rod assembly 200.

[0062] When the first electrode rod assembly 200 falls with the boat structure 2, the flexible electrode rod assembly 600 can extend flexibly, and the second electrode rod assembly 500 remains stationary relative to the cavity 101, thus achieving a static seal between the second electrode rod assembly 500 and the cavity 101.

[0063] Exemplarily, the second electrode rod assembly 500 can extend from the outside of the tail end cover 1020 into the inside of the tail end cover 1020 and be sealed to the tail end cover 1020. When the first electrode rod assembly 200 falls with the boat structure 2, the flexible electrode rod assembly 600 can flexibly extend, and the second electrode rod assembly 500 remains stationary relative to the tail end cover 1020, thus achieving a static seal between the second electrode rod assembly 500 and the tail end cover 1020. The second electrode rod assembly 500 located on the outside of the tail end cover 1020 can be electrically connected to a power source, so that the first electrode rod assembly 200 can also be electrically connected to a power source.

[0064] Exemplarily, the tail end cover 1020 has a through hole communicating the chamber 1001 and the outside of the tail end cover 1020, the first electrode rod assembly 200 is electrically connected with a wire, the wire can pass through the through hole and be electrically connected with a power supply, in order to make the wire and the tail end cover 1020 be in airtight connection, a glue is usually used to seal the gap between the wire and the through hole. However, if the reaction furnace 1 needs to work under high temperature condition, the glue between the wire and the through hole is easy to melt, which causes the chamber 101 to be unable to be in a sealed state all the time. The static sealing mode of airtight connection between the second electrode rod assembly 500 and the tail end cover 1020 can be applied to the reaction furnace 1 working under high temperature condition, which can make the chamber 101 of the reaction furnace 1 be in a sealed state all the time, and improve the working stability of the reaction furnace 1, thereby improving the production quality of the products in the boat structure 2 in the reaction furnace 1.

[0065] In some embodiments, the second electrode rod assembly 500 comprises a second electrode rod 510 and a sealing member 520. The first end 5101 of the second electrode rod is located outside the chamber 101, and the second end 5102 of the second electrode rod extends into the chamber 1001. The sealing member 520 airtightly connects the first end 5101 of the second electrode rod and the outside of the chamber 101.

[0066] Exemplarily, as shown in Figure 4 , Figure 5 and Figure 8 , the first end 5101 of the second electrode rod is located outside the tail end cover 1020, and the second end 5102 of the second electrode rod extends into the inside of the tail end cover 1020.

[0067] Exemplarily, the first end 5101 of the second electrode rod passes through the sealing member 520, and the sealing member 520 is airtightly connected with the tail end cover 1020. Exemplarily, the sealing member 520 is airtightly connected with the tail end cover 1020 through a sealing ring.

[0068] In some embodiments, as shown in Figure 5 , Figure 9 and Figure 10 , the second end 5102 of the second electrode rod has a through slot 5112, the flexible electrode rod assembly 600 comprises a flexible electrode rod 610 and a first locking member 620. The flexible electrode rod 610 comprises a flexible electrode rod body 6110 and a first connecting portion 6120 connected with each other, the cross-sectional area of the first connecting portion 6120 is smaller than that of the flexible electrode rod body 6110, and the first connecting portion 6120 extends into the through slot 5112. The first locking member 620 is located on the side of the second electrode rod 510 away from the flexible electrode rod body 6110, and is screwed with the first connecting portion 6120.

[0069] The above arrangement facilitates the disassembly of the flexible electrode rod assembly 600 and the second electrode rod assembly 500, thereby facilitating the replacement of the first electrode rod assembly 200.

[0070] In some embodiments, the first electrode rod assembly 200 has a through hole 203, the flexible electrode rod 610 further comprises a second connecting part 6130 connected to an end of the flexible electrode rod body 6110 away from the first connecting part 6120, the second connecting part 6130 has a cross-sectional area smaller than that of the flexible electrode rod body 6110, and the second connecting part 6130 extends into the through hole 203. The flexible electrode rod assembly 600 further comprises a second locking part 630 located on a side of the first electrode rod assembly 200 away from the flexible electrode rod body 6110 and screwed with the second connecting part 6130.

[0071] Exemplarily, as shown in Figure 5 the first electrode rod 220 has a through hole 203, the second connecting part 6130 extends into the through hole 203, and the second locking part 630 is located on a side of the first electrode rod 220 away from the flexible electrode rod body 6110 and screwed with the second connecting part 6130.

[0072] The above arrangement facilitates disassembly of the flexible electrode rod assembly 600 and the first electrode rod assembly 200, thereby facilitating replacement of the first electrode rod assembly 200.

[0073] As shown in Figure 1 the reaction furnace 1 comprises a cavity 101 and the electrode assembly 10 mentioned in the above embodiments, the cavity 101 has a cavity chamber 1001 capable of accommodating the boat structure 2, and the electrode assembly 10 is arranged in the cavity 101.

[0074] Exemplarily, the reaction furnace 1 further comprises an observation window 103 arranged on the tail end cover 1020, so that the operator can see the structure in the cavity chamber 1001 through the observation window 103, thereby facilitating the operator to replace and maintain the electrode assembly 10.

[0075] Since the reaction furnace 1 comprises the electrode assembly 10, the reaction furnace 1 comprises all the technical features and technical effects of the electrode assembly 10, which will not be described here.

[0076] In the embodiments of the present application, if not specifically limited, the form of connection can be detachable connection through bolts and nuts, screws, buckles, magnetic attraction and the like. In some connections, if there is no special requirement for the form of detachable cooperation, non-detachable connection can be achieved through welding, bonding and the like.

[0077] The above describes the basic principles of the present application in combination with specific embodiments, but it needs to be pointed out that the advantages, benefits, effects and the like mentioned in the present application are only examples and are not limiting, and these advantages, benefits, effects and the like cannot be considered as necessary for each embodiment of the present application. In addition, the above specific details disclosed are only for the purpose of example and understanding, and are not limiting, and the above details do not limit the present application to be necessarily implemented with the above specific details.

[0078] The block diagrams of the devices, apparatuses, equipment, systems involved in the present application are only illustrative examples and are not intended to require or imply the connection, arrangement, configuration shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, systems can be connected, arranged, configured in any manner. Words such as "include", "contain", "have" and the like are open-ended words, mean "including but not limited to", and can be used interchangeably. The words "or" and "and" used herein mean the word "and / or", and can be used interchangeably unless the context clearly indicates otherwise. The word "such as" used herein means the phrase "such as but not limited to", and can be used interchangeably.

[0079] It also needs to be pointed out that in the devices, apparatuses and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be considered as equivalent solutions of the present application.

[0080] The above description of the disclosed aspects is provided so that any person skilled in the art can make or use the present application. Various modifications to these aspects will be apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but is intended to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0081] The above description has been given for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. An electrode assembly, characterized by, The application is applied to a reaction furnace, the reaction furnace comprises a cavity, the cavity has a chamber capable of accommodating a boat structure, and the electrode assembly comprises: a support assembly capable of being connected with an inner wall of the cavity; a first electrode rod assembly disposed vertically adjacent to the support assembly, a first end of the first electrode rod assembly being capable of being inserted into an electrode hole of the boat structure during a process of placing the boat structure into the chamber; a resilient assembly disposed between a second end of the first electrode rod assembly and the support assembly and configured to provide an upward force for the second end of the first electrode rod assembly.

2. The electrode assembly of claim 1, wherein, Further comprising: a guide assembly connected with the support assembly, the guide assembly extending in a vertical direction; wherein the second end of the first electrode rod assembly is slidably connected with the guide assembly.

3. The electrode assembly of claim 2, wherein, The guide assembly comprises: a guide rod connected with the support assembly, the guide rod extending in a vertical direction; wherein the resilient assembly comprises: a first spring sleeved on the guide rod, located below the second end of the first electrode rod assembly, and having two ends respectively abutting against the second end of the first electrode rod assembly and the support assembly; and / or a second spring sleeved on the guide rod, located above the second end of the first electrode rod assembly, and having two ends respectively connected with the second end of the first electrode rod assembly and the support assembly.

4. The electrode assembly of claim 3, wherein, An upper end of the guide rod has a limiting part; wherein the support assembly comprises: an upper support capable of being connected with the inner wall of the cavity, having a first guide hole, the limiting part abutting against an upper side of the upper support, and the guide rod passing through the first guide hole; a lower support capable of being connected with the inner wall of the cavity, having a second guide hole, and the lower end of the guide rod penetrating into the second guide hole; a limiting piece disposed on a side of the lower support away from the upper support and connected with the lower end of the guide rod.

5. The electrode assembly of claim 4, wherein, The first electrode rod assembly comprises: an electrode seat disposed between the upper support and the lower support, having a third guide hole, and the guide rod passing through the third guide hole; a first electrode rod, a second end of the first electrode rod being detachably connected with the electrode seat; an electrode head connected with a first end of the first electrode rod, the electrode head being capable of being inserted into the electrode hole of the boat structure.

6. The electrode assembly of any one of claims 1 to 5, wherein, Further comprising: a second electrode rod assembly capable of being inserted into the chamber from an outside of the cavity and being hermetically connected with the cavity; a flexible electrode rod assembly electrically connecting the second electrode rod assembly and the first electrode rod assembly.

7. The electrode assembly of claim 6, wherein, The second electrode rod assembly comprises: a second electrode rod, a first end of the second electrode rod being located outside the cavity, and a second end of the second electrode rod being inserted into the chamber; a sealing piece hermetically connecting the first end of the second electrode rod with the outside of the cavity.

8. The electrode assembly of claim 7, wherein, The second end of the second electrode rod has a through slot; wherein the flexible electrode rod assembly comprises: a flexible electrode rod comprising a flexible electrode rod body and a first connecting part connected with each other, a cross-sectional area of the first connecting part being smaller than a cross-sectional area of the flexible electrode rod body, and the first connecting part being inserted into the through slot. A first locking member is located on a side of the second electrode rod away from the flexible electrode rod body and is screwed with the first connecting portion.

9. The electrode assembly of claim 8, wherein, The first electrode rod assembly has a through hole; The flexible electrode rod further comprises: A second connecting portion is connected to an end of the flexible electrode rod body away from the first connecting portion, the cross-sectional area of the second connecting portion is smaller than that of the flexible electrode rod body, and the second connecting portion extends into the through hole. The flexible electrode rod assembly further comprises: A second locking member is located on a side of the first electrode rod assembly away from the flexible electrode rod body and is screwed with the second connecting portion.

10. A reactor furnace characterized by, It comprises: A cavity has a chamber capable of accommodating a boat structure; The electrode assembly of any one of claims 1 to 9 is arranged in the cavity.

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