Coating equipment

Abstract

The utility model provides coating equipment which comprises a reaction chamber and a cover body assembly, and the reaction chamber forms a working cavity and an open end communicated with the working cavity; the cover body assembly is arranged at the open end; the cover body assembly comprises a cavity cover, an air inlet structure and a heating part, the cavity cover is used for covering the open end, the air inlet structure is arranged on the cavity cover, a heating space is formed between the air inlet structure and the cavity cover, the heating part is movably arranged in the heating space, and the distance between the heating part and the air inlet structure is adjustable. According to the application, the air inlet structure and the heating piece are simultaneously arranged in the cover body assembly, so that the problems of long preheating time and low temperature of the air inlet structure are solved, the temperature of the air inlet structure in the process is greatly improved, and the coating efficiency and yield are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of coating equipment, in particular to a coating equipment. BACKGROUND

[0002] In the photovoltaic industry, in the existing tube type atomic deposition equipment, only the periphery of the vacuum cavity is heated, the heating temperature is limited, and the heat finally radiated to the gas inlet structure is limited. When high-temperature chemical source process is carried out, the problem of insufficient temperature is caused, which reduces the coating efficiency. CONTENT OF THE UTILITY MODEL

[0003] In view of this, the present application provides a coating equipment to solve the problem of insufficient heating on the gas inlet structure of the coating equipment in the prior art.

[0004] To solve the above technical problems, one technical scheme adopted by the present application is to provide a coating equipment, which comprises a reaction chamber and a cover assembly. The reaction chamber forms a working cavity and an open end communicating with the working cavity. The cover assembly is arranged at the open end. The cover assembly comprises a cavity cover, a gas inlet structure and a heating piece. The cavity cover is arranged at the open end. The gas inlet structure is arranged on the cavity cover. A heating space is formed between the gas inlet structure and the cavity cover. The heating piece is movably arranged in the heating space. The distance between the heating piece and the gas inlet structure is adjustable.

[0005] According to an embodiment of the present application, the cover assembly further comprises a guide piece and a first limiting piece. The guide piece is arranged on the cavity cover and penetrates the heating piece. The heating piece slides on the guide piece to realize moving away from or approaching the gas inlet structure. The first limiting piece is used to limit or fix the position of the heating piece.

[0006] According to an embodiment of the present application, the guide piece comprises a screw rod column. One end of the screw rod column away from the gas inlet structure is arranged on the cavity cover. The screw rod column penetrates the heating piece. The heating piece slides on the screw rod column to realize moving away from or approaching the gas inlet structure. The first limiting piece comprises two limiting nuts. One of the limiting nuts is arranged on the side of the heating piece close to the gas inlet structure, and the other limiting nut is arranged on the side of the heating piece away from the gas inlet structure, which is used to limit or fix the position of the heating piece.

[0007] According to an embodiment of the present application, the inner wall of the working cavity forms a stepped portion. When the cavity cover is arranged at the open end, the gas inlet structure abuts against the stepped portion.

[0008] According to an embodiment of the present application, the cover assembly further comprises a guide rod and an elastic piece. The guide rod is arranged on the cavity cover and penetrates the gas inlet structure. The elastic piece is sleeved on the outside of the guide rod and abuts against the cavity cover at one end and the gas inlet structure at the other end, so as to push the gas inlet structure to abut against the stepped portion.

[0009] According to an embodiment of the present application, one end of the guide rod away from the cavity cover is provided with a second limiting piece to abut against the side of the gas inlet structure away from the cavity cover.

[0010] According to an embodiment of the present application, the heating member comprises a heating pipe and a reflector arranged in sequence in a direction away from the air inlet structure, the reflector is used for reflecting the heat radiation generated by the heating pipe to heat the air inlet structure.

[0011] According to an embodiment of the present application, the plating equipment further comprises a thermocouple which penetrates through the cavity cover into the working cavity and is used for measuring the temperature of the air inlet structure.

[0012] According to an embodiment of the present application, the heating pipe is led out from the center position of the reflector, and is coiled back to the center position of the reflector after being coiled on the side of the reflector facing the air inlet structure.

[0013] According to an embodiment of the present application, the heating pipe comprises at least two heating pipes which are distributed in a central symmetry and / or axial symmetry relative to the central axis of the reflector.

[0014] According to an embodiment of the present application, the plating equipment comprises a heat insulation member which is arranged between the heating member and the cavity cover.

[0015] According to an embodiment of the present application, the reaction chamber comprises an inner cavity and an outer cavity, the working cavity is formed in the inner cavity, the outer cavity is sleeved outside the inner cavity, the plating equipment comprises a flange which is arranged at one end of the cavity cover and fixedly connected to the end of the outer cavity corresponding to the open end, and the flange is in sealing connection with the cavity cover when the cavity cover is arranged on the open end.

[0016] The beneficial effects of the present application are as follows: a plating equipment is provided, the plating equipment comprises a reaction chamber and a cover assembly, the cover assembly comprises a cavity cover, an air inlet structure and a heating member, a heating space is formed between the air inlet structure and the cavity cover, the heating member is movably arranged in the heating space, and the distance between the heating member and the air inlet structure is adjustable. In the present application, the air inlet structure and the heating member are arranged in the cover assembly at the same time, the problem of long preheating time and low temperature of the air inlet structure is solved, the temperature of the air inlet structure during the process is greatly improved, and the plating efficiency and yield are improved. Moreover, after the temperature reaches the requirement, the powder accumulation in the air inlet structure is reduced, the cleaning frequency of the air inlet structure is reduced, and the maintenance cost is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creating any labor. Among them:

[0018] Figure 1 is a structural schematic diagram of an embodiment of the plating equipment of the present application;

[0019] Figure 2 is a partial structural schematic diagram of an embodiment of the cover assembly of the present application;

[0020] Figure 3 is a structural schematic diagram of an embodiment of the heating element of the present application;

[0021] Figure 4 is a cross-sectional structural schematic diagram of an embodiment of the reflector and the heating pipe of the present application. DETAILED DESCRIPTION

[0022] In order to make the above objectives, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. It can be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. In addition, it should be noted that, for the purpose of description, only the parts related to the present application are shown in the drawings, but not all the structures. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0023] In this paper, the "embodiment" means that the specific features, structures or characteristics described in conjunction with the embodiment can be included in at least one embodiment of the present application. The phrase appears at various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment to other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0024] In the existing tube type atomic deposition equipment, when high temperature source process is carried out, the high temperature source enters the vacuum chamber through the pipeline, enters the gas inlet structure, and then enters the inside of the vacuum chamber from the gas inlet structure. In the existing atomic deposition equipment, only the periphery of the vacuum chamber is heated, but the heating temperature is limited, and the heat finally radiated to the gas inlet structure is limited, only about 80℃, which cannot produce higher temperature. When high temperature chemical source process is carried out, the problem of insufficient temperature will occur, which cannot reach 150℃ or 200℃ required by high temperature source, resulting in condensation, reducing the film coating efficiency, and the condensation will also cause the gas inlet structure to be blocked. In addition, when high temperature chemical source process is carried out, the inside of the vacuum chamber needs to be preheated first. In the existing vacuum coating equipment, because only the periphery of the chamber has a heating device, the preheating time is too long and the efficiency is low.

[0025] Therefore, the present application provides a film coating equipment 10, referring to Figure 1 and Figure 2The coating equipment 10 comprises a reaction chamber 101 and a cover assembly 102. The reaction chamber 101 forms a working cavity 1011 and an open end 1012 communicating with the working cavity 1011. The cover assembly 102 is arranged at the open end 1012. The cover assembly 102 comprises a cavity cover 1021, a gas inlet structure 1022 and a heating member 1023. The cavity cover 1021 is arranged at the open end 1012. The gas inlet structure 1022 is arranged at the cavity cover 1021. The heating space 1024 is formed between the gas inlet structure 1022 and the cavity cover 1021. The heating member 1023 is movably arranged in the heating space 1024. The distance between the heating member 1023 and the gas inlet structure 1022 is adjustable.

[0026] Specifically, the cover assembly 102 of the coating equipment 10 is arranged at the open end 1012 of the reaction chamber 101. The cover assembly 102 is arranged to cover and heat the inside of the reaction chamber 101. The reaction chamber 101 comprises the working cavity 1011. The cover assembly 102 comprises the cavity cover 1021, the gas inlet structure 1022 and the heating member 1023. The cavity cover 1021 covers and seals the working cavity 1011. The gas inlet structure 1022 is used to spray the chemical source into the working cavity 1011. The heating member 1023 is used to heat the gas inlet structure 1022 to maintain the high temperature of the chemical source. The heating space 1024 is formed between the gas inlet structure 1022 and the cavity cover 1021. The heating member 1023 is movably arranged in the heating space 1024. Further, the position of the heating member 1023 relative to the gas inlet structure 1022 is adjustable. The heating member 1023 can be close to or away from the gas inlet structure 1022 according to different process requirements, so as to realize flexible heating and improve convenience.

[0027] By using the cover assembly 102 designed in the embodiment, the first aspect solves the problems of long preheating time and low temperature of the gas inlet structure 1022, greatly improves the temperature of the gas inlet structure during the process, and improves the coating efficiency and yield. The second aspect can also meet the high temperature (for example, 200-300℃ and above) requirement of the high temperature chemical source, solve the condensation problem of the high temperature chemical source after entering the working cavity 1011 through the pipeline, and ensure the temperature of the chemical source. After the temperature reaches the requirement, the powder accumulation caused by condensation in the gas inlet structure 1022 is reduced, the cleaning frequency of the gas inlet structure 1022 is reduced, and the maintenance cost is reduced. The third aspect is that during the preheating of the vacuum cavity process, the heating of the gas inlet structure 1022 can be started at the same time as the heating of the inside of the reaction chamber 101, which reduces the preheating time, improves the efficiency, and increases the production capacity.

[0028] According to an embodiment of the present application, the gas inlet structure 1022 is specifically a spraying plate.

[0029] According to an embodiment of the present application, the cover assembly 102 further comprises a guide and a first limiting member. The guide is arranged on the cavity cover 1021 and penetrates the heating member 1023. The heating member 1023 slides on the guide to move away from or close to the air inlet structure 1022. The first limiting member is used to limit or fix the position of the heating member 1023. The meaning of "limit" is that the first limiting member generates a limiting effect in the movement direction of the heating member 1023, so that the moving stroke of the heating member 1023 cannot exceed the position where the limiting effect is located, thereby controlling the moving range or distance of the heating member 1023. The first limiting member can be a shield that interferes with the moving path, etc. The meaning of "fix" is that the first limiting member locks the heating member 1023 at a certain position in the movement direction, so that the heating member 1023 cannot move. The first limiting member can be a clamping mechanism, etc.

[0030] In some embodiments, in combination with reference to Figure 1 , Figure 2 and Figure 3 , the guide comprises a screw column 1025. One end of the screw column 1025 away from the air inlet structure 1022 is arranged on the cavity cover 1021. The screw column 1025 penetrates the heating member 1023. The heating member 1023 slides on the screw column 1025 to move away from or close to the air inlet structure 1022. The first limiting member comprises two limiting nuts. One of the limiting nuts 1026a is arranged on the side of the heating member 1023 close to the air inlet structure 1022, and the other limiting nut 1026b is arranged on the side of the heating member 1023 away from the air inlet structure 1022, which is used to limit or fix the position of the heating member 1023. When the interval between the one limiting nut 1026a and the other limiting nut 1026b is greater than the size of the heating member 1023, the heating member 1023 can only move between the two limiting nuts. At this time, the limiting nuts play a limiting role. When the one limiting nut 1026a and the other limiting nut 1026b firmly clamp the heating member 1023, the heating member 1023 cannot move. At this time, the limiting nuts play a fixing role.

[0031] Specifically, the heating member 1023 is movably arranged in the heating space 1024. The position of the heating member 1023 relative to the air inlet structure 1022 is adjustable. The heating member 1023 moves away from or close to the air inlet structure 1022 by sliding on the screw column 1025. After setting the position of the heating member 1023 away from the air inlet structure 1022 according to different process requirements, the limiting nut 1026a and the limiting nut 1026b on both sides are used to fix the heating member 1023, so as to realize high-efficiency heating work. The present embodiment realizes flexible heating of the heating member 1023 and improves the heating efficiency.

[0032] According to an embodiment of the present application, in combination with reference to Figure 1The inner wall of the working cavity 1011 forms a step portion 1013. When the cavity cover 1021 is arranged on the open end 1012, the air inlet structure 1022 abuts against the step portion 1013.

[0033] Specifically, the inner wall of the working cavity 1011 forms a step portion 1013 (only the approximate position is shown, and the specific structure is not drawn). When the cavity cover 1021 is arranged on the open end 1012, the air inlet structure 1022 abuts against the step portion 1013, thereby maintaining the positional stability of the air inlet structure 1022.

[0034] According to an embodiment of the present application, referring to Figure 2 The cover assembly 102 further comprises a guide rod 1027 and an elastic member 1028. The guide rod 1027 is arranged on the cavity cover 1021 and penetrates the air inlet structure 1022. The elastic member 1028 is sleeved outside the guide rod 1027 and abuts against the cavity cover 1021 at one end and the air inlet structure 1022 at the other end, so as to push the air inlet structure 1022 to abut against the step portion 1013.

[0035] Specifically, the elastic member 1028 penetrates outside the guide rod 1027, and the two ends of the elastic member 1028 are not connected with the air inlet structure 1022 or the cavity cover 1021, but respectively abut against the air inlet structure 1022 and the cavity cover 1021. The air inlet structure 1022 can slide on the guide rod 1027 by a predetermined stroke. The specific movement of the cover assembly 102 arranged on the open end 1012 can be as follows: when the cavity cover 1021 moves to a first position, the cavity cover 1021 abuts against but has not yet sealed the open end 1012, and at this time, the air inlet structure 1022 abuts against the step portion 1013; then the cavity cover 1021 moves to a second position, which is closer to the air inlet structure 1022 than the first position, so as to push the cavity cover 1021 to seal the open end 1012, and the cavity cover 1021 compresses the elastic member 1028, the elastic member 1028 generates pressure in the direction close to the air inlet structure 1022, the elastic member 1028 pushes the air inlet structure 1022 to slide on the guide rod 1027 by a predetermined stroke in the direction away from the cavity cover 1021, at this time, the air inlet structure 1022 abuts against the step portion 1013 tightly, thereby sealing the internal reaction cavity.

[0036] In some embodiments, the elastic member 1028 can be a spring sleeved outside the guide rod 1027.

[0037] In some embodiments, the elastic member 1028 penetrates outside the guide rod 1027, and the two ends of the elastic member 1028 can be connected with the air inlet structure 1022 or the cavity cover 1021.

[0038] According to an embodiment of the present application, referring to Figure 2The second limiting member 1029 is arranged at the end of the guide rod 1027 away from the cavity cover 1021, and abuts against the side of the air inlet structure 1022 away from the cavity cover 1021.

[0039] Specifically, since the air inlet structure 1022 needs to slide on the guide rod 1027 by a predetermined stroke, the second limiting member 1029 is arranged at the end of the guide rod 1027 away from the cavity cover 1021. When the elastic member 1028 pushes the air inlet structure 1022 to slide on the guide rod 1027 by a predetermined stroke away from the cavity cover 1021, the second limiting member 1029 plays a limiting role, avoiding the air inlet structure 1022 from falling off, so as to realize structural stability.

[0040] According to an embodiment of the present application, referring to Figure 2 The heating member 1023 comprises a heating pipe 1031 and a reflecting member 1032 arranged in sequence away from the air inlet structure 1022. The reflecting member 1032 is used for reflecting the heat radiation generated by the heating pipe 1031 to heat the air inlet structure 1022.

[0041] In other embodiments, the heating member 1023 further comprises a mounting plate 1033. The heating pipe 1031, the reflecting member 1032 and the mounting plate 1033 are relatively fixed in position; the heating pipe 1031 is used for heating the air inlet structure 1022, the reflecting member 1032 is used for reflecting the heat radiation generated by the heating pipe 1031, and the mounting plate 1033 is movably connected to the cavity cover 1021 to adjust the distance between the mounting plate 1033 and the air inlet structure 1022.

[0042] In some embodiments, the heating pipe 1031, the reflecting member 1032 and the mounting plate 1033 are relatively welded or detachably connected.

[0043] The reflecting member 1032 is designed as a mirror surface for reflecting the heat radiation generated by the heating pipe 1031.

[0044] The mounting plate 1033 is movably connected to the cavity cover 1021, and the heating member 1023 is adjusted in position relative to the air inlet structure 1022 by the movement of the mounting plate 1033 relative to the cavity cover 1021. The mounting plate 1033 can be movably connected to the cavity cover 1021 by the screw column 1025, and the position of the mounting plate 1033 away from the air inlet structure 1022 can be adjusted according to different process requirements to achieve high-efficiency heating.

[0045] According to an embodiment of the present application, the coating equipment 10 further comprises a thermocouple 1034 which penetrates through the cavity cover 1021 into the working cavity 1011 and is used for measuring the temperature of the air inlet structure 1022.

[0046] Specifically, the thermocouple 1034 passes through the cavity cover 1021 and enters the working cavity 1011, and contacts the air inlet structure 1022 to measure the temperature of the air inlet structure 1022, so as to provide the temperature of the air inlet structure 1022 in real time.

[0047] According to an embodiment of the present application, referring to Figure 2 The heating pipe 1031 is led out from the center of the reflector 1032 and returns to the center of the reflector 1032 after winding on the side of the reflector 1032 facing the air inlet structure 1022.

[0048] The heating pipe 1031 is arranged in the above manner, which can make the heating uniform in the winding area, and the leading end and the returning end of the heating pipe 1031 are arranged at the center of the reflector 1032, which can facilitate the installation of pipelines and lines and reduce the difficulty of maintenance and repair.

[0049] According to an embodiment of the present application, referring to Figure 4 The heating pipe 1031 includes at least two pipes, and the at least two pipes are arranged in a central symmetry and / or axial symmetry with respect to the central axis of the reflector 1032.

[0050] The heating pipe 1031 is arranged in the above manner, which can avoid the problem of insufficient uniformity caused by the excessive winding area of the heating pipe 1031, and the temperature of each heating area formed by the plurality of heating pipes 1031 can be individually controlled to improve the overall heating uniformity.

[0051] According to an embodiment of the present application, referring to Figure 2 The coating device 10 includes a heat insulation member 1035 arranged between the heating member 1023 and the cavity cover 1021.

[0052] The heat insulation member 1035 is used to block the heat on the heating member 1023 from being transmitted to the cavity cover 1021, and the heat insulation member 1035 is designed as a mirror surface, which can be a metal plate structure after surface polishing treatment, so that the heat radiation can be reflected back into the heating cavity 1024, further reducing heat loss.

[0053] According to an embodiment of the present application, the reaction chamber 101 includes an inner cavity and an outer cavity, the working cavity 1011 is formed in the inner cavity, and the outer cavity is sleeved outside the inner cavity. The coating device 10 includes a flange (not shown in the figure), which is arranged at one end of the cavity cover 1021 and fixedly connected to the end of the corresponding open end 1012 of the outer cavity. When the cavity cover 1021 is arranged on the open end 1012, the flange is in sealing connection with the cavity cover 1021.

[0054] In summary, the cover assembly 102 provided by the present application is arranged at the open end 1012, and the cover assembly 102 comprises a cavity cover 1021, an air inlet structure 1022 and a heating element 1023. The air inlet structure 1022 and the cavity cover 1021 form a heating space 1024, and the heating element 1023 is movably arranged in the heating space 1024. The distance between the heating element 1023 and the air inlet structure 1022 is adjustable. By using the cover assembly 102 designed in the embodiment of the present application, first, the problem of long preheating time and low temperature of the air inlet structure 1022 is solved, and the temperature of the air inlet structure during the process is greatly improved, thereby improving the film coating efficiency and yield. Second, the high-temperature chemical source required high temperature (for example, 200-300 DEG C and above) can be met, and the condensation problem of the high-temperature chemical source after entering the working cavity 1011 through the pipeline is solved, thereby ensuring the temperature of the chemical source. After the temperature reaches the requirement, the powder accumulation caused by condensation in the air inlet structure 1022 is reduced, the cleaning frequency of the air inlet structure 1022 is reduced, and the maintenance cost is reduced. Third, during the preheating of the vacuum cavity process, the heating of the air inlet structure 1022 can be started at the same time as the heating of the reaction chamber 101, thereby reducing the preheating time, improving the efficiency, and increasing the production capacity.

[0055] The above is only an embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation using the content of the specification and drawings, or direct or indirect application in other related technical fields, is also included in the patent protection scope of the present application.

Claims

1. A coating apparatus, characterized by, The coating equipment comprises: a reaction chamber, which forms a working cavity and an open end in communication with the working cavity; a cover assembly arranged at the open end, which comprises a cavity cover, an air inlet structure and a heating element, the cavity cover is arranged at the open end, the air inlet structure is arranged on the cavity cover, a heating space is formed between the air inlet structure and the cavity cover, the heating element is movably arranged in the heating space, and the distance between the heating element and the air inlet structure is adjustable.

2. The coating apparatus according to claim 1, wherein The cover assembly further comprises: a guide element arranged on the cavity cover and penetrating the heating element, the heating element slides on the guide element to move away from or close to the air inlet structure; a first limiting element for limiting or fixing the position of the heating element.

3. The coating apparatus according to claim 2, wherein The guide element comprises a screw rod column, one end of the screw rod column away from the air inlet structure is arranged on the cavity cover, the screw rod column penetrates the heating element, and the heating element slides on the screw rod column to move away from or close to the air inlet structure; the first limiting element comprises two limiting nuts, one of the limiting nuts is arranged on one side of the heating element close to the air inlet structure, and the other limiting nut is arranged on the side of the heating element away from the air inlet structure, for limiting or fixing the position of the heating element.

4. The coating apparatus of claim 1, wherein, The inner wall of the working cavity forms a stepped portion, and when the cavity cover is arranged at the open end, the air inlet structure abuts against the stepped portion.

5. The coating apparatus according to claim 4, wherein The cover assembly further comprises: a guide rod arranged on the cavity cover and penetrating the air inlet structure; an elastic element sleeved on the guide rod and abutting against one end of the cavity cover and the other end of the air inlet structure, so as to push the air inlet structure to abut against the stepped portion.

6. The coating apparatus of claim 5, wherein One end of the guide rod away from the cavity cover is provided with a second limiting element to abut against one side of the air inlet structure away from the cavity cover.

7. The coating apparatus of claim 1, wherein The heating element comprises a heating pipe and a reflector arranged in sequence away from the air inlet structure, and the reflector is used for reflecting the heat radiation generated by the heating pipe to heat the air inlet structure.

8. The coating apparatus of claim 1, wherein, The coating equipment further comprises a thermocouple penetrating the cavity cover into the working cavity for measuring the temperature of the air inlet structure.

9. The coating apparatus of claim 7, wherein The heating pipe is drawn from the center position of the reflector, wound on the side of the reflector facing the air inlet structure, and returned to the center position of the reflector.

10. The coating apparatus of claim 9, wherein, The heating pipe comprises at least two heating pipes, and the at least two heating pipes are distributed in central symmetry and / or axial symmetry relative to the central axis of the reflector.

11. The coating apparatus of claim 1, wherein The coating equipment comprises a heat insulation element arranged between the heating element and the cavity cover.

12. The coating apparatus of claim 1, wherein, The reaction chamber comprises an inner cavity and an outer cavity, the working cavity is formed in the inner cavity, the outer cavity is sleeved outside the inner cavity, the coating equipment comprises a flange arranged at one end of the cavity cover, the flange is fixedly connected with the end of the outer cavity corresponding to the open end, and when the cavity cover is arranged at the open end, the flange is in sealing connection with the cavity cover.

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