Composite speed reducer device of germanium crystal growth equipment

Abstract

The utility model relates to the technical field of germanium crystal production, and provides a germanium crystal growth equipment composite speed reducer device which comprises a growth furnace, clamping grooves are symmetrically formed in the outer wall of the growth furnace, a cover ring is movably inserted into the inner sides of the clamping grooves and located above the growth furnace, a first supporting plate is fixed to the edge of the top face of the cover ring, and a second supporting plate is fixed to the edge of the top face of the cover ring. A first transverse plate is fixed to the top end of the first supporting plate, an electric push rod is fixed to the edge of the bottom face of the first transverse plate, a top cover is fixed to the lower end of the electric push rod and located above the cover ring, a notch is formed in the outer wall of the top cover, and the first supporting plate penetrates through the notch. The motor drives the third gear to rotate, the third gear drives the second gear to rotate, and the second gear drives the first gear to rotate, so that the rotating rod rotates, the sizes of the third gear, the second gear and the first gear are gradually increased, the speed is gradually reduced, and the problem that the rotating speed of the rotating rod is too high can be effectively prevented; and the crystal growth quality is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to germanium crystal production technical field, concretely is a kind of germanium crystal growth equipment composite speed reducer device. BACKGROUND

[0002] The Czochralski method is the most important method for growing single crystals from melt, and is suitable for mass production of large-size perfect crystals. The crucible is heated to melt the material, and the seed crystal rod is inserted into the melt from top to bottom with a seed crystal. Because the melt near the solid-liquid interface maintains a certain degree of supercooling, the melt crystallizes along the seed crystal, and grows into a rod-shaped single crystal as the seed crystal gradually rises. The crucible can be heated by high-frequency induction or resistance heating. Semiconductor germanium, silicon, oxide single crystals such as yttrium aluminum garnet, gadolinium gallium garnet and lithium niobate are grown by this method.

[0003] During the growth of germanium crystals using the Czochralski method, the seed crystal is fixed on a rotating rod that can rotate and lift. If the rotation speed of the rotating rod is too fast, it will increase the number of crystal defects, narrow the growth area and enhance the oscillation, ultimately affecting the quality of single crystal growth, which is not conducive to the production and manufacture of germanium crystals. Therefore, how to ensure that the rotation speed of the rotating rod meets the requirements of crystal production is a problem that needs to be solved.

[0004] Therefore, a germanium crystal growth equipment composite speed reducer device is needed that can maintain a uniform and gentle rotation speed and improve the quality of crystal growth. SUMMARY

[0005] To solve the above problems, the utility model provides a kind of germanium crystal growth equipment composite speed reducer device, can reduce the rotation speed of rotating rod, ensure the smooth growth of crystal.

[0006] To achieve the above purpose, the utility model provides the following specific solutions:

[0007] The utility model provides a kind of germanium crystal growth equipment composite speed reducer device, including growth furnace, the outer wall of the growth furnace is symmetrically provided with clamping groove, the inside of the clamping groove is movably inserted with cover ring, the cover ring is located above growth furnace, the top surface side of the cover ring is fixed with first support plate, the top end of the first support plate is fixed with first cross plate, the bottom surface side of the first cross plate is fixed with electric push rod, the lower end of the electric push rod is fixed with top cover, the top cover is located above cover ring, the outer wall of the top cover is provided with notch, the first support plate is through notch, the top surface of the top cover is fixed with second support plate, the second support plate is located at the side of first support plate, the top end of the second support plate is fixed with second cross plate, the top surface of the second cross plate is fixedly connected with the lower end of electric push rod, the top surface side of the second cross plate is fixed with motor, the bottom surface middle part of the motor is fixed with transmission shaft, the transmission shaft is through second cross plate, the lower end of the transmission shaft is fixed with third gear, the bottom surface of the second cross plate is fixed with fixed shaft, the outside of the fixed shaft is movably sleeved with second gear, the second gear is engaged with third gear, the size of the second gear is greater than third gear, the top surface middle part of the top cover is provided with rotating hole, the inside of the rotating hole is movably inserted with first gear, the first gear is located below second cross plate, the first gear is engaged with second gear, the size of the first gear is greater than second gear, the bottom surface middle part of the first gear is fixed with rotating rod, the rotating rod is movably inserted in the inside of rotating hole, the rotating rod is through rotating hole, the lower end of the rotating rod is fixed with rotating disc, and the rotating disc is located inside growth furnace.

[0008] As a kind of germanium crystal growth equipment composite speed reducer device preferred technical scheme of the utility model, the outer wall of the cover ring is symmetrically provided with moving groove, the inside of the moving groove is movably inserted with moving plate, the top surface side of the moving plate is fixed with limit plate, the limit plate is located in the inside of limit slot, the side wall middle part of the moving plate is fixed with spring, one end of the spring is fixed on the inner wall of moving groove, the other side wall of the moving plate is fixed with handle, the bottom surface side of the moving plate is fixed with L type clamping plate, and the L type clamping plate is movably inserted in the inside of clamping groove.

[0009] As a kind of germanium crystal growth equipment composite speed reducer device preferred technical scheme of the utility model, the top surface side of the second cross plate is provided with through-hole, the through-hole is through second cross plate, and the transmission shaft is through through-hole.

[0010] As a kind of germanium crystal growth equipment composite speed reducer device preferred technical scheme of the utility model, the middle part of the second gear is provided with connecting hole, the connecting hole is through second gear, and the fixed shaft is movably sleeved in the inside of connecting hole.

[0011] As a kind of germanium crystal growth equipment composite speed reducer device preferred technical scheme of the utility model, the lower end of the fixed shaft is fixed with limit disc, and the limit disc is located below second gear.

[0012] As a kind of germanium crystal growth equipment composite speed reducer device preferred technical scheme of the utility model, the top cover top surface middle part is fixed with support ring, the support ring is located outside rotating rod, the support ring is located below first gear.

[0013] As a kind of germanium crystal growth equipment composite speed reducer device preferred technical scheme of the utility model, the rotating rod upper end outer wall is fixed with limit ring, the limit ring is located below top cover.

[0014] As a kind of germanium crystal growth equipment composite speed reducer device preferred technical scheme of the utility model, the growth furnace bottom surface edge is fixed with support leg.

[0015] Compared with prior art, the utility model has the following beneficial effects:

[0016] The second support plate is fixed on the top surface of the top cover, the second end of the second support plate is fixed with the second transverse plate, the motor drives the transmission shaft on the second transverse plate to rotate, the transmission shaft drives the third gear to rotate, the third gear drives the second gear to rotate, the second gear drives the first gear to rotate, and the first gear drives the rotating rod and the rotating disc to rotate inside the growth furnace, so that the material melt inside the growth furnace is stirred and mixed, the crystal growth on the rotating rod is accelerated, the size of the third gear, the second gear and the first gear gradually increases, so that the rotating speed of the third gear to the first gear gradually slows down, so that the rotating speed of the rotating rod is not too fast, and the rotating rod can rotate uniformly, the first support plate is fixed on the top end of the top surface of the cover ring, the electric push rod on the bottom surface of the first support plate is fixedly connected with the second transverse plate, the second transverse plate is driven to move upward by the electric push rod, so that the top cover is moved upward, the rotating rod is moved at a constant speed to pull out the crystal, the rotating rod can pass through the cover ring and move above the cover ring, so that the formed crystal is moved out of the growth furnace, and the quality of the crystal growth is ensured by the three gears for reducing the rotating speed of the rotating rod.

[0017] The cover ring and the growth furnace are connected by inserting one end of the L-shaped clamping plate into the clamping groove, the elastic tension of the spring can ensure that the L-shaped clamping plate is stably inserted into the clamping groove, the moving plate is moved by pulling the handle, so that the L-shaped clamping plate is moved out of the clamping groove, and the cover ring and the growth furnace are connected or separated, so that the efficiency is improved. ACCURACY OF DRAWINGS

[0018] In order to better describe the technical scheme of the utility model, the present application is further described in combination with the drawings and examples.

[0019] Figure 1 It is the overall structure perspective view provided by the utility model;

[0020] Figure 2A sectional view of the utility model;

[0021] Figure 3 The utility model Figure 2 An enlarged schematic view of position A in the middle;

[0022] Figure 4 The utility model Figure 2 An enlarged schematic view of position B in the middle;

[0023] Figure 5 The utility model Figure 2 An enlarged schematic view of position C in the middle;

[0024] Figure 6 The utility model Figure 2 An enlarged schematic view of position D in the middle.

[0025] In the drawing: 1, growth furnace; 11, supporting leg; 12, clamping groove; 2, cover ring; 21, first support plate; 211, first cross plate; 212, electric push rod; 22, moving groove; 221, limiting groove; 23, moving plate; 231, limiting plate; 232, handle; 233, L-shaped clamping plate; 234, spring; 3, top cover; 31, notch; 32, first gear; 321, rotating rod; 322, rotating disc; 323, limiting ring; 33, second support plate; 331, second cross plate; 332, fixed shaft; 333, limiting disc; 334, motor; 335, transmission shaft; 336, through hole; 34, second gear; 341, connecting hole; 35, third gear; 36, rotating hole; 37, supporting ring. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model. EMBODIMENT

[0027] Please refer to Figures 1-6 The utility model provides the following technical scheme: a germanium crystal growth equipment composite speed reducer device, including growth furnace 1 (growth furnace 1 is prior art, and the specific operation mode and principle can refer to the Czochralski method crystal growth furnace in prior art, for the growth of crystal manufacturing, therefore, too much repetition is not performed here), the bottom surface edge of growth furnace 1 is fixed with supporting leg 11, growth furnace 1 is supported, and the stability of growth furnace 1 is improved.

[0028] Refer to Figure 1 , Figure 2 ,Figure 3 , Figure 4 with Figure 5As shown, in particular, the top cover 3 top surface is fixed with the second support plate 33, the second cross plate 331 is fixed and supported, the second support plate 33 is located on the side of the first support plate 21, the top end of the second support plate 33 is fixed with the second cross plate 331, the structure such as the motor 334 is fixed, the top surface of the second cross plate 331 is fixed and connected with the lower end of the electric push rod 212, the top surface of the second cross plate 331 is fixed with the motor 334 (the motor 334 is prior art, the specific operation mode and principle can refer to the bidirectional motor in the prior art, which is controlled to open and close by an external power supply, so it is not described in detail here), the bottom surface of the motor 334 is fixed with the transmission shaft 335 in the middle, which is used to drive the third gear 35 to rotate, the transmission shaft 335 penetrates the second cross plate 331, the second cross plate 331 is provided with the through hole 336 at the edge of the top surface, which provides a rotating and connecting space for the transmission shaft 335, the through hole 336 penetrates the second cross plate 331, the transmission shaft 335 penetrates the through hole 336, the lower end of the transmission shaft 335 is fixed with the third gear 35, which is used to drive the second gear 34 to rotate, the bottom surface of the second cross plate 331 is fixed with the fixed shaft 332, which is used to connect the second gear 34, the outer side of the fixed shaft 332 movably sleeves the second gear 34, which can drive the first gear 32 to rotate and reduce the rotating speed, the second gear 34 is engaged with the third gear 35, the size of the second gear 34 is greater than that of the third gear 35, the middle of the second gear 34 is provided with the connecting hole 341, which is used to connect the fixed shaft 332, the connecting hole 341 penetrates the second gear 34, the fixed shaft 332 movably sleeves the inner side of the connecting hole 341, the lower end of the fixed shaft 332 is fixed with the limiting disc 333, which prevents the second gear 34 from moving downward, the limiting disc 333 is located below the second gear 34, the middle of the top surface of the top cover 3 is provided with the rotating hole 36, which is used to connect the rotating rod 321 and provide a rotating space for the rotating rod 321, the first gear 32 is movably inserted into the inner side of the rotating hole 36, which is used to drive the rotating rod 321 to rotate and further reduce the rotating speed, the first gear 32 is located below the second cross plate 331, the first gear 32 is engaged with the second gear 34, the size of the first gear 32 is greater than that of the second gear 34, the bottom surface of the first gear 32 is fixed with the rotating rod 321, which is used to stir the material melt inside the growth furnace 1 and provide an attachment growth structure for the crystal, the rotating rod 321 is movably inserted into the inner side of the rotating hole 36, the rotating rod 321 penetrates the rotating hole 36, the lower end of the rotating rod 321 is fixed with the rotating disc 322, which can stir the material melt inside the growth furnace 1 and accelerate the mixing of the materials, the rotating disc 322 is located inside the growth furnace 1, the middle of the top surface of the top cover 3 is fixed with the support ring 37, which supports the first gear 32, the support ring 37 is located outside the rotating rod 321, the support ring 37 is located below the first gear 32, the outer wall of the upper end of the rotating rod 321 is fixedly sleeved with the limiting ring 323, which prevents the rotating rod 321 from moving upward relative to the top cover 3, the limiting ring 323 is located below the top cover 3, in the scheme, the motor 334 drives the transmission shaft 335 to rotate, the transmission shaft 335 drives the third gear 35 to rotate, then the third gear 35 drives the second gear 34 to rotate,The second gear 34 drives the first gear 32 to rotate, the first gear 32 drives the rotating rod 321 and the rotating disc 322 to rotate inside the growth furnace 1, the sizes of the third gear 35, the second gear 34 and the first gear 32 gradually increase, so that the rotating speeds of the third gear 35 to the first gear 32 gradually slow down, the rotating rod 321 is uniformly and slowly rotated, the disadvantageous influence of the too fast rotating speed on the crystal growth is avoided, and the quality of the crystal production and manufacturing is improved.

[0029] With reference to Figure 1 With Figure 2 As shown in the drawings, specifically, the first support plate 21 is fixed at the top surface edge of the cover ring 2, the first support plate 21 supports and fixes the first horizontal plate 211, the first horizontal plate 211 is fixed at the top end of the first support plate 21, and the electric push rod 212 is fixed at the bottom surface edge of the first horizontal plate 211 (the electric push rod 212 is prior art, and the specific operation mode and principle can refer to the electric telescopic push rod in the prior art, which is controlled to open and close by an external power supply, so it is not described in detail here), the top cover 3 is fixed at the lower end of the electric push rod 212, the cover ring 2 is blocked above the top cover 3, the top cover 3 is located above the cover ring 2, the outer wall of the top cover 3 is provided with a notch 31, the first support plate 21 can be connected and fixed, the first support plate 21 penetrates through the notch 31, and the electric push rod 212 is used to drive the top cover 3 to rise as a whole, so that the rotating rod 321 rises, the crystal is pulled out by the straight pulling method, the rotating rod 321 can penetrate through the inside of the cover ring 2 and move to above the cover ring 2, and the pulled-out crystal is convenient to operate.

[0030] With reference to Figure 1 , Figure 2 With Figure 6As shown, specifically, the outer wall of the growth furnace 1 is symmetrically provided with a clamping groove 12 for connecting and fixing the cover ring 2, the cover ring 2 is movably inserted into the inner side of the clamping groove 12 and supports the top cover 3, the outer wall of the cover ring 2 is symmetrically provided with a moving groove 22 for connecting the moving plate 23 and the spring 234, the inner wall of one side of the moving groove 22 is provided with a limiting groove 221 for limiting the moving space of the limiting plate 231, the moving plate 23 is movably inserted into the inner side of the moving groove 22 and drives the L-shaped clamping plate 233 to move, the top surface of the moving plate 23 is fixedly provided with the limiting plate 231 at the edge portion, preventing the moving plate 23 from moving out of the inner side of the moving groove 22, the limiting plate 231 is located in the inner side of the limiting groove 221, the one side wall of the moving plate 23 is fixedly provided with the spring 234 at the middle portion, the spring 234 is pulled to ensure that the L-shaped clamping plate 233 is stably inserted into the inner side of the clamping groove 12, one end of the spring 234 is fixed on the inner wall of the moving groove 22, the other side wall of the moving plate 23 is fixedly provided with the handle 232, facilitating pulling the moving plate 23 and the cover ring 2, the bottom surface of the moving plate 23 is fixedly provided with the L-shaped clamping plate 233 at the edge portion, the L-shaped clamping plate 233 is movably inserted into the inner side of the clamping groove 12, and the cover ring 2 is fixed above the growth furnace 1, the L-shaped clamping plate 233 is pulled out of the inner side of the clamping groove 12 by pulling the handle 232 to move the moving plate 23, so that the cover ring 2 can be quickly and conveniently removed, and the disassembly speed is improved.

[0031] The working principle and use process of the utility model are as follows:

[0032] In use, the motor 334 is started to drive the transmission shaft 335 to rotate, the transmission shaft 335 drives the third gear 35 to rotate, the third gear 35 drives the second gear 34 to rotate, the second gear 34 drives the first gear 32 to rotate, and the first gear 32 drives the rotating rod 321 and the rotating disc 322 to rotate in the growth furnace 1, so as to stir the material melt in the growth furnace 1 and accelerate the growth of the crystal, the sizes of the third gear 35, the second gear 34 and the first gear 32 gradually increase, so that the rotating speed gradually slows down, the rotating speed of the rotating rod 321 can effectively meet the demand of the crystal growth, then the electric push rod 212 is started, the lower end of the electric push rod 212 is fixedly connected with the second horizontal plate 331, so that the electric push rod 212 can drive the top cover 3 to lift, the top cover 3 is lifted to drive the rotating rod 321 to move upwards, the crystal is gradually pulled out, the rotating rod 321 can pass through the inner side of the cover ring 2 and move to the upper side of the cover ring 2, so that the formed crystal can be conveniently collected, finally, the handles 232 on both sides are grabbed and pulled outwards, the moving plate 23 is driven to move, the spring 234 is stretched, and then one end of the L-shaped clamping plate 233 is moved out of the inner side of the clamping groove 12, so that the cover ring 2 can be disassembled.

[0033] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application have been described in detail, for the skilled in the art, it still can be modified, or for the equivalent replacement of part of the technical features of the technical solutions recorded in the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application, shall be included within the scope of the present application.

Claims

1. A germanium crystal growth apparatus compound reducer device comprising a growth furnace (1), characterized in that: The outer wall of the growth furnace (1) is symmetrically provided with a clamping groove (12), the inner side of the clamping groove (12) is movably inserted with a cover ring (2), the cover ring (2) is located above the growth furnace (1), the top surface of the cover ring (2) is fixedly provided with a first supporting plate (21), the top end of the first supporting plate (21) is fixedly provided with a first horizontal plate (211), the bottom surface of the first horizontal plate (211) is fixedly provided with an electric push rod (212), the lower end of the electric push rod (212) is fixedly provided with a top cover (3), the top cover (3) is located above the cover ring (2), the outer wall of the top cover (3) is provided with a notch (31), the first supporting plate (21) penetrates the notch (31), the top surface of the top cover (3) is fixedly provided with a second supporting plate (33), the second supporting plate (33) is located on one side of the first supporting plate (21), the top end of the second supporting plate (33) is fixedly provided with a second horizontal plate (331), the top surface of the second horizontal plate (331) is fixedly connected with the lower end of the electric push rod (212), the top surface of the second horizontal plate (331) is fixedly provided with a motor (334), the bottom surface of the motor (334) is fixedly provided with a transmission shaft (335), the transmission shaft (335) penetrates the second horizontal plate (331), the lower end of the transmission shaft (335) is fixedly provided with a third gear (35), the bottom surface of the second horizontal plate (331) is fixedly provided with a fixed shaft (332), the outer side of the fixed shaft (332) is movably sleeved with a second gear (34), the second gear (34) is engaged with the third gear (35), the size of the second gear (34) is larger than that of the third gear (35), the top surface of the top cover (3) is provided with a rotating hole (36), the inner side of the rotating hole (36) is movably inserted with a first gear (32), the first gear (32) is located below the second horizontal plate (331), the first gear (32) is engaged with the second gear (34), the size of the first gear (32) is larger than that of the second gear (34), the bottom surface of the first gear (32) is fixedly provided with a rotating rod (321), the rotating rod (321) is movably inserted in the inner side of the rotating hole (36), the rotating rod (321) penetrates the rotating hole (36), the lower end of the rotating rod (321) is fixedly provided with a rotating disc (322), and the rotating disc (322) is located on the inner side of the growth furnace (1).

2. A compound reducer apparatus for a germanium crystal growth apparatus as defined in claim 1, wherein: The outer wall of the cover ring (2) is symmetrically provided with a moving groove (22), the inner wall of one side of the moving groove (22) is provided with a limiting groove (221), the inner side of the moving groove (22) is movably inserted with a moving plate (23), the top surface of the moving plate (23) is fixedly provided with a limiting plate (231), the limiting plate (231) is located on the inner side of the limiting groove (221), the middle of one side wall of the moving plate (23) is fixedly provided with a spring (234), one end of the spring (234) is fixed on the inner wall of the moving groove (22), the other side wall of the moving plate (23) is fixedly provided with a handle (232), the bottom surface of the moving plate (23) is fixedly provided with an L-shaped clamping plate (233), one end of the L-shaped clamping plate (233) is movably inserted in the inner side of the clamping groove (12).

3. A compound speed reducer apparatus for a germanium crystal growing apparatus according to claim 2, wherein: The second horizontal plate (331) is provided with a through hole (336) at the top edge, the through hole (336) penetrates the second horizontal plate (331), and the transmission shaft (335) penetrates the through hole (336).

4. A compound speed reducer apparatus for a germanium crystal growing apparatus according to claim 3, wherein: The second gear (34) is provided with a connecting hole (341) in the middle, the connecting hole (341) penetrates the second gear (34), and the fixed shaft (332) is movably sleeved on the inner side of the connecting hole (341).

5. A compound reducer apparatus for a germanium crystal growing apparatus as defined in claim 4, wherein: The fixed shaft (332) is fixedly connected with a limiting disc (333) at the lower end, and the limiting disc (333) is located below the second gear (34).

6. A compound reducer apparatus for a germanium crystal growing apparatus as defined in claim 5, wherein: The top cover (3) is fixedly connected with a supporting ring (37) at the middle of the top surface, the supporting ring (37) is located outside the rotating rod (321), and the supporting ring (37) is located below the first gear (32).

7. A compound speed reducer apparatus for a germanium crystal growing apparatus according to claim 6, wherein: The rotating rod (321) is fixedly connected with a limiting ring (323) at the outer wall of the upper end, and the limiting ring (323) is located below the top cover (3).

8. A compound reducer apparatus for a germanium crystal growing apparatus as defined in claim 7, wherein: The growth furnace (1) is fixedly connected with supporting legs (11) at the edge of the bottom.

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