Crystal taking device

Abstract

The utility model relates to a kind of crystal bar taking device, comprising: support mechanism, for setting crystal bar on it;Rotary mechanism, for realizing the rotation of support mechanism;Clamping mechanism, it is connected with rotary mechanism, the clamping mechanism is for clamping the crystal bar on support mechanism;Lifting mechanism, it is set on clamping mechanism, lifting mechanism and support mechanism connect, and lifting mechanism is for realizing the adjustment of support mechanism vertical position.The utility model supports crystal bar to be vertical state by support mechanism, clamping mechanism is clamped to the middle position of crystal bar, so that crystal bar is stably fixed on support mechanism, can avoid crystal bar to fall and be damaged.Blocking assembly can block crystal bar during clamping process, prevent crystal bar from toppling over, without manual operation, reduce manpower cost and safety risk.After clamping crystal bar, rotary mechanism can switch crystal bar between vertical and horizontal position, so that the transfer of crystal bar between different stations is carried out.

Description

TECHNICAL FIELD

[0001] The utility model relates to a crystal bar technology field especially is a kind of crystal bar device. BACKGROUND

[0002] Monocrystalline silicon is a kind of good semiconductor material with complete lattice structure, and is currently widely used in the manufacture of semiconductor devices and solar cells. In the single crystal silicon pulling process, the transfer link after the growth of the crystal bar is crucial. The crystal bar is in a vertical state when it is separated from the auxiliary furnace chamber, and then needs to be transported by a crystal bar taking device.

[0003] Currently, in the process of taking crystal bar to rotating and placing, in order to prevent the crystal bar from falling off the crystal bar taking tool due to inaccurate butt joint, robot sudden stop / collision and horizontal overturning accident, etc., a manual method of inserting a stop rod near the outer side of the crystal bar taking tool is usually used, and the stop rod is removed when placing the crystal bar. However, this method has obvious drawbacks:

[0004] Firstly, the crystal bar is in a high temperature state when it is separated from the auxiliary furnace chamber, and manual operation of inserting and removing the stop rod poses a serious threat to the personal safety of the operator, and can easily cause burns and other safety accidents.

[0005] Secondly, manual operation requires the allocation of dedicated human resources, which not only increases labor costs, but also has relatively low efficiency, making it difficult to meet the needs of efficient production.

[0006] Furthermore, the accuracy and stability of manual operation cannot be guaranteed, and the insertion or removal of the stop rod may not be timely or in place due to human error, affecting the safety and efficiency of the crystal bar transfer.

[0007] Therefore, there is an urgent need in the industry for a device or technology that can automatically prevent the crystal bar from falling off, to replace the existing manual operation method and improve the safety, efficiency and automation level of the crystal bar transfer in the single crystal silicon pulling process. SUMMARY

[0008] Therefore, the utility model solves the technical problems in the prior art that the crystal bar is long and heavy, the operation is inconvenient during transfer, the work efficiency is low, and there is a safety hazard of the crystal bar falling.

[0009] To solve the above technical problems, the utility model provides a kind of crystal bar taking device, comprising: rotating mechanism;Clasp mechanism, including being located in the clasp support frame body of rotating mechanism rotating part, first clamping arm assembly and second clamping arm assembly can be oppositely moved and are located in the clasp support frame body far from rotating mechanism side, and blocking component is installed in first clamping arm assembly or second clamping arm assembly;The first clamping arm assembly and second clamping arm assembly are oppositely arranged;Clasp space is formed between the first clamping arm assembly and second clamping arm assembly, and notch is formed in the side far from clasp support frame body;The blocking component is arranged to open or close the notch between the first clamping arm assembly and second clamping arm assembly;Support mechanism, including being located in the support bracket between the first clamping arm assembly and second clamping arm assembly and support base being installed in the support bracket;The support mechanism is arranged in the rotating mechanism drive can be rotated with the clasp mechanism together from vertical state to horizontal state.

[0010] In an embodiment of the utility model, the crystal bar taking device further includes a lifting mechanism, the support bracket is connected with the lifting mechanism, and the lifting mechanism is used to drive the support bracket to ascend or descend along the vertical direction.

[0011] In an embodiment of the utility model, the rotating mechanism includes a rotating support frame, a rotary hydraulic device and a rotating panel, the rotary hydraulic device is arranged on the rotating support frame, the rotating panel is connected with the output end of the rotary hydraulic device, the rotary hydraulic device is used to drive the rotating panel to rotate, and the clasp mechanism is fixedly connected with the rotating panel.

[0012] In an embodiment of the utility model, the clasp mechanism includes a clasp support frame body, a clasp driving assembly, a first clamping arm assembly and a second clamping arm assembly, the clasp support frame body is connected with the output end of the rotating mechanism, the clasp driving assembly is installed on the clasp support frame body, the first clamping arm assembly and the second clamping arm assembly are connected with the clasp driving assembly, and the clasp driving assembly drives the first clamping arm assembly and the second clamping arm assembly to approach to clamp the crystal bar.

[0013] In an embodiment of the utility model, the clasp driving assembly includes a clasp motor, a clasp speed reducer, a clasp lead screw, a lead screw nut and a linear guide rail, the clasp motor is connected with the clasp speed reducer, one end of the output end of the clasp speed reducer is connected with the clasp lead screw, the two ends of the clasp lead screw in the axial direction are respectively provided with a forward thread and a reverse thread, the lead screw nut is sleeved on the forward thread and the reverse thread, the linear guide rail is parallel to the clasp lead screw, the first clamping arm assembly is fixedly connected with the lead screw nut at the forward thread of the clasp lead screw, the first clamping arm assembly is slidably connected with the linear guide rail, the second clamping arm assembly is fixedly connected with the lead screw nut at the reverse thread of the clasp lead screw, and the second clamping arm assembly is slidably connected with the linear guide rail.

[0014] In one embodiment of the utility model, the opposite surface of first clamping arm assembly and second clamping arm assembly is connected with clamping support, clamping side plate is connected on the clamping support, the clamping side plate is V type board, and the clamping side plate is used to contact with the lateral wall of crystal bar.

[0015] In one embodiment of the utility model, the blocking component includes electric push rod, rotating stop lever, hinged support and stop lever limiting piece, the electric push rod is arranged on the first clamping arm assembly or the second clamping arm assembly, and the output end of the electric push rod is hinged with one end of the rotating stop lever, the first clamping arm assembly or the second clamping arm assembly where the electric push rod is arranged is provided with the hinged support, the rotating stop lever is hinged with the hinged support, the first clamping arm assembly and the second clamping arm assembly are all provided with the stop lever limiting piece, the rotating stop lever is placed on the stop lever limiting piece, and the stop lever limiting piece supports and limits the rotating stop lever.

[0016] In one embodiment of the utility model, the lifting mechanism includes lifting drive motor, lifting speed reducer, lifting drive mounting seat, lifting rack, lifting driving wheel and lifting driven wheel, the lifting drive mounting seat is installed on the clamping mechanism, the lifting speed reducer is installed on the lifting drive mounting seat, the lifting drive motor is connected with the lifting speed reducer, the lifting driven wheel is arranged on the lifting drive mounting seat, the output end of the lifting speed reducer is connected with the lifting driving wheel, the lifting driving wheel is engaged with the lifting driven wheel, the lifting driven wheel is engaged with the lifting rack, and the lifting rack is installed on the support support.

[0017] In one embodiment of the utility model, the rotating mechanism is arranged on one side of the robot body.

[0018] Compared with the prior art, the above technical scheme of the utility model has the following beneficial effects:

[0019] The crystal bar taking device of the utility model supports the lower end part of the crystal bar in the axial direction through the support mechanism, makes the crystal bar present the vertical state, realizes clamping through the effective clamping surface of the clamping mechanism to the middle position of the crystal bar, thereby stably fixes the crystal bar on the support mechanism, and can avoid the damage caused by the falling of the crystal bar. The crystal bar in the clamping process can be blocked by the blocking component, so as to prevent the crystal bar from toppling over, without manual operation, thereby reducing the labor cost and safety risk. After clamping the crystal bar, the rotating mechanism can switch the crystal bar between the vertical and horizontal positions, so as to transfer the crystal bar between different stations, and the device can meet the clamping demand of crystal bars of different sizes. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to make the content of the utility model more easily be clearly understood, the following according to the specific embodiment of the utility model and combining with the drawings, the utility model is further explained in detail, wherein

[0021] Figure 1 For the structure diagram of the crystal bar taking device in the preferred embodiment of the utility model Figure 1 ;

[0022] Figure 2 For the structure diagram of the crystal bar taking device in the preferred embodiment of the utility model Figure 2 ;

[0023] Figure 3 For the partial enlarged view of A in the preferred embodiment of the utility model Figure 2 ;

[0024] Figure 4 For the structure diagram of the clamping mechanism in the preferred embodiment of the utility model

[0025] Figure 5 For the structure diagram of the crystal bar taking device in the preferred embodiment of the utility model Figure 3 .

[0026] Description of the drawing mark of the specification: 1, support mechanism, 11, support support, 112, roller guide slot, 12, support base, 2, rotating mechanism, 21, rotating support frame, 22, rotary hydraulic device, 23, rotating panel, 3, clamping mechanism, 31, clamping support frame body, 32, clamping drive assembly, 321, clamping motor, 322, clamping speed reducer, 323, clamping screw rod, 324, screw rod nut, 325, linear guide rail, 33, first clamping arm assembly, 331, clamping support, 332, clamping side plate, 34, second clamping arm assembly, 35, blocking assembly, 351, electric push rod, 352, rotating stop rod, 353, hinged support, 354, stop rod limiting piece, 355, clamping groove, 4, lifting mechanism, 41, lifting drive motor, 42, lifting speed reducer, 43, lifting drive mounting base, 431, roller mounting plate, 432, lifting roller, 44, lifting rack, 45, lifting driving wheel, 46, lifting driven wheel, 5, robot body. Specific implementation

[0027] The utility model is further explained in the following combining with the drawings and specific embodiment, so that the person skilled in the art can better understand the utility model and can be implemented, but the embodiment is not as the limitation of the utility model.

[0028] Refer to Figure 1 , Figure 2 And Figure 5As shown, the crystal bar taking device comprises a robot body 5; a supporting mechanism 1, which is used for setting a crystal bar thereon; a rotating mechanism 2, which is arranged on the robot body 5, and the rotating mechanism 2 is located on one side of the robot body 5, and the rotating mechanism 2 is used for realizing the rotation of the supporting mechanism 1; a clamping mechanism 3, which is connected with the rotating mechanism 2, and the clamping mechanism 3 is used for clamping the crystal bar on the supporting mechanism 1; and a lifting mechanism 4, which is arranged on the clamping mechanism 3, and the lifting mechanism 4 is connected with the supporting mechanism 1, and the lifting mechanism 4 is used for realizing the adjustment of the vertical position of the supporting mechanism 1. Through the lifting mechanism 4, the position of the supporting mechanism 1 in the vertical direction can be adjusted, so as to adapt to the supporting requirements of crystal bars with different lengths, and at this time, the crystal bar axis is arranged along the vertical direction, and after the crystal bar is stably clamped on the supporting mechanism 1 by the clamping mechanism 3, the supporting mechanism 1 is rotated to be horizontally placed by the rotating mechanism 2, so as to facilitate transportation.

[0029] In the above structure, the supporting mechanism 1 comprises a supporting bracket 11 and a supporting base 12, the supporting bracket 11 is connected with the lifting mechanism 4, and the supporting base 12 is arranged at the lower end of the supporting bracket 11 in the vertical state, and the supporting base 12 is used for supporting the crystal bar.

[0030] Referring to Figure 3 , 4 As shown, the rotating mechanism 2 comprises a rotating support frame 21, a rotating hydraulic device 22 and a rotating panel 23, the rotating support frame 21 is connected with the robot body 5, the rotating hydraulic device 22 is arranged on the rotating support frame 21, the rotating panel 23 is connected with the output end of the rotating hydraulic device 22, the rotating hydraulic device 22 is used for driving the rotating panel 23 to rotate, and the clamping mechanism 3 is fixedly connected with the rotating panel 23. The rotating hydraulic device 22 can drive the rotating panel 23 to rotate by 90°, so as to switch the crystal bar between the vertical position and the horizontal position.

[0031] Referring to Figure 3 , 4As shown, the clamping mechanism 3 comprises a clamping support frame 31, a clamping drive assembly 32, a first clamping arm assembly 33 and a second clamping arm assembly 34. The clamping support frame 31 is connected to the rotating part of the rotating mechanism 2. For this embodiment, the clamping support frame 31 is fixedly installed on the rotating panel 23 of the rotating mechanism 2. The clamping drive assembly 32 is installed on the clamping support frame 31. The first clamping arm assembly 33 and the second clamping arm assembly 34 are connected to the clamping drive assembly 32. The first clamping arm assembly 33 and the second clamping arm assembly 34 are symmetrically arranged and can move relative to each other under the drive of the clamping drive assembly 32. A clamping space is formed between the first clamping arm assembly 33 and the second clamping arm assembly 34, and a gap is formed on the side away from the clamping support frame 31. In this embodiment, when the clamping drive assembly 32 drives the first clamping arm assembly 33 and the second clamping arm assembly 34 to move close to each other, the crystal bar can be clamped. The support mechanism 1 is connected to the clamping support frame 31 of the clamping mechanism 3 and is located between the first clamping arm assembly 33 and the second clamping arm assembly 34. Under the drive of the rotating mechanism 2, the support mechanism 1 can rotate together with the clamping mechanism 3 from the vertical state to the horizontal state.

[0032] In the above structure, the clamping drive assembly 32 comprises a clamping motor 321, a clamping speed reducer 322, a clamping lead screw 323, a lead screw nut 324 and a linear guide rail 325. The clamping speed reducer 322, the clamping lead screw 323 and the linear guide rail 325 are all arranged on the clamping support frame 31. The clamping speed reducer 322 is installed at one end of the clamping support frame 31. The clamping motor 321 is connected to the clamping speed reducer 322. The clamping lead screw 323 is arranged along the length direction of the clamping support frame 31, and both ends thereof are rotatably connected to the clamping support frame 31. Moreover, one end of the clamping lead screw 323 extends out of the clamping support frame 31 and is connected to the output end of the clamping speed reducer 322. Both ends of the clamping lead screw 323 in the axial direction extend to the middle position and are provided with a forward thread and a reverse thread. A lead screw nut 324 is sleeved on each of the forward thread and the reverse thread. In this embodiment, two linear guide rails 325 are symmetrically arranged on both sides of the clamping lead screw 323 in the axial direction. The linear guide rails 325 are parallel to the clamping lead screw 323 and are connected to the clamping support frame 31 at both ends thereof. The first clamping arm assembly 33 is fixedly connected to the lead screw nut 324 at the forward thread of the clamping lead screw 323 and is slidably connected to the linear guide rail 325. The second clamping arm assembly 34 is fixedly connected to the lead screw nut 324 at the reverse thread of the clamping lead screw 323 and is slidably connected to the linear guide rail 325.

[0033] The clamping motor 321 drives the clamping lead screw 323 to rotate, so that the lead screw nuts 324 at the positive and negative threads of the clamping lead screw 323 are close to or away from each other. When the lead screw nuts 324 at the positive and negative threads are close to each other, the first clamping arm assembly 33 and the second clamping arm assembly 34 are driven to be close to each other, so that the first clamping arm assembly 33 and the second clamping arm assembly 34 clamp the crystal bar. The opposite surfaces of the first clamping arm assembly 33 and the second clamping arm assembly 34 are connected with clamping supports 331, and the clamping supports 331 are connected with clamping side plates 332 which are V-shaped plates. When the first clamping arm assembly 33 and the second clamping arm assembly 34 are close to clamp the crystal bar, the clamping side plates 332 are in contact with the side wall of the crystal bar.

[0034] The first clamping arm assembly 33 and the second clamping arm assembly 34 are the same in structure. The first clamping arm assembly 33 and the second clamping arm assembly 34 each include two symmetrical and parallel rectangular steel pipes. The two rectangular steel pipes are connected by a rectangular plate. The rectangular plate is connected with the clamping driving assembly 32. Thus, the four rectangular steel pipes included in the first clamping arm assembly 33 and the second clamping arm assembly 34 are respectively located at the four corner positions of the rectangle, and the opposite surfaces of each rectangular steel pipe are provided with a clamping support 331.

[0035] In the above structure, the first clamping arm assembly 33 or the second clamping arm assembly 34 is provided with a blocking assembly 35. The blocking assembly 35 can open or close the gap on the side away from the clamping support frame of the first clamping arm assembly 33 and the second clamping arm assembly 34. The blocking assembly 35 includes an electric push rod 351, a rotating stop rod 352, a hinged support 353, and a stop rod limiting piece 354. The electric push rod 351 is arranged on the first clamping arm assembly 33 or the second clamping arm assembly 34, and the output end of the electric push rod 351 is hinged to one end of the rotating stop rod 352. The first clamping arm assembly 33 or the second clamping arm assembly 34 on which the electric push rod 351 is arranged is provided with the hinged support 353, the rotating stop rod 352 is hinged to the hinged support 353, and the first clamping arm assembly 33 and the second clamping arm assembly 34 are each provided with the stop rod limiting piece 354, the rotating stop rod 352 is arranged on the stop rod limiting piece 354, and the stop rod limiting piece 354 supports and limits the rotating stop rod 352. The stop rod limiting piece 354 is a rectangular plate, and the upper end of the stop rod limiting piece 354 is provided with a clamping groove 355 which is a rectangular groove, and the rotating stop rod 352 is a rectangular rod arranged in the clamping groove 355.

[0036] When the piston rod of the electric push rod 351 extends or retracts, the rotating stop rod 352 can be driven to rotate around the hinge support 353. When the electric push rod 351 retracts, the rotating stop rod 352 rotates away from the stop rod limiting piece 354, thereby opening the gap between the first clamping arm assembly 33 and the second clamping arm assembly 34 away from one side of the clamping support frame. When the electric push rod 351 extends, the rotating stop rod 352 is driven to rotate around the hinge support 353, so that the rotating stop rod 352 is placed in the clamping groove 355. At this time, the rotating stop rod 352 closes the gap between the first clamping arm assembly 33 and the second clamping arm assembly 34 away from one side of the clamping support frame, thereby limiting the wafer between the first clamping arm assembly 33 and the second clamping arm assembly 34. The blocking assembly 35 can block the wafer during clamping, preventing the wafer from falling, without manual operation, thereby reducing labor costs and safety risks.

[0037] With reference to Figure 3 As shown in the drawings, the lifting mechanism 4 comprises a lifting drive motor 41, a lifting speed reducer 42, a lifting drive mounting seat 43, a lifting rack 44, a lifting driving wheel 45 and a lifting driven wheel 46. The lifting drive mounting seat 43 is installed on the clamping support frame 31 of the clamping mechanism 3. The lifting speed reducer 42 is installed on the lifting drive mounting seat 43. The lifting drive motor 41 and the lifting speed reducer 42 are connected. The lifting driving wheel 45 is connected with the output end of the lifting speed reducer 42. The lifting driven wheel 46 is rotationally arranged on the lifting drive mounting seat 43. The lifting driving wheel 45 and the lifting driven wheel 46 are in mesh transmission. The lifting driven wheel 46 and the lifting rack 44 are in meshing cooperation. The lifting rack 44 is installed on the support bracket 11. The lifting drive mounting seat 43 is provided with a roller mounting plate 431. The roller mounting plate 431 is provided with a lifting roller 432. The support bracket 11 is provided with a roller guide groove 112. The lifting roller 432 is arranged in the roller guide groove 112. The lifting roller 432 can roll in the roller guide groove 112. The lifting drive motor 41 drives the lifting rack 44 to move through the gear set composed of the lifting driving wheel 45 and the lifting driven wheel 46, thereby driving the support bracket 11 to move vertically.

[0038] Obviously, the above embodiments are only examples for clearly illustrating, not limiting the embodiments. For those skilled in the art, other different forms of changes or variations can be made on the basis of the above description. Here, all the embodiments need not and cannot be exhausted. The obvious changes or variations derived therefrom are still within the protection scope of the present application.

Claims

1. A crystal taking device, characterized by comprising: The device comprises: a rotating mechanism; a clamping mechanism, which comprises a clamping support frame arranged on the rotating part of the rotating mechanism, a first clamping arm assembly and a second clamping arm assembly movably arranged on the side of the clamping support frame away from the rotating mechanism, and a blocking assembly arranged on the first clamping arm assembly or the second clamping arm assembly; the first clamping arm assembly and the second clamping arm assembly are oppositely arranged; a clamping space is formed between the first clamping arm assembly and the second clamping arm assembly, and a gap is formed on the side away from the clamping support frame; the blocking assembly is arranged to open or close the gap between the first clamping arm assembly and the second clamping arm assembly; a supporting mechanism, which comprises a supporting bracket arranged between the first clamping arm assembly and the second clamping arm assembly, and a supporting base arranged on the supporting bracket; the supporting mechanism is arranged to be rotated from a vertical state to a horizontal state together with the clamping mechanism under the driving of the rotating mechanism.

2. The crystal taking rod device according to claim 1, characterized by: The device further comprises a lifting mechanism, the supporting bracket is connected with the lifting mechanism, and the lifting mechanism is used to drive the supporting bracket to ascend or descend along the vertical direction.

3. The crystal taking rod device according to claim 1, characterized by: The rotating mechanism comprises a rotating support frame, a rotating hydraulic device, and a rotating panel; the rotating hydraulic device is arranged on the rotating support frame; the rotating panel is connected with the output end of the rotating hydraulic device; the rotating hydraulic device is used to drive the rotating panel to rotate; and the clamping mechanism is fixedly connected with the rotating panel.

4. The crystal taking rod device according to claim 1, characterized by: The clamping support frame is provided with a clamping driving assembly; the first clamping arm assembly and the second clamping arm assembly are connected with the clamping driving assembly; and the clamping driving assembly drives the first clamping arm assembly and the second clamping arm assembly to approach to clamp the crystal bar.

5. The crystal taking rod device according to claim 4, characterized by: The clamping driving assembly comprises a clamping motor, a clamping speed reducer, a clamping lead screw, a lead screw nut, and a linear guide rail; the clamping motor is connected with the clamping speed reducer; the output end of the clamping speed reducer is connected with one end of the clamping lead screw; the two ends of the clamping lead screw in the axial direction are respectively provided with a forward thread and a reverse thread; the lead screw nut is sleeved on the forward thread and the reverse thread; the linear guide rail is arranged parallel to the clamping lead screw; the first clamping arm assembly is fixedly connected with the lead screw nut at the forward thread of the clamping lead screw, and the first clamping arm assembly is slidingly connected with the linear guide rail; the second clamping arm assembly is fixedly connected with the lead screw nut at the reverse thread of the clamping lead screw, and the second clamping arm assembly is slidingly connected with the linear guide rail.

6. The crystal taking rod device according to claim 4, characterized by: The opposite surfaces of the first clamping arm assembly and the second clamping arm assembly are respectively connected with clamping brackets; the clamping brackets are connected with clamping side plates; the clamping side plates are V-shaped plates; and the clamping side plates are used to contact with the side wall of the crystal bar.

7. The crystal taking rod device according to claim 1, characterized by: The blocking assembly comprises an electric push rod, a rotating blocking rod, a hinged support and a blocking rod limiting piece, the electric push rod is arranged on the first clamping arm assembly or the second clamping arm assembly, and the output end of the electric push rod is hinged to one end of the rotating blocking rod, the first clamping arm assembly or the second clamping arm assembly, on which the electric push rod is arranged, is provided with the hinged support, the rotating blocking rod is hinged to the hinged support, the first clamping arm assembly and the second clamping arm assembly are both provided with the blocking rod limiting piece, the rotating blocking rod is arranged on the blocking rod limiting piece, and the blocking rod limiting piece supports and limits the rotating blocking rod.

8. The crystal taking rod device according to claim 2, characterized by: The lifting mechanism comprises a lifting drive motor, a lifting speed reducer, a lifting drive mounting seat, a lifting rack, a lifting driving wheel and a lifting driven wheel, the lifting drive mounting seat is mounted on the clamping mechanism, the lifting speed reducer is mounted on the lifting drive mounting seat, the lifting drive motor and the lifting speed reducer are connected, the lifting driven wheel is arranged on the lifting drive mounting seat, the output end of the lifting speed reducer is connected to the lifting driving wheel, the lifting driving wheel is engaged with the lifting driven wheel, and the lifting driven wheel is engaged with the lifting rack, and the lifting rack is mounted on the support bracket.

9. The crystal taking rod device according to claim 1, characterized by: The robot body is further provided, and the rotating mechanism is arranged on one side of the robot body.

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