Purging system for liquid source conveying and semiconductor process equipment

Abstract

The utility model relates to a purging system for conveying a liquid source and semiconductor process equipment. The purging system comprises a first liquid storage module, a second liquid storage module, a third liquid storage module, a fourth liquid storage module, a first power gas supply module, a second power gas supply module, a first purging gas supply module, a second purging gas supply module and a first vacuum module. The cleaning device has the advantages that the first purging gas supply module can press dissolved liquid in the third liquid storage module into the first liquid storage module, the second liquid storage module and the plurality of pipelines, so that the first liquid storage module, the second liquid storage module and the plurality of pipelines can be cleaned through the dissolved liquid; therefore, the liquid source adhering to the pipe wall and remaining in the first liquid storage module and the second liquid storage module can be dissolved and discharged, and then the cleanliness of cleaning the first liquid storage module, the second liquid storage module and the multiple pipelines is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to special liquid source conveying technical field especially, a kind of purge system and semiconductor process equipment for liquid source conveying. BACKGROUND

[0002] In the production process of semiconductor industry, CVD machine is indispensably relied on a series of special liquids, and the accurate delivery of these liquids relies on professional purge system. The system integrates liquid storage module, buffer module, gas supply module, gas-liquid separation module, exhaust module, purge module, pipeline module and pressure monitoring module and multiple key components.

[0003] However, for some special liquids with strong metal pipe wall adhesion capacity, such as TDMAT, CP-Hf, CP-Zr and IP235, the existing purge technology is still difficult to completely remove them. At the same time, in the aspect of safety guarantee, the system also lacks perfect liquid leakage detection mechanism, which limits the further improvement of its performance to some extent.

[0004] At present, in view of the problems existing in the prior art that the existing delivery system cannot clean the liquid with strong metal pipe wall adhesion capacity, no effective solution has been proposed. UTILITY MODEL CONTENT

[0005] The utility model aims at the deficiency in the prior art, and provides a purge system for liquid source delivery and semiconductor process equipment to solve the problems that the existing delivery system in related art cannot clean the liquid with strong metal pipe wall adhesion capacity.

[0006] To achieve the above-mentioned purpose, the technical scheme adopted by the utility model is:

[0007] In the first aspect, the utility model provides a purge system for liquid source delivery, comprising:

[0008] A first liquid storage module is used for storing liquid source;

[0009] A second liquid storage module is in communication with the first liquid storage module and process equipment through pipeline respectively, and is located downstream of the first liquid storage module, used for buffering liquid source and delivering liquid source to process equipment;

[0010] A third liquid storage module is in communication with the first liquid storage module and the second liquid storage module through pipeline respectively, used for storing dissolving liquid and delivering dissolving liquid to the first liquid storage module and the second liquid storage module;

[0011] a fourth liquid storage module, which is in communication with the first liquid storage module, the second liquid storage module, respectively, through pipelines, for storing waste liquid;

[0012] a first power gas supply module, which is in communication with a first power gas source, the first liquid storage module, respectively, through pipelines, for supplying first power gas to the first liquid storage module to make the liquid source of the first liquid storage module flow to the second liquid storage module;

[0013] a second power gas supply module, which is in communication with a second power gas source, the second liquid storage module, respectively, through pipelines, for supplying second power gas to the second liquid storage module to make the liquid source of the second liquid storage module flow to the process equipment;

[0014] a first purge gas supply module, which is in communication with a first purge gas source, the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module, respectively, through pipelines, for respectively conveying first purge gas to the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module to press the liquid source in the pipelines into the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module, respectively;

[0015] a second purge gas supply module, which is in communication with a second purge gas source, the third liquid storage module, respectively, through pipelines, for conveying second purge gas to the third liquid storage module to press the dissolving liquid into the pipelines, the first liquid storage module, the second liquid storage module, respectively, to make the dissolving liquid clean the pipelines, the first liquid storage module, the second liquid storage module;

[0016] a first vacuum module, which is in communication with the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module, respectively, for vacuum processing the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module.

[0017] In some embodiments, further comprising:

[0018] a gas-liquid separation module, which is in communication with the second liquid storage module, the process equipment, respectively, through pipelines, and is located downstream of the second liquid storage module, for gas-liquid separation of the liquid source flowing downstream from the second liquid storage module to remove gas in the liquid source and conveying the gas-liquid separated liquid source to the process equipment;

[0019] A second vacuum module, which is in communication with the gas-liquid separation module, is used to discharge the gas generated by the gas-liquid separation module.

[0020] In some embodiments, the system further comprises:

[0021] A volatilization module, which is in communication with the fourth liquid storage module and the exhaust device, is used to discharge the volatile liquid in the fourth liquid storage module and the pipeline.

[0022] A third vacuum module, which is in communication with the first vacuum module, is used to accelerate the volatilization of the liquid.

[0023] In some embodiments, the system further comprises:

[0024] A liquid leakage monitoring module, which is arranged in the first liquid storage module, the second liquid storage module, the third liquid storage module and the fourth liquid storage module, is used to monitor the liquid leakage of the first liquid storage module, the second liquid storage module, the third liquid storage module and the fourth liquid storage module in real time.

[0025] In some embodiments, the system further comprises:

[0026] A medium monitoring module, which is in communication with the third liquid storage module and located downstream of the third liquid storage module, is used to monitor whether the medium output by the third liquid storage module is liquid.

[0027] In some embodiments, the system further comprises:

[0028] A safety guarantee module, which is arranged at the top of the environment where the purge system is located, is used to monitor the environmental information.

[0029] In a second aspect, the utility model also provides a kind of semiconductor process equipment, it is characterized in that, comprising:

[0030] The purge system as described in the first aspect.

[0031] The utility model adopts above technical scheme, compared with prior art, with following technical effect:

[0032] The utility model discloses a kind of for liquid source delivery's purging system and semiconductor process equipment, by with first power gas supply module and first liquid storage module communication, with second power gas supply module and second liquid storage module communication, with first purging gas supply module is respectively communicated with first liquid storage module, second liquid storage module, third liquid storage module, fourth liquid storage module, with second purging gas supply module and third liquid storage module, can be dissolved in third liquid storage module The solution is pressed into first liquid storage module, second liquid storage module and multiple pipelines, to be cleaned by dissolving solution to first liquid storage module, second liquid storage module and multiple pipelines, so that the liquid source adhered to pipe wall and residual in first liquid storage module, second liquid storage module is dissolved and discharged, to improve the cleanliness of first liquid storage module, second liquid storage module and multiple pipelines cleaning. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1 is the schematic diagram of the purging system according to the utility model embodiment (one);

[0034] Figure 2 is the schematic diagram of first liquid storage module, second liquid storage module, third liquid storage module and fourth liquid storage module according to the utility model embodiment;

[0035] Figure 3 is the schematic diagram of first power gas supply module, second power gas supply module, first purging gas supply module and second purging gas supply module according to the utility model embodiment;

[0036] Figure 4 is the schematic diagram of first vacuum module according to the utility model embodiment;

[0037] Figure 5 is the schematic diagram of the purging system according to the utility model embodiment (two);

[0038] Figure 6 is the schematic diagram of gas-liquid separation module and second vacuum module according to the utility model embodiment;

[0039] Figure 7 is the schematic diagram of the purging system according to the utility model embodiment (three);

[0040] Figure 8 is the schematic diagram of volatile module and third vacuum module according to the utility model embodiment;

[0041] Figure 9 is the schematic diagram of the purging system according to the utility model embodiment (four);

[0042] Figure 10 is the schematic diagram of leakage monitoring module according to the utility model embodiment.

[0043] The reference numerals in the drawings are: 100, first liquid storage module; 101, first liquid storage element; 102, first conveying pipeline element; 103, second conveying pipeline element; 104, first control valve element; 105, second control valve element; 106, first bypass pipeline element; 107, third control valve element; 108, first pressure monitoring element; 109, second pressure monitoring element; 200, second liquid storage module; 201, second liquid storage element; 202, third conveying pipeline element; 203, fourth conveying pipeline element; 204, fifth conveying pipeline element; 205, fourth control valve element; 206, fifth control valve element; 207, sixth control valve element; 208, second bypass pipeline element; 209, seventh control valve element; 210, third pressure monitoring element; 211, fourth pressure monitoring element; 300, third liquid storage module; 301, third liquid storage element; 302, sixth conveying pipeline element; 303, seventh conveying pipeline element; 304, eighth conveying pipeline element; 305, ninth conveying pipeline element; 306, eighth control valve element; 307, ninth control valve element; 308, tenth control valve element; 309, eleventh control valve element; 310, fifth pressure monitoring element; 400, fourth liquid storage module; 401, fourth liquid storage element; 402, tenth conveying pipeline element; 403, twelfth control valve element; 404, sixth pressure monitoring element; 500, first power gas supply module; 501, first power gas supply element; 502, thirteenth control valve element; 503, first pressure regulating element; 504, seventh pressure monitoring element; 600, second power gas supply module; 601, second power gas supply element; 602, fourteenth control valve element; 603, second pressure regulating element; 604, eighth pressure monitoring element; 700, first purge gas supply module; 701, first purge pipeline element; 702, second purge pipeline element; 703, third purge pipeline element; 704, fourth purge pipeline element; 705, fifth purge pipeline element; 706, sixth purge pipeline element; 707, fifteenth control valve element; 708, sixteenth control valve element; 709, seventeenth control valve element; 710, eighteenth control valve element; 711, nineteenth control valve element; 712, micro-leakage adjusting element; 713, third pressure regulating element; 714, ninth pressure monitoring element; 800, second purge gas supply module; 801, seventh purge pipeline element; 802, twentieth control valve element; 803, fourth pressure regulating element; 804, tenth pressure monitoring element; 900, first vacuum module; 901, first exhaust pipeline element; 902, first vacuum pipeline element; 903, second vacuum pipeline element; 904, third vacuum pipeline element; 905, fourth vacuum pipeline element; 906, twenty-first control valve element; 907, twenty-second control valve element; 908, twenty-third control valve element; 909, twenty-fourth control valve element;910, twenty-fifth control valve element; 911, eleventh pressure monitoring element; 1000, gas-liquid separation module; 1001, gas-liquid separation element; 1002, third bypass pipeline element; 1003, twenty-sixth control valve element; 1004, twenty-seventh control valve element; 1100, second vacuum module; 1101, fifth vacuum pipeline element; 1102, twenty-eighth control valve element; 1103, twelfth pressure monitoring element; 1200, volatilization module; 1201, first volatilization pipeline element; 1202, second volatilization pipeline element; 1203, twenty-ninth control valve element; 1204, thirtieth control valve element; 1300, third vacuum module; 1301, sixth vacuum pipeline element; 1302, thirty-first control valve element; 1400, liquid leakage monitoring module; 1401, containing element; 1402, first liquid leakage detection element; 1403, second liquid leakage detection element; 1500, medium monitoring module. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is described and explained below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of the present application.

[0045] Obviously, the drawings in the following description are only some examples or embodiments of the present application, and for those of ordinary skill in the art, the present application can also be applied to other similar scenarios without creative labor on the basis of these drawings. In addition, it can be understood that although the efforts made in this development process can be complex and lengthy, for those of ordinary skill in the art related to the content disclosed in the present application, some design, manufacture or production changes based on the technical content disclosed in the present application are only routine technical means and should not be understood as insufficient disclosure of the present application.

[0046] In the present application, the phrase "embodiment" means that the specific features, structures or characteristics described in combination with the embodiment can be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily mean the same embodiment, nor is it an independent or alternative embodiment to other embodiments. Those of ordinary skill in the art explicitly and implicitly understand that the embodiments described in the present application can be combined with other embodiments without conflict.

[0047] Embodiment 1

[0048] The present embodiment relates to the purge system in the present utility model.

[0049] One illustrative embodiment of the present utility model, as shown in Figure 1 A purge system for liquid source delivery, comprising a first liquid storage module 100, a second liquid storage module 200, a third liquid storage module 300, a fourth liquid storage module 400, a first power gas supply module 500, a second power gas supply module 600, a first purge gas supply module 700, a second purge gas supply module 800 and a first vacuum module 900. Among them, the first liquid storage module 100 is used for storing liquid source; the second liquid storage module 200 is respectively communicated with the first liquid storage module 100, process equipment through pipeline, and is located downstream of the first liquid storage module 100, and is used for buffering liquid source and delivering liquid source to process equipment; the third liquid storage module 300 is respectively communicated with the first liquid storage module 100, the second liquid storage module 200 through pipeline, and is used for storing dissolving liquid and delivering dissolving liquid to the first liquid storage module 100, the second liquid storage module 200; the fourth liquid storage module 400 is respectively communicated with the first liquid storage module 100, the second liquid storage module 200 through pipeline, and is used for storing waste liquid; the first power gas supply module 500 is respectively communicated with the first power gas source, the first liquid storage module 100 through pipeline, and is used for supplying the first power gas to the first liquid storage module 100 to make the liquid source of the first liquid storage module 100 flow to the second liquid storage module 200; the second power gas supply module 600 is respectively communicated with the second power gas source, the second liquid storage module 200 through pipeline, and is used for supplying the second power gas to the second liquid storage module 200 to make the liquid source of the second liquid storage module 200 flow to process equipment; the first purge gas supply module 700 is respectively communicated with the first purge gas source, the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, the fourth liquid storage module 400 through pipeline, and is used for respectively delivering the first purge gas to the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, the fourth liquid storage module 400 to press the liquid source, dissolving liquid, waste liquid in the pipeline into the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, the fourth liquid storage module 400 respectively; the second purge gas supply module 800 is respectively communicated with the second purge gas source, the third liquid storage module 300 through pipeline, and is used for delivering the second purge gas to the third liquid storage module 300 to press the dissolving liquid into the pipeline, the first liquid storage module 100, the second liquid storage module 200 respectively to make the dissolving liquid clean the pipeline, the first liquid storage module 100, the second liquid storage module 200; the first vacuum module 900 is respectively communicated with the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, the fourth liquid storage module 400, and is used for vacuum treatment to the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300 and the fourth liquid storage module 400.

[0050] It should be noted that the first end and the second end in the utility model are two ends of the length direction respectively.

[0051] It should be noted that the first power gas source and the second power gas source include but are not limited to He.

[0052] It should be noted that the first purge gas source and the second purge gas source include but are not limited to He and N2.

[0053] As shown in Figure 2 The first liquid storage module 100 includes a first liquid storage element 101, a first conveying pipeline element 102 and a second conveying pipeline element 103.

[0054] Specifically, the first end of the first conveying pipeline element 102 is in communication with the first power gas supply module 500 and the first purge gas supply module 700 respectively, and the second end of the first conveying pipeline element 102 is in communication with the first liquid storage element 101; the first end of the second conveying pipeline element 103 is in communication with the first liquid storage element 101, the second end of the second conveying pipeline element 103 is in communication with the second liquid storage module 200, and the middle part of the second conveying pipeline element 103 is in communication with the first purge gas supply module 700.

[0055] It should be noted that the second end of the first conveying pipeline element 102 extends into the interior of the first liquid storage element 101 and extends to a position close to the top wall inside the first liquid storage element 101; the first end of the second conveying pipeline element 103 extends into the interior of the first liquid storage element 101 and extends to a position close to the bottom wall inside the first liquid storage element 101.

[0056] In some embodiments, the first liquid storage element 101 includes but is not limited to a stainless steel barrel; the first conveying pipeline element 102 includes but is not limited to a stainless steel pipe; and the second conveying pipeline element 103 includes but is not limited to a stainless steel pipe.

[0057] Further, the first liquid storage module 100 further includes a first control valve element 104 and a second control valve element 105.

[0058] Specifically, the first control valve element 104 comprises a first pneumatic diaphragm valve. The first pneumatic diaphragm valve is arranged on the first delivery pipeline element 102 to automatically control the flow between the first delivery pipeline element 102 and the first liquid storage element 101.

[0059] Specifically, the second control valve element 105 comprises a second pneumatic diaphragm valve, a third pneumatic diaphragm valve, a first manual diaphragm valve, a fourth pneumatic diaphragm valve, and a fifth pneumatic diaphragm valve. The second pneumatic diaphragm valve is arranged on the second delivery pipeline element 103 to automatically control the flow between the second delivery pipeline element 103 and the first liquid storage element 101. The third pneumatic diaphragm valve is arranged on the second delivery pipeline element 103 downstream of the second pneumatic diaphragm valve. The first manual diaphragm valve is arranged on the second delivery pipeline element 103 downstream of the second pneumatic diaphragm valve. The fourth pneumatic diaphragm valve is arranged on the second delivery pipeline element 103 downstream of the first manual diaphragm valve. The fifth pneumatic diaphragm valve is arranged on the second end of the second delivery pipeline element 103 and is in communication with the second liquid storage module 200 to automatically control the flow between the second delivery pipeline element and the second liquid storage module 200.

[0060] Further, the first liquid storage module 100 further comprises a first bypass pipeline element 106 and a third control valve element 107. The first bypass pipeline element 106 is in communication with the first delivery pipeline element 102 and the second delivery pipeline element 103 to bypass. The third control valve element 107 is arranged on the first bypass pipeline element 106 to control the flow of the first bypass pipeline element 106.

[0061] Specifically, the first end of the first bypass pipeline element 106 is in communication with the first delivery pipeline element 102 downstream of the first pneumatic diaphragm valve. The second end of the first bypass pipeline element 106 is in communication with the second delivery pipeline element 103 downstream of the second pneumatic diaphragm valve and upstream of the third pneumatic diaphragm valve.

[0062] In some embodiments, the first bypass pipeline element 106 comprises, but is not limited to, a stainless steel pipe.

[0063] Specifically, the third control valve element 107 comprises a sixth pneumatic diaphragm valve. The sixth pneumatic diaphragm valve is arranged on the first bypass pipeline element 106 to automatically control the flow of the first bypass pipeline element 106.

[0064] Further, the first liquid storage module 100 further comprises a first pressure monitoring element 108, a second pressure monitoring element 109, a first liquid level monitoring element and a first weight monitoring element. The first pressure monitoring element 108 is in communication with the first delivery pipeline element 102 for monitoring the pressure of the first delivery pipeline element 102; the second pressure monitoring element 109 is in communication with the second delivery pipeline element 103 for monitoring the pressure of the second delivery pipeline element 103; the first liquid level monitoring element is disposed inside the first liquid storage element 101 for monitoring the liquid level of the first liquid storage element 101; the first weight monitoring element is disposed at the bottom of the first liquid storage element 101 for monitoring the weight of the first liquid storage element 101.

[0065] Specifically, the communication position of the first pressure monitoring element 108 with the first delivery pipeline element 102 is upstream of the first pneumatic diaphragm valve; the communication position of the second pressure monitoring element 106 with the second delivery pipeline element 103 is downstream of the second pneumatic diaphragm valve and upstream of the third pneumatic diaphragm valve.

[0066] In some embodiments, the first pressure monitoring element 108 comprises but is not limited to a pressure sensor; the second pressure monitoring element 109 comprises but is not limited to a pressure sensor; the first liquid level monitoring element comprises but is not limited to a liquid level sensor; the first weight monitoring element comprises but is not limited to a scale.

[0067] As shown in FIG. 1, the first liquid storage module 100 further comprises a first pneumatic diaphragm valve 110, a second pneumatic diaphragm valve 111, a third pneumatic diaphragm valve 112 and a fourth pneumatic diaphragm valve 113. The first pneumatic diaphragm valve 110 is disposed between the first delivery pipeline element 102 and the first liquid storage element 101; the second pneumatic diaphragm valve 111 is disposed between the second delivery pipeline element 103 and the first liquid storage element 101; the third pneumatic diaphragm valve 112 is disposed between the third delivery pipeline element 104 and the first liquid storage element 101; the fourth pneumatic diaphragm valve 113 is disposed between the fourth delivery pipeline element 105 and the first liquid storage element 101. Figure 2 As shown in FIG. 2, the second liquid storage module 200 comprises a second liquid storage element 201, a third delivery pipeline element 202, a fourth delivery pipeline element 203 and at least one fifth delivery pipeline element 204. The second liquid storage element 201 is in communication with the first liquid storage module 100 respectively for buffering the liquid source; the third delivery pipeline element 202 is in communication with the second liquid storage element 201, the second power gas supply module 600 and the first purge gas supply module 700 respectively for delivering gas; the fourth delivery pipeline element 203 is in communication with the second liquid storage element 201 and the first purge gas supply module 700 respectively for delivering the liquid source; the fifth delivery pipeline element 204 is in communication with the fourth delivery pipeline element 203 and the process equipment respectively for delivering the liquid source to the process equipment.

[0068] Specifically, the first end of the third delivery pipeline element 202 is in communication with the second power gas supply module 600 and the first purge gas supply module 700 respectively, and the second end of the third delivery pipeline element 202 is in communication with the second liquid storage element 201; the first end of the fourth delivery pipeline element 203 is in communication with the second liquid storage element 201; the first end of the fifth delivery pipeline element 204 is in communication with the second end of the fourth delivery pipeline element 203 and the first purge gas supply module 700 respectively, and the second end of the fifth delivery pipeline element 204 is in communication with the process equipment.

[0069] It should be noted that the second end of the third conveying pipeline element 202 extends into the interior of the second liquid storage element 201 and extends to a position close to the top wall inside the second liquid storage element 201; the first end of the fourth conveying pipeline element 203 extends into the interior of the second liquid storage element 201 and extends to a position close to the bottom wall inside the second liquid storage element 201.

[0070] It should be noted that the number of the fifth conveying pipeline element 204 can be set according to the number of the process equipment or the number of the gas inlet on one process equipment, which is not limited here.

[0071] It should be noted that the number of the fifth conveying pipeline element 204 can be set according to the number of the process equipment or the number of the gas inlet on one process equipment, which is not limited here.

[0072] In some embodiments, the second liquid storage element 201 includes but is not limited to a stainless steel barrel; the third conveying pipeline element 202 includes but is not limited to a stainless steel pipe; the fourth conveying pipeline element 203 includes but is not limited to a stainless steel pipe; and the fifth conveying pipeline element 204 includes but is not limited to a stainless steel pipe.

[0073] Further, the second liquid storage module 200 further includes a fourth control valve element 205, a fifth control valve element 206, and at least one sixth control valve element 207. The fourth control valve element 205 is arranged on the third conveying pipeline element 202 to control the flow of the third conveying pipeline element 202; the fifth control valve element 206 is arranged on the fourth conveying pipeline element 203 to control the flow of the fourth conveying pipeline element 203; and the sixth control valve element 207 is arranged on the fifth conveying pipeline element 204 to control the flow of the fifth conveying pipeline element 204.

[0074] Specifically, the fourth control valve element 205 includes a seventh pneumatic diaphragm valve. The seventh pneumatic diaphragm valve is arranged on the third conveying pipeline element 202 to automatically control the flow of the third conveying pipeline element 202 and the second liquid storage element 201.

[0075] Specifically, the fifth control valve element 206 comprises an eighth pneumatic diaphragm valve, a ninth pneumatic diaphragm valve, and a second manual diaphragm valve. Among them, the eighth pneumatic diaphragm valve is arranged on the fourth conveying pipeline element 203, and is used to automatically control the flow communication between the second liquid storage element 201 and the fourth conveying pipeline element 203; the ninth pneumatic diaphragm valve is arranged on the fourth conveying pipeline element 203 and is located downstream of the eighth pneumatic diaphragm valve; the second manual diaphragm valve is arranged on the fourth conveying pipeline element 203 and is located downstream of the eighth pneumatic diaphragm valve, and is used to manually control the flow communication between the fourth conveying pipeline element 203 and the fifth conveying pipeline element 204.

[0076] It should be noted that the number of the sixth control valve element 207 is matched with the number of the fifth conveying pipeline element 204. It should be understood that the number of the sixth control valve element 207 is the same as the number of the fifth conveying pipeline element 204.

[0077] More specifically, the sixth control valve element 207 comprises a tenth pneumatic diaphragm valve and a third manual diaphragm valve. Among them, the tenth pneumatic diaphragm valve is arranged on the fifth conveying pipeline element 204, and is used to automatically control the flow communication between the fifth conveying pipeline element 204 and the fourth conveying pipeline element 203; the third manual diaphragm valve is arranged on the fifth conveying pipeline element 204 and is located downstream of the tenth pneumatic diaphragm valve, and is used to manually control the flow communication between the fifth conveying pipeline element 204 and the fourth conveying pipeline element 203.

[0078] Further, the second liquid storage module 200 further comprises a second bypass pipeline element 208 and a seventh control valve element 209. Among them, the first end of the second bypass pipeline element 208 is in communication with the first liquid storage module 100, and the second end of the second bypass pipeline element 208 is in communication with the fourth conveying pipeline element, which is used for bypassing; the seventh control valve element 209 is arranged on the second bypass pipeline element 208, and is used to control the flow communication of the second bypass pipeline element 208.

[0079] Specifically, the first end of the second bypass pipeline element 208 is in communication with the second conveying pipeline element 103, and the communication position is located downstream of the fourth pneumatic diaphragm valve and upstream of the fifth pneumatic diaphragm valve; the second end of the second bypass pipeline element 208 is in communication with the fourth conveying pipeline element 203, and the communication position is located between the eighth pneumatic diaphragm valve and the ninth pneumatic diaphragm valve.

[0080] In some embodiments, the second bypass pipeline element 208 comprises, but is not limited to, a stainless steel pipe.

[0081] Specifically, the seventh control valve element 209 comprises an eleventh pneumatic diaphragm valve. Among them, the eleventh pneumatic diaphragm valve is arranged on the second bypass pipeline element 208, and is used to control the flow communication of the second bypass pipeline element 208.

[0082] Furthermore, the second liquid storage module 200 also includes a third pressure monitoring element 210, a fourth pressure monitoring element 211, a second liquid level monitoring element, and a second weight monitoring element. The third pressure monitoring element 210 is connected to the third delivery pipeline element 202 and is used to monitor the pressure of the third delivery pipeline element 202; the fourth pressure monitoring element 211 is connected to the fourth delivery pipeline element 203 and is used to monitor the pressure of the fourth delivery pipeline element 203; the second liquid level monitoring element is disposed inside the second liquid storage element 201 and is used to detect the liquid level of the second liquid storage element 201; the second weight monitoring element is disposed at the bottom of the second liquid storage element 201 and is used to monitor the weight of the second liquid storage element 201.

[0083] Specifically, the connection between the third pressure monitoring element 210 and the third delivery pipeline element 202 is located upstream of the seventh pneumatic diaphragm valve; the connection between the fourth pressure monitoring element 211 and the fourth delivery pipeline element 203 is located downstream of the eighth pneumatic diaphragm valve and upstream of the ninth pneumatic diaphragm valve.

[0084] In some of these embodiments, the third pressure monitoring element 210 includes, but is not limited to, a pressure sensor; the fourth pressure monitoring element 211 includes, but is not limited to, a pressure sensor; the second liquid level monitoring element includes, but is not limited to, a liquid level sensor; and the second weight monitoring element includes, but is not limited to, a scale.

[0085] like Figure 2 As shown, the third liquid storage module 300 includes a third liquid storage element 301, a sixth delivery pipeline element 302, a seventh delivery pipeline element 303, an eighth delivery pipeline element 304, and at least one ninth delivery pipeline element 305. The third liquid storage element 301 is connected to the first liquid storage module 100 and is used to store the solution; the sixth delivery pipeline element 302 is connected to the third liquid storage element 301, the first purge gas supply module 700, and the second purge gas supply module 800 respectively and is used to deliver gas; the seventh delivery pipeline element 303 is connected to the third liquid storage element 301, the first liquid storage module 100, the second liquid storage module 200, and the first purge gas supply module 700 respectively and is used to deliver gas and liquid; the eighth delivery pipeline element 304 is connected to the seventh delivery pipeline element 303 and the first purge gas supply module 700 respectively and is used to deliver liquid; the ninth delivery pipeline element 305 is connected to the eighth delivery pipeline element 304 and the fifth delivery pipeline element 204 in the second liquid storage module 200 respectively and is used to deliver liquid.

[0086] Specifically, the first end of the sixth conveying pipeline element 302 is in communication with the first purge gas supply module 700 and the second purge gas supply module 800, and the second end of the sixth conveying pipeline element 302 is in communication with the third liquid storage element 301; the first end of the seventh conveying pipeline element 303 is in communication with the third liquid storage element 301, and the second end of the seventh conveying pipeline element 303 is in communication with the first purge gas supply module 700 and the second conveying pipeline element 103 respectively, and the communication position is between the second pressure monitoring element 109 and the third pneumatic diaphragm valve; the first end of the eighth conveying pipeline element 304 is in communication with the seventh conveying pipeline element 303, and the second end of the eighth conveying pipeline element 304 is in parallel with the first end of a plurality of ninth conveying pipeline elements 305; the second end of the ninth conveying pipeline element 305 is in communication with the fifth conveying pipeline element 204, and the communication position of the ninth conveying pipeline element 305 and the fifth conveying pipeline element 204 is between the tenth pneumatic diaphragm valve and the third manual diaphragm valve.

[0087] It should be noted that the second end of the sixth conveying pipeline element 302 extends into the interior of the third liquid storage element 301 and extends to a position close to the top wall inside the third liquid storage element 301; the first end of the seventh conveying pipeline element 303 extends into the interior of the third liquid storage element 301 and extends to a position close to the bottom wall inside the third liquid storage element 301.

[0088] It should be noted that the number of the ninth conveying pipeline element 305 is several, and the corresponding fifth conveying pipeline element 204 of the several ninth conveying pipeline elements 305 is in communication.

[0089] It should be noted that the number of the ninth conveying pipeline element 305 is matched with the number of the fifth conveying pipeline element 204. It should be understood that the number of the ninth conveying pipeline element 305 is the same as the number of the fifth conveying pipeline element 204.

[0090] In some embodiments, the third liquid storage element 301 includes but is not limited to a stainless steel barrel; the sixth conveying pipeline element 302 includes but is not limited to a stainless steel pipe; the seventh conveying pipeline element 303 includes but is not limited to a stainless steel pipe; the eighth conveying pipeline element 304 includes but is not limited to a stainless steel pipe; and the ninth conveying pipeline element 305 includes but is not limited to a stainless steel pipe.

[0091] Further, the third liquid storage module 300 further comprises an eighth control valve element 306, a ninth control valve element 307, a tenth control valve element 308 and an eleventh control valve element 309. Among them, the eighth control valve element 306 is arranged on the sixth delivery pipeline element 302, and is used for controlling the flow of the sixth delivery pipeline element 302; the ninth control valve element 307 is arranged on the seventh delivery pipeline element 303, and is used for controlling the flow of the seventh delivery pipeline element 303; the tenth control valve element 308 is arranged on the eighth delivery pipeline element 304, and is used for controlling the flow of the eighth delivery pipeline element 304; and the eleventh control valve element 309 is arranged on the ninth delivery pipeline element 305, and is used for controlling the flow of the ninth delivery pipeline element 305.

[0092] Specifically, the eighth control valve element 306 comprises a twelfth pneumatic diaphragm valve. Among them, the twelfth pneumatic diaphragm valve is arranged on the sixth delivery pipeline element 302, and is used for automatically controlling the flow of the sixth delivery pipeline element 302 and the third liquid storage element 301.

[0093] Specifically, the ninth control valve element 307 comprises a thirteenth pneumatic diaphragm valve, a fourteenth pneumatic diaphragm valve and a fifteenth pneumatic diaphragm valve. Among them, the thirteenth pneumatic diaphragm valve is arranged on the seventh delivery pipeline element 303, and is used for controlling the flow of the seventh delivery pipeline element 303 and the third liquid storage element 301; the fourteenth pneumatic diaphragm valve is arranged on the seventh delivery pipeline element 303 and located downstream of the thirteenth pneumatic diaphragm valve; and the fifteenth pneumatic diaphragm valve is arranged on the seventh delivery pipeline element 303 and located downstream of the fourteenth pneumatic diaphragm valve, and is used for controlling the flow of the seventh delivery pipeline element 303 and the second delivery pipeline element 103.

[0094] Specifically, the tenth control valve element 308 comprises a sixteenth pneumatic diaphragm valve. Among them, the sixteenth pneumatic diaphragm valve is arranged on the eighth delivery pipeline element 304, and is used for automatically controlling the flow of the seventh delivery pipeline element 303 and the eighth delivery pipeline element 304.

[0095] Specifically, the eleventh control valve element 309 comprises a seventeenth pneumatic diaphragm valve. Among them, the seventeenth pneumatic diaphragm valve is arranged on the ninth delivery pipeline element 305, and is used for automatically controlling the flow of the ninth delivery pipeline element 305 and the fifth delivery pipeline element 204.

[0096] It should be noted that the number of the eleventh control valve element 309 is matched with the number of the ninth delivery pipeline element 305; it should be understood that the number of the eleventh control valve element 309 is the same as the number of the ninth delivery pipeline element 305.

[0097] Furthermore, the third liquid storage module 300 also includes a fifth pressure monitoring element 310 and a third weight monitoring element. The fifth pressure monitoring element 310 is connected to the sixth delivery pipeline element 302 and is used to monitor the pressure inside the sixth delivery pipeline element 302; the third weight monitoring element is located at the bottom of the third liquid storage element 301 and is used to monitor the weight of the third liquid storage element 301.

[0098] Specifically, the connection between the fifth pressure monitoring element 310 and the sixth delivery pipeline element 302 is located upstream of the twelfth pneumatic diaphragm valve.

[0099] In some embodiments, the fifth pressure monitoring element 310 includes, but is not limited to, a pressure sensor; the third weight monitoring element includes, but is not limited to, a scale.

[0100] like Figure 2 As shown, the fourth liquid storage module 400 includes a fourth liquid storage element 401 and a tenth delivery pipeline element 402. The fourth liquid storage element 401 is connected to the first liquid storage module 100 and the second liquid storage module 200 via pipelines, and is used to store waste liquid. The tenth delivery pipeline element 402 is connected to the fourth liquid storage element 401, the first liquid storage module 100, the second liquid storage module 200, and the first purge gas supply module 700, and is used to deliver liquid.

[0101] Specifically, the first end of the tenth delivery pipeline element 402 has two branch pipelines, which are respectively connected to the second delivery pipeline element 103, the fifth delivery pipeline element 204, and the first purge gas supply module 700. The connection between one branch pipeline and the second delivery pipeline element 103 is located between the second pressure monitoring element 109 and the third pneumatic diaphragm valve, and the connection between the other branch pipeline and the fifth delivery pipeline element 204 is located between the fourth pressure monitoring element 211 and the ninth pneumatic diaphragm valve.

[0102] It should be noted that the second end of the tenth delivery pipeline element 402 extends into the interior of the fourth liquid storage element 401 and extends to the position near the top wall inside the fourth liquid storage element 401.

[0103] In some embodiments, the fourth liquid storage element 401 includes, but is not limited to, a stainless steel tank; the tenth delivery pipeline element 402 includes, but is not limited to, a stainless steel pipe.

[0104] Furthermore, the fourth liquid storage module 400 also includes a twelfth control valve element 403. The twelfth control valve element 403 is disposed on the tenth delivery pipeline element 402 and is used to control the flow of the tenth delivery pipeline element 402.

[0105] Specifically, the tenth control valve element 308 includes an eighteenth pneumatic diaphragm valve, a nineteenth pneumatic diaphragm valve, a twentieth pneumatic diaphragm valve, and a twenty-first pneumatic diaphragm valve. The eighteenth pneumatic diaphragm valve is located in the tenth delivery pipeline element 402 and is used to automatically control the flow between the tenth delivery pipeline element 402 and the second delivery pipeline element 103; the nineteenth pneumatic diaphragm valve is located in the tenth delivery pipeline element 402 and is used to automatically control the flow between the tenth delivery pipeline element 402 and the fifth delivery pipeline element 204; the twentieth pneumatic diaphragm valve is located in the tenth delivery pipeline element 402; and the twenty-first pneumatic diaphragm valve is located in the tenth delivery pipeline element 402 and downstream of it, used to automatically control the flow between the tenth delivery pipeline element 402 and the fourth liquid storage element 401.

[0106] Furthermore, the fourth liquid storage module 400 also includes a sixth pressure monitoring element 404 and a fourth weight monitoring element. The sixth pressure monitoring element 404 is connected to the tenth delivery pipeline element 402 and is used to monitor the pressure inside the tenth delivery pipeline element 402; the fourth weight monitoring element is located at the bottom of the fourth liquid storage element 401 and is used to monitor the weight of the fourth liquid storage element 401.

[0107] Specifically, the connection between the sixth pressure monitoring element 404 and the tenth delivery pipeline element 402 is located between the eighteenth pneumatic diaphragm valve and the nineteenth pneumatic diaphragm valve.

[0108] In some of these embodiments, the sixth pressure monitoring element 404 includes, but is not limited to, a pressure sensor; the fourth weight monitoring element includes, but is not limited to, a scale.

[0109] like Figure 3 As shown, the first power gas supply module 500 includes a first power gas supply element 501. The first power gas supply element 501 is connected to the first power gas source and the first liquid storage module 100 through pipelines, and is used to supply the first power gas to the first liquid storage module 100 so that the liquid source of the first liquid storage module 100 flows to the second liquid storage module 200.

[0110] Specifically, the first end of the first power gas supply element 501 is connected to the first power gas source, and the second end of the first power gas supply element 501 is connected to the first end of the first delivery pipeline element 102.

[0111] In some of these embodiments, the first power gas supply element 501 includes, but is not limited to, a stainless steel tube.

[0112] Furthermore, the first power gas supply module 500 also includes a thirteenth control valve element 501. The thirteenth control valve element 501 is disposed on the first power gas supply element 501 and is used to control the flow of gas through the first power gas supply element 501.

[0113] Specifically, the thirteenth control valve element 501 includes a fourth manual diaphragm valve, a first check valve, a fifth manual diaphragm valve, and a twenty-second pneumatic diaphragm valve. The fourth manual diaphragm valve is located in the first power gas supply element 501 and is used to control the flow between the first power gas supply element 501 and the first power gas source. The first check valve is located in the first power gas supply element 501 and downstream of the fourth manual diaphragm valve, allowing unidirectional flow of gas within the first power gas supply element 501. The fifth manual diaphragm valve is located in the first power gas supply element 501 and downstream of the fourth manual diaphragm valve. The twenty-second pneumatic diaphragm valve is located in the first power gas supply element 501 and downstream of the fifth manual diaphragm valve, and is used to automatically control the flow between the first power gas supply element 501 and the first delivery pipeline element 102.

[0114] Furthermore, the first power gas supply module 500 also includes a first pressure regulating element 503 and a seventh pressure monitoring element 504. The first pressure regulating element 503 is disposed on the first power gas supply element 501 and is used to regulate the internal pressure of the first power gas supply element 501; the seventh pressure monitoring element 504 is disposed on the first power gas supply element 501 and is used to monitor the internal pressure of the first power gas supply element 501.

[0115] Specifically, the first pressure regulating element 503 is located downstream of the first check valve and upstream of the fifth manual diaphragm valve; the connection between the seventh pressure monitoring element 504 and the first power gas supply element 501 is located downstream of the first pressure regulating element 503 and upstream of the fifth manual diaphragm valve.

[0116] In some of these embodiments, the first pressure regulating element 503 includes, but is not limited to, a pressure regulating valve; and the seventh pressure monitoring element 504 includes, but is not limited to, a pressure sensor.

[0117] like Figure 3 As shown, the second power gas supply module 600 includes a second power gas supply element 601. The second power gas supply element 601 is connected to the second power gas source and the second liquid storage module 200 via pipelines, and is used to supply the second power gas to the second liquid storage module 200 so that the liquid source in the second liquid storage module 200 flows to the process equipment.

[0118] Specifically, the first end of the second power gas supply element 601 is connected to the second power gas source, and the second end of the second power gas supply element 601 is connected to the fourth delivery pipeline element 203.

[0119] In some of these embodiments, the second power gas supply element 601 includes, but is not limited to, a stainless steel tube.

[0120] Further, the second power gas supply module 600 further comprises a fourteenth control valve element 601. The fourteenth control valve element 601 is arranged in the second power gas supply element 601, and is configured to control the flow of the second power gas supply element 601.

[0121] Specifically, the fourteenth control valve element 601 comprises a sixth manual diaphragm valve, a second one-way valve, a seventh manual diaphragm valve, and a twenty-third pneumatic diaphragm valve. The sixth manual diaphragm valve is arranged in the second power gas supply element 601, and is configured to manually control the flow of the second power gas supply element 601 and the second power gas source. The second one-way valve is arranged in the second power gas supply element 601, and is located downstream of the sixth manual diaphragm valve, and is configured to allow the gas in the second power gas supply element 601 to flow in one direction. The seventh manual diaphragm valve is arranged in the second power gas supply element 601, and is located downstream of the second one-way valve. The twenty-third pneumatic diaphragm valve is arranged in the second power gas supply element 601, and is located downstream of the seventh manual diaphragm valve, and is configured to automatically control the flow of the second power gas supply element 601 and the fourth delivery pipeline element 203.

[0122] Further, the second power gas supply module 600 further comprises a second pressure regulating element 603 and an eighth pressure monitoring element 604. The second pressure regulating element 603 is arranged in the second power gas supply element 601, and is configured to regulate the pressure of the second power gas supply element 601. The eighth pressure monitoring element 604 is arranged in the second power gas supply element 601, and is configured to monitor the pressure of the second power gas supply element 601.

[0123] Specifically, the second pressure regulating element 603 is located downstream of the second one-way valve and upstream of the seventh manual diaphragm valve. The eighth pressure monitoring element 604 is arranged in the second power gas supply element 601, and is located downstream of the second pressure regulating element 603 and upstream of the seventh manual diaphragm valve.

[0124] In some embodiments, the second pressure regulating element 603 comprises, but is not limited to, a pressure regulating valve. The eighth pressure monitoring element 604 comprises, but is not limited to, a pressure sensor.

[0125] As shown in FIG. 6, the second power gas supply module 600 comprises a second power gas supply element 601, a second pressure regulating element 603, and an eighth pressure monitoring element 604. Figure 3As shown, the first purge gas supply module 700 includes a first purge pipeline element 701, a second purge pipeline element 702, a third purge pipeline element 703, a fourth purge pipeline element 704, a fifth purge pipeline element 705, and a sixth purge pipeline element 706. The first purge pipeline element 701 is connected with the first purge gas source for conveying the first purge gas; the second purge pipeline element 702 is respectively connected with the first purge pipeline element 701 and the first liquid storage module 100 for conveying the first purge gas to the first liquid storage module 100 to press the liquid source in the pipeline into the first liquid storage module 100; the third purge pipeline element 703 is respectively connected with the first purge pipeline element 701 and the second liquid storage element 201 of the second liquid storage module 200 for conveying the first purge gas to the second liquid storage element 201 to press the liquid source in the pipeline into the second liquid storage element 201; the fourth purge pipeline element 704 is respectively connected with the first purge pipeline element 701 and the third liquid storage module 300 for conveying the first purge gas to the third liquid storage module 300 to press the dissolved liquid in the pipeline into the third liquid storage module 300; the fifth purge pipeline element 705 is respectively connected with the first purge pipeline element 701 and the fourth liquid storage module 400 for conveying the first purge gas to the fourth liquid storage module 400 to press the waste liquid in the pipeline into the fourth liquid storage module 400; the sixth purge pipeline element 706 is respectively connected with the first purge pipeline element 701 and the eighth conveying pipeline element 304 of the third liquid storage module 300 for conveying the first purge gas to the eighth conveying pipeline element 304 to discharge the liquid in the eighth conveying pipeline element 304.

[0126] Specifically, the first end of the first purge pipeline element 701 is in communication with the first purge gas source; the first end of the second purge pipeline element 702 is in communication with the second end of the first purge pipeline element 701, and the second end of the second purge pipeline element 702 is in communication with the first end of the first conveying pipeline element 102 and the second conveying pipeline element 103 respectively, the communication position of the second purge pipeline element 702 and the second conveying pipeline element 103 is between the second pressure monitoring element 109 and the third pneumatic diaphragm valve; the first end of the third purge pipeline element 703 is in communication with the second end of the first purge pipeline element 701, and the second end of the third purge pipeline element 703 is in communication with the second end of the fourth conveying pipeline element 203 and the fifth conveying pipeline element 204 respectively, the communication position of the third purge pipeline element 703 and the fifth conveying pipeline element 204 is between the fourth pressure monitoring element 211 and the ninth pneumatic diaphragm valve; the first end of the fourth purge pipeline element 704 is in communication with the second end of the first purge pipeline element 701, and the second end of the fourth purge pipeline element 704 is in communication with the first end of the sixth conveying pipeline element 302 and the seventh conveying pipeline element 303 respectively, the communication position of the fourth purge pipeline element 704 and the seventh conveying pipeline element 303 is between the thirteenth pneumatic diaphragm valve and the fourteenth pneumatic diaphragm valve; the first end of the fifth purge pipeline element 705 is in communication with the second end of the first purge pipeline element 701, the second end of the fifth purge pipeline element 705 is in communication with the tenth conveying pipeline element 402, and the communication position is between the sixth pressure monitoring element 404 and the nineteenth pneumatic diaphragm valve; the first end of the sixth purge pipeline element 706 is in communication with the second end of the first purge pipeline element 701, and the second end of the sixth purge pipeline element 706 is in communication with the ninth conveying pipeline element 305.

[0127] In some embodiments, the first purge pipeline element 701 includes but is not limited to a stainless steel pipe; the second purge pipeline element 702 includes but is not limited to a stainless steel pipe; the third purge pipeline element 703 includes but is not limited to a stainless steel pipe; the fourth purge pipeline element 704 includes but is not limited to a stainless steel pipe; the fifth purge pipeline element 705 includes but is not limited to a stainless steel pipe; the sixth purge pipeline element 706 includes but is not limited to a stainless steel pipe.

[0128] Further, the first purge gas supply module 700 further comprises a fifteenth control valve element 707, a sixteenth control valve element 708, a seventeenth control valve element 709, an eighteenth control valve element 710 and a nineteenth control valve element 711. Among them, the fifteenth control valve element 707 is arranged on the first purge pipeline element 701, and is used to control the flow of the first purge pipeline element 701; the sixteenth control valve element 708 is arranged on the third purge pipeline element 703, and is used to control the flow of the third purge pipeline element 703; the seventeenth control valve element 709 is arranged on the fourth purge pipeline element 704, and is used to control the flow of the fourth purge pipeline element 704; the eighteenth control valve element 710 is arranged on the fifth purge pipeline element 705, and is used to control the flow of the fifth purge pipeline element 705; the nineteenth control valve element 711 is arranged on the fifth purge pipeline element 705, and is used to control the flow of the fifth purge pipeline element 705.

[0129] Specifically, the fifteenth control valve element 707 comprises a twenty-fourth pneumatic diaphragm valve and a third one-way valve. Among them, the twenty-fourth pneumatic diaphragm valve is arranged on the first purge pipeline element 701, and is used to automatically control the flow of the first purge gas source and the first purge pipeline element 701; the third one-way valve is arranged on the first purge pipeline element 701 and located downstream of the twenty-fourth pneumatic diaphragm valve, and is used to make the gas in the first purge pipeline element 701 flow in one direction.

[0130] Specifically, the sixteenth control valve element 708 comprises a twenty-fifth pneumatic diaphragm valve, a twenty-sixth pneumatic diaphragm valve and a twenty-seventh pneumatic diaphragm valve. Among them, the twenty-fifth pneumatic diaphragm valve is arranged on the second purge pipeline element 702; the twenty-sixth pneumatic diaphragm valve is arranged on the second purge pipeline element 702 and located downstream of the twenty-fifth pneumatic diaphragm valve, and is used to automatically control the flow of the second purge pipeline element and the first conveying pipeline element 102; the twenty-seventh pneumatic diaphragm valve is arranged on the second purge pipeline element 702 and located downstream of the twenty-fifth pneumatic diaphragm valve, and is used to automatically control the flow of the second purge pipeline element 702 and the second conveying pipeline element 103.

[0131] Specifically, the seventeenth control valve element 709 comprises a twenty-eighth pneumatic diaphragm valve, a twenty-ninth pneumatic diaphragm valve and a thirtieth pneumatic diaphragm valve. Among them, the twenty-eighth pneumatic diaphragm valve is arranged on the third purge pipeline element 703; the twenty-ninth pneumatic diaphragm valve is arranged on the third purge pipeline element 703 and located downstream of the twenty-eighth pneumatic diaphragm valve, and is used to automatically control the flow of the third purge pipeline element 703 and the fourth conveying pipeline element 203; the thirtieth pneumatic diaphragm valve is arranged on the third purge pipeline element 703 and located downstream of the twenty-eighth pneumatic diaphragm valve, and is used to automatically control the flow of the third purge pipeline element 703 and the fifth conveying pipeline element 204.

[0132] Specifically, the eighteenth control valve element 710 includes a thirty-first pneumatic diaphragm valve, a thirty-second pneumatic diaphragm valve, and a thirty-third pneumatic diaphragm valve. Among them, the thirty-first pneumatic diaphragm valve is arranged on the fourth purge pipeline element 704; the thirty-second pneumatic diaphragm valve is arranged on the fourth purge pipeline element 704 and is located downstream of the thirty-first pneumatic diaphragm valve, and is used to control the flow communication between the fourth purge pipeline element 704 and the sixth delivery pipeline element 302; and the thirty-third pneumatic diaphragm valve is arranged on the fourth purge pipeline element 704 and is located downstream of the thirty-first pneumatic diaphragm valve, and is used to automatically control the flow communication between the fourth purge pipeline element 704 and the seventh delivery pipeline element 303.

[0133] In some embodiments, the eighteenth control valve element 710 includes, but is not limited to, a diaphragm valve.

[0134] Specifically, the nineteenth control valve element 711 includes a thirty-fourth pneumatic diaphragm valve and a thirty-fifth pneumatic diaphragm valve. Among them, the thirty-fourth pneumatic diaphragm valve is arranged on the fifth purge pipeline element 705. The thirty-fifth pneumatic diaphragm valve is arranged on the fifth purge pipeline element 705 and is located downstream of the thirty-fourth pneumatic diaphragm valve, and is used to automatically control the flow communication between the fifth purge pipeline element 705 and the tenth delivery pipeline element 402.

[0135] In addition, in order to make the gas in the sixth purge pipeline element 706 flow in one direction, a one-way valve is arranged on the sixth purge pipeline element 706.

[0136] Further, the first purge gas supply module 700 further includes a micro-leakage adjusting element 712, a third pressure regulating element 713, and a ninth pressure monitoring element 714. Among them, the micro-leakage adjusting element 712 is arranged on the first purge pipeline element 701 and is used to micro-leak the first purge gas; the third pressure regulating element 713 is arranged on the first purge pipeline element 701 and is used to regulate the pressure of the first purge pipeline element 701; and the ninth pressure monitoring element 714 is in communication with the first purge pipeline element 701 and is used to monitor the pressure of the first purge pipeline element 701.

[0137] Specifically, the micro-leakage adjusting element 712 is located between the twenty-fourth pneumatic diaphragm valve and the third one-way valve; the third pressure regulating element 713 is located downstream of the third one-way valve; and the ninth pressure monitoring element 714 is located downstream of the third pressure regulating element 713 at the communication position of the first purge pipeline element 701.

[0138] In some embodiments, the micro-leakage adjusting element 712 includes, but is not limited to, a pneumatic micro-leakage valve; the third pressure regulating element 713 includes, but is not limited to, a pressure regulating valve; and the ninth pressure monitoring element 714 includes, but is not limited to, a pressure sensor.

[0139] As Figure 3As shown, the second purge gas supply module 800 comprises a seventh purge pipeline element 801. The seventh purge pipeline element 801 is in communication with the second purge gas source and the third liquid storage module 300 respectively, for conveying the second purge gas to the third liquid storage module 300 to press the dissolving solution into the pipeline, the first liquid storage module 100 and the second liquid storage module 200, so that the dissolving solution cleans the pipeline, the first liquid storage module 100 and the second liquid storage module 200.

[0140] Specifically, the first end of the seventh purge pipeline element 801 is in communication with the second purge gas source, and the second end of the seventh purge pipeline element 801 is in communication with the first end of the sixth conveying pipeline element 302.

[0141] In some embodiments, the seventh purge pipeline element 801 comprises, but is not limited to, a stainless steel pipe.

[0142] Further, the second purge gas supply module 800 further comprises a twentieth control valve element 802. The twentieth control valve element 802 is arranged in the seventh purge pipeline element 801, for controlling the flow of the seventh purge pipeline element 801.

[0143] Specifically, the twentieth control valve element 802 comprises an eighth manual diaphragm valve, a fourth one-way valve and a thirty-sixth pneumatic diaphragm valve. The eighth manual diaphragm valve is arranged in the seventh purge pipeline element 801, for manually controlling the flow of the seventh purge pipeline element 801 and the second purge gas source; the fourth one-way valve is arranged in the seventh purge pipeline element 801 and located downstream of the eighth manual diaphragm valve, for allowing the gas in the seventh purge pipeline element 801 to flow in one direction; the thirty-sixth pneumatic diaphragm valve is arranged in the seventh purge pipeline element 801 and located downstream of the fourth one-way valve, for automatically controlling the flow of the seventh purge pipeline element 801 and the sixth conveying pipeline element 302.

[0144] Further, the second purge gas supply module 800 further comprises a fourth pressure regulating element 803 and a tenth pressure monitoring element 804. The fourth pressure regulating element 803 is arranged in the seventh purge pipeline element 801, for regulating the pressure inside the seventh purge pipeline element 801; the tenth pressure monitoring element 804 is in communication with the seventh purge pipeline element 801, for monitoring the pressure inside the seventh purge pipeline element 801.

[0145] Specifically, the fourth pressure regulating element 803 is located between the fourth one-way valve and the thirty-sixth pneumatic diaphragm valve; the communication position of the tenth pressure monitoring element 804 with the seventh purge pipeline element 801 is located between the fourth pressure regulating element 803 and the thirty-sixth pneumatic diaphragm valve.

[0146] In some embodiments, the fourth pressure regulating element 803 includes, but is not limited to, a pressure regulating valve; the tenth pressure monitoring element 804 includes, but is not limited to, a pressure sensor.

[0147] like Figure 4 As shown, the first vacuum module 900 includes a first exhaust pipe element 901, a first vacuum pipe element 902, a second vacuum pipe element 903, a third vacuum pipe element 904, and a fourth vacuum pipe element 905. The first exhaust pipe element 901 is connected to the waste gas treatment equipment and is used to transport waste gas; the first vacuum pipe element 902 is connected to the first liquid storage module 100, the first exhaust pipe element 901, and the vacuum generator respectively, and is used to perform vacuum treatment on the first liquid storage module 100; the second vacuum pipe element 903 is connected to the second liquid storage module 200, the first exhaust pipe element 901, and the first vacuum pipe element 902 respectively, and is used to perform vacuum treatment on the second liquid storage module 200; the third vacuum pipe element 904 is connected to the third liquid storage module 300, the first exhaust pipe element 901, and the first vacuum pipe element 902 respectively, and is used to perform vacuum treatment on the third liquid storage module 300; the fourth vacuum pipe element 905 is connected to the fourth liquid storage module 400, the first exhaust pipe element 901, and the first vacuum pipe element 902 respectively, and is used to perform vacuum treatment on the fourth liquid storage module 400.

[0148] Specifically, the first end of the first exhaust pipe element 901 is connected to the vacuum generating device; the first end of the first vacuum pipe element 902 is connected to the second end of the first exhaust pipe element 901, and the second end of the first vacuum pipe element 902 is connected to the second purge pipe element 702, with the connection point located between the twenty-sixth pneumatic diaphragm valve and the twenty-seventh pneumatic diaphragm valve; the first end of the second vacuum pipe element 903 is connected to the second end of the first exhaust pipe element 901, and the second end of the second vacuum pipe element 903 is connected to the third purge pipe element 703, with the connection point located between the second and third purge pipe elements 702. Located between the 29th and 30th pneumatic diaphragm valves; the first end of the third vacuum line element 904 is connected to the first exhaust line element 901, and the second end of the third vacuum line element 904 is connected to the fourth purge line element 704, with the connection point located between the 32nd and 33rd pneumatic diaphragm valves; the first end of the fourth vacuum line element 905 is connected to the first exhaust line element 901, and the second end of the fourth vacuum line element 905 is connected to the fifth purge line element 705, with the connection point located upstream of the 35th pneumatic diaphragm valve.

[0149] In some embodiments, the first exhaust pipeline element 901 includes, but is not limited to, a stainless steel pipe; the first vacuum pipeline element 902 includes, but is not limited to, a stainless steel pipe; the second vacuum pipeline element 903 includes, but is not limited to, a stainless steel pipe; the third vacuum pipeline element 904 includes, but is not limited to, a stainless steel pipe; and the fourth vacuum pipeline element 905 includes, but is not limited to, a stainless steel pipe.

[0150] Further, the first vacuum module 900 further includes a twenty-first control valve element 906, a twenty-second control valve element 907, a twenty-third control valve element 908, a twenty-fourth control valve element 909, and a twenty-fifth control valve element 910. Among them, the twenty-first control valve element 906 is arranged on the first exhaust pipeline element 901, and is used to control the flow of the first exhaust pipeline element 901; the twenty-second control valve element 907 is arranged on the first vacuum pipeline element 902, and is used to control the flow of the first vacuum pipeline element 902; the twenty-third control valve element 908 is arranged on the second vacuum pipeline element 903, and is used to control the flow of the second vacuum pipeline element 903; the twenty-fourth control valve element 909 is arranged on the third vacuum pipeline element 904, and is used to control the flow of the third vacuum pipeline element 904; and the twenty-fifth control valve element 910 is arranged on the fourth vacuum pipeline element 905, and is used to control the flow of the fourth vacuum pipeline element 905.

[0151] Specifically, the twenty-first control valve element 906 includes a thirty-seventh pneumatic diaphragm valve. Among them, the thirty-seventh pneumatic diaphragm valve is arranged on the first exhaust pipeline element 901, and is used to automatically control the flow of the first exhaust pipeline element 901 and the exhaust treatment device.

[0152] Specifically, the twenty-second control valve element 907 includes a thirty-eighth pneumatic diaphragm valve. Among them, the thirty-eighth pneumatic diaphragm valve is arranged on the first vacuum pipeline element 902, and is used to automatically control the flow of the first exhaust pipeline element 901 and the first vacuum pipeline element 902.

[0153] Specifically, the twenty-third control valve element 908 includes a thirty-ninth pneumatic diaphragm valve. Among them, the thirty-ninth pneumatic diaphragm valve is arranged on the second vacuum pipeline element 903, and is used to automatically control the flow of the first exhaust pipeline element 901 and the second vacuum pipeline element 903.

[0154] Specifically, the twenty-fourth control valve element 909 includes a fortieth pneumatic diaphragm valve. Among them, the fortieth pneumatic diaphragm valve is arranged on the third vacuum pipeline element 904, and is used to automatically control the flow of the first exhaust pipeline element 901 and the third vacuum pipeline element 904.

[0155] Specifically, the twenty-fifth control valve element 910 comprises a forty-first pneumatic diaphragm valve. The forty-first pneumatic diaphragm valve is arranged in the fourth vacuum pipeline element 905, and is configured to automatically control the flow of the first exhaust pipeline element 901 and the fourth vacuum pipeline element 905.

[0156] Further, the first vacuum module 900 further comprises an eleventh pressure monitoring element 911. The eleventh pressure monitoring element 911 is in communication with the first exhaust pipeline element 901, and is configured to monitor the pressure of the first exhaust pipeline element 901.

[0157] Specifically, the communication position of the eleventh pressure monitoring element 911 with the first exhaust pipeline element 901 is downstream of the thirty-sixth pneumatic diaphragm valve.

[0158] In some embodiments, the eleventh pressure monitoring element 911 comprises, but is not limited to, a pressure sensor.

[0159] The use method of the present embodiment is as follows:

[0160] (I) Transporting liquid source

[0161] The fourth manual diaphragm valve is manually opened, so that the first power gas of the first power gas source flows to the first power gas supply element 501;

[0162] The system opens the first pressure regulating element 503 to regulate the pressure of the first power gas in the first power gas supply element 501, so that the pressure in the first power gas supply element 501 meets the standard;

[0163] When the pressure detected by the seventh pressure monitoring element 504 meets the standard, the fifth manual diaphragm valve is manually opened and the twenty-second pneumatic diaphragm valve is automatically opened by the system, so that the first power gas supply element 501 and the first transport pipeline element 102 are in flow communication;

[0164] The system opens the first pneumatic diaphragm valve, so that the first transport pipeline element 102 and the first liquid storage element 101 are in communication, so that the first power gas enters the first liquid storage element 101;

[0165] The system opens the second pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve and the fifth pneumatic diaphragm valve, and the first manual diaphragm valve is manually opened, so that the second transport pipeline element 103 and the first liquid storage element 101, the second liquid storage element 201 are in communication, so that the liquid source in the first liquid storage element 101 enters the second liquid storage element 201 through the second transport pipeline element 103 under the action of the first power gas, and then the liquid source can be buffered;

[0166] The sixth manual diaphragm valve is manually opened, so that the second power gas of the second power gas source flows to the second power gas supply element 601;

[0167] The system opens the second pressure regulating element 603 to regulate the pressure of the second power gas in the second power gas supply element 601, so that the pressure in the second power gas supply element 601 meets the standard;

[0168] When the pressure monitored by the eighth pressure monitoring element 604 meets the standard, the seventh manual diaphragm valve is manually opened and the twenty-third pneumatic diaphragm valve is automatically opened by the system, so that the second power gas supply element 601 is in communication with the fourth delivery pipeline element 203;

[0169] The system opens the seventh pneumatic diaphragm valve, so that the third delivery pipeline element 202 is in communication with the second liquid storage element 201, so that the second power gas enters the second liquid storage element 201;

[0170] The second manual diaphragm valve and the third manual diaphragm valve are manually opened, and the eighth pneumatic diaphragm valve, the ninth pneumatic diaphragm valve and the tenth pneumatic diaphragm valve are automatically opened by the system, so that the liquid source in the second liquid storage element 201 enters the process equipment through the fourth delivery pipeline element 203 and the fifth delivery pipeline element 204.

[0171] (2) Cleaning the first liquid storage module 100

[0172] The twenty-fourth pneumatic diaphragm valve is automatically opened by the system, so that the first purge gas of the first purge gas source enters the first purge pipeline element 701;

[0173] The system opens the micro-leakage adjusting element 712 to adjust the flow rate of the first purge gas of the first purge gas source entering the first purge pipeline element 701;

[0174] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the pressure in the first purge pipeline element 701 meets the standard;

[0175] When the pressure detected by the ninth pressure monitoring element 714 meets the standard, the twenty-fifth pneumatic diaphragm valve and the twenty-seventh pneumatic diaphragm valve are opened by the system, so that the first purge gas can enter the first liquid storage element 101 through the second purge pipeline element 702 and the second delivery pipeline element 103, and then the liquid source in the second delivery pipeline element 103 can be pressed into the first liquid storage element 101;

[0176] The eighth manual diaphragm valve is manually opened, so that the second purge gas of the second purge gas source enters the seventh purge pipeline element 801;

[0177] The system opens the fourth pressure regulating element 803 to regulate the pressure of the second purge gas in the seventh purge pipeline element 801, so that the pressure in the seventh purge pipeline element 801 meets the standard;

[0178] The system opens the thirty-sixth pneumatic diaphragm valve and the twelfth pneumatic diaphragm valve, so that the second purge gas can enter the third liquid storage element 301 through the seventh purge pipeline element 801 and the sixth delivery pipeline element 302;

[0179] The system opens the thirteenth pneumatic diaphragm valve, the fourteenth pneumatic diaphragm valve, and the fifteenth pneumatic diaphragm valve, so that the dissolved liquid in the third liquid storage element 301 can flow to the first liquid storage element 101 through the seventh delivery pipeline element 303, the second purge pipeline element 702, and the second delivery pipeline element 103, thereby allowing the dissolved liquid to dissolve the residual liquid source in the first liquid storage element 101;

[0180] After sufficient dissolution, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas of the first purge gas source to enter the first purge pipeline element 701;

[0181] The system opens the micro-leakage adjusting element 712 to adjust the flow rate of the first purge gas of the first purge gas source entering the first purge pipeline element 701;

[0182] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the pressure in the first purge pipeline element 701 meets the standard;

[0183] When the pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve, the twenty-sixth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the eighteenth pneumatic diaphragm valve, the twentieth pneumatic diaphragm valve, and the twenty-first pneumatic diaphragm valve, so that the first purge gas can press the waste liquid in the first liquid storage element 101 into the fourth liquid storage element 401;

[0184] When the waste liquid inside the first liquid storage element 101 is emptied, the system opens the sixth pneumatic diaphragm valve, the twenty-sixth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the thirty-seventh pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve to discharge the gas in the pipeline;

[0185] When the exhaust operation is completed, the system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas of the first purge gas source to enter the first purge pipeline element 701;

[0186] The system opens the micro-leakage adjusting element 712 to adjust the flow rate of the first purge gas of the first purge gas source entering the first purge pipeline element 701;

[0187] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the gas pressure in the first purge pipeline element 701 meets the standard;

[0188] When the gas pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve, the twenty-sixth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, and the sixth pneumatic diaphragm valve, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0189] After the purge is completed, the system opens the sixth pneumatic diaphragm valve, the twenty-sixth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the thirty-seventh pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve to discharge the gas in the pipeline.

[0190] (Three) Clean the second liquid storage element 201 of the second liquid storage module 200

[0191] The system automatically opens the twenty-fourth pneumatic diaphragm valve to allow the first purge gas of the first purge gas source to enter the first purge pipeline element 701;

[0192] The system opens the micro-leakage adjusting element 712 to adjust the flow of the first purge gas of the first purge gas source entering the first purge pipeline element 701;

[0193] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the gas pressure in the first purge pipeline element 701 meets the standard;

[0194] When the gas pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the twenty-ninth pneumatic diaphragm valve and the thirtieth pneumatic diaphragm valve, so that the first purge gas can enter the second liquid storage element 201 through the third purge pipeline element 703 and the fourth delivery pipeline element 203, and then the dissolved liquid in the fourth delivery pipeline element 203 can be pressed into the second liquid storage element 201;

[0195] The eighth manual diaphragm valve is manually opened, so that the second purge gas of the second purge gas source enters the seventh purge pipeline element 801;

[0196] The system opens the fourth pressure regulating element 803 to regulate the pressure of the second purge gas in the seventh purge pipeline element 801, so that the gas pressure in the seventh purge pipeline element 801 meets the standard;

[0197] The system opens the thirty-sixth pneumatic diaphragm valve and the twelfth pneumatic diaphragm valve, so that the second purge gas can enter the third liquid storage element 301 through the seventh purge pipeline element 801 and the sixth delivery pipeline element 302;

[0198] The system opens the thirteenth pneumatic diaphragm valve, the fourteenth pneumatic diaphragm valve, the fifteenth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, and the eleventh pneumatic diaphragm valve, so that the dissolved liquid in the third liquid storage element 301 can flow to the second liquid storage element 201 through the seventh delivery pipeline element 303, the second purge pipeline element 702, the second delivery pipeline element 103, the second bypass pipeline element 208, and the fourth delivery pipeline element 203, thereby causing the dissolved liquid to dissolve the residual liquid source in the second liquid storage element 201;

[0199] After sufficient dissolution, the system automatically opens the twenty-fourth pneumatic diaphragm valve, causing the first purge gas of the first purge gas source to enter the first purge pipeline element 701;

[0200] The system opens the micro-leakage adjusting element 712 to adjust the flow rate of the first purge gas of the first purge gas source entering the first purge pipeline element 701;

[0201] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, thereby causing the gas pressure in the first purge pipeline element 701 to meet the standard;

[0202] When the gas pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the eleventh pneumatic diaphragm valve, the nineteenth pneumatic diaphragm valve, the twentieth pneumatic diaphragm valve, and the twenty-first pneumatic diaphragm valve, thereby causing the first purge gas to press the waste liquid in the second liquid storage element 201 into the fourth liquid storage element 401;

[0203] When the waste liquid inside the second liquid storage element 201 is emptied, the system opens the seventh pneumatic diaphragm valve, the eleventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the thirty-seventh pneumatic diaphragm valve, the thirty-eighth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the twenty-eighth pneumatic diaphragm valve, the twenty-ninth pneumatic diaphragm valve, and the thirtieth pneumatic diaphragm valve, thereby discharging the gas in the pipeline;

[0204] When the exhaust operation is completed, the system automatically opens the twenty-fourth pneumatic diaphragm valve, causing the first purge gas of the first purge gas source to enter the first purge pipeline element 701;

[0205] The system opens the micro-leakage adjusting element 712 to adjust the flow rate of the first purge gas of the first purge gas source entering the first purge pipeline element 701;

[0206] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, thereby causing the gas pressure in the first purge pipeline element 701 to meet the standard;

[0207] When the air pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the twenty-fifth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the twenty-eighth pneumatic diaphragm valve, the twenty-ninth pneumatic diaphragm valve, and the thirtieth pneumatic diaphragm valve, so that the pipeline is filled with the first purge gas and the pressure is maintained for a period of time;

[0208] After the purge is completed, the system opens the seventh pneumatic diaphragm valve, the eleventh pneumatic diaphragm valve, the third pneumatic diaphragm valve, the fourth pneumatic diaphragm valve, the twenty-seventh pneumatic diaphragm valve, the thirty-seventh pneumatic diaphragm valve, the thirty-eighth pneumatic diaphragm valve, the sixth pneumatic diaphragm valve, the twenty-eighth pneumatic diaphragm valve, the twenty-ninth pneumatic diaphragm valve, and the thirtieth pneumatic diaphragm valve, so as to discharge the gas in the pipeline.

[0209] (Four) cleaning the fifth delivery pipeline element 204 of the second liquid storage module 200

[0210] The system automatically opens the twenty-fourth pneumatic diaphragm valve, so that the first purge gas of the first purge gas source enters the first purge pipeline element 701;

[0211] The system opens the micro-leakage adjusting element 712 to adjust the flow of the first purge gas of the first purge gas source into the first purge pipeline element 701;

[0212] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the air pressure in the first purge pipeline element 701 meets the standard;

[0213] When the air pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the seventeenth pneumatic diaphragm valve and manually opens the third manual diaphragm valve, so as to discharge the liquid source in the fifth delivery pipeline element 204;

[0214] After the liquid source is completely discharged, the eighth manual diaphragm valve is manually opened, so that the second purge gas of the second purge gas source enters the seventh purge pipeline element 801;

[0215] The system opens the fourth pressure regulating element 803 to regulate the pressure of the second purge gas in the seventh purge pipeline element 801, so that the air pressure in the seventh purge pipeline element 801 meets the standard;

[0216] The system opens the thirty-sixth pneumatic diaphragm valve and the twelfth pneumatic diaphragm valve, so that the second purge gas can enter the third liquid storage element 301 through the seventh purge pipeline element 801 and the sixth delivery pipeline element 302;

[0217] The system opens the thirteenth pneumatic diaphragm valve, the fourteenth pneumatic diaphragm valve, the sixteenth pneumatic diaphragm valve and the seventeenth pneumatic diaphragm valve, so that the dissolved liquid in the third liquid storage element 301 can flow to the fifth delivery pipeline element 204 through the seventh delivery pipeline element 303, the eighth delivery pipeline element 304 and the ninth delivery pipeline element 305, thereby making the dissolved liquid dissolve the residual liquid source in the fifth delivery pipeline element 204;

[0218] After sufficient dissolution, the system automatically opens the twenty-fourth pneumatic diaphragm valve, so that the first purge gas of the first purge gas source enters the first purge pipeline element 701;

[0219] The system opens the micro-leakage adjusting element 712 to adjust the flow of the first purge gas of the first purge gas source into the first purge pipeline element 701;

[0220] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the gas pressure in the first purge pipeline element 701 meets the standard;

[0221] When the gas pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the seventeenth pneumatic diaphragm valve and manually opens the third manual diaphragm valve, thereby discharging the waste liquid in the fifth delivery pipeline element 204;

[0222] After the waste liquid is completely discharged, the gas in the discharge pipeline is discharged.

[0223] (five) cleaning the third liquid storage module 300

[0224] The system automatically opens the twenty-fourth pneumatic diaphragm valve, so that the first purge gas of the first purge gas source enters the first purge pipeline element 701;

[0225] The system opens the micro-leakage adjusting element 712 to adjust the flow of the first purge gas of the first purge gas source into the first purge pipeline element 701;

[0226] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the gas pressure in the first purge pipeline element 701 meets the standard;

[0227] When the gas pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the thirty-first pneumatic diaphragm valve and the thirty-third pneumatic diaphragm valve, so that the first purge gas can enter the third liquid storage element 301 through the fourth purge pipeline element 704 and the seventh delivery pipeline element 303, and then the dissolved liquid in the seventh delivery pipeline element 303 can be pressed into the third liquid storage element 301;

[0228] When the solution in the pipeline is exhausted, the system opens the twelfth pneumatic diaphragm valve, the thirteenth pneumatic diaphragm valve, the thirty-first pneumatic diaphragm valve, the thirty-second pneumatic diaphragm valve, the fortieth pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve, so as to exhaust the gas in the pipeline;

[0229] When the exhaust operation is completed, the system automatically opens the twenty-fourth pneumatic diaphragm valve, so that the first purge gas of the first purge gas source enters the first purge pipeline element 701;

[0230] The system opens the micro-leakage adjusting element 712 to adjust the flow of the first purge gas of the first purge gas source into the first purge pipeline element 701;

[0231] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the pressure in the first purge pipeline element 701 meets the standard;

[0232] When the pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the thirty-first pneumatic diaphragm valve, the thirty-second pneumatic diaphragm valve, and the thirty-third pneumatic diaphragm valve, so that the pipeline is filled with the first purge gas and is kept for a period of time;

[0233] After the purge is completed, the system opens the twelfth pneumatic diaphragm valve, the thirteenth pneumatic diaphragm valve, the thirty-first pneumatic diaphragm valve, the thirty-second pneumatic diaphragm valve, the fortieth pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve, so as to exhaust the gas in the pipeline.

[0234] (Six) Cleaning the fourth liquid storage module 400

[0235] The system opens the forty-first pneumatic diaphragm valve, the thirty-fifth pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve, so as to exhaust the gas in the pipeline;

[0236] When the gas in the pipeline is exhausted, the system automatically opens the twenty-fourth pneumatic diaphragm valve, so that the first purge gas of the first purge gas source enters the first purge pipeline element 701;

[0237] The system opens the micro-leakage adjusting element 712 to adjust the flow of the first purge gas of the first purge gas source into the first purge pipeline element 701;

[0238] The system opens the third pressure regulating element 713 to regulate the pressure of the first purge gas in the first purge pipeline element 701, so that the pressure in the first purge pipeline element 701 meets the standard;

[0239] When the pressure detected by the ninth pressure monitoring element 714 meets the standard, the system opens the thirty-fourth pneumatic diaphragm valve and the thirty-fifth pneumatic diaphragm valve, so that the pipeline is filled with the first purge gas and is kept for a period of time;

[0240] After purging is completed, the system opens the forty-first pneumatic diaphragm valve, the thirty-fifth pneumatic diaphragm valve, and the thirty-eighth pneumatic diaphragm valve to purge the gas from the pipeline.

[0241] The advantage of this embodiment is that by connecting the first power gas supply module to the first liquid storage module, connecting the second power gas supply module to the second liquid storage module, connecting the first purge gas supply module to the first liquid storage module, the second liquid storage module, the third liquid storage module, and the fourth liquid storage module respectively, and connecting the second purge gas supply module to the third liquid storage module, the dissolving liquid in the third liquid storage module can be injected into the first liquid storage module, the second liquid storage module, and multiple pipelines. This allows the first liquid storage module, the second liquid storage module, and multiple pipelines to be cleaned by the dissolving liquid, thereby dissolving and discharging the liquid source adhering to the pipe wall and remaining in the first and second liquid storage modules, thus improving the cleanliness of the first liquid storage module, the second liquid storage module, and multiple pipelines.

[0242] Example 2

[0243] This embodiment is a modified embodiment of embodiment 1.

[0244] like Figure 5 As shown, the purging system also includes a gas-liquid separation module 1000 and a second vacuum module 1100. The gas-liquid separation module 1000 is connected to the second liquid storage module 200 and the process equipment via pipelines, and is located downstream of the second liquid storage module 200. It is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage module 200 to remove gas from the liquid source and to transport the separated liquid source to the process equipment. The second vacuum module 1100 is connected to the gas-liquid separation module 1000 and is used to discharge the gas generated by the gas-liquid separation module 1000.

[0245] like Figure 6 As shown, the gas-liquid separation module 1000 includes a gas-liquid separation element 1001 and a third bypass pipeline element 1002. The gas-liquid separation element 1001 is connected to and located downstream of the second liquid storage module 200, and is used to perform gas-liquid separation on the liquid source flowing downstream from the second liquid storage module 200 to remove gas from the liquid source, and to direct the separated liquid source to the process equipment. The first end of the third bypass pipeline element 1002 is connected to the pipeline connecting the gas-liquid separation element 1001 and the second liquid storage module 200, and the second end of the third bypass pipeline element 1002 is connected to the pipeline connecting the gas-liquid separation element 1001 and the process equipment, serving to protect the overall pipeline.

[0246] Specifically, the gas-liquid separation element 1001 is disposed on the fourth delivery pipeline element 203 and is located downstream of the fourth pressure monitoring element 211 and upstream of the ninth pneumatic diaphragm valve; the first end of the third bypass pipeline element 1002 is connected to the fourth delivery pipeline element 203 between the fourth pressure monitoring element 211 and the gas-liquid separation element 1001, and the second end of the third bypass pipeline element 1002 is connected to the fourth delivery pipeline element 203 between the ninth pneumatic diaphragm valve and the gas-liquid separation element 1001.

[0247] In some of these embodiments, the gas-liquid separation element 1001 includes, but is not limited to, a gas-liquid separator; the third bypass pipeline element 1002 includes, but is not limited to, a stainless steel pipe.

[0248] Furthermore, the gas-liquid separation module 1000 also includes a twenty-sixth control valve element 1003 and a twenty-seventh control valve element 1004. The twenty-sixth control valve element 1003 is disposed in a pipeline connected to the gas-liquid separation element 1001 and is used to control the flow between the gas-liquid separation element 1001 and the second liquid storage module 200 and the process equipment. The twenty-seventh control valve element 1004 is disposed in the third bypass pipeline element 1002 and is used to control the flow in the third bypass pipeline element 1002.

[0249] Specifically, the twenty-sixth control valve element 1003 includes a forty-second pneumatic diaphragm valve and a forty-third pneumatic diaphragm valve. The forty-second pneumatic diaphragm valve is disposed in the fourth delivery pipeline element 203, located between the gas-liquid separation element 1001, the first end of the third bypass pipeline element 1002, and the connection point of the fourth delivery pipeline element 203; the forty-third pneumatic diaphragm valve is disposed in the fourth delivery pipeline element 203, located between the gas-liquid separation element 1001, the second end of the third bypass pipeline element 1002, and the fourth delivery pipeline element 203.

[0250] Specifically, the twenty-seventh control valve element 1004 includes a forty-fourth pneumatic diaphragm valve and a forty-fifth pneumatic diaphragm valve. The forty-fourth pneumatic diaphragm valve is located at the first end of the third bypass pipeline element 1002; the forty-fifth pneumatic diaphragm valve is located at the second end of the third bypass pipeline element 1002.

[0251] like Figure 6 As shown, the second vacuum module 1100 includes a fifth vacuum pipeline element 1101. The fifth vacuum pipeline element 1101 is connected to the vacuum generating device and the gas-liquid separation module 1000, respectively, and is used to discharge the gas generated by the gas-liquid separation module 1000.

[0252] Specifically, the first end of the fifth vacuum pipeline element 1101 is connected to the vacuum generator, and the second end of the fifth vacuum pipeline element 1101 is connected to the gas-liquid separation element 1001.

[0253] In some embodiments, the fifth vacuum pipeline element 1101 comprises, but is not limited to, a stainless steel pipe.

[0254] Further, the second vacuum module 1100 comprises a twenty-eighth control valve element 1102 and a twelfth pressure monitoring element 1103. Specifically, the twenty-eighth control valve element 1102 is arranged on the fifth vacuum pipeline element 1101 for controlling the flow of the fifth vacuum pipeline element 1101; the twelfth pressure monitoring element 1103 is in communication with the fifth vacuum pipeline element 1101 for monitoring the pressure inside the fifth vacuum pipeline element 1101.

[0255] Specifically, the twenty-eighth control valve element 1102 comprises a forty-sixth pneumatic diaphragm valve and a ninth manual diaphragm valve. Specifically, the forty-sixth pneumatic diaphragm valve is arranged on the fifth vacuum pipeline element 1101; the ninth manual diaphragm valve is arranged on the communication pipeline between the twelfth pressure monitoring element 1103 and the fifth vacuum pipeline element 1101 and is located upstream of the forty-sixth pneumatic diaphragm valve.

[0256] In some embodiments, the twelfth pressure monitoring element 1103 comprises, but is not limited to, a pressure sensor.

[0257] The use method of the present embodiment is as follows:

[0258] When the fourth pipeline element 203 is used to deliver the liquid source to the process equipment, the system opens the forty-second pneumatic diaphragm valve and the forty-third pneumatic diaphragm valve to make the front and rear ends of the gas-liquid separation element 1001 flow, so as to separate the gas in the liquid source by the gas-liquid separation element 1001;

[0259] When the gas-liquid separation element 1001 is working, the system opens the forty-sixth pneumatic diaphragm valve, so that the vacuum generator can discharge the gas generated by the gas-liquid separation element 1001 through the fifth vacuum pipeline element 1101;

[0260] When the gas-liquid separation element 1001 cannot work normally, the system opens the forty-fourth pneumatic diaphragm valve and the forty-fifth pneumatic diaphragm valve, so that the liquid source in the fourth pipeline element 203 is delivered to the process equipment through the third bypass pipeline element 1002.

[0261] The advantage of the present embodiment is that by arranging the gas-liquid separation module and the second vacuum module, the liquid source output by the second liquid storage module can be separated into gas and liquid, thereby improving the purity of the liquid source.

[0262] Embodiment 3

[0263] The present embodiment is a variant of Embodiments 1-2.

[0264] As shown in Figure 7 The purge system further comprises a volatilization module 1200 and a third vacuum module 1300. The volatilization module 1200 is in communication with the fourth liquid storage module 400 and the exhaust device, and is used for volatilizing and discharging the liquid in the fourth liquid storage module 400 and the pipeline. The third vacuum module 1300 is in communication with the first vacuum module 900, and is used for accelerating the volatilization of the liquid.

[0265] As shown in Figure 8 The volatilization module 1200 comprises a first volatilization pipeline element 1201 and a second volatilization pipeline element 1202. The first volatilization pipeline element 1201 is in communication with the fourth liquid storage module 400 and the exhaust device, and is used for volatilizing and discharging the liquid in the fourth liquid storage module 400. The second volatilization pipeline element 1202 is in communication with the first volatilization pipeline element 1201 and the third liquid storage module 300, and is used for volatilizing and discharging the liquid in the pipeline.

[0266] Specifically, the first end of the first volatilization pipeline element 1201 is in communication with the fourth liquid storage element 401, and the second end of the first volatilization pipeline element 1201 is in communication with the exhaust treatment device. The first end of the second volatilization pipeline element 1202 is in communication with the first volatilization pipeline element 1201, and the second end of the second volatilization pipeline element 1202 is in communication with the seventh pipeline element 303, and the communication position is between the fourteenth pneumatic diaphragm valve and the fifteenth pneumatic diaphragm valve.

[0267] In some embodiments, the first volatilization pipeline element 1201 comprises, but is not limited to, a stainless steel pipe; and the second volatilization pipeline element 1202 comprises, but is not limited to, a stainless steel pipe.

[0268] Further, the volatilization module 1200 comprises a twenty-ninth control valve element 1203 and a thirtieth control valve element 1204. The twenty-ninth control valve element 1203 is arranged in the first volatilization pipeline element 1201, and is used for controlling the flow of the first volatilization pipeline element 1201. The thirtieth control valve element 1204 is arranged in the second volatilization pipeline element 1202, and is used for controlling the flow of the second volatilization pipeline element 1202.

[0269] Specifically, the twenty-ninth control valve element 1203 includes a forty-seventh pneumatic diaphragm valve, a forty-eighth pneumatic diaphragm valve, a fifth check valve, and a tenth manual diaphragm valve. The forty-seventh pneumatic diaphragm valve is located in the first evaporation pipeline element 1201 and controls the flow between the first evaporation pipeline element 1201 and the fourth liquid storage element 401. The forty-eighth pneumatic diaphragm valve is located in the first evaporation pipeline element 1201 and downstream of the forty-seventh pneumatic diaphragm valve. The fifth check valve is located in the first evaporation pipeline element 1201 and downstream of the forty-seventh pneumatic diaphragm valve, allowing unidirectional gas flow within the first evaporation pipeline element 1201. The tenth manual diaphragm valve is located in the first evaporation pipeline element 1201 and downstream of the fifth check valve, controlling the flow between the first evaporation pipeline element 1201 and the waste gas treatment equipment.

[0270] Specifically, the thirtieth control valve element 1204 includes a sixth check valve. The sixth check valve is disposed in the second evaporation pipeline element 1202 to allow flow between the second evaporation pipeline element 1202 and the waste gas treatment equipment.

[0271] like Figure 8 As shown, the third vacuum module 1300 includes a sixth vacuum pipeline element 1301. The sixth vacuum pipeline element 1301 is connected to the first vacuum module 900 and is used to accelerate the evaporation of liquid.

[0272] Specifically, the first end of the sixth vacuum pipeline element 1301 is connected to the vacuum generator, and the second end of the sixth vacuum pipeline element 1301 is connected to the first exhaust pipeline element 901.

[0273] In some of these embodiments, the sixth vacuum line element 1301 includes, but is not limited to, a stainless steel tube.

[0274] Furthermore, the third vacuum module 1300 includes a thirty-first control valve element 1302. The thirty-first control valve element 1302 is disposed on the sixth vacuum pipeline element 1301 and is used to control the flow in the sixth vacuum pipeline element 1301.

[0275] Specifically, the thirty-first control valve element 1302 includes the forty-ninth pneumatic diaphragm valve. The forty-ninth pneumatic diaphragm valve is disposed in the sixth vacuum line element 1301 and is used to control the flow between the sixth vacuum line element 1301 and the vacuum generator.

[0276] The usage method of this embodiment is as follows:

[0277] The residual liquid in the fourth liquid storage element 401 and the seventh delivery pipeline element 303 can be freely evaporated and discharged through the first evaporation pipeline element 1201 and the second evaporation pipeline element 1202, respectively.

[0278] The advantage of the embodiment is that the residual liquid in the fourth liquid storage module or the seventh conveying pipeline element can be discharged through the volatilization module, thereby improving the cleanliness of the pipeline.

[0279] Embodiment 4

[0280] The embodiment is a variant of embodiments 1-3.

[0281] As shown in Figure 9 The purge system further includes a liquid leakage monitoring module 1400. The liquid leakage monitoring module 1400 is arranged in the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, and the fourth liquid storage module 400, and is used for real-time liquid leakage monitoring of the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, and the fourth liquid storage module 400.

[0282] As shown in Figure 10 The liquid leakage monitoring module 1400 further includes a containing element 1401, a plurality of first liquid leakage detection elements 1402, and a second liquid leakage detection element 1403. The containing element 1401 is used for containing the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, and the fourth liquid storage module 400. The plurality of first liquid leakage detection elements 1402 are arranged in the containing element 1401 and correspond to the bottoms of the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, and the fourth liquid storage module 400, respectively, and are used for liquid leakage detection of the first liquid storage module 100, the second liquid storage module 200, the third liquid storage module 300, and the fourth liquid storage module 400. The second liquid leakage detection element 1403 is arranged in the containing element 1401 and is used for detecting whether the containing element 1401 has liquid accumulation.

[0283] Specifically, the containing element 1401 is arranged in a basin structure, and the first liquid storage element 101, the second liquid storage element 201, the third liquid storage element 301, and the fourth liquid storage element 401 are placed inside the containing element 1401.

[0284] In some embodiments, the containing element 1401 includes but is not limited to a stainless steel basin.

[0285] Specifically, the number of first liquid leakage detection elements is 4, and the 4 first liquid leakage detection elements 1402 are arranged at the bottoms of the first liquid storage element 101, the second liquid storage element 201, the third liquid storage element 301, and the fourth liquid storage element 401, respectively.

[0286] In some embodiments, the first liquid leakage detection element 1402 includes but is not limited to a paper tape liquid leakage detector, and the second liquid leakage detection element 1403 includes but is not limited to a floating ball liquid leakage detector.

[0287] The use method of the embodiment is the same as that of Embodiment 1, which is not described herein again.

[0288] The embodiment has the advantages that in the case of liquid leakage of the first liquid storage element, the second liquid storage element, the third liquid storage element, and the fourth liquid storage element, the first liquid leakage detection element and the second liquid leakage detection element can timely and effectively monitor the liquid leakage, which is convenient for the staff to observe and improves the work safety.

[0289] Embodiment 5

[0290] The embodiment is a variant of Embodiments 1-4.

[0291] As shown in Figure 9 The purge system further includes a medium monitoring module 1500. The medium monitoring module 1500 is in communication with the third liquid storage module 300 and located downstream of the third liquid storage module 300, and is used to monitor whether the medium output by the third liquid storage module 300 is a liquid.

[0292] Specifically, the medium monitoring module 1500 is arranged on the seventh conveying pipeline element 303 and is used to detect whether the medium in the seventh conveying pipeline element 303 is a liquid. In the case that the medium is not a liquid, i.e., the content of the dissolving liquid in the third liquid storage element 301 is too low, the third liquid storage element 301 needs to be replaced.

[0293] In some embodiments, the medium monitoring module 1500 includes but is not limited to an ultrasonic sensor.

[0294] The use method and advantages of the embodiment are the same as those of Embodiment 1, which are not described herein again.

[0295] Embodiment 6

[0296] The embodiment is a variant of Embodiments 1-5.

[0297] Further, the purge system further includes a safety guarantee module. The safety guarantee module is arranged at the top of the environment where the purge system is located and is used to monitor environmental information.

[0298] In some embodiments, the safety guarantee module includes a smoke monitoring element, a liquid spraying element, an ultraviolet infrared switch, and a blowing element. The smoke monitoring element is arranged at the top of the environment where the purge system is located and is used to monitor the smoke information of the environment; the liquid spraying element is arranged at the top of the environment where the purge system is located and is used to spray liquid to the environment; the ultraviolet infrared switch is arranged at the top of the environment where the purge system is located and is used to monitor whether there is an open flame in the environment; and the blowing element is arranged at the top of the environment where the purge system is located and is used to discharge the gas in the environment.

[0299] In some embodiments, the smoke monitoring element is a smoke detector.

[0300] In some embodiments, the liquid spraying element is a shower head.

[0301] In some embodiments, the ultraviolet infrared switch is an infrared ultraviolet switch (IR Switch).

[0302] In some embodiments, the air blowing element includes, but is not limited to, an exhaust fan.

[0303] In some embodiments, the safety guarantee module further includes a gas monitoring element, a flame monitoring element, and a temperature monitoring element.

[0304] The advantages of the present embodiment are that in the case of a leak or combustion of the purging system, the smoke monitoring element is used for early warning; the liquid spraying element is used for spraying to reduce the concentration of related gases and liquids in the environment and prevent explosions; and the air blowing element can quickly discharge the gases in the environment to the waste gas treatment system.

[0305] Embodiment 7

[0306] The present embodiment relates to the semiconductor process equipment in the utility model.

[0307] The semiconductor process equipment includes the purging system as described in embodiments 1-6.

[0308] The semiconductor process equipment further includes a first power gas source, a second power gas source, a first purging gas source, a second purging gas source, a first vacuum device, a second vacuum device, a third vacuum device, and a waste gas treatment device. The first power gas source is in communication with the first power gas supply module 500, and the second power gas source is in communication with the second power gas supply module 600; the first purging gas source is in communication with the first purging gas supply module 700; the second purging gas source is in communication with the second purging gas supply module 800; the first vacuum device is in communication with the first vacuum module 900; the second vacuum device is in communication with the second vacuum module 1100; the third vacuum device is in communication with the third vacuum module 1300; and the waste gas treatment device is in communication with the volatilization module 1200. The technical features of the above-described embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above-described embodiments are not described, but as long as the combinations of the technical features do not contradict each other, they should be considered as within the scope of the present disclosure.

[0309] The use method of the present embodiment is the same as that of embodiments 1-6, and will not be described here.

[0310] The technical effects of the present embodiment are the same as those of embodiments 1-6, and will not be described here.

[0311] The above-described embodiments only express several implementation manners of the application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the utility model patent. It should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the application, a number of modifications and improvements can be made, which all belong to the protection scope of the application. Therefore, the protection scope of the patent of the application should be subject to the appended claims.

Claims

1. A purge system for liquid source delivery, characterized by, Comprising: a first liquid storage module for storing liquid source; a second liquid storage module in communication with the first liquid storage module and a process equipment through a pipeline, and located downstream of the first liquid storage module, for buffering the liquid source and delivering the liquid source to the process equipment; a third liquid storage module in communication with the first liquid storage module and the second liquid storage module through a pipeline, for storing dissolving liquid and delivering the dissolving liquid to the first liquid storage module and the second liquid storage module; a fourth liquid storage module in communication with the first liquid storage module and the second liquid storage module through a pipeline, for storing waste liquid; a first power gas supply module in communication with a first power gas source and the first liquid storage module through a pipeline, for supplying first power gas to the first liquid storage module to make the liquid source of the first liquid storage module flow to the second liquid storage module; a second power gas supply module in communication with a second power gas source and the second liquid storage module through a pipeline, for supplying second power gas to the second liquid storage module to make the liquid source of the second liquid storage module flow to the process equipment; a first purge gas supply module in communication with a first purge gas source and the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module through a pipeline, for delivering first purge gas to the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module respectively to press the liquid source, the dissolving liquid, the waste liquid in the pipeline into the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module respectively; a second purge gas supply module in communication with a second purge gas source and the third liquid storage module through a pipeline, for delivering second purge gas to the third liquid storage module to press the dissolving liquid into the pipeline, the first liquid storage module, the second liquid storage module respectively to make the dissolving liquid clean the pipeline, the first liquid storage module, the second liquid storage module; a first vacuum module in communication with the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module, for vacuum processing the first liquid storage module, the second liquid storage module, the third liquid storage module, the fourth liquid storage module.

2. The purge system of claim 1, wherein, The first liquid storage module comprises: a first liquid storage element for storing liquid source; a first delivery pipeline element in communication with the first liquid storage element, the first power gas supply module, the first purge gas supply module, for delivering gas; a second delivery pipeline element in communication with the first liquid storage element, the second liquid storage module, the first purge gas supply module, for delivering gas and liquid; and / or The second liquid storage module comprises: a second liquid storage element in communication with the first liquid storage module for buffering the liquid source; a third delivery line element in communication with the second liquid storage element, the second power gas supply module, and the first purge gas supply module for delivering gas; a fourth delivery line element in communication with the second liquid storage element and the first purge gas supply module for delivering the liquid source; at least one fifth delivery line element in communication with the fourth delivery line element and the process equipment for delivering the liquid source to the process equipment; and / or the third liquid storage module comprises: a third liquid storage element in communication with the first liquid storage module for storing the dissolving liquid; a sixth delivery line element in communication with the third liquid storage element, the first purge gas supply module, and the second purge gas supply module for delivering gas; a seventh delivery line element in communication with the third liquid storage element, the first liquid storage module, and the second liquid storage module for delivering gas and liquid; an eighth delivery line element in communication with the seventh delivery line element for delivering liquid; at least one ninth delivery line element in communication with the eighth delivery line element and the second liquid storage module for delivering liquid; and / or the fourth liquid storage module comprises: a fourth liquid storage element in communication with the first liquid storage module and the second liquid storage module via a line for storing waste liquid; a tenth delivery line element in communication with the fourth liquid storage element, the first liquid storage module, the second liquid storage module, and the first purge gas supply module for delivering liquid; and / or the first power gas supply module comprises: a first power gas supply element in communication with a first power gas source and the first liquid storage module via a line for supplying a first power gas to the first liquid storage module to cause the liquid source of the first liquid storage module to flow to the second liquid storage module; and / or the second power gas supply module comprises: a second power gas supply element in communication with a second power gas source and the second liquid storage module via a line for supplying a second power gas to the second liquid storage module to cause the liquid source of the second liquid storage module to flow to the process equipment; and / or the first purge gas supply module comprises: a first purge line element in communication with a first purge gas source for delivering a first purge gas; a second purge line element in communication with the first purge line element and the first liquid storage module for delivering the first purge gas to the first liquid storage module to force the liquid source in the line into the first liquid storage module; a third purge pipeline element, respectively in communication with the first purge pipeline element, a second liquid storage element of the second liquid storage module, for conveying the first purge gas to the second liquid storage element to press the liquid source in the pipeline into the second liquid storage element; a fourth purge pipeline element, respectively in communication with the first purge pipeline element, the third liquid storage module, for conveying the first purge gas to the third liquid storage module to press the dissolved liquid in the pipeline into the third liquid storage module; a fifth purge pipeline element, respectively in communication with the first purge pipeline element, the fourth liquid storage module, for conveying the first purge gas to the fourth liquid storage module to press the waste liquid in the pipeline into the fourth liquid storage module; a sixth purge pipeline element, respectively in communication with the first purge pipeline element, an eighth pipeline element of the third liquid storage module, for conveying the first purge gas to the eighth pipeline element to discharge the liquid in the eighth pipeline element; and / or the second purge gas supply module comprises: a seventh purge pipeline element, respectively in communication with a second purge gas source, the third liquid storage module, for conveying the first purge gas to the third liquid storage module to press the dissolved liquid into the pipeline, the first liquid storage module, the second liquid storage module, so that the dissolved liquid cleans the pipeline, the first liquid storage module, the second liquid storage module; and / or the first vacuum module comprises: a first exhaust pipeline element, respectively in communication with a vacuum generating device, for conveying the exhaust gas; a first vacuum pipeline element, respectively in communication with the first liquid storage module, the first exhaust pipeline element, a vacuum generator, for vacuum processing the first liquid storage module; a second vacuum pipeline element, respectively in communication with the second liquid storage module, the first exhaust pipeline element, the first vacuum pipeline element, for vacuum processing the second liquid storage module; a third vacuum pipeline element, respectively in communication with the third liquid storage module, the first exhaust pipeline element, the first vacuum pipeline element, for vacuum processing the third liquid storage module; a fourth vacuum pipeline element, respectively in communication with the fourth liquid storage module, the first exhaust pipeline element, the first vacuum pipeline element, for vacuum processing the fourth liquid storage module.

3. The purge system of claim 2, wherein, the first liquid storage module further comprises: a first control valve element, disposed in the first pipeline element, for controlling the flow of the first pipeline element; a second control valve element, disposed in the second pipeline element, for controlling the flow of the second pipeline element; and / or the first liquid storage module further comprises: a first bypass pipeline element, respectively in communication with the first pipeline element, the second pipeline element, for bypassing; A third control valve element is arranged in the first bypass pipeline element for controlling the flow of the first bypass pipeline element; and / or The second liquid storage module further comprises: A fourth control valve element is arranged in the third delivery pipeline element for controlling the flow of the third delivery pipeline element; A fifth control valve element is arranged in the fourth delivery pipeline element for controlling the flow of the fourth delivery pipeline element; At least one sixth control valve element is arranged in the fifth delivery pipeline element for controlling the flow of the fifth delivery pipeline element; and / or The second liquid storage module further comprises: A second bypass pipeline element is in communication with the first end of the first liquid storage module and the second end of the fourth delivery pipeline element for bypassing; A seventh control valve element is arranged in the second bypass pipeline element for controlling the flow of the second bypass pipeline element; and / or The third liquid storage module further comprises: An eighth control valve element is arranged in the sixth delivery pipeline element for controlling the flow of the sixth delivery pipeline element; A ninth control valve element is arranged in the seventh delivery pipeline element for controlling the flow of the seventh delivery pipeline element; A tenth control valve element is arranged in the eighth delivery pipeline element for controlling the flow of the eighth delivery pipeline element; An eleventh control valve element is arranged in the ninth delivery pipeline element for controlling the flow of the ninth delivery pipeline element; and / or The fourth liquid storage module further comprises: A twelfth control valve element is arranged in the tenth delivery pipeline element for controlling the flow of the tenth delivery pipeline element; and / or The first power gas supply module further comprises: A thirteenth control valve element is arranged in the first power gas supply element for controlling the flow of the first power gas supply element; and / or The second power gas supply module further comprises: A fourteenth control valve element is arranged in the second power gas supply element for controlling the flow of the second power gas supply element; and / or The first purge gas supply module further comprises: A fifteenth control valve element is arranged in the first purge pipeline element for controlling the flow of the first purge pipeline element; A sixteenth control valve element is arranged in the third purge pipeline element for controlling the flow of the third purge pipeline element; A seventeenth control valve element is arranged in the fourth purge pipeline element for controlling the flow of the fourth purge pipeline element; An eighteenth control valve element is arranged in the fifth purge pipeline element for controlling the flow of the fifth purge pipeline element; a nineteenth control valve element disposed on the fifth purge line element for controlling the flow of the fifth purge line element; and / or The second purge gas supply module further comprises: a twentieth control valve element disposed on the seventh purge line element for controlling the flow of the seventh purge line element; and / or The first vacuum module further comprises: a twenty-first control valve element disposed on the first exhaust line element for controlling the flow of the first exhaust line element; a twenty-second control valve element disposed on the first vacuum line element for controlling the flow of the first vacuum line element; a twenty-third control valve element disposed on the second vacuum line element for controlling the flow of the second vacuum line element; a twenty-fourth control valve element disposed on the third vacuum line element for controlling the flow of the third vacuum line element; a twenty-fifth control valve element disposed on the fourth vacuum line element for controlling the flow of the fourth vacuum line element.

4. The purge system of claim 2, wherein, The first liquid storage module further comprises: a first pressure monitoring element in communication with the first delivery line element for monitoring the pressure of the first delivery line element; a second pressure monitoring element in communication with the second delivery line element for monitoring the pressure of the second delivery line element; a first liquid level monitoring element disposed inside the first liquid storage element for monitoring the liquid level of the first liquid storage element; a first weight monitoring element disposed at the bottom of the first liquid storage element for monitoring the weight of the first liquid storage element; and / or The second liquid storage module further comprises: a third pressure monitoring element in communication with the third delivery line element for monitoring the pressure of the third delivery line element; a fourth pressure monitoring element in communication with the fourth delivery line element for monitoring the pressure of the fourth delivery line element; a second liquid level monitoring element disposed inside the second liquid storage element for monitoring the liquid level of the second liquid storage element; a second weight monitoring element disposed at the bottom of the second liquid storage element for monitoring the weight of the second liquid storage element; and / or The third liquid storage module further comprises: a fifth pressure monitoring element in communication with the sixth delivery line element for monitoring the pressure of the sixth delivery line element; a third weight monitoring element disposed at the bottom of the third liquid storage element for monitoring the weight of the third liquid storage element; and / or The fourth liquid storage module further comprises: a sixth pressure monitoring element in communication with the tenth delivery line element for monitoring pressure of the tenth delivery line element; a fourth weight monitoring element disposed at the bottom of the fourth liquid storage element for monitoring weight of the fourth liquid storage element; and / or the first power gas supply module further comprises: a first pressure regulating element disposed at the first power gas supply element for regulating pressure of the first power gas supply element; a seventh pressure monitoring element in communication with the first power gas supply element for monitoring pressure of the first power gas supply element; and / or the second power gas supply module further comprises: a second pressure regulating element disposed at the second power gas supply element for regulating pressure of the second power gas supply element; an eighth pressure monitoring element in communication with the second power gas supply element for monitoring pressure of the second power gas supply element; and / or the first purge gas supply module further comprises: a micro-leak regulating element disposed at the first purge line element for micro-leak first purge gas; a third pressure regulating element disposed at the first purge line element for regulating pressure of the first purge line element; a ninth pressure monitoring element in communication with the first purge line element for monitoring pressure of the first purge line element; and / or the second purge gas supply module further comprises: a fourth pressure regulating element disposed at the seventh purge line element for regulating pressure of the seventh purge line element; a tenth pressure monitoring element in communication with the seventh purge line element for monitoring pressure of the seventh purge line element; and / or the first vacuum module further comprises: an eleventh pressure monitoring element in communication with the first exhaust line element for monitoring pressure of the first exhaust line element.

5. Purge system according to any one of claims 1 to 4, characterized in that further comprising: a gas-liquid separation module in communication with the second liquid storage module and a process equipment via a line, and located downstream of the second liquid storage module, for separating gas from liquid source flowing downstream from the second liquid storage module to remove gas in the liquid source and delivering the liquid source after gas-liquid separation to the process equipment; a second vacuum module in communication with the gas-liquid separation module for exhausting gas generated by the gas-liquid separation module; and / or a volatilization module in communication with the fourth liquid storage module and an exhaust equipment for exhausting volatilized liquid from the line and the fourth liquid storage module; a third vacuum module in communication with the first vacuum module for accelerating volatilization of liquid.

6. The purge system of claim 5, wherein, the gas-liquid separation module comprises: a gas-liquid separation element, which is in communication with the second liquid storage module and downstream of the second liquid storage module, for carrying out gas-liquid separation on the liquid source flowing downstream of the second liquid storage module to remove the gas in the liquid source, and flowing the liquid source after gas-liquid separation to the process equipment; a third bypass pipeline element, a first end of which is in communication with the pipeline in which the gas-liquid separation element and the second liquid storage module are in communication, and a second end of which is in communication with the pipeline in which the gas-liquid separation element and the process equipment are in communication, for protecting the overall pipeline; and / or the second vacuum module comprises: a fifth vacuum pipeline element, which is in communication with the vacuum generating equipment and the gas-liquid separation module respectively, for discharging the gas generated by the gas-liquid separation module; and / or the volatilization module comprises: a first volatilization pipeline element, which is in communication with the fourth liquid storage module and the exhaust equipment respectively, for volatilizing and discharging the liquid of the fourth liquid storage module; a second volatilization pipeline element, which is in communication with the first volatilization pipeline element and the third liquid storage module respectively, for volatilizing and discharging the liquid of the pipeline; and / or the third vacuum module comprises: a sixth vacuum pipeline element, which is in communication with the first vacuum module, for accelerating the volatilization of the liquid.

7. The purge system of claim 6, wherein, the gas-liquid separation module further comprises: a twenty-sixth control valve element, which is arranged in the pipeline in communication with the gas-liquid separation element, for controlling the flow communication of the gas-liquid separation element with the second liquid storage module and the process equipment; a twenty-seventh control valve element, which is arranged in the third bypass pipeline element, for controlling the flow communication of the third bypass pipeline element; and / or the second vacuum module comprises: a twenty-eighth control valve element, which is arranged in the fifth vacuum pipeline element, for controlling the flow communication of the fifth vacuum pipeline element; a twelfth pressure monitoring element, which is in communication with the fifth vacuum pipeline element, for monitoring the pressure inside the fifth vacuum pipeline element; and / or the volatilization module comprises: a twenty-ninth control valve element, which is arranged in the first volatilization pipeline element, for controlling the flow communication of the first volatilization pipeline element; a thirtieth control valve element, which is arranged in the second volatilization pipeline element, for controlling the flow communication of the second volatilization pipeline element; and / or the third vacuum module comprises: a thirty-first control valve element, which is arranged in the sixth vacuum pipeline element, for controlling the flow communication of the sixth vacuum pipeline element.

8. The purge system of any one of claims 1 to 4, wherein, further comprising: a liquid leakage monitoring module, which is arranged in the first liquid storage module, the second liquid storage module, the third liquid storage module, and the fourth liquid storage module, for real-time liquid leakage monitoring of the first liquid storage module, the second liquid storage module, the third liquid storage module, and the fourth liquid storage module; and / or a medium monitoring module, which is in communication with and downstream of the third liquid storage module, and is configured to monitor whether the medium output by the third liquid storage module is liquid; and / or a security module, which is arranged on the top of the environment in which the purge system is located, and is configured to monitor environmental information.

9. The purge system of claim 8, wherein, The liquid leakage monitoring module further comprises: a containing element, which is configured to contain the first liquid storage module, the second liquid storage module, the third liquid storage module, and the fourth liquid storage module; a plurality of first liquid leakage detection elements, which are arranged on the containing element and correspond to the bottom of the first liquid storage module, the second liquid storage module, the third liquid storage module, and the fourth liquid storage module respectively, and are configured to detect liquid leakage of the first liquid storage module, the second liquid storage module, the third liquid storage module, and the fourth liquid storage module; a second liquid leakage detection element, which is arranged on the containing element and is configured to detect whether the containing element has accumulated liquid.

10. A semiconductor process apparatus, characterized by, The purge system comprises: the purge system according to any one of claims 1-9.

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