On-line appearance defect detection device for crystal bar

Abstract

The utility model discloses an on-line appearance defect detection device for a crystal bar. The on-line appearance defect detection device comprises a rack which stretches across a plurality of conveying belts which are arranged side by side, a transverse rail crossing all the conveying belts is horizontally arranged on the rack; the device further comprises a sliding frame capable of moving along the transverse rail, and the sliding frame is provided with a liftable stand column and a clamp which ascends and descends along with the stand column. The clamp comprises clamping ends arranged front and back in the axial direction of the conveying belt. The two clamping ends are located at the same height and can be close to each other or away from each other to clamp or loosen a crystal bar. The two clamping ends can rotate synchronously, so that the clamped crystal bar is driven to rotate along the axis of the crystal bar; and the detection station is used for appearance detection. According to the on-line appearance defect detection device for the crystal bar with the structure, the crystal bar is automatically grabbed on a production line and conveyed to a detection station for detection. The crystal bar does not need to be transferred between equipment, grabbing is completed at a time, the crystal bar is rotated during detection, and therefore appearance detection of all the side faces is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a device for on-line detection crystal bar appearance quality. BACKGROUND

[0002] Crystal bar is the basic material of semiconductor production. After the crystal grows, it needs to be cut into a certain length of crystal bar for transportation and use. Before processing the crystal bar, it needs to be cleaned and appearance detected. After the crystal bar detection is qualified, it can be put into use. Usually, crystal bar turnover equipment needs to be used to turn over the crystal bar to clean and appearance detect the side of the crystal bar.

[0003] During the appearance detection process, each side of the crystal bar needs to be observed. However, the weight of a single crystal bar is generally around 300 kg, so it is difficult to check by manual turning.

[0004] Prior art Chinese patent application CN202111490952.2 Crystal bar turnover equipment and crystal bar turnover method, the crystal bar turnover equipment includes: base, the base has a bearing component, the bearing component moves relative to the base in the direction perpendicular to the bottom surface of the base, performs the feeding and discharging steps on the crystal bar; The clamping component located on the base includes a fixed end and a moving end; The rotating component is arranged on the clamping component; The detection component includes: a detection module, the detection module is used to detect whether the position of the discharging surface of the crystal bar meets the preset position; A first control unit, the first control unit is in communication connection with the rotating component, if the position of the discharging surface does not meet the preset position, the detection module sends a first feedback signal to the first control unit, the first control unit controls the crystal bar to turn over based on the first feedback signal until the position of the discharging surface meets the preset position.

[0005] In the above prior art, the crystal bar needs to be transferred to the clamping component by the bearing component before it can be turned over. For on-line detection, the process is complicated and inefficient. UTILITY MODEL CONTENTS

[0006] Therefore, the utility model provides a crystal bar on-line appearance defect detection device, which can quickly clamp, transport and turn over the crystal bar on the production line, and facilitate appearance defect detection.

[0007] To solve the above technical problems, the technical scheme of the utility model is to adopt a crystal bar on-line appearance defect detection device, including the rack which is across on several side by side arranged conveying belt;The rack is provided with the horizontal rail which is across all conveying belt horizontally;Still include the sliding frame which can move along the horizontal rail, the sliding frame is provided with the riser which can lift and the clamp which lifts along with the riser;The clamp includes the clamping end which is arranged axially before and after along the conveying belt;Two clamping ends are located at the same height, and can approach or move away each other for clamping or releasing the crystal bar;Two clamping ends can rotate synchronously, thereby drive the crystal bar being clamped to rotate along the own axis;Still include the detection station for carrying out appearance detection, after the clamp clamps the crystal bar on the conveying belt, follow the sliding frame and convey the crystal bar to the detection station, and drive the crystal bar to rotate when detecting.

[0008] As an improvement, the horizontal rail includes a boss arranged axially along the horizontal rail, the sliding frame is provided with a groove matched with the boss for sliding, the horizontal rail is provided with a parallel translation rack with the boss, the sliding frame is provided with a translation gear engaged with the translation rack, and the translation gear is driven by a translation motor.

[0009] As a further improvement, the sliding frame is provided with a support plate, opposite sides of the riser are provided with sliding rails parallel to the riser, the support plate is provided with a sliding groove matched with the sliding rails for sliding, the riser is further provided with a lifting rack parallel to the sliding rails, the support plate is provided with a lifting gear engaged with the lifting rack, and the lifting gear is driven by a lifting motor.

[0010] As another further improvement, the clamp includes a crossbeam fixed at the bottom of the riser, the clamping end can move along the crossbeam, a lead screw is arranged parallel to the crossbeam, the clamping end is threadedly matched with the lead screw through internal threads, and the internal threads of the two clamping ends are opposite in direction, so that when the lead screw rotates, the two clamping ends move in opposite directions.

[0011] As an improvement, the clamping end includes a disc-shaped base, end faces of the bases of the left and right clamping ends are oppositely arranged, and a soft pad is applied on the end face of the base.

[0012] As an improvement, an annular anti-skid groove is opened on the soft pad.

[0013] As an improvement, a rotating shaft is connected to the rear end of the base, the base is connected with a mounting seat on the clamping end through a bearing, and the rotating shaft is driven by a rotating motor.

[0014] As an improvement, the rotating motor is a servo motor, and the rotating motor drives the rotating shaft to rotate by 90° at a time during detection.

[0015] As an improvement, the detection station is a manual detection station arranged outside the conveying belt.

[0016] As an improvement, the detection station is an automatic visual detection station.

[0017] The utility model has the advantages that:

[0018] The crystal bar online appearance defect detection device has the advantages that the crystal bar is automatically grabbed on the production line and sent to the detection station for detection. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 The utility model discloses a structure schematic diagram.

[0020] Figure 2 The utility model discloses a structure schematic diagram of sliding frame.

[0021] Figure 3 The utility model discloses a structure schematic diagram of stand.

[0022] Figure 4 The utility model discloses a structure schematic diagram of clamp.

[0023] Figure 5 The utility model discloses a structure schematic diagram of clamping end.

[0024] Mark in drawing: 1 frame, 2 horizontal rail, 3 sliding frame, 4 stand, 5 clamp, 6 detection station;

[0025] 21 boss, 22 translation rack, 31 translation gear, 32 support plate, 42 lifting rack, 43 slide rail, 51 crossbeam, 52 lead screw, 53 clamping end, 54 base, 55 soft pad, 56 rotating shaft. DETAILED DESCRIPTION

[0026] In order to make the technical personnel in the field better understand the technical scheme of the utility model, the utility model will be further explained in detail below in combination with specific embodiment.

[0027] For example, Figure 1As shown in the utility model provides a crystal bar online appearance defect detection device, including the rack 1 of cross on several side by side arrangement's conveying belt (not shown in drawing), horizontal arrangement has the horizontal rail 2 of crossing all conveying belt on the rack 1, still include the slide frame 3 of being movable along horizontal rail 2, the slide frame 3 is provided with liftable stand 4 and the clamp 5 of lifting along with stand 4, the clamp 5 includes the clamping end 53 of being set up along the axial front and back of conveying belt, two clamping ends 53 are located at the same height, and can approach each other or away from each other for clamping or loosening crystal bar 100, two clamping ends 53 can synchronous rotation, to drive the crystal bar 100 of being clamped along the rotation of its axis, still include the detection station 6 for carrying out appearance detection, after the clamp 5 clamps the crystal bar 100 on conveying belt, follow slide frame 3 and convey crystal bar 100 to detection station 6, and drive the rotation of crystal bar when detecting.

[0028] The utility model discloses a principle lies in through clamp 5 to the clamping of crystal bar 100, utilize the lifting of stand 4 and lift crystal bar 100, then follow slide frame 3 and move to detection station 6 and detect after.In the process of detecting, in order to detect every side of crystal bar 100, clamp 5 can rotate axially to make crystal bar 100 also rotate to thereby expose every side in detection station 6 before detection for detection.After detection, slide frame 3 drives clamp 5 and sends crystal bar 100 back to conveying belt and conveys to next process down.

[0029] The utility model discloses the conveying belt can be multiple, and clamp 5 is sequentially grabbed from each conveying belt and is conveyed to detection station 6 and detects.It can be foreseen that the time consumed in the whole detection process should match the speed of feeding on multiple conveying belts, avoid causing material congestion.

[0030] As Figure 2 Shown in the utility model, the horizontal rail 2 on the rack 1 includes the boss 21 of being set up along the axial direction of horizontal rail 2, the slide frame 3 is provided with the recess of cooperation sliding with boss 21, the horizontal rail 2 is provided with the parallel translation rack 22 with boss 21, the slide frame 3 is provided with the translation gear 31 of being engaged with translation rack 22, the translation gear 31 is driven by translation motor.Boss 21 and recess cooperate to realize the guiding effect, and the gear and the rack cooperate to accurately position, to ensure that clamp 5 can accurately grab crystal bar 100 on multiple conveying belts.

[0031] As Figure 3As shown in the drawings, in the embodiment, the sliding frame 3 is provided with a support plate 32; opposite sides of the column 4 are provided with slide rails 43 parallel to the column 4, the support plate 32 is provided with slide grooves matched with the slide rails 43; the column 4 is further provided with a lifting rack 42 parallel to the slide rails 43, the support plate 32 is provided with a lifting gear engaged with the lifting rack 42; the lifting gear is driven by a lifting motor. The column 4 is lifted under the cooperation of the lifting rack 42 and the gear, thereby driving the clamp 5 connected to the lower end of the column 4 to lift. The clamp 5 lifts the crystal bar 100 from the conveying belt, which is convenient for conveying and rotating.

[0032] As shown in the drawings, Figure 4 In the embodiment, the clamp 5 includes a cross beam 51 fixed at the bottom of the column 4, the clamping ends 53 can move along the cross beam 51; further includes a lead screw 52 arranged in parallel with the cross beam 51, the clamping ends 53 are threadedly matched with the lead screw 52 through internal threads, and the internal thread directions of the two clamping ends 53 are opposite, so that when the lead screw 53 rotates, the two clamping ends 53 move in opposite directions. The opposite movement directions of the clamping ends 53 mean that they can be close to each other or separated at the same time, thereby clamping or loosening the crystal bar 100. And the clamping achieved by the threaded matching will not rebound even after unloading, so that when the crystal bar 100 is clamped, the clamping of the crystal bar 100 can still be achieved even if the power is lost, thereby avoiding the crystal bar 100 from falling due to power loss.

[0033] As shown in the drawings, Figure 5 In the embodiment, the clamping end 53 includes a disc-shaped base 54, and the base 54 end faces of the left and right two clamping ends 53 are oppositely arranged; the base 54 end face is coated with a soft pad 55. The function of the soft pad 55 is to increase the friction between the crystal bar 100 and the soft pad 55, thereby avoiding the crystal bar 100 from sliding off. And the soft pad 55 can also avoid scratching the crystal bar. Specifically, the soft pad 55 can be made of rubber or other materials. In order to further improve the friction, the soft pad 55 is provided with a ring-shaped anti-skid groove

[0034] In order to realize the rotation of the base 54, the base 54 is connected with a rotating shaft 56 at the rear end, the base 54 is connected with a mounting seat on the clamping end 53 through a bearing; the rotating shaft 56 is driven by a rotating motor. Further, the rotating motor is a servo motor; during detection, the rotating motor drives the rotating shaft 56 to rotate by 90° at a time. The servo motor can accurately control the rotation angle of the rotating shaft, and for a square column-shaped crystal bar, every 90° rotation is just to make the next side face face the detection station, thereby facilitating the detection station to check the appearance defects.

[0035] In the embodiment, as shown in the drawings, Figure 1As shown, the detection station 6 is a manual detection station arranged outside the conveying belt.

[0036] The above is only the preferred embodiment of the present application, it should be pointed out that the above preferred embodiment should not be regarded as limiting the present application, the protection scope of the present application should be limited by the scope defined by the claims. For ordinary skilled in the art, without departing from the spirit and scope of the present application, can also make a number of improvements and refinements, these improvements and refinements should also be regarded as the protection scope of the present application.

Claims

1. A device for detecting appearance defects of a crystal bar on line, characterized by: The utility model provides a kind of appearance detection device for wafer, including the frame that is arranged across several parallelly arranged conveyors;Horizontal direction track is arranged on the frame across all conveyors;It further includes the sliding frame that can move along horizontal direction track, liftable column is arranged on the sliding frame, and clamp is lifted along with column;The clamp includes the clamping end that is arranged axially before and after along the conveyor;Two clamping ends are located at the same height, and can approach each other or away from each other for clamping or releasing wafer;Two clamping ends can be rotated synchronously, so as to drive the wafer being clamped to rotate along its axis;It further includes detection station for carrying out appearance detection, after the clamp clamps wafer on the conveyor, wafer is transported to detection station following the sliding frame, and wafer is rotated when detecting.

2. The apparatus for detecting appearance defects of a crystal bar on line according to claim 1, wherein: The horizontal direction track includes boss arranged axially along horizontal direction track, recess is arranged on the sliding frame and cooperates with the boss to slide;Translation rack is arranged on the horizontal direction track and parallel with the boss, translation gear is arranged on the sliding frame and engages with the translation rack;The translation gear is driven by translation motor.

3. The apparatus for detecting external appearance defects of a crystal bar on line according to claim 1, characterized in that: Supporting plate is arranged on the sliding frame;Two sides of the column are provided with sliding rail parallel with the column, sliding groove is arranged on the supporting plate and cooperates with the sliding rail to slide;Lifting rack is further arranged on the column and parallel with the sliding rail, lifting gear is arranged on the supporting plate and engages with the lifting rack;The lifting gear is driven by lifting motor.

4. The apparatus for detecting external appearance defects of a crystal bar on line according to claim 1, characterized in that: The clamp includes crossbeam fixed at the bottom of column, and the clamping end can move along the crossbeam;It further includes screw rod arranged parallel with the crossbeam, the clamping end is threadedly connected with the screw rod by internal thread, and the internal thread direction of two clamping ends is opposite, so that when the screw rod rotates, two clamping ends move in opposite directions.

5. The apparatus for detecting external appearance defects of a crystal bar on line according to claim 1, wherein: The clamping end includes disc-shaped base, and the end faces of the base of left and right two clamping ends are oppositely arranged;Soft pad is laid on the end face of the base.

6. A crystal bar on-line appearance defect detection device according to claim 5, characterized in that: Anti-skid groove is opened in the soft pad.

7. The apparatus for detecting external appearance defects of a crystal bar on line according to claim 5, wherein: Rotating shaft is connected to the rear end of the base, and the base is connected with mounting seat on the clamping end by bearing;The rotating shaft is driven by rotary motor.

8. The apparatus for detecting appearance defects of a crystal bar on line according to claim 7, wherein: The rotary motor is servo motor;When detecting, rotary motor drives rotating shaft to rotate by 90 degrees each time.

9. The apparatus for on-line appearance defect detection of a crystal bar according to claim 1, characterized in that: The detection station is manual detection station arranged outside the conveyor.

10. The apparatus for on-line appearance defect detection of a crystal bar according to claim 1, characterized in that: The detection station is automatic visual detection station.

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